CN101838798A - Automatic substrate loading and unloading mechanism of horizontal vacuum coater - Google Patents
Automatic substrate loading and unloading mechanism of horizontal vacuum coater Download PDFInfo
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- CN101838798A CN101838798A CN 201010194931 CN201010194931A CN101838798A CN 101838798 A CN101838798 A CN 101838798A CN 201010194931 CN201010194931 CN 201010194931 CN 201010194931 A CN201010194931 A CN 201010194931A CN 101838798 A CN101838798 A CN 101838798A
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- substrate frame
- frame transporting
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Abstract
An automatic substrate loading and unloading mechanism of horizontal vacuum coater comprises a frame, a first substrate frame transmission mechanism, a second substrate frame transmission mechanism, a first substrate transmission mechanism, and a second substrate transmission mechanism, wherein one end of the frame is provided with the first substrate transmission mechanism while the other end thereof is provided with the first substrate frame transmission mechanism; the interior of the frame is provided with the second substrate frame transmission mechanism; the center of the second substrate frame transmission mechanism is provided with a rectangular through hole; the first substrate frame transmission mechanism, the second substrate frame transmission mechanism, and the first substrate transmission mechanism are matched in the height direction; the second substrate transmission mechanism is fixedly connected with the second substrate frame transmission mechanism through a cylinder piston, below the second substrate frame transmission mechanism. The invention has simple structure, stable operation, and high degree of automation, which can automatically and precisely load and unload the substrate and realize industrialized production, suitable for the use in horizontal vacuum coaters in different types.
Description
Technical field
The present invention is the automatic loading, unloading sheet of an a kind of horizontal vacuum coating equipment mechanism.
Background technology
In the vacuum coating process, after substrate cleans, adopt the substrate frame carrying, be transported to plated film in the vacuum plating case, after plated film finished, substrate also needed unloading piece on the substrate frame.Traditional in the industry method be by manually go up, unloading piece, not only labor intensity of operating staff is big, production efficiency is low, and can't avoid manual operations to the pollution even the damage of glass substrate, influences film quality behind the substrate coating.
Summary of the invention
The objective of the invention is to overcome the deficiency of prior art and provide a kind of simple in structure, reliable, level of automation is high, automatically accurately load and the automatic loading, unloading sheet of the horizontal vacuum coating equipment mechanism of unloading substrate.
The automatic loading, unloading sheet of horizontal vacuum coating equipment of the present invention mechanism, comprise frame, the first substrate frame transporting mechanism, the second substrate frame transporting mechanism, first substrate delivery mechanism, second substrate delivery mechanism, end in described frame is provided with described first substrate delivery mechanism, is provided with the described first substrate frame transporting mechanism at the described frame the other end; In described frame, be provided with the described second substrate frame transporting mechanism; The described second substrate frame transporting mechanism center is provided with rectangular through-hole; The described first substrate frame transporting mechanism, the second substrate frame transporting mechanism, first substrate delivery mechanism are complementary in the short transverse position; Described second substrate delivery mechanism is connected by steam cylinder piston and the described second substrate frame transporting mechanism and is in described second substrate frame transporting mechanism below.
Further improvement of the present invention is to be provided with guiding polished rod and screw mandrel in described frame, and described guiding polished rod and screw mandrel are perpendicular to described frame bottom surface and be parallel to each other; On described frame, be provided with the motor that drives described screw mandrel rotating; The described second substrate frame transporting mechanism is provided with screw and through hole, described screw spinning on the described screw mandrel, described through hole is sleeved on the described guiding polished rod; Also be provided with through hole on described second substrate delivery mechanism, be set on described screw mandrel and the guiding polished rod and be in described second substrate frame transporting mechanism below; Described first substrate frame transporting mechanism top is arranged with the 3rd substrate frame transporting mechanism in parallel, and the described first substrate frame transporting mechanism, the 3rd substrate frame transporting mechanism are at regular intervals along described bracket height direction.
Among the present invention, described second substrate delivery mechanism is provided with a plurality of friction drive wheels, and the installation dimension of described friction drive wheel is in the rectangular through-hole orthographicprojection scope of described second substrate frame transporting mechanism center setting.
Among the present invention, be respectively arranged with drive-motor on described second substrate delivery mechanism and the described second substrate frame transporting mechanism.
Principle of work of the present invention and advantage are sketched in following:
In the time need being installed on the substrate frame through the glass that cleans, the present invention is countercylinder inflation 6 at first referring to accompanying drawing 3,4, and piston stretches out cylinder, makes second substrate delivery mechanism 5 drop to the second substrate frame transporting mechanism, 3 belows; Simultaneously, start the drive-motor 12 that is provided with on the second substrate frame transporting mechanism 5; Then, after the first substrate frame transporting mechanism 2 was delivered on the second substrate frame transporting mechanism 3 location with substrate frame 14, the drive-motor 12 on the second substrate frame transporting mechanism 3 stopped operating; At this moment, cylinder venting 6, in the piston income cylinder, it is up to drive second substrate delivery mechanism 5, make the friction drive wheel 11 that is provided with on second substrate delivery mechanism 5 be in the second substrate frame transporting mechanism, 3 tops, simultaneously, start the drive-motor 13 that is provided with on second substrate delivery mechanism 5, the friction wheel 11 that second substrate delivery mechanism 5 is provided with rotates; Then, after first substrate delivery mechanism 4 was delivered to friction drive wheel 11 location that are provided with on second substrate delivery mechanism 5 with substrate 15, the drive-motor 13 that is provided with on second substrate delivery mechanism 5 stopped operating; Then, make cylinder 6 inflations, piston stretches out cylinder, make second substrate delivery mechanism 5 drop to the second substrate frame transporting mechanism, 3 belows, thereby, the substrate 15 that is carried on second substrate delivery mechanism 5 is fallen on the substrate frame 14 on the second substrate frame transporting mechanism 3 automatically, realize accurately loading automatically glass substrate; Then, the motor 12 that drives the second substrate frame transporting mechanism 3 will be mounted with the substrate frame of glass substrate and deliver to the first substrate frame transporting mechanism 2, realize steadily carrying at a distance.Otherwise, on substrate frame, be mounted with glass substrate, need with glass substrate when substrate frame unloads, be analogous to the above-mentioned steps operation, can realize the purpose that glass substrate unloads from substrate frame.
The present invention is the demand that satisfies horizontal vacuum coating equipment production line, also be provided with screw mandrel, the second substrate frame transporting mechanism that utilizes the screw mandrel forward and backward to drive to be spirally connected with described screw mandrel along screw axis to lifting, simultaneously, drive second substrate delivery mechanism also simultaneously along screw axis to lifting, with the automatic loading and unloading sheet of the glass substrate of the VTOL (vertical take off and landing) that realizes glass substrate and substrate frame and different heights position.
In sum, the present invention is simple in structure, reliable, level of automation is high, can accurately load automatically and unloading substrate; Can realize suitability for industrialized production, be suitable for the supporting use of horizontal vacuum coating equipment with various models, form the automatic film coating production line.
Description of drawings
Accompanying drawing 1 is front view of the present invention.
Accompanying drawing 2 is the A-A sectional view of accompanying drawing 1.
Accompanying drawing 3 receives the substrate condition synoptic diagram for second substrate delivery mechanism among the present invention.
Accompanying drawing 4 falls into the view of the substrate frame on the second substrate frame transporting mechanism for substrate among the present invention.
Among the figure: 1-frame, the 2-first substrate frame transporting mechanism, the 3-second substrate frame transporting mechanism, 4-first substrate delivery mechanism, 5-second substrate delivery mechanism, 6-steam cylinder piston, 7-guiding polished rod, 8-screw mandrel, 9-motor, 10-the 3rd substrate frame transporting mechanism, 11-friction drive wheel, 12,13-drive-motor.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.
Referring to accompanying drawing 1,2, the automatic loading, unloading sheet of horizontal vacuum coating equipment of the present invention mechanism, comprise frame 1, the first substrate frame transporting mechanism 2, the second substrate frame transporting mechanism 3, first substrate delivery mechanism 4, second substrate delivery mechanism 5, end in described frame 1 is provided with described first substrate delivery mechanism 4, is provided with the described first substrate frame transporting mechanism 2 at described frame 1 the other end; In described frame 1, be provided with the described second substrate frame transporting mechanism 3; The described second substrate frame transporting mechanism 3 centers are provided with rectangular through-hole; The described first substrate frame transporting mechanism 2, the second substrate frame transporting mechanism 3, first substrate delivery mechanism 4 are complementary in the short transverse position; Described second substrate delivery mechanism 5 is connected by steam cylinder piston 6 and the described second substrate frame transporting mechanism 3 and is in the described second substrate frame transporting mechanism 3 belows; Be provided with guiding polished rod 7 and screw mandrel 8 in the described frame 1, described guiding polished rod 7 and screw mandrel 8 are perpendicular to described frame 1 bottom surface and be parallel to each other; On described frame 1, be provided with the motor 9 that drives described screw mandrel 8 rotatings; The described second substrate frame transporting mechanism 3 is provided with screw and through hole, described screw spinning on the described screw mandrel 8, described through hole is sleeved on the described guiding polished rod 7; Also be provided with through hole on described second substrate delivery mechanism 5, be set on described screw mandrel 8 and the guiding polished rod 7 and be in the described second substrate frame transporting mechanism 3 belows; The described first substrate frame transporting mechanism 2 tops are arranged with the 3rd substrate frame transporting mechanism 10 in parallel, and the described first substrate frame transporting mechanism 2, the 3rd substrate frame transporting mechanism 10 are at regular intervals along described frame 1 short transverse; Described second substrate delivery mechanism 5 is provided with a plurality of friction drive wheels 11, and the installation dimension of described friction drive wheel 11 is in the rectangular through-hole orthographicprojection scope of the described second substrate frame transporting mechanism 3 centers setting; Be respectively arranged with drive- motor 12,13 on described second substrate delivery mechanism 5 and the described second substrate frame transporting mechanism 3.
Claims (4)
1. the automatic loading, unloading sheet of horizontal vacuum coating equipment mechanism, comprise frame, the first substrate frame transporting mechanism, the second substrate frame transporting mechanism, first substrate delivery mechanism, second substrate delivery mechanism, it is characterized in that: the end in described frame is provided with described first substrate delivery mechanism, is provided with the described first substrate frame transporting mechanism at the described frame the other end; In described frame, be provided with the described second substrate frame transporting mechanism; The described second substrate frame transporting mechanism center is provided with rectangular through-hole; The described first substrate frame transporting mechanism, the second substrate frame transporting mechanism, first substrate delivery mechanism are complementary in the short transverse position; Described second substrate delivery mechanism is connected by steam cylinder piston and the described second substrate frame transporting mechanism and is in described second substrate frame transporting mechanism below.
2. the automatic loading, unloading sheet of horizontal vacuum coating equipment according to claim 1 mechanism is characterized in that: be provided with guiding polished rod and screw mandrel in described frame, described guiding polished rod and screw mandrel are perpendicular to described frame bottom surface and be parallel to each other; On described frame, be provided with the motor that drives described screw mandrel rotating; The described second substrate frame transporting mechanism is provided with screw and through hole, described screw spinning on the described screw mandrel, described through hole is sleeved on the described guiding polished rod; Also be provided with through hole on described second substrate delivery mechanism, be set on described screw mandrel and the guiding polished rod and be in described second substrate frame transporting mechanism below; Described first substrate frame transporting mechanism top is arranged with the 3rd substrate frame transporting mechanism in parallel, and the described first substrate frame transporting mechanism, the 3rd substrate frame transporting mechanism are at regular intervals along described bracket height direction.
3. the automatic loading, unloading sheet of horizontal vacuum coating equipment according to claim 1 and 2 mechanism, it is characterized in that: described second substrate delivery mechanism is provided with a plurality of friction drive wheels, and the installation dimension of described friction drive wheel is in the rectangular through-hole orthographicprojection scope of described second substrate frame transporting mechanism center setting.
4. the automatic loading, unloading sheet of horizontal vacuum coating equipment according to claim 3 mechanism is characterized in that: among the present invention, be respectively arranged with drive-motor on described second substrate delivery mechanism and the described second substrate frame transporting mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101949311A CN101838798B (en) | 2010-06-08 | 2010-06-08 | Automatic substrate loading and unloading mechanism of horizontal vacuum coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101949311A CN101838798B (en) | 2010-06-08 | 2010-06-08 | Automatic substrate loading and unloading mechanism of horizontal vacuum coater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101838798A true CN101838798A (en) | 2010-09-22 |
| CN101838798B CN101838798B (en) | 2012-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101949311A Active CN101838798B (en) | 2010-06-08 | 2010-06-08 | Automatic substrate loading and unloading mechanism of horizontal vacuum coater |
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| CN (1) | CN101838798B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112575299A (en) * | 2019-09-27 | 2021-03-30 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering system suitable for infrared passivation film layer |
| CN112626464A (en) * | 2020-12-06 | 2021-04-09 | 无锡英诺赛思科技有限公司 | Preparation device of gallium nitride film |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4643629A (en) * | 1984-10-30 | 1987-02-17 | Anelva Corporation | Automatic loader |
| CN1120992A (en) * | 1994-06-24 | 1996-04-24 | Lg半导体株式会社 | Automatic chip-loading apparatus |
| US20070017802A1 (en) * | 2005-07-21 | 2007-01-25 | Hsiuping Institute Of Technology | Automatic in-line sputtering system with an integrated surface corona pretreatment |
| CN101353782A (en) * | 2008-09-05 | 2009-01-28 | 郭爱云 | Large area anti-reflection conductive film continuous magnetron sputtering film coating production line |
| CN201722426U (en) * | 2010-06-08 | 2011-01-26 | 湘潭宏大真空设备有限公司 | Automatic substrate loading and unloading mechanism of horizontal vacuum coating machine |
-
2010
- 2010-06-08 CN CN2010101949311A patent/CN101838798B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4643629A (en) * | 1984-10-30 | 1987-02-17 | Anelva Corporation | Automatic loader |
| CN1120992A (en) * | 1994-06-24 | 1996-04-24 | Lg半导体株式会社 | Automatic chip-loading apparatus |
| US20070017802A1 (en) * | 2005-07-21 | 2007-01-25 | Hsiuping Institute Of Technology | Automatic in-line sputtering system with an integrated surface corona pretreatment |
| CN101353782A (en) * | 2008-09-05 | 2009-01-28 | 郭爱云 | Large area anti-reflection conductive film continuous magnetron sputtering film coating production line |
| CN201722426U (en) * | 2010-06-08 | 2011-01-26 | 湘潭宏大真空设备有限公司 | Automatic substrate loading and unloading mechanism of horizontal vacuum coating machine |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112575299A (en) * | 2019-09-27 | 2021-03-30 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering system suitable for infrared passivation film layer |
| CN112626464A (en) * | 2020-12-06 | 2021-04-09 | 无锡英诺赛思科技有限公司 | Preparation device of gallium nitride film |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101838798B (en) | 2012-01-04 |
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| C06 | Publication | ||
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Owner name: XIANGTAN HONGDA VACUUM TECHNOLOGY CO., LTD. Free format text: FORMER NAME: XIANGTAN HONGDA VACUUM EQUIPMENT CO., LTD. |
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| CP01 | Change in the name or title of a patent holder |
Address after: 411100 Hunan province Xiangtan City Jiuhua Industrial Park Shengshi Road No. 8 Patentee after: Xiangtan Hongda Vacuum Technology Co., Ltd. Address before: 411100 Hunan province Xiangtan City Jiuhua Industrial Park Shengshi Road No. 8 Patentee before: Xiangtan Hongda Vacuum Equipment Co., Ltd. |