CN101916767B - Method for manufacturing X-ray detector - Google Patents
Method for manufacturing X-ray detector Download PDFInfo
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- CN101916767B CN101916767B CN2010102405428A CN201010240542A CN101916767B CN 101916767 B CN101916767 B CN 101916767B CN 2010102405428 A CN2010102405428 A CN 2010102405428A CN 201010240542 A CN201010240542 A CN 201010240542A CN 101916767 B CN101916767 B CN 101916767B
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- ray detector
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Abstract
The invention provides a method for manufacturing an X-ray detector, which comprises the following steps: etching off a thin layer of fiber core glass material on the big end face of a light cone, thereby forming a compact shallow layer well pit group; filling a ray solid detecting material in the compact shallow layer well pit group, thereby forming a crystal conversion screen; coating a crystal conversion screen front protective layer on the surface of the crystal conversion screen; and coupling the small end face of the light cone with a charge-coupled device (CCD). The scheme of the invention can enhance the image quality.
Description
Technical field
The present invention relates to the X ray Detection Techniques, particularly a kind of manufacture method of X-ray detector.
Background technology
Along with the development of nuclear industry technology and computer science and technology, X ray has obtained extensive use in fields such as industrial detection and medical diagnosiss.Utilize X-ray detector, can realize the detection and the imaging of X ray, wherein, optical conversion efficiencies, counting rate, spatial resolution, detectivity and easy operating property etc. are the several main factors that influences the X-ray detector performance.
Existing X-ray detector mainly adopts following two kinds of structures, i.e. X ray crystal conversion screen+set of lenses or fiber light cone+optical imagery device.Since have volume little, in light weight, be convenient to integrated and advantage such as debugging is convenient, the application of fiber light cone+this structure of optical imagery device is more general, can be widely used in the occasions such as detection of circuit chip, heavy castings cavity body structure.
Fig. 1 is the composition structural representation of existing X-ray detector.This X-ray detector is the structure of fiber light cone+optical imagery device.As shown in Figure 1; Mainly comprise: overcoat 13, crystal conversion screen and light cone large end face coupling layer 14, light cone 15, light cone small end face and photoelectric coupled device (CCD, Charge-coupled Device) coupling layer 16, CCD protection window 17 and CCD 18 after the preceding overcoat 11 of crystal conversion screen, crystal conversion screen 12, the crystal conversion screen.Usually adopt technologies such as crucible growth or vapor deposition, utilize the ray solid detecting material, like NaI, CsI, CdWO
4Be made into crystal conversion screen 12 Deng scintillation crystal, through light cone 15 crystal conversion screen 12 being coupled with CCD 18 then constitutes X-ray detector shown in Figure 1.
Though X-ray detector shown in Figure 1 have volume little, in light weight, be convenient to integrated and advantage such as debugging is convenient, in practical application, also can have certain problem, as:
1) overcoat 13, crystal conversion screen and light cone large end face coupling layer 14, light cone small end face and CCD coupling layer 16 and CCD protection window 17 etc. just are used to play protection or coupling after the preceding overcoat 11 of crystal conversion screen, the crystal conversion screen; Detection and imaging to X ray do not have help; The existence of these " unnecessary " boundary layers can cause the loss of effective luminous flux, and then causes the sensitivity of X-ray detector and spatial resolution to reduce; That the spatial resolution of present domestic X-ray detector is lower than 5 lines mostly is right/millimeter (black and white line that can obviously distinguish on every millimeter unit length is to being lower than 5 pairs);
2) when technologies such as adopting crucible growth or vapor deposition was made crystal conversion screen 12, scintillation crystal was made into the crystallite rod structure usually; On the one hand, might there be optical crosstalk between the adjacent micro crystal column, thereby causes light scattering and halation; On the other hand, the crystallite post can with light cone 15 in become six shapes to arrange fiber core glass material have the dislocation coupling, thereby cause optical coupling to distort.
Above-mentioned 1) and 2) image quality decrease after said problem all can cause forming images in practical application, therefore must try every possible means to overcome.
Summary of the invention
In view of this, main purpose of the present invention is to provide a kind of manufacture method of X-ray detector, can improve picture quality.
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of manufacture method of X-ray detector comprises:
Erode the skim fiber core glass material of light cone large end face, form a fine and close shallow-layer well crowd;
In said fine and close shallow-layer well crowd, fill the ray solid detecting material, form crystal conversion screen;
Overcoat before said crystal transition screen surfaces full-filling crystal conversion screen;
Light cone small end face and photoelectric coupled device CCD are coupled.
Preferably, said light cone small end face and CCD are coupled comprises:
Remove the protection window of said CCD photosurface;
CCD photosurface behind said light cone small end face and the removal protection window is coupled.
Preferably, said ray solid detecting material is a scintillation crystal.
It is thus clear that, adopt technical scheme of the present invention, erode the skim fiber core glass material of light cone large end face; And fill that the ray solid detecting material forms crystal conversion screen and at crystal transition screen surfaces full-filling overcoat, then, photosurface and the light cone small end face of CCD directly is coupled; Thereby reduced the boundary layer of " unnecessary "; Reduce the loss of effective luminous flux, and then improved the sensitivity and the spatial resolution of X-ray detector, improved picture quality; And; In the scheme according to the invention, through eroding the fiber core glass material of light cone large end face, and fill the ray solid detecting material and form crystal conversion screen; Therefore can not form the crystallite rod structure; Can there be the dislocation coupling yet, thereby have avoided light scattering and phenomenons such as halation and optical coupling distortion, further improve picture quality.
Description of drawings
Fig. 1 is the composition structural representation of existing X-ray detector.
Fig. 2 is the flow chart of the manufacture method embodiment of X-ray detector of the present invention.
Fig. 3 is the composition structural representation of the X-ray detector produced according to method shown in Figure 2.
Embodiment
To the problem that exists in the prior art, a kind of manufacture method of brand-new X-ray detector is proposed among the present invention, can improve picture quality.
For make technical scheme of the present invention clearer, understand, below with reference to the accompanying drawing embodiment that develops simultaneously, scheme according to the invention is done to specify further.
Fig. 2 is the flow chart of the manufacture method embodiment of X-ray detector of the present invention.As shown in Figure 2, may further comprise the steps:
Step 21: erode the skim fiber core glass material of light cone large end face, form a fine and close shallow-layer well crowd.
In practical application; Light cone mainly by the high fiber core glass material of refractive index and refractive index low two-layer composition of fibre sheath glass material (inside and outside two-layer; The outside is the fibre sheath glass material), specifically forming structure and how making light cone is prior art.In this step, erode the skim fiber core glass material of light cone large end face, keep the fibre sheath glass material, form a fine and close shallow-layer well crowd.
Experiment showed, that the skim fiber core glass material that erodes the light cone large end face does not make significant difference to the detection and the imaging of X ray.
Step 22: in fine and close shallow-layer well crowd, fill the ray solid detecting material, form crystal conversion screen.
Said ray solid detecting material can be scintillation crystal, like NaI, CsI, CdWO
4Deng.
Step 23: overcoat before crystal transition screen surfaces full-filling crystal conversion screen.
In this step,, promptly form the preceding overcoat of crystal conversion screen at crystal transition screen surfaces full-filling overcoat.
Step 24: light cone small end face and CCD are coupled.
For CCD, when it dispatched from the factory, its photosurface had the protection window usually; Be used for CCD is protected, in this step, in order to reduce the loss of effective luminous flux; Can remove the protection window of CCD photosurface earlier, then the CCD photosurface behind light cone small end face and the removal protection window is coupled.
The concrete realization of technologies such as said burn into filling of above-mentioned each step and full-filling is known in this field, repeats no more.
In addition, the thickness of overcoat etc. all can be decided according to the actual requirements before the thickness of the above-mentioned fiber core glass material that erodes, crystal conversion screen and the crystal conversion screen.
Fig. 3 is the composition structural representation of the X-ray detector produced according to method shown in Figure 2.As shown in Figure 3, mainly comprise: overcoat 31, crystal conversion screen 32, light cone 33, light cone small end face and CCD coupling layer 34 and CCD 35 before the crystal conversion screen.Can find out, compare that X-ray detector shown in Figure 3 has lacked the boundary layer of overcoat 13, crystal conversion screen and light cone large end face coupling layer 14 after the crystal conversion screen and CCD protection window 17 these three " unnecessary " with existing X-ray detector shown in Figure 1.
In a word, adopt technical scheme of the present invention, erode the skim fiber core glass material of light cone large end face; And fill that the ray solid detecting material forms crystal conversion screen and at crystal transition screen surfaces full-filling overcoat, then, photosurface and the light cone small end face of CCD directly is coupled; Thereby reduced the boundary layer of " unnecessary "; Reduce the loss of effective luminous flux, and then improved the sensitivity and the spatial resolution of X-ray detector, improved picture quality; And; In the scheme according to the invention, through eroding the fiber core glass material of light cone large end face, and fill the ray solid detecting material and form crystal conversion screen; Therefore can not form the crystallite rod structure; Can there be the dislocation coupling yet, thereby have avoided light scattering and phenomenons such as halation and optical coupling distortion, further improve picture quality.
In addition, it is inner that the crystal conversion screen in the scheme according to the invention is built in the light cone large end face, becomes one with light cone, makes that final X-ray detector volume is littler, structure is more firm.
Have again; Because the volume of X-ray detector according to the invention is littler; Spatial resolution is higher; Therefore range of application will more extensive, can't penetrate fully and existing X-ray detector can't be inserted fields such as limited archaeology in inner large-scale cavity body foundry goods single wall detection, space and universe survey of deep space such as the detection that can be applicable to fine structure, low energy ray.
The above is merely preferred embodiment of the present invention, and is in order to restriction the present invention, not all within spirit of the present invention and principle, any modification of being made, is equal to replacement, improvement etc., all should be included within the scope that the present invention protects.
Claims (3)
1. the manufacture method of an X-ray detector is characterized in that, this method comprises:
Erode the skim fiber core glass material of light cone large end face, form a fine and close shallow-layer well crowd;
In said fine and close shallow-layer well crowd, fill the ray solid detecting material, form crystal conversion screen;
Overcoat before said crystal transition screen surfaces full-filling crystal conversion screen;
Light cone small end face and photoelectric coupled device CCD are coupled.
2. the manufacture method of X-ray detector according to claim 1 is characterized in that, said light cone small end face and CCD are coupled comprises:
Remove the protection window of said CCD photosurface;
CCD photosurface behind said light cone small end face and the removal protection window is coupled.
3. the manufacture method of X-ray detector according to claim 1 and 2 is characterized in that, said ray solid detecting material is a scintillation crystal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102405428A CN101916767B (en) | 2010-07-27 | 2010-07-27 | Method for manufacturing X-ray detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102405428A CN101916767B (en) | 2010-07-27 | 2010-07-27 | Method for manufacturing X-ray detector |
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| Publication Number | Publication Date |
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| CN101916767A CN101916767A (en) | 2010-12-15 |
| CN101916767B true CN101916767B (en) | 2012-03-07 |
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| CN2010102405428A Expired - Fee Related CN101916767B (en) | 2010-07-27 | 2010-07-27 | Method for manufacturing X-ray detector |
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| CN102547150B (en) * | 2012-02-15 | 2016-03-09 | 中国科学院高能物理研究所 | A kind of X-ray camera and manufacture method thereof |
| CN104538427B (en) * | 2014-12-26 | 2018-04-17 | 北京维信诺科技有限公司 | A kind of organic light-emitting display device and preparation method thereof |
| CN105628721A (en) * | 2015-12-25 | 2016-06-01 | 中国科学院高能物理研究所 | Back reflection structure digital X-ray crystal orientation device and X-ray detector thereof |
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| DE10139234A1 (en) * | 2001-08-09 | 2003-02-27 | Philips Corp Intellectual Pty | X-ray detector with heating device |
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