CN101871769B - Detection method of electronic speckles for synchronous carrier-frequency modulation in three-dimensional deformation field - Google Patents
Detection method of electronic speckles for synchronous carrier-frequency modulation in three-dimensional deformation field Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 6
- 230000001360 synchronised effect Effects 0.000 title 1
- 238000006073 displacement reaction Methods 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000005286 illumination Methods 0.000 claims abstract description 14
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- 239000005304 optical glass Substances 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- 229920005372 Plexiglas® Polymers 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
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- 229910021532 Calcite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
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Abstract
本发明提供了一种三维变形场同时载频调制的电子散斑检测方法，该方法是采用大错位方棱镜实现三个激光器近距离照明和使被测物面和参考物面近距离叠加成像；通过偏转参考物面引入载波条纹，对三个激光照明的散斑干涉条纹场一次性进行调制；物体加载后载波条纹受物体变形的调制而发生弯曲变形，三个激光器各自独立地对变形物体进行测量，采集物体变形前后的载波条纹和受调制的载波条纹，利用傅里叶变换法，分别解调得到包含离面和面内位移信息的三幅位相图；进行位相运算分离位移场的三个分量。本发明通过对参考物面的偏转同时实现了三个散斑干涉条纹场的调制，得到了高质量的调制条纹。具有光路简单，操作相对简单，测量精度高的优点。
The invention provides an electronic speckle detection method with simultaneous carrier frequency modulation in a three-dimensional deformation field. The method adopts a large dislocation square prism to realize close-range illumination of three lasers and close-range overlapping imaging of the measured object surface and the reference object surface; The carrier fringe is introduced by deflecting the reference object plane, and the speckle interference fringe field illuminated by the three lasers is modulated at one time; after the object is loaded, the carrier fringe is modulated by the deformation of the object to bend and deform, and the three lasers independently process the deformed object. Measurement, collecting the carrier fringe and the modulated carrier fringe before and after the deformation of the object, using the Fourier transform method to demodulate respectively to obtain three phase images containing out-of-plane and in-plane displacement information; performing phase operations to separate the three phase images of the displacement field portion. The invention simultaneously realizes the modulation of three speckle interference fringe fields by deflecting the reference object plane, and obtains high-quality modulation fringes. It has the advantages of simple optical path, relatively simple operation and high measurement accuracy.
Description
技术领域 technical field
本发明涉及一种变形场的载频电子散斑干涉三维位移分量的检测方法，属于采用载频电子散斑干涉测量物体变形三维分量的技术领域。The invention relates to a method for detecting three-dimensional displacement components of carrier-frequency electronic speckle interference of deformation fields, and belongs to the technical field of measuring three-dimensional components of object deformation by carrier-frequency electronic speckle interference.
背景技术 Background technique
在光力学测量中，电子散斑干涉测量技术可以精确测量物体的变形场，具有精度高、非接触、对隔震要求低等优点，在物体的静、动态测量中得到广泛应用。但目前典型的电子散斑干涉技术只能测量物体的一维变形。由于物体的变形是三维的，常常需要测量物体的二维或三维变形分量。时间相移和载频调制是两种有效的相位定量测量技术。与相移技术相比，干涉条纹空间调制的方法不需要精密的相移设备，对测量的环境要求低，具有适合动态测量的优点，在实际应用中有重要价值。在已有的研究成果中，应用相移电子散斑的方法测量三维位移分量已有报道。应用三个测量光路分别载频调制的电子散斑法已有报道，该方法对三个位移分量分别调制分别解调，光路复杂，本质上还是一维的载频调制。对三个位移分量一次性同时调制和解调的电子散斑方法还未见报道。In optomechanical measurement, electronic speckle interferometry technology can accurately measure the deformation field of an object. It has the advantages of high precision, non-contact, and low requirements for vibration isolation. It is widely used in static and dynamic measurement of objects. But the current typical electronic speckle interferometry technology can only measure the one-dimensional deformation of the object. Since the deformation of the object is three-dimensional, it is often necessary to measure the two-dimensional or three-dimensional deformation components of the object. Time phase shifting and carrier frequency modulation are two effective phase quantitative measurement techniques. Compared with phase-shift technology, the method of spatial modulation of interference fringes does not require sophisticated phase-shift equipment, has low requirements on the measurement environment, and has the advantage of being suitable for dynamic measurement, which is of great value in practical applications. In the existing research results, it has been reported that the three-dimensional displacement component is measured by the method of phase-shifting electronic speckle. The electronic speckle method using the carrier frequency modulation of three measurement optical paths has been reported. This method modulates and demodulates the three displacement components separately, the optical path is complicated, and it is essentially a one-dimensional carrier frequency modulation. An electronic speckle method that simultaneously modulates and demodulates three displacement components at once has not been reported yet.
发明内容 Contents of the invention
本发明针对现有载频电子散斑测量三维位移分量方法的不足，提供一种三维变形场同时载频调制的电子散斑检测方法，该方法可高质量的同时载频调制物体变形场的三个位移分量，一次性测量得到物体变形的三维位移分量。The present invention aims at the shortcomings of the existing carrier frequency electronic speckle measurement method for three-dimensional displacement components, and provides an electronic speckle detection method for simultaneous carrier frequency modulation of a three-dimensional deformation field. Displacement components, one-time measurement to obtain the three-dimensional displacement components of the object deformation.
本发明的三维变形场同时载频调制的电子散斑检测方法，是：The electronic speckle detection method of the three-dimensional deformation field simultaneous carrier frequency modulation of the present invention is:
在被测物一侧固定放置一与其平行但不接触的参考物，被测物中心和大错位方棱镜中心的连线与参考物中心和大错位方棱镜中心的连线形成的夹角与大错位方棱镜的分束角度相等；被测物的前方放置一个大错位方棱镜，被测物面和参考物面通过大错位方棱镜叠加成像，大错位方棱镜前面放置一个摄像头，用三个激光器从不同的方向分别同时照明被测物面和参考物面，三个激光器的前面均设有一个扩束镜；在被测物变形前，用三个激光器分别同时照明被测物面和参考物面，分别采集散斑干涉图像，得到三幅原始的被测物面散斑干涉图像，将参考物面偏转，再分别采集三幅被测物面散斑干涉图像，将对应同一激光器的、参考物面偏转前后得到的被测物面散斑干涉图像相减，得到三幅被测物面载波条纹图；保持参考物面偏转状态不变，被测物加载变形后，再用三个激光器分别同时照明被测物面和参考物面，分别采集被测物变形后的三幅被测物面散斑干涉图像，将被测物变形后的三幅被测物面散斑干涉图像与三幅原始的被测物面散斑干涉图像相减，得到三幅被测物面受调制载波条纹图；三幅被测物面受调制载波条纹图与三幅被测物面载波条纹图结合，利用傅里叶变换法分别解调，得到对应三个激光器照明的包含离面位移和面内位移分量信息的三幅相位图；对三幅相位图进行相位运算得到三维位移场分量。A reference object parallel to but not in contact with it is fixedly placed on one side of the measured object, the angle formed by the connection line between the center of the measured object and the center of the large dislocation square prism and the connection line between the center of the reference object and the center of the large dislocation square prism and the large The beam splitting angles of the misaligned square prism are equal; a large misaligned square prism is placed in front of the measured object, and the measured object surface and the reference object surface are superimposed and imaged through the large misaligned square prism. A camera is placed in front of the large misaligned square prism, and three lasers are used Simultaneously illuminate the measured object surface and the reference object surface from different directions, and a beam expander is installed in front of the three lasers; before the measured object is deformed, use three lasers to simultaneously illuminate the measured object surface and the reference object respectively Surface, collect speckle interference images separately, get three original speckle interference images of the measured object surface, deflect the reference object surface, and then collect three speckle interference images of the measured object surface respectively, and convert the corresponding The speckle interference images of the measured object surface obtained before and after the object plane deflection are subtracted to obtain three carrier fringe images of the measured object surface; keep the deflection state of the reference object plane unchanged, and after the measured object is loaded and deformed, three lasers are used to separate At the same time, the surface of the measured object and the reference object are illuminated, and three speckle interference images of the measured object surface after the deformation of the measured object are collected respectively, and the three speckle interference images of the measured object surface after the deformation of the measured object are combined with the three The original speckle interference images of the measured object surface are subtracted to obtain three modulated carrier fringe images of the measured object surface; the three modulated carrier fringe images of the measured object surface are combined with the three carrier fringe images of the measured object surface. The Fourier transform method is demodulated separately to obtain three phase images corresponding to the three laser illuminations, including out-of-plane displacement and in-plane displacement component information; performing phase operations on the three phase images to obtain three-dimensional displacement field components.
大错位方棱镜为中国专利文献CN201364392公开的《一种实现电子散斑干涉的大错位方棱镜》，该大错位方棱镜由普通光学玻璃磨制的二个直角三角棱镜组成，其中一个直角三角棱镜的斜面上镀有半透半反膜，这二个直角三角棱镜的斜面用光学胶粘合在一起形成方棱镜，该方棱镜的一个反射面是磨去一个楔角α的斜面，α在1°到10°之间，方棱镜的入射光所在的面和出射光所在的面镀有增透膜，两个反射面均镀有全反射膜。该大错位方棱镜采用普通光学玻璃取代了现有技术中昂贵的方解石晶体，通过对普通光学玻璃制备的方棱镜进行磨制实现了电子散斑干涉，结构简单，能够很好的控制分束角，获得的干涉条纹质量好，容易实现干涉。The large dislocation square prism is "a large dislocation square prism for realizing electronic speckle interference" disclosed in Chinese patent document CN201364392. The large dislocation square prism is composed of two right-angle triangular prisms ground from ordinary optical glass, one of which is The slope of the square prism is coated with a semi-transparent and semi-reflective film, and the slopes of the two right-angle triangular prisms are glued together with optical glue to form a square prism. Between ° and 10°, the surface of the square prism where the incident light is located and the surface where the outgoing light is located are coated with an anti-reflection coating, and the two reflecting surfaces are coated with a total reflection coating. The large dislocation square prism uses ordinary optical glass to replace the expensive calcite crystal in the prior art, and realizes electronic speckle interference by grinding the square prism made of ordinary optical glass. It has a simple structure and can well control the beam splitting angle. , the obtained interference fringes are of good quality and easy to achieve interference.
本发明采用大错位方棱镜使被测物体面和参考物面近距离叠加成像，通过偏转参考物面引入载波条纹，对三个激光照明干涉场一次性进行调制；三维变形场同时载频调制的电子散斑技术，结合傅里叶变换方法，可以实现变形场三个位移分量的同时测量。该方法具有光路简单，操作相对简单，测量精度高的优点。The present invention uses a large dislocation square prism to superimpose and image the measured object plane and the reference object plane at a close distance, introduces carrier stripes by deflecting the reference object plane, and modulates three laser illumination interference fields at one time; the carrier frequency modulation of the three-dimensional deformation field simultaneously The electronic speckle technology, combined with the Fourier transform method, can realize the simultaneous measurement of the three displacement components of the deformation field. This method has the advantages of simple optical path, relatively simple operation and high measurement accuracy.
附图说明 Description of drawings
图1是典型的单光束照明电子散斑干涉系统光路示意图。Figure 1 is a schematic diagram of the optical path of a typical single-beam illumination electronic speckle interference system.
图2是三维载频调制的电子散斑干涉系统示意图。Fig. 2 is a schematic diagram of an electronic speckle interference system for three-dimensional carrier frequency modulation.
图3是第一激光器照明时被测物体变形前载波条纹图。Fig. 3 is a carrier fringe diagram before deformation of the measured object when illuminated by the first laser.
图4是第二激光器照明时被测物体变形前载波条纹图。Fig. 4 is a carrier fringe diagram before deformation of the measured object when illuminated by the second laser.
图5是第三激光器照明时被测物体变形前载波条纹图。Fig. 5 is a carrier fringe diagram before deformation of the measured object when illuminated by the third laser.
图6是第一激光器照明时被测物体变形后受调制载波条纹图。Fig. 6 is a fringe diagram of the modulated carrier wave after the deformation of the measured object when the first laser is illuminated.
图7是第二激光器照明时被测物体变形后受调制载波条纹图。Fig. 7 is a fringe diagram of the modulated carrier after the measured object is deformed when illuminated by the second laser.
图8是第三激光器照明时被测物体变形后受调制载波条纹图。Fig. 8 is a fringe diagram of the modulated carrier after the measured object is deformed when illuminated by the third laser.
图9是第一激光器照明时的物体变形包络相位图。Fig. 9 is a deformation envelope phase diagram of an object when illuminated by a first laser.
图10是第二激光器照明时的物体变形包络相位图。Fig. 10 is a phase diagram of the deformation envelope of the object when illuminated by the second laser.
图11是第三激光器照明时的物体变形包络相位图。Fig. 11 is a phase diagram of an object deformation envelope when illuminated by a third laser.
图12是分离出的面内位移分量(u场)的条纹图。Figure 12 is a fringe diagram of the isolated in-plane displacement component (u-field).
图13是分离出的面内位移分量(v场)的条纹图。Figure 13 is a fringe diagram of the isolated in-plane displacement component (v-field).
图14是分离出的离面位移分量(w场)的条纹图。Figure 14 is a fringe plot of the isolated out-of-plane displacement component (w field).
具体实施方式 Detailed ways
要获得变形场的位移分量值，一般采用三点照明的方法，即改变下式(1)中的入射角度，并实现三幅相位场的测量，通过相位分离计算得到位移场的分量值。三维变形的物体例子在工程测量中常常遇见，以有机玻璃制成的简支梁为被测物体说明本发明的三维变形场同时载频调制的电子散斑检测方法。To obtain the displacement component value of the deformation field, the method of three-point illumination is generally used, that is, changing the incident angle in the following formula (1), and realizing the measurement of three phase fields, and calculating the component value of the displacement field through phase separation. Examples of three-dimensional deformed objects are often encountered in engineering surveys. A simply supported beam made of plexiglass is used as the measured object to illustrate the electronic speckle detection method of the present invention with three-dimensional deformation field simultaneous carrier frequency modulation.
典型的单光束照明电子散斑干涉系统如图1所示，包括激光器、反射镜、扩束镜、透镜、半透半反镜和摄像头，测量的是物体变形的混合场。当入射到被测物体表面的照明光束的入射角是θ时，被测物体表面变形引起的相位变化Δφ可由位移分量和入射角θ表示：A typical single-beam illumination electronic speckle interferometry system is shown in Figure 1, including lasers, reflectors, beam expanders, lenses, half-mirrors and cameras, and measures the mixed field of object deformation. When the incident angle of the illumination beam incident on the surface of the measured object is θ, the phase change Δφ caused by the deformation of the measured object surface can be expressed by the displacement component and the incident angle θ:
式(1)中，w表示物体的离面位移，u代表物体的面内位移水平分量，λ是所用激光的波长，θ是照明光与被测物体表面法线的夹角。In formula (1), w represents the out-of-plane displacement of the object, u represents the horizontal component of the in-plane displacement of the object, λ is the wavelength of the laser used, and θ is the angle between the illumination light and the surface normal of the measured object.
对于三维载频调制的电子散斑干涉系统，如图2所示，当只有第一激光器照射时，被测物体变形前后的相位变化关系式可以由(1)式得出为：For the three-dimensional carrier frequency modulated electronic speckle interferometry system, as shown in Figure 2, when only the first laser is irradiated, the phase change relationship before and after the deformation of the measured object can be obtained from formula (1):
同理，对于只有第二激光器或第三激光器照射的干涉系统，被测物体变形前后的相位变化关系式分别为：Similarly, for the interference system irradiated by only the second laser or the third laser, the relationship expressions of the phase change before and after the deformation of the measured object are respectively:
上述(2)、(3)、(4)三式中，u、v、w分别对应被测物体在x、y、z三个坐标轴方向上的变形分量。θ1、θ2和θ3分别是三个激光器照明物体的入射角度，三个角度的大小可通过扩束镜的坐标计算得到。通过联立(2)、(3)、(4)三式，求解出被测物体的三维变形量u、v、w。In the above three formulas (2), (3), and (4), u, v, and w respectively correspond to the deformation components of the measured object in the directions of the three coordinate axes of x, y, and z. θ 1 , θ 2 and θ 3 are the incident angles of the objects illuminated by the three lasers, and the sizes of the three angles can be calculated from the coordinates of the beam expander. By combining the three equations (2), (3) and (4), the three-dimensional deformation u, v, w of the measured object is solved.
干涉条纹场经线性调制后，变成密集的、含有变形信息的载波条纹。受调制的载波条纹可表述为：After the interference fringe field is linearly modulated, it becomes dense carrier fringes containing deformation information. The modulated carrier stripe can be expressed as:
I(x，y)＝a(x，y)+b(x，y)cos[Δφ(x，y)+2πf0x] (5)I(x,y)=a(x,y)+b(x,y)cos[Δφ(x,y)+2πf 0 x] (5)
其中，a(x，y)为背景光强，b(x，y)为条纹幅值，b(x，y)/a(x，y)通常称为条纹对比度，Δφ(x，y)为物体变形引起的位相变化，即待求位相，它们都是空间位置的函数。式中f0是物体偏转引入的沿x轴方向的空间频率。Among them, a(x, y) is the background light intensity, b(x, y) is the fringe amplitude, b(x, y)/a(x, y) is usually called fringe contrast, Δφ(x, y) is The phase change caused by the deformation of the object, that is, the phase to be sought, is a function of the spatial position. where f 0 is the spatial frequency along the x-axis direction introduced by the deflection of the object.
其中，λ是所用激光的波长，θ是照明光与被测物体表面法线的夹角，Δα为物体转动的微小角度。Among them, λ is the wavelength of the laser used, θ is the angle between the illumination light and the surface normal of the measured object, and Δα is the tiny angle of the object's rotation.
由(1)式可知，受调制的干涉条纹的相移量不随时间变化，而是随空间变化。载波条纹在x方向上的光强表达式(5)可表示为It can be seen from formula (1) that the phase shift of modulated interference fringes does not vary with time, but varies with space. The light intensity expression (5) of the carrier stripe in the x direction can be expressed as
I(x，y)＝a(x，y)+c(x，y)exp(j2πf0x)+c*(x，y)exp(-j2πf0x) (7)I(x, y) = a(x, y) + c(x, y) exp(j2πf 0 x) + c * (x, y) exp(-j2πf 0 x) (7)
其中，j代表虚部单位，*表示复数的共轭。c(x，y)用复数形式来表示，为Among them, j represents the unit of the imaginary part, and * represents the conjugate of the complex number. c(x, y) is expressed in plural form as
在x轴方向对光强I(x，y)进行傅立叶变换可以得到Perform Fourier transform on the light intensity I(x, y) in the x-axis direction to get
H(fx，y)＝A(fx，y)+C(fx-f0，y)+C*(fx+f0，y) (9)H(f x ,y)=A(f x ,y)+C(f x -f 0 ,y)+C * (f x +f 0 ,y) (9)
其中，A(fx，y)是由背景光强和低频噪声变换得到的。用适当的滤波器将A(fx，y)和C*(fx+f0，y)滤掉，得到C(fx-f0，y)后将其移到原点变为C(fx，y)，再做傅立叶逆变换得到c(x，y)，可得到相位分布：Among them, A(f x , y) is obtained by transforming the background light intensity and low-frequency noise. Filter out A(f x , y) and C * (f x +f 0 , y) with an appropriate filter, get C(f x -f 0 , y) and move it to the origin to become C(f x , y), then inverse Fourier transform to get c(x, y), and the phase distribution can be obtained:
其中，Re和Im表示取复数的实部和虚部。由式(10)得到的是主值在[-π，π]内的变化的包络位相，需要解包络运算才能将其连续化。Among them, Re and Im represent to take the real part and the imaginary part of the complex number. What is obtained by formula (10) is the envelope phase of the variation of the principal value within [-π, π], which needs to be unwrapped to be continuous.
三维载频调制的电子散斑干涉系统如图2所示，包括三个激光器、三个扩束镜、一个大错位方棱镜、和摄像头(包含透镜)，大错位方棱镜采用中国专利文献CN201364392公开的《一种实现电子散斑干涉的大错位方棱镜》。激光光源为He-Ne激光器，光源波长为0.6328μm。参考物面临近放置在被测物体旁边。被测物体为有机玻璃制成的简支梁，其长为150.0mm，高19.5mm，厚18.5mm。加载的跨距为70.0mm。在简支梁表面涂以水性涂料以增强其反射率。选取被测物体的中心轴线(表面法线)为z轴，建立三维坐标系xyz。参考物面由步进电机驱动，可在x-z方向、y-z方向做微小偏转。选择三个功率、光强近似相等的激光器1、激光器2和激光器3。将激光器1前面的扩束镜1和激光器2前面的扩束镜2布置于x轴上，且分布于z轴两侧位置；激光器3前面的扩束镜3则布置于y轴正半轴上，使得分别位于三个激光器前方的扩束镜近似共面于xoy面。同时，激光器1、激光器2和激光器3发出的激光束与z轴(被测物体表面法线)分别成θ1、θ2和θ3。在被测物体正前方的z轴上，放置有大错位方棱镜，用于接收物光和参考光。大错位方棱镜前放置摄像机。物光和参考光经过大错位方棱镜在CCD靶面叠加产生散斑干涉，干涉散斑图像经CCD接入计算机，通过数字图像处理系统进行数据处理。为了更具一般性，三个激光器距xyz坐标系原点O的距离是任意的，即三个激光器的位置具有随意性。各个激光器光束的入射角度由各个激光器前方各个扩束镜相对于被测物体的坐标数值确定。The three-dimensional carrier frequency modulated electronic speckle interference system is shown in Figure 2, including three lasers, three beam expanders, a large misaligned square prism, and a camera (including a lens), and the large misaligned square prism is disclosed in Chinese patent document CN201364392 "A Large Displacement Square Prism Realizing Electronic Speckle Interference". The laser light source is a He-Ne laser with a wavelength of 0.6328 μm. The reference object is placed close to the object to be measured. The measured object is a simply supported beam made of plexiglass, with a length of 150.0mm, a height of 19.5mm, and a thickness of 18.5mm. The loaded span is 70.0mm. Water-based paint is applied to the surface of the Charpy beam to enhance its reflectivity. Select the central axis (surface normal) of the measured object as the z-axis, and establish a three-dimensional coordinate system xyz. The reference object plane is driven by a stepping motor, which can be slightly deflected in the xz direction and yz direction. Choose three lasers 1, 2 and 3 with approximately equal power and intensity. The beam expander 1 in front of the laser 1 and the beam expander 2 in front of the laser 2 are arranged on the x-axis and distributed on both sides of the z-axis; the beam expander 3 in front of the laser 3 is arranged on the positive semi-axis of the y-axis , so that the beam expanders located in front of the three lasers are approximately coplanar to the xoy plane. At the same time, the laser beams emitted by laser 1, laser 2 and laser 3 are respectively at the angle of θ 1 , θ 2 and θ 3 with respect to the z-axis (the surface normal of the measured object). On the z-axis directly in front of the measured object, a large misalignment square prism is placed to receive the object light and reference light. Place the camera in front of the large misaligned square prism. The object light and reference light are superimposed on the CCD target surface through a large misalignment square prism to produce speckle interference, and the interference speckle image is connected to the computer through the CCD, and the data is processed through the digital image processing system. To be more general, the distances between the three lasers and the origin O of the xyz coordinate system are arbitrary, that is, the positions of the three lasers are arbitrary. The incident angle of each laser beam is determined by the coordinate values of each beam expander in front of each laser relative to the measured object.
首先，激光器1、激光器2和激光器3分别从水平和竖直三个不同的方向照明被测物和参考物，三个激光器和成像系统分别形成大错位电子散斑干涉系统。分别采集散斑干涉图像，得到对应激光器1、激光器2和激光器3照明的三幅原始的被测物面的散斑干涉图像；参考物面偏转后再分别采集三幅散斑干涉图像。对应同一激光器的散斑干涉图像相减，得到三幅载波条纹图。激光器1照明时的载波条纹图如图3所示，激光器2照明时的载波条纹图如图4所示，激光器3照明时的载波条纹图如图5所示。First, laser 1, laser 2 and laser 3 respectively illuminate the measured object and the reference object from three different horizontal and vertical directions, and the three lasers and the imaging system respectively form a large displacement electronic speckle interference system. The speckle interference images are collected separately to obtain three original speckle interference images of the measured object surface illuminated by laser 1, laser 2, and laser 3; three speckle interference images are collected after the deflection of the reference object surface. The speckle interference images corresponding to the same laser are subtracted to obtain three carrier fringe images. The carrier fringe pattern when laser 1 is illuminated is shown in Figure 3, the carrier fringe pattern when laser 2 is illuminated is shown in Figure 4, and the carrier fringe pattern when laser 3 is illuminated is shown in Figure 5.
被测物变形后，再分别采集三幅散斑干涉图像，该三幅图像与对应同一照明激光器的原始物面散斑干涉图像相减，得到三幅受调制的载波条纹图。载波条纹受物体变形的调制而发生弯曲。激光器1照明时的受调制的载波条纹如图6所示，激光器2照明时的受调制的载波条纹如图7所示，激光器3照明时的受调制的载波条纹如图8所示。After the measured object is deformed, three speckle interference images are collected respectively, and the three images are subtracted from the original speckle interference image corresponding to the same illumination laser to obtain three modulated carrier fringe images. The carrier fringes are curved as modulated by the deformation of the object. The modulated carrier fringe when illuminated by laser 1 is shown in FIG. 6 , the modulated carrier fringe when illuminated by laser 2 is shown in FIG. 7 , and the modulated carrier fringe when illuminated by laser 3 is shown in FIG. 8 .
对应每一照明激光器，有二幅条纹图：物体变形前的载波条纹图和物体变形后的受调制的载波条纹图。利用傅里叶变换法解调，得到该激光器照明的包含离面位移和面内位移分量信息的一幅包络相位图。三个激光器照明，共得到三幅包络相位图。激光器1照明时的物体变形包络相位图如图9所示，激光器2照明时的物体变形包络相位图如图10所示，激光器3照明时的物体变形包络相位图如图11所示。图9、图10、图11为物体混合变形场，经相位解包络并运用式(2)、式(3)和式(4)计算，可分离得到x、y、z三个坐标轴方向上的变形分量的相位分布，即位移分量u、v、w的相位场。为了方便对照，根据分离出的相位场重建成条纹图的形式，面内位移u场的条纹图如图12所示，面内位移v场的条纹图如图13所示，离面位移w场条纹图如图14所示。Corresponding to each illumination laser, there are two fringe patterns: the carrier fringe pattern before the object is deformed and the modulated carrier fringe pattern after the object is deformed. Using the Fourier transform method to demodulate, an envelope phase diagram containing out-of-plane displacement and in-plane displacement component information of the laser illumination is obtained. Illuminated by three lasers, a total of three envelope phase maps were obtained. The envelope phase diagram of object deformation when illuminated by laser 1 is shown in Figure 9, the envelope phase diagram of object deformation when illuminated by laser 2 is shown in Figure 10, and the envelope phase diagram of object deformation when illuminated by laser 3 is shown in Figure 11 . Figure 9, Figure 10, and Figure 11 are the mixed deformation fields of the object. After phase unenvelopment and calculation using formula (2), formula (3) and formula (4), the three coordinate axes directions of x, y and z can be obtained separately The phase distribution of the deformation component on , that is, the phase field of the displacement components u, v, w. For the convenience of comparison, the fringe pattern is reconstructed according to the separated phase field. The fringe pattern of the in-plane displacement u field is shown in Fig. 12, the fringe pattern of the in-plane displacement v field is shown in Fig. 13, and the fringe pattern of the out-of-plane displacement w field The fringe pattern is shown in Figure 14.
本发明利用三光束激光照明的电子散斑系统，采用大错位方棱镜使被测物体和参考物面近距离叠加成像，通过偏转参考物面引入载波条纹，对三个激光照明干涉场一次性进行调制；利用傅里叶变换法，分别解调得到包含离面和面内位移信息的三幅位相图；进行位相运算分离位移场的三个分量。特点是对物体变形的三个散斑干涉条纹场的载频调制是一次性的；变形场的三个位移分量是从混合位移场计算得到，不是分别测量得到。The invention utilizes the electronic speckle system illuminated by three-beam lasers, adopts a large dislocation square prism to superimpose and image the measured object and the reference object plane at close range, introduces carrier fringes by deflecting the reference object plane, and conducts three laser illumination interference fields at one time. Modulation: use Fourier transform method to demodulate to obtain three phase maps containing out-of-plane and in-plane displacement information respectively; perform phase operation to separate the three components of the displacement field. The characteristic is that the carrier frequency modulation of the three speckle interference fringe fields of object deformation is one-time; the three displacement components of the deformation field are calculated from the mixed displacement field, not measured separately.
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