CN101823766B - 具有纳米孔结构的氧化铪粉体的制备方法 - Google Patents

具有纳米孔结构的氧化铪粉体的制备方法 Download PDF

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CN101823766B
CN101823766B CN2010101825639A CN201010182563A CN101823766B CN 101823766 B CN101823766 B CN 101823766B CN 2010101825639 A CN2010101825639 A CN 2010101825639A CN 201010182563 A CN201010182563 A CN 201010182563A CN 101823766 B CN101823766 B CN 101823766B
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hafnium oxide
oxide powder
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porous structure
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CN101823766A (zh
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魏春城
田贵山
冯柳
孟凡涛
周立娟
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Shandong University of Technology
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Abstract

本发明提供一种具有纳米孔结构的氧化铪粉体的制备方法，属于纳米粉体材料领域。其特征在于：采用固相法，以四氯化铪和苯甲酸为原料，按摩尔比1∶2～4将两者混合，球磨均匀，然后在500～800℃煅烧2h，即得具有纳米孔结构的氧化铪粉体，孔径为50～100nm，氧化铪颗粒为20～100nm。本发明工艺简单，操作安全，效率高，合成的纳米氧化铪粉体具有较大的比表面积。

Description

具有纳米孔结构的氧化铪粉体的制备方法
技术领域
本发明提供一种具有纳米孔结构的氧化铪粉体的制备方法，属于纳米粉体材料领域。
背景技术
目前，氧化铪材料已被用于快离子导体燃料电池、氧传感器、红外窗口保护膜、原子反应堆的控制棒、催化剂等领域。其中HfO2溅射薄膜由于具有高介电常数、高介电强度、低介电损耗、低漏电流及良好的电容-电压特性、良好的稳定性以及能与基体硅的牢固结合等优点，被认为是最有前途的新型绝缘介质膜之一。二氧化铪用作催化剂时，若赋予其发达的孔隙结构不仅有利于电荷在相间的传递，改善其电荷传导性能，同时，也可以减小反应物分子或产物分子在催化剂中的扩散阻力，改善其催化反应性能。但常规的二氧化铪热稳定性差、比表面小、孔隙欠发达，孔径大小变化无规律等，限制了其优良性能的发挥。
发明内容
本发明的目的是提供一种工艺简单、操作安全、不造成污染、具有纳米孔结构的氧化铪粉体的制备方法，其技术方案为：
采用固相法，以四氯化铪和苯甲酸为原料，按摩尔比1∶2～4将两者混合，球磨均匀，然后在500～800℃煅烧2h，即得具有纳米孔结构的氧化铪粉体，孔径为50～100nm，氧化铪颗粒为20～100nm。
本发明与现有技术相比，具有如下优点：
1、本发明采用固相反应法合成纳米孔结构的氧化铪粉体，效率高，操作简单，安全；
2、本发明制备的氧化铪粉体具有三维网络结构及均匀的纳米孔洞，使其具有较大的比表面积；
3、本发明制备的氧化铪粉体具有三维网络结构，其骨架为20～100nm的氧化铪颗粒，纳米颗粒具有较高的分散性。
附图说明
图1是本发明实施例在700℃煅烧后的XRD谱；
图2是本发明实施例在700℃煅烧后的SEM照片。
具体实施方式
实施例1
以四氯化铪和苯甲酸为原料，按摩尔比1∶2将两者混合，球磨均匀，然后在700℃煅烧2h，即得具有纳米孔结构的氧化铪粉体。
通过XRD测试，可见粉体晶体类型为单斜相(见图1)；通过SEM测试，可见氧化铪粉体具有三维网络，孔径为50～100nm，骨架颗粒为20～100nm(见图2)。
实施例2
以四氯化铪和苯甲酸为原料，按摩尔比1∶3将两者混合，球磨均匀，然后在500℃煅烧2h，即得具有纳米孔结构的氧化铪粉体。
实施例3
以四氯化铪和苯甲酸为原料，按摩尔比1∶4将两者混合，球磨均匀，然后在800℃煅烧2h，即得具有纳米孔结构的氧化铪粉体。

Claims (1)

1.一种具有纳米孔结构的氧化铪粉体的制备方法，其特征在于：采用固相法，以四氯化铪和苯甲酸为原料，按摩尔比1∶2～4将两者混合，球磨均匀，然后在500～800℃煅烧2h，即得具有纳米孔结构的氧化铪粉体，制备的氧化铪粉体具有三维网络结构及均匀的纳米孔洞，其骨架为20～100nm的氧化铪颗粒，孔径为50～100nm。
CN2010101825639A 2010-05-17 2010-05-17 具有纳米孔结构的氧化铪粉体的制备方法 Expired - Fee Related CN101823766B (zh)

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US20150234272A1 (en) * 2014-02-14 2015-08-20 Intel Corporation Metal oxide nanoparticles and photoresist compositions
CN105948117B (zh) * 2016-04-28 2017-10-24 东华大学 一种以水热法制备HfO2纳米颗粒的方法
CN106082325A (zh) * 2016-06-14 2016-11-09 东华大学 一种通过调节碱的浓度制备不同晶型纳米二氧化铪颗粒的方法
CN108815137B (zh) * 2018-08-24 2021-03-23 浙江大学 一种具有放疗增敏的氧化铪(HfO2)纳米颗粒的制备方法

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