CN101781793A - Crystal clamp for broaching silicon rod - Google Patents
Crystal clamp for broaching silicon rod Download PDFInfo
- Publication number
- CN101781793A CN101781793A CN200910255740A CN200910255740A CN101781793A CN 101781793 A CN101781793 A CN 101781793A CN 200910255740 A CN200910255740 A CN 200910255740A CN 200910255740 A CN200910255740 A CN 200910255740A CN 101781793 A CN101781793 A CN 101781793A
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- hole
- crystal
- edges
- broaching
- silicon rod
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Abstract
The invention relates to a crystal clamp for broaching a silicon rod, which is provided with a polygon terrace hole; a connecting polygon terrace for a crystal is sheathed in the polygon terrace hole; torque transmission and axial tension between the crystal and the clamp can be realized through the matched connecting structure of a shaft and the hole of the polygon terrace without grinding nicks on crystal or using a fixing pin for connection. The section area of a lifting rod on the crystal cannot be reduced so that the breaking factor of the crystal in the broaching process is eliminated in the structure. The invention not only can solve the breaking problem of the crystal, but also can realize synchronous rotation of the crystal and the crystal clamp.
Description
Technical field:
The present invention relates to the component of silicon single crystal or polysilicon rod draw machines, relate in particular to the sub-crystal clamp part in the silicon rod draw machines.
Background technology:
Silicon single crystal and polysilicon have been widely used in semi-conductor and solar cell industry, and it is that silicon rod is made the most frequently used method in field that vertical pulling method prepares silicon rod.In crystal pulling furnace, the silicon material is drawn the silicon rod rotation by sub-crystal clamp part after high-temperature fusion, chuck in the sub-crystal clamp part is screwed on the rotary pulling axle of crystal pulling furnace, the crystal bar upper end of brilliant lower end of son and high-temperature fusion shape bonds together, sub-crystalline substance commonly used at present is columniform silicon single crystal, for cylindrical sub-crystalline substance can be connected with chuck, must on the wall body of son crystalline substance, grind a breach, after sub-crystalline substance is put into the fixed orifices of chuck, by a tumbler pin crystalline substance is fixed on the chuck, can prevent from like this to move under the sub-crystal orientation, can keep the synchronous rotation of son crystalline substance and chuck again, thereby satisfy the crystal pulling technique requirement.The sub-crystal clamp part of this structure is in drawing the silicon rod process, and sub-crystalline substance is easy to rupture in indentation, there.There is producer to change sub-crystalline substance into the square column type, change the sub brilliant fixed orifices of chuck into square hole, square column type crystalline substance is sleeved in the brilliant fixed orifices of square son of chuck, such syndeton can only realize the synchronous rotation of son crystalline substance and sub brilliant chuck, realize that the axial qualification between sub-crystalline substance and the chuck equally need be by grinding breach on the brilliant wall of son, prevent under the sub-crystal orientation to move setting up tumbler pin between sub-crystalline substance and the chuck, this square column type crystal clamp part, in pulling process, the brilliant same defective that ruptures from indentation, there that exists of son.For effectively overcoming this defective, the applicant develops a cover crystal clamp part, and sub brilliant chuck is one of vital part wherein.
Summary of the invention:
The invention provides a kind of crystal clamp for broaching silicon rod.Brilliant chuck of this seed and the brilliant supporting use of corresponding son can not ruptured at silicon rod pulling process neutron crystalline substance, and can be rotated synchronously with the brilliant chuck of son.
The technical solution adopted in the present invention is:
Crystal clamp for broaching silicon rod of the present invention, it is characterized in that: comprise threaded hole 21, many terrace with edges hole 22 and pilot hole 23, and threaded hole 21, many terrace with edges hole 22 are coaxial aperture system with pilot hole 23, and the cone angle in polygonal pyramid platform hole 22 is 90 °～150 °, and many terrace with edges hole 22 is suitable for reading greater than end opening.
Further, described many terrace with edges hole 22 is the positive multi-pyramid hole, and its tapering is 120 °.
Further, described many terrace with edges hole 22 is positive truncated rectangular pyramids hole.
Owing to improved the structure of the sub brilliant and chuck in the crystal clamp part for broaching silicon rod, on sub-crystalline substance, be provided with and be convenient to and many terrace with edges of being connected of chuck suit, co-axial many terrace with edges hole and pilot hole have been offered in threaded hole bottom at chuck, many terrace with edges hole is corresponding with the many terrace with edges of the brilliant upward connection of son, the lifting rod of pilot hole antithetical phrase crystalline substance leads, pass through the axle of many terrace with edges between sub-crystalline substance and the chuck, the hole structure that is connected realizes that torsion transmission and axial tension bear, use the sub-crystal clamp part of this pulling single crystal silicon, overcome the shortcoming that existing sub-crystal clamp part exists, sub-crystalline substance directly is sleeved on the chuck, need not on the wall of son crystalline substance, to grind breach, more do not need to connect with tumbler pin, the sectional area of the brilliant lifting rod of son is not reduced, eliminate the brilliant fracture factor of son from structure, make son brilliant stressed more even in the silicon single crystal rod pulling process at pulling process.Adopt the sub-crystal clamp part of this structure, in the silicon single crystal rod pulling process, can effectively solve the brilliant fracture of son, can realize the synchronous rotation of son crystalline substance and sub brilliant chuck again.
Description of drawings:
Fig. 1 is the work synoptic diagram of sub-crystal clamp part;
Fig. 2, Fig. 3 are the brilliant a kind of synoptic diagram of son, and wherein, Fig. 2 is the upward view of Fig. 3;
Fig. 4 is a kind of structural representation of chuck;
Among the figure: 1-is brilliant; The 2-chuck; The 3-silicon rod; 4-rotary pulling axle; 11-connects many terrace with edges; The 12-lifting rod; The 13-upper table surface; The 14-following table; The 21-threaded hole; Many terrace with edges of 22-hole; The 23-pilot hole.
Embodiment:
Below the positive sub-crystal clamp part structure of truncated rectangular pyramids be example, describe the specific embodiment of the present invention in detail.
Accompanying drawing 1～Fig. 3 is the structural representation of pulling single crystal silicon with sub-crystal clamp part, it is made up of son brilliant 1 and the present invention, son brilliant 1 comprises that cross-sectional shape is positive truncated rectangular pyramids of foursquare connection and lifting rod 12, the upper table surface 13 that connects truncated rectangular pyramids is greater than following table 14, lifting rod 12 is arranged on the following table 14, the present invention includes threaded hole 21, many terrace with edges hole 22 and pilot hole 23, and threaded hole 21, many terrace with edges hole 22 and pilot hole 23 are coaxial aperture system, the cross-sectional shape in many terrace with edges hole 22 is a truncated rectangular pyramids, and the cone angle in many terrace with edges hole 22 is 120 °; The shape of the many terrace with edges 11 of described connection is corresponding with the many terrace with edges hole 22 in the chuck 2 with cone angle, promptly connect many terrace with edges 11 and also be truncated rectangular pyramids, its cone angle is 120 °, connect in many terrace with edges hole 22 that many terrace with edges 11 are sleeved on chuck 2, the lifting rod 12 of described son brilliant 1 is right cylinder or round platform or polygon prism or many terrace with edges, in this example, lifting rod 12 is a right cylinder.
Its using method is: the truncated rectangular pyramids on the son brilliant 1 is sleeved in the truncated rectangular pyramids hole of chuck 2, be screwed in chuck 2 on the rotary pulling axle 4 of crystal pulling furnace by the threaded hole on it 21 then, because the upper table surface 13 of the truncated rectangular pyramids on the son brilliant 1 is greater than following table 14, lifting rod 12 on the son brilliant 1 is passed the threaded hole 21 and the truncated rectangular pyramids hole of chuck 2, match with pilot hole 23, four conical surfaces of the truncated rectangular pyramids on the son brilliant 1 match with the truncated rectangular pyramids hole on the chuck 2, when crystal pulling furnace starts, the rotary pulling axle 4 of crystal pulling furnace rises on while rotating, thereby drive sub-crystal clamp part and rotate rising synchronously, the upper end of lifting rod 12 lower surfaces of son brilliant 1 and the silicon rod 3 of molten state bonds together, along with the continuous rotation of son brilliant 1 is risen, silicon rod 3 is pulled out thereupon, all is drawn out until silicon rod 3.
Claims (3)
1. crystal clamp for broaching silicon rod, it is characterized in that: comprise threaded hole (21), many terrace with edges hole (22) and pilot hole (23), threaded hole (21), many terrace with edges hole (22) are coaxial aperture system with pilot hole (23), the cone angle in many terrace with edges hole (22) is 90 °～150 °, and many terrace with edges hole (22) suitable for reading greater than end opening.
2. according to the described crystal clamp for broaching silicon rod of claim 1, it is characterized in that: described many terrace with edges hole (22) is the above positive polygonal pyramid holes of four ribs, and its cone angle is 120 °.
3. according to the described crystal clamp for broaching silicon rod of claim 2, it is characterized in that: described many terrace with edges hole (22) is positive truncated rectangular pyramids hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910255740A CN101781793A (en) | 2009-12-23 | 2009-12-23 | Crystal clamp for broaching silicon rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910255740A CN101781793A (en) | 2009-12-23 | 2009-12-23 | Crystal clamp for broaching silicon rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101781793A true CN101781793A (en) | 2010-07-21 |
Family
ID=42521944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910255740A Pending CN101781793A (en) | 2009-12-23 | 2009-12-23 | Crystal clamp for broaching silicon rod |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101781793A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102275238A (en) * | 2011-09-05 | 2011-12-14 | 镇江大成新能源有限公司 | Fixture for connecting seed crystals |
-
2009
- 2009-12-23 CN CN200910255740A patent/CN101781793A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102275238A (en) * | 2011-09-05 | 2011-12-14 | 镇江大成新能源有限公司 | Fixture for connecting seed crystals |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20100721 |