CN101788433A - Pendulum impact device for micrometer-nanometer film test piece - Google Patents
Pendulum impact device for micrometer-nanometer film test piece Download PDFInfo
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- CN101788433A CN101788433A CN201010300683A CN201010300683A CN101788433A CN 101788433 A CN101788433 A CN 101788433A CN 201010300683 A CN201010300683 A CN 201010300683A CN 201010300683 A CN201010300683 A CN 201010300683A CN 101788433 A CN101788433 A CN 101788433A
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Abstract
The invention discloses a pendulum impact device for a micrometer-nanometer film test piece. The pendulum impact device comprises a pendulum and an I-shaped plate, wherein the top part of the I-shaped plate is connected with a top plate, and the bottom part of the I-shaped plate is connected with a base; the base is provided with a test piece platform provided with a protruding wall, and a test piece can move on the base; a test piece holding groove is cut on the end surface of the protruding wall of the test piece platform and along the vertical direction; a limitation device is in clipped connection to the protruding wall; the pendulum comprises a swing link, one end of the swing link is in rotary connection with the I-shaped plate, and the other end of the swing link is connected with a pendulum head; a balance weight rod horizontally passes through the center of the pendulum head, the balance weight rods on both sides of the pendulum head are connected with balance weight blocks, and the end part of the pendulum head is provided with a force sensor; the side wall of the bottom plate, of which the side is provided with the test piece platform, is connected with a monocular tube microscope by a bracket; and the top plate is provided with a plurality of positioning holes in which electromagnets are arranged, and the electromagnets are connected with an electromagnet triggering device arranged on the top plate. By the device, the micro destruction process of the film structure can be recorded, and a force-time symmetrical curve is obtained.
Description
Technical field
The present invention relates to a kind of pendulum percussion mechanism, relate in particular to a kind of pendulum impact device for micrometer-nanometer film test piece.
Background technology
All kinds of films have a wide range of applications in industry, for example are used for the improvement or the like of resistance to oxidation, anticorrosion and the mechanical property of mechanical part, building element or ornament.In recent years, the rapid renewal of the fast development of electronics industry, the rising of integrated level, integrated system function has promoted the development of thin film fabrication technology greatly, has simultaneously also proposed renewal, higher requirement.Film is microelectromechanical systems (Micro Electro-Mechanical System, MEMS) material shape that is most widely used in, often be made into the micro mechanical structure in the MEMS device, it requires film that good electromagnetism light property is not only arranged, and can also bear mechanical load, transmission power and motion.For example in the production run of compound micromodule (film, substrate, encapsulating material), because the mismatch of calorifics and mechanical parameter, heating, the cooling of film in various molding process caused that unrelieved stress or heat differ from strain, have caused the delamination or the fracture of film.
At present different with the material and the configuration of substrate according to film, main failure mode has following several: the fracture of film and be full of cracks; The unsticking of film and substrate and delamination; Separation that causes in the Electronic Packaging process and slabbing; Heat fatigue or stress corrosion damage; The delamination of multilayer microelectronic structure and flexing.The usually independent or compound generation of above-mentioned failure mode, wherein under the mechanical load function, the delamination of film and flexing be the most common also be the most serious failure mode.Therefore the research to the film flexing is to optimize the MEMS designs, improves the key of its life-span and reliability.
In the process of MEMS device, because the influence of factors such as technological process, surfaceness, unrelieved stress, surface adhesion energy, geometric configuration, carrying form, even for membraneous material of the same race, its mechanical property often also assumes a marked difference.For example, the elastic modulus of the membraneous material of employing surface processing technique preparation is relevant with its thickness; There are some researches show that also little member causes the change of mechanical property owing to the accumulation of internal injury.So people carried out the microcosmic test by means of atomic force microscope, nano hardness meter etc. in recent years always, also developed the special method of testing of many little construction material mechanics basic parameters on the other hand.Measurement as elastic modulus just has uniaxial tension method, diaxon pulling method, bending method, resonance method, microstructure method or the like.In the different method of testings, the influence factor that relates to is had nothing in common with each other.In the crooked experiment as elastic modulus, the error that surfaceness causes accounts for Main Ingredients and Appearance, even surpasses experimental error and systematic error, but the result that surfaceness is tested pulling method influences less.
Existing Charpy impact machine tester is applicable to that material sample or goods carry out impulse test, is a kind of testing tool in order to the evaluating material shock resistance.Simultaneously, also can impact contrast test, with the quality of expert evidence quality to the sample of same material, specification of the same race.Its principle: under the impact condition of regulation, select pendulum quality (also can select certain shock height and conversion pendulum quality), discharge the pendulum impact specimen, measure material impact and destroy required energy.Visible crackle, be full of cracks and broken phenomenon are called destruction to sample under available light through occurring after the percussive action with the naked eye.Its measurement range is the large scale test specimen, can't test the impact failure of micro-nano-scale film; Measure the shock resistance that content mainly concentrates on macroscopical test specimen, do not relate to the observation of the destructive process of test specimen.
Existing micro-nano-scale membraneous material is measured, mainly rest on the static measurement stage, it measures material parameters such as static strength that content mostly is film greatly, film hardness, Young modulus, Poisson ratio, does not relate to the dynamic impulsion intensity that is deposited on suprabasil micro-nano-scale film.Existing its measurement range of pendulum testing machine is the large scale test specimen, and its shock load is excessive with respect to nano material, can't measure the impact failure of micro-nano-scale film.Existing Charpy impact machine tester is applicable to that material sample or goods carry out impulse test, is a kind of testing tool in order to the evaluating material shock resistance.Simultaneously, also can impact contrast test, with the quality of expert evidence quality to the sample of same material, specification of the same race.Its principle: under the impact condition of regulation, select pendulum quality (also can select certain shock height and conversion pendulum quality), discharge the pendulum impact specimen, measure material impact and destroy required energy.Visible crackle, be full of cracks and broken phenomenon are called destruction to sample under available light through occurring after the percussive action with the naked eye.Balance weight impact testing machine is to be used for determining of nonmetallic materials impact flexibility such as rigid plastic, enhancing nylon, fiberglass, cast stone, pottery, electrically insulating material.Its measurement range is the large scale test specimen, can't test the impact failure of micro-nano-scale film; Measure the shock resistance that content mainly concentrates on macroscopical test specimen, do not relate to the observation of the destructive process of test specimen.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide a kind of and can measure the shock load that is deposited on suprabasil micro/nano film, and the destructive process of observation film under shock load also can guarantee the inhomogeneity pendulum impact device for micrometer-nanometer film test piece of film test piece shock surface load.
Pendulum impact device for micrometer-nanometer film test piece, it comprises pendulum, it also comprises the I-shaped plate, be connected with top board at described I-shaped plate top and be connected with base in its bottom, described base is provided with left and right sides back up pad, on the back up pad of the described left and right sides, be connected with two horizontally disposed guide rails, both sides with specimen stage of protruding wall are enclosed within on two guide rails between the back up pad of the described left and right sides respectively and can be slidingly fitted with described two guide rails, centre position and its other end that end that is with the fine setting rotating shaft of screw on it is connected described specimen stage link to each other with described right back up pad, described screw and described fine setting rotating shaft are threaded engagement and its sidewall is fixed on described two guide rails, end face at described test specimen platform convex wall vertically has the test specimen holding tank, on described protruding wall, be connected with stop means, the sidewall of described left back up pad links to each other with described I-shaped plate bottom sidewall, described pendulum comprises fork, one end of described fork and hanging scroll is rotatedly connected and its other end is connected with tup, the center of passing described tup of a weight linear meter level is provided with, symmetry is connected with balancing weight on the weight linear meter of described tup both sides, described hanging scroll links to each other with I-shaped plate top by at least one hanging scroll hole of opening on the I-shaped plate, described tup and described test specimen holding tank are oppositely arranged, end at described tup is equipped with piezoelectric force transducer, on the sidewall of the base plate that specimen stage one side is installed, be connected with monocular tube microscope by support, the camera lens of monocular tube microscope can be by regulating device over against described test specimen, described top board is provided with a plurality of pilot holes, in described pilot hole electromagnet is installed, described electromagnet links to each other with electromagnetism flip flop equipment on being installed in top board.
Adopt the beneficial effect of apparatus of the present invention to be: 1. the considerable destruction of measuring micro-nano-scale of this device, can observe the microstructure change of micro/nano film in conjunction with microscopic observation device, the destructive process of observation film under shock load is for the research of the impact mechanical performance of micro/nano film provides important scientific research foundation.But and the micro-damage process of detail record membrane structure.2. apparatus of the present invention are provided with force acquisition device, can the omnidistance size of measuring impulsive force in experimentation, claim curve when obtaining power.For the Study of Impact Property to the micro/nano film technology provides important scientific research parameter.Shock load is little, is applicable to the test of micro/nano film test specimen.3. the position of specimen stage and pendulum adjustable positions, pendulum symmetry counterweight and pendulum multiaxis location, thus can guarantee that tup fully contacts with the test specimen side, realization face shock load also guarantees its homogeneity.4. design has holding tank on the specimen stage, effectively prevent test specimen in the impact process collapse, avoid operating personnel injured.And can effectively reduce the damage that test specimen is caused because of clamping.5. top board is provided with a series of pilot holes, and electromagnet is installed in the pilot hole, is used for fixing the pendulum after lifting.After the triggering, pendulum freely falls, impact test piece.
Description of drawings
Fig. 1 is the structural representation of pendulum impact device for micrometer-nanometer film test piece of the present invention;
Fig. 2 is the pendulum structural representation of device shown in Figure 1;
Fig. 3 is the understructure synoptic diagram of device shown in Figure 1;
Fig. 4 is the specimen stage structural representation of device shown in Figure 1;
Fig. 5 is the microscope stand structural representation of device shown in Figure 1.
Fig. 6 (a) is that test specimen is hit but film surface appearance when taking place to destroy when when adopting apparatus of the present invention impulsive force to be 200N film substrate being carried out impact experiment;
Fig. 6 (b) is that to adopt apparatus of the present invention impulsive force be 500 Ns of test specimens when film substrate carried out impact experiment film surface appearances when being hit critical load;
Fig. 7 (a) is the test specimen front surface pattern that is hit;
Fig. 7 (b) is the film surface appearance of 40ms after test specimen is hit;
Fig. 7 (c) is the film surface appearance of 180ms after test specimen is hit;
Fig. 7 (d) is the film surface appearance of 320ms after test specimen is hit;
Fig. 7 (e) is the film surface appearance of 340ms after test specimen is hit;
Fig. 7 (f) is the film surface appearance of 980ms after test specimen is hit;
Fig. 7 (g) be test specimen be hit the back 1.98 ' film surface appearance;
Fig. 7 (h) be test specimen be hit the back 2.98 ' film surface appearance;
Fig. 7 (i) be test specimen be hit the back 3.98 ' film surface appearance;
Fig. 7 (j) be test specimen be hit the back 4.98 ' film surface appearance;
Fig. 7 (k) be test specimen be hit the back 5.66 ' film surface appearance;
Fig. 8 is the be hit power time-history curves of process of test specimen.
Embodiment
Below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described further:
Pendulum impact device for micrometer-nanometer film test piece of the present invention shown in 1-5 figure, it comprises pendulum 3, it also comprises I-shaped plate 2, be connected with top board 1 at described I-shaped plate 2 tops and be connected with base 4 in its bottom, described base 4 is provided with left and right sides back up pad, on the back up pad of the described left and right sides, be connected with two horizontally disposed guide rail 4-2, both sides with specimen stage 5 of protruding wall are enclosed within on two guide rails between the back up pad of the described left and right sides respectively and can be slidingly fitted with described two guide rails, centre position and its other end that end that is with the fine setting rotating shaft 4-3 of screw on it is connected described specimen stage 5 link to each other with described right back up pad, described screw and described fine setting rotating shaft are threaded engagement and its sidewall is fixed on described two guide rails, end face at described test specimen platform convex wall vertically has test specimen holding tank 5-1, on described protruding wall, be connected with stop means 5-2, the sidewall of described left back up pad links to each other with described I-shaped plate bottom sidewall, described pendulum comprises fork 3-1, the end of described fork 3-1 and hanging scroll 7 are rotatedly connected and its other end is connected with tup 3-4, the center of passing described tup 3-4 of a weight linear meter 3-2 level is provided with, symmetry is connected with balancing weight 3-3 on the weight linear meter 3-2 of described tup 3-4 both sides, described hanging scroll links to each other with I-shaped plate top by at least one hanging scroll hole of opening on I-shaped plate 2, the end face of tup and described test specimen holding tank are oppositely arranged, end at described tup is equipped with piezoelectric force transducer, on the sidewall of the base plate that specimen stage one side is installed, be connected with monocular tube microscope by support, the camera lens of monocular tube microscope can be by regulating device over against test specimen, described top board is provided with a plurality of pilot holes 8, in described pilot hole electromagnet is installed, described electromagnet links to each other with electromagnetism flip flop equipment 9 on being installed in top board.
Described regulating device can comprise the left and right sides slide rail that is installed on the described support, the end of one end of described left and right sides slide rail links to each other by web joint, the slide block 6-3 that can be slidingly matched with left and right sides slide rail by thrust unit is installed on the slide rail of the described left and right sides, vertically be connected with support vertical shaft 6-2 in described slider top, described support vertical shaft links to each other by the support 6-1 of the monocular tube microscope that cover can be provided with its contiguous block that is rotatably assorted and along continuous straight runs thereon, and described monocular tube microscope is installed on the support of monocular tube microscope.
Described thrust unit can comprise the push rod that along continuous straight runs is provided with, and an end of described push rod links to each other with the sidewall of slide block and its other end is threaded with described web joint.
On the push rod of an end that is threaded with described web joint, knob 6-4 is installed.
Weight linear meter 3-1 in Fig. 2: pass across the tup center, tapping on it can realize the symmetria bilateralis counterweight.Balancing weight 3-3: per two of balancing weight is one group, and every its quality of assembly pouring weight is all demarcated through strict, and the processing specification is identical, disc structure, and thickness is even, the circle centre position processing screw hole.Demarcation between the group of balancing weight and the group varies in weight.Cooperate weight linear meter to be installed in the tup both sides, realize symmetrical counterweight.Tup 3-4: experimentation is mainly by the tup impact test piece.The tup leading portion can be installed piezoelectric force transducer, measures shock load.
At Fig. 3 middle guide 4-2: specimen stage can move forward and backward along guide rail.Fine setting rotating shaft 4-3: by rotating shaft, can adjust the front and back position of specimen stage, test specimen is fully contacted with tup.
Test specimen holding tank 5-1 in Fig. 4: special test specimen is installed in the holding tank test specimen turnover when preventing to impact.Test specimen is the square sheet substrate, and its thickness is slightly less than holding tank, so that clamping is installed.Test specimen simultaneously is coated with little, nanoscale film, this plated film face is inspection surface.Stop means 5-2: can move up and down, adjust the upper-lower position of test specimen, make test specimen be subjected to section fully to contact tup.
Monocular tube microscope support 6-1 in Fig. 5: monocular tube microscope can be installed, so that realize observation to test specimen surface breakdown process.Support vertical shaft 6-2: microscope can be rotated around this axle, thereby adjusts the angle of microscope and test specimen.Slide block 6-3: can horizontally slip, thereby adjust microscope position, make the microscope camera lens over against test specimen.Knob 6-4: the slip of control slide block.Because suffered shock load is interior impact of face that is parallel to film surface during thin film work.So loading surface need be selected side loaded for use, and the homogeneity of the face load that loads there is very high requirement.
By Fig. 6 (a) and (b) experimental result as can be known, this structure critical load is about 500 Ns.
Fig. 7 (a)-(k) is the observation of film buckling failure process under the shock load.Can see significantly that from a few width of cloth pictures of Fig. 7 (a)-(k) under less impulsive force, film surface has produced round blister flexing, and near the flexing quantity of solid Zhi Duan with highly obviously greater than impact end.Impact back 40ms between the 320ms, the flexing release rate is the fastest, but when 340ms, because the bigger secondary pulse effect of tup, flexing quantity increases suddenly again, and along with the disappearance of acting force, the flexing height progressively reduces up to disappearance then.
In order to guarantee the homogeneity of film test piece shock surface load and in time to catch the micro-damage process of film, this device structurally is equipped with multiple unique design, and can with the supporting use of microscopic system.
(1) realizes shock surface load and guarantee its homogeneity.
The extremely inhomogeneity assurance of face shock load, when requiring tup impact test piece side, the tup face must fully contact with the test specimen face, does not allow the existence of contact angle.Simultaneously, since the diversity of sample dimensions, the clamp method of test specimen, and the position of specimen stage and pendulum position must be adjustable, can guarantee that just tup fully contacts with the test specimen side.So the pendulum percussion mechanism adopts following structure to realize the face shock load and guarantees its homogeneity.Shock load is little, is applicable to the test of micro/nano film test specimen.
Pendulum symmetry counterweight: the pendulum quality is adjustable, pendulum symmetria bilateralis counterweight: use the screw weight linear meter, choose certain assembly pouring weight of approrpiate wts in many assembly pouring weight, and be fixed on the pendulum both sides, play the effect of adjusting the pendulum quality.Owing to select symmetrical counterweight technology for use, can effectively keep test specimen after the counterweight to be subjected to the homogeneity of the suffered shock load of section.
Fine adjustment function before and after the specimen stage.Base is equipped with the fine setting reversing shaft, and the may command specimen stage moves forward and backward, thereby guarantees that test specimen stand under load face is parallel to the pendulum flat side of a hammer all the time in the experiment, guarantees the homogeneity that is hit.
The test specimen function of regulating height thereof: the stop means height on the specimen stage is adjustable, thereby adjusts the height of test specimen, to adapt to the pendulum height, makes test specimen be subjected to section over against the flat side of a hammer, guarantees that test specimen is subjected to even impact.
Pendulum multiaxis location: pendulum is hung and is taken out adjustable positions, and pendulum is replaceable.Can test at the test specimen of multiple size, and in conjunction with the adjusting of specimen stage position, the homogeneity of shock load when guaranteeing to test each size test specimen.
The test specimen holding function.Design has holding tank on the specimen stage, effectively prevent test specimen in the impact process collapse, avoid operating personnel injured.And can effectively reduce the damage that test specimen is caused because of clamping.
This device can cooperate the monotubular micro imaging system to use, and destroys so that the operator observes the microstructure of test specimen.
Pendulum is fixing and trigger function: the top board design has a series of pilot holes, and electromagnet is installed in the pilot hole, and described electromagnet links to each other with electromagnetism flip flop equipment on being installed in top board, after pendulum lifts, can make pendulum pendulum drop impact test specimen after triggering.
The accurate measurement of shock load: tup is installed piezoelectric force transducer, can obtain the power time-history curves under the little shock load.
(2) micro-simultaneous observation
Consider the vibration that percussion mechanism causes under the shock load, this percussion mechanism is fixed with the monocular tube microscope support.This support has three-dimensional moving and vertical function of rotating, and can accurately catch the test specimen surface.
The application of monotubular formula micro imaging system has its limitation, as: can only vertically install, can only move axially along lens barrel etc.This design just defines monotubular formula microscope and can only observe vertical direction and be positioned at the wherein sample of below.
The design of microscope stand has solved monotubular formula microscope setting angle, and problems such as range of observation have effectively cooperated the use of testing machine.The microscope erecting bed has following characteristics:
1) but level is installed lens barrel, observe test specimen.
2) D translation of may command lens barrel and vertical the rotation effectively and are accurately caught the visual field that will observe.
3) support is fixed on the device that drops hammer.Can effectively reduce in the microscopic fields of view because the vibration that drop impact causes.
The using method of this device is as follows:
1. tup counterweight.According to material for test and the shock load of desiring to apply, select for use certain suitable assembly pouring weight to carry out symmetrical counterweight according to experiment.
2. installation test specimen.
3. adjust the specimen stage front and back position, adjust the test specimen height, make fully contacted with tup by section.
4. the adjustment microscope makes the microscope camera lens over against test specimen.
5. the adjustment microscope gets a distinct image in the visual field.
6. after pendulum lifts, use the electromagnetism flip flop equipment to fix.
7. discharge the tup impact test piece, simultaneously images acquired and load data.
Claims (4)
1. pendulum impact device for micrometer-nanometer film test piece, it comprises pendulum, it is characterized in that: it also comprises the I-shaped plate, be connected with top board at described I-shaped plate top and be connected with base in its bottom, described base is provided with left and right sides back up pad, on the back up pad of the described left and right sides, be connected with two horizontally disposed guide rails, both sides with specimen stage of protruding wall are enclosed within on two guide rails between the back up pad of the described left and right sides respectively and can be slidingly fitted with described two guide rails, centre position and its other end that end that is with the fine setting rotating shaft of screw on it is connected described specimen stage link to each other with described right back up pad, described screw and described fine setting rotating shaft are threaded engagement and its sidewall is fixed on described two guide rails, end face at described test specimen platform convex wall vertically has the test specimen holding tank, on described protruding wall, be connected with stop means, the sidewall of described left back up pad links to each other with described I-shaped plate bottom sidewall, described pendulum comprises fork, one end of described fork and hanging scroll is rotatedly connected and its other end is connected with tup, the center of passing described tup of a weight linear meter level is provided with, symmetry is connected with balancing weight on the weight linear meter of described tup both sides, described hanging scroll links to each other with I-shaped plate top by at least one hanging scroll hole of opening on the I-shaped plate, described tup and described test specimen holding tank are oppositely arranged, end at described tup is equipped with piezoelectric force transducer, on the sidewall of the base plate that specimen stage one side is installed, be connected with monocular tube microscope by support, the camera lens of monocular tube microscope can be by regulating device over against described test specimen, described top board is provided with a plurality of pilot holes, in described pilot hole electromagnet is installed, described electromagnet links to each other with electromagnetism flip flop equipment on being installed in top board.
2. pendulum impact device for micrometer-nanometer film test piece according to claim 1, it is characterized in that: described regulating device comprises the left and right sides slide rail that is installed on the described support, the end of one end of described left and right sides slide rail links to each other by web joint, the slide block that can be slidingly matched with left and right sides slide rail by thrust unit is installed on the slide rail of the described left and right sides, vertically be connected with the support vertical shaft in described slider top, described support vertical shaft links to each other by the support of the monocular tube microscope that cover can be provided with its contiguous block that is rotatably assorted and along continuous straight runs thereon, and described monocular tube microscope is installed on the support of monocular tube microscope.
3. pendulum impact device for micrometer-nanometer film test piece according to claim 1, it is characterized in that: described thrust unit comprises the push rod that along continuous straight runs is provided with, and an end of described push rod links to each other with the sidewall of slide block and its other end is threaded with described web joint.
4. pendulum impact device for micrometer-nanometer film test piece according to claim 1 is characterized in that: on the push rod of an end that is threaded with described web joint knob is installed.
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| CN101603905B (en) * | 2009-04-10 | 2011-09-07 | 承德市金建检测仪器有限公司 | Pendulum-type impact tester |
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2010
- 2010-01-25 CN CN2010103006834A patent/CN101788433B/en not_active Expired - Fee Related
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