CN101881668A - 一种电桥结构的红外温度传感器 - Google Patents
一种电桥结构的红外温度传感器 Download PDFInfo
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- CN101881668A CN101881668A CN2009101072701A CN200910107270A CN101881668A CN 101881668 A CN101881668 A CN 101881668A CN 2009101072701 A CN2009101072701 A CN 2009101072701A CN 200910107270 A CN200910107270 A CN 200910107270A CN 101881668 A CN101881668 A CN 101881668A
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CN2009101072701A CN101881668A (zh) | 2009-05-08 | 2009-05-08 | 一种电桥结构的红外温度传感器 |
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CN2009101072701A CN101881668A (zh) | 2009-05-08 | 2009-05-08 | 一种电桥结构的红外温度传感器 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101995297A (zh) * | 2010-09-30 | 2011-03-30 | 烟台睿创微纳技术有限公司 | 一种红外桥式测温传感器 |
CN102279206A (zh) * | 2011-06-21 | 2011-12-14 | 清华大学 | 热分析型化学及气体探测传感器 |
WO2012068798A1 (zh) * | 2010-11-22 | 2012-05-31 | 烟台睿创微纳技术有限公司 | 微机械cmos热电堆红外传感器 |
US10145743B2 (en) | 2013-03-05 | 2018-12-04 | Teknologian Tutkimuskeskus Vtt Oy | Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation |
CN110567593A (zh) * | 2018-06-05 | 2019-12-13 | 上海新微技术研发中心有限公司 | 基于单面工艺的非接触式红外温度传感器的制作方法 |
CN112050949A (zh) * | 2020-09-11 | 2020-12-08 | 京东方科技集团股份有限公司 | 一种传感器及其制作方法和测试方法、测试装置 |
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2009
- 2009-05-08 CN CN2009101072701A patent/CN101881668A/zh active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101995297A (zh) * | 2010-09-30 | 2011-03-30 | 烟台睿创微纳技术有限公司 | 一种红外桥式测温传感器 |
WO2012068798A1 (zh) * | 2010-11-22 | 2012-05-31 | 烟台睿创微纳技术有限公司 | 微机械cmos热电堆红外传感器 |
CN102279206A (zh) * | 2011-06-21 | 2011-12-14 | 清华大学 | 热分析型化学及气体探测传感器 |
CN102279206B (zh) * | 2011-06-21 | 2014-09-24 | 清华大学 | 热分析型化学及气体探测传感器 |
US10145743B2 (en) | 2013-03-05 | 2018-12-04 | Teknologian Tutkimuskeskus Vtt Oy | Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation |
CN110567593A (zh) * | 2018-06-05 | 2019-12-13 | 上海新微技术研发中心有限公司 | 基于单面工艺的非接触式红外温度传感器的制作方法 |
CN112050949A (zh) * | 2020-09-11 | 2020-12-08 | 京东方科技集团股份有限公司 | 一种传感器及其制作方法和测试方法、测试装置 |
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Application publication date: 20101110 |