CN101726180A

CN101726180A - Heat treatment apparatus

Info

Publication number: CN101726180A
Application number: CN200910171465A
Authority: CN
Inventors: 山本恵司; 中谷淳司
Original assignee: Koyo Thermo Systems Co Ltd
Current assignee: JTEKT Thermo Systems Corp
Priority date: 2008-10-10
Filing date: 2009-09-09
Publication date: 2010-06-09
Anticipated expiration: 2029-09-09
Also published as: CN101726180B; KR101624988B1; TWI444572B; JP5569999B2; JP2010091222A; TW201015029A; KR20100040666A

Abstract

The present invention discloses a heat treatment apparatus which comprises a furnace body, a door and a driving unit. The door comprises a baffle and a main frame. The baffle causes heat insulation between the inner part of the furnace body and the outer part. Furthermore, the baffle is provided with a plurality of spacers which are continuously configured along the length direction of the door. The main frame is configured so that the baffle can be supported with a mode that at least one part in the plurality of spacers can freely move along the length direction. Furthermore, the main frame is configured to connect with the driving unit.

Description

Annealing device

Technical field

The present invention relates to a kind of annealing device that comprises the door that is connected with body of heater, this flat work of using at for example liquid crystal panel (as glass substrate) is loaded into body of heater or opens and closes when taking out from body of heater.

Background technology

In annealing device, for being distributed, the body of heater temperature inside keeps at desired conditions, guarantee that the heat-proof quality of body of heater and sealing are very important.In addition, under body of heater and door situation about being connected, can think, the time period that door stays open suppress heat from the body of heater internal leakage to outside and body of heater and can not form the gap that may cause heat leak inventive concept be very important.

Therefore, in the conventional annealing device that comprises the door that is connected with its body of heater, there is a kind of annealing device, be provided with respectively the corresponding a plurality of doors (longer on each horizontal direction) of a plurality of heat treatment portions that constitute with multisection type in it, and only be arranged to when workpiece is loaded in the corresponding heat treatment portion and therefrom takes out, to open and close (referring to a Japanese Patent Application Publication communique No.2001-12856).As if because such structure allows restrictively to open the part in a plurality of doors in this annealing device, thereby heat is suppressed to low-level from the body of heater internal leakage to the outside door can be opened the time.

Yet along with the maximization of flat work in the last few years, door (the particularly length of horizontal direction) also is tending towards maximizing; Like this, the maximization of door has formed the gap, causes heat easier leakage between body of heater and door.For example, along with the maximization of door, the maximum defluxion that forms when because of the temperature difference of body of heater between inside and outside door being bent may increase to the degree above feasible value; Therefore near the zone that maximum deflection takes place, between door and body of heater, form the gap sometimes.

When the gap occurring between door and the body of heater, because hot-air is from clearance leakage, and owing to suck and the as many extraneous air of hot-air that leaks, so the easy multilated that distributes of body of heater temperature inside.

The purpose of this invention is to provide a kind of annealing device that comprises door, can under the situation that does not reduce its heat-proof quality, make this maximization.

Summary of the invention

Annealing device of the present invention comprises body of heater, door and driver element.Described body of heater is configured to accommodate the more than one workpiece of heat-treating.

Described door is connected with described body of heater, comprises insulation part and framing component.Described insulation part is configured to make described body of heater inside and external insulation.In addition, described insulation part has a plurality of thermal insulation barriers of the continuous configuration of length direction of door long on the along continuous straight runs.Described framing component is configured to can support described insulation part along the mode that described length direction moves freely with at least a portion in a plurality of thermal insulation barriers.In addition, described framing component is configured to be connected with described driver element.

When being configured in workpiece is loaded into described body of heater and therefrom take out, described driver element opens and closes described door.The example of described driver element comprises makes the mechanism of door around the trunnion axis swing, and makes door slide up and down the another kind of mechanism of (vertical direction).

In this structure, described insulation part is divided into a plurality of thermal insulation barriers, and in addition, the part in described a plurality of thermal insulation barriers or all thermal insulation barriers are configured to move freely with respect to described framing component.Therefore, when each thermal insulation barriers during, absorb the increment of each thermal insulation barriers elongation with respect to moving freely of described framing component by each thermal insulation barriers through expanded by heating.In addition, even when the temperature difference between described insulation part is inside and outside because of described body of heater is crooked, because each thermal insulation barriers is crooked separately, the maximum defluxion of insulation part can be suppressed to the maximum defluxion of the another kind of insulation part that constitutes less than one.As a result, even when door long on the horizontal direction maximizes, the maximum defluxion of described insulation part can not increase with the maximization of described door pro rata yet.Therefore, even when door long on the horizontal direction maximizes, owing to the gap can not occur between door and body of heater, therefore the heat-proof quality of door can not reduce.

In addition, because insulation part is not fixed on the framing component, and owing to compare with the another kind of structure that insulation part is fixed on the framing component, the thermal stress that produces at the insulation part place in this structure unlikely is delivered to framing component, even therefore also can make framing component keep its initial geometry when insulation part is out of shape.

Description of drawings

Fig. 1 is the sketch that shows according to the annealing device of the embodiment of the invention.

Fig. 2 A～Fig. 2 C is the sketch of the structure of show gate.

Fig. 3 A and Fig. 3 B are the figure that shows the structure of main frame and dividing plate.

Fig. 4 A and Fig. 4 B are the figure of the example of structure that shows that dividing plate can slide with respect to main frame.

Fig. 5 A and Fig. 5 B are the illustrative sketches that shows the dividing plate case of bending.

The specific embodiment

Fig. 1 is the sketch that shows according to multisection type IR (infra-red radiation) stove 10 of the embodiment of the invention.In the following embodiments, IR stove 10 is described as the example according to annealing device of the present invention; Yet scope of the present invention is not limited to those that use infrared heater, and opposite the present invention is also applicable to being provided with the annealing device that waits other mode of heating such as hot air circulation heating and/or hot plate heating.

As shown in Figure 1, IR stove 10 comprises body of heater 12 at an upper portion thereof, accommodates the workpiece 15 of heat-treating in body of heater 12.In the present embodiment, be used as workpiece 15 Yi Bian be about the substrate of 3m; Yet, when workpiece 15 is more greater or lesser than this substrate, also can preferably implement the present invention.Control module 16 is arranged on the below of body of heater 12, and control module 16 is taken in the drive system plate and the control system plate of IR stove 10.Control module 16 is used for the operation of IR stove 10 is controlled comprehensively.

The inside of body of heater 12 comprises a plurality of heat treatment portion 14.Each heat treatment portion 14 includes the heating unit 18 that is used for heated parts 15 under design temperature.In addition, shown in Fig. 2 A～Fig. 2 C, door 20 is connected with the front side of each

heat treatment portion

14, and 20 longer in the horizontal direction, and be arranged in workpiece 15 by the time opening and closing.A plurality of door 20 disposes in the mode of a door corresponding to a heat treatment portion 14, and each is configured in workpiece is loaded into corresponding heat treatment portion to open when therefrom taking out.

Shown in Fig. 2 B, door 20 comprises dividing plate 26, main frame 22 and driver element 28.Dividing plate 26 is configured to make the inside and the external insulation of body of heater 12.In addition, as described below, dividing plate 26 disposes in the mode that is divided into a plurality of members along its length direction.Main frame 22 is configured to supporting clapboard 26, thereby plays the function of the intensity of guaranteeing door 20.Here, dividing plate 26 is configured to comprise the container of being made by steel plate, contains the heat-barrier material of being made by ceramic fibre at this container; Aluminium is used as the material of main frame 22; Yet the material of main frame 22 and dividing plate 26 is not limited thereto.

By connector 24 driver element 28 is fixed on the main frame 22.In addition, shown in Fig. 2 C, driver element 28 is connected with main frame 22 by arm 285, and is arranged to drive the turning cylinder 280 that along continuous straight runs is provided with rotating manner.The bearing 284 that turning cylinder 280 is installed on the support member 282 supports, and is connected with rotational actuator 288 by connector 286, and wherein door support member 282 is arranged on the position near opening.In this structure, rotate about 90 degree by rotational actuator 288, make door 20 carry out opening shown in Fig. 2 B-closing motion.

Although what adopt in the present embodiment is the rotary door structure, the present invention also can be suitable for other structure, for example, makes a structure along last-following direction (vertical direction) slip.

Next, with reference to Fig. 3 A and Fig. 3 B, the structure of main frame 22 and dividing plate 26 is described.

Dividing plate 26 comprises that seal is configured between dividing plate and body of heater 12 such as liner 25 seals such as grade.

Dividing plate 26 is made of a plurality of partitions 262 with heat-proof quality that dispose continuously along its length.Although dividing plate 26 comprises 6 partitions 262 in the present embodiment, yet the quantity of partition 262 is not limited to 6.

Consider the thermal expansion of dividing plate 26, main frame 22 is designed to be longer than slightly dividing plate 26.In addition, main frame 22 is configured to so that the mode that each partition 262 can move freely along its length supports each partition 262.

With reference to Fig. 4 A and Fig. 4 B, the example of structure that makes each partition 262 can move freely (typical case is to slide) with respect to main frame 22 is described.Fig. 4 A is the sectional view of main frame 22 and partition 262, and Fig. 4 B is the vertical view of main frame 22 and partition 262.

Each partition 262 all is fixed on the support 264 of L shaped cross section, and support 264 is connected with pin 266 by relocation mechanism (for example, the slotted hole that forms at the length direction of support 264 upper edge doors 20 and the combination of the pin 266 that moves along slotted hole).Be provided with support 264 though the structure here is the summary central authorities at the length direction of each partition 262, support 264 also can be arranged on other place, for example, and at the both ends of each partition 262; Therefore, the position of support 264 and quantity can arbitrary decisions.

On the other hand, in the pre-position of main frame 22, slit 222 is set along its length, slit 222 is configured to make pin 266 embeddings also to keep cooperating within it.In the present embodiment, two partitions 262 that are positioned at dividing plate 26 central authorities are fixed on the main frame 22; Yet, be not limited thereto kind of a structure.

In addition, the structure that each partition 262 is moved freely with respect to main frame 22 structure that is not limited in the present embodiment to be adopted.For example, can adopt the structure that each partition 262 is moved along slit 222, rather than adopt the relocation mechanism between support 264 and pin 266.

According to said structure,, absorb the increment of elongation by the above-mentioned relocation mechanism that allows each partition 262 to move freely along the length direction of door 20 when each partition 262 during through expanded by heating.In addition, when dividing plate 26 because of the temperature difference between body of heater 12 inside and outside when crooked, because each partition 262 is out of shape separately, therefore the maximum defluxion (with reference to the arrow among Fig. 5 B 50) of the conventional dividing plate 30 that constitutes with one is compared, and the maximum defluxion of dividing plate 26 (with reference to the arrow among Fig. 5 A 40) significantly reduces.

As a result, because the maximum defluxion of dividing plate 26 can be suppressed to the deflection (for example, about 2mm) less than the liner 25 between body of heater 12 and door 20, even therefore when dividing plate 26 is slightly crooked, also can not reduce the heat-proof quality of door 20.Like this, even because dividing plate 26 is out of shape and the gap also can occur between body of heater 12 and door 20, and the sublimate that therefore can suppress atmosphere leakage and generation thereupon adheres to, thereby improved the precision that the body of heater temperature inside distributes.

In addition, in said structure, move arbitrarily in its moving range (size of slotted hole) because of thermal expansion, can on door 20, adopt the force application mechanism (for example, spring) of the power that each partition 262 applied towards predetermined direction for preventing each partition 262.

In office where just illustrative in the face of the above-mentioned explanation of embodiment, should not think restrictive.Scope of the present invention limits by claims rather than by the foregoing description.In addition, all changes and the doctrine of equivalents that is equal to claim on implication all is intended within the scope of the present invention.

Claims

1. annealing device comprises:

Be used to accommodate the body of heater of the workpiece of heat-treating;

The door that is connected with described body of heater; And

Driver element opens and closes described door, wherein when being configured in described workpiece is loaded into described body of heater and therefrom take out

Described door comprises:

Make the insulation part of described body of heater inside and external insulation, wherein said insulation part comprises a plurality of thermal insulation barriers that dispose continuously along the length direction of described door; And

Framing component is configured to can support described insulation part along the mode that described length direction moves freely with at least a portion in described a plurality of thermal insulation barriers, and is connected with described driver element.

2. annealing device according to claim 1, wherein

Described framing component comprises:

Guiding piece along described length direction formation; And

Relocation mechanism allows at least a portion in described a plurality of thermal insulation barriers to move freely along described guiding piece.