CN101702936A - Arc detecting apparatus and arc monitoring method using the same - Google Patents
Arc detecting apparatus and arc monitoring method using the same Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
- H01J37/32064—Circuits specially adapted for controlling the arc discharge
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- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
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- H05H1/26—Plasma torches
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- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3494—Means for controlling discharge parameters
Abstract
Provided are an arc detecting apparatus and an arc monitoring method using the same. The arc detecting apparatus includes a transmission line connected to a load, and transmitting an electrical signal of a current or voltage, a detector measuring the electrical signal of the current or voltage of the transmission line, and a processor processing the electrical signal to generate at least one arc detection signal. Herein, the arc detection signal is generated corresponding to an arc generated in the load.
Description
The cross reference of related application
The application requires in the right of priority of the 10-2007-0056103 korean patent application of submission on June 08th, 2007, and by reference its full content is incorporated at this.
Technical field
The present invention relates to be used to produce the electric discharge device of plasma, more particularly, relate to by using radio frequency (radio frequency, the RF) electric arc detecting device of the electric discharge device of power supply generation plasma, and the Electric arc monitoring method of using this electric arc detecting device.
Background technology
Plasma processing apparatus is widely used in semiconductor fabrication process, material surface processing, air pollutants are handled and examine fusion etc.Especially, the plasma processing apparatus that uses in semiconductor fabrication process mainly adopts the RF power supply to produce plasma.
In the Cement Composite Treated by Plasma of using the RF power supply,, then can produce the electric arc of the stability decreases that makes Cement Composite Treated by Plasma in arc chamber if fault of construction or granule are arranged.Especially, use under the situation of plasma processing apparatus when making semiconductor device, described electric arc can cause producing other granule, thereby causes bad semiconductor device.
Therefore, for the stability that monitoring of plasma is handled, need a kind of technology to monitor whether produced electric arc in the arc chamber.According to typical monitoring method, can monitor the generation of electric arc by the analysis of plasma optics characteristic., this optical monitoring method has the technical limitation that is difficult to judge the electric arc type.More specifically, the electric arc that produces in arc chamber can be divided into two types, and wherein, one type is the miniature electric arc that allows to reach predetermined level, and another kind of type is to need the large-scale electric arc of response in time., described optical monitoring method is difficult to provide the information about the electric arc type.In addition,, must on the arc chamber sidewall, be formed for observing the window of plasma emission, still,, make the pollution of the window that the stability of light signal worsens become more and more serious along with the increase in processing time for the generation of optical monitoring electric arc.
Though be furnished with in arc chamber under the situation that is used to monitor the pick-up unit that electric arc produces and can use another monitoring method, this monitoring method need be transformed the structure of arc chamber, and plasma mass is worsened.
Summary of the invention
The invention provides the electric arc detecting device that to monitor electric arc generation and Cement Composite Treated by Plasma in real time.
The present invention also provides and need not to change the electric arc detecting device that the arc chamber structure just can be monitored electric arc generation and Cement Composite Treated by Plasma.
The present invention also provides the method for real-time monitoring electric arc generation and Cement Composite Treated by Plasma again.
The present invention also provides and need not to change the method that the arc chamber structure just can be monitored electric arc generation and Cement Composite Treated by Plasma.
Embodiments of the invention provide a kind of electric arc detecting device, and described electric arc detecting device comprises: the transmission line that is connected to the electric signal of load and transmission voltage or electric current; Measure the detecting device of electric signal of the curtage of described transmission line; And described electric signal handled so that produce the processor of at least one arc detection signal, wherein, described arc detection signal produces corresponding to the electric arc that produces in described load.
In other embodiment of the invention, a kind of Electric arc monitoring method is provided, described method comprises the steps: to measure the electric signal by the curtage of the transmission line that is connected to load; By being handled, described electric signal produces at least one arc detection signal corresponding with the electric arc that in described load, produces; Judge the generation of the electric arc in the described load by analyzing described arc detection signal; And judge the electric arc type by analyzing described arc detection signal.
According to the present invention, the electric current of transmission line and the electric signal of voltage are measured.The result, electric arc, plasma characteristics variation and noise can be made a distinction, electric arc detecting device can be installed in the discharge system, the first type electric arc and the second type electric arc can be made a distinction, and can monitor in real time electric arc generation and Cement Composite Treated by Plasma.Therefore, the stage is detected the unusual of Cement Composite Treated by Plasma in the early stage.
Description of drawings
The included accompanying drawing of the present invention provides further to be understood the present invention, is introduced into this instructions and constitutes the part of this instructions.Accompanying drawing has been described exemplary embodiment of the present invention, and is used from explanation principle of the present invention with the explanation of carrying out.In the accompanying drawings:
Fig. 1 shows the block diagram of schematic structure of the electric arc detecting device of the embodiment of the invention;
Fig. 2 shows the block diagram of the schematic structure of processor among Fig. 1 and preprocessor;
Fig. 3 is the block diagram of the processor of the embodiment of the invention;
Fig. 4 shows the process flow diagram of the Electric arc monitoring method of the embodiment of the invention;
Fig. 5 shows the oscillogram of the electric arc detecting device of the embodiment of the invention;
Fig. 6 is the block diagram of the reference signal converter of the embodiment of the invention;
Fig. 7 shows the oscillogram of the electric arc detecting device of the embodiment of the invention;
Fig. 8 is the block diagram of the processor of the embodiment of the invention;
Fig. 9 shows the oscillogram of the electric arc detecting device of the embodiment of the invention;
Figure 10 is the block diagram of the processor of the embodiment of the invention;
Figure 11 shows the oscillogram of the electric arc detecting device of the embodiment of the invention;
Figure 12 is the block diagram of the processor of the embodiment of the invention; And
Figure 13 shows the oscillogram of the electric arc detecting device of the embodiment of the invention.
Embodiment
Can understand purpose of the present invention, other purpose, feature and advantage with reference to accompanying drawing easily by preferred embodiment.Yet the present invention can implement and be not limited to embodiment described herein with different forms.On the contrary, these embodiment that provide are of the present invention thoroughly open and complete in order to make, and give full expression to scope of the present invention to those of ordinary skills.
Electric arc can be divided into miniature electric arc and large-scale electric arc.When producing large-scale electric arc, whole electrical characteristics of the plasma of RF discharge significantly change.Because between ground and the electrode in arc chamber highdensity ionization can take place.Therefore, when producing large-scale electric arc, the RF discharge is unstable on the whole, and perhaps the RF discharge can not be kept.Constant applying under the situation of importing electric energy in the load, when producing large-scale electric arc, the electric current of transmission line increases sharply, and the voltage of transmission line reduces.In addition, when producing large-scale electric arc, the electric current of transmission line increases, but the voltage of transmission line is constant.
The duration of the large-scale electric arc in the plasma can be several nanoseconds, but the duration of the curtage of described transmission line increases to several microseconds.Along with the generation of large-scale electric arc, the electric signal of transmission line is by the electric signal disturbance from steady state (SS).The disturbance component that is caused by the generation of described large-scale electric arc can be the 100KHz in the frequency space.When producing described large-scale electric arc, the input impedance of the RF power supply feeding terminal on the load direction changes immediately.Yet very short and make input impedance can't restore under the situation for previous status in duration of large-scale electric arc, although produced large-scale electric arc, matching network also may be constant., if can not keep the RF discharge owing to the generation of large-scale electric arc, then matching network may change.Therefore, when producing large-scale electric arc, if the RF discharge is kept, then the variation of load is depended in the input impedance of power supply feeding terminal.
When producing miniature electric arc, the electric current and the voltage of described transmission line all reduce, and the RF discharge can be kept finely.The generation of miniature electric arc is the early stage phenomenon that occurred before the generation of large-scale electric arc.When producing miniature electric arc, the electric current of described transmission line and the duration of voltage are several microseconds.Along with the generation of described miniature electric arc, the electric signal of transmission line is by the electric signal disturbance from steady state (SS).The disturbance component that is caused by the generation of miniature electric arc is the 1MHz in the frequency space.When producing miniature electric arc, the input impedance of RF power supply feeding terminal changes immediately.Yet input impedance is restored in several microseconds and is previous status, and matching network may be constant.Therefore, when producing miniature electric arc, the variation of load is depended in the input impedance of the power supply feeding terminal on load direction.
Not that the duration that is changed by the plasma characteristics that electric arc causes can be several milliseconds (msec) on transmission line.Therefore, can the variation according to plasma characteristics change matching network for the maximum power transmission.Therefore, when plasma characteristics changed, the variation of load and matching network was depended in the input impedance of the power supply feeding terminal on the load direction.
In fact, owing to electric arc is may be because of except above-mentioned reason other former thereby produce, thereby be difficult to electric arc is divided into large-scale electric arc and miniature electric arc clearly.Therefore, in the present invention, electric arc is divided into the first type electric arc and the second type electric arc.The first type electric arc is defined as the electric arc that under the little situation of the electric current of the current ratio steady state (SS) of transmission line, produces.The described first type electric arc can comprise above-mentioned miniature electric arc.The second type electric arc is defined as the electric arc that under the big situation of the electric current of the current ratio steady state (SS) of transmission line, produces.The described second type electric arc can comprise above-mentioned large-scale electric arc.
When producing electric arc, the electrical characteristics of transmission line change rapidly.Therefore, the investigation to the electrical characteristics of transmission line can provide detection whether to produce the most reliable means of electric arc.In addition, can monitor in real time the electrical characteristics of transmission line.
The electrical characteristics of described transmission line may be subjected to the generation of electric arc and the influence that plasma characteristics changes.Therefore, plasma characteristics variation and electric arc must be made a distinction.The duration that described plasma characteristics changes is the hundreds of millisecond, and the duration of electric arc is in several microseconds arrive the scope of hundreds of microsecond.Therefore, for plasma characteristics being changed and electric arc makes a distinction, preferably the duration of the variation of the electric current by the measurement transmission line and voltage and electric current and voltage is detected the generation of electric arc.
In addition, although can utilize input impedance, reflection parameters and the consumed power of transmission line to wait the generation that detects electric arc, described method is difficult to detect the type of electric arc, and also is difficult to plasma characteristics variation and electric arc are made a distinction.
With reference to the accompanying drawings exemplary embodiment of the present invention is elaborated.
Fig. 1 shows the block diagram of schematic structure of the electric arc detecting device of the embodiment of the invention.
With reference to Fig. 1, electric arc detecting device of the present invention comprises load 24, the RF power supply 10 to load 24 supply of electrical energy, transmission line 36 and matching network 38.Herein, transmission line 36 and matching network 38 can be arranged between described load 24 and the described RF power supply 10.Detecting device 22 is disposed in around the transmission line 36, and is electrically connected with the processor 25 that electric signal is carried out electric treatment, and the electric signal of the curtage of 22 pairs of transmission lines 36 of this detecting device is measured.In addition, described electric arc detecting device also comprises the generation of judging electric arc and the preprocessor 32 of electric arc type.Controller 34 can be controlled described electric arc detecting device.
Embodiment according to a modification of this invention, RF power supply 10 can be made of more than one power supply.For example, if RF power supply 10 is made of first power supply and second source, then the driving frequency of this first power supply is different with the driving frequency of this second source.In addition, described first power supply can be connected to identical load with second source.In this case, can between described first power supply and load, arrange first matching network and first detecting device, and can between described second source and load, arrange second matching network and second detecting device.Optionally, described first matching network and second matching network can be combined as a matching network, then can be at detecting device of load arranged in front.
The internal driving of RF power supply 10 can be 50 ohm (0hm), and the characteristic impedance of transmission line 36 can be 50 ohm.Transmission line 36 comprises at least a in concentric cable, two-wire, strip line (strip line) and the bus (bus bar).
Detecting device 22 comprises that at least one is arranged in transmission line 36 sensor on every side.Described sensor comprises at least one in current measurement device and the voltage measurement device, thereby described current measurement device is measured the electric current output current signal SI that flows in transmission line, thereby described voltage measurement device is measured the voltage output voltage signal SV of transmission line 36.Described current measurement device comprises the coil that is used to measure induction electromotive force (Induced Electro Motive Force).For example, but described current measurement device can be sieve Paderewski (Rogowski) coil that is used to measure induction electromotive force.The voltage measurement device can be the voltage divider that utilizes electrode or resistor.
Fig. 2 shows the block diagram of the schematic structure of processor shown in Figure 1 25 and preprocessor 32.
According to the present invention, processor 25 can comprise at least one in first current processor, second current processor and the voltage processor.Described first current processor and second current processor are configured to be connected to above-mentioned current measurement device, thereby generate arc detection signal OUT1 and OUT2 from current signal SI.Described voltage processor is configured to be connected to above-mentioned voltage measurement device, thereby generates arc detection signal OUT3 from voltage signal SV.(that is, electric current and voltage outside the difference of) difference and method that each signal is handled, first current processor, second current processor and voltage processor have similar structure in fact except the kind of input signal.Therefore, for fear of the complexity of explanation, the basic structure to the processor 25 that is configured to generate an arc detection signal describes below.
See figures.1.and.2, thereby processor 25 can comprise that at least one is configured to produce the reference signal generating unit 44 of reference signal REF, comparison signal generating unit 40 that at least one is configured to produce comparison signal IN is configured to make reference signal REF to compare the comparing section 42 that produces arc detection signal OUT with comparison signal IN with at least one.Reference signal REF and comparison signal IN can use electric signal to generate.
More specifically, comparison signal generating unit 40 receives the current signal SI or the voltage signal SV of detecting devices 22, thereby output has the comparison signal IN (below be called electric arc causes disturbance component or electric arc causes the forcing frequency component) of the disturbance component that is caused by electric arc.That is to say that comparison signal IN comprises that electric arc causes the forcing frequency component.Comparison signal IN does not comprise the driving frequency component, but can comprise the frequency component that is caused by DC component or plasma characteristics variation.Electric arc causes disturbance component and represent the current signal SI that caused by the electric arc that produces or the frequency component of voltage signal SV in load 24.
Reference signal generating unit 44 can be configured to export the current signal SI of self-detector 22 or the reference signal REF of voltage signal SV.At this moment, the electric arc among the comparison signal IN causes disturbance component and is not comprised among the reference signal REF.According to embodiments of the invention, reference signal generating unit 44 can be configured to handle output reference signal REF by the offset signal of using controller 34 to one among current signal SI or the voltage signal SV.IN is similar with comparison signal, reference signal REF does not comprise the driving frequency component of RF power supply 10, but can comprise and removed the low frequency component that electric arc causes disturbance component.That is, reference signal REF can comprise the frequency component that is caused by the plasma characteristics variation.
Comparison signal generating unit 40 can comprise with in the lower member at least one: be configured to electric signal carry out rectification the comparison signal rectifier, be configured to from electric signal, extract the comparison signal converter that electric arc causes the comparison signal wave filter of disturbance component and is configured to the amplitude or the polarity of electric signal are changed.
Similarly, reference signal generating unit 44 can comprise with in the lower member at least one: be configured to electric signal carry out rectification the reference signal rectifier, be configured to from electric signal, remove the reference signal converter that electric arc causes the reference signal wave filter of disturbance component and is configured to the amplitude or the polarity of electric signal are changed.Reference signal generating unit 44 can also comprise combiner and produce in the offset signal generating unit of offset signal at least one.Described combiner can be totalizer or subtracter.That is, described combiner can add or deduct two input signals, thereby exports addition or subtract each other the result.According to another embodiment of the present invention, described combiner can be configured to have operational amplifier.
Reference signal rectifier and comparison signal rectifier carry out rectification to the input signal of for example current signal SI or voltage signal SV respectively, thus output reference rectified signal and comparison rectified signal.Root drama inventive embodiment, each rectifier in these rectifiers can be the rectifier that utilizes diode, utilize the rectifier of multiplier and low-pass filter and utilize operational amplifier and the rectifier of wave filter in one.According to the rectifier that utilizes multiplier and low-pass filter, multiplier can in the hope of input signal square, and low-pass filter can extract low frequency component from the signal by multiplier output.According to another embodiment of the present invention, according to their function, reference signal rectifier and comparison signal rectifier can be half-wave rectifier (Half WaveRectifier), full wave rectifier (Full Wave Rectifier), root mean square (root meansquare, RMS) a kind of in detecting device and the peak detecting device.
Described reference signal wave filter is configured to remove electric arc and causes the forcing frequency component from input signal.Described reference signal wave filter can be active filter (active filter) or passive filter (passive filter).In addition, according to its function, described reference signal wave filter can be a kind of in low-pass filter (Low pass filter) or the bandpass filter (band pass filter).
Described reference signal converter can be configured to the amplitude or the polarity of input signal are changed.Described reference signal converter can be at least a in logarithmic amplifier, attenuator and the negative gain amplifier.
Described comparison signal wave filter can be configured to extract electric arc and cause the forcing frequency component from input signal.As a result, the frequency band by the comparison signal filter filtering is different from the frequency band by the reference signal filter filtering.The comparison signal wave filter can be active filter or passive filter.According to its function, described comparison signal wave filter can be a kind of in low-pass filter or the bandpass filter.
Described comparison signal converter can be configured to the amplitude or the polarity of input signal are changed.Described comparison signal converter can be at least a in logarithmic amplifier, attenuator and the negative gain amplifier.According to the present invention, the amplitude variations of the signal by the conversion of described comparison signal converter can be different from the amplitude variations by the signal of reference signal converter conversion.
According to embodiments of the invention, described reference signal generating unit 44 comprises as in the lower member at least one: be configured to electric signal carry out rectification the reference signal rectifier, be configured to from electric signal, remove the reference signal converter that electric arc causes the reference signal wave filter of disturbance component and is configured to the amplitude or the polarity of electric signal are changed.Described reference signal wave filter is configured to from causing disturbance component by extracting electric arc the electric signal of reference signal rectifier rectification, and described reference signal converter is configured to the amplitude or the polarity of the electric signal by the reference signal filter filtering are changed.
According to embodiments of the invention, described comparison signal generating unit 40 comprises as in the lower member at least one: be configured to electric signal carry out rectification the comparison signal rectifier, be configured to allow to comprise the comparison signal converter that the electric arc of electric signal causes the comparison signal wave filter of disturbance component and is configured to the amplitude or the polarity of electric signal are changed.The comparison signal wave filter is configured to from causing disturbance component by extracting electric arc the electric signal of comparison signal rectifier rectification.Described comparison signal converter can be changed the amplitude or the polarity of the electric signal by described comparison signal filter filtering.
Comparing section 42 makes comparison signal IN compare with reference signal REF, thus output arc detection signal OUT.Poor according between reference signal REF and the comparison signal IN, arc detection signal OUT has high level or low level, and the duration of arc detection signal OUT is proportional with the duration of the electric arc that produces in described load.According to one embodiment of present invention, comparing section 42 can be a kind of in comparer, no negative feedback loop operational amplifier and the differentiating amplifier.If it is big that described comparer just can be configured to the voltage of the negative " " terminal of the voltage ratio of "+" terminal, then output has the arc detection signal of high level, if and the voltage ratio of negative " " terminal just the voltage of "+" terminal is big, then output has low level arc detection signal.Comparison signal IN can import just "+" terminal of described comparer, and reference signal REF can import negative " " terminal.The operation of comparing section 42 has been carried out exemplary explanation embodying technological thought of the present invention, thereby can carry out various distortion it.
According to the present invention, as with reference to Fig. 1 explanation like that, preprocessor 32 can comprise as in the lower member at least one: electric arc produces judging part 46, and it judges electric arc generation by pulse width of measuring arc detection signal OUT1, OUT2 and OUT3; And electric arc type judging part 48, it is by comparing the symbol decision electric arc type of arc detection signal OUT1, OUT2 and OUT3.
Described arc detection signal can comprise and irrelevant noise component and the plasma characteristics change component of electric arc.Therefore, for the generation of the electric arc that judges rightly, must remove these components.Mainly the minimum widith than the pulse that is caused by electric arc is little for the pulse width that is caused by described noise component, and is changed the pulse width that causes by described plasma characteristics than the breadth extreme of the pulse that is caused by electric arc greatly.Utilize these characteristics, electric arc of the present invention produces judging part 46 and is configured to the judge generation of electric arc of situation in the mistake that is not caused by noise component and plasma characteristics change component.
According to one embodiment of present invention, electric arc produce judging part be 46 programmable logic devices that can comprise the pulse width of measuring arc detection signal (programmable logicdevice, PLD).For example, PLD can comprise the pulse width measuring device, if the level of arc detection signal OUT1, OUT2 and OUT3 is different from fiduciary level, and then this pulse width measuring device work.In this case, the width of described signal can be determined by the running time of described pulse width measuring device.Relevant with the generation of electric arc wrong minimized in order to make, described electric arc produces judging part 46 can comprise whether the pulse width that is configured to judge arc detection signal is present in the circuit between first datum width and second datum width.
More specifically, described first datum width can be several microseconds.Described second datum width can be the hundreds of microsecond.As mentioned above, if the pulse width of arc detection signal less than first datum width, then this arc detection signal is that the possibility of noise component is very big.Otherwise, if the pulse width of arc detection signal greater than second datum width, then this arc detection signal may be to change the component cause by plasma characteristics.Therefore, when detection signal may be a noise component or when changing the component cause by plasma characteristics, electric arc produces judging part 46 and does not generate electric arc and produce signal.Described first datum width and described second datum width can be set by controller 34, and various selections can according to circumstances be arranged.
Electric arc type judging part 48 can compare the first arc detection signal OUT1 of current signal, the second arc detection signal OUT2 of current signal and the 3rd arc detection signal OUT3 of voltage, thereby distinguishes the first type electric arc and the second type electric arc.When producing the first type electric arc, the electric current and the voltage of transmission line all descend.Otherwise when producing the second type electric arc, the electric current of described transmission line increases and voltage decline.Optionally, when producing the second type electric arc, the electric current of described transmission line increases and voltage is constant.
Electric arc type judging part 48 of the present invention is configured to by using above-mentioned characteristic to judge that electric arc is the first type electric arc or the second type electric arc.Electric arc type judging part 48 detects the current signal that caused by electric arc and the change direction of voltage signal.
More specifically, when the logic state of the logic state of the second arc detection signal OUT2 of the first arc detection signal OUT1 of current signal or current signal or level and the 3rd arc detection signal OUT3 of voltage signal or level were identical, electric arc type judging part 48 judged that the electric arc that produces is the first type electric arc.Otherwise, when the logic state of the logic state of the second arc detection signal OUT2 of the first arc detection signal OUT1 of current signal or current signal or the 3rd arc detection signal OUT3 that level is different from voltage signal or level, electric arc type judging part 48 judges that the electric arc that produces is the second type electric arc.The symbol of the first arc detection signal OUT1, the second arc detection signal OUT2 and the 3rd arc detection signal OUT3 or level are along with negative " " terminal and just "+" terminal change of comparing section 42.
Embodiment according to a modification of this invention when if the logic state of the arc detection signal of electric current or level are low, then can be judged to be the first type electric arc with the electric arc that produces.Otherwise,, then the electric arc that produces can be judged to be the second type electric arc if when the logic state of the arc detection signal of electric current or level are higher.Promptly, if the first arc detection signal OUT1 of current signal has low state or level, then the electric arc that produces can be judged to be the first type electric arc, if the second arc detection signal OUT2 of current signal has higher state or level, then the electric arc that produces can be judged to be the second type electric arc.The symbol of the first arc detection signal OUT1, the second arc detection signal OUT2 and the 3rd arc detection signal OUT3 or level can be along with negative " " terminal and just "+" terminal changes of comparing section 42.
According to one embodiment of present invention, electric arc type judging part 48 also comprises the first type electric arc counter that the generation number of times of the first type electric arc is counted.Electric arc type judging part 48 bases are exported the first type electric arc count signal DISP1 by the generation number of times of the first type electric arc of the first type electric arc rolling counters forward.More specifically, when the generation number of times of the first type electric arc in the unit interval during greater than the benchmark number of times, electric arc type judging part 48 output caution signals.When the electric arc that produces is judged as the second type electric arc, the electric arc type judging part 48 outputs second type arc signal DISP2.The benchmark number of times that is used to generate the caution signal relevant with the first type electric arc can be by controller 34 controls.
According to one embodiment of present invention, programmable logic device can be used for the real-time monitoring that electric arc produces judging part 46 and electric arc type judging part 48.That is, the electric arc with above-mentioned technical characterictic produces judging part 46 and electric arc type judging part 48 can be integrated on the programmable logic device.
As mentioned above, processor 25 comprises at least one in first current processor, second current processor and the voltage processor.Each first current processor, second current processor and voltage processor can comprise reference signal generating unit 44, comparison signal generating unit 40 and the comparing section 42 that has illustrated with reference to Fig. 2.
According to a variant embodiment of the present invention, processor 25 can include only the voltage processor that voltage signal SV is handled and not comprise current processor.Yet, according to another variant embodiment of the present invention, processor 25 can comprise first current processor that current signal SI is handled and in second current processor at least one and do not comprise voltage processor.
Fig. 3 is the block diagram of first current processor 26 of the embodiment of the invention
With reference to Fig. 1, Fig. 2 and Fig. 3, first current processor 26 comprises comparison signal generating unit 40, reference signal generating unit 44 and comparing section 42.Comparing section 42 makes the first comparison signal IN1a of comparison signal generating unit 40 compare with the first reference signal REF1a of reference signal generating unit 44, thereby exports the first arc detection signal OUT1.
Comparison signal generating unit 40 comprises that the electric arc that electric signal is carried out the comparison signal rectifier 60 of rectification and allowed to comprise electric signal causes at least one in the comparison signal wave filter 62 of disturbance component.
Reference signal generating unit 44 comprise to electric signal carry out rectification reference signal rectifier 64, remove from electric signal that electric arc causes the reference signal wave filter 66 of disturbance component and reference signal converter 68 that the amplitude or the polarity of electric signal are changed at least one.
With reference to Fig. 3, comparison signal rectifier 60 received current signal SI, output is rectified signal RCT1a relatively.Comparison signal wave filter 62 receives relatively rectified signal RCT1a, and output comprises the first comparison signal IN1a of the forcing frequency component that is caused by electric arc.According to one embodiment of present invention, comparison signal wave filter 62 is configured to remove the driving frequency component of RF power supply 10 from compare rectified signal RCT1a.That is, the first comparison signal IN1a does not comprise the driving frequency component.
Reference signal wave filter 66 receives benchmark rectified signal RCT2a, and output has been removed the driving frequency component of RF power supply 10 and the preparation reference signal RE1a of the forcing frequency component that caused by electric arc.
When comparison signal wave filter 62 and reference signal wave filter 66 all were low-pass filter, the cutoff frequency of comparison signal wave filter 62 (cut off frequency) was than the cutoff frequency height of reference signal wave filter.When comparison signal wave filter 62 and reference signal wave filter 66 all are low-pass filter, the cutoff frequency of reference signal wave filter 66 can be set at enough low value (for example, about 10KHz), thereby make the information that does not comprise in the reference signal about electric arc.Otherwise, the cutoff frequency of comparison signal wave filter 62 can be set at the value (for example, about 250KHz) that allows to comprise in the comparison signal information relevant with electric arc.
The DC level of preparation reference signal RE1a and the DC level of the first comparison signal IN1a are similar, thereby directly relatively are not suitable for obtaining significative results between them.Here, the DC level represent not take place the reference level under the situation of signal distortion and the situation of the signal distortion that takes place to cause by electric arc under reference level between poor.Amplitude or the polarity of 68 pairs of preparations of reference signal converter reference signal RE1a are changed, and export the first reference signal REF1a.
Comparing section 42 makes the first comparison signal IN1a of comparison signal generating unit 40 compare with the first reference signal REF1a of reference signal generating unit 44, exports the first arc detection signal OUT1.Comparing section 42 can be operational amplifier and the comparer that does not have negative feedback loop.
Fig. 4 shows the process flow diagram of the Electric arc monitoring method of the embodiment of the invention.Shuo Ming Electric arc monitoring method is by realizing at the electric arc detecting device of Fig. 1 to Fig. 3 explanation below.According to another embodiment of the present invention, the Electric arc monitoring method of explanation comprises from the electric signal of using predetermined software to measure and judges the generation of electric arc and the step of electric arc type below.
With reference to Fig. 4, Electric arc monitoring method of the present invention comprises the steps: step S10, measures the electric signal of the curtage of the transmission line that is connected to load; Step S20, by electric signal is handled, produce with load at least one corresponding arc detection signal of electric arc generation; Step S32 by analyzing arc detection signal, judges the generation of the electric arc in the load; And step S34, by analyzing described arc detection signal, judge the electric arc type in the load.
Step S20 comprises: step S22 generates reference signal from electric signal; Step S24 generates comparison signal from electric signal; And step S26, reference signal is compared with comparison signal, generate arc detection signal.Described reference signal, comparison signal and arc detection signal can be by Fig. 1 to method generations illustrated in fig. 3.Similarly, can realize by Fig. 1 method extremely illustrated in fig. 3 the generation of described electric arc and the judgement of electric arc type.
Fig. 5 shows the oscillogram of the electric arc detecting device of the embodiment of the invention.Particularly, Fig. 5 shows the oscillogram of the signal that generates from the electric arc detecting device of first current processor 26 that comprises Fig. 3.Fig. 5 is the oscillogram from the signal of electric arc detecting device generation, and in this electric arc detecting device, reference signal rectifier 64 and comparison signal rectifier 60 use half-wave rectifiers and comparison signal wave filter 62 and reference signal wave filter 66 to use low-pass filters.According to the electric arc detecting device of present embodiment, reference signal wave filter 66 is low than the traffic filter 62 frequently low-pass filters of cutoff frequency.
Fig. 5 (a) shows from the waveform of the current signal SI of detecting device 22 outputs; Fig. 5 (b) shows from the waveform of the comparison rectified signal RCT1a of comparison signal rectifier 60 output with from the waveform of the benchmark rectified signal RCT2a of reference signal rectifier 64 outputs; Fig. 5 (c) shows from the waveform of the first comparison signal IN1a of comparison signal wave filter 62 output, from the waveform of the preparation reference signal RE1a of reference signal wave filter 66 outputs and from the waveform of the first reference signal REF1a of reference signal generating unit 44 outputs; Fig. 5 (d) shows from the waveform of the first arc detection signal OUT1 of comparing section 42 outputs; And Fig. 5 (e) shows from the waveform of the output signal DISP1 of the first type electric arc counter of electric arc type judging part 48 outputs.
With reference to Fig. 5 (a), detecting device 22 outputs are by measuring the current signal SI that electric current mobile in transmission line obtains.Current signal SI comprises and changes relevant information with plasma characteristics and the relevant information with electric arc.Current signal SI comprises the variation of the electric current of measurement, but can be with the form output of voltage after converting this current signal SI to voltage.The current signal SI that is caused by the first type electric arc A, B, C and D reduces sharp, is restored then to be fiduciary level.If the characteristic variations of plasma, then as shown in the duration between t3 and t4, the amplitude of current signal SI increases from V1 to V2/reduces.The duration (t2-t1) that the current signal SI that the duration (t4-t3) that plasma characteristics changes causes than the generation by electric arc changes is much longer.For plasma characteristics variation and electric arc are made a distinction, electric arc detecting device of the present invention utilizes the difference of duration.The duration of the described first type electric arc A, B, C and D is in several microseconds arrive the scope of hundreds of microsecond.
With reference to Fig. 5 (b), comparison signal rectifier 60 received current signal SI, the comparison rectified signal RCT1a of half-wave rectification has been carried out in output, and reference signal rectifier 64 received current signal SI, and the benchmark rectified signal RCT2a of half-wave rectification has been carried out in output.That is, relatively rectified signal RCT1a only has in the positive component of current signal SI or the negative component one.The frequency component that forcing frequency component that is caused by the first type electric arc and plasma characteristics change is not compared signal rectifier 60 and reference signal rectifier 64 is removed, but is comprised among comparison rectified signal RCT1a and the benchmark rectified signal RCT2a.
With reference to Fig. 5 (c), the first comparison signal IN1a of the driving frequency component of RF power supply 10 has been removed in 62 outputs of comparison signal wave filter from compare rectified signal RCT1a.The first comparison signal IN1a still has electric arc and causes disturbance component.For this reason, comparison signal wave filter 62 can be a low-pass filter.The cutoff frequency of low-pass filter 62 is the low 250KHz of driving frequency (13.56MHz) than power supply.When the cutoff frequency of comparison signal wave filter 62 is too low, may from the first comparison signal IN1a, lose about the information of electric arc.Preferably, low-pass filter 62 has driving frequency than power supply (for example, 13.56MHz) low cutoff frequency is (for example, 250KHz).That is, the first comparison signal IN1a have the information relevant with the gas ions characteristic variations and with the first type electric arc A, B, the C information relevant with D.In addition, when having the second type electric arc, the first comparison signal IN1a can comprise the information about the second type electric arc.
With reference to Fig. 5 (c), reference signal wave filter 66 is removed electric arc and is caused forcing frequency component and RF driving frequency component from benchmark rectified signal RCT2a, output preparation reference signal RE1a.Reference signal wave filter 66 is to have to remove the low-pass filter that electric arc causes the cutoff frequency of forcing frequency component, and this cutoff frequency can be 10KHz.Because duration of electric arc, to the scope of hundreds of microsecond, thereby the cutoff frequency of reference signal wave filter was preferably 10kHz in several microseconds.Preferably, reference signal wave filter 66 should be configured to can not make with plasma characteristics and change relevant information dropout.As a result, change relevant information because preparation reference signal RE1a has with the plasma characteristics that illustrates between duration t3-t4, thereby the DC level increases between the t4 at t3.That is, shown in Fig. 5 (c), preparation reference signal RE1a demonstrates the same DC level nature of image current signal SI, that is, preparation reference signal RE1a increases between t3 and t4.
With reference to Fig. 5 (c), shown in the DC bias voltage, the preparation reference signal RE1a and the first comparison signal IN1a have the substantially the same level that can not distinguish mutually.Reference signal converter 68 changes the amplitude of (for example, reducing) preparation reference signal RE1a with estimated rate, thereby generates the first reference signal REF1a that amplitude is different from the first comparison signal IN1a.The gain of reference signal converter 68 (g=REF1a/RE1a) can be by controller 34 controls.The gain of reference signal converter 68 can be in 0.1 to 0.8 scope.Because the first reference signal REF1a contains the information (seeing the duration between the t3 to t4) that plasma characteristics changes, thereby the DC level increases between t3 and t4.
With reference to Fig. 5 (d), comparing section 42 receives the first comparison signal IN1a and the first reference signal REF1a, and they are compared, and output causes the first relevant arc detection signal OUT1 of disturbance with electric arc then.Change relevant information because the first comparison signal IN1a and the first reference signal REF1a comprise with plasma characteristics, thereby comparing section 42 judges that it is not electric arc that plasma characteristics changes.Therefore, changing relevant information with plasma characteristics is not included among the first arc detection signal OUT1.As mentioned above, because being included among the first comparison signal IN1a, the disturbance component that is caused by the first type electric arc A, B, C and the D of current signal SI is not included among the first reference signal REF1a, thereby shown in the oscillogram of the first arc detection signal OUT1, pulse a, b, c and d have been produced corresponding to the generation of electric arc.According to one embodiment of present invention, after the characteristic variations of described plasma, produce under the situation D of electric arc, different corresponding to the width of the pulse d of the first arc detection signal OUT1 of electric arc D with pulse a, the b of the first arc detection signal OUT1 and the width of c before changing at described plasma characteristics.
With reference to Fig. 2 and Fig. 5 (e), preprocessor 32 receives the first arc detection signal OUT1, thereby measures the pulse width of this first arc detection signal OUT1, and judges whether pulse a, b, c and d are the results who is caused by electric arc.According to one embodiment of present invention, when pulse is judged as when relevant with electric arc, the electric arc type judging part 48 outputs first electric arc count signal DISP1, thus the generation number of times of electric arc is carried out stored counts.
Accompanying drawing 6 is block diagrams of the reference signal converter 68 of one embodiment of the invention.
With reference to Fig. 3 and Fig. 6, reference signal converter 68 comprises analog-digital converter (ADC) 70, microcontroller 74 and digital analog converter (DAC) 72.70 pairs of preparations of analog-digital converter reference signal RE1a samples, and it is converted to digital signal.Microcontroller 74 changes the amplitude of digital signal.Digital analog converter 72 receives the altered digital signal of amplitude, thus first reference signal of output simulating signal.Remain on below several microseconds by the sampling time with analog-digital converter 70, the profile of the first reference signal REFIa can be followed the variation of preparation reference signal RE1a profile.Controller 34 can be controlled microcontroller 74.
Fig. 7 shows the oscillogram of the Electric arc monitoring method of one embodiment of the present of invention.Particularly, Fig. 7 shows the waveform of the signal that generates from the electric arc detecting device that comprises first current processor 26 shown in Fig. 3.More specifically, Fig. 7 shows the oscillogram of the signal that generates in the electric arc detecting device of an embodiment, in described embodiment, reference signal rectifier 64 and comparison signal rectifier 60 use half-wave rectifier, comparison signal wave filter 62 uses bandpass filter, and reference signal wave filter 66 uses low-pass filter.According to present embodiment, the low cutoff frequency of comparison signal wave filter 62 arrives in the scope of 100Hz 10, and higher cutoff frequency is 250KHz, and the cutoff frequency of reference signal wave filter 66 is 10KHz.
At length, Fig. 7 (a) shows from the waveform of the current signal SI of detecting device 22 outputs; Fig. 7 (b) shows from the comparison rectified signal RCT1b of comparison signal rectifier 60 output with from the waveform of the benchmark rectified signal RCT2b of reference signal rectifier 64 outputs; Fig. 7 (c) shows from the first comparison signal IN1b of comparison signal wave filter 62 output, from the preparation reference signal RE1b of reference signal wave filter 66 outputs with from the waveform of the first reference signal REF1b of reference signal generating unit 44 outputs; Fig. 7 (d) shows from the waveform of the first arc detection signal OUT1 of comparing section 42 outputs; And Fig. 7 (e) shows from the waveform of the output signal DISP1 of the first type electric arc counter of electric arc type judging part 48 outputs.Succinct for what illustrate, for the repeat specification of having carried out, below they are carried out simple explanation with reference to Fig. 3 to Fig. 5.
With reference to Fig. 7 (c), shown in Fig. 5 (c), comparison signal wave filter 62 receives relatively rectified signal RCT1b, thereby output has been removed the DC component of RF power supply 10 and driving frequency component and comprised the first comparison signal IN1b that electric arc causes disturbance component.The first comparison signal IN1b does not comprise and the relevant information (t3 is to the duration of t4) of plasma characteristics variation, but comprises the information about the first type electric arc A, B, C and D.In addition, if there is the second type electric arc, then the first comparison signal IN1b comprises the information about the generation of the second type electric arc.
Shown in the image pattern 5 (c), preparation reference signal RE1b comprises and the relevant information of plasma characteristics variation, thereby the DC level increases between t3 and t4.Reference signal converter 68 can change the amplitude of preparation reference signal RE1b and at least one in the symbol, thereby generates the first reference signal REF1b.Reference signal converter 68 can be negative gain amplifier, and gain can controlled device 34 controls.The gain (g=REF1b/RE1b) of negative gain amplifier is in-1.0 to-0.1 scope.Therefore and since the first reference signal REF1b comprise that plasma characteristics changes during, thereby the DC level between t3 and t4 reduces.
With reference to Fig. 3 and Fig. 7 (d), comparing section 42 makes comparison signal IN1b compare with the first reference signal REF1b, thereby exports the first arc detection signal OUT1.As mentioned above, electric arc causes disturbance component and is included among the first comparison signal IN1b, and does not comprise among the first reference signal REF1b.Therefore, shown in Fig. 7 (d), the first arc detection signal OUT1 has pulse a, b, c and the d corresponding to the generation of electric arc.According to one embodiment of present invention, different with the width of the pulse a, the b that produce and c before the width of the corresponding pulse d of the electric arc that after described plasma characteristics changes, produces and the characteristic changing at described plasma.
Fig. 8 shows the block diagram of the processor of one embodiment of the invention.Succinct for what illustrate, for the repeat specification of having carried out, below they are carried out simple explanation with reference to Fig. 3 to Fig. 5.
With reference to Fig. 1, Fig. 2 and Fig. 8, the processor 25 of present embodiment can be used for first current processor, second current processor and voltage processor one.The first current processor 26c comprises comparison signal generating unit 40c, reference signal generating unit 44c and comparing section 42c.Comparing section 42c makes the first comparison signal IN1c of comparison signal generating unit 40c compare with the first reference signal REF1c of reference signal generating unit 44c, thereby exports the first arc detection signal OUT1.
Because this embodiment of the present invention is similar to the embodiment of Fig. 3 to Fig. 5, thereby following the distinctive feature of present embodiment is described.
Comparison signal generating unit 40c can comprise as in the lower member at least one: be configured to that electric signal is carried out the comparison signal rectifier 100 of rectification, the electric arc that is configured to allow to comprise electric signal and cause the comparison signal wave filter 102 of disturbance component and be configured to the amplitude of electric signal and at least one the comparison signal converter 104 changed in the polarity.
Reference signal generating unit 44c can comprise as in the lower member at least one: the reference signal rectifier 106 that is configured to electric signal is carried out rectification, be configured to from electric signal, remove the reference signal wave filter 108 that electric arc causes disturbance component, be configured to the amplitude of electric signal and at least one the reference signal converter 110 changed in the polarity, be configured to generate the offset signal generating unit 114 of offset signal OSc and be configured to the combined bias signal and the combiner 112 of the output signal of reference signal converter 110.
Offset signal generating unit 114 can generate offset signal OSc.The offset signal OSc of offset signal generating unit 114 can set by controller 34.
The reference signal PR1c of 112 pairs of conversions of combiner and the offset signal OSc that generates from offset signal generating unit 114 make up, thereby export the first reference signal REF1c.Combiner 112 uses operational amplifier.Combiner 112 can be totalizer or subtracter.
Comparing section 42c makes the first comparison signal IN1c compare with the first reference signal REF1c, thereby exports the first arc detection signal OUT1.
Accompanying drawing 9 shows the oscillogram of the electric arc detecting device of one embodiment of the invention.Particularly, Fig. 9 shows the oscillogram of the signal that the electric arc detecting device of the first current processor 26c from comprise Fig. 8 generates.More specifically, Fig. 9 shows the oscillogram of the signal that generates in the electric arc detecting device of an embodiment, in described embodiment, reference signal rectifier 106 and comparison signal rectifier 100 use the RMS detecting device, comparison signal wave filter 102 and reference signal wave filter 108 use low-pass filter, and comparison signal converter 104 and reference signal converter 110 use logarithmic amplifiers.According to present embodiment, comparison signal wave filter 102 has the cutoff frequency of 250KHz, and reference signal wave filter 66 has the cutoff frequency of 10KHz.
At length, Fig. 9 (a) shows from the waveform of the current signal SI of detecting device 22 outputs; Fig. 9 (b) shows from the waveform of the preparation comparison signal SN1c of comparison signal wave filter 102 output with from the waveform of the preparation reference signal RE1c of reference signal wave filter 108 outputs; Fig. 9 (c) shows from the waveform of the first comparison signal IN1c of comparison signal converter 104 output with from the waveform of the first reference signal REF1c of combiner 112 outputs; Fig. 9 (d) shows from the waveform of the first arc detection signal OUT1 of comparing section 42c output; And Fig. 9 (e) shows from the waveform of the output signal DISP1 of the first type electric arc counter of electric arc type judging part 48 outputs.Succinct for what illustrate, for the repeat specification of having carried out, below they are carried out simple explanation with reference to Fig. 3 to Fig. 5.
With reference to Fig. 9 (c), comparison signal converter 104 will prepare comparison signal SN1c and be converted to logarithm value, thereby export the first comparison signal IN1c.
With reference to Fig. 9 (c), reference signal converter 110 will prepare reference signal RE1c and be converted to logarithm value, thus the reference signal PR1c of output conversion.The reference signal PR1c of 112 pairs of conversions of combiner and the offset signal OSc that generates from offset signal generating unit 114 make up, thereby export the first reference signal REF1c.
The DC level of the reference signal PR1c of the first comparison signal IN1c and conversion has substantially the same size, thereby is difficult to they are made a distinction.Combiner 112 makes the reference signal PR1c addition of the conversion of the offset signal OSc of offset signal generating unit 114 and reference signal converter 110, thereby generates the first reference signal REF1c that can distinguish with the first comparison signal IN1c.Offset signal OSc can have negative level.
With reference to Fig. 9 (d), comparing section 42c makes the first comparison signal IN1c compare with the first reference signal REF1c, thereby output causes the first corresponding arc detection signal OUT1 of disturbance with electric arc.Because the information relevant with plasma characteristics is included among the first comparison signal IN1c and the first reference signal REF1c, thereby the information relevant with the plasma characteristics variation is not included among the first arc detection signal OUT1.Yet, is included among the first comparison signal IN1c and is not included among the first reference signal REF1c because electric arc causes disturbance component, thereby shown in Fig. 9 (d), the first arc detection signal OUT1 has pulse a, b, c and the d corresponding to the generation of electric arc.According to one embodiment of present invention, with the width of the corresponding pulse d of the electric arc that after plasma characteristics changes, produces with change at described plasma characteristics before the width of pulse a, the b of generation and c different.
Figure 10 is the block diagram of the processor of one embodiment of the invention.
With reference to Fig. 1, Fig. 2 and Figure 10, the processor 25 of present embodiment can be used for first current processor, second current processor and voltage processor one.The first current processor 26d comprises comparison signal generating unit 40d, reference signal generating unit 44d and comparing section 42d.Comparing section 42d compares the first comparison signal IN1d of comparison signal generating unit 40d and the first reference signal REF1d of reference signal generating unit 44d, thereby exports the first arc detection signal OUT1.
Comparison signal generating unit 40d comprises: subtracter 92; The first calculated signals portion 85, it is configured to received current signal SI, has the first signal calculated D_IN1d that electric arc causes disturbance component thereby generate; And secondary signal calculating part 91, it is configured to received current signal SI, has removed the second signal calculated D_IN2d that electric arc causes disturbance component thereby generate.Subtracter 92 receives the output signal of the first calculated signals portion 85 and secondary signal calculating part 91, thereby the difference between them is exported as the first comparison signal IN1d.
The first calculated signals portion 85 can comprise at least one in the first comparison signal rectifier 80, the first comparison signal wave filter 82 and the first comparison signal converter 84.Secondary signal calculating part 91 can comprise at least one in the second comparison signal rectifier 86, the second comparison signal wave filter 88 and the second comparison signal converter 90.
The current signal SI that the first comparison signal rectifier 80 receives detecting device 22 exports the first rectified signal RCT1d.The first comparison signal rectifier 80 can be the RMS detecting device.Root mean square (RMS) value of RMS detecting device output input signal.82 outputs first of the first comparison signal wave filter are filtering signal SN1d relatively, in this first comparison filtering signal SN1d, the driving frequency component of RF power supply 10 is removed from the first rectified signal RCT1d, and electric arc causes disturbance component and is comprised in this first relatively among filtering signal SN1d.
The first comparison signal converter, 84 receptions, the first comparison filtering signal SN1d compares the amplitude of filtering signal SN1d to first then and at least one in the polarity changed, thereby exports the first signal calculated D_IN1d.The first comparison signal converter 84 can be a logarithmic amplifier.The logarithm value of logarithmic amplifier output input signal.The first signal calculated D_IN1d comprise with plasma characteristics change relevant information and with the relevant information of the first type electric arc.In addition, if there is the second type electric arc, then the first signal calculated D_IN1d can comprise the information relevant with the generation of the second type electric arc.
The current signal SI that the second comparison signal rectifier 86 receives detecting device 22 exports the second rectified signal RCT2d.The second comparison signal rectifier 86 can be the RMS detecting device.Root mean square (RMS) value of RMS detecting device output input signal.The second comparison signal wave filter, 88 outputs, the second comparison filtering signal SN2d, in this second comparison filtering signal SN2d, the driving frequency component of RF power supply 10 and electric arc cause disturbance component and are removed from the second rectified signal RCT2d.
The second comparison signal converter, 90 receptions, the second comparison filtering signal SN2d compares the amplitude of filtering signal SN2d to second then and at least one in the polarity changed, thereby generates the second signal calculated D_IN2d.The second comparison signal converter 90 can be a logarithmic amplifier.The logarithm value of logarithmic amplifier output input signal.The second signal calculated D_IN2d can comprise and the relevant information of plasma characteristics variation.
Subtracter 92 receives the output signal of the first calculated signals portion 85 and secondary signal calculating part 91, thereby the difference between them is exported as the first comparison signal IN1d.Subtracter 92 can use differentiating amplifier.By using subtracter 92, can from the first comparison signal IN1d, remove changing relevant information with DC level and plasma characteristics.
Reference signal generating unit 44d the same with shown in the Fig. 2 to Fig. 5 of place, SI handles to current signal, thereby generates the first reference signal REF1d.Optionally, under situation about current signal SI not being handled, reference signal generating unit 44d can generate the first reference signal REF1d of constant level.
Figure 11 shows the oscillogram of the electric arc detecting device of one embodiment of the invention.Particularly, Figure 11 shows the oscillogram of the signal that generates from the electric arc detecting device of the first current processor 26d that comprises Figure 10.More specifically, Figure 11 shows the oscillogram of the signal that generates in the electric arc detecting device of an embodiment, in this embodiment, the first comparison signal rectifier 80 and the second comparison signal rectifier 86 use the RMS detecting device, the first comparison signal wave filter 82 and the second comparison signal wave filter 88 use low-pass filter, and the first comparison signal converter 84 and the second comparison signal converter, 90 use logarithmic amplifiers.According to present embodiment, the first comparison signal wave filter 82 has the cutoff frequency of 250KHz, and the second comparison signal wave filter 88 has the cutoff frequency of 10KHz.
At length, Figure 11 (a) shows from the waveform of the current signal SI of detecting device 22 outputs; Figure 11 (b) show from the output of the first comparison signal wave filter 82 first relatively filtering signal SN1d waveform and from second waveform of filtering signal SN2d relatively of the second comparison signal wave filter, 88 outputs; Figure 11 (c) shows from the waveform of the first signal calculated D_IN1d of the first comparison signal converter 84 output with from the waveform of the second signal calculated D_IN2d of the second comparison signal converter, 90 outputs; Figure 11 (d) shows from the waveform of the first comparison signal IN1d of subtracter 92 output with from the waveform of the first reference signal REF1d of reference signal generating unit 44d output; Figure 11 (e) shows from the waveform of the first arc detection signal OUT1 of comparing section 42 outputs; And Figure 11 (f) shows from the waveform of the output signal DISP1 of the first type electric arc counter of electric arc type judging part 48 outputs.
With reference to Figure 11 (b), the driving frequency component that the first comparison signal wave filter 82 generates RF power supplys 10 from the output signal RCT1d of the first comparison signal rectifier 80, removed and electric arc cause disturbance component involved the first filtering signal SN1d relatively.Yet, first relatively filtering signal SN1d comprise with plasma characteristics change relevant information (during the t3 to t4) and with the first type electric arc A, B, the C information relevant with D.In addition, if there is the second type electric arc, then the first comparison filtering signal SN1d can comprise the information relevant with the generation of the second type arc.
With reference to Figure 11 (b), the second comparison signal rectifier, 86 received current signal SI, export the root-mean-square value of the second rectified signal RCT2d, and the second comparison signal wave filter 88 receives the root-mean-square value of the second rectified signal RCT2d, and the driving frequency component of RF power supply 10 and the signal that electric arc causes disturbance component have been removed in output.The output signal SN2d of the second comparison signal wave filter 88 can comprise and the relevant information (during the t3 to t4) of plasma characteristics variation.
With reference to Figure 11 (c), the first comparison signal converter 84 compares filtering signal SN1d with first and is converted to logarithm value, thereby generates the first signal calculated D_IN1d.With reference to Figure 11 (c), the second comparison signal converter 90 compares filtering signal SN2d with second and is converted to logarithm value, thereby generates the second signal calculated D_IN2d.
With reference to Figure 11 (d), subtracter 92 deducts the second signal calculated D_IN2d from the first signal calculated D_IN1d, thereby exports the first comparison signal IN1d.By using logarithmic amplifier and subtracter 92, the first comparison signal IN1d is by being the signal that logarithm value obtains with the rate conversion between the first benchmark filtering signal SN1d and the second benchmark filtering signal SN2d.Therefore, the first comparison signal IN1d had not both had the DC level, was not changed the variation of the DC level that causes by plasma characteristics yet.In addition, because the first comparison signal IN1d depends on above-mentioned ratio, thereby the output signal of reference signal generating unit 44d, promptly the first reference signal REF1d can be set to steady state value.That is, the first reference signal REF1d can be set constant value, rather than obtains from current signal SI.
Figure 12 is the block diagram of the processor of one embodiment of the invention.
With reference to Fig. 1, Fig. 2, Fig. 8 and Figure 12, the processor 25 of present embodiment comprises first current processor 26 and second current processor 28.Processor 25 can also comprise voltage processor.Described voltage processor can have the structure identical with second current processor 28 with first current processor 26.First current processor 26 and second current processor 28 can have structure shown in Figure 8.Processor 25 comprises comparison signal generating unit 40, reference signal generating unit 44 and comparing section 42.
First current processor 26 comprises the first comparison signal generating unit 40e, the first reference signal generating unit 44e and the first comparing section 42e.The first comparison signal generating unit 40e comprises at least one among the first comparison signal rectifier 100e, the first comparison signal wave filter 102e and the first comparison signal converter 104e.The first reference signal generating unit 44e comprises at least one among the first reference signal rectifier 106e, the first reference signal wave filter 108e, the first reference signal converter 110e, the first combiner 112e and the first offset signal generating unit 114e.Comparing section 42e makes the first comparison signal IN1e compare with the first reference signal REF1e, thereby exports the first arc detection signal OUT1.
Second current processor 28 comprises the second comparison signal generating unit 40f, the second reference signal generating unit 44f and the second comparing section 42f.The second comparison signal generating unit 40f comprises at least one among the second comparison signal rectifier 100f, the second comparison signal wave filter 102f and the second comparison signal converter 104f.The second reference signal generating unit 44f comprises at least one among the second reference signal rectifier 106f, the second reference signal wave filter 108f, the second reference signal converter 110f, the second combiner 112f and the second offset signal generating unit 114f.The second comparing section 42f makes the second comparison signal IN2f compare with the second reference signal REF2f, thereby exports the second arc detection signal OUT2.
With reference to Fig. 1 and Figure 12, processor 25 can comprise first current processor 26, second current processor 28 and the voltage processor.Described voltage processor can have and the identical structure of described first current processor.Described voltage processor receives voltage signal SV, and this voltage signal SV is handled, and voltage comparison signal is compared with voltage reference signal, thereby exports the 3rd arc detection signal OUT3.First current processor 26 can have the structure identical with voltage processor with second current processor 28.If logic state or the level of the first arc detection signal OUT1 of current signal or the second arc detection signal OUT2 are different with logic state or the level of the 3rd arc detection signal OUT3 of voltage signal, judge that then the second arc detection signal OUT2 is relevant with the second type electric arc.Otherwise,, judge that then the first arc detection signal OUT1 is relevant with the first type electric arc if the logic state of the first arc detection signal OUT1 or the second arc detection signal OUT2 or level are identical with the 3rd arc detection signal OUT3 logic state or level.
Figure 13 shows the oscillogram of the electric arc detecting device of one embodiment of the invention.Particularly, Figure 13 shows the waveform of the signal that generates from the electric arc detecting device that comprises first current processor 26 shown in Figure 12 and second current processor 28.More specifically, Figure 13 shows the waveform of the signal that generates in the electric arc detecting device of an embodiment, in described embodiment, the first reference signal rectifier 106e and the second reference signal rectifier 106f and the first comparison signal rectifier 100e and the second comparison signal rectifier 100f use the RMS detecting device, the first comparison signal wave filter 102e and the second comparison signal wave filter 102f and the first reference signal wave filter 108e and the second reference signal wave filter 108f use low-pass filter, and the first comparison signal converter 104e and the second comparison signal converter 104f and the first reference signal converter 110e and second reference signal converter 110f use logarithmic amplifier.According to present embodiment, the first comparison signal wave filter 102e and the second comparison signal wave filter 102f have the cutoff frequency of 250KHz, and the first reference signal wave filter 108e and the second reference signal wave filter 108f have the cutoff frequency of 10KHz.
At length, Figure 13 (a) shows from the waveform of the current signal SI of detecting device 22 outputs; Figure 13 (b) shows the waveform of the first preparation comparison signal SN1e that exports respectively from the first comparison signal wave filter 102e and the second comparison signal wave filter 102f and the second preparation comparison signal SN2f and first preparation reference signal RE1e that exports respectively from the first reference signal wave filter 108e and the second reference signal wave filter 108f and the waveform of the second preparation reference signal RE2f; Figure 13 (c) shows the waveform of the first comparison signal IN1e that exports respectively from the first comparison signal converter 104e and the second comparison signal converter 104f and the second comparison signal IN2f and first reference signal REF1e that exports respectively from the first combiner 112e and the second combiner 112f and the waveform of the second reference signal REF2f; Figure 13 (d) shows from the first comparing section 42e and first arc detection signal OUT1 of second comparing section 42f output and the waveform of the second arc detection signal OUT2; And Figure 13 (e) shows from the output signal DISP1 of the first type electric arc counter of electric arc type judging part 48 outputs and the waveform of the second type arc signal DISP2.
With reference to Figure 13 (a), detecting device 22 outputs are by measuring the current signal SI of the electric current acquisition of flowing in transmission line.Current signal SI comprises and changes relevant information with plasma characteristics and the relevant information with electric arc.The amplitude of the current signal SI that is caused by the first type electric arc A, B, C and D sharply reduces, and is recovered to previous status then.The amplitude of the current signal SI that is caused by the second type electric arc F increases, and reduces then, thereby reaches normal condition.The time remaining time (t2-t1) of the amplitude variations of the current signal SI that is caused by the first type electric arc is shorter than the duration (t6-t5) of the amplitude variations of the current signal SI that is caused by the second type electric arc.
With reference to Figure 13 (b), the first comparison signal wave filter 102e and the second comparison signal wave filter 102f generate the first preparation comparison signal SN1e and the second preparation comparison signal SN2f, in this first preparation comparison signal SN1e and the second preparation comparison signal SN2f, comprise electric arc and cause disturbance component and change the component that causes, but removed the driving frequency component by plasma characteristics.The first preparation comparison signal SN1e and the second preparation comparison signal SN2f have the information relevant with D with the first type electric arc A, B, C and with the relevant information of the second type electric arc F.Similarly, the first reference signal wave filter 108e and the second reference signal wave filter 108f generate the first preparation reference signal RE1e and the second preparation reference signal RE2f, in this first preparation reference signal RE1e and the second preparation reference signal RE2f, removed electric arc and caused disturbance component and driving frequency component.When plasma characteristics changed, the first preparation reference signal RE1e and the second preparation reference signal RE2f can be different from the first preparation comparison signal SN1e and the second preparation comparison signal SN2f.
With reference to Figure 13 (c), the first combiner 112e and the second combiner 112f make the output signal addition of the first offset signal OSe and the first reference signal converter 110e of the first offset signal device 114e respectively, make the output signal addition of the second offset signal OSf and the second reference signal converter 110f of the second offset signal device 114f, thereby generate the first reference signal REF1e and the second reference signal REF2f.The offset signal OSe of first current processor 26 can have negative level.Yet the first offset signal OSe of first current processor 26 can be different from the second offset signal OSf difference of second current processor 28.That is to say that in order to detect the current signal SI of the second type electric arc, the second offset signal OSf of second current processor 28 can have positive level.
With reference to Figure 13 (d), the first comparing section 42e of first current processor 26 makes the first comparison signal IN1e compare with the first reference signal REF1e, thereby exports the first arc detection signal OUT1.Under the situation of the first type electric arc A, B, C and D, the first comparing section 42e exports the first arc detection signal OUT1.Yet, thereby when the generation second type electric arc F increased the amplitude of current signal, because the first reference signal REF1e and the first comparison signal IN1e are non-intersect, therefore the first comparing section 42e did not detect the second type electric arc F.
With reference to Figure 13 (d), the second comparing section 42f of second current processor 28 makes the second comparison signal IN2f compare with the second reference signal REF2f, thereby exports the second arc detection signal OUT2.Under the situation of the first type electric arc A, B, C and D, because the second reference signal REF2f and the second comparison signal IN2f are non-intersect, so the second comparing section 42f does not export the first type arc detection signal OUT1.Yet, thereby when the generation second type electric arc F increased the amplitude of current signal SI, the second comparing section 42f detects this amplitude to be increased, thereby exports the second arc detection signal OUT2.
With reference to Figure 13 (e), preprocessor 32 shown in Figure 2 receives the first arc detection signal OUT1 and the second arc detection signal OUT2, thereby measures their pulse width.If electric arc is judged as the first type electric arc, then electric arc type judging part 48 is exported the first type electric arc count signal DISP1; If electric arc is judged as the second type electric arc, then electric arc type judging part 48 is exported the second type arc signal DISP2.
Fig. 4 shows the process flow diagram of the arc method for measuring of the embodiment of the invention.Shuo Ming arc method for measuring can be by Fig. 1 to electric arc detecting device realization shown in Figure 3 below.
With reference to Fig. 4, described arc method for measuring of the present invention comprises the steps: step S10, measures the electric signal of the curtage of the transmission line that is connected to load; Step S20, by electric signal is handled, generate with load at least one corresponding arc detection signal of generation of electric arc; Step S32 judges the generation of the electric arc in the load by analyzing described arc detection signal; And step S34, by analyzing the electric arc type in the described arc detection signal judgement load.
Step S20 can comprise: step S22 generates reference signal from electric signal; Step S24 generates comparison signal from electric signal; And step S26, reference signal is compared with comparison signal, thereby generated arc detection signal.Described reference signal, described comparison signal and described arc detection signal can be by generating in Fig. 1 method extremely shown in Figure 3.Similarly, can pass through at Fig. 1 to method realization shown in Figure 3 the generation of electric arc and the judgement of electric arc type.
Step S22 can comprise remove the step that electric arc causes disturbance component from electric signal.Remove the step that electric arc causes disturbance component and comprise the step of from electric signal, removing first band component.Here, described first frequency band can comprise by electric arc and causes the frequency band that disturbance component causes.Causing the frequency band that disturbance component causes by electric arc can be at 10KHz in the scope of 250KHz.As shown in Figure 4, the step of removing first band component can utilize low-pass filter or bandpass filter to carry out.During generating reference signal, can remove the driving frequency component of RF power supply.
Step S22 can comprise to electric signal carry out the step of rectification, remove from electric signal that electric arc causes the step of disturbance component and step that the amplitude or the polarity of electric signal are changed at least one step.
Step S24 can comprise from electric signal and to extract the step that electric arc causes disturbance component.The step that extraction electric arc causes disturbance component can comprise the step of removing second band component from electric signal.Described second frequency band can not comprise by electric arc and causes the frequency band that disturbance component causes.Causing the frequency band that disturbance component causes by electric arc can be at 10KHz in the scope of 250KHz.Yet, during the generation of comparison signal, the driving frequency component of RF power supply can be removed.
Step S24 can comprise to electric signal carry out rectification step, from electric signal extract that electric arc causes the step of disturbance component and step that the amplitude or the polarity of electric signal are changed at least one step.Described reference signal is compared with described comparison signal, the amplitude or the polarity of signal can be changed, perhaps provide biasing to signal.
Step S26 can comprise making and not comprise that comparison signal that electric arc causes disturbance component causes the step that the comparison signal of disturbance component is compared with comprising electric arc.During step S26, can detect poor between described reference signal and the described comparison signal.By using comparer, the difference between described comparison signal and the described reference signal can be output as positive signal or negative signal.Step S26 can be by with comparison signal with reference signal is converted to digital signal and by logical-arithmetic unit they are judged and to carry out.In step S26, arc detection signal can generate the proportional pulse of duration with electric arc.
Step S32 can comprise thereby the width analysis of at least one arc detection signal is judged the step that whether has electric arc to produce in the load.The width of described signal can use logical-arithmetic unit to calculate.
In step S32, if the width of described arc detection signal in the scope of first datum width to the second datum width, judges then that described arc detection signal is relevant with electric arc.Described first datum width can be 4 microseconds.Described second datum width can be 100 microseconds.If described width between first datum width and described second datum width, is then judged to have produced electric arc in load.If described width surpasses second datum width, then decision signal is caused by described plasma characteristics variation.Width is less than first datum width as described, and then signal determining is caused by noise.
Step S34 uses at least one arc current detection signal of the electric current acquisition of flowing by measurement in transmission line, and is undertaken by at least one voltage arc detection signal that the voltage of measuring transmission line obtains.
Step S34 can comprise by analyzing the polarity of described arc current detection signal and described voltage arc detection signal, judge the step of the type of the electric arc that produces in load.In step S34, when the polarity of the polarity of described arc current detection signal and described voltage arc detection signal not simultaneously, can judge in load, to have produced the second type electric arc; When the polarity of the polarity of described arc current detection signal and described voltage arc detection signal is identical, can judge in load, to have produced the first type electric arc.
Embodiment according to a modification of this invention is in step S34, if under the lower situation of the logic state of described arc current detection signal or level, can judge that described electric arc is the described first type electric arc; If under the logic state of described arc current detection signal or the level condition with higher, can judge that described electric arc is the described second type electric arc.
Above disclosed theme only be exemplary rather than determinate, and claims are intended to cover whole modifications, improvement and other embodiment that falls in true spirit of the present invention and the scope.Therefore, to allowed by law maximum magnitude, scope of the present invention is explained by the wideest permission of following claim and their equivalent and is determined, and qualification that should not be subjected to describing in detail previously or restriction.
Claims (24)
1. electric arc detecting device, described arc-induced pick-up unit comprises:
Transmission line, it is connected to the electric signal of load and transmission voltage or electric current;
Detecting device, it measures the electric signal of the curtage of described transmission line; And
Processor, it is handled electric signal so that produce at least one arc detection signal,
Wherein, described arc detection signal produces corresponding to the electric arc that produces in described load.
2. electric arc detecting device according to claim 1, wherein, described detecting device comprises that at least one is arranged in described transmission line sensor on every side,
Described sensor comprises the current measurement device of the electric current that measurement is flowed and measures in the measuring voltage device of voltage of described transmission line at least one in described transmission line.
3. electric arc detecting device according to claim 2, wherein, described processor comprises at least one in current processor and the voltage processor,
Described current processor is connected to described current measurement device and is configured to and produces arc detection signal from the current signal of described transmission line, and
Described voltage processor is connected to described voltage measurement device and is configured to and produces arc detection signal from the voltage signal of described transmission line.
4. electric arc detecting device according to claim 1, wherein, described processor comprises:
At least one reference signal generating unit, it produces reference signal so that produce arc detection signal;
At least one comparison signal generating unit, it is to be used for the comparison signal compared with described reference signal with described transform electric; And
At least one comparing section, it makes described reference signal compare so that produce arc detection signal with described comparison signal.
5. electric arc detecting device according to claim 4, wherein, described reference signal generating unit comprises as in the lower member at least one: to electric signal carry out rectification the reference signal rectifier, from electric signal, remove electric arc and cause the reference signal wave filter of disturbance component and the reference signal converter that the amplitude or the polarity of electric signal are changed.
6. electric arc detecting device according to claim 5, wherein, described reference signal generating unit also comprises:
Produce the offset signal generating unit of offset signal; And
To described offset signal and the combiner that makes up from the electric signal of described reference signal converter output, described combiner comprises at least one in totalizer and the subtracter.
7. electric arc detecting device according to claim 4, wherein, described comparison signal generating unit comprises as in the lower member at least one: to electric signal carry out the comparison signal rectifier of rectification, the electric arc that allows to comprise electric signal causes the comparison signal wave filter of disturbance component and the comparison signal converter that the amplitude or the polarity of electric signal are changed.
8. electric arc detecting device according to claim 7, wherein, described comparison signal wave filter is configured to from causing disturbance component by extracting electric arc the electric signal of described comparison signal rectifier rectification, and
Described comparison signal converter is configured to the amplitude or the polarity of the electric signal by described comparison signal filter filtering are changed.
9. electric arc detecting device according to claim 4, wherein, the described comparison signal generating unit that produces described comparison signal comprises subtracter, the first calculated signals portion and secondary signal calculating part,
The described first calculated signals portion comprises as in the lower member at least one: to electric signal carry out the first comparison signal rectifier of rectification, the electric arc that allows to comprise electric signal causes first comparison signal wave filter of disturbance component and the first comparison signal converter that the amplitude or the polarity of electric signal are changed
Described second calculating part comprises as in the lower member at least one: to electric signal carry out rectification the second comparison signal rectifier, from electric signal, remove electric arc and cause second comparison signal wave filter of disturbance component and the second comparison signal converter that the amplitude or the polarity of electric signal are changed, and
Described subtracter is exported the difference between the output signal of the output signal of the described first calculated signals portion and described secondary signal calculating part as described comparison signal.
10. electric arc detecting device according to claim 3, wherein, described processor comprises at least one in first current processor, second current processor and the voltage processor,
Described first current processor is handled the current signal of electric signal, produces arc detection signal,
Described second current processor is handled the current signal of electric signal, produces arc detection signal, and
Described voltage processor is handled the voltage signal of electric signal, produces arc detection signal.
11. electric arc detecting device according to claim 4, wherein, described comparing section is configured to make described reference signal to compare with described comparison signal, produces at least one arc detection signal corresponding with the electric arc that produces in described load,
Described arc detection signal has the width corresponding with the duration of the electric arc that produces in described load.
12. electric arc detecting device according to claim 1, described electric arc detecting device comprise that also electric arc produces judging part, described electric arc produces judging part the width of described arc detection signal is analyzed, and judges whether to have produced electric arc in described load.
13. electric arc detecting device according to claim 1, described electric arc detecting device also comprises electric arc type judging part, described electric arc type judging part is analyzed in the electric signal of described arc detection signal, curtage at least one, the type of the electric arc that judgement produces in described load
Wherein, described electric arc type judging part detects the change direction of the electric signal of the electric current that caused by electric arc and voltage.
14. an arc method for measuring, described arc method for measuring comprises the steps:
The electric signal of the curtage of the transmission line of measurement by being connected to load;
By being handled, described electric signal produces at least one arc detection signal corresponding with the electric arc that in described load, produces;
Judge the generation of the electric arc in the described load by analyzing described arc detection signal; And
The electric arc type is judged.
15. Electric arc monitoring method according to claim 14 wherein, is carried out real-time continuous to described electric signal and is measured,
The step that produces the step of described arc detection signal and judge the generation of described electric arc comprises to be handled in real time to the electric signal of described transmission line, so that the step of the information relevant with the generation of electric arc in the described load is provided.
16. Electric arc monitoring method according to claim 14, wherein, the step that produces at least one described arc detection signal comprises the steps:
Produce at least one reference signal;
Use the electric signal of the described transmission line of measuring to produce at least one comparison signal; And
Described reference signal is compared with described comparison signal, produced described arc detection signal.
17. Electric arc monitoring method according to claim 16, wherein,
The step that produces described reference signal comprises removes the step that electric arc causes disturbance component from electric signal;
The step that produces described comparison signal comprises extracts the step that electric arc causes disturbance component from electric signal; And
The step that produces described arc detection signal comprises making has removed described reference signal that electric arc causes disturbance component and has comprised the step that described comparison signal that electric arc causes disturbance component is compared.
18. Electric arc monitoring method according to claim 17, wherein, the step that produces described reference signal comprises the step of the component of removing first frequency band from electric signal,
Described first frequency band comprises that electric arc causes the frequency band of disturbance component.
19. Electric arc monitoring method according to claim 17, wherein, the step that produces described comparison signal comprises the step of the component of removing second frequency band from electric signal,
Described second frequency band does not comprise that electric arc causes the frequency band of disturbance component.
20. Electric arc monitoring method according to claim 16, wherein,
During the step that produces described reference signal comprises the steps at least one:
Electric signal is carried out rectification,
From electric signal, remove electric arc and cause disturbance component, and
Amplitude or polarity to electric signal are changed; And
During the step that produces described comparison signal comprises the steps at least one:
Electric signal is carried out rectification,
From electric signal, extract electric arc and cause disturbance component, and
Amplitude or polarity to electric signal are changed.
21. Electric arc monitoring method according to claim 14, wherein, the step of judging the generation of electric arc comprises to be analyzed the width of at least one arc detection signal, with the step of the generation of judging the electric arc in the described load.
22. Electric arc monitoring method according to claim 14, wherein, described arc detection signal comprises:
By measuring at least one arc current detection signal of the electric current acquisition of in described transmission line, flowing; And
At least one the voltage arc detection signal that obtains by the voltage of measuring described transmission line,
The step of judgement electric arc type comprises to be analyzed described arc current detection signal and described voltage arc detection signal, so that judge the step of the type of the electric arc that produces in described load.
23. Electric arc monitoring method according to claim 14 wherein, judges that the step of electric arc type comprises the steps:
When the electric signal of the electric signal of the electric current of described transmission line and voltage all descends, judge that corresponding arc detection signal is the result who is caused by the first type electric arc; And
When the electric signal of the electric current of described transmission line increases and the electric signal of voltage when reducing, judge that corresponding arc detection signal is the result who is caused by the second type electric arc.
24. Electric arc monitoring method according to claim 14 wherein, judges that the step of electric arc type comprises the steps:
When the electric signal of the electric current of described transmission line reduces, judge that electric arc is the first type electric arc; And
When the electric signal of the electric current of described transmission line increases, judge that electric arc is the second type electric arc.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020070056103A KR100935406B1 (en) | 2007-06-08 | 2007-06-08 | Plasma abnormal detecting apparatus and method for monitoring of plasma abnormal |
| KR10-2007-0056103 | 2007-06-08 | ||
| PCT/KR2008/003188 WO2008150136A1 (en) | 2007-06-08 | 2008-06-05 | Arc detecting apparatus and arc monitoring method using the same |
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| CN101702936A true CN101702936A (en) | 2010-05-05 |
| CN101702936B CN101702936B (en) | 2013-10-23 |
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| CN2008800193153A Expired - Fee Related CN101702936B (en) | 2007-06-08 | 2008-06-05 | Arc detecting apparatus and arc monitoring method using same |
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| KR (1) | KR100935406B1 (en) |
| CN (1) | CN101702936B (en) |
| WO (1) | WO2008150136A1 (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR100935406B1 (en) | 2010-01-06 |
| WO2008150136A1 (en) | 2008-12-11 |
| KR20080107824A (en) | 2008-12-11 |
| CN101702936B (en) | 2013-10-23 |
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