CN101704499A - Manufacturing method of Mach-Zehnder interference microfluidic optical gyro chip - Google Patents
Manufacturing method of Mach-Zehnder interference microfluidic optical gyro chip Download PDFInfo
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Abstract
The invention provides a technical manufacturing method of microfluidic optical gyro, relating to a novel integrated manufacturing method of the optical gyro structure operated with electric control signal based on microfluidic technology. In the invention, the integrated manufacturing of a sandwich structure comprising an upper cover plate (11), a micro air pump layer (12), an optical waveguide layer (13) and a lower bottom plate (14) can be realized by adopting the steps of machining, preparing PDMS microfluidic chips, coating film and sealing, so as to realize the microfluidic optical gyro chip structure. The main steps of the integrated manufacturing method comprise four basic processes of manufacturing the optical waveguide layer, manufacturing the micro air pump layer, coating the film and sealing the chip, wherein the upper cover plate, the optical waveguide layer and the lower bottom plate all adopt polydimethylsiloxane (PDMS); the upper cover plate and the lower bottom plate of the structure both need to be coated with reflecting film and need to be improved by coating polyvinyl alcohol (PVA).
Description
Technical field
The present invention relates to a kind of preparation method of novelty, belong to Fibre Optical Sensor integrated technology field based on the Mach-Zehnder interfere type optical gyroscope chip of microflow control technique.
Background technology
Micro-fluidic optical is a significant new technology, it combines modern microflow control technique and low-light electronic technology, develop a class and can change, have the optical integrated device and the system of structural rearrangement and adaptive adjustment capability, will have important application prospects in fields such as sensing, communication, information processings according to external environment.
The optical gyroscope field that is widely used comprises defence and military, engineering survey, oil drilling, flight navigation, GPS location and Study of Intelligent Robot Control etc.At present having developed into optical fibre gyro and integrated optical gyroscope is the new stage of sign, and is subjected to the extensive concern of various application.Various types of optical fibre gyros, its basic principle all are to utilize the Sagnac effect, the position of just being adopted separately mutually or frequency demodulation mode difference, perhaps to the noise compensation method difference of optical fibre gyro.According to the sagnac effect, as Fig. 1, an annular light path between the two row light waves of propagating in opposite directions in the light path, will produce optical path difference because of the inertia motion of light wave, thereby cause the interference of two bundle coherent light waveses when inertial space winds axle perpendicular to light path plane and rotates.For fibre optic gyroscope, light is propagated in medium, and its optical path difference is relevant with the refractive index of medium, and is also relevant with the tangent line speed of medium.Between the phasic difference of this optical path difference correspondence and the anglec of rotation speed certain inner link is arranged,, can determine anglec of rotation speed by detection and demodulation to the interference light intensity signal.Be exactly to adopt the optical gyroscope of little ring cavity structure to utilize Sagner (Sagnac) effect in this patent, produce optical path difference, obtain the information of rotational angular velocity.
Therefore, innovation part of the present invention is, combining behind the microflow control technique that microminiaturization for the traditional fiber gyro, integrated, cost degradation and high accuracy control provides may.
List of references:
1 neat achievement. to a kind of explanation [J] of Sagnac effect. grand celebration University of Petroleum journal, 2007,31 (3): 146-147.
2 Liang Geting, Hui Junjun, Li Yuping. gyrostatic development and application [J]. cruising missile, 2007,4:38-40.
3 Liu Lanfangs, Chen Gang, Jin nation is good. fibre optic gyroscope basic principle and classification [J]. modern defense technology, 2007,35 (2): 60-64.
4Vali?V，Shorthill?R?W.Fiber?Ring?Interferometer[J].Appl?Opt，1976，15：109-110.
5 beam loyalty, Zhao Rui. micro-fluidic optical and application thereof [J]. laser and photoelectronics progress [J] .2008,45 (6) .17-20.
6 Wu Chongqing. Light Wave Guide Theory [M]. second edition. Beijing: publishing house of Tsing-Hua University, 2005:190-226.
7D.Psaltis，S.Quake，C.H.Yang.Developing?optofluidic?technologythrough?the?fusion?of?microfluidics?and?optics[J].Nature，2006，442(7101)：381-386.
Summary of the invention
Technical problem: the objective of the invention is to propose a kind of preparation method, solve the integrated preparation method problem of optical gyroscope, the implementation structure function based on the micro-fluidic little ring cavity optical gyroscope of Mach-Zehnder interfere type chip.
Technical scheme:
1, basic principle and chip structure:
Basic structure based on micro-fluidic little ring cavity optical circulator of the present invention as shown in Figure 2, it is the sandwich structure of " upper cover plate+micro air pump layer+light waveguide-layer+lower shoe ".In the cellular construction, ground floor is a upper cover plate, leaves steam vent, liquid injection hole and electrode hole above; The second layer is the micro air pump layer, and the micro air pump module is arranged on it, and with the steam vent of the corresponding coupling of aperture on the upper cover plate, liquid injection hole and electrode hole; The 3rd layer is light waveguide-layer, and except the fluid channel of utilizing the making of fluid channel technology, the middle part is that the liquid storage sulculus reaches the thread road that communicates with annular channel; The 4th layer is lower shoe, and the fulcrum of support system is arranged under lower shoe.In this structure, upper cover plate, light waveguide-layer and lower shoe all adopt dimethyl silicone polymer (PDMS).Consider the light transmission of PDMS material, the upper cover plate of structure, lower shoe all need to do shading treatment---promptly plate reflectance coating.Simultaneously, the hydrophobicity that the PDMS material is extremely strong need be improved by smearing polyvinyl alcohol (PVA) material.
Increased steam vent in this system architecture.Reason has 2 points, at first makes things convenient for entering of liquid injection hole liquid in little ring structure of sealing, avoids the capillarity of the counter-pressure resistance liquid of gas pressure intensity, helps controlling the flow of liquid simultaneously; Secondly,,, produce bubble and influence fiber waveguide and produce the light loss consumption, just need the non-polar gas of removal tubule and sulculus so enter fluid channel for fear of non-polar gas because PDMS permeates a little for most non-polar gases.When system moves, can inject liquid in runner by liquid injection hole, liquid can be selected silicone oil (1.41) for use, glycerine (1.47), benzene big and colourless, the transparent liquid of refractive index such as (1.50).Along with the injection of liquid, unnecessary gas can be discharged by steam vent in the runner.
Start micro air pump, can be by heating, the air cavity of the electrothermal resistance control air pump in the cooling air pump expands, shrinks, thus the liquid in the extruding annular channel at the uniform velocity streams it and flows.Beam of laser by the laser instrument emission enters in the parallel chamber of two-way of system through optical splitter, enter annular chamber by two couplers up and down, respectively with clockwise and counter clockwise direction, around one week of annular chamber, coupler by separately leaves annular chamber then, gets back to parallel chamber, and two light beams converge at last, according to the Sagnac effect, they can interfere.Use the photoelectric receiver measuring light intensity to change and can learn their phase difference, finally push away the size of system's angular velocity of rotation.
2, integrated chip preparation method:
The integrated making of the sandwich structure that adopt machining, make the PDMS micro-fluidic chip, plated film, involution realizes comprising upper cover plate, micro air pump layer, light waveguide-layer, lower shoe comprises that step is as follows:
1) making of light waveguide-layer: adopt the method for making photomask, by CAD design fluid channel, it is printed on the transparent film as mask, on silicon chip, get rid of and be coated with the skim photoresist, by ultraviolet exposure, the unexposed area developing solution dissolution, remaining protruding SU-8 structure is gone up as the formpiston of making the PDMS substrate in silicon chip and surface, the silicon male mold surfaces is handled with the silylating reagent of fluoridizing, and then the PDMS that solidifies is peeled off from formpiston, makes the substrate with certain microfluidic road;
2) on the PDMS film, produce steam vent, liquid injection hole and electrode hole with drill;
3) plated film: adopt evaporation coating technique to carry out plated film, heating target metal under vacuum, make its evaporating pressure surpass environmental pressure, thereby quicken evaporation, coated substrate be placed on source material in the vacuum chamber near, when steam touched colder substrate surface, metal vapors was compressed, and granule boundary grows rete on substrate.Adopt polyvinyl alcohol (PVA) tube wall coating to modify the fluid channel inwall again;
4) chip involution: the involution between four layers of the optical circulators, the i.e. involution of four layers of PDMS rete, these two kinds of involutions are all with the auxiliary bonding of plasma, make back and upper cover plate elder generation involution, break away from substrate, again with the light waveguide-layer involution. ultraviolet ray makes the photoresist exposure by photomask, the unexposed area developing solution dissolution. remaining protruding SU-8 structure is gone up as the formpiston of making the PDMS substrate in silicon chip and surface. can obtain higher depth-to-width ratio like this, its structure side wall is vertical with matrix surface. and this involution can be assisted bonding with plasma, oxygen plasma helps surface clean, can improve simultaneously the surface-active of chemical mobility of the surface, particularly polymeric material. the PDMS of oxygen plasma treatment can realize permanent involution.
Beneficial effect: according to above narration as can be known, the present invention has following characteristics:
The present invention directly utilizes and receives the liquid that rises magnitude in the fluid channel light wave is controlled, and has embodied the advantage of microflow control technique well, helps constructing the highly sensitive optical circulator of current expectation.
The innovation part is:
(1) owing to avoided by increasing the redundancy structure that fiber lengths increases optical path difference, it can integrated performance will improve greatly.
(2) but combine that the microflow control technique direct sensing is extraneous to be changed, this makes the range of application of this optical circulator extend to each sensitivity is required different fields.
(3) micro air pump is very low to circuit requirement, just can reach the effect that changes the conveying liquid velocity as long as change control voltage.
(4) can use multiple medium to measure repeatedly.
Description of drawings
Fig. 1 is the schematic diagram of SAGNAC effect.
Fig. 2 is a four-layer structure schematic diagram of the present invention.
Fig. 3 is a 3 D stereo profile of the present invention.
First electrode hole 1, liquid injection hole 2, steam vent 3, the second electrode holes 4, the first air pump module 5, the second air pump film piece 6, first coupler 7, second coupler 8, little ring cavity 9, fluid channel 10, upper cover plate 11, micro air pump layer 12, light waveguide-layer 13, lower shoe 14, PDMS15 are arranged among the figure.
The specific embodiment
The present invention proposes a kind of based on Mach-Zehnder interference type micro-fluidic optical GYROCHIP structure, and its structure adopts the sandwich structure of " upper cover plate+micro air pump layer+light waveguide-layer+lower shoe ".Wherein, the base material of upper cover plate, light waveguide-layer and lower shoe all is dimethyl silicone polymer (PDMS).PDMS has good light transmittance, dielectricity, and inertia, nontoxic, character such as easy processing, and cheap; Liquid on the light waveguide-layer in fluid channel, tubule and the liquid storage sulculus is selected the 201# methyl-silicone oil for use.The 201# methyl-silicone oil has that the sticking coefficient of temperature is little, high-low temperature resistant, anti-oxidant, flash-point is high, volatility is little, good insulating, surface tension are little, metal is not had characteristics such as burn into is nontoxic; Consider the light transmission of PDMS material, the upper cover plate of structure, lower shoe all need to do shading treatment---promptly plate reflectance coating.Simultaneously, the hydrophobicity that the PDMS material is extremely strong need be improved by smearing polyvinyl alcohol (PVA) material.PVA film good toughness, hot strength is big, and good weatherability can heat sealing.
The preparation method of Mach-Zehnder interference type micro-fluidic optical GYROCHIP of the present invention mainly is divided into the making of light waveguide-layer, making, plated film and four basic processes of chip involution of micro air pump layer:
1) making of light waveguide-layer: adopt the method for making photomask, by CAD design fluid channel, it is printed on the transparent film as mask, on silicon chip, get rid of and be coated with the skim photoresist, by ultraviolet exposure, the unexposed area developing solution dissolution, the formpiston that remaining protruding SU-8 structure is used to make the PDMS substrate is gone up on silicon chip and surface, the silicon male mold surfaces is handled with the silylating reagent of fluoridizing, and then the PDMS that solidifies is peeled off from formpiston, makes the substrate with certain microfluidic road.
Can see, micro-structural on the light waveguide-layer comprises waveguide microchannel, tubule structure and reservoir structure. wherein, the width of tubule has only several microns, helps raising speed like this, and tubule wall should be smooth. and these photomask equipment that require to make have very high resolution ratio.
2) making of micro air pump layer: the micro air pump among the design belongs to the hot gas power Micropump in the mechanical Micropump.The structure of Micropump is made up of a cavity, a pumping diaphragm, two passive check valves and a brake, and a side of cavity is sealed with an elastic membrane.This layer adopts dimethyl silicone polymer (PDMS) film to constitute.
3) on the PDMS film, produce steam vent, liquid injection hole and electrode hole with drill.
4) plated film: adopt evaporation coating technique to carry out plated film, heating target metal under vacuum, make its evaporating pressure surpass environmental pressure, thereby quicken evaporation, coated substrate be placed on source material in the vacuum chamber near, when steam touched colder substrate surface, metal vapors was compressed, and granule boundary grows rete on substrate.Adopt polyvinyl alcohol (PVA) tube wall coating to modify the fluid channel inwall again.
5) chip involution: the involution between four layers of the optical circulators, i.e. the involution of four layers of PDMS rete, these two kinds of involutions are made back and upper cover plate elder generation involution all with the auxiliary bonding of plasma, break away from substrate, again with the light waveguide-layer involution.Ultraviolet ray makes photoresist exposure, unexposed area developing solution dissolution by photomask.Remaining protruding SU-8 structure is gone up as the formpiston of making the PDMS substrate in silicon chip and surface.Can obtain higher depth-to-width ratio like this, its structure side wall is vertical with matrix surface.This involution can be assisted bonding with plasma, and oxygen plasma helps surface clean, can improve the surface-active of chemical mobility of the surface, particularly polymeric material simultaneously.The PDMS of oxygen plasma treatment can realize permanent involution.
Claims (1)
1. the preparation method of a Mach-Zehnder interference type micro-fluidic optical GYROCHIP, the integrated making of the sandwich structure of micro air pump layer (12), light waveguide-layer (13) and the lower shoe (14) that it is characterized in that adopting machining, make the PDMS micro-fluidic chip, plated film, involution realize comprising upper cover plate (11), constitutes by the PDMS film, its key step comprises:
1) making of light waveguide-layer: adopt the method for making photomask, by CAD design fluid channel, it is printed on the transparent film as mask, on silicon chip, get rid of and be coated with the skim photoresist, by ultraviolet exposure, the unexposed area developing solution dissolution, remaining protruding SU-8 structure is gone up as the formpiston of making the PDMS substrate in silicon chip and surface, the silicon male mold surfaces is handled with the silylating reagent of fluoridizing, and then the PDMS that solidifies is peeled off from formpiston, makes the substrate with certain microfluidic road;
2) on the PDMS film, produce steam vent, liquid injection hole and electrode hole with drill;
3) plated film: adopt evaporation coating technique to carry out plated film, heating target metal under vacuum, make its evaporating pressure surpass environmental pressure, thereby quicken evaporation, coated substrate be placed on source material in the vacuum chamber near, when steam touched colder substrate surface, metal vapors was compressed, and granule boundary grows rete on substrate.Adopt polyvinyl alcohol (PVA) tube wall coating to modify the fluid channel inwall again;
4) chip involution: the involution between four layers of the optical circulators, i.e. the involution of four layers of PDMS rete, these two kinds of involutions are made back and upper cover plate elder generation involution all with the auxiliary bonding of plasma, break away from substrate, again with the light waveguide-layer involution.Ultraviolet ray makes photoresist exposure, unexposed area developing solution dissolution by photomask.Remaining protruding SU-8 structure is gone up as the formpiston of making the PDMS substrate in silicon chip and surface.Can obtain higher depth-to-width ratio like this, its structure side wall is vertical with matrix surface.This involution can be assisted bonding with plasma, and oxygen plasma helps surface clean, can improve the surface-active of chemical mobility of the surface, particularly polymeric material simultaneously.The PDMS of oxygen plasma treatment can realize permanent involution.
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Cited By (5)
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| CN106767551A (en) * | 2016-11-18 | 2017-05-31 | 合肥工业大学 | The preparation method that a kind of micro-nano measuring apparatus use the highly sensitive elastic spring of high accuracy |
| CN107543934A (en) * | 2017-09-01 | 2018-01-05 | 中国电子科技集团公司第三十八研究所 | A kind of encapsulating structure of silicon substrate bio-sensing chip |
| CN108298497A (en) * | 2018-01-30 | 2018-07-20 | 中国电子科技集团公司第三十八研究所 | A kind of microfluid packaging method of silicon based photon biologic sensor chip |
| CN109669244A (en) * | 2018-11-27 | 2019-04-23 | 苏州席正通信科技有限公司 | A kind of three-dimensional optical waveguide production method based on 3D printing |
| CN111394236A (en) * | 2020-02-25 | 2020-07-10 | 华中科技大学 | Sensor for glucose detection and preparation and detection methods and devices thereof |
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2009
- 2009-11-05 CN CN200910185328A patent/CN101704499A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106767551A (en) * | 2016-11-18 | 2017-05-31 | 合肥工业大学 | The preparation method that a kind of micro-nano measuring apparatus use the highly sensitive elastic spring of high accuracy |
| CN107543934A (en) * | 2017-09-01 | 2018-01-05 | 中国电子科技集团公司第三十八研究所 | A kind of encapsulating structure of silicon substrate bio-sensing chip |
| CN108298497A (en) * | 2018-01-30 | 2018-07-20 | 中国电子科技集团公司第三十八研究所 | A kind of microfluid packaging method of silicon based photon biologic sensor chip |
| CN109669244A (en) * | 2018-11-27 | 2019-04-23 | 苏州席正通信科技有限公司 | A kind of three-dimensional optical waveguide production method based on 3D printing |
| CN109669244B (en) * | 2018-11-27 | 2022-04-12 | 北京快知行科技有限公司 | Three-dimensional optical waveguide manufacturing method based on 3D printing |
| CN111394236A (en) * | 2020-02-25 | 2020-07-10 | 华中科技大学 | Sensor for glucose detection and preparation and detection methods and devices thereof |
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Open date: 20100512 |