CN101702865A - Plasma needle device - Google Patents
Plasma needle device Download PDFInfo
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- CN101702865A CN101702865A CN200910221138A CN200910221138A CN101702865A CN 101702865 A CN101702865 A CN 101702865A CN 200910221138 A CN200910221138 A CN 200910221138A CN 200910221138 A CN200910221138 A CN 200910221138A CN 101702865 A CN101702865 A CN 101702865A
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Abstract
The invention relates to a plasma needle device belonging to the field of plasma generation devices and solving the problems that the traditional corona discharging device can not be directly touched by human bodies, and the electrode of a plasma jet device is unsafe or arc discharge is probably generated between the electrode and the ground. The plasma needle device comprises a pulse power source and an electrode, wherein the electrode is connected with the pulse power source through serially connected resistors and capacitors; the radial section of the electrode is in the shape of one of a circle and a ring or a polygon; and the end part and the outer surface or the inner surface of the electrode are provided with needle-shaped or splinter-shaped bulges. The invention has the advantages of easy manufacture and maintenance, convenient use, low cost and easy carrying; the generated temperature of plasma needles can be different by adopting the resistors with different resistance values, the capacitors with different capacitance values and different driving power sources and working gases; and the plasma needles can be applied to sculpture, deposition, surface treatment, surface cleaning, purification, food treatment, biomedical disinfection, tooth cleaning, root canal therapy, and the like.
Description
Technical field
The invention belongs to plasma producing apparatus, be specifically related to a kind of gas discharge plasma needle device.
Background technology
Plasma is made up of cation, neutral particle and electronics, and general plasma can be divided into two classes: heat balance plasma and nonthermal plasma, the temperature of all particles is the same in the heat balance plasma.
In nonthermal plasma, the temperature of electronics can be up to tens thousand of degree, and the temperature of ion and neutral particle is much smaller than electron temperature, this " refrigerant of heat " advantage is numerous, nonthermal plasma can be used as the high activity reactant and is widely used in multiple field, as plasma-deposited and plated film, etching, surface treatment, chemical cleaning method, biological cleaning and medical application.
Under the atmospheric pressure, because the working gas puncture voltage is higher relatively, the discharging gap distance is very limited usually, is generally between several millimeters to several centimetres, and this has directly limited the shape and the size of processed article.If using plasma is handled indirectly, because many active ingredients wherein are very of short duration as oxygen atom and many charged particles life-span, just disappear to such an extent as to also do not arrive the object being treated surface, cause treatment effeciency very low.In order to address the above problem, atmospheric pressure single electrode nonthermal plasma device receives much concern recently, it can directly produce plasma in extraneous space, discharge plasma with respect to close clearance has special advantages, and can directly handle article, the shape and the size of processed article are not subjected to any restriction simultaneously.
Below be several existing nonthermal plasma devices:
(1) dc corona discharge device, see Dion S Antao etal. " Atmosphericpressure DC corona discharge:operating regimes and potentialapplications " Plasma Sources Sci.Technol.18 (2009), direct current negative polarity corona discharge assembly under a kind of atmospheric pressure has wherein been described, this device as shown in Figure 1, comprise electrode 3, positive conductive plate 18, resistance 9 and power supply 1, working gas can be the mist of air, nitrogen, helium or hydrogen and methane; Power supply 1 is a DC power supply, and electrode 3 is connected with power-polarity.During work, can regulate the distance between the pin that links to each other with power cathode and the positive conductive plate, place different gas, between negative pole and positive conductive plate, produce the corona discharging area of cone shape.Discharge can be divided into three zones, is corona discharge near the negative pole pin, and positive conductive plate surface is glow discharge, is one section dark space between corona discharge and glow discharge.And along with the distance increase of negative electrode and positive conductive plate, it is big that the dark space also becomes.Near the gas temperature of the glow discharge that this device produces positive conductive plate approaches room temperature, and still, when voltage reaches when being added to certain value, corona discharge changes sparkover easily into, and is dangerous for biomedical applications.
(2) exchange the nonthermal plasma fluidic device, see Yong Cheol Hong etal. " Microplasma jet at atmospheric pressure " Appl Physics Letter 89,221504 (2006), wherein having described under a kind of atmospheric pressure with nitrogen is the device that working gas produces plasma jet, this device as shown in Figure 2, comprise electrode 3, grounding electrode 11, medium disk 13, media Containers 12 and (interchange) power supply 1, electrode 3 and grounding electrode 11 are separated by medium disk 13, and place media Containers 12, (interchange) power supply 1 connection electrode 3 and grounding electrode 11 jointly; During work, (interchange) power supply 1 transfers to high pressure, frequency 20 KHz, with 3 liters/second flow speed to media Containers 12 input service gases 6 (nitrogen), carry out the discharge generation plasma at electrode 3 and 11 of grounding electrodes, and eject plasma jet 5 with the speed of about 255 meter per seconds from gas delivery port 16, and 6.5 centimetres of plasma jet 5 length, temperature is near room temperature.Electrode 3 all directly contacts with plasma jet 5 with grounding electrode 11, and arc discharge easily takes place, and is dangerous for some practical applications such as the auxiliary healings of tooth cleaning, root canal and wound.
(3) radio frequency nonthermal plasma fluidic device, see E stoffels etal. " Plasmaneedle in vivo medical treatment:recent developments and perpectives " Plasma Source Sci.Technol.15 (2006), a kind of radio frequency plasma needle device has wherein been described, this device comprises electrode 3, media Containers 12, insulating medium layer 17, power supply (radio frequency) 1 as shown in Figure 3.Insulating medium layer 17 is the earthenware of 4 millimeters of diameters.Power supply 1 is the radio-frequency power supply of 10 megahertzes, links to each other with electrode 3.Electrode 3 is the tungsten filament of 0.3 millimeter of diameter, be positioned over insulating medium layer 17 central authorities, the top is not contained in the insulating medium layer 17, is exposed in the space outerpace, and being fixed in media Containers 12 central authorities by fixed mount 14 with insulating medium layer 17, working gas 6 is from gas input port 7 inputs.Can produce respective diameters during operation and be 2.5 millimeters plasma jet 5.Electrode 3 head portions of this device are exposed in the space outerpace, and directly contact with plasma jet 5, plasma jet 5 length that produce are short, temperature is higher, are respectively 90 degrees centigrade and 50 degrees centigrade apart from plasma jet 5 temperature at electrode 3 most advanced and sophisticated 1.5 millimeters and 2.5 millimeters places.
(4) pulse direct current nonthermal plasma fluidic device, see Xinpei Lu etal. " Dynamics of an atmopheric pressure plasma generated by submicrosecondvoltage pulses " J Appl.Phys 100.063302 (2006), a kind of plasma pen device has wherein been described, this device comprises electrode 3, grounding electrode 11, media Containers 12, medium disk 13, medium annulus 15, power supply 1 as shown in Figure 4.Electrode 3 and grounding electrode 11 are the metal ring of same size, be pasted on respectively on two medium disks 13, between be separated with medium annulus 15, and be positioned at media Containers 12 front ends together.Working gas 6 is a helium, and power supply 1 is a pulse dc power.Can produce the plasma jet 5 of 5 centimeter length during operation, plasma jet 5 temperature are near room temperature.
Adopting pulse dc power to carry out dielectric barrier discharge generation plasma is relatively more popular recently research direction.This device weak point is under the certain condition that arc discharge may take place for 11 of electrode 3 and grounding electrodes when being higher than 10us such as the voltage pulsewidth.
As mentioned above, existing apparatus all exists similarly not enough separately.Similarly defective is present in some nearest plasma jet production methods too, in device and the system, for example U.S. Patent number is 5369336 " Plasma Generating Device " Hideomi Koinuma et al, the patent No. 6,262,523 " Large area atmospheric-Pressure Plasma Jet " the by Gary S.Selwynet al and the patent No. 7271363 " Portanle microwave plasma systems including asupply line for gas and microwaves " these factors of by Lee et al. have all limited the extensive use of existing plasma jet technology and device greatly.
Summary of the invention
The invention provides a kind of plasma needle device that can be used for biomedical applications, solve the problem that arc discharge may take place between electrode that problem that human body that existing corona discharge assembly exists can not directly touch and plasma jet device exist dangerous or electrode and the ground connection.
A kind of plasma needle device of the present invention comprises the pulse power, electrode, it is characterized in that:
Electrode is connected with the pulse power with electric capacity by the resistance of series connection;
Described electrode radial section is shaped as a kind of in circle, annular or the polygon; Electrode tip, outer surface or inner surface have the projection of aciculiform or splinter shape.
Described plasma needle device is characterized in that:
Described electrode is a plurality of, is linear array or arrayed on conductive plate, and conductive plate connects the resistance and the electric capacity of series connection again.
Described plasma needle device is characterized in that:
Described electrode places media Containers, is filled with a kind of in the following gas in the media Containers: helium, argon gas, helium and nitrogen mixture body, helium and oxygen mixed gas, methane.
When the present invention works, resistance and electric capacity mainly work to control voltage and the discharging current that is applied on the electrode, resistance mainly plays current limliting, electric capacity when each pulsed discharge by the plasma needle-discharging, electric capacity and plasma needle equivalent capacity are born voltage together simultaneously, play the effect of dividing potential drop.Select the resistance of different resistances and the electric capacity of different capacitances, electrode front end space field intensity and discharging current can be different, and the plasma needle temperature of generation can or be higher than room temperature near room temperature; Adopt the electrode of not isostructure and shape, generation plasma needle can have multiple shape, can spread simultaneously to all directions, the plasma needle variable-length of generation, the radial section of plasma needle is changeable.The plasma needle temperature that produces is during near room temperature, the contact with it that human body can safety.And electrode can place media Containers, is filled with working gas in the media Containers, and working gas can be elementary gas or mists such as helium, argon gas, nitrogen, oxygen, also can be gaseous compound, for example methane (CH
4) etc., help increasing the kind and the quantity of active ingredient in the plasma needle.
Easily making of the present invention, easy care, easy to use, cost is low, be easy to carry about with one, and has multiple practical applications, clean and root canal etc. such as etching, deposition, surface treatment, surface clean, purification, food preparation, tooth.According to different concrete application, select the resistance of different resistances and the electric capacity of different capacitances, and different driving powers and working gas, the plasma needle temperature of generation can be different, the plasma needle temperature is during near room temperature, and human body is the contact of safety with it.The kind of the active material composition that wherein contains and quantity also can be selected according to concrete application, and can realize extensive large-area concrete application in the air under the normal temperature and pressure.
Description of drawings
Fig. 1 is existing dc corona discharge device schematic diagram;
Fig. 2 is the existing nonthermal plasma fluidic device schematic diagram that exchanges;
Fig. 3 is existing radio frequency plasma body acupuncture schematic diagram;
Fig. 4 is existing pulsed dc plasma fluidic device schematic diagram;
Fig. 5 is the first embodiment of the invention structural representation;
Fig. 6 is the second embodiment of the invention structural representation;
Fig. 7 is the third embodiment of the invention structural representation;
Fig. 8 (a), Fig. 8 (b) are respectively the longitudinal section view and the end view of needle electrode;
Fig. 9 is a blade-like electrode sections schematic diagram;
Figure 10 is the pin electrode longitudinal section view that is socketed on the sphere conductor;
Figure 11 is a brush and sac like pin electrode end view;
Figure 12 (a), Figure 12 (b) are respectively multielectrode end view and longitudinal section view;
Figure 13 is multielectrode longitudinal section view.
Embodiment
The present invention is further described below in conjunction with accompanying drawing.
As shown in Figure 5, first embodiment of the present invention comprises power supply 1, resistance 9, electric capacity 10, conductive plate 18 and electrode 3, and electrode 3 links to each other with power supply 1 with electric capacity 10 by resistance 9; Electrode 3 is an acupuncture needle, is tip-like, and the shape of the plasma needle 5 that produces at the front end of acupuncture needle also is the shape of elongated pin.
As shown in Figure 6, second embodiment of the invention comprises power supply 1, resistance 9, electric capacity 10, conductive plate 18 and a plurality of electrode 3, and electrode 3 links to each other with power supply 1 with electric capacity 10 by resistance 9; The electrode of being made up of many acupuncture needles 3 is socketed on the conductive plate of a copper one-tenth; Front end at every acupuncture needle all produces needle-like plasma needle 5.
As shown in Figure 7, the 3rd case study on implementation of the present invention, comprise power supply 1, resistance 9, electric capacity 10, working gas 6, gas flow control valve 8, gas input port 7, media Containers 12, gas delivery port 6, conductive plate 18 and a plurality of electrode 3, electrode 3 is an acupuncture needle, be tip-like, the plasma needle 5 that produces at the front end of acupuncture needle.
Fig. 8 (a), Fig. 8 (b) are respectively among the above embodiment all longitudinal section view of adoptable needle electrode and end view, and the electrode radial section is circular, and end view is an aciculiform.
Fig. 9 is the schematic cross-section of all adoptable blade-like electrode of each embodiment.
Figure 10 is all adoptable pin electrode longitudinal section view that is socketed on the sphere of each case study on implementation.
Figure 11 is all adoptable brush and sac like pin electrode of each a case study on implementation end view.
Figure 12 (a), Figure 12 (b) are respectively a kind of end view and longitudinal section view of acupuncture needle electrode, and the electrode radial section is circular, has 6 pin electrodes on the conductive plate, divide two rows to be arranged in parallel.
Figure 13 is a kind of longitudinal section view of acupuncture needle electrode, has 15 pin electrodes on the conductive plate, is arranged in round-shaped.
Among the above embodiment, electrode is most advanced and sophisticated needle-like or very thin sheet, or in the needle-like on the surface (inner surface or outer surface) of the electrode of other shape or the projection of sheet; Electrode radial section shape can be in circle, annular, zigzag or the polygon a kind of, determine according to concrete practical application.
When power supply 1 was pulse dc power, applying the pulsed dc voltage amplitude range can be 220 volts~10 kilovolts, frequency 50 hertz~100 megahertzes, and pulsewidth is more than or equal to 1 nanosecond.The plasma jet length that produces is greater than 0.1 millimeter, and temperature can or be higher than room temperature near room temperature.
Claims (3)
1. a plasma needle device comprises the pulse power, electrode, it is characterized in that:
Electrode is connected with the pulse power with electric capacity by the resistance of series connection;
Described electrode radial section is shaped as a kind of in circle, annular or the polygon; Electrode tip, outer surface or inner surface have the projection of aciculiform or splinter shape.
2. plasma needle device as claimed in claim 1 is characterized in that:
Described electrode is a plurality of, is linear array or arrayed on conductive plate, and conductive plate connects the resistance and the electric capacity of series connection again.
3. plasma needle device as claimed in claim 1 or 2 is characterized in that:
Described electrode places media Containers, is filled with a kind of in the following gas in the media Containers: helium, argon gas, helium and nitrogen mixture body, helium and oxygen mixed gas, methane.
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CN107770939A (en) * | 2016-08-18 | 2018-03-06 | 孙保胜 | Polar-capacity tandem type plasma generator |
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Effective date of registration: 20220609 Address after: 430200 No. C001, building B4, biological innovation park, No. 666, Gaoxin Avenue, East Lake New Technology Development Zone, Wuhan, Hubei Patentee after: Wuhan hisplai Life Technology Co.,Ltd. Address before: 430074 Hubei Province, Wuhan city Hongshan District Luoyu Road No. 1037 Patentee before: HUAZHONG University OF SCIENCE AND TECHNOLOGY |