CN101738992A - Method and device for testing product on line - Google Patents
Method and device for testing product on line Download PDFInfo
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- CN101738992A CN101738992A CN200810202776A CN200810202776A CN101738992A CN 101738992 A CN101738992 A CN 101738992A CN 200810202776 A CN200810202776 A CN 200810202776A CN 200810202776 A CN200810202776 A CN 200810202776A CN 101738992 A CN101738992 A CN 101738992A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses a method for testing product on line, which comprises the following steps: (a) writing a machine tag, the only one corresponding to the machine, into the archived file of the product after the product enters into the machine and processed; (b) searching for a test step which can test the processing result of the machine in the technological flow file and labeling the test step; and (c) issuing a test command when proceeding to the test step of the written tag. The invention also provides a device for testing product on line. The invention has the advantage that the adopted method is for testing the machine, not for the samples as in the prior art. When the number of certain machine on one production is two or more than two, namely, the condition of parallel machines exists, the above method is adopted to monitor the parallel machines, thus avoiding the situation that certain or some machines are not tested for a long time and improving the yield of the products.
Description
[technical field]
The present invention relates to integrated circuit technology equipment control and monitoring field, relate in particular to product is carried out on-line detection method and device.
[background technology]
On the integrated circuit technology line,, need use a large amount of technology boards for the planar technology of implementing to comprise that photoetching, injection, deposition etc. are complicated.In order to guarantee the normal operation of processing line, need to adopt the special-purpose on-Line Monitoring Program of a cover that the board that is adopted on the processing line is carried out on-line monitoring, finding that board takes place under the unusual situation, maintenance in time is to guarantee the yield of product.
On-line monitoring program of the prior art normally according to certain a collection of product quantity, extracts a certain proportion of product and detects, thereby reflects the working condition of a certain board.For example in the production run of a collection of product, after a certain step (for example ion injection) is implemented to finish, need the sample of extraction 30% to carry out quality testing, to monitor the product yield of this step.
The above-mentioned work of choosing sample is finished by computer program usually.Computer program can carry out track record to the numbering and the processing progress of every batch sample, and after receiving test command, according to the ratio of extraction draw samples numbering.And the slip-stick artist is responsible for the pairing sample of the sample number into spectrum of selecting is tested.But in the production of reality, a technology may be to be implemented by a plurality of boards, and the board that satisfies such condition might as well be referred to as " parallel machine ", and which board that sample is sent in the parallel machine is processed and will be determined at random according to actual conditions.Still be injected to example with ion, for example there are being five ion implantation apparatuses to participate under the situation of production of a certain batch products, owing to only 30% product is wherein checked, therefore might be in preceding ten times detection, the product of being selected all is to finish with a certain in first to fourth ion implantation apparatus.In this case, if the 5th ion is infused in unfortunate breaking down this moment, in these ten times tests, be can't be found so, wait until always that by chance the sample that detects is under the situation by the 5th ion implantation apparatus processing, could find the fault of this board.And to cause us can't predict test sample be when incident by the 5th ion implantation apparatus processing will take place just because sample enters the randomness of which board processing.Therefore in the prior art, because the existence of parallel machine, each board is detected when to be taken place at random, therefore might be in certain period certain out of order board never detected, thereby cause the overall yield of this batch products to descend.
For avoiding the generation of above-mentioned situation, current industry is judged Product Status artificially by yield slip-stick artist's experience usually, adjusts the test sample combination of different product.This artificial adjustment relies on slip-stick artist's experience fully, is not a kind of method of reliable head it off.Can reduce the possibility that above-mentioned situation takes place and increase detection ratio, but the frequency that has increased test will increase testing cost accordingly, and prolong process cycle.
[summary of the invention]
Technical matters to be solved by this invention is, provide a kind of product is carried out on-line detection method and device, can produce the situation of avoiding certain or some boards to can not get detecting for a long time in the process of product in processing line, thereby improve the yield of product.
In order to address the above problem, the invention provides and a kind of product is carried out on-line detection method, comprise the steps: that (a) enters after board processes at product, writes and the unique corresponding board label of this board in the files of this product; (b) seek a detection step that can detect the processing result of this board in the technological process file, adopt tags detected that this detection step is marked in flow file, described tags detected is unique corresponding with described board label; (c) be machined to when detecting step carrying out product according to the technological process file, check whether this step is marked by described tags detected in the flow file, so detecting step is marked, then make and detect instruction, will have and the pairing product censorship of the files of the pairing board label of described tags detected.
As optional technical scheme, comprise the steps: that further (d) sets the workload limit for board; (e) workload of record board, when board accumulation workload reaches the workload limit, beginning execution in step (a)～(c), and step (f); (f) in execution in step (a)～(c) with the zero clearing of the accumulation workload of board record, repeating step (e).
As optional technical scheme, described workload limit is meant the number of times of board accumulative total converted products.
As optional technical scheme, described workload limit is meant the accumulative total working time of board.
As optional technical scheme, adopt described method that two or more the identical board on the production line is monitored.
As optional technical scheme, be used for the integrated circuit technology line is monitored.
The present invention also provides a kind of device that product is carried out online detection, comprises as lower module: board label writing module, be used for entering after board processes at product, and in the files of this product, write and the unique corresponding board label of this board; The tags detected writing module, the machine station information that provided according to board label writing module is provided, in the technological process file, seek a detection step that can detect to the processing result of this board, adopt tags detected that this detection step is marked in flow file, described tags detected is unique corresponding with described board label; Detect instruction and send module, be used for being machined to when detecting step carrying out product according to the technological process file, check whether this step is marked by described tags detected in the flow file, so detecting step is marked, then make and detect instruction, will have and the pairing product censorship of the files of the pairing board label of described tags detected.
As optional technical scheme, further comprise as lower module: the sense cycle setting module is used to board to set the workload limit; The sense cycle monitoring module is used to write down the workload of board, when board accumulation workload reaches the workload limit, begins to enable board label writing module, tags detected writing module and detects instruction and send module; The job record reseting module, be used for execution begin to enable board label writing module, tags detected writing module and detect instruction send module in, with the accumulative total workload record zero clearing of board, restart the sense cycle monitoring module.
As optional technical scheme, described workload limit is meant the number of times of board accumulative total converted products.
As optional technical scheme, described workload limit is meant the accumulative total working time of board.
As optional technical scheme, adopt described device that two or more the identical board on the production line is monitored.
As optional technical scheme, be used for the integrated circuit technology line is monitored.
The invention has the advantages that, employing be in the detection method of board rather than the prior art at the detection method of sample.The number of certain board is two or more on a production line, promptly exist under the situation of parallel machine, adopt said method that parallel machine is monitored, can avoid certain or some boards to can not get for a long time detecting, thereby improve the yield of product.
[description of drawings]
Accompanying drawing 1 is the implementation step synoptic diagram that product is carried out the embodiment of on-line detection method provided by the invention;
Accompanying drawing 2 is the apparatus structure synoptic diagram of the embodiment of the device that product is carried out online detection provided by the invention.
[embodiment]
Below in conjunction with accompanying drawing the embodiment that product is carried out on-line detection method and device provided by the invention is elaborated.
Providing the embodiment that product is carried out on-line detection method provided by the invention at first in conjunction with the accompanying drawings describes.
The described method of this embodiment is used for product is carried out online detection.Industrial products need the adopting process flow file to write down the processing technology step of this product in process of production usually, in all processes of producing, need determine which kind of action is each step should carry out according to this technological process file.Also have the file of product file in the production run usually, be used to write down all relevant process detail and other information of product therewith, consult at any time in order in the production run.Method described in this embodiment realizes in process of production product being carried out timely and tight online detection by to the reading and writing of above-mentioned two files.
Accompanying drawing 1 is the implementation step synoptic diagram of this embodiment, comprising: step S110, for board is set the workload limit; Step S120, the workload of record board, when board accumulation workload reaches the workload limit, beginning execution in step S130～S150, and step S160; Step S130 enters after board processes at product, writes in the files of this product and the unique corresponding board label of this board; Step S140 seeks a detection step that can detect the processing result of this board in the technological process file, adopt tags detected that this detection step is marked in flow file, and described tags detected is unique corresponding with described board label; Step S150, be machined to when detecting step carrying out product according to the technological process file, check whether this step is marked by described tags detected in the flow file, so detecting step is marked, then make and detect instruction, will have and the pairing product censorship of the files of the pairing board label of described tags detected; Step S160, the accumulative total workload with board in execution in step S130～S150 writes down zero clearing, repeating step S120.
Adopt under the situation of said method monitoring board, monitored board can clocklike be detected in the process of producing product, and the situation that can not get detecting in long-time can not take place, thereby improves the yield of product.
Said method can be regarded as in the detection method of board rather than the prior art at the detection method of sample.Have only under one the situation at certain board on the production line, adopt said method and adopt the purpose that all can reach the monitoring board in the prior art at the detection method of sample.And the number of certain board is two or more on a production line, promptly exists under the situation of parallel machine, adopts said method that parallel machine is monitored, and can avoid certain or some boards to can not get for a long time detecting.Therefore when adopting said method that board is monitored, can at first classify to the board on the production line, adopt the method described in this embodiment to avoid omission to parallel machine, and to single board, can adopt the method in this embodiment, also can adopt method of the prior art to monitor.
Said method can only be implemented some or certain several board that break down easily, with the key monitoring of realization to these boards, thereby improves yield rate.
Step S110, S120 and S160 are optional steps, are used to control board and detect according to predefined workload limit.
Forming figure with litho machine at crystal column surface below is example, and the step S110 described in the said method is described in detail to the content described in the step S160.
For example step S110 to the board described in the step S160 be litho machine.At first execution in step S110 is litho machine setting workload limit.Described workload limit is 10 times.Litho machine work once will to a box totally 25 wafer carry out photoetching.
This embodiment is that litho machine is carried out the setting of workload limit, and therefore described workload limit is meant the number of times of litho machine accumulative total converted products.And for other equipment, described workload limit also is meant the accumulative total working time of board.For example for injection device, the workload limit can be set at 100 hours.
Execution in step S120, the workload of investigation litho machine, when litho machine work reaches 10 times, beginning execution in step S130～S150, and step S160.The workload accumulative total that is litho machine reaches 10 times, carries out one-time detection.
For with under the accumulative total situation of working time as the workload limit, this step reaches for accumulative total under the situation in time limit (for example 100 hours) of setting the working time, begins to carry out one-time detection.
Execution in step S130 enters after litho machine processes at wafer, writes in the files of this box wafer and the unique corresponding board label of this litho machine.In present embodiment, that supposes described this box wafer is numbered Lot 10, and described board label is L001.
In the process of wafer production, each box wafer all has corresponding files, is used to write down all relevant process detail and other information of box wafer therewith, in order to consulting.In this step, L001 writes this files with the board label, then in follow-up step, can find that the files of this box wafer Lot 10 have described board label L001 by reading files.
Execution in step S140, in the technological process file, seek a detection step that can detect to the processing result of this board, adopt tags detected T001 that this detection step is marked in flow file, described tags detected T001 is unique corresponding with described board label L001.
Described technological process file is the file that is used to put down in writing the wafer machining information, wherein put down in writing all processing steps that wafer will implement and detect step from the nude film to the product, the processing result that therefrom can find each board can detect in the step at which and to detect.
For photoetching, the result to photoetching in the test pattern step that can carry out after developing detects, and therefore writes tags detected T001 to indicate the project of this test pattern step in the technological process file.
Step S150, carrying out product according to the technological process file when being machined to the test pattern step, check whether this step is marked by described tags detected T001 in the flow file, so detecting step is marked, then make and detect instruction, will have box wafer censorship with the pairing Lot of being numbered 10 of files of the pairing board label of described tags detected T001 L001.
Step S160, the accumulative total workload with litho machine in execution in step S130～S150 writes down zero clearing, repeating step S120.
This step is used to guarantee the regular detection that can adopt the method that board was moved in circles with certain number of times or time cycle.
The enforcement of step described in this embodiment, can guarantee that described litho machine can once check after whenever carrying out ten photoetching, in case therefore this litho machine generation problem, can within ten photoetching, find and keep in repair, thereby improve the yield of this batch products.
Below in conjunction with accompanying drawing the embodiment that product is carried out the device of online detection of the present invention is described.
Accompanying drawing 2 is depicted as the apparatus structure synoptic diagram of this embodiment, comprising:
Sense cycle setting module 210 is used to board to set the workload limit.
Sense cycle monitoring module 220 is used to write down the workload of board, when board accumulation workload reaches the workload limit, begins to enable board label writing module, tags detected writing module and detects instruction and send module.
Described workload limit is meant the number of times of board accumulative total converted products or the accumulative total working time of board.
Board label writing module 230 is used for entering after board processes at product, writes in the files of this product and the unique corresponding board label of this board.
Tags detected writing module 240, the machine station information that provided according to board label writing module 230 is provided, in the technological process file, seek a detection step that can detect to the processing result of this board, adopt tags detected that this detection step is marked in flow file, described tags detected is unique corresponding with described board label;
Detect instruction and send module 250, be used for being machined to when detecting step carrying out product according to the technological process file, check that the tags detected whether this step in the flow file is marked in the detected label writing module 240 marks, so detecting step is marked, then make and detect instruction, will have and the pairing product censorship of the files of the pairing board label of described tags detected.
Job record reseting module 260, be used for execution begin to enable board label writing module 230, tags detected writing module 240 and detect instruction send module 250 in, with the accumulative total workload record zero clearing of board, restart sense cycle monitoring module 220.
Sense cycle setting module 210, sense cycle monitoring module 220 and job record reseting module 260 are optional components of this equipment, are used to control board and detect according to predefined sense cycle.
Said apparatus can be monitored with two or more the identical board on the production line of opposing.
Said apparatus can be used for the board of integrated circuit technology line is monitored.
About the principle of work of said apparatus and the relation between each assembly, can carry out narration in the embodiment of on-line detection method to product with reference to the front.
The above only is a preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (12)
1. one kind is carried out on-line detection method to product, it is characterized in that, comprises the steps:
(a) enter after board processes at product, in the files of this product, write and the unique corresponding board label of this board;
(b) seek a detection step that can detect the processing result of this board in the technological process file, adopt tags detected that this detection step is marked in flow file, described tags detected is unique corresponding with described board label;
(c) be machined to when detecting step carrying out product according to the technological process file, check whether this step is marked by described tags detected in the flow file, so detecting step is marked, then make and detect instruction, will have and the pairing product censorship of the files of the pairing board label of described tags detected.
2. according to claim 1 product is carried out on-line detection method, it is characterized in that, further comprise the steps:
(d) set the workload limit for board;
(e) workload of record board, when board accumulation workload reaches the workload limit, beginning execution in step (a)～(c), and step (f);
(f) in execution in step (a)～(c) with the zero clearing of the accumulation workload of board record, repeating step (e).
3. according to claim 2 product is carried out on-line detection method, it is characterized in that, described workload limit is meant the number of times of board accumulative total converted products.
4. according to claim 2 product is carried out on-line detection method, it is characterized in that described workload limit is meant the accumulative total working time of board.
5. according to claim 1 and 2 product is carried out on-line detection method, it is characterized in that, adopt described method that two or more the identical board on the production line is monitored.
6. according to claim 1 and 2 product is carried out on-line detection method, it is characterized in that, be used for the integrated circuit technology line is monitored.
7. the device that product is carried out online detection is characterized in that, comprises as lower module: board label writing module, be used for entering after board processes at product, and in the files of this product, write and the unique corresponding board label of this board;
The tags detected writing module, the machine station information that provided according to board label writing module is provided, in the technological process file, seek a detection step that can detect to the processing result of this board, adopt tags detected that this detection step is marked in flow file, described tags detected is unique corresponding with described board label;
Detect instruction and send module, be used for being machined to when detecting step carrying out product according to the technological process file, check whether this step is marked by described tags detected in the flow file, so detecting step is marked, then make and detect instruction, will have and the pairing product censorship of the files of the pairing board label of described tags detected.
8. the device that product is carried out online detection according to claim 7 is characterized in that, further comprises as lower module:
The sense cycle setting module is used to board to set the workload limit;
The sense cycle monitoring module is used to write down the workload of board, when board accumulation workload reaches the workload limit, begins to enable board label writing module, tags detected writing module and detects instruction and send module;
The job record reseting module, be used for execution begin to enable board label writing module, tags detected writing module and detect instruction send module in, with the accumulative total workload record zero clearing of board, restart the sense cycle monitoring module.
9. the device that product is carried out online detection according to claim 8 is characterized in that, described workload limit is meant the number of times of board accumulative total converted products.
10. the device that product is carried out online detection according to claim 8 is characterized in that, described workload limit is meant the accumulative total working time of board.
11. according to claim 7 or the 8 described devices that product is carried out online detection, it is characterized in that, adopt described device that two or more the identical board on the production line is monitored.
12. according to claim 7 or the 8 described devices that product is carried out online detection, it is characterized in that, be used for the integrated circuit technology line is monitored.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102707168A (en) * | 2012-05-21 | 2012-10-03 | 上海华力微电子有限公司 | Defect monitoring method based on equipment maintenance risk control |
| CN103438923A (en) * | 2013-08-21 | 2013-12-11 | 广东电子工业研究院有限公司 | Man-machine integration product quality detection system and detection method thereof |
| CN104808597A (en) * | 2014-01-24 | 2015-07-29 | 中芯国际集成电路制造(上海)有限公司 | Method and device for production dispatching |
| CN105097586A (en) * | 2014-05-22 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | Wafer extracting method and wafer extracting device |
| CN105259872A (en) * | 2015-06-04 | 2016-01-20 | 周建钢 | Method, product, and equipment for large-scale personalized customization in production line |
| CN105549553A (en) * | 2015-12-08 | 2016-05-04 | 成都海威华芯科技有限公司 | Production control method for production machines |
| CN106125670A (en) * | 2016-07-29 | 2016-11-16 | 深圳市艾宇森自动化技术有限公司 | A kind of CNC board management system |
| CN110412948A (en) * | 2018-04-28 | 2019-11-05 | 深圳市裕展精密科技有限公司 | Produce control device, method and storage equipment |
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| TWI229270B (en) * | 2002-12-11 | 2005-03-11 | Semiconductor Mfg Int Shanghai | Mask import file measurement |
| CN101159673B (en) * | 2007-11-01 | 2010-06-23 | 杭州华三通信技术有限公司 | Arbitrary sampling method and apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102707168A (en) * | 2012-05-21 | 2012-10-03 | 上海华力微电子有限公司 | Defect monitoring method based on equipment maintenance risk control |
| CN103438923A (en) * | 2013-08-21 | 2013-12-11 | 广东电子工业研究院有限公司 | Man-machine integration product quality detection system and detection method thereof |
| CN103438923B (en) * | 2013-08-21 | 2016-04-27 | 广东电子工业研究院有限公司 | A kind of product quality detection system of man-computer cooperation and detection method thereof |
| CN104808597A (en) * | 2014-01-24 | 2015-07-29 | 中芯国际集成电路制造(上海)有限公司 | Method and device for production dispatching |
| CN105097586A (en) * | 2014-05-22 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | Wafer extracting method and wafer extracting device |
| CN105097586B (en) * | 2014-05-22 | 2018-05-04 | 中芯国际集成电路制造(上海)有限公司 | Wafer abstracting method and device |
| CN105259872A (en) * | 2015-06-04 | 2016-01-20 | 周建钢 | Method, product, and equipment for large-scale personalized customization in production line |
| CN105549553A (en) * | 2015-12-08 | 2016-05-04 | 成都海威华芯科技有限公司 | Production control method for production machines |
| CN106125670A (en) * | 2016-07-29 | 2016-11-16 | 深圳市艾宇森自动化技术有限公司 | A kind of CNC board management system |
| CN110412948A (en) * | 2018-04-28 | 2019-11-05 | 深圳市裕展精密科技有限公司 | Produce control device, method and storage equipment |
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| CN101738992B (en) | 2012-05-16 |
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