CN101852614B - Miniature polarized light detecting device of navigation sensor - Google Patents
Miniature polarized light detecting device of navigation sensor Download PDFInfo
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- CN101852614B CN101852614B CN2010102030624A CN201010203062A CN101852614B CN 101852614 B CN101852614 B CN 101852614B CN 2010102030624 A CN2010102030624 A CN 2010102030624A CN 201010203062 A CN201010203062 A CN 201010203062A CN 101852614 B CN101852614 B CN 101852614B
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 24
- 239000010703 silicon Substances 0.000 claims abstract description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 6
- 230000005693 optoelectronics Effects 0.000 claims description 34
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 230000011218 segmentation Effects 0.000 claims description 5
- 230000001154 acute effect Effects 0.000 claims description 4
- 210000001507 arthropod compound eye Anatomy 0.000 claims description 4
- 230000010287 polarization Effects 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 238000004088 simulation Methods 0.000 claims description 3
- HJELPJZFDFLHEY-UHFFFAOYSA-N silicide(1-) Chemical compound [Si-] HJELPJZFDFLHEY-UHFFFAOYSA-N 0.000 claims 2
- 241000238631 Hexapoda Species 0.000 abstract description 5
- 150000001875 compounds Chemical class 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 2
- 230000007613 environmental effect Effects 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
- 238000004364 calculation method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 241000256844 Apis mellifera Species 0.000 description 1
- 241001142707 Cataglyphis viatica Species 0.000 description 1
- 241000254173 Coleoptera Species 0.000 description 1
- 241000238814 Orthoptera Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000001537 neural effect Effects 0.000 description 1
- 238000013341 scale-up Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The invention relates to a miniature polarized light detecting device of a navigation sensor, belonging to the design field of sensors, which is designed by imitating the compound eye structure of an insect. The detecting device comprises three channels, and each channel comprises two unit sets including six units. Each unit is provided with a miniature raster and a photoelectric film to imitate one nervous rhabdomer of the compound eyes of the insect. The bottom layer of the device is provided with an insulator on which three silicon wafers comprising base silicon, a silica buried layer and an N type silicon-doped substrate are arranged, and six units are established on the N type silicon-doped substrate. The invention has the characteristics of simple structure, small size, high precision and the like. Navigation angle information obtained by using the method has high reliability, and the detecting device has high environmental robustness, precision and real-time performance and can be used for navigation systems with higher requirements.
Description
Technical field
The invention belongs to the Sensor Design field, particularly a kind of miniature polarized light detecting device of copying the navigation sensor of insect compound eye structural design.
Background technology
The navigation sensor that provides directional information in the present navigation sensor mainly contain inertial gyroscope, magnetic compass, astronomical sextant etc.Inertial gyroscope is used the most extensive, though its instantaneous precision is higher, the accumulation of error is arranged, and high higher, the complex structure of gyroscope cost of precision; The ground magnetic compass is the sensor that utilizes the terrestrial magnetic field to navigate, and is various informative, simple in structure, but precision is lower, and is interfered easily; Astronomical sextant is a typical sensors of utilizing optical means calculated direction information, and it is simple in structure, and precision is higher, but can not realize providing directional information automatically, needs manual shift.Number of patent application is 200810057351.0 visual light navigation sensor; The inventor has Wang Li, Lu Xin, Wei Zhijun, Gong Dezhu; Liu Lu through plesioaster, fixed star are carried out to picture, and calculates plesioaster center vector, orbit altitude and the inertia attitude that satellite navigation needs; Visible light pick-up unit complex structure, and calculate relative complex.Number of patent application is 200510110761.3 high precision polarized light navigating instrument, and the inventor has Li Dailin, Wang Xiangchao, and Huang Xufeng detects the sky polarized light through the polarized light lens barrel, and precision is high, but the structure relative complex, and volume is relatively large.
Summary of the invention
The technical barrier that the present invention will solve is the weak point to above-mentioned patent, designs a kind of miniature polarized light detecting device that is used for navigation sensor.Have that volume is little, simple in structure, calculated amount is less relatively, the noncumulative characteristics of error.
The technical scheme that the present invention adopts: device has first, second, third a, b, three passages of c; First passage a is made up of first, second unit a1, a2; Second channel b is made up of the 3rd, the 4th unit b1, b2; Third channel c is made up of the 5th, the 6th unit c1, c2, and each unit all has a miniature grating and an optoelectronic film, and the bottom of device is that SOI wafer is called the SOI sheet; The SOI sheet has three layers: 3, six unit, the doped silicon based end of base silicon 1, silicon dioxide buried regions 2 and N type are based upon the N type at doped silicon based the end 3; The optoelectronic film structure of six unit is identical in the device, and the optoelectronic film sensitive wave length is the 380-500 nanometer, and there is square ring-type slot segmentation 4 outer ring of optoelectronic film, and it is negative poles of optoelectronic film that square ring-type slot segmentation 4 inwardly has N type heavily doped silicon substrate 5; Aluminum metal external electrode 6 is positioned at the upper strata of N type heavily doped silicon substrate 5; Electrode 8 is in the inboard of N type heavily doped silicon substrate 5 and aluminum metal external electrode 6 in the aluminum metal of optoelectronic film, is connected the photosensitive area that the doped silicon based end 7 of P type is optoelectronic films as electrode 8 in the doped silicon based end 7 of the P type of optoelectronic film negative electrode and the aluminum metal; Six miniature gratings in unit all are positioned at top, optoelectronic film photosensitive area, and miniature grating is divided into two-layer, and metallic aluminium grating 10 is on silica-primed 9; Miniature grating window is a square, and the dutycycle of each miniature grating in unit, cycle are identical with highly all, and miniature grating dutycycle is 0.5, and the cycle is 100nm, highly is 160nm; Six miniature grating orientations are different; Respectively with the length of side direction of miniature grating as coordinate axis; Set up coordinate system; The angle of grating orientation and coordinate axis positive and negative is that to be rotated counterclockwise the acute angle that coordinate axis obtains with the grating orientation be positive angle, and being rotated clockwise to the acute angle that coordinate axis obtains is negative angle; The miniature grating orientation of the first module a1 of first passage a is parallel to the y direction of principal axis, and the miniature grating orientation of the second unit a2 is parallel to the x direction of principal axis; The miniature grating orientation of the 3rd unit b1 of second channel b becomes 30 ° of angles with the x direction of principal axis, the miniature grating orientation of the 4th unit b2 becomes 30 ° of angles with the y direction of principal axis; The miniature grating orientation of the 5th unit c1 of third channel c becomes-30 ° of angles with the x axle, the miniature grating orientation of the 6th unit c2 becomes-30 ° of angles with the y direction of principal axis.
The invention has the beneficial effects as follows the miniature polarized light detecting device that adopts the present invention to make navigation sensor, obtain directional information through detecting the atmospheric polarization optical mode, simple in structure, precision is high, and is real-time, can be used for navigational system.
Description of drawings
Accompanying drawing 1-miniature polarized light detecting device oblique view, accompanying drawing 2 are miniature polarized light detecting device top layer grating orientation synoptic diagram, and accompanying drawing 3-miniature polarized light detecting device vertical view, accompanying drawing 4 are miniature polarized light detecting device cut-open view A; Accompanying drawing 5 is miniature polarized light detecting device cut-open view B, among the figure: a-first passage, b-second channel, c-third channel; The a1-first module, a2-Unit second, b1-Unit the 3rd, b2-Unit the 4th; C1-Unit the 5th, c2-Unit the 6th, 1-base silicon, 2-silicon dioxide layer; The doped silicon based end of 3-N type, 4-slot segmentation, the substrate of 5-N type heavily doped silicon, 6-aluminum metal external electrode; The doped silicon based end of 7-P type, electrode in the 8-aluminum metal, 9-silica-primed, 10-metallic aluminium grating.
Embodiment
Specify embodiment of the present invention in conjunction with accompanying drawing and technical scheme.
Biologist research shows, some insects, and cricket, honeybee, desert ant, beetles etc. can be through the activity of grade of looking for food of sensing sky polarized light pattern.Biological this unusual function mainly is the compound eye that relies on them, and then the biologist has provided the structure of these insect compound eyes through research.The present invention adopts MEMS technology and IC design technology according to the compound eye structural of insect, has made a kind of miniature polarized light detecting device that is used for navigation sensor.During use; Two unit output currents of each passage of device are connected to two electric current input pins of logarithmic amplifier; Then the logarithmic amplifier output voltage values is carried out simple process, can get the y axle and the direct north angle of auto levelizer, the structure of device is as shown in Figure 1.The base silicon 1 of SOI wafer and the support section of silicon dioxide buried regions 2 as whole device, device is based upon the N type of SOI wafer at doped silicon based the end 3.Device is by first, second, third a, b, three passages of c; Totally six unit constitute; First passage a is made up of first, second unit a1, a2, and first passage b is made up of the 3rd, the 4th unit b1, b2, and first passage c is made up of the 5th, the 6th unit c1, c2; Each unit all has miniature grating and optoelectronic film two parts, and miniature grating is on the optoelectronic film photosensitive area.A kind of neural sense bar of each unit simulation insect compound eye.The optoelectronic film structure of six unit is identical, and the sensitive wave length of optoelectronic film is the 380-500 nanometer, structure such as Fig. 3, Fig. 4; Shown in Figure 5; The optoelectronic film principle of work is: when the photosensitive area of rayed at optoelectronic film, produce photocurrent, strength of current direct ratio and light intensity value.During making,, carry out the heavy doping of N type at doped silicon based the end 3, form N type heavily doped region 5, as the optoelectronic film negative pole in the N of SOI wafer sheet type; Carry out the heavy doping of P type then, form P type heavily doped region 7, anodal as optoelectronic film, P type heavily doped region 7 is photosensitive areas of optoelectronic film; On N type heavily doped region 5 and P type heavily doped region 7, make electrode 8 in aluminum metal external electrode 6 and the aluminum metal respectively, the photocurrent that produces is drawn, so just formed optoelectronic film.Optoelectronic film simulation insect compound eye photosensitive structure converts light signal into current signal.
Adopt nanometer embossing to make grating then in the optoelectronic film photosensitive area.Grating cycle, the dutycycle of six unit are identical with highly all, and direction is different.Each unit grating orientation is as shown in Figure 2; The sky polarization sensitive of the grating pair respective direction of different directions, so corresponding sky polarized light get into optoelectronic film through grating; Be converted into current signal, this current signal is just represented sky polarized light pattern information.Be similar to the terrestrial magnetic field; Sky polarized light pattern information is fixed with same place at one time, and the present invention obtains the sky polarized light pattern information represented with electric current, and current signal is input to two electric current input pins of logarithmic amplifier; Obtain magnitude of voltage after taking the logarithm through the AD conversion; Be input to single-chip microcomputer and calculate, can obtain the y direction and the direct north angle of miniature polarized light detecting device, concrete computing method are following:
Theoretical according to the sky polarized light, following formula is satisfied through the polarized light light intensity of single grating in the same place of synchronization:
Wherein, I is total light intensity, I=I
Max+ I
Min, I
MaxAnd I
MinBe respectively largest light intensity and minimum intensity of light, d is a degree of polarization,
Be miniature polarized light detecting device y direction and sun meridian angle,
Be feasible
Miniature polarized light detecting device y direction and sun meridian angle when getting maximal value, K is a constant.According to the orientation of the grating shown in the accompanying drawing 2, the light intensity of the grating through each unit is following:
The sky polarized light through grating after through converting current signal behind the photodiode into; Because electric current and light intensity that optoelectronic film produces are directly proportional; Therefore the current value of each unit output only needs in formula (2), (3), (4), (5), (6), and (7) multiply by a scale-up factor and got final product.
With miniature polarized light detecting device first, second, third passage a, b, the output current of respectively corresponding two unit of c inserts logarithmic amplifier chip two ends, and logarithmic amplifier work operational formula is:
With one of them unit a1 of three passages, b1, c1 exports respectively as I
1, another unit a2 of three passages, b2, c2 exports respectively as I
2, obtain three voltage output values:
First passage a:
Second channel b:
Third channel c:
The output voltage values V of logarithmic amplifier
1, V
2, V
3Can pass through the AD conversion and become digital quantity, adopt single-chip microcomputer like this with formula (9), (10), any two formula programming can calculate navigation information in (11): miniature polarized light detecting device y direction and sun meridian angle
As long as the same at one time place of sun meridian and direct north angle is a fixed value, and concrete Research on Calculation personnel provide, therefore with miniature polarized light detecting device y direction and sun meridian angle
Add that a fixed angle just can obtain miniature polarized light detecting device and direct north angle, be used for navigation.
Adopt measurement device sky polarized light of the present invention, navigate with resulting angle information, calculated amount is less relatively, error is not accumulated, precision high.
Claims (1)
1. the miniature polarized light detecting device of a navigation sensor; It is characterized in that: device has the 1st, the 2nd, the 3rd passage (a, b, c); The 1st passage (a) is made up of first, second unit (a1, a2); The 2nd passage (b) is made up of Unit the 3rd, the 4th (b1, b2), and the 3rd passage (c) is made up of Unit the 5th, the 6th (c1, c2), and each unit all has a miniature grating and an optoelectronic film; The bottom of device is that SOI wafer is called the SOI sheet; The SOI sheet has three layers to be respectively base silicon (1), silicon dioxide layer (2) and the doped silicon based end of N type (3), and base silicon (1) and silicon dioxide layer (2) are as the support section of whole device, and six unit all are based upon at the doped silicon based end of N type (3); The optoelectronic film structure of six unit is identical in the device, and the optoelectronic film sensitive wave length is the 380-500 nanometer, and there is square ring-type slot segmentation (4) outer ring of optoelectronic film, and it is the negative pole of optoelectronic film that square ring-type slot segmentation (4) inwardly has N type heavily doped silicon substrate (5); Aluminum metal external electrode (6) is positioned at the upper strata of N type heavily doped silicon substrate (5); Electrode (8) is in the inboard of N type heavily doped silicon substrate (5) and aluminum metal external electrode (6) in the aluminum metal of optoelectronic film; The doped silicon based end of P type (7) as the optoelectronic film negative electrode is connected with the interior electrode (8) of aluminum metal, and the doped silicon based end of P type (7) is the photosensitive area of optoelectronic film; Optoelectronic film simulation insect compound eye photosensitive structure converts light signal into electric signal, and the photocurrent of generation is drawn by electrode (8) in aluminum metal external electrode (6) and the aluminum metal; Six miniature gratings in unit all are positioned at top, optoelectronic film photosensitive area, and miniature grating is divided into two-layer, and metallic aluminium grating (10) is on silica-primed (9); Miniature grating window is a square, and the dutycycle of each miniature grating in unit, cycle are identical with highly all, and miniature grating dutycycle is 0.5, and the cycle is 100nm, highly is 160nm; Six miniature grating orientations are different; Respectively with the length of side direction of miniature grating as coordinate axis; Set up coordinate system; The angle of grating orientation and coordinate axis positive and negative is that to be rotated counterclockwise the acute angle that coordinate axis obtains with the grating orientation be positive angle, and being rotated clockwise to the acute angle that coordinate axis obtains is negative angle; The miniature grating orientation of first module (a1) of the 1st passage (a) is parallel to the y direction of principal axis, and the miniature grating orientation in Unit second (a2) is parallel to the x direction of principal axis; The miniature grating orientation in Unit the 3rd (b1) of the 2nd passage (b) becomes 30 ° of angles with the x direction of principal axis, the miniature grating orientation in Unit the 4th (b2) becomes 30 ° of angles with the y direction of principal axis; The miniature grating orientation in Unit the 5th (c1) of the 3rd passage (c) becomes-30 ° of angles with the x axle; The miniature grating orientation in Unit the 6th (c2) becomes-30 ° of angles with the y direction of principal axis; The corresponding sky polarization sensitive of the grating pair of different directions, so corresponding sky polarized light get into optoelectronic film through grating; Be converted into electric signal, this electric signal is just represented sky polarized light pattern information.
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| CN102221406A (en) * | 2011-05-24 | 2011-10-19 | 中国科学院上海技术物理研究所 | Monolithic integrated InGaAs near-infrared detector for sub-wavelength micro-polarization grating |
| CN103438885B (en) * | 2013-08-27 | 2015-11-18 | 西北工业大学 | Triple channel polarization navigation sensor |
| CN103557854B (en) * | 2013-11-06 | 2017-01-04 | 中北大学 | A kind of novel gyroscope based on nanometer grating detection |
| CN104880188B (en) * | 2015-06-12 | 2016-03-02 | 北京航空航天大学 | A kind of full light path polarization sensor based on Amici prism |
| CN107014490A (en) * | 2017-04-17 | 2017-08-04 | 大连理工大学 | One kind point focal plane type real-time polarization imaging system |
| CN107402010B (en) * | 2017-07-24 | 2020-11-06 | 大连理工大学 | Full-polarization information bionic navigation method based on Stokes vector light stream and phase |
| CN110987188A (en) * | 2019-11-22 | 2020-04-10 | 北京航空航天大学 | Little hourglass type polarization detection camera |
| CN111504303B (en) * | 2020-04-17 | 2022-09-13 | 西北工业大学 | Miniature two-channel polarization navigation sensor and use method thereof |
| CN111307140B (en) * | 2020-05-11 | 2020-08-07 | 中国人民解放军国防科技大学 | Atmospheric polarized light orientation method used under cloudy weather condition |
| CN111765973B (en) * | 2020-05-28 | 2021-09-14 | 昆明理工大学 | Laser polarization direction detection device and detection method based on graphene nanoribbon array grating |
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| CN101149390A (en) * | 2007-11-01 | 2008-03-26 | 大连理工大学 | Movement direction angle polarization sensitivity detection method and sensor device |
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| CN101149390A (en) * | 2007-11-01 | 2008-03-26 | 大连理工大学 | Movement direction angle polarization sensitivity detection method and sensor device |
Non-Patent Citations (2)
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| 孟凡涛等.面形误差对亚波长金属光栅偏振器性能的影响.《光子学报》.2009,第38卷(第4期),951-955. * |
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