CN101840875A - Image capturing device and image capturing control method for measuring aperture of contact hole - Google Patents

Image capturing device and image capturing control method for measuring aperture of contact hole Download PDF

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Publication number
CN101840875A
CN101840875A CN200910047632A CN200910047632A CN101840875A CN 101840875 A CN101840875 A CN 101840875A CN 200910047632 A CN200910047632 A CN 200910047632A CN 200910047632 A CN200910047632 A CN 200910047632A CN 101840875 A CN101840875 A CN 101840875A
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China
Prior art keywords
contact hole
reference area
image
sem
shape
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CN200910047632A
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CN101840875B (en
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吴永玉
神兆旭
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Semiconductor Manufacturing International Shanghai Corp
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Semiconductor Manufacturing International Shanghai Corp
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Abstract

The invention discloses an image capturing device for measuring the aperture of a contact hole, comprising an SEM (Scanning Electron Microscope), a first control unit, a second control unit and a parameter configuration unit, wherein the first control unit is used for exposing on a photoresist adhesive spun on a wafer to form the shape of the contact hole and the shape of a preset reference area with larger size than the contact hole and controlling the SEM to capture an image in the reference area; the second control unit is used for controlling the SEM to translate relative to the wafer until the image expressing the shape of the contact hole enters the visual field of the SEM according to the position relationship of the preset shape of the contact hole relative to the reference area so as to capture the image expressing the shape of the contact hole; and the parameter configuration unit is used for storing the position relationship of the shape of the contact hole relative to the reference area. Meanwhile, the invention also discloses an image capturing control method for measuring the aperture of the contact hole. By adopting the method and the device, the efficiency for capturing images can be improved.

Description

Measure the image capture apparatus and the image-capturing control method of aperture of contact hole
Technical field
The present invention relates to the control technology in the integrated circuit manufacturing, particularly a kind of image capture apparatus and image-capturing control method of measuring aperture of contact hole.
Background technology
Because the extensive use of electronic equipment, the manufacturing process of integrated circuit has obtained development at full speed, in the manufacturing process of integrated circuit, behind the patterning photoresistance glue, the photoresistance glue that is spun on wafer forms the contact hole shape through exposure, and carry out etching according to this contact hole shape, finally form corresponding contact hole.
Wherein, because the actual size of the contact hole that the size of the contact hole shape that the exposure of photoresistance glue forms and etching form satisfies certain relation, therefore, before carrying out etching, usually the size of the contact hole shape that need form the photoresistance glue exposure actual size of measuring, touch to achieve a butt joint the hole is measured, if the size of the contact hole shape that the exposure of photoresistance glue forms meets the demands, the actual size of then representing the contact hole that etching forms also can meet the demands, and then carries out etching according to the contact hole shape.
Specifically, above-mentioned measuring process utilizes scanning electron microscopy (SEM) directly to catch the image of contact hole shape usually, yet, for the process node of 65 nanometers, the actual size of contact hole is very little, correspondingly, the size of the contact hole shape that the exposure of photoresistance glue forms also can be very little, therefore, utilize SEM be difficult to directly catch the contact hole shape image, need expend the more time, thereby the efficient that makes image catch is not high.
And, after the image that captures the contact hole shape, also may further control SEM usually and focus at the image of this contact hole shape, the image of contact hole shape clearly appears in the visual field.Thus because SEM can launch the particle beams of certain intensity when focusing, thereby and this particle beams can be injected the photoresistance glue of contact hole shape edges and produces the white edge effect, and then influence the actual size of the contact hole of subsequent etch formation.
Summary of the invention
In view of this, main purpose of the present invention is to provide a kind of image capture apparatus and image-capturing control method of measuring aperture of contact hole, to improve the efficient that image is caught.
For achieving the above object, technical scheme of the present invention specifically is achieved in that
A kind of image capture apparatus of measuring aperture of contact hole comprises scanning electron microscopy SEM, and this device also comprises:
First control unit is used for controlling the image that described SEM catches described reference area after the shape and the shape of size greater than the preset reference zone of described contact hole that are spun on the described contact hole of exposure formation on the photoresistance glue of wafer;
Second control unit, be used for according to the position relation of the contact hole shape that sets in advance with respect to reference area, control described SEM with respect to described wafer translation, enter in the visual field of described SEM until the image of expression contact hole shape, to catch the image of described contact hole shape;
Parameter configuration unit is used to store the position relation of described contact hole shape with respect to reference area.
Described contact hole shape and described reference area are a plurality of;
This device further comprises: the image conversion interaction platform, be used for according to the coordinate of each reference area of setting in advance and each contact hole shape showing the image conversion interface that comprises all contact hole shapes and all reference areas with respect to the position relation of any reference area;
And described parameter configuration unit is further used for storing the coordinate of each reference area that sets in advance;
First selection instruction of the arbitrary contact hole of expression that described first control unit further receives according to described image conversion interaction platform, control SEM catches the image of the reference area corresponding with this contact hole shape, or second selection instruction of the arbitrary reference area of expression that receives according to described image conversion interaction platform, directly control the image that SEM catches the represented reference area of second selection instruction.
This device further comprises: the 3rd control unit is used to control described SEM and focuses at the image of described reference area;
And described second control unit further after described focusing, is controlled described SEM with respect to described wafer translation.
Described reference area is to be arranged in any way by the shape of several contact holes to constitute.
Distance between described reference area and the contact hole shape is less than 10 microns.
A kind of image-capturing control method of measuring aperture of contact hole, after the shape and the shape of size greater than the preset reference zone of described contact hole that are spun on the described contact hole of exposure formation on the photoresistance glue of wafer, this method may further comprise the steps:
Gated sweep electron microscope SEM catches the image of described reference area;
According to the contact hole shape that sets in advance with respect to the position of reference area relation, control described SEM with respect to described wafer translation, enter in the visual field of described SEM until the image of expression contact hole shape, to catch the image of described contact hole shape.
Described contact hole shape and described reference area are a plurality of;
This method further according to the coordinate of the reference area that sets in advance and each contact hole shape with respect to the position relation of any reference area, show the image conversion interface that comprises all contact hole shapes and all reference areas;
And, first selection instruction of the arbitrary contact hole shape of expression that this method further receives according to described image conversion interface, control SEM catches the image of the reference area corresponding with this contact hole shape, or second selection instruction of the arbitrary reference area of expression that receives according to described image conversion interface, directly control the image that SEM catches the represented reference area of second selection instruction.
Before the described SEM of control was with respect to described wafer translation, this method further described SEM of control was focused at the image of described reference area.
Described reference area is to be arranged in any way by the shape of several contact holes to constitute.
Distance between described reference area and the contact hole shape is less than 10 microns.
As seen from the above technical solutions, the present invention can control the image that SEM catches reference area earlier, and then according to the position relation of the contact hole shape that sets in advance with respect to reference area, control SEM is with respect to the wafer translation, enter in the visual field of described SEM until the image of expression contact hole shape, thereby captures the image of contact hole shape by the translation location.Like this, because the size of reference area is greater than contact hole, thereby than the image of catching the contact hole shape, the image of catching reference area is more prone to, consumed time is less, and the mode of translation location need not search and coupling in the acquisition procedure, measures the efficient that the required image of aperture of contact hole is caught thereby can improve.
In addition, SEM is with respect to before the wafer translation, the present invention also can be further at the image of reference area but not the image of contact hole shape focus, making need not to focus after the SEM translation image of contact hole shape clearly can occur in the visual field of SEM, thereby has avoided the white edge effect of contact hole shape edges.
Description of drawings
Fig. 1 is a kind of structural representation of measuring the image acquisition control device of aperture of contact hole provided by the present invention;
Fig. 2 is a kind of flow chart of measuring the image-capturing control method of aperture of contact hole provided by the present invention;
Fig. 3 is that the position of contact hole and corresponding reference area concerns schematic diagram among the embodiment provided by the present invention;
Fig. 4 is the flow chart of the embodiment of a kind of image-capturing control method of measuring aperture of contact hole provided by the present invention.
Embodiment
For making purpose of the present invention, technical scheme and advantage clearer, below with reference to the accompanying drawing embodiment that develops simultaneously, the present invention is described in more detail.
Fig. 1 is a kind of structural representation of measuring the image capture apparatus of aperture of contact hole provided by the present invention, and as shown in Figure 1, this device comprises SEM 101, first control unit 102, second control unit 103, parameter configuration unit 106.
SEM 101, are used to catch the image of reference area, and are used for respect to the image of catching the contact hole shape after the wafer translation; Wherein, SEM 101 still can adopt its existing 26S Proteasome Structure and Function, does not repeat them here;
First control unit 102 is used for after the shape and the shape of size greater than the preset reference zone of described contact hole that are spun on the described contact hole of exposure formation on the photoresistance glue of wafer, and control SEM 101 catches the image of reference area; Wherein, reference area can be to be arranged in any way by the shape of several contact holes to constitute, for example can arrange arbitrary shapes such as constituting crosswise, rectangle, can utilize the various existing process equipment that has exposure formation contact hole shape on photoresistance glue now like this; And, first control unit 102 can begin to carry out its control operation according to being spun on the photoresistance glue of wafer the triggering signal that exposure forms the any-mode generation that the shape of described contact hole and size can realize by those skilled in the art institute after greater than the shape in the preset reference zone of contact hole;
Second control unit 103, be used for according to the position relation of the contact hole shape that sets in advance with respect to reference area, control SEM 101 with respect to the wafer translation, enter in the visual field of SEM 101 until the image of expression contact hole shape, to catch the image of contact hole shape;
Parameter configuration unit 106 is used for the position relation of storage contact hole shape with respect to reference area.
In the practical application, first control unit 102 in the device can export the parameter of the expression reference area shape that sets in advance to SEM 101 as shown in Figure 1, with the image of control SEM 101 according to the shape acquisition reference area of reference area, perhaps, parameter configuration unit 106 can be stored the coordinate of each reference area that sets in advance, first control unit 102 can read the coordinate of corresponding reference area and exports SEM 101 to, directly catches the image of reference area according to the coordinate of the reference area of storage in the parameter configuration unit 106 with control SEM 101.
And second control unit, 103 control SEM 101 are with respect to the wafer translation, specific implementation is got up, dual mode can be arranged: the pallet translational at this wafer place of motor-driven that 103 controls of second control unit link to each other with the pallet at wafer place, thereby drive this wafer translation, this wafer is changed with respect to the position of SEM 101; Perhaps, motor-driven SEM 101 translations that the control of second control unit 103 links to each other with SEM 101, thus wafer is changed with respect to the position of SEM 101.
Need to prove, can have a plurality of contact holes and a plurality of reference area in the practical application, a plurality of contact holes described here and a plurality of reference area are also nonessential to be one to one, in general, reference area can corresponding a plurality of contact holes, also can corresponding contact hole.
So for the ease of selection needs the contact hole of measurement arbitrarily, also selection needs to install as shown in Figure 1 the reference area that utilizes in the execution acquisition procedure arbitrarily, as shown in Figure 1, this device can further comprise: image conversion interaction platform 105, be used for according to the coordinate of each reference area of setting in advance and each contact hole shape showing the image conversion interface that comprises all contact hole shapes and all reference areas with respect to the position relation of any reference area.Correspondingly, first selection instruction of the arbitrary contact hole of expression that first control unit 102 receives according to image conversion interaction platform 105, control SEM 101 catches the image of the reference area corresponding with this contact hole shape, or second selection instruction of the arbitrary reference area of expression that receives according to image conversion interaction platform 105, directly control the image that SEM 101 catches the represented reference area of second selection instruction.
In addition, as shown in Figure 1, this device also can further comprise the 3rd control unit 104, and the image that is used to control 101 pairs of reference areas of SEM is focused, till the clear picture of the reference area in SEM 101 visuals field.Be specially, the 3rd control unit 104 links to each other with SEM 101, the focusing end signal that sends the control command that needs focusing, fed back after the clear picture that receives the reference area of SEM 101 in the visual field to SEM 101, and notify second control unit 103 to begin to control SEM 101 with respect to the wafer translation, catch with the image that carries out the contact hole shape.Wherein, how SEM 101 discerns feedback focusing end signal after the clear picture of the clear picture of the reference area in the visual field and the reference area in the visual field, can realize according to its existing mode, does not repeat them here.
More than, be detailed description to image capture apparatus among the present invention.Below, again image-capturing control method among the present invention is described.
Fig. 2 is a kind of flow chart of measuring the image-capturing control method of aperture of contact hole provided by the present invention, after the shape and the shape of size that are spun on the described contact hole of exposure formation on the photoresistance glue of wafer greater than the preset reference zone of described contact hole, as shown in Figure 2, this method may further comprise the steps:
Step 201 with respect to the position relation of any reference area, shows the image conversion interface that comprises all contact hole shapes and all reference areas according to the coordinate of the reference area that sets in advance and each contact hole shape.
Step 202, first selection instruction of the arbitrary contact hole shape of expression that receives according to the image conversion interface, control SEM catches the image of the reference area corresponding with this contact hole shape, or second selection instruction of the arbitrary reference area of expression that receives according to the image conversion interface, directly control the image that SEM catches the represented reference area of second selection instruction.
When the corresponding relation of reference area and contact hole shape is set, should make the contact hole shape short as far as possible with the distance between the corresponding reference area, preferably, the distance between contact hole shape and the corresponding reference area is less than 10 microns.
Step 203, control SEM focuses at the image of the reference area of catching.
Step 204, according to the contact hole shape that sets in advance with respect to the position of reference area relation, control SEM with respect to the wafer translation, enter in the visual field of SEM until the image of expression contact hole shape, to catch the image of contact hole shape.
As seen, image-capturing control method and image capture apparatus based on above-mentioned measurement aperture of contact hole, control SEM catches the image of reference area earlier, and control SEM focuses at the image of reference area, then according to the position relation of the contact hole shape that sets in advance with respect to reference area, SEM is with respect to the wafer translation in control, image until expression contact hole shape enters in the visual field of SEM, thereby catch the image of contact hole shape, like this, can catch the contact hole shape by the mode of translation location, improve and measure the efficient that the required image of aperture of contact hole is caught, simultaneously, avoided the white edge effect of contact hole shape edges.
Below by an embodiment in detail the present invention is described in detail.
Fig. 3 is that the position of contact hole and corresponding reference area concerns schematic diagram among the embodiment provided by the present invention, reference area 301 constitutes with the identical hole of contact hole 302 aperture sizes by 16, Fig. 4 is the flow chart of the embodiment of a kind of image-capturing control method of measuring aperture of contact hole provided by the present invention, as shown in Figure 4, this method may further comprise the steps:
Step 401, the display graphics interface comprises all contact holes and all reference areas on the wafer in the graphical interfaces.
Step 402 is selected contact hole 302 in graphical interfaces, or the direct corresponding reference area 301 of selection and contact hole 302.
Step 403, control SEM catches the image of the reference area 301 corresponding with contact hole 302.
Step 404, control SEM focuses at the image of the reference area 301 of catching, and makes to occur the image of reference area 301 clearly in the visual field.
Step 405, according to the position relation of contact hole 302 with respect to reference area 301, SEM is with respect to the wafer translation in control, catches the image of contact hole 302.
The above is preferred embodiment of the present invention only, is not to be used for limiting protection scope of the present invention.Within the spirit and principles in the present invention all, any modification of being done, be equal to and replace and improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1. an image capture apparatus of measuring aperture of contact hole comprises scanning electron microscopy SEM, it is characterized in that, this device also comprises:
First control unit is used for controlling the image that described SEM catches described reference area after the shape and the shape of size greater than the preset reference zone of described contact hole that are spun on the described contact hole of exposure formation on the photoresistance glue of wafer;
Second control unit, be used for according to the position relation of the contact hole shape that sets in advance with respect to reference area, control described SEM with respect to described wafer translation, enter in the visual field of described SEM until the image of expression contact hole shape, to catch the image of described contact hole shape;
Parameter configuration unit is used to store the position relation of described contact hole shape with respect to reference area.
2. device according to claim 1 is characterized in that, described contact hole shape and described reference area are a plurality of;
This device further comprises: the image conversion interaction platform, be used for according to the coordinate of each reference area of setting in advance and each contact hole shape showing the image conversion interface that comprises all contact hole shapes and all reference areas with respect to the position relation of any reference area;
And described parameter configuration unit is further used for storing the coordinate of each reference area that sets in advance;
First selection instruction of the arbitrary contact hole of expression that described first control unit further receives according to described image conversion interaction platform, control SEM catches the image of the reference area corresponding with this contact hole shape, or second selection instruction of the arbitrary reference area of expression that receives according to described image conversion interaction platform, directly control the image that SEM catches the represented reference area of second selection instruction.
3. device according to claim 1 and 2 is characterized in that, this device further comprises: the 3rd control unit is used to control described SEM and focuses at the image of described reference area;
And described second control unit further after described focusing, is controlled described SEM with respect to described wafer translation.
4. device according to claim 1 and 2 is characterized in that, described reference area is to be arranged in any way by the shape of several contact holes to constitute.
5. method according to claim 1 and 2 is characterized in that, the distance between described reference area and the contact hole shape is less than 10 microns.
6. image-capturing control method of measuring aperture of contact hole, it is characterized in that, after the shape and the shape of size greater than the preset reference zone of described contact hole that are spun on the described contact hole of exposure formation on the photoresistance glue of wafer, this method may further comprise the steps:
Gated sweep electron microscope SEM catches the image of described reference area;
According to the contact hole shape that sets in advance with respect to the position of reference area relation, control described SEM with respect to described wafer translation, enter in the visual field of described SEM until the image of expression contact hole shape, to catch the image of described contact hole shape.
7. method according to claim 6 is characterized in that, described contact hole shape and described reference area are a plurality of;
This method further according to the coordinate of the reference area that sets in advance and each contact hole shape with respect to the position relation of any reference area, show the image conversion interface that comprises all contact hole shapes and all reference areas;
And, first selection instruction of the arbitrary contact hole shape of expression that this method further receives according to described image conversion interface, control SEM catches the image of the reference area corresponding with this contact hole shape, or second selection instruction of the arbitrary reference area of expression that receives according to described image conversion interface, directly control the image that SEM catches the represented reference area of second selection instruction.
8. according to claim 6 or 7 described methods, it is characterized in that before the described SEM of control was with respect to described wafer translation, this method further described SEM of control was focused at the image of described reference area.
9. according to claim 6 or 7 described methods, it is characterized in that described reference area is to be arranged in any way by the shape of several contact holes to constitute.
10. according to claim 6 or 7 described methods, it is characterized in that the distance between described reference area and the contact hole shape is less than 10 microns.
CN2009100476322A 2009-03-16 2009-03-16 Image capturing device and image capturing control method for measuring aperture of contact hole Expired - Fee Related CN101840875B (en)

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