CN101737314A - Precise glue pump with high viscosity - Google Patents
Precise glue pump with high viscosity Download PDFInfo
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- CN101737314A CN101737314A CN200810228794A CN200810228794A CN101737314A CN 101737314 A CN101737314 A CN 101737314A CN 200810228794 A CN200810228794 A CN 200810228794A CN 200810228794 A CN200810228794 A CN 200810228794A CN 101737314 A CN101737314 A CN 101737314A
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- glue pump
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- high viscosity
- glue
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Abstract
The invention relates to a precise liquid feeding system applied to high-viscosity special liquid cement, such as PI (polyimide), high-viscosity photoresist and the like, in particular to a precise glue pump with high viscosity. The precise glue pump with high viscosity solves the problem that the adhesive film surface of a common glue pump has a great quantity of tiny hard spots and the like after spin coating and baking. The inlet and the outlet of the glue pump respectively adopts a pneumatic diaphragm sealing mechanism which is provided with a pneumatic piston, a film and a restoring spring, wherein one end of the pneumatic piston is connected with the film, and the other end is provided with the restoring spring; the film of the pneumatic diaphragm sealing mechanism corresponds to the inlet or the outlet of the glue pump; and the cavity in which the pneumatic piston is arranged is respectively provided with an air inlet. The glue pump of the invention is mainly applied to the glue feeding system of the special automatic gluing equipment of high-density sealing technology, MEMS and the like, and is a necessary core component of the equipment.
Description
Technical field:
The present invention relates to be applied to the accurate liquid-supplying system of high viscosity special gelatin liquid such as PI (polyimide) and high viscosity optical resist, be specially a kind of precise glue pump with high viscosity.
Background technique:
Along with the high speed development of ic manufacturing technology, High Density Packaging Technology, MEMS new and high technologies such as (microelectromechanical systems) are applied rapidly.In the middle of these new process engineerinies, to apply multiple speciality chemical, as PI (polyimide), high viscosity optical resist etc., its viscosity is all more than 3000cp, when using common glue pump for glue, because its special composition and chemical property are easy to produce bubble, bubble is in case occur will producing a large amount of tiny flaws at base surface like this in the spin coated process, thereby having a strong impact on quality of product with regard to being difficult to eliminating.
As shown in Figure 1, general can mainly comprising by the glue pump: cavity 1, outlet one-way valve 2, inlet one-way valve 3, piston 4 etc., common glue pump is when feed flow, be in an airtight cavity 1, to utilize piston 4 or diaphragm to take out backward earlier, produce certain negative pressure, thereby glue is drawn onto in the cavity 1, and then push piston 4 or diaphragm, glue is extruded.Import and outlet at the glue pump respectively have an one-way valve: outlet one-way valve 2, inlet one-way valve 3 have Returnning spring.When inhaling glue, inlet one-way valve 3 is opened, and outlet one-way valve 2 is closed.When playing glue, outlet one-way valve 2 is opened, and inlet one-way valve 3 is closed, and finishes suction glue and beats the glue process.Opening of outlet one-way valve 2, inlet one-way valve 3 is to realize by cavity 1 interior suction or pressure-driven glue extrusion spring.
Find through test of many times, why micro-bubble can occur when being coated with PI, be exactly when supplying glue owing to the glue pump, to need glue constantly to push check valve spring and pass in and out the glue pump, glue is stressed repeatedly in this course, makes its inside produce the sightless bubble of a large amount of naked eyes.After spin coated, through overbaking post bake glued membrane surface, small in a large number " pit " will appear, and cause substrate to scrap.
Summary of the invention:
The object of the present invention is to provide a kind of precise glue pump with high viscosity, solve common glue pump after spin coated, small in a large number problems such as " pits " occurs through overbaking post bake glued membrane surface.
Technological scheme of the present invention is:
A kind of precise glue pump with high viscosity, glue pump both sides are provided with glue pump inlet and glue pump discharge, in the cavity in the glue pump piston is set, the glue pump inlet and the Jiao Bengchukouchu of this glue pump adopt the pneumatic diaphragm sealing mechanism respectively, the pneumatic diaphragm sealing mechanism is provided with pneumatic piston, diaphragm and Returnning spring, pneumatic piston one end links to each other with diaphragm, the pneumatic piston the other end is installed Returnning spring, the diaphragm of pneumatic diaphragm sealing mechanism is corresponding with glue pump inlet or glue pump discharge, and the cavity at pneumatic piston place has suction port.
Described precise glue pump with high viscosity, the piston rod of piston is connected with actuating motor.
Described precise glue pump with high viscosity, actuating motor links to each other with programmable controller.
Described precise glue pump with high viscosity, the suction port of pneumatic diaphragm sealing mechanism is connected to the outlet end of two five-way electromagnetic valves respectively.
Described precise glue pump with high viscosity, two five-way electromagnetic valves link to each other with programmable controller.
Described precise glue pump with high viscosity, programmable controller is connected with liquid crystal display panel.
Described precise glue pump with high viscosity, seal ring is equipped with in the piston rod outside of piston, and seal ring adopts fluorine resin material.
The invention has the beneficial effects as follows:
1, the pneumatic diaphragm sealing mechanism has been adopted in the import of highi degree of accuracy glue pump of the present invention and outlet port, when suction glue is played glue, can open or close automatically by gas control, glue is when turnover glue pump cavity like this, just obstruction is not being arranged, thereby micro-bubble can not occur, can satisfy the demand fully through this glue pump of overtesting.
2, the present invention is in order to accomplish that adapting to high viscosity accurately supplies glue, and this glue pump adopts inlet servo motor to come piston rod, and the control accuracy height is easy to adjust accurately for the glue amount.
3, because chemical product such as PI have highly corrosive, piston rod adopts the stupalith precision machining to form, and highi degree of accuracy is pollution-free.
4, the seal ring of glue pump of the present invention inside adopts fluorine resin material, guarantees sealability, and is simultaneously corrosion-resistant.
5, PLC is adopted in the control of the integral body of glue pump of the present invention, can have liquid crystal display panel, and operating and setting is simple and convenient.
6, the terminal valve of glue pump of the present invention is driven by two five-way electromagnetic valves, and switching can be by procedure auto-control.
Description of drawings:
Fig. 1 is common glue pump structure schematic representation.
Fig. 2 is a glue pump structure schematic representation of the present invention.
Among the figure, 1, cavity; 2, outlet one-way valve; 3, inlet one-way valve; 4, piston; 5, pneumatic piston; 6, suction port; 7, diaphragm; 8, glue pump inlet; 9, glue pump discharge; 10, actuating motor; 11, seal ring; 12, programmable controller (PLC); 13, solenoid valve; 14 Returnning springs; 15 ball screws.
Embodiment:
As shown in Figure 2, precise glue pump with high viscosity of the present invention mainly comprises: cavity 1, piston 4, pneumatic piston 5, suction port 6, diaphragm 7, actuating motor 10, seal ring 11, programmable controller 12, solenoid valve 13 etc.,
Concrete structure is as follows:
Glue pump inlet 8 and glue pump discharge 9 places adopt the pneumatic diaphragm sealing mechanism respectively, the pneumatic diaphragm sealing mechanism is provided with pneumatic piston 5, diaphragm 7 Returnning springs 14, pneumatic piston 5 one ends link to each other with diaphragm 7, pneumatic piston 5 the other ends are installed and Returnning spring 14, the diaphragm of pneumatic diaphragm sealing mechanism is corresponding with glue pump inlet 8 or glue pump discharge 9, and the cavity at pneumatic piston 5 places has suction port 6.
Among the present invention, piston 4 is set in the cavity 1, the piston rod of piston 4 is connected with actuating motor 10, and piston 4 is driven by actuating motor 10.
Among the present invention, seal ring 11 is equipped with in the piston rod of piston 4 outside, and seal ring 11 adopts fluorine resin material.
Among the present invention, two five-way electromagnetic valves 13 can integratedly be installed on the equipment gas control valve plate, and pressurized air enters from two five-way electromagnetic valve 13 entrance points, and the outlet end of two five-way electromagnetic valves 13 is connected to the suction port 6 of pneumatic diaphragm sealing mechanism respectively.
Among the present invention, programmable controller (PLC) 12 is adopted in the control of the integral body of glue pump, and programmable controller (PLC) 12 can be installed in device interior, and programmable controller (PLC) 12 connects actuating motor 10 and two five-way electromagnetic valves 13 respectively.
Among the present invention, programmable controller (PLC) can have liquid crystal display panel manually to be set with convenient, and controller itself can be communicated by letter with the equipment upper-position unit, controls its work by the equipment straight line program.
Working procedure of the present invention is as follows:
When feed flow, actuating motor 10 comes by precision ball screw 15 piston rod, piston rod adopts the stupalith precision machining to form, make piston 4 accurately action in airtight cavity 1, by in programmable controller (or equipment upper-position unit), setting, actuating motor 10 rotates a fixing turn by setting value to be retreated piston or advances, thus the amount that control is inhaled glue and played glue.Key of the present invention is that into glue, gum exudation mouth adopt pneumatic diaphragm to open or close automatically, occurs the problem of micro-bubble thereby solve glue because of being subjected to the one-way valve drag effect.
Glue pump of the present invention is mainly used in supplying in the colloid system of the Special Automatic automatic double surface gluers of technology such as High Density Packaging Technology, MEMS, is the indispensable core component of this kind equipment.In addition, this glue pump also can be applicable to other need supply the high viscosity glue, simultaneously to the highstrung place of bubble, as: battery manufacturing, pcb board manufacturing, encapsulation etc.
Claims (7)
1. precise glue pump with high viscosity, glue pump both sides are provided with glue pump inlet (8) and glue pump discharge (9), in the cavity (1) in the glue pump piston (4) is set, it is characterized in that, the glue pump inlet (8) and the glue pump discharge (9) of this glue pump locate to adopt respectively the pneumatic diaphragm sealing mechanism, the pneumatic diaphragm sealing mechanism is provided with pneumatic piston (5), diaphragm (7) and Returnning spring (14), pneumatic piston (5) one ends link to each other with diaphragm (7), pneumatic piston (5) the other end is installed Returnning spring (14), the diaphragm of pneumatic diaphragm sealing mechanism is corresponding with glue pump inlet (8) or glue pump discharge (9), and the cavity at pneumatic piston (5) place has suction port (6).
2. according to the described precise glue pump with high viscosity of claim 1, it is characterized in that the piston rod of piston (4) is connected with actuating motor (10).
3. according to the described precise glue pump with high viscosity of claim 2, it is characterized in that actuating motor (10) links to each other with programmable controller (12).
4. according to the described precise glue pump with high viscosity of claim 1, it is characterized in that the suction port of pneumatic diaphragm sealing mechanism (6) is connected to the outlet end of two five-way electromagnetic valves (13) respectively.
5. according to the described precise glue pump with high viscosity of claim 4, it is characterized in that two five-way electromagnetic valves (13) link to each other with programmable controller (12).
6. according to claim 3 or 5 described precise glue pump with high viscosity, it is characterized in that programmable controller (12) is connected with liquid crystal display panel.
7. according to the described precise glue pump with high viscosity of claim 1, it is characterized in that seal ring (11) is equipped with in the piston rod outside of piston (4), seal ring (11) adopts fluorine resin material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102287941A CN101737314B (en) | 2008-11-14 | 2008-11-14 | Precise glue pump with high viscosity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102287941A CN101737314B (en) | 2008-11-14 | 2008-11-14 | Precise glue pump with high viscosity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101737314A true CN101737314A (en) | 2010-06-16 |
| CN101737314B CN101737314B (en) | 2012-04-11 |
Family
ID=42461224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008102287941A Expired - Fee Related CN101737314B (en) | 2008-11-14 | 2008-11-14 | Precise glue pump with high viscosity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101737314B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102022300A (en) * | 2010-09-17 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | High-precision continuous glue supplying pump device |
| CN102463198A (en) * | 2010-11-19 | 2012-05-23 | 大连德新机电技术工程有限公司 | Air pressure jet-marking device for screw machine |
| CN102489422A (en) * | 2011-11-18 | 2012-06-13 | 江苏大学 | Liquid medicine spraying device based on diaphragm and electromagnetic exciter |
| CN106762870A (en) * | 2016-12-29 | 2017-05-31 | 北京东方诚国际钢结构工程有限公司 | A kind of glue spreader source of consistent pressure and implementation method |
| CN107847955A (en) * | 2015-07-17 | 2018-03-27 | Sms集团股份有限公司 | Shower nozzle and shower nozzle manufacture method at least one mould of cooling and lubricating forming machine |
| CN108799039A (en) * | 2018-06-06 | 2018-11-13 | 徐州吉安矿业科技有限公司 | A kind of high viscosity cannot flow automatically the delivery pump device of slurry |
| CN110425103A (en) * | 2019-06-21 | 2019-11-08 | 中国计量大学上虞高等研究院有限公司 | A kind of two D supercharging equipment of sludge and sealing mechanism |
| CN111203955A (en) * | 2020-01-16 | 2020-05-29 | 河北工业大学 | Multistage pumping degassing system and building 3D printing system applying same |
| CN111219885A (en) * | 2020-01-19 | 2020-06-02 | 侯中泽 | Fluid piston heat source pump |
| CN113443279A (en) * | 2020-03-25 | 2021-09-28 | 长鑫存储技术有限公司 | Storage container and supply system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US3145660A (en) * | 1962-02-13 | 1964-08-25 | Bush Vannevar | Free piston hydraulic pump |
| US4874299A (en) * | 1987-04-08 | 1989-10-17 | Life Loc, Inc. | High precision pump |
| US5537820A (en) * | 1994-06-27 | 1996-07-23 | Sunpower, Inc. | Free piston end position limiter |
| CN100368683C (en) * | 2003-10-29 | 2008-02-13 | 钟竞铮 | Atopic piston-pump and comb having the pump for dyeing hair |
-
2008
- 2008-11-14 CN CN2008102287941A patent/CN101737314B/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102022300A (en) * | 2010-09-17 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | High-precision continuous glue supplying pump device |
| CN102463198A (en) * | 2010-11-19 | 2012-05-23 | 大连德新机电技术工程有限公司 | Air pressure jet-marking device for screw machine |
| CN102463198B (en) * | 2010-11-19 | 2013-07-31 | 大连德新机电技术工程有限公司 | Air pressure jet-marking device for screw machine |
| CN102489422A (en) * | 2011-11-18 | 2012-06-13 | 江苏大学 | Liquid medicine spraying device based on diaphragm and electromagnetic exciter |
| CN102489422B (en) * | 2011-11-18 | 2015-04-22 | 江苏大学 | Liquid medicine spraying device based on diaphragm and electromagnetic exciter |
| CN107847955A (en) * | 2015-07-17 | 2018-03-27 | Sms集团股份有限公司 | Shower nozzle and shower nozzle manufacture method at least one mould of cooling and lubricating forming machine |
| US10960420B2 (en) | 2015-07-17 | 2021-03-30 | Sms Group Gmbh | Spray head for supplying at least one die of a forming machine with lubricating coolant, and method for producing such a spray head |
| CN106762870A (en) * | 2016-12-29 | 2017-05-31 | 北京东方诚国际钢结构工程有限公司 | A kind of glue spreader source of consistent pressure and implementation method |
| CN108799039A (en) * | 2018-06-06 | 2018-11-13 | 徐州吉安矿业科技有限公司 | A kind of high viscosity cannot flow automatically the delivery pump device of slurry |
| CN108799039B (en) * | 2018-06-06 | 2023-06-30 | 徐州吉安矿业科技有限公司 | High-viscosity transfer pump device incapable of flowing slurry automatically |
| CN110425103A (en) * | 2019-06-21 | 2019-11-08 | 中国计量大学上虞高等研究院有限公司 | A kind of two D supercharging equipment of sludge and sealing mechanism |
| CN111203955A (en) * | 2020-01-16 | 2020-05-29 | 河北工业大学 | Multistage pumping degassing system and building 3D printing system applying same |
| CN111219885A (en) * | 2020-01-19 | 2020-06-02 | 侯中泽 | Fluid piston heat source pump |
| CN113443279A (en) * | 2020-03-25 | 2021-09-28 | 长鑫存储技术有限公司 | Storage container and supply system |
| US11702273B2 (en) | 2020-03-25 | 2023-07-18 | Changxin Memory Technologies, Inc. | Storage container and supply system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101737314B (en) | 2012-04-11 |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120411 Termination date: 20171114 |