CN101825458A - Absolute distance measurement system based on interferometric phase comparison method - Google Patents
Absolute distance measurement system based on interferometric phase comparison method Download PDFInfo
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Abstract
The invention discloses a high-precision absolute distance measurement system based on an interferometric phase comparison method, belonging to the technical field of precision measurement. The system equals to the improvement on an absolute distance measurement system based on a traditional frequency scanning interferometry method, and comprises a single frequency tunable external cavity laser, a three-way optical heterodyne interferometer and a phase measurement comparison system. The single frequency tunable external cavity laser is used for laser frequency scanning, the three-way optical heterodyne interferometer is adopted for obtaining heterodyne interference signals of a reference interference arm, a measurement interference arm and a calibration interference arm in the process of laser frequency scanning, then the phase measurement comparison system is used for extracting interference phase drift distances of the calibration interference arm and the measurement interference arm in the frequency scanning process, the interference phase drift distances are in direct proportion with optical path differences of the interference arms, and therefore, the absolute distance can be measured by comparing the interference phase drift distances of the two paths of the interference arms. By adopting the three-way optical heterodyne interferometer and the phase measurement comparison system, the system does not need to measure an air refractive index when compared with the traditional frequency scanning absolute distance measurement systems, the system can overcome frequency drift and avoids the scanned range for measuring laser frequency, and therefore, frequency calibration devices, such as a Fabry-Perot cavity, and the like, are not needed.
Description
Technical field
The present invention is a kind of absolute distance measurement system based on interferometric phase comparison method, mainly is to use swept light source to cooperate laser heterodyne interferometry phase detection technology, obtains absolute distance by interfering the interferometric phase drift value of arm to compare to two-way.Belong to the Technology of Precision Measurement field.Can be applicable to topography measurement, three-dimensional tracking Control and long distance applications field.
Background technology
Optical interference measuring method can be divided into two big classes: displacement interferometer mensuration and absolute distance interferometry, it is relative displacement that the displacement interferometer mensuration measures, during enforcement, must use track and transfer table to make and interfere arm lengths to change continuously, light beam can not be interdicted during the course.On the contrary, what the absolute distance interferometry measured is absolute distance, during measurement, interfere arm lengths to remain unchanged, so be referred to as no track interferometric method again, compare with the displacement interferometer mensuration, the absolute distance interferometry is except having saved setting up of guide rail, save the time of the number of interference fringes variation that is produced when the accumulative total platform moves again, and had Measuring Time advantage fast.
The absolute distance measurement method is greatly developed and is had a wide range of applications after the seventies.At topography measurement, three-dimensional tracking Control, space tasks, and all play an important role in the long distance applications field.The method of absolute measurement also has a lot, and main method has time-of-flight method, single wavelength interferometric method, multi-wavelength interference method, frequency scanning interference method etc.
Time-of-flight method is also referred to as incoherent mensuration, mainly contain pulse ranging method and phase difference ranging method, their ultimate resolution depends on temporal resolution respectively and corresponding to the phase resolution of maximum modulating frequency, but measuring accuracy is subjected to the influence of clock stability and impulse speed (limited in air), general measure resolution is not used interference technique in this method of millimeter magnitude, so measuring accuracy is difficult to improve.
Single wavelength interferometric method adopts monostable laser instrument as light source, and according to the measure of the change distance of phase place, there is the uncertainty of 2 π integral multiples in the phase place that this method records, and for fear of this uncertainty, measurement range must be very little, is applicable to more short-range measurement.
The multi-wavelength interference method repeats to develop the notion that synthetic wavelength on the legal principle basis at decimal.Utilize a plurality of laser instruments to form the scope that the bigger synthetic wavelength of wavelength increases phase place non-fuzzy in the interferometry, increased measuring distance, but structure is too complicated.
Traditional frequency scanning interference method adopts the single frequency tunable laser, the drift value of noting frequency sweeping scope and interferometric phase in the frequency sweep process simultaneously can obtain absolute distance, traditional frequency scanning interference method exists following deficiency: (1) is very accurate to the frequency sweeping scope, therefore in the beginning and the ending phase of frequency sweeping, need carry out accurate frequency stabilization to frequency-tunable laser, this just needs extra frequency of utilization to demarcate starting point and terminal point that device comes spot frequency scanning, be generally atomic absorption spectrum or Fabry pool sieve chamber, increase system's control difficulty and complexity, increased Measuring Time.(2) need air refraction is measured in the absolute distance measurement process, the measuring accuracy of air refraction has influenced the absolute distance measurement precision to a great extent.(3) usually survey by using homodyne Mach-Zehnder interferometers frequently that interferometric phase is carried out quadrature, with this monitoring frequency scanning process, increased the complexity of system, used polarization spectroscope in the homodyne Mach-Zehnder interferometers frequently, the nonlinearity erron that causes quadrature to be surveyed need carry out algorithm compensation to it.
Summary of the invention
Because traditional frequency scanning interference method exists many shortcomings, the present invention all uses the optical heterodyne detection technology to obtain interferometric phase, adopt a length to interfere arm through the demarcation of demarcating in advance and measure the interference arm and obtain the difference interference signal simultaneously, cooperate the phase measurement comparison system to measure simultaneously and demarcate the interference arm and measure the phase drift amount of interfering arm, obtain absolute distance to be measured with this; Use homodyne Mach-Zehnder interferometers and frequency demarcating device have frequently been avoided, need not to know the frequency sweeping scope, saved complicated frequency stabilization system, improved measuring speed, in measuring process, need not to measure air refraction, set up the effective scheme of absolute distance measurement.
The present invention is the improvement and the raising of legacy frequencies scanning interferometer method, adopts following technical scheme:
Invention proposes interferometric phase comparison method absolute distance measurement system as shown in Figure 1: its basic thought is that the phase drift amount of measuring simultaneously in the laser frequency scanning process on the approximately equalised interference arm of two-way optical path difference obtains absolute distance to be measured.This system is mainly by the single frequency tunable external cavity laser, three road laser heterodyne interferometry instrument, and the phase measurement comparison system is formed.In the present invention, system's various piece is described as follows:
(1) frequency-tunable outside cavity gas laser: this laser instrument can not have the scanning of mould frequency hopping rate on a large scale, and sweep frequency is tens GHz even GHz up to a hundred.Frequency sweep laser incides three road laser heterodyne interferometry instrument.
(2) three road laser heterodyne interferometry instrument: by acousto-optic modulator, various optical prisms, the three tunnel interfere arm, and photodetector is formed.Use acousto-optic modulator that laser is produced certain frequency deviation, utilize two-way to exist the laser of frequency difference to carry out the optical heterodyne detection of interferometric phase, electrooptical device is a photodetector.Three road laser heterodyne interferometry instrument can obtain the three tunnel real-time difference interference signals of interfering on the arm after using unpolarized spectroscope that laser is carried out repeatedly beam splitting and merges simultaneously; One tunnel interference arm is that its optical path difference is about zero with reference to the interference arm in three tunnel interference arms, and interferometric phase also is about zero.Two-way interference arm is respectively to measure and interferes arm and geometrical length to interfere arm through the demarcation of demarcating in advance in addition.This two-way is interfered arm optical path difference approximately equal.Demarcation interferes the level crossing that uses thermal expansivity extremely low material in two sides to make in the arm that laser is repeatedly reflected increases the optical path difference of demarcating the interference arm, and prevents that temperature variation is to demarcating the variation of interfering the arm geometrical length to bring.Three tunnel difference interference signals of interfering arm to obtain are input to the real-time measurement that the phase measurement comparison system carries out the interferometric phase drift value simultaneously.
(3) phase measurement comparison system: by 3 LC bandpass filter, 3 analog multipliers, a high stability crystal oscillator, 3 active low-pass filters, 6 comparers, and a high-speed counting integrated circuit board is formed.The LC bandpass filter is carried out bandpass filtering to three road difference interference signals, filtering flip-flop and other frequency content noises, be input to the high-speed counting integrated circuit board by comparer afterwards and measure the bigness scale of interfering arm and demarcating the interferometric phase drift value on the interference arm simultaneously, obtain the integral part of interferometric phase drift value.Multiplier, high stability crystal oscillator and low-pass filter have been formed low-converter, make three road difference interference signals become the low frequency signal of several KHz from the intermediate-freuqncy signal of tens megahertzes, enter comparer afterwards, be input to the counting integrated circuit board, measure simultaneously and interfere arm and demarcate the accurate measurement of interfering interferometric phase drift value on the arm, record the fraction part of interferometric phase, fraction part exists phase place to twine, can cooperate the phase place bigness scale that it is carried out phase unwrapping, obtain complete high-resolution interferometric phase signal.
Main characteristic of the present invention: utilize interferometric phase comparison method to carry out absolute distance measurement; Be equivalent to the improvement of legacy frequencies scanning absolute distance measurement system, this system is owing to adopted three road laser heterodyne interferometry instrument and phase place to compare and measure system, system compares with legacy frequencies scanning absolute distance measurement, need not to measure air refraction, this system can overcome frequency drift, and avoided the sweep limit of Laser Measurement frequency, therefore need not to use Fabry pool sieve chamber equifrequent demarcation device system architecture simple.Demarcate and interfere arm and measurement to interfere the arm geometrical length close, therefore also can avoid measuring air refraction.
Benefit of the present invention and application prospect: the present invention passes through the systematic research of frequency sweeping absolute distance measurement, for the absolute distance measurement method provides a kind of new effective ways, can be applicable to following field: (1) is aspect topography measurement, but the absolute distance between this invention Measuring Object improves the mapping degree of accuracy; (2) can be used as micro-distancer in three-dimensional tracking Control field uses; (3), also can be used for space tasks such as satellites formation in remote application facet.
Description of drawings
Fig. 1 is the system diagram of interferometric phase comparison method absolute distance measurement
Embodiment
Fig. 1 is the system diagram of interferometric phase comparison method absolute distance measurement.Utilize the laser frequency of piezoelectricity control end controlled frequency tunable external cavity laser (1).Frequency sweep laser incides three road laser heterodyne interferometry instrument, be divided into two bundles after at first entering unpolarized spectroscope (2-1), a branch of process acousto-optic modulator carries out acoustooptic modulation, make laser frequency be offset tens megahertzes, incide unpolarized spectroscope (5-1) then, another bundle (4-3) after the reflection, incides unpolarized spectroscope (5-1) through two right-angle prisms (4-2); Unpolarized spectroscope (5-1) has two bands the laser of frequency difference to be divided into two parts respectively, and reflected light incides with reference to interfering arm, and transmitted light enters unpolarized spectroscope (5-2); Form by right-angle prism (4-4) and unpolarized spectroscope (2-2) with reference to interfering arm, laser without acoustooptic modulation incides right-angle prism (4-4), laser through acoustooptic modulation incides unpolarized spectroscope (2-2), two bands have the laser of frequency difference to converge the laggard photodetector (9-1) of going into, and obtain with reference to the difference interference signal of interfering ratio.Two bands that incide unpolarized spectroscope (5-2) have the laser of frequency difference to be divided into two parts separately, and transmitted light enters to measure interferes arm, and reflected light enters to demarcate after right-angle prism (6) reflection interferes arm.Measure and interfere arm to be formed by right-angle prism (4-6) with by the Dove prism (7-2) that the right-angle prism and the unpolarized spectroscope of consistent size are formed.Do not incide right-angle prism (4-6) back in the transmitted light of unpolarized spectroscope (5-2) and enter photodetector (9-2) with together entering into through the laser after the acoustooptic modulation to converge behind the Dove prism (7-2), obtain measuring the difference interference signal through the laser of acoustooptic modulation.Demarcate and interfere arm by level crossing (8-2), level crossing (8-1), Dove prism (7-1), right-angle prism (4-5) is formed.Enter into laser that two bands of demarcate interfering arm have a frequency deviation and incide level crossing (8-2) without the laser of acoustooptic modulation, entering right-angle prism (4-5) after the repeatedly reflection of laser through level crossing (8-1) and level crossing (8-2) reflects, reflected light enters into level crossing (8-1) once more, laser passes through the repeatedly reflection back of level crossing (8-1) and level crossing (8-2) once more and together enters Dove prism (7-1) with laser through acoustooptic modulation, converges laggardly to go into photodetector (9-3) and obtain demarcating the difference interference signal.
With reference to the difference interference signal, demarcate the difference interference signal and enter into the phase measurement comparison system simultaneously with measurement difference interference signal.Enter into LC bandpass filter (10-1) and multiplier (11-1) respectively with reference to the difference interference signal, measure the difference interference signal and enter into LC bandpass filter (10-2) and multiplier (11-2) respectively, demarcate the difference interference signal and enter into LC bandpass filter (10-3) and multiplier (11-3) respectively, bandpass filter is carried out bandpass filtering to three road heterodyne signals, enter into three high-speed comparators (14-1) respectively behind filtering DC component and other frequency noises, (14-2), (14-3).Comparer becomes square-wave signal to harmonic signal, and the counting port that enters into high-speed counting integrated circuit board (15) is afterwards counted, and obtains the integral part of interferometric phase drift value.Local oscillator (13) produces the sine wave signal that differs several KHz with the acoustooptic modulation frequency, enter into three multipliers (11-1) (11-2) (11-3) respectively, the output signal of three multipliers enters three low-pass filters (12-1) respectively, (12-2), carry out low-pass filtering (12-3), filtering high fdrequency component and high frequency noise are realized down coversion.The output signal of three wave filters enters into three high-speed comparators (14-4) respectively, (14-5), (14-6), the output square-wave signal of comparer enters into the latch end of high-speed counting integrated circuit board (15), and the high frequency clock that itself has by high-speed counting integrated circuit board (15) carries out the measurement of the fraction part of interferometric phase side-play amount.Utilize the integral part of interferometric phase side-play amount that fraction part is carried out phase unwrapping, obtain complete phase drift amount.Interfere the optical path difference and the phase drift amount of arm to be directly proportional, optical path difference equals to interfere the arm geometrical length to multiply by air refraction, wherein demarcate and interfere the arm geometrical length through demarcating in advance, demarcation is interfered the arm geometrical length and is measured and interfere the arm geometrical length very approaching, so the air refraction approximately equal.Demarcate and interfere the ratio of the interferometric phase drift value on arm and the measurement interference arm to equal to demarcate the ratio of interfering the arm geometrical length and measuring interference arm geometrical length drift value.Therefore can obtain measuring the absolute distance of interfering arm by comparing interferometric phase.The scanning of laser frequency realizes by the piezoelectricity input end of modulated laser, incipient stage and initial period in frequency sweep, to reduce the speed of frequency sweep as far as possible, because measuring to measure when interfering arm and demarcating the phase drift amount of interfering arm, the phase measurement comparison system have the regular hour poor, can control this mistiming less than 0.1ms, under enough low sweep rate, should still can satisfy the submillimeter precision of absolute distance measurement the mistiming.
Claims (7)
1. the absolute distance measurement system based on interferometric phase comparison method is characterized in that: use phase-comparison method to realize absolute distance measurement.This system is by the single frequency tunable external cavity laser, three road laser heterodyne interferometry instrument, and the phase measurement comparison system is formed.Use the single frequency tunable external cavity laser not have mould on a large scale and jump laser frequency scanning, sweep limit at tens GHz to GHz up to a hundred; Adopt three road laser heterodyne interferometry instrument to obtain simultaneously in the frequency sweeping process with reference to interfering arm, measure and interfere arm, demarcate the difference interference signal of interfering on the arm, the demarcation of using the phase measurement comparison system to extract in the frequency sweep process is then interfered arm and is measured the interferometric phase drift value of interfering on the arm, the optical path difference of interferometric phase drift value and interference arm is directly proportional, and therefore can interfere the interferometric phase drift value on arm record absolute distance by comparing this two-way.
2. according to described three road laser heterodyne interferometry instrument of claim 1, it is characterized in that: by acousto-optic modulator, various optical prisms, the three tunnel interfere arm and photodetector to be formed.Use acousto-optic modulator that laser is produced certain frequency deviation, utilize two-way to exist the laser of frequency difference to interfere the optical heterodyne detection of carrying out interferometric phase on the arm three the tunnel, electrooptical device is a photodetector.
3. interfere arm for claim 2 described three tunnel, it is characterized in that: wherein one the tunnel as reference interference arm, and its optical path difference approximates zero, and its interferometric phase also approximates zero.Two-way interferes the arm geometrical length close in addition, makes two to interfere air refraction approximately equal in the arm.One the tunnel for measuring the interference arm, and length is absolute distance to be measured.Another road interferes the arm geometrical length known, through demarcating in advance, interferes arm as demarcating.
4. arm is interfered in described demarcation according to claim 3, it is characterized in that: use two level crossings that laser is repeatedly reflected the increase optical path difference, two level crossings adopt the extremely low material of thermal expansivity to make, and interfere the variation of arm geometrical length with this demarcation that prevents that temperature variation from being caused.
5. according to the described phase measurement comparison system of claim 1, it is characterized in that: receive simultaneously with reference to interfering arm, measuring and interfere arm, demarcate the difference interference signal of interfering on the arm.Interfere arm and demarcate the interferometric phase drift value of interfering on the arm through can almost obtaining simultaneously after the data processing in the frequency sweep process, to measure.The phase measurement comparison system is made up of phase place integer measuring system and phase place decimal measuring system and high-speed counting integrated circuit board three parts, and the technology integrated circuit board exists counting port and latch port.Oscillator is contained in integrated circuit board inside.
6. according to the described phase place integer of claim 5 measuring system, it is characterized in that: by 3 LC bandpass filter, and three comparator bank become to form.The LC bandpass filter is carried out bandpass filtering to three road difference interference signals, filtering flip-flop and other frequency content noises, be input to the high-speed counting integrated circuit board by comparer afterwards and measure the bigness scale of interfering arm and demarcating the interferometric phase drift value on the interference arm simultaneously, obtain the integral part of interferometric phase drift value.
7. according to the described phase place decimal of claim 5 measuring system, by, a high stability crystal oscillator, 3 low-pass filters, 3 comparers are formed.3 analog multipliers, a high stability crystal oscillator and 3 active low-pass filters carry out down coversion to three road difference interference signals respectively, make three road difference interference signals become the low frequency signal of several KHz from the intermediate-freuqncy signal of tens megahertzes, enter 3 comparers afterwards respectively, be input to the counting integrated circuit board, measure simultaneously and interfere arm and demarcate the accurate measurement of interfering interferometric phase drift value on the arm, record the fraction part of interferometric phase, fraction part exists phase place to twine, can cooperate the phase place bigness scale that it is carried out phase unwrapping, obtain complete high-resolution interferometric phase signal.
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| CN102183234A (en) * | 2011-03-21 | 2011-09-14 | 清华大学 | Method and device for measuring frequency scanning absolute distance based on femtosecond optical frequency comb |
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| CN102183234A (en) * | 2011-03-21 | 2011-09-14 | 清华大学 | Method and device for measuring frequency scanning absolute distance based on femtosecond optical frequency comb |
| CN103322924B (en) * | 2013-06-09 | 2016-04-27 | 中国科学院长春光学精密机械与物理研究所 | The optical heterodyne interference method of nonlinearity erron is eliminated based on timing counter algorithm |
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| CN104914444A (en) * | 2015-07-06 | 2015-09-16 | 江苏安智光电科技有限公司 | Long-distance laser heterodyne interference range-finding structure |
| CN104914444B (en) * | 2015-07-06 | 2017-10-13 | 江苏安智光电科技有限公司 | A kind of long distance laser difference interference distance measuring structure |
| CN106226775A (en) * | 2016-07-15 | 2016-12-14 | 哈尔滨工业大学 | A kind of absolute distance dynamic measurement system based on swept frequency interferometer and measuring method thereof |
| CN106226775B (en) * | 2016-07-15 | 2018-10-02 | 哈尔滨工业大学 | A kind of absolute distance dynamic measurement system and its measurement method based on swept frequency interferometer |
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| CN113607047A (en) * | 2021-08-04 | 2021-11-05 | 中国科学院长春光学精密机械与物理研究所 | Heterodyne interference signal simulation system |
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