CN101812673A - 用于金属有机物化学沉积设备的扇形进气喷头 - Google Patents
用于金属有机物化学沉积设备的扇形进气喷头 Download PDFInfo
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101914762A (zh) * | 2010-08-31 | 2010-12-15 | 中国科学院半导体研究所 | 一种用于金属有机物化学气相沉积设备的进气喷头结构 |
CN103103501A (zh) * | 2013-01-14 | 2013-05-15 | 东莞市中镓半导体科技有限公司 | 一种材料气相外延用扇形喷头结构 |
CN105926035A (zh) * | 2016-05-19 | 2016-09-07 | 广东省中科宏微半导体设备有限公司 | 一种用于混晶化学气相外延的进气装置 |
CN107313026A (zh) * | 2016-04-27 | 2017-11-03 | 汉民科技股份有限公司 | 应用于化学气相沉积装置的气体分流喷头 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101914762A (zh) * | 2010-08-31 | 2010-12-15 | 中国科学院半导体研究所 | 一种用于金属有机物化学气相沉积设备的进气喷头结构 |
CN101914762B (zh) * | 2010-08-31 | 2013-03-06 | 广东省中科宏微半导体设备有限公司 | 一种用于金属有机物化学气相沉积设备的进气喷头结构 |
CN103103501A (zh) * | 2013-01-14 | 2013-05-15 | 东莞市中镓半导体科技有限公司 | 一种材料气相外延用扇形喷头结构 |
CN107313026A (zh) * | 2016-04-27 | 2017-11-03 | 汉民科技股份有限公司 | 应用于化学气相沉积装置的气体分流喷头 |
CN105926035A (zh) * | 2016-05-19 | 2016-09-07 | 广东省中科宏微半导体设备有限公司 | 一种用于混晶化学气相外延的进气装置 |
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