CN101769649A - Selective composite coating for absorbing solar light and thermal - Google Patents
Selective composite coating for absorbing solar light and thermal Download PDFInfo
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- CN101769649A CN101769649A CN200810241894A CN200810241894A CN101769649A CN 101769649 A CN101769649 A CN 101769649A CN 200810241894 A CN200810241894 A CN 200810241894A CN 200810241894 A CN200810241894 A CN 200810241894A CN 101769649 A CN101769649 A CN 101769649A
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- titanium
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
- F24S70/225—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption for spectrally selective absorption
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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- Life Sciences & Earth Sciences (AREA)
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- Sustainable Energy (AREA)
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Abstract
The invention discloses a selective composite coating for absorbing solar light and thermal which belongs to field of solar energy equipment, particularly, relates to a selective absorbing coating which is used on the surface of the flat-plate solar collector and is used for absorbing and utilizing solar energy. The selective composite coating for absorbing solar light and thermal is formed by compounding a plurality of layers of metal and non-metal, the selective solar energy is attached on a metal flat plate; the characteristics are as follows: the attachment sequence of the coating on the metal flat plate is as follows: a bottom layer, a titanium-oxygen-titanium absorbing layer, and a silica emitting layer, wherein, the titanium-oxygen-titanium absorbing layer is made through at least two reactive sputtering processes. The invention provides a selective absorbing film with excellent selective absorption characteristic of solar energy and firm film, which is provided with high binding strength, good weatherability, as well as high production efficiency in production.
Description
[technical field]
The invention belongs to the solar facilities field, relate in particular to a kind of use, be used to absorb the coating for selective absorption of solar energy on the flat type solar heat collector surface.
[background technology]
Solar water heater is exactly the radiant heat energy that absorbs the sun.It is a maturation and product of the future the most the most in China's solar thermal utilization.The New-type water heater product of environmental protection, safe, energy-conservation, health is provided for the common people.Modal solar water heater has three kinds: passive solarenergy water heater, flat solar water heater and solar vacuum-tube water heater.The heat collector and the water tank of stagnation type solar water heater are integrated.Simple in structure, cheap.But it is poor to be incubated, the use of can not spending the night, and more can not use winter.The flat solar water heater is made up of flat plate collector, water storage box, circulation pipe, support.Structural shape such as it is flat box type that absorber has that board-like, the full copper pipe of copper aluminum composite pipes is board-like, the stainless steel punch forming is welded.And solar thermal collector, critical component wherein is exactly a plate core of solar heat-collecting, adopts the compound board-like material of copper aluminium to make now mostly.Coating for selective absorption of sunlight spectrum is applied to solar thermal collector thermal-arrest surface, mainly constitute by infrared high reflection layer, absorbed layer and antireflection layer, wherein the effect of antireflection layer is to reduce body surface to reflection of incident light, and the increment surface increases absorption efficiency to the absorption of light; Infrared high reflection layer reduces heat collector inside to external radiation, reduces heat loss; Absorbed layer is used to absorb sunshine, provides thermal source to heat collector.In the photo-thermal conversion of solar energy, the refractive index of the medium in the absorbed layer of coating for selective absorption is low as far as possible, the refractive index of antireflection layer is also low as far as possible, could obtain photo-thermal conversion efficiency higher solar energy coating for selective absorption like this, but the sedimentation rate that also will pay attention to medium simultaneously can not be low excessively, in order to avoid influence production efficiency.And in the preparation process of coating, adopt reactive magnetron sputtering or radio frequency reaction and medium frequency reactive sputtering method, and utilize metal or nonmetal target, because target is poisoned, cause the sedimentation rate of antireflection layer very low, production efficiency is reduced greatly.Because the production efficiency of antireflection layer is low, the most solar thermal collectors on market do not adopt the sunshine coating for selective absorption that is provided with antireflection layer at present.Studied with extensive use coating for selective absorption at present for the solar selectively absorbing coating that uses in the vacuum environment low temperature range, the advantage of this film system and process is, the work of the single target magnetically controlled DC sputtering of Al plated film, equipment is simple to operate, the rete absorptivity is higher, to using the more suitable of all-glass vacuum tube in low temperature range, but uses because its infrared emittance rises with temperature obviously raises for middle temperature and high temperature, cause the heat collector heat waste to increase, the thermal efficiency obviously descends.In order to improve the heat endurance of high temperature scope of application coating for selective absorption, reduce infrared emittance, research and development high-temperature stable metal double target co-sputtering deposition technology, this coating have stratified film structure, make in high temperature range hot property stable, absorption/emission is smaller.But; The key of this coating and process is to adopt high-temperature stable metal such as W, MO, SS, and must adopt the bipolar electrode target co-sputtering; Cause sedimentation rate low, production cycle length, complex process, target rare expensive, cost is high.So need a kind of absorptivity very high now, emissivity is very low, and good coating for selective absorption of heat endurance and technology of preparing.But there is not to occur to overcome the technical solution of above shortcoming so far in the industry.
[summary of the invention]
The purpose of this invention is to provide and a kind ofly have good solar selectively absorption characteristic, and the firm selective absorption film of rete, this rete has higher binding strength and good weatherability, is to have higher production efficiency in production simultaneously.
In order to reach above-mentioned technical purpose, the technical solution that the present invention adopts comprises following technology contents: a kind of selective composite coating for absorbing solar light and thermal, this coating is by multiple layer metal and nonmetal being composited, above-mentioned selective solar is attached on the metal plate, it is characterized in that: the order that described coating is adhered on metal plate is followed successively by bottom, titanium-oxygen-titanium absorbed layer, penetrate layer with silica and constitute, titanium-oxygen wherein-titanium absorbed layer is for making by at least twice reactive sputtering process.
Described bottom is a kind of in stainless steel, molybdenum or the nickel.
The gross thickness of described bottom, titanium-oxygen-titanium absorbed layer, silica is 80nm-120nm.
The thickness that described bottom-titanium-oxygen-titanium absorbed layer and silica are penetrated each layer of layer is bottom 15nm-25nm; Titanium-oxygen-titanium absorbed layer 50nm-70nm; Silica 1 5nm-25nm.
The optimum thickness that described bottom-titanium-oxygen-titanium absorbed layer and silica are penetrated each layer of layer is bottom 20nm; Aluminium 30nm; 30nm; Aluminium dioxide 20nm.
By adopting above-mentioned technical solution, the present invention has obtained following technological merit and effect: the present invention penetrates the coating for selective absorption of layer composite film as flat type solar heat collector by adopting stainless steel-titanium-oxygen-titanium absorbed layer and silica, this composite film has extraordinary solar selectively energy, wherein bottom adopts stainless steel, molybdenum or nickel as bottom respectively, above-mentioned several metal can have very strong in conjunction with fastness on copper or aluminium sheet, thereby strengthens the fixedly fastness of whole absorbing membranous layer; Above-mentioned in addition stainless steel, molybdenum or nickel all have extraordinary properties of infrared reflection, and thermal emissivity that can very effective reduction rete avoids above-mentioned composite film overheated and influence service life of heat collector when solar irradiance is good; With titanium-oxygen-titanium as absorbed layer, and in sputter with reaction such as oxygen, reactive sputtering goes out the gradual change absorbing membranous layer of different metal volume ratio, by suitable thicknesses of layers is set, can strengthen the absorptivity of above-mentioned rete greatly; The superiors at above-mentioned rete pass through reactive sputtering aluminium dioxide rete in addition; can utilize the stable performance of aluminium dioxide; rete under it is played the effect of antireflective and sealing; the protection absorbed layer can not be subjected to the moisture content in the atmosphere, the corrosion that salt grades; increased substantially the weatherability of rete, significant prolongation the service life of above-mentioned rete.
[description of drawings]
Fig. 1 is a film layer structure schematic diagram of the present invention.
[specific embodiment]
Below the present invention will be described in detail:
The present invention be directed to the improvement that the thermal-arrest sheet material that uses in the existing flat type solar heat collector is made, heat collecting sheet commonly used now is generally sheet copper or aluminium sheet, so the solar selectively absorbing coating among the present invention is exactly with above-mentioned two kinds of technological improvements that material base material commonly used is made.This coating is by multiple layer metal and nonmetal being composited, and above-mentioned selective solar is attached on the metal plate, and this metallic plate just sheet copper or aluminium sheet.The order that described coating is adhered on metal plate is followed successively by bottom-titanium-oxygen-titanium absorbed layer, and according to different metallic characters, bottom in the present invention is a kind of in stainless steel, molybdenum or the nickel.Use this different materials as composite film, solar selectively absorbing coating just, mainly be above-mentioned several metals and aluminium and copper by behind the reactive sputtering, can stablize and firm attached on aluminium or the copper base material, set up a firm basis of adhering to for whole composite film like this.These several metal materials also have stronger properties of infrared reflection in addition, can reduce the thermal emissivity of composite film, prevent that rete from damaging owing to temperature is too high.The thickness of bottom of the present invention (comprise stainless steel, molybdenum, nickel any one)-titanium-oxygen-titanium absorbed layer-silica is 80nm-120nm.This above-mentioned thickness is a more rational thicknesses of layers of screening.The thickness of every tunic layer that above-mentioned rete is produced when carrying out reactive sputtering is respectively bottom 15nm-25nm; Titanium-oxygen-titanium absorbed layer is the two-layer 25nm-35nm silica 1 5nm-25nm that is.This above-mentioned thickness range can be adjusted according to the technical indicators such as purposes of concrete instructions for use and solar facilities.But Zui Jia film layer structure bottom 20nm in the ordinary course of things; The two-layer equal 30nm of titanium-oxygen-titanium absorbed layer; Silica 20nm.
The process of above-mentioned rete is, at first with metal base, just sheet copper or aluminium sheet carry out surface preparation, put it in the pretreatment chamber under vacuum condition, ion etching before being coated with Ar ion bombardment material surface, makes the solid impurity of above-mentioned sheet copper or surface of aluminum plate obtain good cleaning, carry out that ion etching is general only need be carried out a surface and get final product, also on a surface, carry out at least because be coated with solar selectively absorbing coating.Carry out ion etching the surface of sheet copper or aluminium sheet is cleared up completely, improve the adhesive force when being coated with rete, improve rete service life.
The process of above-mentioned rete is that at first with metal base 5, just sheet copper or aluminium sheet carry out surface preparation, put it into then in the pretreatment chamber 10
-2Under the vacuum condition of Pa, feed Ar gas 60sccm, regulate vacuum, open cathodic power source at 0.6pa through mass flowmenter, cathodic power source 480v, electric current 4.5A, the ion etching before being coated with, the processing time is 10-25 minute.With Ar ion gun bombarding base material 5 surfaces, current density 0.8A/cm
2Make the solid impurity of above-mentioned sheet copper or surface of aluminum plate obtain good cleaning, carry out that ion etching is general only need be carried out a surface and get final product, also on a surface, carry out at least because be coated with solar selectively absorbing coating.Carrying out ion etching, can to make base material 5 be that the surface of sheet copper or aluminium sheet is cleared up completely, improves the adhesive force when being coated with rete, improves rete service life.
After carrying out base material 5 surface preparations, can begin the process that is coated with of rete, this process realizes by the vacuum magnetic control reactive sputtering.Above-mentioned treated sheet copper or aluminium sheet are put into the vacuum sputtering chamber, under the vacuum condition of 0.5Pa, be coated with metal substrate 4 by magnetron sputtering, adopt stainless steel target or nickel target or molybdenum target to carry out, feed nitrogen 42sccm, the maintenance operating air pressure is 0.5pa, electric current 5A, the magnetron sputtering time is 5 minutes.Reach 20nm at thickness and can enter being coated with of next rete.
The base material that this has been coated with metal substrate is put into vacuum chamber equally, is coated with absorbed layer by reactive sputtering, adopts the titanium target to carry out magnetron sputtering, aerating oxygen 40sccm during sputter, and the maintenance operating air pressure is 0.5pa, electric current 5A, the magnetron sputtering time is 7 minutes.Reach 30nm at thickness and can enter being coated with of next rete.In the sputter absorbed layer, can also feed the gas that other can feed.Being coated with different films when being, feed different gas, according to the sequencing in the film system.
The base material that this has been coated with metal substrate is put into vacuum chamber equally, is coated with absorbed layer by reactive sputtering, adopts the aluminium target to carry out magnetron sputtering, aerating oxygen 30sccm during sputter, and the maintenance operating air pressure is 0.5pa, electric current 5A, the magnetron sputtering time is 10 minutes.Reach 30nm at thickness and can enter being coated with of next rete.
At last this is coated with the disilicon trioxide 1 of metal substrate, base material 5 has been put into vacuum chamber, be coated with the ceramic layer on surface by reactive sputtering, adopt silicon target to carry out magnetron sputtering, aerating oxygen 45sccm during sputter, the maintenance operating air pressure is 0.5pa, electric current 5A, the magnetron sputtering time is 5 minutes.Reach 20nm at thickness and can advance to finish being coated with of rete.
Foregoing description can only be counted as preferred embodiment.Those those of skill in the art in the art and those manufacturings or use people of the present invention should recognize other multiple variation pattern of the present invention.Therefore, it being understood that the above-mentioned illustrated embodiment usefulness that only presents a demonstration, it can't be construed as limiting scope of the present invention, scope of the present invention according to the principle of Patent Law, comprise that the claim that the principle of equivalent is explained limits.
Claims (5)
1. selective composite coating for absorbing solar light and thermal, this coating is by multiple layer metal and nonmetal being composited, above-mentioned selective solar is attached on the metal plate, it is characterized in that: the order that described coating is adhered on metal plate is followed successively by bottom, absorbed layer, penetrate layer with silica and constitute, titanium-oxygen wherein-titanium absorbed layer is for making by at least twice reactive sputtering process.
2. a kind of selective composite coating for absorbing solar light and thermal according to claim 1 is characterized in that: described bottom is a kind of in stainless steel, molybdenum or the nickel.
3. a kind of selective composite coating for absorbing solar light and thermal according to claim 1 is characterized in that: the gross thickness of described bottom, titanium-oxygen-titanium absorbed layer, silica is 80nm-120nm.
4. a kind of selective composite coating for absorbing solar light and thermal according to claim 1 is characterized in that: the thickness that described bottom-titanium-oxygen-titanium absorbed layer and silica are penetrated each layer of layer is bottom 15nm-25nm; Titanium-oxygen-titanium absorbed layer 50nm-70nm; Silica 1 5nm-25nm.
5. a kind of selective composite coating for absorbing solar light and thermal according to claim 3 is characterized in that: the optimum thickness that described bottom-titanium-oxygen-titanium absorbed layer and silica are penetrated each layer of layer is bottom 20nm; Aluminium 30nm; 30nm; Aluminium dioxide 20nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810241894A CN101769649A (en) | 2008-12-30 | 2008-12-30 | Selective composite coating for absorbing solar light and thermal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810241894A CN101769649A (en) | 2008-12-30 | 2008-12-30 | Selective composite coating for absorbing solar light and thermal |
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| Publication Number | Publication Date |
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| CN101769649A true CN101769649A (en) | 2010-07-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810241894A Pending CN101769649A (en) | 2008-12-30 | 2008-12-30 | Selective composite coating for absorbing solar light and thermal |
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|---|---|
| CN (1) | CN101769649A (en) |
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- 2008-12-30 CN CN200810241894A patent/CN101769649A/en active Pending
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Application publication date: 20100707 |