CN102547150B - A kind of X-ray camera and manufacture method thereof - Google Patents
A kind of X-ray camera and manufacture method thereof Download PDFInfo
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- CN102547150B CN102547150B CN201210034245.7A CN201210034245A CN102547150B CN 102547150 B CN102547150 B CN 102547150B CN 201210034245 A CN201210034245 A CN 201210034245A CN 102547150 B CN102547150 B CN 102547150B
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Abstract
The invention discloses a kind of X-ray camera and manufacture method thereof, it is coupled to form by light cone and CCD or CMOS camera, and the major part of light cone is followed successively by needle-like CsI crystal, damp-proof membrane, aluminium film or silicon nitride film; Described light cone is on the basis of low-refraction cladding on the high index of refraction core material cover of common light cone, put black material glass or lead silicate glass sleeve pipe that thermophysical property matches again, fiber array cylinder is produced according to the front road technique manufacturing fibre optic faceplate, thereafter draw out light cone according to the ratio of concentric reducer, wherein need hydrogen reduction process with the light cone that lead silicate glass sleeve pipe makes; After the major part of above-mentioned light cone produces needle-like CsI crystal, damp-proof membrane, aluminium film or silicon nitride film successively, the photosurface of the microcephaly of light cone and described camera is passed through optical cement coupling.The X-ray camera minimum pixel made thus reaches 5 μm, resolution is good at more than 30lp/mm, MTF.
Description
Technical field
The invention belongs to x-ray imaging technical field, relate generally to a kind of high-resolution X-ray camera and manufacture method thereof, refer more particularly to light-cone QCD sum rules CCD or CMOS camera and manufacture method thereof.
Background technology
Since roentgen roentgen in 1895 finds X ray, X-ray and dynamic imaging are widely used in medical science and industrial image field.Along with the quality of CCD and cmos device is constantly soaring and in the extensive use of industrial circle, high-resolution, digitlization the X ray CCD of remote diagnosis can be realized or CMOS camera is that imaging of medical and industrial non-destructive detection provide strong technical guarantee, and likely replace Traditional x-ray imaging device.Medical imaging field calls DR (DigitalRadiography) the equipment that X ray converts digitized video to, and it is the general name of all kinds of digital radiography technology, comprises three major types as shown in Figure 1.It is wherein transition material with cesium iodide, with light cone (be called for short FOT) or optical fibre face plate (being called for short fibre faceplate or FOP) for light-conductive media, and with the DR system that CCD or CMOS is signal transition material, development in recent years is rapid, namely light cone is adopted to be substrate, X ray transition material is made in its one end, the other end is coupled with CCD or CMOS camera direct-coupling or with CCD or CMOS (ICCD or the ICMOS) camera of image enhaucament, to make high-resolution X-ray CCD camera, owing to have employed the cesium iodide light-emitting flash body of acicular texture, it can effective absorption of x-rays, and make the response spectrum of luminescent spectrum and CCD close, improve the utilance of X ray, light scattering effect is decreased by physics and technological means, improve sharpness and the definition of image, thus the dental examination of medical aspect can be widely used in, oral cavity panorama detects, the Non-Destructive Testing of the precision component of mammary gland and stomach inspection and industrial circle, the fields such as electronic circuit or integrated circuit detection.
Bin Song photon Co., Ltd. of Japan, once be evaporation needle-like CsI (Tl) scintillation crystal on FOP or FOT of 6 μm at fiber filament diameter, thereafter organic film is made, to protect this scintillator not by deliquescence, wherein in order to obtain higher resolution, FOP+CsI (Tl) conversion screen that must be cost with sacrificial section conversion efficiency, when the thickness of CsI (Tl) is 150 μm, its relative output brightness is 105%, obtain the resolution of 22Lp/mm, and when the thickness of CsI (Tl) is 600 μm, its relative output brightness is 180%, resolution then drops to 13Lp/mm, table 1 is the Specifications of its standardized product.
Table 1: the technical indicator of the several prods of Bin Song photon Co., Ltd. of Japan
* be a light cone.
Also there are similar products in other companies external, common FOP or FOT due to what all adopt, when particularly making light cone, thin portion between concentric reducer, because light is in core material transmitting procedure, may cause the destruction of total reflection condition on core skin interface, part light enters adjacent monofilament by cladding, cause optical crosstalk, cause resolution to decline thus.And when the thickness of CsI (Tl) increases, its conversion efficiency is also along with increase, and luminous point distribution increases, and the directional spreding entered in optical fiber becomes more complicated, also causes resolution to decline thus.
In real work, when requiring after by above-mentioned conversion screen and CCD or CMOS camera direct-coupling, higher resolution is obtained as required, just being sacrificed its conversion efficiency is cost, often at CCD or CMOS (i.e. ICCD or ICMOS) that the small end coupling of light cone strengthens, as the detection of the laser-beam drilling machine for printed circuit board (PCB), like this, cause manufacturing cost to increase, the transfer function (MTF) of reflection imaging comprehensive quality declines.
Summary of the invention
The technical problem to be solved in the present invention is: the actual conditions that simultaneously can not obtain high-resolution and high conversion efficiency for above-mentioned X-ray camera, the invention provides a kind of modified model light cone and manufacture method thereof, and CsI (Tl) scintillation crystal of the thicker acicular texture of evaporation, solve the optical crosstalk between fibre single thread.
For solving the problems of the technologies described above, the invention provides a kind of X-ray camera, be coupled to form by light cone and CCD or CMOS camera, the other end of light cone is coated with needle-like CsI crystal, damp-proof membrane, aluminium film or silicon nitride film successively, the fine glass fibre of each root of described light cone draws on the rear basis formed common by high index of refraction core rod and low-refraction skin glass tube, outward flange is all surrounded by black glass cladding, and the thickness of foreskin is 1/8 ~ 1/5 of fibre diameter; In order to ensure that the X-ray camera made thus has higher conversion efficiency under different incident X-ray energy, according to the energy range of detecting x-ray, the thickness of CsI (Tl) scintillation crystal can be determined.As worked as its energy range between 20Kev ~ 140Kev, then CsI (Tl) the scintillation crystal thickness of acicular texture should control within the scope of 150 ~ 1000 μm, when X-ray energy scope 40 ~ 90Kev it, then its thickness can be controlled between 300 ~ 600 μm.
Technical scheme for the manufacture of above-mentioned X-ray camera is, adopts following steps to realize, that is:
(1) the high index of refraction core rod making fibre optic faceplate is enclosed within low-refraction skin glass tube, again the glass tube rod packaged is enclosed within exoperidium glass tube, described exoperidium glass tube is the black glass at visible region transmitance≤1% that the coefficient of expansion and other thermophysical property and described high index of refraction core rod and low-refraction skin glass tube match, described high index of refraction core rod, gap≤0.4mm between low-refraction skin glass tube and exoperidium glass tube, described high index of refraction core rod, the size of low-refraction skin glass tube and exoperidium glass tube is by the requirement of final finished, design according to calculating or process experiences in advance.According to making the technique of fibre optic faceplate, namely through drawing monofilament, in hexagonal mould, arrange monofilament and black plug silk forms multifilament rod, draws multifilament, arranges multifilament, draws secondary multifilament, row's screen, pressure screen, section, the technique such as round as a ball, produce fiber array cylinder;
(2) according to predetermined concentric reducer ratio, light cone is drawn out;
(3) microcephaly is worked into the size needing CCD or the CMOS camera chip photosurface size of coupling identical, and by concentric reducer grinding, polishing;
(4) by the above-mentioned light cone processed, be placed in vacuum coating equipment, according to the technique plated film of evaporation needle-like CsI crystal, i.e. evaporation CsI crystal, and monitor thicknesses of layers, after thickness reaches regulation requirement, stop plated film, take out;
(5) make the technique of damp-proof membrane according to electronic devices and components, the above-mentioned CsI crystal plated makes damp-proof membrane, note protection microcephaly, guarantee that microcephaly is not evaporated to this damp-proof membrane;
(6) magnetron sputtering technique is adopted, AM aluminum metallization film or silicon nitride film on damp-proof membrane, thickness: 90nm ~ 500nm;
(7) in ultra-clean chamber, open the glass window in CCD or CMOS camera chip, and coat optical coupled glue at the little end surface of above-mentioned light cone, according to the coupling technique of light cone and CCD, by above-mentioned light-cone QCD sum rules on the photosurface of said chip, after solidification, cement further by structure glue, complete manufacture overall process.
Exoperidium glass tube in described step (1) is changed into the lead silicate glass pipe of same dimension, the coefficient of expansion of described lead silicate glass pipe and other thermophysical property and described high index of refraction core rod and low-refraction skin glass tube match, after completing according to above-mentioned steps (1) ~ (3), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, the described light cone processed is burnt black, performs the corresponding steps of step (4) ~ (7) thereafter.
As plumbous in employing or Lead silicate glass pipe substitute the above-mentioned lead silicate glass pipe as exoperidium, the coefficient of expansion and other thermophysical property of described middle lead or Lead silicate glass pipe also must match with described high index of refraction core rod and low-refraction skin glass tube, after completing according to above-mentioned steps (1) ~ (3), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, described special light cone is burnt black, performs the corresponding steps of step (4) ~ (7) thereafter.
By lead silicate glass above-mentioned for the skin glass replacement manufacturing microchannel plate, produce glass tube as outsourcing leather hose, find hydrogen reduction treatment process in advance, make its transmitance≤1%, meeting under the condition that the coefficient of expansion and other thermophysical property and described high index of refraction core rod and low-refraction skin glass tube matches, in other words, under the condition identical with other thermophysical property with the coefficient of expansion of described middle lead or Lead silicate glass, above-mentioned technique also can be taked to make light cone required by this camera.
Use above-mentioned Process of Hydrogen Reduction, using the lead silicate glass pipe as exoperidium glass tube, also middle lead or Lead silicate glass pipe or microchannel slab glass tube is comprised, can consider respectively in the different phase of step (1), according to pre-determined reduction treatment technique, namely the technique of transmitance≤1% of this glass is made, select first this glass tube to be burnt black before wire drawing, or to the monofilament drawn, or according to above-mentioned Process of Hydrogen Reduction, black process is burnt to multifilament, thereafter the processing step of postorder is performed, and between step (3) to step (4), no longer carry out hydrogen reduction process, until complete the overall process of technique.
Above-mentioned technique can ensure that done glass fiber single filament reaches 5 μm, and needle-like CsI crystal also can accomplish the unit of 5 μm, the pixel of 5 μm can be obtained thus, add certain black exoperidium, consider other factors, the resolution of the X-ray camera be made up of this light cone at least can accomplish 30lp/mm.
Overall technology effect of the present invention is embodied in the following aspects: the light cone that (1) makes owing to have employed improving technique, it is on input end face, cut off by black glass between monofilament, blocked the optical crosstalk from around needle-like CsI (Tl) scintillation crystal; (2) have suffered on the path of transmission at light cone, due to black glass absorbs can transmissible stray light from periphery monofilament, further increase resolution, improve the modulation transfer function (MTF) of imaging system; (3) acting in conjunction of above-mentioned two factors, add the thickness optimizing CsI (Tl) scintillation crystal of acicular texture under coordinating different x-ray energy, can be implemented under higher conversion efficiency, obtain better resolution and MTF, the present situation that above-mentioned two important indicators can not get both in the ordinary course of things is improved preferably.
Accompanying drawing explanation
Fig. 1 is the classification of X ray digital scene equipment and imaging mechanism thereof and process;
Fig. 2 is the structure principle chart of the X-ray camera that the present invention does;
Fig. 3 is the enlarged drawing (locally) of conventional light cone monofilament arrangement;
Fig. 4 is the enlarged drawing (locally) of light cone monofilament of the present invention arrangement.
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, the present invention is described in further detail.
A kind of X-ray camera disclosed in this invention, as shown in Figure 2, be coupled to form by light cone 1 and CCD or CMOS camera 3, microcephaly by light cone is bonded by the photosurface 2 on optical coupled glue and CCD or CMOS chip, the other end of light cone is coated with needle-like CsI crystal 4 successively, damp-proof membrane 5, aluminium film or silicon nitride film 6, described light cone 1 be common light cone adopt drawn by high index of refraction core rod and low-refraction skin glass tube after on the basis of fine glass fibre array that formed, at the glass tube that the glass material just overlapping black glass cladding pipe or energy blackening after postchannel process process before drawing monofilament is again made, for convenience of description, referred to here as exoperidium glass tube.The materials and process of common light cone belongs to prior art, skilled in the art will recognize that this how composition of designing material and size and suitable technique, first make fibre optic faceplate, again as requested, light cone machine draws out light cone, reveal to reduce the light of light between core material 7 and cladding 8, optical crosstalk in other words conj.or perhaps, in technique in the process of row's monofilament, black plug silk in gap often between monofilament, these black silks through postchannel process as after drawing multifilament process, mutually merge, black region 10 as shown in Figure 3, as can be seen from Figure 3, the ratio that periphery six monofilament point of contact near the black glass tangent with monofilament covers is less, light is in transmitting procedure, the chance of optical crosstalk increases thus, for this reason, after the present invention fully takes into account and draws light cone, situation that particularly concentric reducer ratio is higher (as 5:1 or more than) light is in transmitting procedure, the situation increase that total reflection is destroyed, between monofilament, the chance of optical crosstalk increases, add the light transmitting and come through scintillator and needle-like CsI crystal 4 of the present invention conversion by end face, optical crosstalk is more severe, in fact, the FOP of 6 μm of string diameters transmits fluoroscopic light, resolution reaches more than 90lp/mm, Bin Song photon Co., Ltd. of Japan adopts the CsI of 150 μm (Tl) also just to accomplish 22lp/mmCsI (Tl), and in concentric reducer ratio be 3:1 light cone on, accomplish 10lp/mm, 3lp/mm lower than the FOP in situation of the same race, in table 1.
Light cone disclosed in this invention proposes for above-mentioned defect, as shown in Figure 4, by before drawing monofilament, put glass tube, as outsourcing leather hose, after the front road PROCESS FOR TREATMENT of similar fibre faceplate, obtain Black circles district 9 as shown in Figure 4, black plug silk is still wanted during certain row's monofilament, form more large-area light absorption district or so-called black region 10, in order to ensure better MTF, in final products, the thickness of the black glass of exoperidium and the ratio of fine glass fiber diameter arrange in table 2.As can be seen from the table, both ratios are between 1/8 ~ 1/5.
Table 2: the black glass foreskin thickness chosen, fine glass fiber diameter and their ratio
| Fine glass fiber diameter/μm | 5 | 6 | 8 | 10 | 12 | 15 | 20 |
| Filter glass foreskin thickness/μm | 1 | 1.2 | 1.3 | 1.5 | 2.0 | 2.1 | 2.5 |
| The ratio of skin and monofilament | 1/5 | 1/5 | 13/80 | 3/20 | 1/6 | 7/50 | 1/8 |
Because light cone of the present invention adopts said structure, solve the problem of resolution to a certain extent, when guaranteeing resolution, the conversion efficiency of X ray can be improved as far as possible, while evaporation needle-like CsI crystal, suitably miserable assorted TlI, for the Conventional wisdom of those skilled in the art, description is exceeded at this, and all evaporation CsI mentioned in invention and technique thereof, evaporation CsI scintillation crystal, comprises modifier " needle-like " etc. above, when not refering in particular to, it is in fact exactly this common process.For the X ray of given energy, within the scope of certain thickness, its conversion efficiency increases with the thickness increase of scintillator, and in fact, CsI crystal is also the one in scintillator.In order to realize actual effect of the present invention, when X-ray energy scope is between 20Kev ~ 140Kev, then CsI (Tl) the scintillation crystal thickness of acicular texture should control within the scope of 150 ~ 1000 μm, reasonable conversion efficiency can be reached, and when X-ray energy scope is between 40 ~ 90Kev, then its thickness can be controlled between 300 ~ 600 μm, and effect is best.
Black glass pipe is just adopted to do the outer tube of the core-skin material of FOP or FOT, its manufacturing process comprises the steps: that glass tube produced by the black glass that (1) is chosen at visible region transmitance≤1%, as exoperidium glass tube, its transmitance index is tested according to optical glass light transmittance testing standard; Secondly for realizing the present invention, the coefficient of expansion of above-mentioned black glass must match with the skin and core glass forming monofilament, this coupling mainly refers in each temperature range of processing, the difference of both coefficients of expansion should be within the specific limits, this is the general knowledge of those skilled in the art, namely guarantee in heating and cooling process, stress is eliminated minimum by annealing process, other thermophysical property comprises softening point and the transition point of glass, the principle of its coupling is also the Conventional wisdom of this area, does not do too much description at this.As a special case, the black glass chosen, can be between fiber panel monofilament the bare glass of black silk inserted, just the glass bar before La Heisi is transformed into glass tube.The internal-and external diameter of glass tube, length and apparent and inherent quality requirement, be similar to the skin glass tube adopted in microchannel plate technique, and the ratio reduced by wire drawing roughly can calculate the internal-and external diameter of this skin glass tube before wire drawing.Such as make the FOP of 5 μm of string diameters, when exoperidium black glass (also claiming heat absorbing glass) is 1 μm at the wrapper layer thickness of this string diameter, then its internal diameter is roughly at 29 ~ 30mm, external diameter is at 34 ~ 36mm, the choosing of high refraction core rod and low refraction skin glass tube, dimensional requirement and apparent and inherent quality require for industry technical staff known by, do not do expansion explanation at this.By above-mentioned a kind of glass bar (i.e. high index of refraction core rod), two cover glass tube (i.e. low-expansion cladding and black glass cladding) according to gap after the requirement of below 0.4mm is chosen, according to making fibre optic faceplate technique, namely through drawing monofilament, in hexagonal mould, arrange that black plug silk in monofilament and the gap between monofilament forms multifilament rod, draws multifilament, arranges multifilament, draws secondary multifilament, row's screen, pressure screen, section, the technique such as round as a ball, produce fiber array cylinder;
(2) according to predetermined concentric reducer ratio, as 3:1, light cone is drawn out;
(3) microcephaly is worked into the identical size of CCD or CMOS camera chip photosurface size (as 1/2 " CCD, microcephaly is processed into 6.4 × 4.8mm) needing coupling, and concentric reducer is ground, polishing; (4) by the above-mentioned light cone processed, be placed in vacuum coating equipment, according to the technique plated film of evaporation needle-like CsI crystal, i.e. evaporation CsI crystal, and monitor thicknesses of layers, after thickness reaches regulation requirement, stop plated film, take out;
(5) make the technique of damp-proof membrane according to electronic devices and components, the above-mentioned CsI crystal plated makes damp-proof membrane, note protection microcephaly, guarantee that microcephaly is not evaporated to this damp-proof membrane.Parylene film is made, as damp-proof membrane as adopted the vacuum vapor disposing technique of comparative maturity;
(6) adopt conventional magnetron sputtering technique, AM aluminum metallization film or silicon nitride film on damp-proof membrane, film thickness monitoring exists: 90nm ~ 500nm;
(7) on the superclean bench in ultra-clean chamber, open the glass window in CCD or CMOS camera chip, and coat optical coupled glue (GHJ-01 (Z) the type epoxy optical glue as adopted Sichuan morning twilight chemical research institute to produce) at the end face of above-mentioned light cone microcephaly, according to the coupling technique (prior art) of light cone and CCD, by above-mentioned light-cone QCD sum rules on the photosurface of said chip, after solidification, cement further by structure glue, complete manufacture overall process.
Above-mentioned black glass pipe is substituted as outsourcing leather hose as lead silicate glass pipe, the coefficient of expansion and other thermophysical property of this glass also must match with described high index of refraction core rod and low-refraction skin glass tube, after completing according to above-mentioned steps (1) ~ (3), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, the described light cone processed is burnt black, then performs the corresponding steps of step (4) ~ (7).
As plumbous in employing or Lead silicate glass pipe substitute the above-mentioned lead silicate glass pipe as exoperidium, the coefficient of expansion and other thermophysical property of this glass also must match with described high index of refraction core rod and low-refraction skin glass tube, after completing according to above-mentioned steps (1) ~ (3), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, the described light cone processed is burnt black, performs the corresponding steps of step (4) ~ (7) thereafter.Note so-called medium lead crystal glass and high pbo glass, it is the adopted name of glass industry, mean the glass of lead content in respective range in glass, certainly, manufacture the skin glass of microchannel plate all containing a certain amount of lead oxide and bismuth oxide, both all can become black in high-temperature hydrogen reduction, and transmitance is extremely low, also can meet the demands, just price is high, as long as selected glass tube meets the requirement of the above-mentioned coefficient of expansion and other thermophysical property coupling, above-mentioned technique also can be taked to make light cone required by this camera.Process of Hydrogen Reduction belongs to the current techique of microchannel plate technical field, does not elaborate at this.
Use above-mentioned Process of Hydrogen Reduction, middle lead or Lead silicate glass pipe or microchannel slab glass tube will be also comprised as the lead silicate glass pipe of exoperidium glass tube, can consider respectively in the different phase of step (1), according to pre-determined reduction treatment technique, namely the technique of transmitance≤1% of this glass is made, select first this glass tube to be burnt black before wire drawing, or to the monofilament drawn, or according to above-mentioned Process of Hydrogen Reduction, black process is burnt to multifilament, thereafter the processing step of postorder is performed, and between step (3) to step (4), no longer carry out hydrogen reduction process, until complete the overall process of technique.
The present invention does not relate to X and penetrates the concrete size of camera and the size of light cone; but disclosed in be manufacture the core technology of this product; one of ordinary skill in the art by the understanding of the present invention, is only changed, is not all exceeded protection scope of the present invention in size etc.
Claims (10)
1. an X-ray camera, be coupled to form by light cone and CCD or CMOS camera, the other end of light cone is coated with needle-like CsI crystal, damp-proof membrane, aluminium film or silicon nitride film successively, described light cone is the array be made up of the fine glass fibre formed after high index of refraction core rod and the drawing of low-refraction skin glass tube, it is characterized in that: the outward flange of the fine glass fibre of each root of described light cone is all surrounded by black glass cladding, and the thickness of foreskin is 1/8 ~ 1/5 of fine glass fiber diameter.
2. X-ray camera according to claim 1, is characterized in that: described needle-like CsI crystal thickness is 150 ~ 1000 μm.
3. X-ray camera according to claim 1, is characterized in that: described needle-like CsI crystal thickness is 300 ~ 600 μm.
4. a method for the X-ray camera described in manufacturing claims 1, comprises the steps:
(1) the high index of refraction core rod making fibre optic faceplate is enclosed within low-refraction skin glass tube, again the glass tube rod packaged is enclosed within exoperidium glass tube, described exoperidium glass tube is the black glass at visible region transmitance≤1% that the coefficient of expansion and other thermophysical property and described high index of refraction core rod and low-refraction skin glass tube match, described package glass tube rod and exoperidium glass tube between gap≤0.4mm, described high index of refraction core rod, the size of low-refraction skin glass tube and exoperidium glass tube is by the requirement of final finished, design according to calculating or process experiences in advance, according to the technique making fibre optic faceplate, namely through drawing monofilament, monofilament and black plug silk formation multifilament rod is arranged in hexagonal mould, draw multifilament, row's multifilament, draw secondary multifilament, row's screen, pressure screen, section, spheronization process, produce fiber array cylinder,
(2) according to predetermined concentric reducer ratio, light cone is drawn out;
(3) microcephaly is worked into the size needing CCD or the CMOS camera chip photosurface size of coupling identical, and by concentric reducer grinding, polishing;
(4) by the above-mentioned light cone processed, be placed in vacuum coating equipment, according to the technique plated film of evaporation needle-like CsI crystal, and monitor thicknesses of layers, after thickness reaches regulation requirement, stop plated film, take out;
(5) make the technique of damp-proof membrane according to electronic devices and components, the CsI crystal of step (4) evaporation makes damp-proof membrane, note protection microcephaly, guarantee that microcephaly is not evaporated to damp-proof membrane;
(6) magnetron sputtering technique is adopted, AM aluminum metallization film or silicon nitride film on damp-proof membrane, the thickness of described aluminium film or silicon nitride film: 90nm ~ 500nm;
(7) in ultra-clean chamber, open the glass window in CCD or CMOS camera chip, and coat optical coupled glue at the little end surface of above-mentioned light cone, according to the coupling technique of light cone and CCD, by above-mentioned light-cone QCD sum rules on the photosurface of said chip, after solidification, cement further by structure glue, complete manufacture overall process.
5. the method for manufacture X-ray camera according to claim 4, it is characterized in that: the lead silicate glass pipe exoperidium glass tube in described step (1) being changed into same dimension, the coefficient of expansion of described lead silicate glass pipe and other thermophysical property and described high index of refraction core rod and low-refraction skin glass tube match, after completing according to above-mentioned steps (1) ~ (3), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, the described light cone processed is burnt black, performs the corresponding steps of step (4) ~ (7) thereafter.
6. the method for manufacture X-ray camera according to claim 5, it is characterized in that: described lead silicate glass pipe is changed into plumbous in the coefficient of expansion is identical with other thermophysical property or Lead silicate glass pipe, after completing according to above-mentioned steps (1) ~ (3), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, the described light cone processed is burnt black, performs the corresponding steps of step (4) ~ (7) thereafter.
7. the method for manufacture X-ray camera according to claim 5, it is characterized in that: described lead silicate glass pipe is changed at the coefficient of expansion microchannel skin glass tube identical with other thermophysical property, after completing according to above-mentioned steps (1) ~ (3), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, the described light cone processed is burnt black, performs the corresponding steps of step (4) ~ (7) thereafter.
8. according to the method for the manufacture X-ray camera in claim 5 to 7 described in any one, it is characterized in that: before execution step (1), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, described exoperidium glass tube is burnt black, the overall process of completing steps (1) ~ (7) subsequently.
9. according to the method for the manufacture X-ray camera in claim 5 to 7 described in any one, it is characterized in that: in execution step (1), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, described monofilament is burnt black, performs the processing step of postorder subsequently.
10. according to the method for the manufacture X-ray camera in claim 5 to 7 described in any one, it is characterized in that: in execution step (1), employing can melanism to the Process of Hydrogen Reduction of transmitance≤1%, described multifilament is burnt black, performs the processing step of postorder subsequently.
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| CN106772791B (en) * | 2017-04-01 | 2019-04-19 | 中国建筑材料科学研究总院 | Low stray light crosstalk type fibre optic image transmission element and preparation method thereof |
| CN108845394B (en) * | 2018-06-25 | 2020-07-31 | 重庆港宇高科技开发有限公司 | Light cone coupling process |
| CN111193851B (en) * | 2020-01-07 | 2022-03-15 | 中北大学 | Large-view-field high-resolution imaging device |
| CN111522085A (en) * | 2020-05-12 | 2020-08-11 | 深圳大学 | Method for manufacturing two-dimensional X-ray absorption grating |
| CN114755755A (en) * | 2022-04-25 | 2022-07-15 | 祝佳丽 | Optical fiber panel and preparation method thereof, and curtain for projection and preparation method thereof |
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| CN201716429U (en) * | 2010-07-15 | 2011-01-19 | 山西长城微光器材股份有限公司 | Novel optical detector |
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| CN1758405A (en) * | 2005-09-20 | 2006-04-12 | 北方夜视技术股份有限公司 | Method for manufacturing micro-channel plate with solid edge |
| CN101916767A (en) * | 2010-07-27 | 2010-12-15 | 中北大学 | Method for manufacturing X-ray detector |
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