CN101881652A - 一种压电晶片振动模态的测试方法 - Google Patents
一种压电晶片振动模态的测试方法 Download PDFInfo
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102095490A (zh) * | 2010-11-19 | 2011-06-15 | 中国海洋石油总公司 | 一种压电晶片本征频率的测量方法 |
CN102565531A (zh) * | 2012-02-07 | 2012-07-11 | 天津大学 | 压电换能器动态参数测量仪及测量方法 |
CN105675120A (zh) * | 2016-04-26 | 2016-06-15 | 中国电子科技集团公司第二十六研究所 | 晶片频率测试装置 |
CN105716726A (zh) * | 2014-12-22 | 2016-06-29 | 罗斯蒙特公司 | 具有振动检测的温度传感器套管系统 |
CN108428788A (zh) * | 2018-01-31 | 2018-08-21 | 清华大学 | 可抑制压电谐振的光学电压/电场传感器晶片的制作方法 |
CN108613748A (zh) * | 2018-05-09 | 2018-10-02 | 安徽大学 | 一种基于压电陶瓷谐振电感的测温系统及方法 |
CN108645529A (zh) * | 2018-05-09 | 2018-10-12 | 安徽大学 | 一种压电器件的自感知温度在线监测系统及方法 |
CN109033574A (zh) * | 2018-07-10 | 2018-12-18 | 西安工程大学 | 考虑运行温度变化的输电导线模态分析方法 |
CN111289096A (zh) * | 2020-02-24 | 2020-06-16 | 杭州电子科技大学 | 基于温度频率曲线的声表面波器件最佳工作频率确定方法 |
CN113899446A (zh) * | 2021-12-09 | 2022-01-07 | 北京京仪自动化装备技术股份有限公司 | 晶圆传送系统检测方法及晶圆传送系统 |
CN114137073A (zh) * | 2021-11-22 | 2022-03-04 | 吉林大学 | 测量固态介质对超声频振动激励响应的装置和方法 |
Citations (3)
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US5164920A (en) * | 1990-06-21 | 1992-11-17 | Siemens Aktiengesellschaft | Composite ultrasound transducer and method for manufacturing a structured component therefor of piezoelectric ceramic |
CN1666952A (zh) * | 2005-03-29 | 2005-09-14 | 华中科技大学 | Mems圆片或器件的动态测试加载装置 |
CN101221065A (zh) * | 2007-12-16 | 2008-07-16 | 张蔚波 | 可实现非接触激振距离微调及振动主动控制振教台 |
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2010
- 2010-06-07 CN CN2010101993225A patent/CN101881652B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US5164920A (en) * | 1990-06-21 | 1992-11-17 | Siemens Aktiengesellschaft | Composite ultrasound transducer and method for manufacturing a structured component therefor of piezoelectric ceramic |
CN1666952A (zh) * | 2005-03-29 | 2005-09-14 | 华中科技大学 | Mems圆片或器件的动态测试加载装置 |
CN101221065A (zh) * | 2007-12-16 | 2008-07-16 | 张蔚波 | 可实现非接触激振距离微调及振动主动控制振教台 |
Non-Patent Citations (2)
Title |
---|
《压电与声光》 20030630 胡晓冰等 多层压电陶瓷变压器振动模态分析与测量 第25卷, 第03期 2 * |
《压电与声光》 20070831 袁松梅等 新型二维压电光学扫描器 第29卷, 第04期 2 * |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102095490A (zh) * | 2010-11-19 | 2011-06-15 | 中国海洋石油总公司 | 一种压电晶片本征频率的测量方法 |
CN102095490B (zh) * | 2010-11-19 | 2012-05-09 | 中国海洋石油总公司 | 一种压电晶片本征频率的测量方法 |
CN102565531A (zh) * | 2012-02-07 | 2012-07-11 | 天津大学 | 压电换能器动态参数测量仪及测量方法 |
CN105716726A (zh) * | 2014-12-22 | 2016-06-29 | 罗斯蒙特公司 | 具有振动检测的温度传感器套管系统 |
US9885610B2 (en) | 2014-12-22 | 2018-02-06 | Rosemount Inc. | Thermowell system with vibration detection |
CN105716726B (zh) * | 2014-12-22 | 2018-12-25 | 罗斯蒙特公司 | 具有振动检测的温度传感器套管系统 |
CN105675120A (zh) * | 2016-04-26 | 2016-06-15 | 中国电子科技集团公司第二十六研究所 | 晶片频率测试装置 |
CN108428788A (zh) * | 2018-01-31 | 2018-08-21 | 清华大学 | 可抑制压电谐振的光学电压/电场传感器晶片的制作方法 |
CN108645529A (zh) * | 2018-05-09 | 2018-10-12 | 安徽大学 | 一种压电器件的自感知温度在线监测系统及方法 |
CN108613748A (zh) * | 2018-05-09 | 2018-10-02 | 安徽大学 | 一种基于压电陶瓷谐振电感的测温系统及方法 |
CN108645529B (zh) * | 2018-05-09 | 2020-09-22 | 安徽大学 | 一种压电器件的自感知温度在线监测系统及方法 |
CN109033574A (zh) * | 2018-07-10 | 2018-12-18 | 西安工程大学 | 考虑运行温度变化的输电导线模态分析方法 |
CN109033574B (zh) * | 2018-07-10 | 2023-06-06 | 西安工程大学 | 考虑运行温度变化的输电导线模态分析方法 |
CN111289096A (zh) * | 2020-02-24 | 2020-06-16 | 杭州电子科技大学 | 基于温度频率曲线的声表面波器件最佳工作频率确定方法 |
CN114137073A (zh) * | 2021-11-22 | 2022-03-04 | 吉林大学 | 测量固态介质对超声频振动激励响应的装置和方法 |
CN114137073B (zh) * | 2021-11-22 | 2024-01-26 | 吉林大学 | 测量固态介质对超声频振动激励响应的装置和方法 |
CN113899446A (zh) * | 2021-12-09 | 2022-01-07 | 北京京仪自动化装备技术股份有限公司 | 晶圆传送系统检测方法及晶圆传送系统 |
CN113899446B (zh) * | 2021-12-09 | 2022-03-22 | 北京京仪自动化装备技术股份有限公司 | 晶圆传送系统检测方法及晶圆传送系统 |
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Address after: 100010 Beijing, Chaoyangmen, North Street, No. 25, No. Patentee after: China National Offshore Oil Corporation Patentee after: CNOOC Research Institute Patentee after: Institute of metal research, Chinese Academy of Sciences Address before: 100010 Beijing, Chaoyangmen, North Street, No. 25, No. Patentee before: China National Offshore Oil Corporation Patentee before: CNOOC Research Center Patentee before: Institute of metal research, Chinese Academy of Sciences |
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