CN101834122A - Manufacturing method of polycrystalline silicon film material - Google Patents
Manufacturing method of polycrystalline silicon film material Download PDFInfo
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- CN101834122A CN101834122A CN 201010111994 CN201010111994A CN101834122A CN 101834122 A CN101834122 A CN 101834122A CN 201010111994 CN201010111994 CN 201010111994 CN 201010111994 A CN201010111994 A CN 201010111994A CN 101834122 A CN101834122 A CN 101834122A
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Abstract
The invention provides a manufacturing method of a polycrystalline silicon film material, which is characterized by comprising the following steps of: 1. selecting a substrate, and forming a first blocking layer on the substrate; 2. sequentially forming a metal induced layer, a second blocking layer and an amorphous silicon layer on the first blocking layer; 3. carrying out primary annealing processing on a product obtained in step 2 to obtain a partially crystallized film; 4. forming a metal absorption layer on the partially crystallized film; 5. carrying out secondary annealing processing on the product obtained in step 2; and 6. removing the metal absorption layer after the secondary annealing processing. In the invention, the metal induced layer is formed before amorphous silicon and positioned between the two blocking layers, and because slot type structures are carved on the prepared blocking layers and have inconsistent and quite small distances with the amorphous silicon layer, the invention performs key actions on shortening the heat processing time, increasing the grain size and controlling and inducing metals to diffuse towards the amorphous silicon layer.
Description
Technical field
The invention belongs to field of display, relate in particular to a kind of manufacture method that is used to make the polycrystalline silicon film material of Active Matrix Display.
Background technology
Roughly there are two kinds in thin-film transistor (TFT) technology that present Actire matrix display device is adopted: amorphous silicon membrane TFT and polysilicon membrane TFT.Amorphous silicon membrane TFT technical maturity is also simple relatively, the rate of finished products height, and cost is low.The characteristic of TFT is mainly estimated by the value of electron mobility, and the electron mobility of amorphous silicon membrane TFT is approximately the less stable of 1cm2/Vs and amorphous silicon device, and this makes it to be difficult to satisfy the colored sequential liquid crystal demonstration of high-speed switch, the requirement that Organic Light Emitting Diode shows and other integrated-type shows of current drives.The electron mobility of polysilicon membrane TFT is approximately about 100cm2/Vs, therefore when making high performance LCD and OLED, all adopts polysilicon membrane TFT.
Usually, polysilicon membrane TFT makes according to following step: deposition of amorphous silicon and make it crystallization on transparency carriers such as glass or quartz, form grid oxidation film and grid, in source electrode and drain electrode, form insulating barrier behind the injection dopant then, thereby make polysilicon membrane TFT.Wherein the amorphous silicon membrane crystallization is that polysilicon membrane is a main technique, and the branch of high-temperature technology and low temperature process is arranged.The high temperature crystallization process refers to the technology in crystallization more than 600 ℃, and requiring substrate is quartz material, costs an arm and a leg.Low temperature crystallized technology refers to be lower than 600 ℃ of crystallization processes under the temperature, is applicable to simple glass, and is cheap, is the main research field of amorphous silicon crystallization.The low temperature polycrystalline silicon technology that forms polysilicon membrane at present at low temperatures in short time comprises: quasi-molecule laser annealing technology, heat treating process and metal-induced crystallization method (MIC) rapidly.
In the known metal-induced crystallization thin film fabrication technology, material and device performance the best that transverse metal revulsive crystallization thin film technique is obtained, and metal-induced crystallization thin film fabrication technology will be moved towards practicability, also needs the urgent following problem that solves: 1. high concentration induces metal residues; 2. uncontrollable diffusion of inducing metal; 3. crystallization time is long.
Summary of the invention
Therefore, the objective of the invention is to overcome at least a defective of above-mentioned prior art, a kind of preparation method of polycrystalline silicon film material is provided.
The objective of the invention is to be achieved through the following technical solutions:
According to the present invention, a kind of manufacture method of polycrystalline silicon film material is provided, may further comprise the steps:
Step 1): selected substrate forms first barrier layer on this substrate;
Step 2): on described first barrier layer, form metal induction layer, second layer barrier layer and amorphous silicon layer successively;
Step 3): to step 2) products therefrom carries out first annealing in process, obtains partially-crystallized film;
Step 4): on above-mentioned partially-crystallized film, form the metal adsorption layer;
Step 5): to step 2) products therefrom carries out second annealing in process;
Step 6): remove the metal adsorption layer after described second annealing in process.
In technique scheme, described first and second barrier layers comprise the oxide of metal, carborundum, silicon or the nitride of silicon, and thickness is the 0.1-1.0 micron.
In technique scheme, described step 2) contains any more than a kind or a kind among Ni, Ai, Ti, Ag, Au, Co, Sb, Pb, the Cu in the metal induction layer in.
In technique scheme, described metal inducement layer thickness is between 100～900 nanometers.
In technique scheme, described step 2) the amorphous silicon membrane thickness in is the 1-100 nanometer.
In technique scheme, the first annealing in process temperature in the described step 3) is 450-600 ℃, and the processing time is 1-2 hour, and the atmosphere at heat treated place is nitrogen or inert gas.
In technique scheme, the described first annealing in process temperature is 590 ℃, and the processing time is 1-2 hour, and the atmosphere at heat treated place is inert gas.
In technique scheme, the metal adsorption layer in the described step 4) comprises the oxide of phosphorosilicate glass, silicon or the nitride of silicon, and thickness is between 100～900 nanometers.
In technique scheme, the second annealing in process temperature in the described step 5) is 450-600 ℃, and the processing time is 2-3 hour, and the atmosphere at heat treated place is nitrogen or inert gas.
Compared with prior art, the invention has the advantages that:
1. shortened heat treatment (the being crystallization) time;
2. effectively reduced the metal residues in the polysilicon membrane;
3. improved crystallite dimension, effectively the diffusion of metal toward amorphous silicon layer induced in control.
Description of drawings
It is following that embodiments of the present invention is further illustrated with reference to accompanying drawing, wherein:
Fig. 1 is the thin-film material crystal structure microgram of prior art;
Fig. 2 is for according to one preferred embodiment of the present invention, the cross sectional representation of the multilayer film after forming first barrier layer on the substrate;
Fig. 3 a is for according to one preferred embodiment of the present invention, forms first barrier layer on substrate, induces the cross sectional representation of the multilayer film after metal level, second barrier layer, amorphous silicon layer and the metal absorbed layer;
Fig. 3 b is the partial enlarged drawing of the multilayer film of Fig. 3 a;
Fig. 4 is the cross sectional representation of the multilayer film shown in Fig. 3 a during heating crystallization;
Fig. 5 a is the cross sectional representation of the polysilicon membrane after removing behind the heating crystallization and with the metal adsorption layer;
Fig. 5 b is the grainiess microcosmic displayed map of polysilicon membrane;
Fig. 6 is the crystal structure of the polysilicon membrane of example 6 preparations according to the present invention;
Fig. 7 shows the protruding spacing of example 1～9 and the relation between the crystallite dimension;
Fig. 8 a to Fig. 8 d is respectively the crystal structure according to the polysilicon membrane of example 6,11～13 preparations;
Fig. 9 shows the height of projection of example 6,11～14 and the relation between the crystallization time;
Figure 10 shows the protruding spacing of example 15～24 and the relation between the crystallization time;
Figure 11 a to Figure 11 c be according in the preparation polysilicon process of example 15 with the nickel Metal Distribution design sketch of annealing time;
Figure 12 a to Figure 12 c further shows in detail when annealing time is 1 hour, plane that nickel is residual and distributed in three dimensions.
Embodiment
As shown in Figure 1, prepare in the process of polycrystalline silicon material with general metal inducement method, nickel source random distribution, nucleation is unordered, the crystal structure that makes also becomes disordered state, when follow-up manufacturing TFT, crystal boundary may drop in the brilliant pipe of the film active area, can cause the performance of part thin-film transistor variant.And the crystal structure of the present invention's preparation presents tangible cross growth state, and is in order clean and tidy, is very beneficial for the processing of subsequent device, when the film processed transistor, can avoid crystal boundary, thereby improve the stability of device.
According to the present invention, a kind of polycrystalline silicon film material is provided, it comprises substrate, first barrier layer, metal induction layer, second barrier layer and polysilicon layer from bottom to up.
Wherein, substrate can be glass, stainless steel or such as the flexible substrate of high temperature polymer film, in one embodiment, this substrate is the glass commonly used that healthy and free from worry 1737F, hawk 2000 etc. are used to prepare TFT, and thickness is the 0.3-1.5 millimeter.
First barrier layer also claims first separator, and it mainly acts on is in order to prevent that the impurity in the substrate from spreading in the film on being coated on this first barrier layer in follow-up heating process, and it also is used to increase the thickness and the hardness of substrate, thereby is convenient to it is handled.Usually, first barrier layer can be substituted by the oxide of the metal with barrier properties, carborundum, silicon or the nitride of silicon, and thickness can be between the 0.1-1.0 micron.In one embodiment, this barrier layer can be cryogenic oxidation silicon or silicon oxynitride, and thickness is 1.0 microns.
Be arranged in metal induction layer on first barrier layer and contain any one or a few of following metal material: Ni, Ai, Ti, Ag, Au, Co, Sb, Pb and Cu, thickness is between 100～900 nanometers.In one embodiment, this metal induction layer can be to contain 0.01%～0.1% nickel or nickeliferous material.
The material and the thickness that are positioned at the material on second barrier layer on this metal induction layer and thickness and aforesaid first barrier layer can be identical.
The polysilicon layer that is positioned on second barrier layer is by the amorphous silicon membrane crystallization, this polysilicon layer thickness generally in 1～100 nanometer, in one embodiment, this thickness is 50 nanometers.
Preferably, first barrier etch can be become have groove structure.Particularly, first barrier layer with the substrate facing surfaces on etch a plurality of grooves.Fig. 2 is the multilayer film cross sectional representation behind etching first barrier layer according to one preferred embodiment of the present invention.As shown in Figure 2, comprise substrate 101 and first barrier layer 102 that is coated on the substrate 101.This first barrier layer 102 comprises a plurality of grooves and the bossing between groove.Wherein, the spacing between adjacent two bossings can be 10～100 microns, and the height of projection is 1～5 nanometer.The cross section of bossing is preferably rectangle or trapezoidal shape, and when the cross section was rectangle, preferred wide was 1.5～3.0 microns; When cross section when being trapezoidal, preferably this trapezoidal upper base width is the 0.5-3.0 micron, and the width of going to the bottom is the 0.5-6.0 micron.In this case, the thickness of metal induction layer should be lower than 5 nanometers, has the concaveconvex structure with the first barrier layer fluctuations to guarantee metal induction layer itself.Should make second barrier layer after the coating cover metal induction layer fully, preferably, the contact plane of second barrier layer and amorphous silicon layer is smooth.In one embodiment, the cross section of bossing is a rectangle, and spacing is 30 microns, and the wide of this rectangle is 1.5 microns, and height is 2 nanometers; The metal inducement layer thickness is 1 nanometer; Second barrier layer is 1.5 nanometers at the thickness of the first barrier layer high spot correspondence.This concaveconvex structure of metal induction layer helps forming inconsistent distance between metal induction layer and amorphous silicon layer, thereby more helps to control the direction and the speed of metal diffusing in the inducing layer.
According to the present invention, a kind of method for preparing above-mentioned polycrystalline silicon film material is provided, this method may further comprise the steps:
Step 1): utilize methods such as plasma enhanced chemical vapor deposition (PECVD), low-pressure chemical vapor deposition (LPCVD), magnetron sputtering on substrate deposition first barrier layer.It mainly acts on is in order to prevent that the impurity in the substrate from spreading in the film on being coated on this first barrier layer in follow-up heating process, and it also is used to increase the thickness and the hardness of substrate, thereby is convenient to it is handled.Substrate can be glass, stainless steel or such as the conventional flexible substrate of high temperature polymer film.In one embodiment, this substrate is the glass commonly used that healthy and free from worry 1737F, hawk 2000 etc. are used to prepare TFT, and thickness is the 0.3-1.5 millimeter.Usually, first barrier layer can be substituted by the oxide of the metal with barrier properties, carborundum, silicon or the nitride of silicon, and thickness can be between the 0.1-1.0 micron.In another embodiment, the method deposit thickness on glass substrate by PECVD is that 1.0 microns cryogenic oxidation silicon or silicon oxynitride are as first barrier layer.
Step 2): on first barrier layer, form metal induction layer, second barrier layer and amorphous silicon membrane successively.Specifically, at first the method by electron beam evaporation, ion injection, sputter, chemical vapour deposition (CVD), solution immersion or spin coating forms metal induction layer on first barrier layer, and this metal induction layer contains any one or a few among Ni, Ai, Ti, Ag, Au, Co, Sb, Pb, the Cu.In one embodiment, the employing sputtering method forms one deck controlled amounts on first barrier layer nickel source is as metal induction layer, and this metal induction layer can contain 0.01%～0.1% nickel or nickeliferous material.Then, form second barrier layer by methods such as PECVD, LPCVD, magnetron sputterings on this metal induction layer, the material on described second barrier layer and thickness can be identical with top first barrier layer.Utilize method deposition of amorphous silicon films such as PECVD well known in the art, LPCVD, hot-wire chemical gas-phase deposition (HWCVD), electron cyclotron resonance chemical vapor deposition (ECR CVD), magnetron sputtering at last on this second barrier layer, its thickness is between 1～100 nanometer.In one embodiment, adopt the method for LPCVD on second barrier layer, to deposit the predecessor of the amorphous silicon membrane of one deck 50 nanometer thickness as polysilicon membrane.
Step 3): with above-mentioned steps 2) resulting structures carries out first annealing in process.Common first annealing in process is carried out under such as inert gases such as Ar, He, Ne or nitrogen atmosphere, about 450～600 ℃ of annealing temperature, and the time is 1～2 hour.In this annealing process, metal is diffused into the amorphous silicon layer from inducing layer, make in the amorphous silicon membrane to form discrete induced nuclei, and to grow into yardstick is 10～20 microns polysilicon island, finishes the partially-crystallized film of back formation in first annealing.In one embodiment, annealed 1.5 hours down at 590 ℃.
Step 4): the method by electron beam evaporation, ion injection, sputter, chemical vapour deposition (CVD), solution immersion or spin coating is deposited to this metal adsorption on the above-mentioned partially-crystallized film, the metal adsorption layer includes but not limited to the oxide of phosphorosilicate glass (PSG), silicon or the nitride of silicon, and thickness is between 100～900 nanometers.
Step 5): with above-mentioned steps 4) resulting structures carries out second annealing in process, and this second annealing in process is also carried out under such as inert gases such as Ar, He, Ne or nitrogen atmosphere, about 450～600 ℃ of annealing temperature, and the time is 2～3 hours.In this second annealing in process, induce metal to be absorbed gradually by PSG, metal inducement polysilicon forward position advances simultaneously, and along with inducing the metal in the peak constantly to be absorbed among the PSG, the crystal grain on both sides will clash together.Nickel content is less in such head-on collision crystal grain, and after nickel was absorbed, the defect state density at this place was lower.In one embodiment, this second annealing in process was carried out under 590 ℃ 3 hours.
Step 6): utilize etching or such as the metal adsorption layer of removing with the method for pickling such as hydrofluoric acid or BOE after described second annealing in process, thereby obtain final polycrystalline silicon film material.
In one embodiment of the present invention, described step 1) comprises that also first barrier etch one-tenth is had groove structure.Particularly, first barrier layer with the substrate facing surfaces on etch a plurality of grooves.Fig. 2 is the multilayer film cross sectional representation behind etching first barrier layer according to one preferred embodiment of the present invention.As shown in Figure 2, comprise substrate 101 and first barrier layer 102 that is coated on the substrate 101.This first barrier layer 102 comprises a plurality of grooves and the bossing between groove.Wherein, the spacing between adjacent two bossings can be 10～100 microns, and the height of projection is 1～5 nanometer.The cross section of bossing is preferably rectangle or trapezoidal shape, and when the cross section was rectangle, preferred wide was 1.5～3.0 microns; When cross section when being trapezoidal, this trapezoidal upper base width is the 0.5-3.0 micron, and the width of going to the bottom is the 0.5-6.0 micron.For example the spacing of bossing is 30 microns, and the cross section of bossing is a rectangle, and the wide of this rectangle is 1.5 microns, and height is 2 nanometers.
Fig. 3 a is for according to one preferred embodiment of the present invention, forms first barrier layer on substrate, induces the multilayer film cross sectional representation after metal level, second barrier layer, amorphous silicon layer and the metal absorbed layer.Wherein, because metal induction layer 103 thinner thicknesses are approximately 1～2 nanometer, it also has along the concaveconvex structure on first barrier layer 102.In this embodiment, the thickness on second barrier layer 104 is enough to override the concaveconvex structure of inducing layer 103, and preferably, the contact plane of second barrier layer and amorphous silicon layer is smooth.Shown in Fig. 3 b, with the distance definition from the groove of metal induction layer 103 to the upper surface (that surface that promptly contacts with amorphous silicon film) on second barrier layer 104 is a, is b with the distance definition from the bossing of metal induction layer 103 to the upper surface on second barrier layer 104.In one embodiment, a is approximately 3.0～4.0 microns, and b is approximately 1.0～2.0 microns.
Then above-mentioned multilayer film is carried out annealing in process, the annealing in process condition as previously mentioned, different is is 1～2 hour the time.Fig. 4 is that the amorphous silicon evolution of the multilayer film shown in Fig. 3 a in annealing process is the cross sectional representation of polysilicon.As can be seen from the figure, in the metal induction layer in the annealing process such as the metal in nickel source constantly to diffusion (shown in black arrow) in the amorphous silicon membrane, as previously described, owing between metal induction layer 103 and amorphous silicon layer 105, have inconsistent spacing, nickel at first barrier layer, 102 bossings at first arrives amorphous silicon layer, form the polysilicon nucleus and induce multi-crystal silicon area (being the darker regions in the amorphous silicon layer 105), be the middle mind-set amorphous silicon transverse crystallization corresponding (shown in the thick arrow of white) formation transverse crystallization district with this place then with the first barrier layer recess in this place's formation.Last nickel source layer consumes gradually, from the barrier layer diffusion to the amorphous silicon layer in, induce the nickel in source then constantly to be adsorbed as polysilicon as the metal absorbed layer of inducing the forward to be advanced into such as phosphorosilicate glass.Because the metal absorbed layer promptly is coated on the amorphous silicon layer before annealing in process in this embodiment, thus only need an annealing in process can finish the process of crystallization and metal adsorption, thus shortened the operating time of entire method.Finally, the product cross sectional representation behind the removal metal adsorption layer as shown in Figure 4.Fig. 5 b is the grainiess microcosmic displayed map of polysilicon membrane, there is shown head-on collision crystal boundary, transverse crystallization district, nucleation site, and its crystallite dimension can reach 70 nanometers.Wherein, the corresponding place of projection, first barrier layer is a nucleation site, and the collision crystal boundary drops on the zone of the first barrier layer recess correspondence.
Be example below according to polycrystalline silicon film material of the present invention.
According to an example of the present invention (is example with example 6), the method for preparing polycrystalline silicon film material may further comprise the steps:
(1) selected glass substrate, employing PECVD method deposit 1.0 microns cryogenic oxidation silicon as the barrier layer on glass substrate;
(2) barrier etch is become bathtub construction, wherein convex cross section is a rectangle, and wide is 3 nanometers, and height is 3 nanometers (D=3.0nm), and protruding spacing is 60 microns;
(3) adopt sputtering method forms one deck controlled amounts on first separator nickel source as metal induction layer, surface nickel concentration is 5 * 10
13Cm
-2
(4) adopt the PECVD method to deposit one deck barrier layer as second barrier layer on inducing layer, second barrier layer is 1.5 nanometers at the thickness of the first barrier layer high spot correspondence;
(5) adopt the method for LPCVD on second barrier layer, to deposit the predecessor of the amorphous silicon membrane of one deck 50 nanometer thickness as polysilicon membrane;
(6) adopt the method for coating on amorphous silicon membrane, to prepare the phosphorosilicate glass of one deck 100 nanometer thickness as the metal adsorption layer;
(7) substrate is put into the annealing that 590 ℃ of annealing furnaces carry out 1.5 hours;
(8) adopt hydrofluoric acid that the metal adsorption layer is removed.
Fig. 6 is the crystal structure according to the polysilicon membrane of example 6 preparations, because the crystallization process of crystal begins from the nickel source, in part near nickel source layer, crystal growth best, therefore the polysilicon made from the present invention is very suitable for doing the thin-film transistor of bottom grating structure.
Method by above example prepares example 1～24 (the concrete size of bulge-structure and annealing time are referring to following tabulation), and wherein table 1 has been enumerated the size and the resulting crystallite dimension of the bulge-structure of example 1～9.
Table 1
| Example | Height of projection (nm) | Ledge width (nm) | Projection spacing (μ m) | Crystallite dimension (μ m) |
| ??1 | ??3 | ??3 | ??10 | ??10 |
| ??2 | ??3 | ??3 | ??20 | ??20 |
| ??3 | ??3 | ??3 | ??30 | ??30 |
| ??4 | ??3 | ??3 | ??40 | ??40 |
| ??5 | ??3 | ??3 | ??50 | ??50 |
| ??6 | ??3 | ??3 | ??60 | ??60 |
| ??7 | ??3 | ??3 | ??70 | ??70 |
| ??8 | ??3 | ??3 | ??80 | ??80 |
| ??9 | ??3 | ??3 | ??90 | ??90 |
Fig. 7 shows the protruding spacing of these examples and the relation between the crystallite dimension.As can be seen from the figure, along with the proportional substantially example of the increase crystallite dimension of protruding spacing increases progressively.Prepare in the process of polycrystalline silicon material with existing method, the nickel source is too abundant, nucleus compares comparatively dense, limited growing up of crystal, prepared crystallographic grain size is about 10 nanometer sizes, the crystallographic grain size of the inventive method preparation depends on distance between projection and proportional, fully can be according to the crystal grain of virtually any size in the design preparation scope of protruding spacing, complete like this can the preparation thin-film transistor in crystal grain, the performance that is equivalent to monocrystal is improved performances such as leakage current, carrier mobility greatly.
Table 2 has been enumerated the size and the crystallization time of example 6,11～14 bulge-structures.Fig. 8 a to Fig. 8 d is respectively the crystal structure of the polysilicon membrane for preparing according to example 6,11～13 when crystallization time is 1.5 hours.As can be seen from the figure be crystallization 1.5 hours equally, height of projection is that the crystallization of 3 nanometer correspondences is finished, and height of projection to be the crystallization of 4,5 or 6 nanometer correspondences also have part not have the amorphous silicon (white portion) of crystallization.Along with the increase of height of projection, the amorphous silicon crystallization velocity reduces gradually, when rising height is higher than 5 nanometers, badly influences and induces replenishing of source metal, and crystallization time increases sharply.Fig. 9 shows the height of projection of these examples and the relation between the crystallization time.As can be seen, along with the increase of height of projection, the required time of complete crystallization also increases.Owing to induce the metal random distribution in the prior art, the complete crystallization time is uncontrollable, and in the inventive method the time of complete crystallization depend on the height of projection, therefore can control crystallization time preferably.
Table 2
| Example | Height of projection (nm) | Ledge width (nm) | Projection spacing (μ m) | Crystallization time (h) |
| ??6 | ??3 | ??3 | ??60 | ??2 |
| ??11 | ??4 | ??3 | ??60 | ??2.5 |
| ??12 | ??5 | ??3 | ??60 | ??7 |
| ??13 | ??6 | ??3 | ??60 | ??18 |
| ??14 | ??7 | ??3 | ??60 | ??42 |
Table 3 has been enumerated the size and the crystallization time of example 15～24 bulge-structures.Figure 10 shows the protruding spacing of these examples and the relation between the crystallization time.As can be seen from the figure (1) is preparing polycrystalline silicon material with the inventive method, especially prepares crystallite dimension when the polycrystalline silicon material below 80 microns, and crystallization time is very short; (2) crystallization time is corresponding with protruding spacing, can control crystallization time according to protruding spacing; (3) crystallization time and protruding spacing exponent function relation have industrialization value very much in 100 microns crystallite dimensions.
Table 3
| Example | Height of projection (nm) | Ledge width (nm) | Projection spacing (μ m) | Crystallization time (h) |
| ??15 | ??1 | ??3 | ??10 | ??1 |
| ??16 | ??1 | ??3 | ??20 | ??1 |
| ??17 | ??1 | ??3 | ??30 | ??1.1 |
| ??18 | ??1 | ??3 | ??40 | ??1.2 |
| ??19 | ??1 | ??3 | ??50 | ??1.3 |
| ??20 | ??1 | ??3 | ??60 | ??1.5 |
| ??21 | ??1 | ??3 | ??70 | ??2 |
| ??22 | ??1 | ??3 | ??80 | ??3.8 |
| ??23 | ??1 | ??3 | ??90 | ??7 |
| ??24 | ??1 | ??3 | ??100 | ??15 |
Figure 11 a to Figure 11 c be according in the preparation polysilicon process of example 15 with the nickel Metal Distribution design sketch of annealing time.When annealing time was 10 minutes, the distribution of nickel metal comparatively disperseed, and along with continuous motion diffusion, when annealing time is 1 hour, can obviously find out near the gathering of nickel projection.Figure 12 a to Figure 12 c further shows in detail when annealing time is 1 hour, plane that nickel is residual and distributed in three dimensions.As everyone knows, the existence meeting of residual metal increases leakage current greatly, and particularly for thin-film transistor TFT, can not there be a large amount of metal residues in its active channel district, otherwise can have a strong impact on the stability of device.Therefore must manage to reduce the metal residues amount of polysilicon, and control the zone of its existence.This method prepares in the polysilicon process, only diffuse to form nucleus at first in the nickel source of high spot, other zone is only replenishing usefulness, therefore can reduce the use of nickel amount, and, along with finishing of crystallization process, the accumulation of device material zone nickel remnants has been avoided all with inducing the peak to pass to the crystal boundary place of clashing in the nickel source.
In the present invention, because metal induction layer is positioned under the amorphous silicon layer and is positioned between two-layer barrier layer, this induces metal to open key effect toward the amorphous silicon layer diffusion for shortening heat processing time, raising crystallite dimension, control, avoid metal induction layer to be exposed to contaminated possibility in the air simultaneously, improved the quality of polysilicon membrane.In preferred version of the present invention, owing to be carved with trench structure and inconsistent and very little with the distance of amorphous silicon layer on the barrier layer of preparation, thereby more helping to control induces diffusion velocity and the direction of into saying to amorphous silicon layer; In addition, because formerly deposited the metal adsorption layer, so only need an annealing in process just can finish whole crystallization and adsorption process in preparation process, this has shortened crystallization time greatly, reduce manufacturing cost simultaneously, effectively reduced the metal residues in the polysilicon membrane.
Although the present invention is made specific descriptions with reference to the above embodiments, but for the person of ordinary skill of the art, should be appreciated that and to make amendment based on content disclosed by the invention within spirit of the present invention and the scope or improve not breaking away from, these modifications and improving all within spirit of the present invention and scope.
Claims (10)
1. the manufacture method of a polycrystalline silicon film material is characterized in that, may further comprise the steps:
Step 1): selected substrate forms first barrier layer on this substrate;
Step 2): on described first barrier layer, form metal induction layer, second layer barrier layer and amorphous silicon layer successively;
Step 3): to step 2) products therefrom carries out first annealing in process, obtains partially-crystallized film;
Step 4): on above-mentioned partially-crystallized film, form the metal adsorption layer;
Step 5): to step 2) products therefrom carries out second annealing in process;
Step 6): remove the metal adsorption layer after described second annealing in process.
2. the manufacture method of polycrystalline silicon film material according to claim 1 is characterized in that, described first and second barrier layers comprise the oxide of metal, carborundum, silicon or the nitride of silicon, and thickness is the 0.1-1.0 micron.
3. the manufacture method of polycrystalline silicon film material according to claim 1 is characterized in that, described step 2) in metal induction layer in contain any more than a kind or a kind among Ni, Ai, Ti, Ag, Au, Co, Sb, Pb, the Cu.
4. the manufacture method of polycrystalline silicon film material according to claim 1 is characterized in that, described metal inducement layer thickness is between 100～900 nanometers.
5. the manufacture method of polycrystalline silicon film material according to claim 1 is characterized in that, described step 2) in amorphous silicon membrane thickness be the 1-100 nanometer.
6. the manufacture method of polycrystalline silicon film material according to claim 1 is characterized in that, the first annealing in process temperature in the described step 3) is 450-600 ℃, and the processing time is 1-2 hour, and the atmosphere at heat treated place is nitrogen or inert gas.
7. the manufacture method of polycrystalline silicon film material according to claim 1 is characterized in that, the described first annealing in process temperature is 590 ℃, and the processing time is 1-2 hour, and the atmosphere at heat treated place is inert gas.
8. the manufacture method of polycrystalline silicon film material according to claim 1 is characterized in that, the metal adsorption layer in the described step 4) comprises the oxide of phosphorosilicate glass, silicon or the nitride of silicon, and thickness is between 100～900 nanometers.
9. the manufacture method of polycrystalline silicon film material according to claim 1 is characterized in that, the second annealing in process temperature in the described step 5) is 450-600 ℃, and the processing time is 2-3 hour, and the atmosphere at heat treated place is nitrogen or inert gas.
10. according to the manufacture method of each described polycrystalline silicon film material in the claim 1 to 7, it is characterized in that the substrate in the described step 1) comprises glass, stainless steel or flexible material substrate.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102097459A (en) * | 2010-10-28 | 2011-06-15 | 广东中显科技有限公司 | Multilayer film structure for controllably preparing polycrystalline silicon films |
| CN104299891B (en) * | 2014-10-20 | 2017-06-09 | 京东方科技集团股份有限公司 | The preparation method of low-temperature polysilicon film, TFT, array base palte and display device |
| CN106952887A (en) * | 2017-03-27 | 2017-07-14 | 武汉华星光电技术有限公司 | Flexible display panels and its manufacture method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100446180C (en) * | 2005-10-28 | 2008-12-24 | 南开大学 | Solution method metal induced large grain polycrystalline silicon film material and its preparation and application |
| CN101064246B (en) * | 2006-04-27 | 2011-05-18 | 香港科技大学 | Metal-induced crystallization of amorphous silicon and metal removal techniques |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102097459A (en) * | 2010-10-28 | 2011-06-15 | 广东中显科技有限公司 | Multilayer film structure for controllably preparing polycrystalline silicon films |
| CN102097459B (en) * | 2010-10-28 | 2012-10-31 | 广东中显科技有限公司 | Multilayer film structure for controllably preparing polycrystalline silicon films |
| CN104299891B (en) * | 2014-10-20 | 2017-06-09 | 京东方科技集团股份有限公司 | The preparation method of low-temperature polysilicon film, TFT, array base palte and display device |
| CN106952887A (en) * | 2017-03-27 | 2017-07-14 | 武汉华星光电技术有限公司 | Flexible display panels and its manufacture method |
| CN106952887B (en) * | 2017-03-27 | 2019-02-22 | 武汉华星光电技术有限公司 | Flexible display panels and its manufacturing method |
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| CN101834122B (en) | 2012-07-04 |
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