CN101908837B - MEMS broadband piezoelectric energy collector based on PDMS film structure - Google Patents
MEMS broadband piezoelectric energy collector based on PDMS film structure Download PDFInfo
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Abstract
The invention provides an MEMS broadband piezoelectric energy collector based on a PDMS film structure, belonging to the technical field of a micro electro mechanical system (MEMS). The collector comprises a round frame, a PDMS film, a plurality of piezoelectric cantilever beams and a mass block, wherein the PDMS film, the plurality of the piezoelectric cantilever beams and the mass block are arrange in the round frame, the plurality of the piezoelectric cantilever beams are embedded in the PDMS film in a radial direction, one end of each piezoelectric cantilever beam is fixed on the round frame and the other end thereof is suspended; and the mass block is embedded in the PDMS film and is arranged at the center of the round frame. The invention causes piezoelectric transducing elements to obtain a larger output power under the environment of low-frequency vibration, thereby solving the problem of narrow working band of the traditional MEMS piezoelectric energy collector.
Description
Technical field
What the present invention relates to is a kind of device of micro-electromechanical system field, specifically a kind of MEMS broadband piezoelectric energy collector based on the PDMS membrane structure.
Background technology
MEMS (micro electro mechanical system) (MEMS:Micro-Electro-Mechanical Systems) but refer to batch making, integrate micro mechanism, microsensor, miniature actuator and signal processing with control circuit until interface, communicate by letter and microdevice or the system of power supply etc.MEMS is that the development along with semiconductor integrated circuit Micrometer-Nanometer Processing Technology and ultraprecise Machining Technology gets up.Traditional battery volume is large, the life-span is short in order to solve, long-life independence energy supply that can't satisfy the new technologies such as wireless sensor network, embedded system requires this difficult problem, energy acquisition technology based on MEMS can be converted to electric energy with the energy resource collecting in the environment, little because possessing volume, energy density is high, and the life-span is long, need not change, can with the advantages such as MEMS processing technology compatibility, can realize the integrated and self energizing of energy supply module and electronic device becoming one of present study hotspot.
The basic functional principle of MEMS piezoelectric energy collector is piezoelectric effect, and namely piezoelectric under extraneous vibration deformation occurs, and causes the asymmetric of material internal dipole, and polarization phenomena occur, and positive and negative opposite electric charge appears in the outer surface at material simultaneously.The power output of piezoelectric energy collector and external environment condition vibration frequency are closely related, when the natural frequency of piezoelectric energy collector is identical with the external environment condition vibration frequency, covibration occurs and obtain peak power output, but, when the natural frequency of piezoelectric energy collector departs from the external vibration frequency, the power of output will constantly reduce.
PDMS (dimethyl silicone polymer) thin flexible film is good, and intensity is high, is easy to moulding, and can be sensitive feel small vibrations in the vibration environment.Utilize the piezoelectric type vibrational energy collector of MEMS technology development, owing near natural frequency, exporting maximum voltage, widen the natural frequency scope of energy collecting device as far as possible, namely widen effective band, can obtain the effect of generating electricity preferably.Therefore, the energy acquisition technology in wide frequency range is large focus and a difficult problem of current MEMS energy acquisition technical field.
Find by prior art documents, A.Erturk, J.Hoffmann, and D.J.Inman etc. writes articles " A piezomagnetoelastic structure forbroadband vibration energy harvesting " (" a kind of elasticity piezoelectric vibration energy collector of wideband " " Applied Physics wall bulletin ") in " APPLIEDPHYSICS LETTERS " 94,254102 (2009).The method that the realization frequency that is mentioned in this article is widened be with the elasticity piezoelectric beam above two blocks of magnet, swinging, under the effect of magnet magnetic force, can realize widening of energy acquisition frequency.Although this method can realize the effect of wideband collecting energy, this energy collecting device is higher to material requirements, and the whole system manufacture process is very complicated.
Yi Qi, Noah T.Jafferis, Kenneth Lyons etc. write articles " Piezoelectric Ribbons Printed onto Rubber for Flexible Energy Conversion " (" a kind of flexible piezoelectric is embedded energy collecting system in the rubber film " " nanometer wall bulletin ") at " Nano Letter " 10 (2) (2010) 524-528.The PDMS material of the realization energy acquisition that is mentioned in this article: piezoelectric PZT " Nanoribbon (nanobelt) " is embedded into the PDMS film inner, the PDMS film passes to PZT " Nanoribbon (nanobelt) " to the ambient pressure of experiencing makes it produce the distortion output voltage, the existence of close-connected PZT " Nanoribbon (nanobelt) ", can make system can obtain higher output voltage, but this material is not yet made the energy acquisition device.
Summary of the invention
The present invention is directed to the prior art above shortcomings, a kind of MEMS broadband piezoelectric energy collector based on the PDMS membrane structure is provided, make the piezoelectric energy-conversion element under the low-frequency vibration environment, obtain larger power output, to solve traditional narrow problem of MEMS piezoelectric energy collector working band.
The present invention is achieved by the following technical solutions, the present invention includes: circular frame and PDMS film, some piezoelectric cantilevers and the mass be located in the circular frame, wherein: some piezoelectric cantilevers radially are embedded in the PDMS film and an end to be fixed on the circular frame other end unsettled, mass is embedded in the PDMS film and is positioned at the center of circular frame.
The length of described piezoelectric cantilever is less than the internal diameter of circular frame;
The number of described piezoelectric cantilever is greater than three, and is arranged on the circular frame in the mode that is evenly distributed respectively, and an end of all piezoelectric cantilevers is all over against mass.
Described piezoelectric cantilever comprises: metal level and be arranged at its up and down piezoelectric layer of both sides, wherein: be equipped with the electrode of mutual series connection on upper strata piezoelectric layer and the lower floor's piezoelectric layer, the electrode of all piezoelectric cantilevers is for being connected in parallel.
Operation principle of the present invention is: the horizontal development of PDMS film is inner in framework, and it is inner that piezoelectric cantilever is embedded in the PDMS film, and mass places the center of PDMS film.When the present invention is positioned in the ambient vibration, under certain vibration acceleration condition, the PDMS film is experienced the vibration in the external environment and is driven quality soon and the piezoelectric cantilever that is embedded on the PDMS film vibrates together, and piezoelectric cantilever is output voltage under vibrational excitation.Mass can amplify the extraneous vibration of PDMS film impression, thereby improves the output voltage of piezoelectric cantilever.The characteristic of PDMS film makes it can experience vibration very little in the external environment and vibration is passed to mass and piezoelectric cantilever, in addition, the perception that the PDMS film vibrates in the environment to external world, only relevant with vibration acceleration, and little with the frequency relation of extraneous vibration.Therefore, piezoelectric cantilever can be exported effective frequency in a very wide frequency range, thereby has improved energy acquisition efficient.
The present invention adopts the PDMS membrane structure, make MEMS piezoelectric energy-conversion element under the low-frequency vibration environment, obtain power output, compare with existing MEMS piezoelectric energy collector, it is not only simple in structure, make easily, volume reduces, and it can run in the low frequency environments, and can be in wider ambient vibration frequency range the power of stable output.
Description of drawings
Fig. 1 is overall structure schematic diagram of the present invention.
Fig. 2 is cutaway view of the present invention.
Embodiment
The below elaborates to embodiments of the invention, and the present embodiment is implemented under take technical solution of the present invention as prerequisite, provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, the present embodiment comprises: circular frame 1, be located at PDMS film 2, piezoelectric cantilever 3 and mass 4 in the circular frame, wherein: eight piezoelectric cantilevers 3 radially are embedded in the PDMS film 2 and an end to be fixed on the circular frame 1 other end unsettled, mass 4 is embedded in the PDMS film 2 and is positioned at the center of circular frame 1.
The length of described piezoelectric cantilever 3 is less than the internal diameter of circular frame 1;
Described piezoelectric cantilever 3 is arranged on the circular frame 1 in the mode that is evenly distributed respectively, and an end of all piezoelectric cantilevers 3 is all over against mass 4.
Described piezoelectric cantilever 3 comprises: metal level 5 and be arranged at its up and down piezoelectric layer 6 of both sides, wherein: be equipped with the electrode 7 of mutual series connection on upper strata piezoelectric layer and the lower floor's piezoelectric layer, the electrode of all piezoelectric cantilevers 3 is for being connected in parallel.
As shown in Figure 2, the length of described metal level 5 is greater than the length of piezoelectric layer 6 and electrode 7, and two ends expose, and piezoelectric beam 6 is identical with the length of electrode 7, and metal level 5, piezoelectric layer 6 are identical with the width of electrode 7.
The internal diameter of the PDMS film 2 in the present embodiment is identical with circular frame 1 internal diameter, and the PDMS film is in circular frame 1 interior horizontal development, and its edge and framework viscous are connected together.
2 horizontal developments of PDMS film are inner in framework, and piezoelectric cantilever 3 is embedded in PDMS film 2 inside, and mass 4 places the center of PDMS film 2.When this device is placed ambient vibration, under certain vibration acceleration condition, vibration and drive quality fast 4 that PDMS film 2 is experienced in the external environment are vibrated together with the piezoelectric cantilever 3 that is embedded on the PDMS film, and piezoelectric cantilever 3 is output voltage under vibrational excitation.
Mass 4 can amplify the extraneous vibration of PDMS film 2 impressions, thereby improves the output voltage of piezoelectric cantilever.
The present embodiment adheres to a mass center of PDMS film when making.Make 8 piezoelectric cantilevers, size is identical, and an end props up admittedly on the energy collecting device framework, and the other end is free, and 8 piezoelectric cantilevers equidistantly are embedded in PDMS film inside radially around the organic film center.
Claims (5)
1. MEMS broadband piezoelectric energy collector based on the PDMS membrane structure, comprise: circular frame and PDMS film, some piezoelectric cantilevers and the mass be located in the circular frame, it is characterized in that, some piezoelectric cantilevers radially are embedded in the PDMS film and an end to be fixed on the circular frame other end unsettled, mass is embedded in the PDMS film and is positioned at the center of circular frame.
2. the MEMS broadband piezoelectric energy collector based on the PDMS membrane structure according to claim 1 is characterized in that, the length of described piezoelectric cantilever is less than the internal diameter of circular frame.
3. the MEMS broadband piezoelectric energy collector based on the PDMS membrane structure according to claim 1 is characterized in that, the number of described piezoelectric cantilever is greater than three, and is arranged on the circular frame in the mode that is evenly distributed respectively.
4. according to claim 1 and 2 or 3 described MEMS broadband piezoelectric energy collectors based on the PDMS membrane structure, it is characterized in that, an end of all piezoelectric cantilevers is all over against mass.
5. the MEMS broadband piezoelectric energy collector based on the PDMS membrane structure according to claim 1, it is characterized in that, described piezoelectric cantilever comprises: metal level and be arranged at its up and down piezoelectric layer of both sides, wherein: be equipped with the electrode of mutual series connection on upper strata piezoelectric layer and the lower floor's piezoelectric layer, the electrode of all piezoelectric cantilevers is for being connected in parallel.
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| CN102739109A (en) * | 2012-07-09 | 2012-10-17 | 南京航空航天大学 | Single-pendulum piezoelectric generator |
| CN102931340B (en) * | 2012-11-15 | 2015-05-06 | 重庆大学 | Wideband micro piezoelectric vibration energy collector and manufacturing method thereof |
| CN103633879B (en) * | 2013-12-13 | 2016-03-02 | 太原理工大学 | Based on the vibration energy collector vibration pick-up structure of flexible girder |
| CN103647475B (en) * | 2013-12-16 | 2015-08-12 | 厦门大学 | A kind of broadband piezoelectric energy gathering apparatus |
| US9484523B2 (en) | 2014-09-24 | 2016-11-01 | Beijing University Of Technology | Bistable piezoelectric cantilever vibration energy generator based on spherical composite structure and partial separation of different layers |
| CN108448935B (en) * | 2018-05-02 | 2024-05-14 | 南京邮电大学 | Double-order arc piezoelectric energy collector |
| CN112737405B (en) * | 2020-12-31 | 2022-03-18 | 山西大学 | Multi-direction vibration energy collection structure based on three-dimensional flexible main beam |
| CN112769354B (en) * | 2020-12-31 | 2022-03-18 | 山西大学 | Three-dimensional annular broadband piezoelectric vibration energy acquisition structure based on flexible main beam |
| CN112769353B (en) * | 2020-12-31 | 2022-03-18 | 山西大学 | Annular broadband piezoelectric multidimensional vibration energy collector |
| CN115313795A (en) * | 2022-08-17 | 2022-11-08 | 西安铁路信号有限责任公司 | Method for absorbing low-frequency wave and converting low-frequency wave into electric energy |
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| CN101656493A (en) * | 2009-09-17 | 2010-02-24 | 上海交通大学 | MEMS wideband piezoelectricity energy collector based on bistable state frequency raising structure |
| CN101783615A (en) * | 2009-10-26 | 2010-07-21 | 杭州电子科技大学 | Marine instrument and meter power supply device based on sea wave energy capture |
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| US6921253B2 (en) * | 2001-12-21 | 2005-07-26 | Cornell Research Foundation, Inc. | Dual chamber micropump having checkvalves |
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|---|---|---|---|---|
| CN101656493A (en) * | 2009-09-17 | 2010-02-24 | 上海交通大学 | MEMS wideband piezoelectricity energy collector based on bistable state frequency raising structure |
| CN101783615A (en) * | 2009-10-26 | 2010-07-21 | 杭州电子科技大学 | Marine instrument and meter power supply device based on sea wave energy capture |
Non-Patent Citations (1)
| Title |
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| Yi Qi etc..Piezoelectric Ribbons Printed onto Rubber for Flexible Energy Conversion.《NANO LETTERS》.2010,第524-528页. * |
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