CN106985294A - A kind of main shaft of multiline cutter mechanism - Google Patents
A kind of main shaft of multiline cutter mechanism Download PDFInfo
- Publication number
- CN106985294A CN106985294A CN201710223629.6A CN201710223629A CN106985294A CN 106985294 A CN106985294 A CN 106985294A CN 201710223629 A CN201710223629 A CN 201710223629A CN 106985294 A CN106985294 A CN 106985294A
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- China
- Prior art keywords
- bearing
- mandrel
- group
- gland
- water cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
Abstract
The invention discloses a kind of main shaft of multiline cutter mechanism, the mainshaft mechanism includes long mandrel, middle beaming roller, short mandrel and screw mandrel;Also include:The electro spindle being located on direct driving motor and the long mandrel bearing assembly being installed on long mandrel of connection are directly contacted with long mandrel, the long mandrel bearing assembly includes the first bearing seat with water cooling and is placed in the first bearing seat inner ring with water cooling and spaced clutch shaft bearing group and second bearing group, the clutch shaft bearing group includes double-row self-aligning ball bearing, and the second bearing group includes the angular contact bearing and cylinder roller bearing being arranged side by side.The present invention main axle structure it is reasonable in design make use of the configuration of bearing and straight drive mode, realize the small requirement of high-speed overload, rotary inertia, client's high efficiency cutting can be met, low line loss, stock utilization is high, dismantles the convenient demand of guide wheel, and ensure that the precision and quality of material after cutting.
Description
Technical field
The present invention relates to multi-wire saw equipment technical field, a kind of main shaft of multiline cutter mechanism is specifically related to.
Background technology
Multi-line cutting machine is that the main of the hard brittle material such as current monocrystalline silicon, polysilicon and electronic-grade silicon, sapphire processing is set
Standby, axis system is the core component of cutting machine.At present, main shaft of multiline cutter technology on the market adds connection usually using motor
Axle device drives, and main shaft uses angular contact bearing, often brings that shafting size is big, rotary inertia is big and number of bearings is more etc. no
Foot.
The content of the invention
It is an object of the invention to the problem above for overcoming prior art presence, there is provided a kind of main shaft of multiline cutter machine
Structure, the rotary inertia for the mainshaft mechanism that the invention is provided is small, and number of bearings is few, large carrying capacity, and bearing size is small and dismantles
It is convenient.
To realize above-mentioned technical purpose and the technique effect, the present invention is achieved through the following technical solutions：
A kind of main shaft of multiline cutter mechanism, including long mandrel, middle beaming roller, short mandrel and screw mandrel, described screw mandrel one end passes through
Nut is fastened, and the other end axially penetrates through the short mandrel and middle beaming roller and is connected with the long mandrel thread successively, in addition to：
Electro spindle on direct driving motor, the electro spindle directly contacts connection with the long mandrel；
The long mandrel bearing assembly on the long mandrel is installed on, the long mandrel bearing assembly includes the clutch shaft bearing with water cooling
Seat and it is placed in the first bearing seat inner ring with water cooling and spaced clutch shaft bearing group and second bearing group, described the
Separated between one bearing group and second bearing group by the first inner spacing collar.
In above-mentioned mainshaft mechanism, the clutch shaft bearing group includes at least one double-row self-aligning ball bearing, second axle
Hold at least two angular contact bearings and at least one cylinder roller bearing that group includes being arranged side by side.
In above-mentioned mainshaft mechanism, in addition to the short mandrel bearing assembly being installed on the short mandrel, the short mandrel
Bearing assembly includes the second bearing seat with water cooling and is placed in the second bearing seat inner ring with water cooling and spaced
3rd bearing group and fourth bearing group, the 3rd bearing group include at least one double-row self-aligning ball bearing, the fourth bearing
Group includes at least two angular contact bearings and at least one cylinder roller bearing, the 3rd bearing group and the 4th being arranged side by side
Separated between bearing group by the second inner spacing collar.
In above-mentioned mainshaft mechanism, the long mandrel bearing assembly also includes clutch shaft bearing gland and first axle side pressure lid,
The nearly second bearing group end of the clutch shaft bearing gland sets and is connected with the first bearing seat with water cooling, and described first
Bearing gland is provided with annular groove and the hole on the annular groove, the clutch shaft bearing gland, annular groove, hole and long core
Annular gas labyrinth seal is constituted between axle；The nearly clutch shaft bearing group end of the first axle side pressure lid set and with the band water cooling
First bearing seat be connected.
In above-mentioned mainshaft mechanism, the short mandrel bearing assembly also includes second bearing gland and the second shaft end gland,
The nearly fourth bearing group end of the second bearing gland sets and is connected with the second bearing seat with water cooling, the second bearing
Gland be provided with annular groove and the hole on the annular groove, the second bearing gland, annular groove, hole and short mandrel it
Between constitute annular gas labyrinth seal；The nearly 3rd bearing group end of second shaft end gland set and with it is described with water cooling the
Two bearing bracket is connected.
In above-mentioned mainshaft mechanism, the number of the double-row self-aligning ball bearing and cylinder roller bearing is one, described
The number of angular contact bearing is between two, the adjacent angular contact bearing and the angular contact bearing and cylindrical roller axle
It is back-to-back between holding to install.
In above-mentioned mainshaft mechanism, the rotor of the electro spindle is fixedly connected with the long mandrel by pin.
In above-mentioned mainshaft mechanism, the cross section of the inner spacing collar 414 of the first inner spacing collar 214 and second is π types or π
Type.
Beneficial effects of the present invention are：
（1）In the Bearing configuration of the mainshaft mechanism of the present invention, one end of mandrel component is rolled using a pair of angular contact bearings and cylinder
The bearing group of sub- bearing, the other end is configured using double self-aligning ball bearings by this such a bearing combination, can improve shafting
Bearing capacity；If not reached with this structure same load typically at least using double self-aligning ball bearings under regular situation
Need a cylinder roller bearing to change two angular contact bearings into, add number of bearings；
（2）The mainshaft mechanism of the present invention employs direct driving motor, without output shaft, and main shaft drives mode is straight drive, that is, passes through electricity
The rotor of main shaft is directly connected to long mandrel, not by shaft coupling, so may be such that the rotary inertia of main shaft is small, number of bearings
Few and bearing size is small；
（3）The sealing means of the mainshaft mechanism of the present invention are gas labyrinth seal, and such compressed air is blown into from the centre in labyrinth, meeting
Air-flow is formed in both sides up and down, because following gas output is than small above, air is mainly blown out from above, prevents cutting liquid from entering
Inside, realizes excellent sealing；
（4）The present invention main axle structure it is reasonable in design make use of the configuration of bearing and straight drive mode, realize high-speed overload, turn
The small requirement of dynamic inertia, can meet client's high efficiency cutting, and low line loss, stock utilization is high, dismantle the convenient demand of guide wheel, and
And ensure that the precision and quality of material after cutting.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, below with presently preferred embodiments of the present invention and coordinate accompanying drawing describe in detail as after.
The embodiment of the present invention is shown in detail by following examples and its accompanying drawing.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this hair
Bright schematic description and description is used to explain the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is mainshaft mechanism schematic diagram of the invention；
Fig. 2 is enlarged diagram at the A in Fig. 1.
Label declaration in figure：
1st, electro spindle, 2, long mandrel, 3, middle beaming roller, 4, short mandrel, 5, screw mandrel, 6, annular groove, 7, angular contact bearing, 8, cylinder
Roller bearing, 9, frame, 21, long mandrel bearing assembly, 211, the first bearing seat with water cooling, 212, clutch shaft bearing group, 213,
Second bearing group, the 214, first inner spacing collar, 215, clutch shaft bearing gland, 216, first axle side pressure lid, 41, short mandrel bearing group
Part, 411, the second bearing seat with water cooling, 412,3rd bearing group, 413, fourth bearing group, the 414, second inner spacing collar, 415,
Two bearing glands, the 416, second shaft end gland.
Embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, the present invention is described in detail.
Referring to shown in Fig. 1 and Fig. 2, the invention provides a kind of main shaft of multiline cutter mechanism, it include long mandrel 2, in
Between beaming roller 3, short mandrel 4 and screw mandrel 5, described one end of screw mandrel 5 fastened by nut, and the other end axially penetrates through the short mandrel successively
4 and middle beaming roller 3 and it is threadedly coupled with the long mandrel 2, in addition to：Electro spindle 1 on direct driving motor and it is installed on
Long mandrel bearing assembly 21 on the long mandrel 2.
The electro spindle 1 directly contacts connection with the long mandrel 2；Now, the motor used is direct-driving motor；
In the present embodiment, the rotor of the electro spindle 1 is fixedly connected with the long mandrel 2 by pin, in other embodiment
In, also it can be fixedly connected with mode by the way that screw etc. is other；It is because the main shaft drives mode of mainshaft mechanism is straight drive, i.e., main by electricity
The rotor of axle is directly connected to long mandrel, not by shaft coupling, so may be such that the rotary inertia of main shaft is small, number of bearings is few
It is small with bearing size.
The long mandrel bearing assembly 21 include the first bearing seat 211 with water cooling and be placed in it is described with water cooling first
The inner ring of bearing block 211 and spaced clutch shaft bearing group 212 and second bearing group 213, the second bearing seat with water cooling
211 are installed in frame 9, and the clutch shaft bearing group 212 includes at least one double-row self-aligning ball bearing, the second bearing group
213 include at least two angular contact bearings 7 being arranged side by side and at least one cylinder roller bearing 8, the clutch shaft bearing group 212
Separated between second bearing group 213 by the first inner spacing collar 214；In the present embodiment, the horizontal stroke of first inner spacing collar 214
Section is π types or the type of falling π；Because one end of long mandrel component uses the bearing group of angular contact bearing and cylinder roller bearing, separately
One end is combined by such a bearing and configured using double self-aligning ball bearings, can improve the bearing capacity of shafting.
Above-mentioned mainshaft mechanism also includes the short mandrel bearing assembly 41 being installed on the short mandrel 4, the short mandrel axle
Bearing assembly 41 includes the second bearing seat 411 with water cooling and is placed in the inner ring of second bearing seat 411 with water cooling and interval
The 3rd bearing group 412 and fourth bearing group 413 of setting, the second bearing seat 411 with water cooling are installed in frame 9, institute
Stating 3rd bearing group 412 includes at least one double-row self-aligning ball bearing, and the fourth bearing group 413 includes being arranged side by side at least
Two angular contact bearings 7 and at least one cylinder roller bearing 8, lead between the 3rd bearing group 412 and fourth bearing group 413
The second inner spacing collar 414 is crossed to separate；In the present embodiment, the cross section of second inner spacing collar 414 is π types or the type of falling π.Due to
One end of short mandrel component uses the bearing group of angular contact bearing and cylinder roller bearing, and the other end uses double self-aligning ball bearings,
And combined and configured by such a bearing, can further high raising shafting bearing capacity.
In the present embodiment, the number of the double-row self-aligning ball bearing and cylinder roller bearing 8 can be one, described
The number of angular contact bearing 7 can be between two, the adjacent angular contact bearing 8 and the angular contact bearing 7 and cylinder
It is back-to-back between roller bearing 8 to install.In other embodiments, it is described in order to further improve the bearing capacity of shafting
The number of double-row self-aligning ball bearing and cylinder roller bearing 8 can be 2 or multiple, and the number of the angular contact bearing 7 can be 3
It is individual or multiple.
In the present embodiment, the long mandrel bearing assembly 21 also includes clutch shaft bearing gland 215 and first axle side pressure
Lid 216, the nearly end of second bearing group 213 of the clutch shaft bearing gland 215 set and with the first bearing seat with water cooling
211 are connected, in the present embodiment, and the clutch shaft bearing gland 215 connects with the nut of first bearing seat 211 with water cooling
Connect, the nearly end of clutch shaft bearing group 212 of the first axle side pressure lid 216 set and with the first bearing seat 211 with water cooling
It is connected.The clutch shaft bearing gland 215 is provided with annular groove 6 and the hole on the annular groove 6（It is not shown）, described first
Annular gas labyrinth seal is constituted between bearing gland 215, annular groove 6, hole and long mandrel 2.
In the present embodiment, the short mandrel bearing assembly 41 also includes the shaft end of second bearing gland 415 and second pressure
Lid 416, the nearly end of fourth bearing group 413 of the second bearing gland 415 is set and solid with the second bearing seat 411 with water cooling
Even, in the present embodiment, the second bearing gland 415 is connected with the nut of the second bearing seat 411 with water cooling, institute
The nearly end of 3rd bearing group 412 of the second shaft end gland 416 is stated to set and be connected with the second bearing seat 411 with water cooling.
The second bearing gland 415 is provided with annular groove 6 and the hole on the annular groove 6（It is not shown）, the second bearing
Annular gas labyrinth seal is constituted between gland 415, annular groove 6, hole and short mandrel 4.
Because the sealing means of mainshaft mechanism are gas labyrinth seal, such compressed air is blown into from the centre in labyrinth, is entered
The inside of annular groove 6, can form air-flow in both sides up and down, to both direction formation pressure up and down, because following gas output is than upper
Face is small, and air is mainly blown out from above, prevents cutting liquid from entering internal, realizes excellent sealing.
The present invention main axle structure it is reasonable in design make use of the configuration of bearing and straight drive mode, realize high-speed overload,
The small requirement of rotary inertia, can meet client's high efficiency cutting, and low line loss, stock utilization is high, dismantles the convenient demand of guide wheel,
And it ensure that the precision and quality of material after cutting.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.Within the spirit and principles of the invention, that is made any repaiies
Change, equivalent substitution, improvement etc., should be included in the scope of the protection.
Claims (8)
1. a kind of main shaft of multiline cutter mechanism, including long mandrel（2）, middle beaming roller（3）, short mandrel（4）And screw mandrel（5）, institute
State screw mandrel（5）One end is fastened by nut, and the other end axially penetrates through the short mandrel successively（4）With middle beaming roller（3）And with institute
State long mandrel（2）Threaded connection, it is characterised in that also include：
Electro spindle on direct driving motor（1）, the electro spindle（1）With the long mandrel（2）Directly contact connection；And
It is installed on the long mandrel（2）On long mandrel bearing assembly（21）, the long mandrel bearing assembly（21）Including band water
Cold first bearing seat（211）Be placed in the first bearing seat with water cooling（211）Inner ring and spaced first axle
Hold group（212）With second bearing group（213）, the clutch shaft bearing group（212）With second bearing group（213）Between by first
Spacer（214）Separate.
2. main shaft of multiline cutter mechanism according to claim 1, it is characterised in that the clutch shaft bearing group（212）Bag
Include at least one double-row self-aligning ball bearing；The second bearing group（213）Including at least two angular contact bearings being arranged side by side
（7）With at least one cylinder roller bearing（8）.
3. main shaft of multiline cutter mechanism according to claim 1 or 2, it is characterised in that also described short including being installed on
Mandrel（4）On short mandrel bearing assembly（41）, the short mandrel bearing assembly（41）Including the second bearing seat with water cooling
（411）Be placed in the second bearing seat with water cooling（411）Inner ring and spaced 3rd bearing group（412）With the 4th
Bearing group（413）, the 3rd bearing group（412）Including at least one double-row self-aligning ball bearing, the fourth bearing group（413）
Including at least two angular contact bearings being arranged side by side（7）With at least one cylinder roller bearing（8）, the 3rd bearing group
（412）With fourth bearing group（413）Between pass through the second inner spacing collar（414）Separate.
4. main shaft of multiline cutter mechanism according to claim 1 or 2, it is characterised in that the long mandrel bearing assembly
（21）Also include clutch shaft bearing gland（215）With first axle side pressure lid（216）, the clutch shaft bearing gland（215）Nearly described the
Two bearing groups（213）End set and with the first bearing seat with water cooling（211）It is connected, the clutch shaft bearing gland（215）
It is provided with annular groove（6）With located at the annular groove（6）On hole, the clutch shaft bearing gland（215）, annular groove（6）, hole with
And long mandrel（2）Between constitute annular gas labyrinth seal；The first axle side pressure lid（216）The nearly clutch shaft bearing group（212）
End set and with the first bearing seat with water cooling（211）It is connected.
5. main shaft of multiline cutter mechanism according to claim 3, it is characterised in that the short mandrel bearing assembly（41）
Also include second bearing gland（415）With the second shaft end gland（416）, the second bearing gland（415）Nearly 4th axle
Hold group（413）End set and with the second bearing seat with water cooling（411）It is connected, the second bearing gland（415）It is provided with ring
Shape groove（6）With located at the annular groove（6）On hole, the second bearing gland（415）, annular groove（6）, hole and short mandrel
（4）Between constitute annular gas labyrinth seal；Second shaft end gland（416）The nearly 3rd bearing group（412）End set and
With the second bearing seat with water cooling（411）It is connected.
6. main shaft of multiline cutter mechanism according to claim 1 or 2, it is characterised in that the double-row self-aligning ball bearing
And cylinder roller bearing（8）Number be one, the angular contact bearing（7）Number be two, the adjacent corner connection
Contact bearing（7）Between and the angular contact bearing（7）And cylinder roller bearing（8）Between it is back-to-back install.
7. main shaft of multiline cutter mechanism according to claim 1 or 2, it is characterised in that the electro spindle（1）Rotor
With the long mandrel（2）It is fixedly connected by pin.
8. main shaft of multiline cutter mechanism according to claim 3, it is characterised in that first inner spacing collar（214）With
Second inner spacing collar（414）Cross section be π types or the type of falling π.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710223629.6A CN106985294A (en) | 2017-04-07 | 2017-04-07 | A kind of main shaft of multiline cutter mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710223629.6A CN106985294A (en) | 2017-04-07 | 2017-04-07 | A kind of main shaft of multiline cutter mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106985294A true CN106985294A (en) | 2017-07-28 |
Family
ID=59414876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710223629.6A Pending CN106985294A (en) | 2017-04-07 | 2017-04-07 | A kind of main shaft of multiline cutter mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106985294A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681100A (en) * | 2021-09-24 | 2021-11-23 | 燕山大学 | Main shaft unloading device for multi-wire cutting machine and working method thereof |
| CN115816672A (en) * | 2022-11-25 | 2023-03-21 | 燕山大学 | Main shaft synchronous transmission device for double-station multi-wire cutting machine |
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|---|---|---|---|---|
| JPH11198018A (en) * | 1998-01-16 | 1999-07-27 | Tokyo Seimitsu Co Ltd | Endless wire saw attached with stationary abrasive grain |
| JP2000218507A (en) * | 1999-01-28 | 2000-08-08 | Tokyo Seimitsu Co Ltd | Group roller supporter of wire saw |
| CN101700684A (en) * | 2009-11-26 | 2010-05-05 | 中国电子科技集团公司第四十五研究所 | Main shaft of multiline cutter |
| CN201723688U (en) * | 2010-07-02 | 2011-01-26 | 杭州奋进齿轮箱有限公司 | Marine gearbox with clutch mechanism |
| CN102672831A (en) * | 2011-03-17 | 2012-09-19 | 苏州赫瑞特电子专用设备科技有限公司 | Spindle system of multi-wire saw |
| CN202656337U (en) * | 2012-06-11 | 2013-01-09 | 苏州赫瑞特电子专用设备科技有限公司 | Spindle system of multi-wire cutting machine |
| CN103481387A (en) * | 2012-06-11 | 2014-01-01 | 苏州赫瑞特电子专用设备科技有限公司 | Main shaft system of multi-wire cutting machine |
| CN203542883U (en) * | 2013-11-15 | 2014-04-16 | 金建华 | Multi-wire sawing machine main shaft mechanism with circulation cooling structure |
| CN104647620A (en) * | 2013-11-23 | 2015-05-27 | 烟台力凯电子科技有限公司 | Multi-wire sawing machine spindle system |
| JP5964197B2 (en) * | 2012-10-11 | 2016-08-03 | コマツＮｔｃ株式会社 | Wire saw |
| CN206870151U (en) * | 2017-04-07 | 2018-01-12 | 苏州赫瑞特电子专用设备科技有限公司 | A kind of main shaft of multiline cutter mechanism |
-
2017
- 2017-04-07 CN CN201710223629.6A patent/CN106985294A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11198018A (en) * | 1998-01-16 | 1999-07-27 | Tokyo Seimitsu Co Ltd | Endless wire saw attached with stationary abrasive grain |
| JP2000218507A (en) * | 1999-01-28 | 2000-08-08 | Tokyo Seimitsu Co Ltd | Group roller supporter of wire saw |
| CN101700684A (en) * | 2009-11-26 | 2010-05-05 | 中国电子科技集团公司第四十五研究所 | Main shaft of multiline cutter |
| CN201723688U (en) * | 2010-07-02 | 2011-01-26 | 杭州奋进齿轮箱有限公司 | Marine gearbox with clutch mechanism |
| CN102672831A (en) * | 2011-03-17 | 2012-09-19 | 苏州赫瑞特电子专用设备科技有限公司 | Spindle system of multi-wire saw |
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| CN103481387A (en) * | 2012-06-11 | 2014-01-01 | 苏州赫瑞特电子专用设备科技有限公司 | Main shaft system of multi-wire cutting machine |
| JP5964197B2 (en) * | 2012-10-11 | 2016-08-03 | コマツＮｔｃ株式会社 | Wire saw |
| CN203542883U (en) * | 2013-11-15 | 2014-04-16 | 金建华 | Multi-wire sawing machine main shaft mechanism with circulation cooling structure |
| CN104647620A (en) * | 2013-11-23 | 2015-05-27 | 烟台力凯电子科技有限公司 | Multi-wire sawing machine spindle system |
| CN206870151U (en) * | 2017-04-07 | 2018-01-12 | 苏州赫瑞特电子专用设备科技有限公司 | A kind of main shaft of multiline cutter mechanism |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681100A (en) * | 2021-09-24 | 2021-11-23 | 燕山大学 | Main shaft unloading device for multi-wire cutting machine and working method thereof |
| CN113681100B (en) * | 2021-09-24 | 2022-07-01 | 燕山大学 | Main shaft unloading device for multi-wire cutting machine and working method thereof |
| CN115816672A (en) * | 2022-11-25 | 2023-03-21 | 燕山大学 | Main shaft synchronous transmission device for double-station multi-wire cutting machine |
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Application publication date: 20170728 |