CN101920963A - Silica powder drying and charging method in trichlorosilane production process - Google Patents
Silica powder drying and charging method in trichlorosilane production process Download PDFInfo
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- CN101920963A CN101920963A CN 201010259600 CN201010259600A CN101920963A CN 101920963 A CN101920963 A CN 101920963A CN 201010259600 CN201010259600 CN 201010259600 CN 201010259600 A CN201010259600 A CN 201010259600A CN 101920963 A CN101920963 A CN 101920963A
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Abstract
The invention provides a silica powder drying and charging method in a trichlorosilane production process. When the method is utilized to dry and charge silica powder, firstly, the silica powder to be dried is added to a silica powder dryer; nitrogen which is heated to 100-120 DEG C is introduced into the dryer holding the silica powder to be dried from the bottom of the silica power dryer, and the nitrogen is bubbled in the dryer to reach a fluidized state approaching boiling; the steam regulating valve of the silica powder dryer is opened to regulate the temperature in the dryer to maintain the temperature to be 110-130 DEG C; the nitrogen carrying a little silica powder enters a silica powder filter to filter off the carried silica powder and then is directly emptied; the filtered silica powder is transferred to a silica powder metering pot; after drying is ended, the silica powder in the dryer is also transferred to the silica powder metering pot; and the silica powder is fed into a fluidized bed through a compressed gas the main components of which are hydrogen and hydrogen chloride. The invention not only can improve the efficiency of the fluidized bed and the conversion efficiency of the silica powder but also can avoid the blockage of a silica powder charging pipeline due to silica powder coking.
Description
Technical field
The present invention relates to a kind of production method of trichlorosilane.
Background technology
Trichlorosilane (SiHCl
3) be the main raw material of preparation high purity polycrystalline silicon.The production method of trichlorosilane commonly used is that hydrogenchloride and silica flour are reacted the generation trichlorosilane in fluidizing furnace now.Silica powder drying and silica flour are reinforced to be the source that trichlorosilane is produced, and the quality of silica flour and water content are related to the size of Synthesis conversion and the important indicator of response situation quality especially.
At present, most of producers all select electrical drying and steam jacket heating etc. for use, and silica flour advance the bed select nitrogen binder and hydrogen chloride gas binder for use, though this kind mode is feasible, but the fluidized-bed reaction transformation efficiency is reduced, may occur situations such as coking in the Reaktionsofen.
Select electrically heated and steam drying silica flour for use, all be that silica flour is dropped in the silica powder drying device, open electrically heated or steam heating, but electrically heated and steam heating all are at appearance or chuck, can make that a large amount of silica flours formation temperature ladder in moisture eliminator is poor, near outer temperature height, low near interior temperature, non-uniform temperature can greatly influence fluidized-bed bed temperature; And the difficult effusion of the moisture that silica flour is steamed in the moisture eliminator, can become piece with the silica flour coking, make the silica flour effective rate of utilization reduce, thereby reduce reaction conversion ratio, make wastage of material or cause the equipment obstruction.
In silica flour is reinforced, factory selects for use direct nitrogen to carry out binder mostly, because nitrogen pressure is big, in reinforced, have elbow and valve owing to pipeline, higher pressure can make silica flour add in the fluidized-bed smoothly, though nitrogen enters fluidized-bed for not influence of reaction, but system is closed cycle, and long-term accumulation can make system's nitrogen more and more, the hydrogen of tail gas recycle will be from new input hydrogenchloride fluidisation bed and chlorine burning synthesising hydrogen in the system, nitrogen is introduced too much, and nitrogen enters hydrogen chloride synthetic furnace with hydrogen, can make that hydrogen and chlorine combustion ratio are unbalance, cause chlorine excessive, chlorine too high levels in the system causes chlorine to be chlorinated hydrogen and introduces fluidized-bed together, burning spray plate, cause the spray plate to stop up, more very be that nitrogen is rare gas element,, make to contain the nitrogen height in the tail gas hydrogen in case sneak into too much, make fray-out of flame when entering the synthetic furnace burning, cause parking completely etc.
Summary of the invention
Problem to be solved by this invention provides silica powder drying and reinforced method in a kind of production process of trichlorosilane.
Silica powder drying and reinforced method comprise the steps: to carry out the drying of silica flour and when reinforced, with in the silica flour adding silica powder drying device to be dried, the silica powder drying device has temperature control equipment earlier with this method in the production process of trichlorosilane provided by the invention; The nitrogen that is heated to 100-120 ℃ is equipped with the moisture eliminator of silica flour to be dried from the feeding of silica powder drying device bottom, and nitrogen is bubbling in moisture eliminator, reaches approximate ebullient fluidized state; Regulate silica powder drying device steam regulating valve, with homo(io)thermism in the moisture eliminator at 110-130 ℃; The nitrogen that carries a small amount of silica flour enters the silica flour strainer and filters out directly emptying behind the silica flour that carries, and filters the silica flour that obtains and changes the silica flour test tank over to; After drying finished, the silica flour in the moisture eliminator was also put into the silica flour test tank, was that hydrogen and hydrogen chloride gas are sent into silica flour in the fluidized-bed by the main component after the compression.
Above-mentioned nitrogen is heated to 100-120 ℃ and can realizes by silicon activating nitrogen gas interchanger.
Heating to gas among the present invention can realize by the steam indirect heating, also can realize by additive method.
Be used for silica flour is sent into the hydrogen and the hydrogen chloride gas of fluidized-bed, wherein hydrogen is from the hydrogen of silica flour in the fluidized-bed and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed.
Silica powder drying and reinforced method in the production process of trichlorosilane provided by the invention, in the silica powder drying device, nitrogen is heated to 110-130 ℃, nitrogen is fully bubbling activation in moisture eliminator, make the silica flour temperature even, and the moisture in the silica flour is taken out of by nitrogen, thereby reaches the purpose of silica flour being carried out heat drying; With main component is the gas binder of hydrogen and hydrogen chloride gas, because after hydrogenchloride and the silica flour reaction, also can generate hydrogen except generating trichlorosilane, that is to say that hydrogenchloride and hydrogen all are the gas in the trichlorosilane synthetic system, particularly, hydrogen is from the hydrogen of silica flour in the fluidized-bed and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed.So system is had no effect.In the actual production, also can come binder with hydrogenchloride that generates in the preceding secondary response and hydrogen.Whole process is efficient, and the time length is short, and fluidized-bed bed temperature is even, and response situation is good.By this kind method drying and binder, fluidized-bed upper, middle and lower temperature variation is even, and the hot water of controlled temperature cooling valve keeps motionless, and it is constant that very fast fluidized-bed temperature keeps, and reaction is good, saves time, the efficient height fluidized-bed reaction efficient height.So-called binder, the motion by gas is transported to the silica flour in the moisture eliminator in the fluidized-bed exactly.
Temperature variation comparatively relaxes in the silica powder drying device in order to make, and behind the feeding nitrogen, by regulating the steam regulating valve of silica powder drying device, the heat-up rate that makes silica flour is for per hour heating up 20-40 ℃.
For the temperature in the better control moisture eliminator, can the temperature in moisture eliminator be elevated to 120 ℃ after, by regulating silica powder drying device steam regulating valve, with homo(io)thermism in the moisture eliminator at 110-120 ℃.
In order to guarantee the effect of silica powder drying, with nitrogen silica flour is carried out the exsiccant time and be no less than 2h.That is to say, temperature maintenance in the moisture eliminator is no less than 2h in the time more than 110 ℃.
After utilizing method of the present invention that silica flour is carried out drying, can carry out the reaction of silica flour and hydrogen chloride gas, produce trichlorosilane according to the method for routine.This method can be: the temperature of reaction of silica flour and hydrogen chloride gas is 280-320 ℃ in the control fluidized-bed, and pressure is 0.08Mpa, and fluidized-bed pressure reduction up and down is 0.025Mpa.So-called fluidized-bed is silica flour and hydrogen chloride gas generation chemical reaction among the present invention, generates the chemical reactor of trichlorosilane.
With method of the present invention to silica flour carry out drying and reinforced after, silica flour and hydrogenchloride react in fluidized-bed, the reaction afterwards transformation efficiency of silica flour is not less than 90%.And in the prior art, the transformation efficiency of silica flour all has only about 85%.
The transformation efficiency of the alleged crude product of the present invention is meant that silica flour in the actual production is converted into the mass ratio of trichlorosilane, and just the element silicon in the silica flour transforms into the mass ratio into the element silicon in the trichlorosilane.
The so-called binder of the present invention is meant the air-flow that the motion by gas forms, and drives the silica flour solid and enters fluidized-bed by the silica flour test tank.
Beneficial effect of the present invention is embodied in: the present invention not only can improve the efficient of fluidized-bed and the transformation efficiency of silica flour, but also can avoid the silica flour coking to cause the obstruction of silica flour feeding tube.
Description of drawings
Fig. 1 is silica powder drying and a reinforced schema in the production process of trichlorosilane.1 is fluidized-bed; 2 is the silica flour strainer; 3 is the silica powder drying device; 4 is the silica flour test tank; 5 is silicon activating nitrogen gas interchanger.
Embodiment
Embodiment 1:
Silica powder drying and reinforced method in a kind of production process of trichlorosilane, carry out the drying of silica flour and when reinforced with this method, earlier silica flour to be dried is added in the silica powder drying device 3, silica powder drying device 3 has temperature control equipment, to be heated to 110-120 ℃ nitrogen by silicon activating nitrogen gas interchanger 5 feeds from silica powder drying device 3 bottoms and is equipped with the moisture eliminator 3 of silica flour to be dried, silica flour is after according to 20-30 ℃ the heat-up rate temperature to 130 ℃ of per hour heating up, temperature in the silica powder drying device 3 is controlled at 120-130 ℃, nitrogen is bubbling in moisture eliminator 3, reaches approximate ebullient fluidized state; The nitrogen that carries a small amount of silica flour enters silica flour strainer 2 and filters out directly emptying behind the silica flour that carries, and filters the silica flour that obtains and enters silica flour test tank 4; Behind nitrogen drying 2h, after drying finishes, silica flour in the moisture eliminator 3 changes silica flour test tank 4 over to, by the main component after the compression is that hydrogen and hydrogen chloride gas are sent into silica flour in the fluidized-bed 11, be used for silica flour is sent into the hydrogen and the hydrogen chloride gas of fluidized-bed 1, wherein hydrogen is from the hydrogen of silica flour in the fluidized-bed 1 and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed 1.
After dry as stated above and reinforced, the silica flour transformation efficiency is 92.0%.
Silica powder drying and reinforced method in a kind of production process of trichlorosilane, carry out the drying of silica flour and when reinforced with this method, earlier silica flour to be dried is added in the silica powder drying device 3, silica powder drying device 3 has temperature control equipment, to be heated to 100-110 ℃ nitrogen by silicon activating nitrogen gas interchanger 5 feeds from silica powder drying device 3 bottoms and is equipped with the moisture eliminator 3 of silica flour to be dried, silica flour is after according to 20-30 ℃ the heat-up rate temperature to 120 ℃ of per hour heating up, temperature in the silica powder drying device 3 is controlled at 110-120 ℃, nitrogen is bubbling in moisture eliminator 3, reaches approximate ebullient fluidized state; The nitrogen that carries a small amount of silica flour enters silica flour strainer 2 and filters out directly emptying behind the silica flour that carries, and filters the silica flour that obtains and enters silica flour test tank 4; Behind nitrogen drying 2h, after drying finishes, silica flour in the moisture eliminator 3 changes silica flour test tank 4 over to, by the main component after the compression is that hydrogen and hydrogen chloride gas are sent into silica flour in the fluidized-bed 11, be used for silica flour is sent into the hydrogen and the hydrogen chloride gas of fluidized-bed 1, wherein hydrogen is from the hydrogen of silica flour in the fluidized-bed 1 and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed 1.
After dry as stated above and reinforced, the silica flour transformation efficiency is 90.8%.
Silica powder drying and reinforced method in a kind of production process of trichlorosilane, carry out the drying of silica flour and when reinforced with this method, earlier silica flour to be dried is added in the silica powder drying device 3, silica powder drying device 3 has temperature control equipment, to be heated to 110-120 ℃ nitrogen by silicon activating nitrogen gas interchanger 5 feeds from silica powder drying device 3 bottoms and is equipped with the moisture eliminator 3 of silica flour to be dried, silica flour is after according to 30-40 ℃ the heat-up rate temperature to 130 ℃ of per hour heating up, temperature in the silica powder drying device 3 is controlled at 120-130 ℃, nitrogen is bubbling in moisture eliminator 3, reaches approximate ebullient fluidized state; The nitrogen that carries a small amount of silica flour enters silica flour strainer 2 and filters out directly emptying behind the silica flour that carries, and filters the silica flour that obtains and enters silica flour test tank 4; Behind nitrogen drying 2h, after drying finishes, silica flour in the moisture eliminator 3 changes silica flour test tank 4 over to, by the main component after the compression is that hydrogen and hydrogen chloride gas are sent into silica flour in the fluidized-bed 11, be used for silica flour is sent into the hydrogen and the hydrogen chloride gas of fluidized-bed 1, wherein hydrogen is from the hydrogen of silica flour in the fluidized-bed 1 and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed 1.
After dry as stated above and reinforced, the silica flour transformation efficiency is 90.5%.
Embodiment 4
Silica powder drying and reinforced method in a kind of production process of trichlorosilane, carry out the drying of silica flour and when reinforced with this method, earlier silica flour to be dried is added in the silica powder drying device 3, silica powder drying device 3 has temperature control equipment, to be heated to 100-110 ℃ nitrogen by silicon activating nitrogen gas interchanger 5 feeds from silica powder drying device 3 bottoms and is equipped with the moisture eliminator 3 of silica flour to be dried, silica flour is after according to 30-40 ℃ the heat-up rate temperature to 120 ℃ of per hour heating up, temperature in the silica powder drying device 3 is controlled at 110-120 ℃, nitrogen is bubbling in moisture eliminator 3, reaches approximate ebullient fluidized state; The nitrogen that carries a small amount of silica flour enters silica flour strainer 2 and filters out directly emptying behind the silica flour that carries, and filters the silica flour that obtains and enters silica flour test tank 4; Behind nitrogen drying 2h, after drying finishes, silica flour in the moisture eliminator 3 changes silica flour test tank 4 over to, by the main component after the compression is that hydrogen and hydrogen chloride gas are sent into silica flour in the fluidized-bed 11, be used for silica flour is sent into the hydrogen and the hydrogen chloride gas of fluidized-bed 1, wherein hydrogen is from the hydrogen of silica flour in the fluidized-bed 1 and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed 1.
After dry as stated above and reinforced, the silica flour transformation efficiency is 90.0%.
Silica powder drying and reinforced method in a kind of production process of trichlorosilane, carry out the drying of silica flour and when reinforced with this method, earlier silica flour to be dried is added in the silica powder drying device 3, silica powder drying device 3 has temperature control equipment, to be heated to 100-120 ℃ nitrogen by silicon activating nitrogen gas interchanger 5 feeds from silica powder drying device 3 bottoms and is equipped with the moisture eliminator 3 of silica flour to be dried, silica flour is after according to 20-40 ℃ the heat-up rate temperature to 130 ℃ of per hour heating up, temperature in the silica powder drying device 3 is controlled at 110-130 ℃, nitrogen is bubbling in moisture eliminator 3, reaches approximate ebullient fluidized state; The nitrogen that carries a small amount of silica flour enters silica flour strainer 2 and filters out directly emptying behind the silica flour that carries, and filters the silica flour that obtains and enters silica flour test tank 4; Behind nitrogen drying 2h, after drying finishes, silica flour in the moisture eliminator 3 changes silica flour test tank 4 over to, by the main component after the compression is that hydrogen and hydrogen chloride gas are sent into silica flour in the fluidized-bed 11, be used for silica flour is sent into the hydrogen and the hydrogen chloride gas of fluidized-bed 1, wherein hydrogen is from the hydrogen of silica flour in the fluidized-bed 1 and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed 1.
After dry as stated above and reinforced, the silica flour transformation efficiency is 91.2%.
Embodiment 6
Silica powder drying and reinforced method in a kind of production process of trichlorosilane, carry out the drying of silica flour and when reinforced with this method, earlier silica flour to be dried is added in the silica powder drying device 3, silica powder drying device 3 has temperature control equipment, to be heated to 100-120 ℃ nitrogen by silicon activating nitrogen gas interchanger 5 feeds from silica powder drying device 3 bottoms and is equipped with the moisture eliminator 3 of silica flour to be dried, silica flour is after according to 20-40 ℃ the heat-up rate temperature to 120 ℃ of per hour heating up, temperature in the silica powder drying device 3 is controlled at 110-120 ℃, nitrogen is bubbling in moisture eliminator 3, reaches approximate ebullient fluidized state; The nitrogen that carries a small amount of silica flour enters silica flour strainer 2 and filters out directly emptying behind the silica flour that carries, and filters the silica flour that obtains and enters silica flour test tank 4; Behind nitrogen drying 2h, after drying finishes, silica flour in the moisture eliminator 3 changes silica flour test tank 4 over to, by the main component after the compression is that hydrogen and hydrogen chloride gas are sent into silica flour in the fluidized-bed 11, be used for silica flour is sent into the hydrogen and the hydrogen chloride gas of fluidized-bed 1, wherein hydrogen is from the hydrogen of silica flour in the fluidized-bed 1 and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed 1.
After dry as stated above and reinforced, the silica flour transformation efficiency is 90.6%.
Embodiment 7 (comparative example)
By the traditional drying method silica flour is carried out drying, steam heated method heats silica flour, the 200kg silica flour reaches 110 ℃ in 2h left and right sides core temperature, and infrared thermometer is surveyed the silica flour exospheric temperature and reached 140 ℃, is pressed in the fluidized-bed with hydrogenchloride and hydrogen tail gas.In the reaction process, the fluidized-bed temperature fluctuation is bigger, upper, middle and lower temperature variation difference is big, once reaching upper temp and bottom difference greater than 80 ℃, the hot water cooling valve operation of controlled temperature is frequent, silica flour lumps easily, and it is low easily to cause the silica flour filling tube to stop up effective silica flour amount, and reaction conversion ratio has only 83%.
Embodiment 8 (comparative example)
Select the nitrogen binder for use, sneak into nitrogen in the system, practice shows, behind the 24h, system pressure is significantly improved, hydrogen chloride synthetic furnace chlorine and combustion of hydrogen flame need to improve hydrogen flowing quantity in the tail gas in continuous variation, and operation is frequent, and the tail-gas compressor load is big, hydrogen cloride concentration step-down, too much nitrogen are taken away a large amount of heats in the fluidized-bed, and fluidized-bed reaction efficient is fallen, silica flour transformation efficiency＜85%.
Claims (5)
1. silica powder drying and reinforced method in the production process of trichlorosilane, this method comprise the steps: to carry out the drying of silica flour and when reinforced, with in the silica flour adding silica powder drying device to be dried, the silica powder drying device has temperature control equipment earlier with this method; The nitrogen that is heated to 100-120 ℃ is equipped with the moisture eliminator of silica flour to be dried from the feeding of silica powder drying device bottom, and nitrogen is bubbling in moisture eliminator, reaches approximate ebullient fluidized state; Regulate silica powder drying device steam regulating valve, with homo(io)thermism in the moisture eliminator at 110-130 ℃; The nitrogen that carries a small amount of silica flour enters the silica flour strainer and filters out directly emptying behind the silica flour that carries, and filters the silica flour that obtains and changes the silica flour test tank over to; After drying finished, the silica flour in the moisture eliminator was also put into the silica flour test tank, was that hydrogen and hydrogen chloride gas are sent into silica flour in the fluidized-bed by the main component after the compression.
2. according to silica powder drying in the described production process of trichlorosilane of claim 1 and reinforced method, it is characterized in that: the hydrogen and the hydrogen chloride gas that are used for silica flour is sent into fluidized-bed, wherein hydrogen is from the hydrogen of silica flour in the fluidized-bed and the generation of hydrogen chloride gas precursor reactant, and hydrogen chloride gas is silica flour and the remaining hydrogen chloride gas of hcl reaction in the fluidized-bed.
3. according to silica powder drying in claim 1 or the 2 described production process of trichlorosilane and reinforced method, it is characterized in that: regulate silica powder drying device steam regulating valve, the heat-up rate of control silica flour is for per hour heating up 20-40 ℃.
4. according to silica powder drying in claim 1 or the 2 described production process of trichlorosilane and reinforced method, it is characterized in that: when temperature in the moisture eliminator after being raised to 120 ℃, by regulating silica powder drying device steam regulating valve, with homo(io)thermism in the moisture eliminator at 110-120 ℃.
5. according to silica powder drying in the described production process of trichlorosilane of claim 1 and reinforced method, it is characterized in that: with nitrogen silica flour is carried out the exsiccant time and be no less than 2h.
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| CN 201010259600 CN101920963A (en) | 2010-08-23 | 2010-08-23 | Silica powder drying and charging method in trichlorosilane production process |
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| CN 201010259600 CN101920963A (en) | 2010-08-23 | 2010-08-23 | Silica powder drying and charging method in trichlorosilane production process |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102530958A (en) * | 2011-12-21 | 2012-07-04 | 河南尚宇新能源股份有限公司 | Device and method for preparing trichlorosilane |
| CN103408022A (en) * | 2013-07-08 | 2013-11-27 | 昆明冶研新材料股份有限公司 | Silicon powder conveying equipment and system with same for synthesizing trichlorosilane |
| CN105712304A (en) * | 2014-12-02 | 2016-06-29 | 新特能源股份有限公司 | Apparatus for recovering nitrogen having been used for conveying of silicon powder |
| CN106006648A (en) * | 2016-05-17 | 2016-10-12 | 山东瑞川硅业有限公司 | Method for preparing trichlorosilane |
| CN107244675A (en) * | 2017-05-16 | 2017-10-13 | 江苏大学 | A kind of method for improving trichlorosilane selectivity |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101125654A (en) * | 2007-09-04 | 2008-02-20 | 浙江开化合成材料有限公司 | Large-scale fluidized bed reactor used for trichlorosilane production |
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2010
- 2010-08-23 CN CN 201010259600 patent/CN101920963A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101125654A (en) * | 2007-09-04 | 2008-02-20 | 浙江开化合成材料有限公司 | Large-scale fluidized bed reactor used for trichlorosilane production |
Non-Patent Citations (1)
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| 《氯碱工业》 20100228 黄同林 三氯氢硅生产工艺的优化 第28-30页 1-5 第46卷, 第2期 2 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102530958A (en) * | 2011-12-21 | 2012-07-04 | 河南尚宇新能源股份有限公司 | Device and method for preparing trichlorosilane |
| CN103408022A (en) * | 2013-07-08 | 2013-11-27 | 昆明冶研新材料股份有限公司 | Silicon powder conveying equipment and system with same for synthesizing trichlorosilane |
| CN103408022B (en) * | 2013-07-08 | 2016-03-30 | 昆明冶研新材料股份有限公司 | Silica flour transmission equipment and there is its system of synthesizing trichlorosilane |
| CN105712304A (en) * | 2014-12-02 | 2016-06-29 | 新特能源股份有限公司 | Apparatus for recovering nitrogen having been used for conveying of silicon powder |
| CN105712304B (en) * | 2014-12-02 | 2018-03-13 | 新特能源股份有限公司 | A kind of device for being reclaimed the nitrogen for having conveyed silica flour |
| CN106006648A (en) * | 2016-05-17 | 2016-10-12 | 山东瑞川硅业有限公司 | Method for preparing trichlorosilane |
| CN107244675A (en) * | 2017-05-16 | 2017-10-13 | 江苏大学 | A kind of method for improving trichlorosilane selectivity |
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Inventor after: Xiao Junping Inventor after: Wang Du Inventor after: Feng Qionghua Inventor before: Xiao Junping |
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Application publication date: 20101222 |