CN101700684A - Main shaft of multiline cutter - Google Patents

Main shaft of multiline cutter Download PDF

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Publication number
CN101700684A
CN101700684A CN200910175225A CN200910175225A CN101700684A CN 101700684 A CN101700684 A CN 101700684A CN 200910175225 A CN200910175225 A CN 200910175225A CN 200910175225 A CN200910175225 A CN 200910175225A CN 101700684 A CN101700684 A CN 101700684A
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CN
China
Prior art keywords
drive shaft
bearing
shaft assembly
final drive
driving shaft
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Pending
Application number
CN200910175225A
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Chinese (zh)
Inventor
靳永吉
种宝春
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Beijing Semiconductor Equipment Institute
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Beijing Semiconductor Equipment Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Beijing Semiconductor Equipment Institute filed Critical Beijing Semiconductor Equipment Institute
Priority to CN200910175225A priority Critical patent/CN101700684A/en
Publication of CN101700684A publication Critical patent/CN101700684A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a main shaft of a multiline cutter, comprising a main driving shaft assembly, an intermediate shaft roller, an auxiliary driving shaft assembly and a connection screw, wherein a main driving shaft in the main driving shaft assembly, the intermediate shaft roller and an auxiliary driving shaft in the auxiliary driving shaft assembly are sequentially abutted by conical surfaces two by two; a screw rod of the connection screw sequentially and longitudinally passes through center holes of the auxiliary driving shaft and the intermediate shaft roller from right to left and is in threaded connection and fixation with the main driving shaft; pin rolls for transmitting the torque are arranged between the main driving shaft and the intermediate shaft roller and between the auxiliary driving shaft and the intermediate shaft roller; and the main driving shaft assembly and the auxiliary driving shaft assembly are internally provided with air seal structures with same structure and cooling water circulating structures with same structure. The main shaft of the multiline cutter has compact structure and powerful functions.

Description

Main shaft of multiline cutter
Technical field
The present invention relates to a kind of main shaft of multiline cutter, particularly a kind of main shaft of multiline cutter that semi-conducting materials such as silicon crystal bar are cut into slices of being used for.
Background technology
Because domestic huge silicon materials processing market, developing rapidly of silicon materials process equipments and being surging forward of the development of domestic multi-line cutting machine have been driven, the used wire cutting machine of China's solar-energy photo-voltaic cell industry is import equipment substantially at present, domestic huge silicon materials processing market has driven domestic many producers and has stepped up to develop homemade multi-line cutting machine, the multi-thread cutting equipment of silicon chip is generalizable at solar cell and all kinds of major diameter semi-conducting material manufacture field with its high production efficiency and piece rate.Institute's pellet is compared have flexibility (BOW), advantage such as (WARP) is little for angularity, and the depth of parallelism (TAPER) is good, and gross thickness tolerance (TTV) discreteness is little, and cutting edge cutting loss is little, and surface damage layer is shallow, and the wafer surface roughness is little with interior round slice process.
Main shaft of multiline cutter is decision institute's pellet flexibility (BOW), angularity (WARP), and the depth of parallelism (TAPER) is good, the little critical component of gross thickness tolerance (TTV) discreteness, and its solution indicates that homemade multi-line cutting machine can practicability.
Summary of the invention
Technical problem to be solved by this invention provides a kind of compact conformation, powerful main shaft of multiline cutter.
The present invention adopts following technical scheme:
The present invention includes the final drive shaft assembly, middle beaming roller, counter drive shaft assembly and attachment screw, wherein, final drive shaft in the final drive shaft assembly, cone match butt joint in twos successively between the counter drive shaft three in middle beaming roller and the counter drive shaft assembly, the screw rod of attachment screw is vertical successively from right to left to be worn the centre bore of counter drive shaft and middle beaming roller and is threaded fixing with final drive shaft, and be equipped with bearing pin between final drive shaft and middle beaming roller and between counter drive shaft and middle beaming roller, be equipped with the identical air seal structure of the structure cooling water loop structure identical in final drive shaft assembly and the counter drive shaft assembly with structure for the transmission moment of torsion.
Be provided with three groups of bearings between final drive shaft in the said final drive shaft assembly and collar bush, every group of bearing is two angular contact ball bearings, wherein, be located at two back-to-back installations of bearing in first group of bearing of a left end, be located at second group of bearing and the 3rd group of back-to-back installation of bearing being located at a right-hand member at axle middle part.
Counter drive shaft in the said counter drive shaft assembly and countershaft inner room are provided with two groups of bearings, and every group of bearing is two angular contact ball bearings, and two groups of back-to-back installations of bearing.
Air seal structure in the said final drive shaft assembly is that the internal circular surfaces that its right bearing gland matches with final drive shaft is provided with annular sealing gland groove, longitudinally be provided with the gas port that is communicated with annular sealing gland groove on the sidewall of collar bush, gas port is communicated with compressed air air admission hole on being located at the left bearing gland, be equipped with the two seals circle between left bearing gland and collar bush and between right bearing gland and collar bush, and left and right bearing gland is fixed with the left and right two ends of collar bush respectively.
Said final drive shaft assembly, the perisporium upper edge longitudinal separation that its cooling water loop structure is its collar bush is provided with the water-guiding hole of a plurality of perforations, the left bearing gland is provided with left guiding gutter, water inlet and the delivery port with the corresponding in twos connection of water-guiding hole, the right bearing gland is provided with the right guiding gutter with the corresponding in twos connection of water-guiding hole, and be connected in series mutually by water inlet, water-guiding hole, right guiding gutter, left guiding gutter, delivery port, constitute snakelike single channel cooling water loop structure.
Beneficial effect of the present invention: main shaft of multiline cutter compact conformation provided by the present invention, powerful, owing to all adopted identical air seal structure of structure and cooling water cycling mechanism in final drive shaft assembly of this main shaft and the counter drive shaft assembly, can prevent effectively that so not only the mortar particulate from entering main shaft internal damage main shaft bearing, can guarantee that also this main shaft is effectively lowered the temperature under situation about running up, so this main shaft reliable operation, long service life.
Description of drawings
Accompanying drawing 1 is that the master of an embodiment of the present invention looks the sectional structure schematic diagram;
Accompanying drawing 2 is sectional structure schematic diagrames of middle beaming roller shown in Figure 1;
Accompanying drawing 3 is local structure for amplifying schematic diagrames of Fig. 2;
Accompanying drawing 4 is the collar bush in the final drive shaft assembly of this main shaft and the axonometric exploded view of Y-axis pressure cap;
Accompanying drawing 5 is main TV structure schematic diagrames of right bearing gland shown in Figure 4;
Accompanying drawing 6 is that cutaway view is looked on the left side of Fig. 5;
Accompanying drawing 7 is I place partial enlarged drawings of Fig. 6.
In the accompanying drawings: 1 locknut, 2 shaft end rings, 3 left bearing glands, the 4O RunddichtringO, 5 first groups of bearings, 6 water-guiding holes, 7 second groups of bearings, 8 collar bushes, 9 the 3rd groups of bearings, the 10O RunddichtringO, 11 final drive shaft assemblies, 12 bearing pins, 13 bearing pins, 14 counter drive shaft assemblies, 15 left bearing glands, the 16O RunddichtringO, 17 bearings, 18 bearings, the 19O RunddichtringO, 20 right bearing glands, 21 locking nuts, 22 seal covers, 23 locking nuts, 24 compressed air air admission holes, 25 gas ports, 26 frames, 27 large washers, 28 small washers, 29 counter drive shafts, 30 countershaft covers, 31. annular sealing gland groove, 32 attachment screws, beaming roller in the middle of 33,34 annular sealing gland grooves, 35 right bearing glands, 36. final drive shaft, 37 gas ports, 38 compressed air air admission holes, 39 synchronous cog belt belt wheels, 40 tensioner covers, 41 pin-and-holes, 42 left end taper holes, 43 right-hand member taper holes, 44 steel wires, 45 water inlets, 46 air inlet intercommunicating pores, 47 water inlet intercommunicating pores, 48 left guiding gutters, 49 water outlet intercommunicating pores, 50 delivery ports, 51 right guiding gutters, 52 gas entrance holes.
The specific embodiment
The invention will be further described below in conjunction with the embodiment accompanying drawing:
Referring to accompanying drawing, comprise final drive shaft assembly 11 in the formation of the present invention, middle beaming roller 33, counter drive shaft assembly 14 and attachment screw 32, wherein, the cone segments of final drive shaft 36 right-hand members in the final drive shaft assembly 11 cooperates with the left end taper hole 42 of middle beaming roller 33, the cone segments of counter drive shaft 29 left ends in the counter drive shaft assembly 14 cooperates with the right-hand member taper hole 43 of middle beaming roller 33, and final drive shaft 36 is fixed with a pair of for the bearing pin 12 that transmits moment of torsion with the end of docking of middle beaming roller 33, bearing pin 12 cooperates with the pin-and-hole 41 of intermediate calender rolls 33 left ends, counter drive shaft 29 is fixed with a pair of for the bearing pin 13 that transmits moment of torsion with the end of docking of middle beaming roller 33 equally, bearing pin 13 matches with the pin-and-hole of middle beaming roller 33 right-hand members, and the screw rod of attachment screw 32 is vertical successively from right to left to be worn the centre bore of counter drive shaft 29 and middle beaming roller 33 and be threaded fixing with the center screw of final drive shaft 36.
In the present embodiment, 8 of final drive shaft 36 in the final drive shaft assembly 11 and collar bushes are provided with three groups of bearings from left to right, every group is two angular contact ball bearings, wherein, be located at two back-to-back installations of bearing in first group of bearing 5 of a left end, be located at second group of bearing 7 and the 3rd group of bearing 9 back-to-back installations being located at a right-hand member at axle middle part.Counter drive shaft 29 in the counter drive shaft assembly 14 and 30 in countershaft cover are provided with two groups of bearings 17,18, and every group is similarly two angular contact ball bearings, and two groups of bearing 17,18 back-to-back installations.
In order to prevent that effectively this main shaft when work mortar particulate and dust from entering main shaft, cause damage of bearings, in the final drive shaft assembly 11 of this main shaft and counter drive shaft assembly 14, be equipped with the identical air seal structure of structure.Be that example illustrates its concrete structure with the air seal structure in the final drive shaft assembly 11 below.In final drive shaft assembly 11, the internal circular surfaces that its right bearing gland 35 matches with final drive shaft 36 is provided with multiple tracks annular sealing gland groove 34, the gas entrance hole 52 that is communicated with annular sealing gland groove 34 is communicated with gas port 37 on being located at collar bush 8 sidewalls, left bearing gland 3 is provided with compressed air air admission hole 38, and the air inlet intercommunicating pore 46 that is communicated with compressed air air admission hole 38 is communicated with gas port 37 on collar bush 8 sidewalls.Left bearing gland 3 is fixed with collar bush 8 left ends, and is provided with twice O RunddichtringO 4 therebetween, and right bearing gland 35 is fixed with collar bush 8 right-hand members, and is provided with twice O RunddichtringO 10 therebetween.
First group of bearing 5 outside in the final drive shaft assembly 11 are provided with shaft end ring 2, and back-up ring 2 is spacing by locknut 1 locking.Final drive shaft 36 left ends are fixed with a synchronous cog belt belt wheel 39, and 36 of belt wheel 39 and final drive shafts are established tensioner cover 40 and be connected and fixed.
Be evenly equipped with the annular wire casing of multiple tracks on the face of cylinder of middle beaming roller 33 for steel wire 44 guiding.
For the main shaft that runs up is effectively lowered the temperature, in the final drive shaft assembly 11 of this main shaft of multiline cutter and counter drive shaft assembly 14, be equipped with the identical cooling water cycling mechanism of structure.Be that example illustrates its this structure of tool with the cooling water cycling mechanism in the final drive shaft assembly 11 below.In final drive shaft assembly 11, the perisporium upper edge longitudinal separation of its collar bush 8 is provided with the water-guiding hole 6 of a plurality of perforations, left bearing gland 3 is provided with the left guiding gutter 48 with the corresponding in twos connection of water-guiding hole 6, water inlet 45 and delivery port 50, right bearing gland 35 is provided with the right guiding gutter 51 with the corresponding in twos connection of water-guiding hole 6, and be connected in series mutually by water inlet 45, water-guiding hole 6, right guiding gutter 51, left guiding gutter 48, delivery port 50, constitute snakelike single channel cooling water loop structure.The concrete connection is such: water inlet intercommunicating pore 47 set on water inlet 45 and the left bearing gland 3 is communicated with, water inlet intercommunicating pore 47 is communicated with a water-guiding hole 6 on the collar bush 8, the right-hand member of another water-guiding hole 6 that the right-hand member of this water-guiding hole 6 is adjacent with it is communicated with by one on the right bearing gland 35 right guiding gutter 51 jointly, the location arrangements of the relative and water-guiding hole 6 that interlaces of the right guiding gutter 51 on the left guiding gutter 48 on the left bearing gland 3 and the right bearing gland 35, so just, can successively 6 serial connections of a plurality of water-guiding holes on collar bush 8 perisporiums be communicated with, the left end of last water-guiding hole 6 after the connection is communicated with water outlet intercommunicating pore 49 on being located at left bearing gland 3, and water outlet intercommunicating pore 49 is communicated with delivery port 50.
Be provided with left bearing gland 15 and right bearing gland 20 in the formation of counter drive shaft assembly 14 equally, left bearing gland 15 is fixed with the left end of countershaft cover 30, and is provided with twice O type sealing ring 16 therebetween.Right bearing gland 20 is fixed with the right-hand member of countershaft cover 30, and be provided with the internal circular surfaces that twice O RunddichtringO 19 left bearing glands 15 match with counter drive shaft 29 therebetween equally and be provided with annular sealing gland groove 31, countershaft cover 30 is provided with the gas port 25 that is communicated with annular sealing gland groove 31, and right bearing gland 20 is provided with the compressed air air admission hole 24 that is communicated with gas port 25.
The outside of 30 set two groups of bearings 17,18 of counter drive shaft 29 and countershaft cover is provided with small washer 28 and large washer 27, and small washer 28 contacts with the inner ring of the one group of bearing 18 in right side, and establishes locking nut 21 and be locked.
In the present embodiment, connecting screw rod 32 adopts socket cap screw, and its head is provided with locking nut 23, in case loosening voluntarily.
The right-hand member of counter drive shaft assembly 14 is provided with seal cover 22.
When using installation, collar bush 8 in the final drive shaft assembly 11 and the cover of the countershaft in the counter drive shaft assembly 14 30 are all fixing with frame 26.

Claims (5)

1. main shaft of multiline cutter, it is characterized in that it comprises final drive shaft assembly (11), middle beaming roller (33), counter drive shaft assembly (14) and attachment screw (32), wherein, final drive shaft (36) in the final drive shaft assembly (11), cone match butt joint in twos successively between counter drive shaft (29) three in middle beaming roller (33) and the counter drive shaft assembly (14), the screw rod of attachment screw (32) is vertical successively from right to left to be worn the centre bore of counter drive shaft (29) and middle beaming roller (33) and is threaded fixing with final drive shaft (36), and be equipped with bearing pin between final drive shaft (36) and middle beaming roller (33) and between counter drive shaft (29) and middle beaming roller (33), be equipped with the identical air seal structure of the structure cooling water loop structure identical in final drive shaft assembly (11) and the counter drive shaft assembly (14) with structure for the transmission moment of torsion.
2. main shaft of multiline cutter according to claim 1, it is characterized in that being provided with three groups of bearings between final drive shaft (36) in the said final drive shaft assembly (11) and collar bush (8), every group of bearing is two angular contact ball bearings, wherein, be located at two back-to-back installations of bearing in first group of bearing (5) of a left end, be located at second group of bearing (7) and the back-to-back installation of the 3rd group of bearing (9) of being located at a right-hand member at axle middle part.
3. main shaft of multiline cutter according to claim 1, it is characterized in that being provided with two groups of bearings (17,18) between counter drive shaft (29) in the said counter drive shaft assembly (14) and countershaft cover (30), every group of bearing is two angular contact ball bearings, and the back-to-back installation of two groups of bearings (17,18).
4. main shaft of multiline cutter according to claim 1, it is characterized in that the air seal structure in the said final drive shaft assembly (11) is that the internal circular surfaces that its right bearing gland (35) matches with final drive shaft (36) is provided with annular sealing gland groove (34), longitudinally be provided with the gas port (37) that is communicated with annular sealing gland groove (34) on the sidewall of collar bush (8), gas port (37) is communicated with compressed air air admission hole (38) on being located at left bearing gland (3), be equipped with the two seals circle between left bearing gland (3) and collar bush (8) and between right bearing gland (35) and collar bush (8), and a left side, the right bearing gland respectively with the left side of collar bush (8), right two ends are fixed.
5. according to claim 1 or 4 described main shaft of multiline cutter, it is characterized in that said final drive shaft assembly (11), its cooling water loop structure is the water-guiding hole (6) that the perisporium upper edge longitudinal separation of its collar bush (8) is provided with a plurality of perforations, left bearing gland (3) is provided with the left guiding gutter (48) with the corresponding in twos connection of water-guiding hole (6), water inlet (45) and delivery port (50), right bearing gland (35) is provided with the right guiding gutter (51) with the corresponding in twos connection of water-guiding hole (6), and by water inlet (45), water-guiding hole (6), right guiding gutter (51), left side guiding gutter (48), delivery port (50) is serial connection mutually, constitutes snakelike single channel cooling water loop structure.
CN200910175225A 2009-11-26 2009-11-26 Main shaft of multiline cutter Pending CN101700684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200910175225A CN101700684A (en) 2009-11-26 2009-11-26 Main shaft of multiline cutter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200910175225A CN101700684A (en) 2009-11-26 2009-11-26 Main shaft of multiline cutter

Publications (1)

Publication Number Publication Date
CN101700684A true CN101700684A (en) 2010-05-05

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102328357A (en) * 2011-10-08 2012-01-25 陕西汉江机床有限公司 Movable adjustable silk guide roller spindle device of numerical control multi-line silicon chip cutting machine
CN102672831A (en) * 2011-03-17 2012-09-19 苏州赫瑞特电子专用设备科技有限公司 Spindle system of multi-wire saw
CN102672836A (en) * 2012-04-26 2012-09-19 大连连城数控机器股份有限公司 Third wheel for monocrystalline silicon seed multi-wire cutter
CN102765143A (en) * 2012-07-09 2012-11-07 新余市银龙机电科技有限公司 Guide wheel base with circulating water channel on waterproof jacket
CN103213205A (en) * 2012-01-18 2013-07-24 常州协鑫光伏科技有限公司 Guide wheel of wire cutting machine
CN103481387A (en) * 2012-06-11 2014-01-01 苏州赫瑞特电子专用设备科技有限公司 Main shaft system of multi-wire cutting machine
CN104329447A (en) * 2013-10-30 2015-02-04 柳州正菱重型数控机床有限公司 Heavy-load high-speed main shaft cooling device
CN104647620A (en) * 2013-11-23 2015-05-27 烟台力凯电子科技有限公司 Multi-wire sawing machine spindle system
CN106985294A (en) * 2017-04-07 2017-07-28 苏州赫瑞特电子专用设备科技有限公司 A kind of main shaft of multiline cutter mechanism

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102672831A (en) * 2011-03-17 2012-09-19 苏州赫瑞特电子专用设备科技有限公司 Spindle system of multi-wire saw
CN102328357A (en) * 2011-10-08 2012-01-25 陕西汉江机床有限公司 Movable adjustable silk guide roller spindle device of numerical control multi-line silicon chip cutting machine
CN103213205A (en) * 2012-01-18 2013-07-24 常州协鑫光伏科技有限公司 Guide wheel of wire cutting machine
CN103213205B (en) * 2012-01-18 2015-05-13 常州协鑫光伏科技有限公司 Guide wheel of wire cutting machine
CN102672836A (en) * 2012-04-26 2012-09-19 大连连城数控机器股份有限公司 Third wheel for monocrystalline silicon seed multi-wire cutter
CN103481387A (en) * 2012-06-11 2014-01-01 苏州赫瑞特电子专用设备科技有限公司 Main shaft system of multi-wire cutting machine
CN102765143A (en) * 2012-07-09 2012-11-07 新余市银龙机电科技有限公司 Guide wheel base with circulating water channel on waterproof jacket
CN104329447A (en) * 2013-10-30 2015-02-04 柳州正菱重型数控机床有限公司 Heavy-load high-speed main shaft cooling device
CN104329447B (en) * 2013-10-30 2017-04-19 柳州正菱重型数控机床有限公司 Heavy-load high-speed main shaft cooling device
CN104647620A (en) * 2013-11-23 2015-05-27 烟台力凯电子科技有限公司 Multi-wire sawing machine spindle system
CN106985294A (en) * 2017-04-07 2017-07-28 苏州赫瑞特电子专用设备科技有限公司 A kind of main shaft of multiline cutter mechanism

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Application publication date: 20100505