CN101797395A - High-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer - Google Patents

High-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer Download PDF

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Publication number
CN101797395A
CN101797395A CN200910008648A CN200910008648A CN101797395A CN 101797395 A CN101797395 A CN 101797395A CN 200910008648 A CN200910008648 A CN 200910008648A CN 200910008648 A CN200910008648 A CN 200910008648A CN 101797395 A CN101797395 A CN 101797395A
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China
Prior art keywords
radio
frequency
vacuum chamber
power supply
housing
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Pending
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CN200910008648A
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Chinese (zh)
Inventor
王守国
赵玲利
杨景华
张超前
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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Priority to CN200910008648A priority Critical patent/CN101797395A/en
Publication of CN101797395A publication Critical patent/CN101797395A/en
Pending legal-status Critical Current

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Abstract

The invention provides a novel high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer comprising a casing, a vacuum chamber, a radio-frequency power supply, an air intake and exhaust system and an automatic control system. The sterilizer is characterized by comprising the vacuum chamber as well as the radio-frequency power supply and the air intake and exhaust system which are connected with the vacuum chamber; a sterilizing frame is arranged in the middle of the vacuum chamber; an article to be sterilized is placed in the frame which is connected with a vacuum chamber casing and is earthed; a radio-frequency electrode is arranged between the sterilizing frame and the casing; an insulated medium material is filled between the radio-frequency electrode and the casing; the radio-frequency electrode is connected with the output end of the radio-frequency power supply; and the discharge of the plasma is generated between the radio-frequency electrode and the sterilizing frame and is diffused to the sterilizing frame for sterilizing the article. The plasma sterilizer cannot pollute human bodies and the environment and cannot thermally damage sensitive medical appliances.

Description

High-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer
[technical field]
The present invention relates to a kind of novel high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer, especially sterilization stand in vacuum chamber and housing are altogether, between sterilization stand and housing, be provided with radio-frequency electrode, and between radio-frequency electrode and housing, be the plasma sterilizer that is filled with the dielectric material.
[background technology]
In the increasingly extensive application of medical field, how these apparatuses are carried out the new difficult problem that low temperature sterilization and high-effective disinfecting become medical field along with various high-new Medical Instruments and equipment.The wet sterilization of conventional high-temperature can not adapt to fast, efficiently, no burn into do not have the new demand of degeneration.Liquid biocide is as the glutaraldehyde class, because its zest, toxicity and corrosivity can't realize as the sterilization of oral cavity class equipment, can only being used for general sterilization to accurate medical apparatus and instruments.And ethylene oxide sterilizing length consuming time commonly used requires height to device, and tool toxicity is big.With the sterilization of simple gaseous hydrogen peroxide and liquid peracetic acid, its complicated operation, material subject to sterilization, as the poly-acid in Portugal, the chemical modification of the medical apparatus and instruments material that plastics and rubber etc. are commonly used, and to healthcare givers's stimulation, damage also is its unavoidable defective.
Radio frequency vacuum low-temperature plasma technology is widely used in: the preparation of (1) thin-film material.(2) modification of material surface.(3) surface sputtering and surface etch etc.(4) sterilization of the cleaning of material surface and material surface and sterilization.
But, common vacuum plasma sterilization cabinet be object stage as suspension electrode, plasma is to be created between radio-frequency electrode and the vacuum-chamber wall, it is less that actual dispersion arrives the plasma of object stage one side, so the utilization rate of plasma is lower.
[summary of the invention]
In order to improve the practical efficiency of plasma in the vacuum chamber, the invention provides a kind of novel high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer, comprise a housing, vacuum chamber, radio-frequency power supply, air inlet and extract system, automatic control system, it is characterized in that: in this steriliser, comprise a vacuum chamber and connected radio-frequency power supply, air inlet and extract system, be provided with the sterilization framework in the centre position of this vacuum chamber, the article of being sterilized are to be placed in this framework, this framework is connected with the vacuum chamber housing and ground connection, between this sterilization framework and housing, be provided with radio-frequency electrode, be to be filled with the dielectric material between this radio-frequency electrode and housing, this radio-frequency electrode is connected with the outfan of radio-frequency power supply, plasma discharge be created in radio-frequency electrode and the sterilization framework between and be diffused into the sterilization framework in to article carry out disinfection the sterilization device.
Described high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer, it is characterized in that: the vacuum chamber in housing is provided with the vacuum tightness door, bleeding point, air inlet, venting valve port and electrode interface, vacuum chamber be shaped as cylindrical shape or for square, place the sterilization framework in the centre position of this vacuum chamber, the article of being sterilized are to be placed in this framework, this framework is to be made by the empty metallic sheet stock of band, this framework is connected with housing and ground connection, between this sterilization framework and housing, be provided with radio-frequency electrode, be to be filled with the dielectric material between this radio-frequency electrode and housing, this radio-frequency electrode is connected with the outfan of radio-frequency power supply, plasma discharge be created in radio-frequency electrode and the sterilization framework between and be diffused into the sterilization framework in.
The present invention is a kind of novel high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer, and its advantage is: 1, between radio-frequency electrode and housing, be filled with the dielectric material, and avoided the plasma between to produce; 2, plasma discharge is to be created between radio-frequency electrode and the sterilization framework, and the sterilization framework is to adopt mesh-structuredly to make that plasma is easier to be diffused in the sterilization framework.
[description of drawings]
Figure (1) analyses and observe and looks sketch map for vacuum sterilization cavity body structure of the present invention;
Figure (2) is a case side TV structure cutaway view of the present invention;
Figure (3) is a Facad structure sketch map of the present invention.
At first, see also figure (1), figure (2) and figure (3), this high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer, comprise a housing 100, vacuum chamber 104, radio-frequency power supply 106, air inlet 114 systems, 111 systems of bleeding, automatically control 107 systems, it is characterized in that: be provided with sterilization framework 105 in the centre position of vacuum chamber cavity 104, this sterilization framework 105 is to make with the net metal material, the article of being sterilized are to be placed in this framework 105, this framework 105 is connected with housing 104 and altogether, between this sterilization framework 105 and vacuum cavity 104, be provided with radio-frequency electrode 103, between this radio-frequency electrode 103 and vacuum cavity 104, be to be filled with dielectric material 102, this radio-frequency electrode 103 is connected with the outfan of radio-frequency power supply 106, vaccum case 104 is connected with ground, and plasma discharge is to be created between radio-frequency electrode 103 and the sterilization framework 105 and to be diffused in the sterilization framework 105 the article sterilization that carries out disinfection.
Shown in figure (2) and figure (3), vacuum chamber cavity 104 is mounted in the upper position of housing 100, and the bottom surface of vacuum chamber cavity 104 is equipped with vacuum suction interface 120, radio-frequency electrode connector 119, air inlet 115 and gas outlet 116.Be provided with the unlatching door 118 of band glass window 121 in vacuum chamber cavity 104 fronts, door handle is 122; Side at vacuum chamber cavity 104 is installed touch screen 107 and PLC control system, by the printer 109 of PLC control.The adapter 113 of a radio-frequency power supply 106 and a radio-frequency power supply is installed at housing 100 middle parts, and ultrasonic atomizatio jar 114, the liquid level in its jar can be shown by a transparent glass tube 108; A mechanical pump 111, mechanical pump electromagnetic valve 112 are installed in housing 100 bottoms.
This housing 100 can adopt metal material also can adopt polymeric material to make, vacuum chamber cavity 104 is to adopt stainless steel material to make, radio-frequency electrode 103 and sterilization framework 105 are to adopt sheet metal with holes to make, and the apparatus that is sterilized can be placed on sterilization framework 105 and carry out disinfection.
Invention has been described in conjunction with specific embodiments with reference to the accompanying drawings above, yet, need to prove, for a person skilled in the art, under the situation that does not break away from the spirit and scope of the present invention, can make many changes and modification to the foregoing description, these changes and modification all drop in the claim restricted portion of the present invention.

Claims (7)

1. novel high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer, comprise a housing, vacuum chamber, radio-frequency power supply, air inlet and extract system, automatic control system, it is characterized in that: in this steriliser, comprise a vacuum chamber and connected radio-frequency power supply, air inlet and extract system, be provided with the sterilization framework in the centre position of this vacuum chamber, the article of being sterilized are to be placed in this framework, this framework is connected with the vacuum chamber housing and ground connection, between this sterilization framework and housing, be provided with radio-frequency electrode, be to be filled with the dielectric material between this radio-frequency electrode and housing, this radio-frequency electrode is connected with the outfan of radio-frequency power supply, plasma discharge be created in radio-frequency electrode and the sterilization framework between and be diffused into the sterilization framework in to article carry out disinfection the sterilization device.
2. high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer as claimed in claim 1, comprise housing, vacuum chamber, radio-frequency power supply, air inlet and an extract system, automatic control system, it is characterized in that: the vacuum chamber in housing, be provided with vacuum tightness door, bleeding point, air inlet, venting valve port and electrode interface, being shaped as cylindrical shape or for square, placing the sterilization framework in the centre position of this vacuum chamber of vacuum chamber, the article of being sterilized are to be placed in this framework.
3. as claim 1 and 2 described high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizers, comprise a housing, vacuum chamber, radio-frequency power supply, air inlet and extract system, automatic control system, it is characterized in that: the sterilization framework in this vacuum chamber centre position is to be made by the many empty metallic sheet stock of band, this framework is connected with the vacuum chamber housing and ground connection, between this sterilization framework and housing, be provided with radio-frequency electrode, be to be filled with the dielectric material between this radio-frequency electrode and housing, this radio-frequency electrode is connected with the outfan of radio-frequency power supply, plasma discharge be created in radio-frequency electrode and the sterilization framework between and be diffused into the sterilization framework in.
4. high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer as claimed in claim 1, comprise housing, vacuum chamber, radio-frequency power supply, air inlet and an extract system, automatic control system is characterized in that: also comprise vacuum chamber cavity, radio-frequency power supply, air inlet and an extract system, automatic control system in same housing.
5. as claim 1 and 4 described high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizers, comprise housing, vacuum chamber, radio-frequency power supply, air inlet and an extract system, automatic control system, it is characterized in that: the power supply that the intravital radio-frequency power supply selected frequency of this shell is 13.56MHz or 27.12MHz, the adapter of radio-frequency power supply adopt coupling automatically.
6. as claim 1 and 4 described high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizers, comprise housing, vacuum chamber, radio-frequency power supply, air inlet and an extract system, it is characterized in that: the intravital gas handling system of this shell is the electromagnetic valve that comprises a liquid ultrasonic atomizing device, a control gas conduit, and gas conduit and vacuum cavity air inlet connect; The intravital extract system of this shell comprises oil-sealed rotary pump and the pump-line that is connected with vacuum cavity.
7. as claim 1 and 4 described high-efficiency radio-frequency capacitance coupling vacuum plasma sterilizers, comprise housing, vacuum chamber, radio-frequency power supply, air inlet and an extract system, it is characterized in that: in this housing and case panel be provided with the PLC control system and control air inlet electromagnetic valve switch, pressure-releasing electromagnetic valve switch, mechanical pump bleed switch, printer switch and on and off switch.
CN200910008648A 2009-02-10 2009-02-10 High-efficiency radio-frequency capacitance coupling vacuum plasma sterilizer Pending CN101797395A (en)

Priority Applications (1)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106513076A (en) * 2016-12-31 2017-03-22 合肥优亿科机电科技有限公司 Self-cleaning efficient-sterilization super clean bench
CN106582916A (en) * 2016-12-31 2017-04-26 合肥优亿科机电科技有限公司 Plasma sterilization super clean bench
CN107101725A (en) * 2017-06-20 2017-08-29 中国科学技术大学 A kind of standard sources and relative radiometric calibration method
CN109222817A (en) * 2018-11-26 2019-01-18 珠海格力电器股份有限公司 A kind of dish-washing machine and its control method
CN111494697A (en) * 2020-04-30 2020-08-07 清华大学 Electromagnetic disinfection device and disinfection method thereof
CN113040317A (en) * 2021-03-15 2021-06-29 山东大学 Food purification device based on radio frequency plasma

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106513076A (en) * 2016-12-31 2017-03-22 合肥优亿科机电科技有限公司 Self-cleaning efficient-sterilization super clean bench
CN106582916A (en) * 2016-12-31 2017-04-26 合肥优亿科机电科技有限公司 Plasma sterilization super clean bench
CN107101725A (en) * 2017-06-20 2017-08-29 中国科学技术大学 A kind of standard sources and relative radiometric calibration method
CN109222817A (en) * 2018-11-26 2019-01-18 珠海格力电器股份有限公司 A kind of dish-washing machine and its control method
CN111494697A (en) * 2020-04-30 2020-08-07 清华大学 Electromagnetic disinfection device and disinfection method thereof
CN111494697B (en) * 2020-04-30 2021-10-15 清华大学 Electromagnetic disinfection device and disinfection method thereof
CN113040317A (en) * 2021-03-15 2021-06-29 山东大学 Food purification device based on radio frequency plasma

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Application publication date: 20100811