CN101839803A - Low-laser loss parameter comprehensive measurement device for high reflector - Google Patents
Low-laser loss parameter comprehensive measurement device for high reflector Download PDFInfo
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Abstract
The invention relates to a low-laser loss parameter comprehensive measurement device for a high reflector. In the process of developing a high-performance laser gyro, a high reflector in an annular cavity is required to have very low scattering, transmission and back scattering loss; and in an annular laser gyro, loss generated by all elements of a laser cavity is the main reason for the locking of the annular laser gyro. The low-laser loss parameter comprehensive measuring device for the high reflector, which is provided by the invention, comprises a light source assembly and an integrating sphere which are arranged on an optical platform, wherein the light source assembly is provided with a wave plate and an attenuating plate, and the integrating sphere is provided with a photomultiplier, a transmission measurement component A, an integral scattering measurement component B and a back scattering measurement component C. The invention realizes the measurement of integral scattered power, transmissivity and back scattered power on the same device, improves the measurement function of the device, reduces the measurement cost, and can automatically change an incidence angle by rotating a sample in the measurement; and in addition, all the three measurements can obtain two-dimension measured value distribution map of the sample.
Description
Technical field
The invention belongs to the optical element technical field of measurement and test, be specifically related to a kind of low-laser loss parameter comprehensive measurement device for high reflector.
Background technology
The low-loss high reflection mirror is widely used in laser systems such as laser gyro, superpower laser and important effect.The optical resonator that a polygon (commonly square or triangle) arranged as typical laser gyro system, high reflection mirror (high reflection mirror of completely reflecting mirror or low transmissivity) is the critical optical elements that constitutes resonator cavity, and generally its reflectivity is up to more than 99.99%.In the high performance laser gyro process of development, require the high reflection mirror in the ring cavity to have very low scattering, transmission and backward scattering loss, because in the ring laser gyro, the loss that each element of laser cavity is produced is to cause it the major reason of locking to occur.
The low-loss parameters such as integral scattered power, transmissivity, backscattering rate of measuring high reflection mirror exactly have important directive significance to precision and the workmanship that improves catoptron, are the important process means that instruct high reflection mirror to produce.
From the documents and materials of consulting as seen, visible a small amount of report aspect the full integral scattering measurement of high reflection mirror (or super-smooth surface) both at home and abroad at present.Project team of the present invention finds report and the document closely related or identical with the present invention as yet to domestic and international patent documentation and the journal article retrieval of publishing.
Summary of the invention
The present invention will provide a kind of low-laser loss parameter comprehensive measurement device for high reflector, to fill up the blank of prior art in this field.
In order to solve the problem that prior art exists, technical scheme provided by the invention is:
A kind of low-laser loss parameter comprehensive measurement device for high reflector, comprise the light source assembly and the integrating sphere that are arranged on the optical table, described light source assembly is provided with wave plate and attenuator, integrating sphere is provided with photomultiplier, and its special character is: comprise that also assembly B is measured in transmission measurement assembly A, integral scattering and assembly C is measured in backward scattering;
Described transmission measurement assembly A is arranged on the light path of incident light, comprises transmission measurement frame and transmission delustring trap, and wherein transmission delustring trap is according to the incident angle of light adjustable position, is arranged on the reflected light path to absorb reflected light;
Described backward scattering is measured assembly B and is comprised backward scattering diaphragm, backward scattering measurement bay and backward scattering delustring trap, passing integrating sphere wall on the optical path of incident light of the centre of sphere is provided with backward scattering entrance port and backward scattering and measures mouthful, the backward scattering diaphragm is arranged on the backward scattering entrance port, measure mouth in backward scattering and be outside equipped with the backward scattering measurement bay, the backward scattering measurement bay can rotate, and catoptrical light path is provided with backward scattering delustring trap;
Described integral scattering is measured assembly C and is comprised the integral scattering diaphragm, integral scattering measurement bay and integral scattering delustring trap, integrating sphere wall on the optical path of incident light is provided with the integral scattering entrance port and mouth is measured in integral scattering, the integral scattering diaphragm is arranged on the integral scattering entrance port, the integral scattering measurement bay is arranged at integral scattering and measures on the mouth, integral scattering is measured mouth and is provided with the integral scattering light-emitting window to the integrating sphere wall on the reflected light path between the integral scattering delustring trap, enter the incident light and the catoptrical light path approximately equal that reflects integrating sphere of integral scattering entrance port in integrating sphere, incident angle is a measured angular;
Be provided with accessory on described entrance port, measurement mouth and the light-emitting window, described accessory is a standard white plate.
Be provided with adjustable light path turning device between above-mentioned transmission measurement assembly A and the integrating sphere.
Above-mentioned light path turning device comprises the 3rd catoptron and the 4th catoptron that movably is oppositely arranged.
Above-mentioned wave plate is provided with a plurality of, is arranged at respectively on the rotatable wave plate fixed disc, and described attenuator is provided with a plurality of, is arranged at respectively on the rotatable attenuator fixed disc.
Have four holes that are symmetrically distributed and are centered close on the same circumference by 90 ° on the above-mentioned wave plate fixed disc, wherein 3 holes are separately installed with two 1/2 wave plates and a slice quarter wave plate, and another is a through hole; Have four holes that are symmetrically distributed and are centered close on the same circumference by 90 ° on the described attenuator fixed disc, what be provided with on the position with respect to 1/2 wave plate and quarter wave plate on the wave plate fixed disc is 1%, 0.1% and 0.01% optical attenuation sheet, and another is a through hole.
Above-mentioned transmission measurement frame, integral measurement frame and backward scattering measurement bay add automatically controlled x-y translation stage by automatically controlled turntable and form, and translation stage is provided with retainer plate.Retainer plate is used to install measured sample.
Technique effect of the present invention:
Flexible design of the present invention has been realized integral scattered power, transmissivity, the measurement of backscattering rate on same device, strengthened the measurement function of device, has reduced the measurement cost.The present invention both can measure the integral scattered power of high reflection mirror (sample), also can measure the transmissivity of low transmissivity sample, can also measure the backscattering rate of high reflection mirror (sample), and can change incident angle automatically by rotary sample when measuring, three kinds of measurements all can obtain the two-dimensional measurement value distribution plan of sample.
High reflection mirror multiple spot multiple mark integral scattered power test: test specification: 10 ~ 1000ppm, 45 ° of angle of incidence of light degree; With some test repeatability: 10 ~ 100ppm, test repeatability ± 1ppm; 100 ~ 1000ppm, test repeatability ± 5ppm;
Catoptron multiple spot multiple mark transmissivity test: test specification 60ppm ~ 0.5%; 0 ~ 90 ° of specimen angle is adjustable; With some test repeatability ± 10ppm;
The test of high reflection mirror multiple spot multiple mark backward scattering rate: test specification: 10 ~ 1000ppm, 30～45 ° of angle of incidence of light degree are adjustable; With some test repeatability: 10 ~ 100ppm, test repeatability ± 1ppm; 100 ~ 1000ppm, test repeatability ± 5ppm;
Incident light polarization state: s-, p-linearly polarized light, circularly polarized light.
Description of drawings
Fig. 1 is a mounting structure synoptic diagram of the present invention.
Description of reference numerals is as follows:
The 1-LASER Light Source, the 2-polarizer, the 3-photomodulator, the 4-wave plate, 5-first catoptron, the 6-attenuator, 7-beam shaping assembly, 8-second catoptron, 9-transmission measurement frame, 10-transmission delustring trap, 11-the 3rd catoptron, 12-the 4th catoptron, 13-backward scattering diaphragm, 14-integral scattering diaphragm, the 15-integrating sphere, 16-integral scattering light-emitting window, the 17-sample, mouth is measured in the 18-backward scattering, 19-backward scattering measuring samples, the 20-photomultiplier, 21-backward scattering delustring trap, 22-integral scattering delustring trap, 23-backward scattering measurement bay, the 24-optical table, 25-integral measurement frame.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in detail.
Referring to Fig. 1A kind of low-laser loss parameter comprehensive measurement device for high reflector, comprise that assembly B is measured in the light source assembly, integrating sphere 15, transmission measurement assembly A, the integral scattering that are arranged on the optical table 24 and assembly C is measured in backward scattering, integrating sphere 15 is provided with photomultiplier 20.
Be provided with adjustable light path turning device between said transmission measurement assembly A and the integrating sphere 15, the light path turning device comprises the 3rd catoptron 11 and the 4th catoptron 12 that movably is oppositely arranged in the present embodiment.
Said light source assembly is the conventional assembly with wave plate 4 and attenuator 6, as long as can provide the polarization state that needs, suitable hot spot and the assembly of suitable energy all can adopt.The light source assembly that is adopted among the present invention comprises that the LASER Light Source 1, the polarizer 2, photomodulator 3, the wave plate 4(that are arranged on the optical table 24 are arranged at a plurality of on the wave plate fixed disc), first catoptron 5, attenuator 6(be arranged at a plurality of on the attenuator fixed disc), beam shaping assembly 7, second catoptron 8.On the direction that the light beam that LASER Light Source 1 is sent advances, the polarizer 2 is installed successively, photomodulator 3, automatically controlled rotating wave plate group 4, laser directive first catoptron 5 carries out 90 ° of light path turnovers, turnover light carries out the turnover of 90 ° of light paths again through second catoptron 8 behind automatically controlled rotation attenuator group 6, beam shaping assembly 7, with this as the measurement incident light.
Wave plate 4 wherein and attenuator 6 have three respectively, and they are arranged at respectively on rotatable wave plate fixed disc and the attenuator fixed disc.Have four holes that are symmetrically distributed and are centered close on the same circumference by 90 ° on wave plate fixed disc and the attenuator fixed disc, 3 holes on the wave plate fixed disc are separately installed with two 1/2 wave plates and a slice quarter wave plate, another is a through hole, what be provided with on the position with respect to 1/2 wave plate and quarter wave plate on the wave plate fixed disc on the attenuator fixed disc is 1%, 01% and 0.01% optical attenuation sheet, and another is a through hole.
Said transmission measurement assembly A is arranged on the light path of incident light, comprises transmission measurement frame 9 and transmission delustring trap 10, and wherein transmission delustring trap 10 is according to the incident angle of light adjustable position, is arranged on the reflected light path to absorb reflected light;
Said backward scattering is measured assembly B and is comprised backward scattering diaphragm 13, backward scattering measurement bay 23 and backward scattering delustring trap 21, passing integrating sphere 15 walls on the optical path of incident light of the centre of sphere is provided with backward scattering entrance port and backward scattering and measures mouthfuls 18, backward scattering diaphragm 13 is arranged on the backward scattering entrance port, measure mouth 18 in backward scattering and be outside equipped with backward scattering measurement bay 23, backward scattering measurement bay 23 can rotate, and catoptrical light path is provided with backward scattering delustring trap 21;
Said integral scattering is measured assembly C and is comprised integral scattering diaphragm 14, integral scattering measurement bay 25 and integral scattering delustring trap 22, integrating sphere 15 walls on the optical path of incident light are provided with the integral scattering entrance port and mouth is measured in integral scattering, integral scattering diaphragm 14 is arranged on the integral scattering entrance port, integral scattering measurement bay 25 is arranged at integral scattering and measures on the mouth, integral scattering is measured mouth and is provided with integral scattering light-emitting window 16 to integrating sphere 15 walls on the reflected light path between the integral scattering delustring trap 22, in integrating sphere 15, enter the incident light and the catoptrical light path approximately equal that reflects integrating sphere of integral scattering entrance port, incident angle is a measured angular, is 45 degree in the present embodiment.
Be provided with accessory on said a plurality of entrance ports, measurement mouth and the light-emitting window in the above, described accessory is a standard white plate.
Above said transmission measurement frame 9, integral measurement frame 25 and backward scattering measurement bay 23 add automatically controlled x-y translation stage by automatically controlled turntable and form, translation stage is provided with retainer plate.Retainer plate is used to install measured sample.
During measurement, on the measurement bay of a participation measurement tested catoptron (sample) is set therein, all uses accessory-standard white plate to block up on the entrance port of other measurement assembly that does not participate on the integrating sphere 15 measuring, measurement mouth, the light-emitting window.
Use principle of the present invention is described in detail as follows:
One, measuring basis light:
Remove the 4th catoptron 12, block backward scattering entrance port, integral scattering measurement opening, backward scattering measurement opening 18 and integral scattering light-emitting window 16 with standard white plate.
The incident light that passes behind the transmission measurement assembly is injected integrating sphere 15 by the integral scattering entrance port behind integral scattering diaphragm 14, the automatically controlled rotating wave plate group 4 of computer control is selected required laser polarization state, the automatically controlled rotation attenuator of computer control group 6 makes light respectively through 1%, 0.1% and 0.01% decay, be converted into and send computing machine to handle respectively after electric signal send the lock-in amplifier denoising through being installed on photomultiplier 20 on the integrating sphere, as the reference light measured value of correspondence.
Two, measure the integral scattered power of high reflection mirror:
Be provided with on integral scattering measurement bay 25 and will carry out the sample 17 that integral scattering is measured, sample and integrating sphere are tangent, remove the 4th catoptron 12, block backward scattering entrance port, backward scattering measurement opening 18 with standard white plate.
Passing the incident light of transmission measurement frame 9 is injected in the integrating sphere 15 by the integral scattering entrance port behind integral scattering diaphragm 14, by 45 ° of fixed angles inject with the tangent scatterometry frame 25 of integrating sphere 15 on sample 17 on, the reflected light of sample passes integrating sphere 15 and is integrated scattering delustring trap 22 and absorbs.Integral scattering light be integrated that ball 15 compiles and even light after be installed on photomultiplier 20 on the integrating sphere and be converted into and send Computer Processing after electric signal send the lock-in amplifier denoising, calculate the integral scattered power of high reflection mirror.Select required laser polarization state by the automatically controlled rotating wave plate group 4 of computer control, suitable attenuation multiple is selected in 6 rotations of the automatically controlled rotation attenuator of computer control group, 17 translations of computer control sample, the integral scattered power two-dimensional distribution of acquisition high reflection mirror.Also can only measure the integral scattered power of high reflection mirror single-point according to measurement requirement.
Three, measure the transmissivity of low transmissivity sample:
Remove the 4th catoptron 12, block backward scattering entrance port, integral scattering measurement opening, backward scattering measurement opening 18 and integral scattering emergent light mouth 16 with standard white plate.
Sample-low transmission sample is installed on the transmission measurement frame 9 of transmission measurement assembly A.Obtain required laser polarization state by the wave plate 4 that the group selection of computer control rotating wave plate is suitable, the suitable attenuator 6 of computer control rotation attenuator group selection is obtained required attenuation multiple, by tested low transmission sample translation of computer control and angle rotation, obtain the transmissivity two-dimensional distribution of low transmissivity sample under a certain rotation angle of high reflection mirror.Tested low transmission sample can carry out the plane on its erecting device can also carry out spatial rotation outside moving, so the user can set into the size of firing angle flexibly, obtains required measured value.Also can only measure the low transmissivity of high reflection mirror single-point according to measurement requirement.
Four, measure the backscattering rate of high reflection mirror:
Backward scattering measuring samples 19 is set on backward scattering measurement bay 23, blocks integral scattering entrance port, integral scattering measurement opening and integral scattering light-emitting window 16 with standard white plate (accessory).Pass the incident light of transmission measurement frame 9, be mapped on the 4th catoptron 12 on back reflection to the three catoptrons 11, again through 11 reflections of the 3rd catoptron, incident light through twice 90 ° of turnovers after backward scattering diaphragm 13 back enters integrating sphere 15 by the backward scattering entrance port, measure opening 18 through the centre of sphere of integrating sphere 15 from backward scattering and inject on the backward scattering measuring samples 19, reflected light is integrated scattering delustring trap 21 and absorbs.Backscattered light be integrated by an aperture solid angle that ball 15 compiles and even light after be installed on photomultiplier 20 on the integrating sphere and be converted into and send Computer Processing after electric signal send the lock-in amplifier denoising, calculate the backscattering rate of high reflection mirror.Select required laser polarization state by the automatically controlled rotating wave plate group 4 of computer control, the automatically controlled rotation attenuator of computer control group 6 is selected suitable attenuation multiple, automatically controlled backward scattering measurement bay 19 translations of computer control.Obtain the backscattering rate two-dimensional distribution of high reflection mirror.Also can only measure the backscattering rate of high reflection mirror single-point according to measurement requirement.
When five, measuring integral scattered power, transmissivity, the backscattering rate of the high reflection mirror of unknown range:
Can manually rotate or electronic control attenuator fixed disc, make its rotation.By 0.01%, 0.1%, 1% and the order of through hole the attenuation multiple of light is set, measure value accordingly, determine the most rational attenuation multiple after, by the integral scattered power that calculates high reflection mirror behind the Computer Compensation attenuation multiple respectively, transmissivity or backscattering rate.
This measurement device high reflection mirror laser integral scattered power, transmissivity or backscattering rate need to carry out under hundred-grade super-clean and darkroom environment.
Among the present invention, incident light can enter integrating sphere by dual mode respectively behind the transmission measurement assembly, satisfy different measurement requirement:
One: do not add the 4th catoptron, light can directly enter integrating sphere, inject the sample tangent by the 45 ° of fixed angles of setting that take measurement of an angle with integrating sphere--on-the high reflection mirror, the reflected light of high reflection mirror passes integrating sphere and is absorbed by the delustring trap, integral scattering on the integrating sphere is measured aperture position and is guaranteed that integrating sphere and automatically controlled integral scattering measurement bay are tangent, makes the incident light in integrating sphere and the light path approximately equal of emergent light simultaneously.
Its two: also can carry out twice 90 ° of light paths turnovers after diaphragm enters integrating sphere according to the measurement requirement incident light through the 4th catoptron and the 3rd catoptron, measure opening part through the integrating sphere centre of sphere (can allow skew) from backward scattering and inject on the backward scattering measuring samples, reflected light is integrated scattering delustring trap and absorbs.
Tested scattered light or transmitted light are integrated ball and compile and spare light after be installed on photomultiplier on the integrating sphere and be converted into and send Computer Processing after electric signal send the lock-in amplifier denoising.
Claims (6)
1. low-laser loss parameter comprehensive measurement device for high reflector, comprise the light source assembly and the integrating sphere (15) that are arranged on the optical table (24), described light source assembly is provided with wave plate (4) and attenuator (6), integrating sphere (15) is provided with photomultiplier (20), it is characterized in that: comprise that also assembly B is measured in transmission measurement assembly A, integral scattering and assembly C is measured in backward scattering; Described transmission measurement assembly A is arranged on the light path of incident light, comprises transmission measurement frame 9 and transmission delustring trap (10), and wherein transmission delustring trap (10) is according to the incident angle of light adjustable position, is arranged on the reflected light path to absorb reflected light; Described backward scattering is measured assembly B and is comprised backward scattering diaphragm (13), backward scattering measurement bay (23) and backward scattering delustring trap (21), pass that integrating sphere (15) wall on the optical path of incident light of the centre of sphere is provided with the backward scattering entrance port and mouthful (18) are measured in backward scattering, backward scattering diaphragm (13) is arranged on the backward scattering entrance port, measure mouthful (18) in backward scattering and be outside equipped with backward scattering measurement bay (23), backward scattering measurement bay (23) can rotate, and catoptrical light path is provided with backward scattering delustring trap (21); Described integral scattering is measured assembly C and is comprised integral scattering diaphragm (14), integral scattering measurement bay (25) and integral scattering delustring trap (22), integrating sphere on the optical path of incident light (15) wall is provided with the integral scattering entrance port and mouth is measured in integral scattering, integral scattering diaphragm (14) is arranged on the integral scattering entrance port, integral scattering measurement bay (25) is arranged at integral scattering and measures on the mouth, integral scattering is measured mouth and is provided with integral scattering light-emitting window (16) to integrating sphere (15) wall on the reflected light path between the integral scattering delustring trap (22), enter the incident light and the catoptrical light path approximately equal that reflects integrating sphere of integral scattering entrance port in integrating sphere (15), incident angle is a measured angular; Be provided with accessory on described entrance port, measurement mouth and the light-emitting window; Described accessory is a standard white plate.
2. low-laser loss parameter comprehensive measurement device for high reflector according to claim 1 is characterized in that: be provided with adjustable light path turning device between described transmission measurement assembly A and the integrating sphere (15).
3. low-laser loss parameter comprehensive measurement device for high reflector according to claim 1 is characterized in that: described light path turning device comprises the 3rd catoptron (11) and the 4th catoptron (12) that movably is oppositely arranged.
4. according to claim 1 or 3 described low-laser loss parameter comprehensive measurement device for high reflector, it is characterized in that: described wave plate (4) is provided with a plurality of, be arranged at respectively on the rotatable wave plate fixed disc, described attenuator (6) is provided with a plurality of, is arranged at respectively on the rotatable attenuator fixed disc.
5. low-laser loss parameter comprehensive measurement device for high reflector according to claim 4, it is characterized in that: described getting has four holes that are symmetrically distributed and are centered close on the same circumference by 90 ° on the wave plate fixed disc, wherein 3 holes are separately installed with two 1/2 wave plates and a slice quarter wave plate, and another is a through hole; Have four holes that are symmetrically distributed and are centered close on the same circumference by 90 ° on the described attenuator fixed disc, what be provided with on the position with respect to 1/2 wave plate and quarter wave plate on the wave plate fixed disc is 1%, 0.1% and 0.01% optical attenuation sheet, and another is a through hole.
6. low-laser loss parameter comprehensive measurement device for high reflector according to claim 5, it is characterized in that: described transmission measurement frame (9), integral measurement frame (25) and backward scattering measurement bay (23) add automatically controlled x-y translation stage by automatically controlled turntable and form, translation stage is provided with retainer plate, and retainer plate is used to install measured sample.
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| CN2010101792669A CN101839803B (en) | 2010-05-21 | 2010-05-21 | Low-laser loss parameter comprehensive measurement device for high reflector |
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| CN2010101792669A CN101839803B (en) | 2010-05-21 | 2010-05-21 | Low-laser loss parameter comprehensive measurement device for high reflector |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506845A (en) * | 2011-09-29 | 2012-06-20 | 中国航空工业第六一八研究所 | Low loss measurement method and ring resonant cavity installation debugging system based on low loss measurement |
| CN103674487A (en) * | 2012-09-07 | 2014-03-26 | 中国航空工业第六一八研究所 | Device and method for measuring backscattering of laser gyroscope ultra-smooth reflecting mirror |
| CN105973848A (en) * | 2016-06-30 | 2016-09-28 | 华东师范大学 | Method for measuring ultraviolet low transmittance |
| CN106289726A (en) * | 2016-07-14 | 2017-01-04 | 北京航空航天大学 | A kind of photon band-gap optical fiber backscattering distributed measurement method and device |
| CN109297987A (en) * | 2018-11-05 | 2019-02-01 | 西安工业大学 | High reflective mirror surface scattering multi-parameter distribution characterization measuring device and measuring method |
| CN111947897A (en) * | 2020-08-10 | 2020-11-17 | 西安工业大学 | In-service motion simulation system of photoelectric imaging system |
| CN112345498A (en) * | 2020-11-09 | 2021-02-09 | 哈尔滨工业大学 | High-precision high-scattering-rate bandwidth measuring system for infrared laser light source |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506845A (en) * | 2011-09-29 | 2012-06-20 | 中国航空工业第六一八研究所 | Low loss measurement method and ring resonant cavity installation debugging system based on low loss measurement |
| CN103674487A (en) * | 2012-09-07 | 2014-03-26 | 中国航空工业第六一八研究所 | Device and method for measuring backscattering of laser gyroscope ultra-smooth reflecting mirror |
| CN103674487B (en) * | 2012-09-07 | 2016-04-20 | 中国航空工业第六一八研究所 | A kind of laser gyro ultra-smooth catoptron backscattering measurement mechanism and method |
| CN105973848A (en) * | 2016-06-30 | 2016-09-28 | 华东师范大学 | Method for measuring ultraviolet low transmittance |
| CN106289726A (en) * | 2016-07-14 | 2017-01-04 | 北京航空航天大学 | A kind of photon band-gap optical fiber backscattering distributed measurement method and device |
| CN106289726B (en) * | 2016-07-14 | 2018-08-24 | 北京航空航天大学 | A kind of photon band-gap optical fiber backscattering distributed measurement method and device |
| CN109297987A (en) * | 2018-11-05 | 2019-02-01 | 西安工业大学 | High reflective mirror surface scattering multi-parameter distribution characterization measuring device and measuring method |
| CN111947897A (en) * | 2020-08-10 | 2020-11-17 | 西安工业大学 | In-service motion simulation system of photoelectric imaging system |
| CN112345498A (en) * | 2020-11-09 | 2021-02-09 | 哈尔滨工业大学 | High-precision high-scattering-rate bandwidth measuring system for infrared laser light source |
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