CN101733561B - 激光修调薄膜电阻中快速精确调整焦面的方法 - Google Patents
激光修调薄膜电阻中快速精确调整焦面的方法 Download PDFInfo
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CN 200910217808 CN101733561B (zh) | 2009-11-04 | 2009-11-04 | 激光修调薄膜电阻中快速精确调整焦面的方法 |
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CN 200910217808 CN101733561B (zh) | 2009-11-04 | 2009-11-04 | 激光修调薄膜电阻中快速精确调整焦面的方法 |
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CN101733561A CN101733561A (zh) | 2010-06-16 |
CN101733561B true CN101733561B (zh) | 2012-04-11 |
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Families Citing this family (25)
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CN102161261A (zh) * | 2010-12-18 | 2011-08-24 | 江苏锐毕利实业有限公司 | 挠性印刷电路板多工位喷印系统 |
CN102319960A (zh) * | 2011-07-27 | 2012-01-18 | 苏州德龙激光有限公司 | 超短脉冲激光制作金属薄膜群孔的装置及其方法 |
US10100393B2 (en) | 2013-02-21 | 2018-10-16 | Nlight, Inc. | Laser patterning of multi-layer structures |
US10464172B2 (en) | 2013-02-21 | 2019-11-05 | Nlight, Inc. | Patterning conductive films using variable focal plane to control feature size |
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US10618131B2 (en) | 2014-06-05 | 2020-04-14 | Nlight, Inc. | Laser patterning skew correction |
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US10050404B2 (en) | 2015-03-26 | 2018-08-14 | Nlight, Inc. | Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss |
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WO2017091505A1 (en) | 2015-11-23 | 2017-06-01 | Nlight, Inc. | Fine-scale temporal control for laser material processing |
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CN105537759B (zh) * | 2015-12-17 | 2017-03-29 | 长春光华微电子设备工程中心有限公司 | 薄膜晶片调阻的光刻逐列定位控制方法 |
EP3389915B1 (en) | 2016-01-19 | 2021-05-05 | NLIGHT, Inc. | Method of processing calibration data in 3d laser scanner systems |
CN105538721B (zh) * | 2016-01-26 | 2018-05-18 | 西安电子科技大学 | 一种非展开曲面导电图形的三维打印装置及打印方法 |
CN106181027B (zh) * | 2016-08-27 | 2018-11-23 | 洛阳鹏起实业有限公司 | 激光焊接头垂直度调整方法及激光焊接头装置 |
US10732439B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Fiber-coupled device for varying beam characteristics |
US10663767B2 (en) | 2016-09-29 | 2020-05-26 | Nlight, Inc. | Adjustable beam characteristics |
US10730785B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Optical fiber bending mechanisms |
WO2018187489A1 (en) | 2017-04-04 | 2018-10-11 | Nlight, Inc. | Optical fiducial generation for galvanometric scanner calibration |
CN109664035A (zh) * | 2017-10-11 | 2019-04-23 | 无锡映型三维数字技术有限公司 | 一种激光破坏结构进行切割的三维成型设备及其使用方法 |
CN109175737B (zh) * | 2018-10-31 | 2019-12-03 | 中国科学院西安光学精密机械研究所 | 一种激光束与机床轴运动方向平行度的调试方法 |
CN109817558B (zh) * | 2019-01-21 | 2021-07-16 | 北京华卓精科科技股份有限公司 | 一种用于匹配光学焦深范围的晶圆表面姿态简易调节结构及其调节方法 |
EP4032652A1 (de) * | 2021-01-26 | 2022-07-27 | Precitec GmbH & Co. KG | Materialbearbeitung mittels laserstrahl mit wobbel-bewegung |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2448504Y (zh) * | 2000-09-13 | 2001-09-19 | 中国科学院长春光学精密机械与物理研究所 | 片式元件激光微调加工装置 |
CN1522187A (zh) * | 2001-06-29 | 2004-08-18 | 用于电路基板加工的激光机光学系统校准方法 | |
CN1703298A (zh) * | 2002-11-28 | 2005-11-30 | 西门子公司 | 用于确定激光束的焦点位置的方法 |
CN201120528Y (zh) * | 2007-12-04 | 2008-09-24 | 深圳市星辰激光技术有限公司 | 激光标刻机辅助对焦装置 |
-
2009
- 2009-11-04 CN CN 200910217808 patent/CN101733561B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2448504Y (zh) * | 2000-09-13 | 2001-09-19 | 中国科学院长春光学精密机械与物理研究所 | 片式元件激光微调加工装置 |
CN1522187A (zh) * | 2001-06-29 | 2004-08-18 | 用于电路基板加工的激光机光学系统校准方法 | |
CN1703298A (zh) * | 2002-11-28 | 2005-11-30 | 西门子公司 | 用于确定激光束的焦点位置的方法 |
CN201120528Y (zh) * | 2007-12-04 | 2008-09-24 | 深圳市星辰激光技术有限公司 | 激光标刻机辅助对焦装置 |
Non-Patent Citations (3)
Title |
---|
JP特开2008-15074A 2008.01.24 |
JP特开平11-245067A 1999.09.14 |
JP特开平5-249390A 1993.09.28 |
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