CN101898263B - Coated wire saw - Google Patents
Coated wire saw Download PDFInfo
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- CN101898263B CN101898263B CN 201010165145 CN201010165145A CN101898263B CN 101898263 B CN101898263 B CN 101898263B CN 201010165145 CN201010165145 CN 201010165145 CN 201010165145 A CN201010165145 A CN 201010165145A CN 101898263 B CN101898263 B CN 101898263B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
Abstract
The present invention provides a coated wire saw with excellent attrition resistance, where the surface of substrate wire is coated with organic capsule or inorganic capsule so as to inject abrasive particles and simultaneously cut by the wire saw. In addition, provided is a coated wire saw capable of ensuring good precision of the cutting surface of a workpiece. According to the coated wire saw, a ratio (young modulus/hardness) of young modulus (GPs) of the coated surface and the hardness (GPs) of the coated surface is 6-25 by a nanometer creasing method.
Description
Technical field
The present invention relates to the employed saw silk of saw (saw machine) (saw wire), at length say, relate to when workpiece such as cutting metal, pottery, to workpiece and the contact site of sawing silk spray saw silk that abrasive particle on one side use on one side.
Background technology
Workpiece such as metal, pottery is by the saw cutting that the saw silk is installed.Saw silk along folk prescription to or twocouese (travel directions) advance, workpiece and this saw wire connection are touched, thus can be with width arbitrarily with workpiece cut into slices (slice).
Cut surface to workpiece requires level and smooth usually.For the cut surface precision that makes workpiece improves, can spray the solution that contains abrasive particle to workpiece and the contact site of sawing silk on one side and on one side workpiece cut.Contained abrasive particle is involved between workpiece and the saw silk in the solution that sprays, and the abrasion of workpiece obtain promoting, make that the cut surface precision of workpiece is good.
As the technology of the cut surface precision of improving workpiece, except the injection of abrasive particle, the also known technology that the form of improvement saw silk self is arranged.For example, in patent documentation 1, proposed a kind of to the surface implement zinc-plated or brass plating and make inclined to one side footpath poor with the optimized saw of surface roughness thread.In addition, in patent documentation 2, the Hardness Distribution that has proposed a kind of cross section through the regulation metal wire reduces the concavo-convex saw silk of cut surface and uses piano wire.
And in patent documentation 3, disclose a kind of metal wire that outer peripheral face is covered with abrasive particle vector resin tunicle.If use this metal wire, then because abrasive particle (free abrasive) invades in the vector resin tunicle, so think and stably abrasive particle (free abrasive) to be involved in the part that metal wire contacts with workpiece.
[patent documentation 1] spy opens the 2005-111653 communique
[patent documentation 2] spy opens flat 10-309627 communique
[patent documentation 3] spy opens the 2006-179677 communique
As above-mentioned,, therefore can form concavo-convex on the surface of saw silk while if spray the abrasive particle cut workpiece, then the saw silk self also can wear and tear.This concavo-convex cut surface precision of workpiece that makes worsens, and also can cause the broken string of saw silk in addition.But in above-mentioned patent documentation 1～3, the abrasion performance to saw silk does not take in, according to the inventor's etc. research, the equal deterioration of abrasion performance.
Summary of the invention
The present invention is in view of such situation and doing, and its purpose is, provides a kind of abrasion performance excellent coated wire saw, and it is at the surface-coated organic envelope of base wire or inorganic tunicle, on one side the coated wire saw of use when spraying abrasive particle and cut.In addition, another object of the present invention is to, a kind of good coated wire saw of precision that can make the work piece cut face is provided.
Can reach the coated wire saw of the present invention of above-mentioned problem; Has following some main idea: at the surface-coated organic envelope or the inorganic tunicle of base wire; When measuring with nano impress method (Nano-indentationMethod), the Young's modulus (GPa) on tunicle surface is 6～25 with the ratio (Young's modulus/hardness) of the hardness (GPa) on tunicle surface.
The hardness on said tunicle surface is preferably 0.1～1GPa.The thickness of said organic envelope or inorganic tunicle is that 0.05～15 μ m gets final product.As said base wire, recommend to use the hardness of measuring with the nano impress method to be the metal wire more than the 3GPa.
In the present invention, also comprise on one side and spray abrasive particle to the contact site of above-mentioned coated wire saw and workpiece, one side cut the cutting body of said workpiece with said coated wire saw manufacturing approach.
According to the present invention, because with the Young's modulus on tunicle surface and the ratio (Young's modulus/hardness of hardness.Below be called plasticity index) be controlled in 6～25 the scope, so can improve the abrasion performance of saw silk.In addition,, again the hardness on surface is controlled at especially the scope of 0.1～1GPa, then also can improves the cut surface precision of workpiece if the plasticity index on saw silk surface is in after the above-mentioned scope.
Description of drawings
Fig. 1 is the curve map of the relation of compression distance and tunicle case hardness among the No.1 shown in the table 1 of expression embodiment.
Fig. 2 is the curve map of the relation of the surperficial Young's modulus of compression distance and tunicle among the No.1 shown in the table 1 of expression embodiment.
Fig. 3 is the curve map of the relation of compression distance and tunicle case hardness among the No.2 shown in the table 1 of expression embodiment.
Fig. 4 is the curve map of the relation of the surperficial Young's modulus of compression distance and tunicle among the No.2 shown in the table 1 of expression embodiment.
The specific embodiment
The inventor etc. are in order to improve the research with keen determination repeatedly with the abrasion performance of saw employed saw silk when spraying abrasive particle with saw silk cut workpiece.Its result finds; With regard to regard to the saw silk of the surface-coated organic envelope of base wire or inorganic tunicle; If suitably the Young's modulus on silk surface and the balance of hardness are sawed in control; Make the Young's modulus and the ratio (plasticity index) of hardness be in 6～25 scope, then can reduce the abrasion loss of coated wire saw, thereby accomplish the present invention.Also find in addition,, make the scope of the case hardness of saw silk more especially, then can make the surface of the work after the cutting level and smooth, can access the good workpiece of surface accuracy at 0.1～1GPa if the plasticity index on saw silk surface is in after the above-mentioned scope.
At first, describe for accomplishing fact of the present invention.
The abrasion of employed saw silk when spraying the abrasive particle cut workpiece, abrasive wear is a main cause.So-called abrasive wear is meant that free abrasive invades the interface of saw silk and workpiece, a saw phenomenon that is reamed, weares and teares.In order to reduce this abrasive wear, think effectively to make the surperficial hardening of saw silk.But discovery during research such as the inventor, as if making the surperficial really up to the mark of saw silk, then meeting generation in surface is damaged, and abrasion performance is deterioration on the contrary.Therefore the inventor waits the material that is conceived to saw the silk surface, finds except hardness, if control Young's modulus in the lump, then can improve the abrasion performance of saw silk.
That is, saw silk of the present invention is at the surface-coated organic envelope of base wire or the saw silk (coated wire saw) of inorganic tunicle, and the Young's modulus on tunicle surface is 6～25 with the ratio (plasticity index) of hardness.Through making plasticity index is 6～25, and the Young's modulus on tunicle surface and the balance of hardness are good.If make its balance good, even stress application and import strain when cutting then, the distortion of coated wire saw also is only limited to strain, and plastic deformation can take place hardly, so the cut surface precision of workpiece is also good.If plasticity index is too small, then hardness becomes excessive for Young's modulus.Therefore, if stress application, coated wire saw brittle destruction af-ter then, the part on the surface of coated wire saw is peeled off, and abrasion loss increases.In addition, if the cut surface deterioration in accuracy of then rough surface, so workpiece is peeled off on the surface of coated wire saw.Therefore plasticity index is more than 6, is preferably more than 9, more preferably more than 10.But if plasticity index is excessive, then Young's modulus becomes excessive for hardness.Therefore if receive stress, then coated wire saw generation plastic deformation, easy abrasion.Therefore plasticity index is below 25, is preferably below 23, more preferably below 20.
The tunicle case hardness of above-mentioned coated wire saw is preferably 0.1～1GPa.If the tunicle surface of coated wire saw is really up to the mark, rocking of coated wire saw then taken place when cutting easily, can not carry out accurate cutting, the cut surface precision of workpiece has the tendency of variation.Therefore the tunicle case hardness of coated wire saw for example is below the 1GPa, to be preferably below the 0.9GPa, more preferably below the 0.6GPa.If, then recommend the tunicle case hardness of coated wire saw low as far as possible from the viewpoint of the cut surface precision of improving workpiece.But if the tunicle surface of coated wire saw became soft, then the abrasion performance of coated wire saw has the tendency of deterioration.In addition, if coated wire saw wearing and tearing, the surface texture variation of coated wire saw then, form on the surface concavo-convex, consequently on the cut surface of workpiece, also form concavo-convex, the surface accuracy variation of workpiece.In addition, if the tunicle surface of coated wire saw is too soft, then metal wire intensity also reduces, the linear velocity of metal wire in the time of therefore can not strengthening cutting, and productivity ratio reduces.Therefore the tunicle case hardness of coated wire saw for example is more than the 0.1GPa, to be preferably more than the 0.15GPa, more preferably more than the 0.2GPa.
Do not limit the Young's modulus on the tunicle of above-mentioned coated wire saw surface is special, as long as the balance of basis and tunicle case hardness is adjusted into 6～25 with plasticity index and gets final product.The Young's modulus on tunicle surface is 0.6～25GPa for example, is preferably 1～20GPa, 2～15GPa more preferably,
In order to prevent the wearing and tearing of coated wire saw, the present invention is conceived to the characteristic of the skin section of coated wire saw.Specifically; Be in zone (the particularly zone of 0.05～1.5 μ m) apart from the most surperficial dark 0.05～5.0 μ m of tunicle; After measuring the depth direction profile (profile) of surperficial Young's modulus of tunicle and hardness; Separately typical value of decision, the plasticity index (with preferred hardness) that typical value is thus confirmed is controlled at above-mentioned scope.At length say to be exactly to measure above-mentioned Young's modulus and hardness with the nano impress method.According to nano impress (small part hardness test); Can being pressed into by ultralow load; Therefore with hardness that is pressed into the quantitative determination subject material and Young's modulus seldom, be difficult to receive the influence of the material of surperficial downside, thereby can correctly estimate characteristic, the performance on surface.
The Young's modulus on tunicle surface adopts typical value get final product with hardness, and when the tunicle of repeatedly measuring coated wire saw was surperficial, mensuration result's deviation is few, the result that can obtain to be measured on the position of stable result was as typical value.For example, the Young's modulus on tunicle surface has the tendency that progressively becomes big from the tunicle surface of coated wire saw towards central shaft.Therefore, the Young's modulus on tunicle surface is used as typical value with the result who measures at the tunicle near surface of coated wire saw and is got final product.On the other hand, hardness and the Young's modulus on tunicle surface are opposite, near the surface of tunicle, measure the living all the more deviation of result.Therefore, the hardness on tunicle surface is used as typical value with the result who measures in the central shaft side of coated wire saw and is got final product.For example; After among the embodiment that states; Measure tunicle case hardness profile as shown in figures 1 and 3; With Fig. 2 and the surperficial Young's modulus profile of tunicle shown in Figure 4, the hardness of being measured in the scope with compression distance 400～450nm is as " the tunicle case hardness of coated wire saw ", and the Young's modulus of being measured in the scope with compression distance 60～90nm is as " the tunicle surface Young's modulus of coated wire saw ".
That is, Fig. 1 and Fig. 3 are illustrated among the following embodiment, the result of the hardness profile on the tunicle surface of mensuration coated wire saw.Can be known that by these figure the mensuration result of tunicle case hardness has deviation from the most surperficial of tunicle to the scope of compression distance 150nm, but in the scope of compression distance 400～450nm, does not almost have deviation, measure error is little.On the other hand, Fig. 2 and Fig. 4 represent to measure the result of Young's modulus profile on the tunicle surface of coated wire saw.Can confirm that by these figure the mensuration result of the Young's modulus on tunicle surface is few in the near surface deviation of tunicle, but be in the zone more than the 200nm that along with compression distance increases, Young's modulus has the tendency that becomes big at compression distance.Also have, if in the Young's modulus and the hardness on the surface measurements tunicle surface of tunicle, then measure the result all has very big deviation at every turn, can not get the high result of reliability, therefore will avoid measuring on surface.
The Young's modulus and the hardness on tunicle surface are measured at 15 places at least; Measure exceptional value arranged among the result (be more than 3 times for example with respect to mean value or 1/3 below value) time; Except should value and measure again, the mensuration result at least 15 places be averaged calculating.This is because measure hardness and Young's modulus in the very small zone through nano impress, so the measure error of being easy to generate.
Base wire as forming above-mentioned tunicle for example can use titanium wire, copper cash, steel wire etc.
As steel wire, for example can use stainless steel steel wire and high-carbon steel wire etc.As the stainless steel steel wire; Can use austenite stainless steel steel wires such as SUS301, SUS304, SUS310, SUS316, SUS321, SUS347; Ferrite-group stainless steel such as SUS405, SUS430 steel wire; Martensitic stainless steel such as SUS403, SUS410 steel wire, two phase stainless steel steel wires such as SUS329J1 (austenite/ferrite-group stainless steel steel wire), precipitation hardening stainless steel steel wires such as SUS630 etc.As high-carbon steel wire, can use and for example contain C and reach 0.5～1.2% high-carbon steel wire.As this high-carbon steel wire, for example can use the piano wire rod of JIS G3502 defined.
In the present invention, especially preferably use the hardness of measuring with the nano impress method to be the base wire more than the 3GPa.Through the hardness that makes base wire is more than the 3GPa, can improve the whole tensile strength of coated wire saw, even the linear velocity of the metal wire when therefore strengthening cut workpiece can not break yet, thereby productivity ratio is improved.
As the organic envelope on the surface that is overlayed on base wire, can use among heat-curing resin and the thermoplastic resin, plasticity index is adjusted to 6～25 synthetic resin.Among such synthetic resin, what can be fit to use has phenolic resins, amide-type resin, epoxy resin, polyurethane, formal (formal), ABS resin, vinyl chloride, acid imide resin, a polyester etc.During as thermoplastic resin, plasticity index can be adjusted through the control degree of polymerization, and during as heat-curing resin, plasticity index can be adjusted through the control crosslink density.In addition, also can be through making different two or more monomer copolymerizations, or cooperate additive (for example plasticizer such as phosphate, heat stabilizers such as metallic soap etc.) to adjust plasticity index.
Above-mentioned organic envelope can pass through the varnish (varnish) in the surface coated market sale of above-mentioned base wire, and its heating is formed.At this moment, through the hardness of suitable adjustment organic envelope, can control above-mentioned plasticity index, Young's modulus.The hardness of organic envelope can be regulated through kind, the heating-up temperature of employed varnish.
As varnish, can use the enamel-covered wire (enamel wire) sold by the special coating in east Co., Ltd. with varnish, by the electric wire of Kyocera Chem Corp.'s sale with varnish etc.
Use varnish as above-mentioned enamel-covered wire, for example can use as follows.
Polyurethane lacquer (polyurethane varnish) (" TPU F1 ", " TPU F2-NC ", " TPUF2-NCA ", " TPU 6200 ", " TPU 5100 ", " TPU 5200 ", " TPU 5700 ", " TPUK5132 ", " TPU 3000K ", " TPU 3000EA " etc., eastern special coating Co., Ltd. system commodity.)。
Polyester varnish (polyester varnish) (" LITON 2100S ", " LITON 2100P ", " LITON 3100F ", " LITON 3200BF ", " LITON 3300 ", " LITON 3300KF ", " LITON 3500SLD ", " Neoheat 8200K2 " etc., eastern special coating Co., Ltd. system commodity.)。
Polyesterimide varnish (polyesterimide varnish) (" Neoheat 8600A ", " Neoheat8600AY ", " Neoheat 8600 ", " Neaheat 8600H3 ", " Neoheat 8625 ", " Neoheat8600E2 " etc., eastern special coating Co., Ltd. system commodity.)。
Use varnish as said wires; Can use for example heat-resisting polyurethane (urethane) copper cash with varnish (" TVE5160-27 " etc., epoxide modified methylal resin), the formal copper cash is with varnish (" TVE5225A " etc., polyvinyl formal); Heat-resisting formal copper cash is with varnish (" TVE5230 1 " etc.; Epoxide modified methylal resin), the polyester copper cash is with varnish (being Kyocera Chem Corp.'s system commodity) such as (TVE5350 series, alkyd resins).
Inorganic tunicle as the surface that is coated on base wire can use for example SiO
2Tunicle, glass (soda-lime glass) tunicle, the plasticity index on tunicle surface is adjusted to 6～25 tunicle among the CrN tunicle etc.SiO
2Tunicle can contain SiO through the surface coated at base wire
2Behind the solution of powder, make it dry again and form.In addition, make it sintering, then can form fine and close tunicle if further improve temperature.About the glass tunicle, in the surface coated of base wire be mixed with after the material that glass dust and solvent obtain, making it drying can form.About the CrN tunicle, use the AIP device, use the Cr target in nitrogen atmosphere, to implement arc ion plating (AIP) to the surface of base wire, then can form.
The thickness of above-mentioned tunicle is preferably 0.05～15 μ m.If by lepthymenia, then just wears of the initial stage tunicle when cutting is perhaps peeled off from base wire, exposes base wire itself, can't be not fully exerted by the abrasion performance raising effect that tunicle brings is set.Therefore the thickness of tunicle is preferably more than the 0.05 μ m, more preferably more than the 0.5 μ m, is preferably especially more than the 2 μ m.But if tunicle is blocked up, it is excessive that then tunicle accounts for the overall ratio of coated wire saw, so the coated wire saw integral intensity reduces.Therefore, strengthen the linear speed of metal wire if will boost productivity, the tendency of easy generation broken string is then arranged.Therefore the thickness of tunicle is preferably below the 15 μ m, more preferably below the 13 μ m, is preferably especially below the 10 μ m.
To directly not special qualification of the whole line of coated wire saw, be generally about 100～300 μ m.
Coated wire saw of the present invention uses when making cutting body for example cutting workpiece (slice processing) such as metal, pottery, silicon, crystal, semiconductor component and magnetic material.
When cutting with saw, on one side part injection that coated wire saw is contacted with the workpiece solution that contains abrasive particle carry out on one side.This is owing to contained free abrasive in the solution that sprays is involved between coated wire saw and the workpiece, while help to make wear of work cutting.
The solution that contains abrasive particle uses known solution to get final product.Can use for example silicon carbide abrasive particles (SiC powder), diamond abrasive grain etc. as abrasive particle.
[embodiment]
Below, enumerate embodiment the present invention more specifically is described, but the present invention is not limited by following embodiment certainly, can certainly suitably change enforcement in the scope of the aim of before and after can meeting, stating, these all are included in the technical scope of the present invention.
Use coated wire saw, cut monocrystalline silicon, measure the abrasion loss of the saw silk of cutting front and back, estimate the abrasion performance of saw silk while spray abrasive particle.In addition, measure the surface roughness of the cut surface of monocrystalline silicon, the evaluation table surface accuracy.In addition, the change of line speed of the saw silk when making cutting is estimated productivity ratio.
As coated wire saw, on the raw-material base wire shown in the below table 1, by the tunicle of the former material shown in the lining of the thickness shown in the below table 1 below table 1, making line footpath (comprising tunicle) is the coated wire saw of 140 μ m.
(base wire)
In No.1～4,13,14; Line footpath with piano wire (A kind) wire drawing of JIS G3502 defined to regulation; Use as base wire with it, this piano wire (A kind) contains C:0.72 quality %, Si:0.21 quality %, Mn:0.52 quality %, and surplus is made up of iron and unavoidable impurities.
In No.5～9; Line footpath with piano wire (A kind) wire drawing of JIS G3502 defined to regulation; Use as base wire with it, this piano wire (A kind) contains C:0.82 quality %, Si:0.19 quality %, Mn:0.49 quality %, and surplus is made up of iron and unavoidable impurities.
In No.10, with the line footpath of fine copper wire drawing to regulation, use as base wire with it, in No.11,, use as base wire with it with the line footpath of pure titanium wire drawing to regulation.
In No.12,, use as base wire with it with the line footpath that the spring of JIS G4314 defined is extremely stipulated with stainless steel steel wire (SUS304) wire drawing.
(tunicle)
The formation step of organic envelope (No.1～4,10～14) is following.
In No.1,10～12, the polyurethane line that uses JIS C2351 defined is with varnish " W143 " (eastern special coating Co., Ltd. system, enamel-covered wire is with varnish " TPUF1 (trade name) ", filming after the baking consists of polyurethane).
In No.2～4, the polyester line that uses JIS C2351 defined is with varnish " W141 " (eastern special coating Co., Ltd. system, enamel-covered wire is with varnish " LITON 2100S (trade name) ", it is polyester that filming after the baking consists of terephthalic acid (TPA)).
In No.13, (eastern special coating Co., Ltd. system, enamel-covered wire is with varnish " Neoheat 8600 (trade name), filming after the baking consists of polyesterimide " with varnish " W144 " for the polyesterimide line that uses JIS C2351 defined.
In No.14, the formal line that uses JIS C2351 defined is with varnish " W142 " (Kyocera Chem Corp.'s system, electric wire is with varnish " TVE5225A " (trade name), filming after the baking consists of polyvinyl formal).
At the above-mentioned varnish of the surface coated of above-mentioned base wire, suitable control heating-up temperature and heat time heating time, form the tunicle that Young's modulus and hardness (being plasticity index) have been carried out adjustment.Specifically, before tunicle forms, base wire carried out ungrease treatment after, will be coated with number of times and be divided into 4～10 times and paint, make the volatile ingredient volatilization and make it sclerosis, the making coated wire saw with 250～270 ℃ again.
The formation step of inorganic tunicle (No.5～9) is following.
In No.5, use the Cr target in blanket of nitrogen, to carry out arc ion plating (AIP), form the CrN tunicle on the surface of base wire.
In No.6, on the surface of base wire, coating mixed has the coating of glass dust and solvent, makes it dry and formation glass tunicle.
In No.7, on the surface of base wire, coating contains the solution of silica flour, makes it dry and formation SiO
2Tunicle.
In No.8, on the surface of base wire, electrolysis is plated to the plated film that divides into groups to become Cu:63 quality %, Zn:37 quality %, forms the brass plating tunicle.
In No.9, on the surface of base wire, coating is the coating of the silica of 3 μ m with respect to the average grain diameter that epoxy resin (100 quality %) is combined with 10 quality %, forms the epoxy resin tunicle of silicon oxide-containing.
For the coated wire saw of making, measure the Young's modulus and the hardness on tunicle surface with the nano impress method.Concrete condition determination is following.
(condition determination)
Determinator: Agilent Technologies system " Nano Indenter XP/DCM "
Analysis software: Agilent Technologies system " Test Works4 "
Tip：XP
Mensuration mode: CSM (rigidity is measured continuously)
Excited oscillation frequency: 45Hz
Excited oscillation amplitude: 2nm
Rate of straining: 0.05/ second
Compression distance: to 500nm
Measuring point: 15 points
Measuring point interval: 30 μ m
Measure environment: room temperature 23 degree in the aircondition
Standard test portion: vitreous silica
Also have, it is the result in the scope of 60～90nm that the Young's modulus on tunicle surface adopts compression distance from the surface of tunicle, and it is the result in the scope of 400～450nm that the hardness on tunicle surface adopts compression distance from the surface of tunicle.Measuring point is 15 points, measures for 15 times when among the results exceptional value being arranged except it, measures again, and 15 results are averaged, and tries to achieve the Young's modulus and the hardness on surface.The Young's modulus and the hardness on surface are presented in the below table 1.In addition, calculate the ratio (Young's modulus/hardness of Young's modulus and hardness.Plasticity index.), be presented in the lump in the below table 1.In below table 1, also show the hardness of the base wire of measuring with same condition.
The tensile strength (TS) of the coated wire saw of making through stretching test measurement in addition.Measuring the result is presented in the below table 1.
Next, the coated wire saw of use cutting monocrystalline silicon (slice processing).Slice processing is sprayed on one side slurry and is carried out on one side between coated wire saw and monocrystalline silicon, this slurry is that to make average grain diameter be that to be suspended in ethylene glycol be to form in the aqueous solution for the diamond abrasive grain of 5.6 μ m.The concentration of abrasive particle (diamond) is 5 quality %.The linear velocity of coated wire saw is set at 100～500m/ minute, and the ew line feed speed is set at 5m/ minute, and the tension force of coated wire saw is set at 15N.
Carry out slice processing with above-mentioned condition; Passed through 7 hours time point in total clipping time, taken off coated wire saw, measured the line footpath of coated wire saw from saw; Based on the reduction in the footpath of the line before and after the cutting that calculates, with the abrasion performance of following standard evaluation coated wire saw.Evaluation result is presented in the below table 1.Also have, the linear velocity of the coated wire saw during cutting is 500m/ minute in No.1～3,5～8,12～14.In No.4,9～11, carry out with low speed (100～300m/ minute), No.4a, 9a～11a carry out with high speed (500m/ minute) separately.
(abrasion performance)
3 minutes (qualified): the reduction in line footpath is lower than 3 μ m
2 minutes (qualified): the reduction in line footpath is 3～5 μ m
1 minute (defective): the reduction in line footpath surpasses 5 μ m
In addition, measure surface roughness, estimate the surface accuracy of cut surface through the monocrystalline silicon that is cut after 7 hours.Surface accuracy is estimated by following standard based on the result of 10 mean roughness Rz of mensuration of JIS B0601 (calendar year 2001, annex 1) defined.Evaluation result is presented in the below table 1.
(surface accuracy)
(qualified): Rz was below 3 μ m in 3 minutes
(qualified): Rz surpassed 3 μ m in 2 minutes, below 6 μ m
(defective): Rz surpassed 6 μ m in 1 minute
About the No.1 shown in the table 1, the curve map of the relation of expression its compression distance and tunicle case hardness is presented among Fig. 1.In addition, the curve map with the relation of representing the Young's modulus that its compression distance and tunicle are surperficial is presented among Fig. 2.About the No.2 shown in the table 1, the curve map of the relation of expression its compression distance and tunicle case hardness is presented among Fig. 3.In addition, the curve map with the relation of representing the Young's modulus that its compression distance and tunicle are surperficial is presented among Fig. 4.
Can know by Fig. 1 and Fig. 3, apart from tunicle the compression distance on surface be in the scope of 400～450nm, the mensuration result's of tunicle case hardness deviation is little.Can be known by Fig. 2 and Fig. 4, be in the scope of 60～90nm at the compression distance apart from the tunicle surface, and the mensuration result's of the Young's modulus on tunicle surface deviation is little.Confirm also that in addition can receive the influence of base wire more more near base wire (being that compression distance reaches the above scope of 200nm specifically), Young's modulus has the tendency that becomes big.
Secondly, can investigate as follows by table 1.
No.1,2,4～7,10～14 coated wire saw are the examples that satisfies the important document of the present invention's regulation.
Particularly No.1,2,7,12～14 coated wire saw are because plasticity index suitably adjusted, so abrasion performance is excellent.In addition, because case hardness also suitably adjusted, so use the precision of cut surface of the monocrystalline silicon of this coated wire saw cutting to become good.In addition, because the hardness of base wire is also by suitable adjustment, so, productivity ratio is improved even the metal wire linear velocity is also can not break in 500m/ minute.
The coated wire saw of No.4 is because plasticity index suitably adjusted, so abrasion performance is excellent.In addition, because case hardness also suitably adjusted, so use the precision of cut surface of the monocrystalline silicon of this coated wire saw cutting to become good.But,, so the metal wire linear velocity is no problem when being 100m/ minute low speed, but shown in No.4a,, then break, thereby can not make the productivity ratio raising if the linear velocity of metal wire is increased to 500m/ minute because tunicle is blocked up.
No.5 and 6 coated wire saw are because plasticity index suitably adjusted, so abrasion performance is excellent.But because not suitably adjustment of case hardness, so use the cut surface low precision of the monocrystalline silicon of this coated wire saw cutting.
No.10 and 11 coated wire saw are because plasticity index suitably adjusted, so abrasion performance is excellent.In addition, because case hardness also suitably adjusted, so use the precision of cut surface of the monocrystalline silicon of this coated wire saw cutting to become good.But; Because the hardness of base wire is not by suitable adjustment; So when the metal wire linear velocity be 200m/ minute be no problem during with 300m/ minute low speed, but shown in No.10a, 11a, if the linear velocity of metal wire is increased to 500m/ minute; Then break, thereby productivity ratio is improved.
On the other hand, No.8 and 9 is examples of the important document of discontented unabridged version invention regulation, and plasticity index is suitably adjusted, so abrasion performance is poor.Particularly the coated wire saw of No.9a if the linear speed of metal wire is brought up to 500m/ minute, also can break.
The saw silk that also has No.3, overlayed on base wire the surface by lepthymenia reference example, the effect that the lining tunicle brings is not in full use.
[table 1]
Claims (5)
1. coated wire saw; It is characterized in that; It is saw silk at the surface-coated organic envelope of base wire; When measuring with the nano impress method, the Young's modulus on tunicle surface is that Young's modulus/hardness is 6～25 with the ratio of the hardness on tunicle surface, and the unit of the hardness on the Young's modulus on tunicle surface and tunicle surface is GPa.
2. coated wire saw according to claim 1, wherein, the hardness on said tunicle surface is 0.1～1GPa.
3. coated wire saw according to claim 1 and 2, wherein, the thickness of said organic envelope is 0.05～15 μ m.
4. coated wire saw according to claim 1 and 2 wherein, as said base wire, uses the hardness of measuring with the nano impress method to be the metal wire more than the 3GPa.
5. the manufacturing approach of a cutting body, wherein, on one side in claim 1～4 contact site of each described coated wire saw and workpiece spray abrasive particle, said workpiece is cut with said coated wire saw in one side.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-126471 | 2009-05-26 | ||
| JP2009126471 | 2009-05-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101898263A CN101898263A (en) | 2010-12-01 |
| CN101898263B true CN101898263B (en) | 2012-06-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010165145 Expired - Fee Related CN101898263B (en) | 2009-05-26 | 2010-04-19 | Coated wire saw |
Country Status (5)
| Country | Link |
|---|---|
| JP (2) | JP5412320B2 (en) |
| KR (1) | KR101166636B1 (en) |
| CN (1) | CN101898263B (en) |
| BE (1) | BE1019645A5 (en) |
| TW (1) | TWI471207B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102756176A (en) * | 2011-04-29 | 2012-10-31 | 日本精线株式会社 | Saw line and manufacturing method thereof |
| CN102218537B (en) * | 2011-05-28 | 2012-10-10 | 长沙泰维超硬材料有限公司 | Method for manufacturing pre-deformation line diamond line saw through powder metallurgy |
| JP5588483B2 (en) * | 2011-08-18 | 2014-09-10 | 株式会社コベルコ科研 | Resin-coated saw wire and cut body |
| JP5759887B2 (en) * | 2011-12-22 | 2015-08-05 | 東京製綱株式会社 | Evaluation method of saw wire |
| CN104085050B (en) * | 2013-09-18 | 2015-12-02 | 凡登（常州）新型金属材料技术有限公司 | For wire and producing device and the method for free abrasive cutting |
| CN103522729B (en) | 2013-10-24 | 2016-01-06 | 合肥京东方光电科技有限公司 | Remove the system of touch panel |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1583336A (en) * | 2004-05-27 | 2005-02-23 | 沈阳晶通金刚石复合材料有限公司 | Apparatus for preparing stainless steel cutting line by composite electric spraying apparatus and method thereof |
| CN1776024A (en) * | 2005-11-23 | 2006-05-24 | 邹志尚 | Hard composite nano ceramic film coating for use on surface of cutting sawing and drilling tool |
| JP3868381B2 (en) * | 2003-02-24 | 2007-01-17 | 株式会社アライドマテリアル | Wire saw |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62251061A (en) * | 1986-04-22 | 1987-10-31 | Nissin Electric Co Ltd | Wire saw and manufacturing method |
| JPH10309627A (en) * | 1997-05-09 | 1998-11-24 | Sumitomo Electric Ind Ltd | Plano wire for saw wire |
| JPH1110510A (en) * | 1997-06-19 | 1999-01-19 | Nippei Toyama Corp | Wire saw device and method for cutting workpiece |
| JP3447963B2 (en) * | 1998-09-10 | 2003-09-16 | 住友電工スチールワイヤー株式会社 | Plating steel wire for wire saw |
| JP2002273648A (en) | 2001-03-14 | 2002-09-25 | Toshiba Ceramics Co Ltd | Wire saw |
| JP2004322290A (en) * | 2003-04-28 | 2004-11-18 | Furukawa Electric Co Ltd:The | Wire saw |
| JP2005193332A (en) * | 2004-01-07 | 2005-07-21 | Tokyo Seiko Co Ltd | Saw wire |
| JP2006102905A (en) * | 2004-10-08 | 2006-04-20 | Kurisutekku Kk | Wire saw |
| JP2006179677A (en) * | 2004-12-22 | 2006-07-06 | Japan Fine Steel Co Ltd | Saw wire |
| JP4666308B2 (en) * | 2006-02-24 | 2011-04-06 | 富士通セミコンダクター株式会社 | Manufacturing method of semiconductor device |
| JP4066440B2 (en) * | 2006-05-17 | 2008-03-26 | トーヨーエイテック株式会社 | MEDICAL DEVICE WITH DIAMOND-LIKE THIN FILM AND MANUFACTURING METHOD THEREOF |
-
2010
- 2010-02-23 JP JP2010038015A patent/JP5412320B2/en not_active Expired - Fee Related
- 2010-04-19 CN CN 201010165145 patent/CN101898263B/en not_active Expired - Fee Related
- 2010-05-18 TW TW99115824A patent/TWI471207B/en not_active IP Right Cessation
- 2010-05-25 KR KR20100048352A patent/KR101166636B1/en active IP Right Grant
- 2010-05-26 BE BE2010/0319A patent/BE1019645A5/en not_active IP Right Cessation
-
2013
- 2013-11-08 JP JP2013231867A patent/JP2014042983A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3868381B2 (en) * | 2003-02-24 | 2007-01-17 | 株式会社アライドマテリアル | Wire saw |
| CN1583336A (en) * | 2004-05-27 | 2005-02-23 | 沈阳晶通金刚石复合材料有限公司 | Apparatus for preparing stainless steel cutting line by composite electric spraying apparatus and method thereof |
| CN1776024A (en) * | 2005-11-23 | 2006-05-24 | 邹志尚 | Hard composite nano ceramic film coating for use on surface of cutting sawing and drilling tool |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2006-102905A 2006.04.20 |
| JP特许第3868381号B2 2007.01.17 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101898263A (en) | 2010-12-01 |
| BE1019645A5 (en) | 2012-09-04 |
| JP5412320B2 (en) | 2014-02-12 |
| KR101166636B1 (en) | 2012-07-18 |
| TW201109143A (en) | 2011-03-16 |
| JP2014042983A (en) | 2014-03-13 |
| TWI471207B (en) | 2015-02-01 |
| JP2011005624A (en) | 2011-01-13 |
| KR20100127712A (en) | 2010-12-06 |
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