CN101718989A - Sampling inspection method - Google Patents
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- CN101718989A CN101718989A CN200810166486A CN200810166486A CN101718989A CN 101718989 A CN101718989 A CN 101718989A CN 200810166486 A CN200810166486 A CN 200810166486A CN 200810166486 A CN200810166486 A CN 200810166486A CN 101718989 A CN101718989 A CN 101718989A
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Abstract
The invention relates to a sampling inspection method suitable for a multi-product production line with multiple equipment, comprising the steps of: providing a tool record, wherein the tool record stores the sampling data of each equipment; then inspecting each sampling data of the tool record to fine at least one equipment without being sampled from the multiple equipment; then determining multiple product batches of at least one technological operation executed by one of the at least one equipment without being sampled; and finally determining at least one of the product batches for sampling inspection.
Description
Technical field
The present invention relates to a kind of methods of sampling, and particularly relate to a kind of sampling method.
Background technology
Have many processing steps on the semiconductor production line, for example film forms step, lithography process step etc., in addition, also has many checking procedures to check the result of more specific processing steps.
In a checking procedure, judge whether that via check one finished product or half-finished physical property defectiveness exists, and then whether inference various board states in the step before this product carries out are normal.Performed check program major part is pick test on the production line at present.Just set for the various board types that correspond to various different process steps different from the pick test ratio, and under this pick test ratio control, the random sampling product batches step of testing.Under the few situation of the technology board quantity of carrying out same processing step on the production line, this carries out the pick test mode of product batches according to sampling ratio, can reach in the short time, the process results of carrying out each board of each processing step all has much the same chance to be arrived by pick test.Yet, when production line enlarges, during the amplification of technology board quantity, thisly come the picked at random product batches step of testing with the pick test ratio, divide the processing step result of board just to be verified once blind spot for a long time generating unit.
Thus, when the technology board produces technological problems, and cause the product in the identical product batch to produce defective, and when the process results of this technology board is not by pick test just, will causes the product yield to descend, and reduce the confidence level of checking procedure.Yet, on production line, to finish the check of process results one by one with numerous technology boards, reach hundred-percent assay, can improve the complexity of check program again and elongate the execution required time of checking procedure.
Summary of the invention
Purpose of the present invention is providing a kind of sampling method exactly, in a default round of visits, can make each equipment all carry out pick test at least once, improves the confidence level of pick test.
Another object of the present invention provides a kind of sampling method, can reduce the time of pick test, to improve production capacity.
The present invention proposes a kind of sampling method, is applicable to the multiple product production line with a plurality of equipment, comprising: an equipment records (tool record) is provided, and wherein this equipment records stores a data from the sample survey of each described equipment.Afterwards, inspect each data from the sample survey in this equipment records, in described equipment, to find out at least one equipment of not sampling.Then, affirmation is via a plurality of product batches of described at least one of them the performed at least one technological operation of equipment of not sampling.At last, determine described at least product batches one of them, to carry out a pick test.
According to the described sampling method of embodiments of the invention, wherein each data from the sample survey writes down a up-to-date proving time of corresponding this equipment respectively.
According to the described sampling method of embodiments of the invention, a process equipment path of wherein carrying out this product batches of this pick test comprises at least two equipment of not sampling.
According to the described sampling method of embodiments of the invention, wherein the decision described at least product batches one of them, comprise also according to a preferential selective rule that with the step of carrying out this pick test this product batches of carrying out this pick test with decision is a preferential sampling product batches.Above-mentioned preferential selective rule comprises: this corresponding product of product batches of preferentially sampling has high product turnout.In addition, this preferential selective rule comprises: this product batches of preferentially sampling has a ready-made check program.Moreover this preferential selective rule comprises: a process equipment path of this product batches of preferentially sampling comprises the described equipment of not sampling at most.
According to the described sampling method of embodiments of the invention, wherein in this equipment records, become a plurality of equipment group according to the performed technology kenel of each described equipment with the described equipment that hives off, and each described device cluster group has a default round of visits respectively.The step of wherein finding out at least one this equipment of not sampling in described equipment also comprises: in each corresponding being somebody's turn to do in the default round of visits of described equipment group, one of them is this equipment of not sampling to find out described at least equipment in each described equipment group, and corresponding this data from the sample survey of this equipment of not sampling is not denoted as sampling.
According to the described sampling method of embodiments of the invention, wherein this equipment comprises a technology board.
According to the described sampling method of embodiments of the invention, wherein this equipment comprises a process cavity.
The present invention also proposes a kind of sampling method, is applicable to the multiple product production line with a plurality of equipment, comprising: an equipment records is provided, and wherein this equipment records stores a data from the sample survey of each described equipment.Afterwards, in a default round of visits, inspect each data from the sample survey in this equipment records, in described equipment, to find out at least one equipment of not sampling.Moreover, set a process equipment path, wherein this process equipment path comprises at least two equipment of not sampling.Continue it, according to this process equipment path, a predetermined product batches.Continue it, make this product batches finish a product manufacturing course according to this process equipment path.At last, to carry out a pick test, to check this product batches.
According to the described sampling method of embodiments of the invention, wherein each data from the sample survey writes down a up-to-date proving time of corresponding this equipment respectively.
According to the described sampling method of embodiments of the invention, wherein in this equipment records, become a plurality of equipment group according to the performed technology kenel of each described equipment with the described equipment that hives off, and each described device cluster group has a default round of visits respectively.Again, the step of wherein finding out at least one this equipment of not sampling in described equipment also comprises: in each corresponding being somebody's turn to do in the default round of visits of described equipment group, one of them is this equipment of not sampling to find out described at least equipment in each described equipment group, and corresponding this data from the sample survey of this equipment of not sampling is not denoted as sampling.
According to the described sampling method of embodiments of the invention, wherein this equipment comprises a technology board.
According to the described sampling method of embodiments of the invention, wherein this equipment comprises a process cavity.
In the present invention, knowing under the prerequisite of inspection machine data not that sampling specific products batch therefore can be in default round of visits, the equipment of all runnings all can be by pick test at least once on the production line.In addition, carry out pick test by passive mode sampling product batches, or active mode is set the process equipment path and batch is carried out pick test with selected specific products, can be via single sampling inspection, check the process results of a plurality of not inspection machines, therefore can significantly simplify the program and reduction required time of pick test, the production capacity of related raising production line of pick test.
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and be described with reference to the accompanying drawings as follows.
Description of drawings
Fig. 1 shows the general flow chart according to a kind of sampling method of a preferred embodiment of the present invention.
Fig. 2 shows the synoptic diagram according to a kind of equipment records of a preferred embodiment of the present invention.
Fig. 3 shows according to process equipment of a preferred embodiment of the present invention and processing step and concerns sketch.
Fig. 4 shows the general flow chart of a kind of sampling method of another preferred embodiment according to the present invention.
The reference numeral explanation
S101-S107, S401-S411: method flow step
200: equipment records
A, P, ST, C, SI, PA, SIN, H: equipment group
302,304,306,308: the process equipment path
Embodiment
Fig. 1 shows the general flow chart according to a kind of sampling method of a preferred embodiment of the present invention.Please refer to Fig. 1, having on the multiple product production line of a plurality of equipment (tool), at first, provide an equipment records (step S101), wherein this equipment records stores a per unit data from the sample survey (sampling data).Above-mentioned multiple product production line for example is the production line that can produce multiple different product simultaneously, and the equipment on this production line, then hive off (grouping), make equipment on the production line hive off into a plurality of equipment group according to the performed technology kenel of each equipment.Moreover above-mentioned each data from the sample survey writes down a up-to-date proving time of corresponding equipment respectively.
Fig. 2 shows the synoptic diagram according to a kind of equipment records of a preferred embodiment of the present invention.Please refer to Fig. 2, in this embodiment, list on the multiple product production line totally 70 equipment in this equipment records 200, and 70 equipment are hived off into A, P, ST, C, SI, PA, SIN and H totally 8 equipment groups according to the performed technology kenel of each equipment.Wherein, the said equipment for example is each process cavity (process chamber) in a technology board (machine) or the technology board.In addition, each device cluster group has a default round of visits respectively, and the setting of this default round of visits for example is according to the unusual rate of board, or sets according to the technology importance degree in this equipment group.In one embodiment, the technology importance degree height in equipment group, then the default round of visits of this equipment group is short more.In another embodiment, when the equipment total production in the equipment group was high more, then the default round of visits of this equipment group was short more.
In addition, please refer to Fig. 2, each equipment code name has a data from the sample survey respectively, to write down a up-to-date proving time of corresponding equipment.With equipment code name A01 is example, and the up-to-date pick test time of the product batches that device A 01 is relevant is 15: 30 of on September 30th, 2007 therewith.
Afterwards, please refer to Fig. 1, in step S103, inspect per unit each data from the sample survey that corresponds in the equipment records 200, to find out at least one equipment of not sampling in the equipment records 200.Just, in equipment records 200, in the corresponding default round of visits of each equipment group, the equipment in equipment group, be not to betide in this corresponding default round of visits of institute of equipment group its up-to-date proving time, and then the data from the sample survey with this equipment is denoted as not sampling.Please refer to Fig. 2, in one embodiment, in the equipment records 200, equipment PA10 among equipment ST09 among the ST of equipment group, the PA of equipment group and the equipment H01 among the H of equipment group, its up-to-date proving time is all non-to be betided in corresponding default round of visits of institute of equipment group under it, therefore the time of its last pick test just be denoted as not inspection machine (representing with runic frame line) far early than the pairing default round of visits of its corresponding device group in Fig. 2.
Then, in step S105, confirm a plurality of product batches via at least one performed at least one technological operation of equipment of not sampling.Fig. 3 shows according to process equipment of a preferred embodiment of the present invention and processing step and concerns sketch.Please refer to Fig. 3, in one embodiment, processing step comprises processing step 01, processing step 02, processing step 03 and processing step 04 in regular turn, and processing step 01 can be by device A 01 and device A 02 be carried out at least, processing step 02 can be undertaken by equipment ST06, equipment ST07, equipment ST08 and equipment ST09 at least, processing step 03 can be carried out to equipment PA10 by equipment PA05 at least, and processing step 04 can be undertaken by equipment H01 to H10 at least.
Find equipment ST09, equipment PA10 and equipment H01 to be inspection machine not by the equipment records 200 of Fig. 2, and in Fig. 3, show process equipment path (process tool path) 302,304 and 306, wherein process equipment path 302 is shown in the product batches lot17 that carries out processing step 04 among the equipment H01, be to carry out processing step 02 at equipment ST07 earlier, carry out processing step 03 at equipment PA10 afterwards, just the process equipment path of product batches lot 17 comprises two not inspection machine PA10 and H01.In addition, process equipment path 304 is shown in the product batches lot18 that carries out processing step 04 among the equipment H03, be to carry out processing step 02 at equipment ST09 earlier, carry out processing step 03 at equipment PA10 afterwards, just the process equipment path of product batches lot 18 comprises two not inspection machine ST09 and PA10.Moreover, process equipment path 306 is shown in the product batches lot20 that carries out processing step 04 among the equipment H04, be to carry out processing step 02 at equipment ST09 earlier, carry out processing step 03 at equipment PA09 afterwards, just the process equipment path of product batches lot 20 comprises a not inspection machine PA09.Therefore product batches lot 17, product batches lot 18 criticize 20 of lot with product and are confirmed to be the product batches of carrying out at least one technological operation step via at least one not sampling equipment.
Afterwards, please refer to Fig. 1, in step S107, determine at least one product batches, to carry out a pick test.Preferably, the process equipment path of carrying out the product batches of pick test comprises at least two equipment of not sampling.In another embodiment, the decision product batches also comprises according to a preferential selective rule with the step of carrying out this pick test, with decision carry out pick test product batches one of them serve as the product batches of preferentially sampling.And above-mentioned preferential selective rule comprises: the corresponding product of the product batches of preferentially sampling has high product turnout.In addition, in another embodiment, preferential selective rule comprises: the product batches of preferentially sampling has a ready-made check program (ready-to-inspect recipe).In addition, in another embodiment, preferential selective rule comprises: a process equipment path of the product batches of preferentially sampling comprises the equipment of not sampling at most, therefore can be by single single-sampling inspection, reach the purpose of a plurality of sampling of sampling equipment, just in Fig. 3, the process equipment path of product batches lot 17 comprises two not inspection machines, therefore according to preferential selective rule, product batches lot 17 becomes preferential sampling product batches.
In the above-described embodiments, after inspecting equipment records 200 and finding out not inspection machine, after product batches is finished manufacturing course, directly select the technology device path comprise at least one not the product batches of inspection machine carry out pick test.The method of just above-mentioned pick test product batches belongs to passive type,, is picking out suitable product batches and is carrying out pick test via its process equipment path through after inspection machine does not carry out required processing step in product batches.Yet the present invention is not limited to above-mentioned passive type pick test mode.
Fig. 4 shows the general flow chart of a kind of sampling method of another preferred embodiment according to the present invention.Please refer to Fig. 4, in another embodiment, at first provide an equipment records (step S401), wherein stored data from the sample survey is classified (as shown in Figure 2) with kenel and storage in this equipment records, all, therefore do not give unnecessary details at this with identical described in the foregoing description.
Afterwards, in step S403, inspect each data from the sample survey in this equipment records, in equipment records, to find out at least one equipment of not sampling.Wherein, the method for finding out the equipment of sampling describes in detail in the step S103 of the foregoing description, does not therefore give unnecessary details at this.
Continue it, in step S405, set a process equipment path, continue it, at step S407, according to the process equipment path that sets, a predetermined product batches.Wherein the process equipment path comprises at least two equipment of not sampling.Just, please refer to Fig. 3 and Fig. 4, be pursuant to the not inspection machine (as shown in Figure 2 equipment ST09, PA10 and H01) that is found among the step S403, the process equipment path that one of programming of active is included at least two equipment of not sampling, preferably this process equipment path (process equipment path 308 as shown in Figure 3) comprises all equipment of not sampling (equipment ST09, PA10 and H01).Just be shown among Fig. 3, set a process equipment path 308, and according to 308 corresponding product types of device path, carry out processing step 01 and becheduled for device A 02, and do not carry out processing step 02 as yet, the product batches lot 32 of processing step 03 and processing step 04 as after the product batches of a pick test.
Afterwards, please continue, in step S409, make product batches lot 32 finish a product manufacturing course according to the process equipment path 308 that sets with reference to Fig. 3 and Fig. 4.Then, in step S411, carry out a pick test for product batches lot 32.Because product batches lot 32 finishes the product manufacturing course according to the process equipment path 308 that sets, and the process equipment path 308 that sets comprises most not inspection machine, therefore promptly can reach the purpose of the process results of checking a plurality of not inspection machines simultaneously by single single-sampling inspection product batches lot 32.Therefore can significantly simplify the program of carrying out pick test, and reduce the required time that carries out pick test, improve overall throughput.
In the present invention, at any time upgrade up-to-date data from the sample survey by equipment records, and by being informed in the equipment records in the default round of visits, do not upgrade the not inspection machine of data from the sample survey, knowing under the prerequisite of inspection machine data not, sampling certain products batch is to reach the purpose of the process results of checking a plurality of equipment simultaneously.Owing to be to know under the prerequisite of inspection machine data not, sampling specific products batch, therefore can be in default round of visits, the equipment of all runnings all can be by pick test at least once on the production line, therefore can solve part board that random sampling (random sampling) produces pick test blind spot once just for a long time.In addition, carry out pick test by passive mode sampling product batches, or active mode is set the process equipment path and batch is carried out pick test with selected specific products, can be via single sampling inspection, check the process results of a plurality of not inspection machines, therefore can significantly simplify the program and reduction required time of pick test, the production capacity of related raising production line of pick test.
Though the present invention discloses as above with preferred embodiment; but it is not in order to qualification the present invention, those skilled in the art, under the premise without departing from the spirit and scope of the present invention; when can doing some changes and modification, so protection scope of the present invention should be as the criterion with claim of the present invention.
Claims (17)
1. a sampling method is applicable to the multiple product production line with a plurality of equipment, comprising:
One equipment records is provided, and wherein this equipment records stores a data from the sample survey of each described equipment;
Inspect each data from the sample survey in this equipment records, in described equipment, to find out at least one equipment of not sampling;
Affirmation is via a plurality of product batches of described at least one of them the performed at least one technological operation of equipment of not sampling;
Determine described at least product batches one of them, to carry out a pick test.
2. sampling method as claimed in claim 1, wherein each data from the sample survey writes down a up-to-date proving time of corresponding this equipment respectively.
3. sampling method as claimed in claim 1, a process equipment path of wherein carrying out this product batches of this pick test comprises at least two equipment of not sampling.
4. sampling method as claimed in claim 1, wherein the decision described at least product batches one of them, comprise also according to a preferential selective rule that with the step of carrying out this pick test this product batches of carrying out this pick test with decision is a preferential sampling product batches.
5. sampling method as claimed in claim 4, wherein this preferential selective rule comprises: this corresponding product of product batches of preferentially sampling has high product turnout.
6. sampling method as claimed in claim 4, wherein this preferential selective rule comprises: this product batches of preferentially sampling has a ready-made check program.
7. sampling method as claimed in claim 4, wherein this preferential selective rule comprises: a process equipment path of this product batches of preferentially sampling comprises the described equipment of not sampling at most.
8. sampling method as claimed in claim 1 wherein in this equipment records, become a plurality of equipment group according to the performed technology kenel of each described equipment with the described equipment that hives off, and each described device cluster group has a default round of visits respectively.
9. sampling method as claimed in claim 8, the step of wherein finding out at least one this equipment of not sampling in described equipment also comprises: in each corresponding being somebody's turn to do in the default round of visits of described equipment group, one of them is this equipment of not sampling to find out described at least equipment in each described equipment group, and corresponding this data from the sample survey of this equipment of not sampling is not denoted as sampling.
10. sampling method as claimed in claim 1, wherein this equipment comprises a technology board.
11. sampling method as claimed in claim 1, wherein this equipment comprises a process cavity.
12. a sampling method is applicable to the multiple product production line with a plurality of equipment, comprising:
One equipment records is provided, and wherein this equipment records stores a data from the sample survey of each described equipment;
Inspect each data from the sample survey in this equipment records, in described equipment, to find out at least one equipment of not sampling;
Set a process equipment path, wherein this process equipment path comprises at least two equipment of not sampling;
According to this process equipment path, a predetermined product batches;
Make this product batches finish a product manufacturing course according to this process equipment path;
To carry out a pick test, to check this product batches.
13. sampling method as claimed in claim 12, wherein each data from the sample survey writes down a up-to-date proving time of corresponding this equipment respectively.
14. sampling method as claimed in claim 12 wherein in this equipment records, become a plurality of equipment group according to the performed technology kenel of each described equipment with the described equipment that hives off, and each described device cluster group has a default round of visits respectively.
15. sampling method as claimed in claim 14, the step of wherein finding out at least one this equipment of not sampling in described equipment also comprises: in each corresponding being somebody's turn to do in the default round of visits of described equipment group, one of them is this equipment of not sampling to find out described at least equipment in each described equipment group, and corresponding this data from the sample survey of this equipment of not sampling is not denoted as sampling.
16. sampling method as claimed in claim 12, wherein this equipment comprises a technology board.
17. sampling method as claimed in claim 12, wherein this equipment comprises a process cavity.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810166486A CN101718989A (en) | 2008-10-09 | 2008-10-09 | Sampling inspection method |
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| CN200810166486A CN101718989A (en) | 2008-10-09 | 2008-10-09 | Sampling inspection method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102445934A (en) * | 2011-10-17 | 2012-05-09 | 上海华力微电子有限公司 | Defect monitoring method based on connection with internal process information of machine |
| CN102707168A (en) * | 2012-05-21 | 2012-10-03 | 上海华力微电子有限公司 | Defect monitoring method based on equipment maintenance risk control |
| WO2016004598A1 (en) * | 2014-07-10 | 2016-01-14 | 华为技术有限公司 | Product sampling inspection method, apparatus and system |
| CN105489520A (en) * | 2014-09-18 | 2016-04-13 | 中芯国际集成电路制造(上海)有限公司 | Small sampling system-based wafer measuring sampling method |
-
2008
- 2008-10-09 CN CN200810166486A patent/CN101718989A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102445934A (en) * | 2011-10-17 | 2012-05-09 | 上海华力微电子有限公司 | Defect monitoring method based on connection with internal process information of machine |
| CN102707168A (en) * | 2012-05-21 | 2012-10-03 | 上海华力微电子有限公司 | Defect monitoring method based on equipment maintenance risk control |
| WO2016004598A1 (en) * | 2014-07-10 | 2016-01-14 | 华为技术有限公司 | Product sampling inspection method, apparatus and system |
| CN105489520A (en) * | 2014-09-18 | 2016-04-13 | 中芯国际集成电路制造(上海)有限公司 | Small sampling system-based wafer measuring sampling method |
| CN105489520B (en) * | 2014-09-18 | 2018-06-26 | 中芯国际集成电路制造(上海)有限公司 | A kind of wafer based on small sampling system measures the method for sampling |
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Application publication date: 20100602 |