CN101702389A - Liquid metal microfluid machinery inertial conductive switch - Google Patents
Liquid metal microfluid machinery inertial conductive switch Download PDFInfo
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- CN101702389A CN101702389A CN200910216251A CN200910216251A CN101702389A CN 101702389 A CN101702389 A CN 101702389A CN 200910216251 A CN200910216251 A CN 200910216251A CN 200910216251 A CN200910216251 A CN 200910216251A CN 101702389 A CN101702389 A CN 101702389A
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Abstract
The invention discloses a liquid metal microfluid machinery inertial conductive switch, comprising a sensitive unit permanent-magnet micromachined inertial switch and an actuating unit liquid metal microfluid static switch, wherein the liquid metal microfluid machinery inertial switch is manufactured by adopting a micro-process technology, the accuracy and the threshold value are adjusted by adopting laser post-technology trimming, and a micro channel architecture is encapsulated by adopting a method of epoxy bonding or local heat bonding. The switch of the invention has the characteristics of small volume, simple structure, low contact resistance, effectively controlled switch threshold value and accuracy, large current permitted to pass by the switch and high reliability. The micro-process technology can carry out mass production and reduce the cost of devices.
Description
Technical field
The present invention relates to a kind of little inertial conductive switch, particularly a kind of high precision liquid metal microfluid machinery inertial switch that integrates permanent magnetism micro-machinery switch and liquid metal microfluid switch.
Background technology
Little inertia switch is a kind of special acceleration transducer.It has saved the signal processing time of common accelerometer, directly the break-make of control switch.Its output result does not need analog-to-digital conversion, directly produces digital quantity output, and is integrated with digital circuit easily, constitutes the inertial acceleration threshold measurement unit, can be directly used in acceleration analysis, in industrial and national defence field important use arranged.Inertia-activated has sourceless characteristic, can be used for special occasions.It adopts " spring-mass " structure usually, utilize the equilibrium relation of inertia force and elastic force to determine the threshold acceleration that system can survey, operation principle is when the acceleration greater than certain threshold value acts on the mass, the deformation that inertia force produces elastic construction (being cantilever beam mostly) surpasses the extreme position of absorption (effect of static, electromagnetic force), and switch produces positive feedback effect and rapid closing.The micro-mechanical inertia switch also have advantages such as low-power consumption, low cost, small size, high overload ability, interface circuit be simple, but the major defect of micro-mechanical inertia switch is to electrically contact problem, causes its reliability to reduce except having higher response speed.
Adopt the switch of mobile liquid metal (mercury or gallium indium tin) to compare, can under severe environmental conditions, use, and the required external force of break-make is little with the mechanical switch of " spring-mass " structure.Under macro-scale, its inertia force and surface tension bigger as long as external force is just removable a little, makes switch realize break-make.The good conductivity of liquid metal, the contact resistance between switch electrode is little, allows the electric current that passes through big, can work stably in a long term; And the contact of electrode is liquid contact, does not have any noise.This type of switch has advantages such as volume is little, simple in structure, price is low, hermetically sealed.But shortcoming is: existing micro-machinery switch integrates sensing and activates, when adopting mobile liquid metal as switch contact, microfluid is subjected to the influence of multiple physical field coupled characteristic in the microchannel, its flow behavior under the acceleration effect is relevant with viscous force, inertia force, surface tension etc., simultaneously in manufacture process the size of liquid metal be difficult to accurately control and thermal coefficient of expansion bigger, thereby the switch that causes soaking into hard contact is when inertia-activated, and its threshold value and precision thereof are wayward.
Summary of the invention
The purpose of this invention is to provide a kind of liquid metal microfluid machinery inertial switch.Sensing and activate is born respectively by permanent magnetism micro-mechanical inertia switch and liquid metal microfluid switch respectively, is easy to liquid metal microfluid machinery inertial switch designs and manufacture method that threshold value and precision thereof are controlled.
The liquid metal microfluid machinery inertial switch is made up of two parts: the little beam machinery inertial of first permanent magnetism switch sections, it two is liquid metal microfluid static switching parts.For the voltage that makes the little beam machinery inertial of permanent magnetism switch closure rear drive liquid metal microfluid static switching obviously increases, connect (much larger than the electric capacity between the former both positive and negative polarity) by big electric capacity between both negative poles.What finally work is the conducting of liquid metal microfluid static switching, and the little beam machinery inertial of permanent magnetism switch is a sensitive acceleration, drives the liquid metal microfluid static switching, plays the effect of accurate control switch threshold value.Its mechanism of action is: when acceleration during greater than threshold value, permanent magnetism micro-mechanical inertia switch closure, the drive controlling electrostatic potential is increased suddenly, and the liquid metal droplet in the microchannel is motion suddenly under the effect of drive controlling electrostatic potential, signal electrostatic potential and inertia force, connects switch.
Technical scheme of the present invention is: the liquid metal microfluid machinery inertial switch adopts micro fabrication to make on silicon chip, it is characterized in that: comprise permanent magnetism little beam machinery inertial switch sections and liquid metal microfluid static switching part.Adopt the little beam machinery inertial of " spring-mass " structure fabrication permanent magnetism switch sections, the liquid metal microfluid static switching adopts three-dimensional Micro Channel Architecture.Drop adopts mercury or gallium indium tin liquid metal.
Characteristics of the present invention are: adopt micromachined technology to obtain the very little liquid metal microfluid machinery inertial switch of volume.The little beam machinery inertial of the permanent magnetism switch of employing " spring-mass " structure is control switch threshold value and precision effectively.Adopt the liquid metal microfluid static switching of three dimension microchannel cavity configurations can effectively reduce contact resistance, strengthen electric current that switch allows to pass through, can work stably in a long term, have simultaneously that volume is little, simple in structure, price is low, hermetic advantage.Can produce in batches, reduce device cost.
Description of drawings
Fig. 1: mercury microfluid machinery inertial construction of switch block diagram;
Fig. 2: the little beam machinery inertial of permanent magnetism switch schematic diagram;
Fig. 3: mercury microfluid static switching vertical view;
Fig. 4: mercury microfluid static switching sectional view.
Among the figure: 1 is lead, and 2 is framework, and 3 is bracing frame, 4 is mass, and 5 is the contact, and 6 is permanent magnet, 7 is pedestal, and 8 is power supply, and 9 is the little beam inertia switch of permanent magnetism, 10 is signal electrode, and 11 is drive electrode, and 12 is ground, 13 are substrate, and 14 is silica, and 15 is silica-based, 16 is liquid metal, and 17 is mercury microfluid static switching, and 18 are load.
Embodiment
Embodiment:
The liquid metal microfluid machinery inertial switch divides permanent magnetism little beam machinery inertial switch sections and liquid metal microfluid static switching part.Its characteristics are that sensing born by different parts respectively with activating, and threshold value and precision thereof are convenient to control.
The little beam machinery inertial of permanent magnetism switch is as sensing unit, and the performance parameter that meets the demands for the switch that makes preparation in processing and fabricating adopts the way of laser trimming that it is carried out back machined parameters adjustment, concrete grammar as follows:
1, adopts basic Micrometer-Nanometer Processing Technology, as the technology making little beam machinery inertial of the permanent magnetism construction of switch as shown in Figure 2 of oxidation, photoetching, sputter, plating and plasma etching.
2, to of threshold value and the required precision of the little beam machinery inertial of the permanent magnetism of making construction of switch according to use, adopt the method for laser trimming that it is carried out back processing adjustment to its brace summer and mass, according to the experiment test result, prepare the little beam inertia switch of the permanent magnetism that meets threshold value and required precision thereof.
The liquid metal microfluid machinery inertial switch drives the drive controlling electrostatic potential at the little beam machinery inertial of permanent magnetism switch conduction, liquid metal fluid is motion Continuity signal switch under electrostatic interaction, when its structure of processing, should consider the matching problem of Micro Channel Architecture and liquid metal droplet emphatically, the concrete grammar step is as follows:
1, adopt general micro-system processing technology to make Micro Channel Architecture;
2, the method by condensing vapour on Seed Layer and glass capillary titration forms liquid metal droplet, for hot evaporation scheme, by the method for control evaporating temperature and evaporation time, forms the mercury drop size that meets requirement on devices.Capillary titration scheme forms the mercury drop by the mode that is equipped with different size titration funnel, has been convenient to control mercury drop size;
3, consider the low boiling problem of liquid metal, adopt the method for epoxy bonding or localized heating bonding that Micro Channel Architecture is encapsulated; After the two-part structure completion of processing,, form the liquid metal microfluid machinery inertial switch by connection shown in Figure 1.
Claims (5)
1. a liquid metal microfluid machinery inertial switch comprises permanent magnetism micro-mechanical inertia switch [9] and liquid metal microfluid switch [17].It is characterized in that: sensing and actuating are born respectively by permanent magnetism micro-mechanical inertia switch and liquid metal microfluid switch respectively.
2. according to the described liquid metal microfluid machinery inertial switch of claim 1, it is characterized in that: adopt micro fabrication to make, base material is selected silicon for use.
3. according to the described liquid metal microfluid machinery inertial switch of claim 1, it is characterized in that: process the way of repairing accent behind the threshold value of permanent magnetism micro-mechanical inertia switch [9] and the precision employing laser and adjust.Molten drop adopts the method for hot evaporation or glass capillary titration to form in the liquid metal microfluid static switching [17].
4. according to claim 1 and claim 3 described liquid metal microfluid static switchings, it is characterized in that: adopt the method for epoxy bonding or localized heating bonding that Micro Channel Architecture is encapsulated;
5. liquid metal microfluid static switching according to claim 4.It is characterized in that: by the Micro Channel Architecture of micro fabrication preparation, adopt silica and silicon nitride to do insulating barrier between between the electrode, electrode material is selected nickel for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910216251A CN101702389A (en) | 2009-11-16 | 2009-11-16 | Liquid metal microfluid machinery inertial conductive switch |
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| CN200910216251A CN101702389A (en) | 2009-11-16 | 2009-11-16 | Liquid metal microfluid machinery inertial conductive switch |
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| CN101702389A true CN101702389A (en) | 2010-05-05 |
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| CN200910216251A Pending CN101702389A (en) | 2009-11-16 | 2009-11-16 | Liquid metal microfluid machinery inertial conductive switch |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102157298A (en) * | 2011-03-22 | 2011-08-17 | 西安电子科技大学 | Permanent magnetic collision sensor |
| CN105097353A (en) * | 2015-07-13 | 2015-11-25 | 南京理工大学 | Self-restoring micro-fluid inertia power switch device |
| CN106656140A (en) * | 2017-01-18 | 2017-05-10 | 复旦大学 | Single-pole multi-throw switch device based on electrowetting drive and preparation method thereof |
| CN106656139A (en) * | 2017-01-18 | 2017-05-10 | 复旦大学 | Radio frequency switch device based on electrowetting driving principle and preparation method thereof |
| CN108513437A (en) * | 2018-06-08 | 2018-09-07 | 北京梦之墨科技有限公司 | One kind can combinational circuit structure |
| CN108987158A (en) * | 2018-09-05 | 2018-12-11 | 北京交通大学 | A kind of magnetic liquid inching button switch |
| CN110491722A (en) * | 2019-08-27 | 2019-11-22 | 中北大学 | Anti-interference self- recoverage patch package metals drop acceleration switch |
| CN110500923A (en) * | 2019-08-27 | 2019-11-26 | 中北大学 | The identification of stable state overload and insurance circuit and control circuit based on dual acceleration switch |
| WO2020010788A1 (en) * | 2018-07-13 | 2020-01-16 | 浙江清华柔性电子技术研究院 | Microfluidic device and preparation method therefor, and microfluidic system |
| CN111883380A (en) * | 2020-01-16 | 2020-11-03 | 大连理工大学 | Microfluid inertia switch manufacturing method based on graphene-coated gallium-based alloy liquid drop |
-
2009
- 2009-11-16 CN CN200910216251A patent/CN101702389A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102157298A (en) * | 2011-03-22 | 2011-08-17 | 西安电子科技大学 | Permanent magnetic collision sensor |
| CN105097353A (en) * | 2015-07-13 | 2015-11-25 | 南京理工大学 | Self-restoring micro-fluid inertia power switch device |
| CN106656139B (en) * | 2017-01-18 | 2019-07-05 | 复旦大学 | A kind of RF switch device and preparation method thereof based on electrowetting driving principle |
| CN106656139A (en) * | 2017-01-18 | 2017-05-10 | 复旦大学 | Radio frequency switch device based on electrowetting driving principle and preparation method thereof |
| CN106656140A (en) * | 2017-01-18 | 2017-05-10 | 复旦大学 | Single-pole multi-throw switch device based on electrowetting drive and preparation method thereof |
| CN108513437A (en) * | 2018-06-08 | 2018-09-07 | 北京梦之墨科技有限公司 | One kind can combinational circuit structure |
| CN108513437B (en) * | 2018-06-08 | 2024-02-23 | 北京梦之墨科技有限公司 | Combinable circuit structure |
| WO2020010788A1 (en) * | 2018-07-13 | 2020-01-16 | 浙江清华柔性电子技术研究院 | Microfluidic device and preparation method therefor, and microfluidic system |
| CN108987158A (en) * | 2018-09-05 | 2018-12-11 | 北京交通大学 | A kind of magnetic liquid inching button switch |
| CN110491722A (en) * | 2019-08-27 | 2019-11-22 | 中北大学 | Anti-interference self- recoverage patch package metals drop acceleration switch |
| CN110500923A (en) * | 2019-08-27 | 2019-11-26 | 中北大学 | The identification of stable state overload and insurance circuit and control circuit based on dual acceleration switch |
| CN110491722B (en) * | 2019-08-27 | 2021-05-18 | 中北大学 | Anti-interference self-recovery patch-packaged metal liquid drop acceleration switch |
| CN110500923B (en) * | 2019-08-27 | 2021-09-21 | 中北大学 | Steady-state overload recognition and safety circuit based on double acceleration switches and control circuit |
| CN111883380A (en) * | 2020-01-16 | 2020-11-03 | 大连理工大学 | Microfluid inertia switch manufacturing method based on graphene-coated gallium-based alloy liquid drop |
| CN111883380B (en) * | 2020-01-16 | 2022-05-27 | 大连理工大学 | Microfluid inertia switch manufacturing method based on graphene coated gallium-based alloy liquid drops |
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Application publication date: 20100505 |