CN101687247B - Method for manufacturing coil member and coil member - Google Patents

Method for manufacturing coil member and coil member Download PDF

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Publication number
CN101687247B
CN101687247B CN200880023684XA CN200880023684A CN101687247B CN 101687247 B CN101687247 B CN 101687247B CN 200880023684X A CN200880023684X A CN 200880023684XA CN 200880023684 A CN200880023684 A CN 200880023684A CN 101687247 B CN101687247 B CN 101687247B
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China
Prior art keywords
coil component
tungsten filament
manufacturing approach
coil
plug
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CN101687247A (en
Inventor
秋元俊之
馆泽正博
中野康彦
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Toshiba Corp
Toshiba Materials Co Ltd
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Toshiba Corp
Toshiba Materials Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21FWORKING OR PROCESSING OF METAL WIRE
    • B21F3/00Coiling wire into particular forms
    • B21F3/02Coiling wire into particular forms helically
    • B21F3/04Coiling wire into particular forms helically externally on a mandrel or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21FWORKING OR PROCESSING OF METAL WIRE
    • B21F11/00Cutting wire
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21FWORKING OR PROCESSING OF METAL WIRE
    • B21F99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02Electrodes; Magnetic control means; Screens
    • H01J23/04Cathodes
    • H01J23/05Cathodes having a cylindrical emissive surface, e.g. cathodes for magnetrons
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H01J25/50Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/04Manufacture of electrodes or electrode systems of thermionic cathodes

Abstract

This invention provides a method for manufacturing a coil member formed of a tungsten wire. The method is characterized by comprising a coiling step of coiling a tungsten wire around a mandrel, a first cutting step of cutting the tungsten wire after the coiling step, an annealing step of heat treating the tungsten wire coiled around the mandrel in a reducing atmosphere, and an extraction step of extracting the mandrel from the coil after the heat treatment. After the mandrel extraction step, a second cutting step of cutting the coil member is preferably provided. According to the above constitution, a coil member for use, for example, in a filament cathode for a magnetron can be provided with good dimensional accuracy.

Description

The manufacturing approach of coil component and coil component
Technical field
The present invention relates to magnetron with middle coil component and manufacturing approaches of using thereof such as direct-heated cathode (filament cathode) parts, particularly can prevent the broken string of coil component and form accuracy are high, can increase substantially fabrication yield coil component and manufacturing approach thereof.
Background technology
From in the past, use refractory metal silks (wire rod) such as tungsten with the direct-heated cathode parts as magnetron always.Magnetron has been used to micro-wave oven etc., for example has the structure of record in the japanese kokai publication hei 6-5197 communique (patent documentation 1).Described in patent documentation 1, magnetron is the coil components that refractory metal silk etc. are configured as coil shape with the direct-heated cathode parts.
To make tungsten filament before the coil component and form diameter and be below the 1mm, further be the filament below the 0.7mm through tungsten bar being carried out Wire Drawing.When Wire Drawing,, for example in japanese kokai publication hei 11-86800 communique (patent documentation 2), reduce the frictional force with wire drawing die through application of lubricating on silk in order not make silk broken string.Like this, present situation is tungsten filament stress and easy broken string, thereby must take certain countermeasure.
In addition, tungsten filament is shaped as coil shape, described in patent documentation 2, generally adopts silk is wound on to be shaped as spiral helicine method for winding on the plug.In patent documentation 2, improve the batch process property of coil component through making the mechanization of above-mentioned coiling operation.As an example of the coiler device that uses in the above-mentioned coiling operation, but illustration goes out the coiler device of record in the japanese kokai publication hei 7-14558 communique (patent documentation 3).That is to say, in patent documentation 3, supply with tungsten filament, be wound on the plug and reel, make coil component through the coil that obtains is cut into needed length from the wire rod spool.Reported through adopting patent documentation 3 such coiler devices to increase substantially batch process property.
But in the coil component made from above-mentioned manufacturing installation in the past, the outside diameter tolerance of produced coil component is big, and every kind of goods or every batch exist that characteristic deviation is big, the unsettled defective of product property.And, because of the rigidity (elasticity) of tungsten filament itself is strong,, then also there is the problem that can not stably obtain target shape if only simply the silk material is wound on the plug.
In addition, in order to improve this situation that is not suitable for, tungsten filament is applied strong stress on one side and reel, but the problem that the fabrication yield of tungsten filament broken string, coil component descends easily occurs taking place easily on one side also tested.
Patent documentation 1: japanese kokai publication hei 6-5197 communique
Patent documentation 2: japanese kokai publication hei 11-86800 communique
Patent documentation 3: japanese kokai publication hei 7-14558 communique
Summary of the invention
The present invention accomplishes for solving above-mentioned problem in the past; Its purpose is to provide a kind of coil component and manufacturing approach thereof; In the manufacturing approach of the coil component that has adopted tungsten filament, can suppress coil shape deviation and tungsten filament broken string, can increase substantially the yield rate of coil component; And the outside diameter tolerance of coil component reduces, and characteristic is even.
In order to achieve the above object; The manufacturing approach of coil component of the present invention is the manufacturing approach of the coil component that formed by tungsten filament; It is characterized in that possessing following operation: the operation of extracting that tungsten filament is wound on coiling operation around the plug, after the coiling operation, cuts off annealing operation that the 1st of tungsten filament cuts off operation, in reducing atmosphere, heat-treats with the coil state on the plug that is wound on, from coil, extracts plug after the heat treatment.
According to above-mentioned manufacturing approach; Owing to cut off tungsten filament to be wound on plug state on every side; Heat-treat in reducing atmosphere with the state that coil is wound on the plug on the other hand; Thereby can pass through the shape of plug hold-in winding parts, thereby can obtain being out of shape the coil component little, that dimensional accuracy is high.
In addition, in the manufacturing approach of above-mentioned coil component, preferably cut off operation at said the 2nd of the coil component that cuts off after extracting operation.After forming the coil component of long size, cut off by desired length (goods length L), expeditiously a plurality of coil components of manufacturing dimension uniform precision at 1 tungsten filament of reeling continuously.
In addition, in the manufacturing approach of above-mentioned coil component, preferably the standard wire with said tungsten filament is decided to be below the 1mm.Be decided to be below the 1mm through the standard wire with silk, the rigidity of silk reduces, and is processed into coil easily.In addition, can reduce occurring in the inner stress of silk, in manufacturing process, can access the few coil component of broken string.
In addition, in the manufacturing approach of above-mentioned coil component, convert by oxide (thorium oxide) in the preferred said tungsten filament and contain the thorium of 0.4~3 quality %.Contain the thorium of 0.4~3 quality % through converting, can obtain by ThO by oxide 2The high elevated temperature strength of disperseing and bringing, resistance to vibration and electron emission be excellent, be difficult to produce the tungsten filament of high temperature deformation.When the content of above-mentioned thorium oxide is lower than 0.4 quality %; Above-mentioned elevated temperature strength to improve effect insufficient; If content surpasses 3 quality % and reaches excessive on the other hand; Not only can not get adding the effect of the above Th of 3 quality %, and be in a ratio of the principal element that high-valency metal becomes the increase cost because of Th and W.So the content of thorium converted by oxide is set in the scope of 0.4~3 quality %.Particularly in order to realize high high temperature resistant morphotropism and electron emission, preferably with ThO 2Content be defined as the scope of 0.8~1.8 quality %.In addition, in order to realize high vibration resistance property, preferably with thorium oxide (ThO 2) content be set at the scope of 0.6~0.8 quality %.
In addition, in the manufacturing approach of above-mentioned coil component, preferred said coiling operation possesses on one side tungsten filament is applied back tension (tension force) more than the 3kg/cm Yi Bian supply with the operation of tungsten filament.Back tension through on one side tungsten filament being applied regulation is supplied with tungsten filament on one side, can eliminate the lax of silk on the supply lines, can improve the precision of winding form.When above-mentioned back tension was lower than 3kg/cm, the lax effect of eliminating above-mentioned silk was insufficient.
In addition, in the manufacturing approach of above-mentioned coil component, the rotary speed that preferred said coiling operation possesses with 300~1000rpm is wound on plug operation on every side with tungsten filament.If the above-mentioned rotary speed corresponding with the winding speed of silk is lower than 300rpm, then the manufacturing efficient of coil component is low, if above-mentioned on the other hand rotary speed surpasses 1000rpm, the stress that then acts on tungsten filament is excessive sometimes, is easy to generate the broken string of silk.Therefore, preferably above-mentioned rotary speed is set in the scope of 300~1000rpm.
In addition, in the manufacturing approach of above-mentioned coil component, the ratio (D1/D2) of the D outer diameter 1 of preferred said coil component and the D outer diameter 2 of said plug is in 1.2~1.5 scope.Be lower than at above-mentioned external diameter at 1.2 o'clock than (D1/D2), too small with respect to the line footpath of the D outer diameter 1 of coil component, except easy broken string, also descend as the conformality of the coil component of goods.On the other hand, if above-mentioned external diameter reaches excessive than (D1/D2) above 1.5, although broken string reduces, the deviation of the finishing size of coil component increases.In addition, reduce with respect to the bending radius of the wire rod of plug, because of bending makes wire rod be easy to generate crackle etc.
In addition, in the manufacturing approach of above-mentioned coil component, preferably before said coiling operation, possesses the operation that said tungsten filament is heated.
Above-mentioned heating process for example is in the operation of under 800~1000 ℃ the temperature tungsten filament being carried out the heating about 1~10 minute.Through possessing this heating process, can improve the ductility of tungsten filament, can prevent the broken string of silk effectively.
In addition, in the manufacturing approach of above-mentioned coil component, preferably carry out operation that said tungsten filament is heated with combustion flame.As long as the small-sized burner of equipment just can form combustion flame simply, therefore can prevent the maximization of heater.
In addition, in the manufacturing approach of above-mentioned coil component, preferred said combustion flame is to make the flammability gas combustion and the flame that forms.In addition, preferred said flammability gas is the mist that mixes with atmosphere.Through changing the blending ratio of flammability gas and atmosphere, can adjust ignition temperature and burning velocity.
In addition, in the manufacturing approach of above-mentioned coil component, the reducing atmosphere that is preferred for implementing said annealing operation is a hydrogen atmosphere.Through being adjusted into hydrogen atmosphere, can prevent the oxidation of coil component, and the elimination deformation effect that can obtain organizing.And can reduce the impurity such as carbon that remain in the surface, can prevent to result from the deterioration of the coil component of impurity.
In addition, in the manufacturing approach of above-mentioned coil component, the quantity delivered of preferred said hydrogen in atmosphere be 700 standard liters/hour more than.If above-mentioned quantity delivered be lower than 700 standard liters/hour, then above-mentioned oxidation-protective effect, to eliminate deformation effect insufficient.
In addition, in the manufacturing approach of above-mentioned coil component, the heat treatment temperature in the preferred said annealing operation is 1000~1500 ℃.Annealing operation is to be used to remove residual stress, the distortion of removing tissue that produces in the coil component of coiling, the heat treatment that makes the dimensionally stableization of coil component.When this heat treatment temperature was lower than 1000 ℃, the stabilization effect that above-mentioned residual stress removes effect, eliminate deformation effect and shape was insufficient.On the other hand, when above-mentioned heat treatment temperature surpassed 1500 ℃, the tungsten tissue can recrystallize.
In addition, in the manufacturing approach of above-mentioned coil component, the heat treatment time in the preferred said annealing operation is 5~30 minutes.In the scope of above-mentioned heat treatment time, above-mentioned residual stress removes effect, eliminate deformation effect and the dimensionally stable effect abundant.
In addition, in the manufacturing approach of above-mentioned coil component, the preferred the said the 2nd cut off operation be with stationary fixture be inserted into coil component hollow bulb, cut tool and move the operation of cutting off coil component to orthogonal direction through making with respect to stationary fixture.Through stationary fixture being inserted into the hollow bulb of coil component, can be effectively fixing place of incision, cut tool and move to orthogonal direction through making with respect to stationary fixture with this state, can cut off coil component exactly.Fix owing to cut the cutting direction of tool, so otch is identical, the directionality during installation can not become problem.
In addition, in the manufacturing approach of above-mentioned coil component, preferred said coil component is that magnetron is used the direct-heated cathode parts.When above-mentioned coil component is used for magnetron with the direct-heated cathode parts, can bring into play good durability and shape stability.
Coil component of the present invention is the coil component made from above-mentioned each manufacturing approach, is to be the coil component that the tungsten filament below the 1mm forms directly by line, and it is characterized in that: when mean outside diameter being defined as D1 (mm), the deviation of external diameter is in the scope of D1 ± 0.1mm.That is to say, can obtain the high coil component of dimensional accuracy of external diameter.
In addition, in above-mentioned coil component, the line of preferred said tungsten filament footpath is below 0.7mm.The standard wire that will constitute the tungsten filament of coil component in the present invention is decided to be below the 1mm.The rigidity of silk improves if its line directly surpasses 1mm, is difficult to form coil shape.Through its standard wire is decided to be below the 0.7mm, the rigidity as material is reduced, be processed into coil shape more easily.
In addition, in above-mentioned coil component, from improving the aspect of form accuracy, more preferably the deviation of said external diameter is in the scope of D1 ± 0.05mm.
In addition, in above-mentioned coil component, preferred said tungsten filament converts by oxide and contains the thorium of 0.4~3 quality %.Contain the above-mentioned thorium of 0.4~3 quality % through converting, can obtain by ThO by oxide 2High elevated temperature strength, resistance to vibration and the electron emission that disperses to bring good, be difficult to produce the tungsten filament of high temperature deformation.
In addition, in above-mentioned coil component, the length of preferred said coil component is more than 10mm.As long as the length L of coil component just can increase the number of times of continuous reeling more than 10mm, improve the batch process property of coil component.
In addition, in above-mentioned coil component, preferred said coil component is that magnetron is used the direct-heated cathode parts.When above-mentioned coil component is used for magnetron with the direct-heated cathode parts, can bring into play good durability and shape stability.
In addition, in above-mentioned coil component, the average aspect ratio of the crystal grain of the surface element of preferred said tungsten filament is lower than 3, and the average aspect ratio of the crystal grain of central part is more than 3.
Here, measure the average aspect ratio of crystal grain of surface element and the central part of above-mentioned tungsten filament by following method.That is to say; As shown in Figure 8; Absorb the enlarged photograph that unit are is the zone of 50 μ m * 50 μ m respectively from the surface element and the organizing of central part of tungsten filament, the length of the major axis of each tungsten particle of here appearing before one's eyes as long axis length (L1), is vertically rule from the central point of major axis; The length that this vertical line is included in the part in the particle is obtained the aspect ratio of each particle as minor axis length (S1) through calculating long axis length/minor axis length.Average aspect ratio is included in the mean value of aspect ratio of all particles of above-mentioned zone.
As long as the average aspect ratio of the crystal grain of the surface element of above-mentioned tungsten filament be lower than 3 and also the average aspect ratio of the crystal grain of central part more than 3, just can prevent the generation of the distortion that is accompanied by bending machining of tungsten filament effectively, can reduce the outside diameter tolerance of coil component.
Preferred implement heat treatment so that the average aspect ratio of the crystal grain of the surface element of above-mentioned tungsten filament be lower than 2, the aspect ratio of central part is more than 5 on the other hand, can reduce the outside diameter tolerance of coil component thus more.
For the average aspect ratio of the crystal grain of the surface element that makes above-mentioned tungsten filament is lower than 3, and the average aspect ratio of the crystal grain of central part need carry out following processing more than 3.That is to say, as the heat-treat condition in the said annealing operation, as long as temperature is defined as 1000~1500 ℃, with time rule be 5~30 minutes just passable.Through under the temperature of effects such as the residual stress that can be removed, elimination distortion, dimensionally stableization, carrying out the short time heat treatment below 30 minutes, can change the aspect ratio of surface element and central part.In other words, preferably implement annealing in process, so that the average aspect ratio of the crystal grain of surface element and central part reaches the size of regulation.
In addition, in above-mentioned coil component, the average crystal grain particle diameter of tungsten that preferably constitutes said tungsten filament is below 6 μ m.Be defined in below the 6 μ m through average crystal grain particle diameter, can improve the structural strength of coil component, prevent broken string above-mentioned tungsten.
Moreover; About above-mentioned average crystal grain particle diameter; As above-mentioned shown in Figure 8, absorb the enlarged photograph that unit are is the zone of 50 μ m * 50 μ m respectively from the surface element and the organizing of central part of tungsten filament, with the mean value of the long axis length (L1) of each tungsten grain of appearing before one's eyes and minor axis length (S1) here as size of microcrystal ((long axis length+minor axis length) ÷ 2=size of microcrystal)) and calculate; Obtain this size of microcrystal for a place of tungsten filament surface element and a place of central part, be set at both mean value.
According to the present invention, can reduce the outside diameter tolerance of the coil component that forms by tungsten filament and the broken string of tungsten filament significantly.Therefore, can increase substantially the fabrication yield of the high coil component of dimensional accuracy.The high-quality coil component of the low and stability of characteristics of the outside diameter tolerance of coil component can be provided in addition.
Description of drawings
Fig. 1 is the flow chart of an example of process sequence of the manufacturing approach of expression coil component of the present invention.
Fig. 2 is the front view of coiling operation of the manufacturing approach of expression coil component of the present invention.
Fig. 3 be expression coil component of the present invention manufacturing approach the 1st cut off the object lesson of operation front view.
Fig. 4 is the front view of state that the coil component of long size has been made in expression.
Fig. 5 is the cutaway view of the state of expression when with heat-treatment furnace a plurality of plugs that are wound with coil component being carried out annealing in process simultaneously.
Fig. 6 is the front view of external diameter that expression takes out the coil component of the present invention of plug.
Fig. 7 be expression coil component of the present invention manufacturing approach the 2nd cut off operation phantom.
Fig. 8 is the organization chart that schematically shows the crystalline structure of the tungsten filament that uses among the present invention.
The specific embodiment
The manufacturing approach of coil component of the present invention is the manufacturing approach of the coil component that formed by tungsten filament; It is characterized in that possessing following operation: the operation of extracting that tungsten filament is wound on coiling operation around the plug, after the coiling operation, cuts off annealing operation that the 1st of tungsten filament cuts off operation, in reducing atmosphere, heat-treats with the coil state on the plug that is wound on, from coil, extracts plug after the heat treatment.
Tungsten filament is to be the silk (wire rod) of principal component with tungsten, also can use pure tungsten or tungsten alloy.As tungsten alloy, the W alloy that contains thorium is arranged, contain the W alloy of rhenium and contain W alloy of adulterants such as Al, Si, K etc.The tungsten alloy that wherein especially contains thorium; Because thorium oxide is the high-melting-point material, can improve the mechanical performance under the high temperature through its dispersion-strengthened effect, high temperature deformation resistance property is strong; Have good electron emission, therefore being suitable as magnetron uses the direct-heated cathode parts.
In addition, preferably with thorium oxide (ThO 2) form add above-mentioned thorium, preferably convert and contain the thorium of 0.4~3 quality % by oxide.If be lower than 0.4 quality %, then additive effect is low, and 3 quality % ground are superfluous to be added even surpass, and also can not get better effect.
In addition, directly do not have special qualification for the line of tungsten filament, but be preferably below the 1mm.If the line of silk directly surpasses 1mm, then rigidity is strong excessively, is difficult to be processed into coil shape.Consider the difficulty that silk is processed into coil shape, line directly is preferably 0.2~0.7mm.Also can be lower than 0.2mm, if but too detailed rules and regulations broken string accident increase.
Fig. 1 representes an example of the operation of manufacturing approach of the present invention.Below describe by process sequence.
The coiling operation at first is described.As shown in Figure 2, the coiling operation be external diameter be D2 plug 2 around tungsten filament 1 is wound as helical form, form the operation of the coil component 3 of long size.Above-mentioned plug 2 preferably is made up of refractory metals such as tungsten, molybdenums.
For example, when manufacturing was used for magnetron with the coil component 3 of direct-heated cathode parts, if deviation appears in the spacing of coil outer diameter D1 or coil (gap of adjacent coil) P, then the performance as negative electrode just might produce deviation.If cathode performance produces deviation, then adopt its magnetron and then be that deviation will appear in the performance of equipment such as micro-wave oven, can not guarantee the performance of stipulating sometimes.Therefore, in order to ensure stable performance, need reduce wide etc. the dimensional discrepancy of the volume of coil outer diameter and coil as far as possible.
On the other hand, tungsten filament 1 is high because of the possibility that method of operating breaks, if the interruption of manufacturing process repeatedly takes place, not only make efficient and descend easily, and waste material.So, for the goods yield rate that improves coil component 3 and make efficient, must take to reduce countermeasure and the dual countermeasure of countermeasure that reduces the broken string of tungsten filament 1 of the dimensional discrepancy of coil component 3.
At first, in the coiling operation, when supplying with tungsten filament 1 around the plug 2, applying the operation that the back tension more than the 3kg/cm is supplied with while preferably possess.Tungsten filament 1 is to get off to supply with silk with the state on the reel that twists in wire rod spool etc.If this moment, tungsten filament 1 was lax, then is wound on 2 last times of plug and can not stably supplies with tungsten filament 1, and might make the reeling condition can not be constant at helically.
Thereby, preferably the tungsten filament of supplying with 1 is added back tension (tension force).The upper limit of this back tension is decided because of the line of tungsten filament 1 footpath, but online footpath is preferably below the 7kg/cm when to be 1mm following.If back tension is excessive, then the possibility increase of broken string takes place in silk.The preferred scope of this back tension is 4~6kg/cm.
In addition; Supply with the silk 1 and the plug 2 of reeling around the time, preferably possess following operation: tungsten filament 1 is wound on the plug 2 with the front end that grips silk 1 and rotation comes the rotary speed of the rotating drum of undrawn yarn to reach the scope of 300~1000rpm around the plug mode.If above-mentioned rotary speed surpasses 1000rpm, the load that then acts on tungsten filament 1 increases, and the possibility of broken string increases.In addition, the interval of coil component 3 (spiral at interval) P is easy to generate deviation.On the other hand, in the slow part of rotary speed, the possibility of broken string is low, if but too slowly then productivity is poor.Especially tungsten filament 1 intensity that contains thorium is high, be difficult for broken string, therefore can be with the ratio of 700~900rpm rotary speed and reeling quickly faster.
In addition, the D outer diameter 1 of preferred coil component 3 and the ratio (D1/D2) of the D outer diameter 2 of plug 2 are in 1.2~1.5 scope.
Here, as the D outer diameter 1 of above-mentioned coil component, can calculate as its mean value through the external diameter of measuring coil component at axial 5 places arbitrarily.
Tungsten filament 1 has after unloading plug 2 owing to rigidity as previously mentioned is strong and returns the tendency that coil outer diameter is increased laterally.Therefore, be difficult to make the D outer diameter 1 of final coil component only roughly consistent with the line poor difference in footpath with the D outer diameter 2 of plug 2, on one side suppose to make its unanimity then must to be shaped by load sizable stress in one side, if the possibility of broken string increases but stress increases.
But, through with the ratio of the D outer diameter 1 of coil component 3 and the D outer diameter 2 of plug 2 promptly (D1/D2) can prevent effectively to break than being adjusted in 1.2~1.5 the scope, returning of shape is also little, thereby can reduce the dimensional discrepancy of coil component 3.If above-mentioned (D1/D2) is than being lower than 1.2, increase being wound on the mechanical load of 2 last times of plug tungsten filament 1, therefore the possibility of broken string increases.On the other hand, if (D1/D2) than surpassing 1.5, although the possibility of broken string reduces, the dimensional discrepancy of the coil component 3 that forms increases.The scope of preferred (D1/D2) ratio is 1.3~1.4.
In addition, the broken string accident for the silk 1 in the operation that prevents effectively to reel preferably possesses tungsten filament is carried out pre-warmed operation.Preferably possess and to supply with the operation of tungsten filament 1 in order being wound on the plug 2, promptly silk to be transported to the operation of the above-mentioned tungsten filament 1 of heating plug 2 way nearby from the wire rod spool.
1 effect has the weight of above-mentioned back tension (tension force), silk itself, the multiple stress such as stress when reeling to tungsten filament.For the broken string that prevents that these stress from causing, preferably in advance tungsten filament 1 is heated.Can relax the stress that produces in the tungsten filament 1 and improve ductility through heating, thereby be difficult to broken string.
In addition, preferably heat the operation of tungsten filament 1 with combustion flame.In addition, preferred burn flame is to make hydrogen-containing gas or flammability gas combustion and the flame that forms.In addition, preferred hydrogen-containing gas is the mist of hydrogen and atmosphere.
The ductility of tungsten filament 1 can be improved through heating, thereby broken string can be prevented.In addition, through adopting combustion flame, can prevent the maximization of heater.In addition, through reducibility gas such as employing hydrogen, the effect of can also be removed impurity or elimination distortion.In addition, this heating process prevents the silk broken string owing to its objective is, therefore also can be employed in the mist that has mixed atmosphere in the hydrogen.In addition, as flammability gas, can enumerate out methane gas, ethane gas and the propane gas used in the town gas or their mist etc.In addition, if in order to prevent broken string, even flammability gas also can obtain effect of sufficient.
As shown in Figure 2, tungsten filament 1 is wound on the axial length (2L) of regulation plug 2 around after, implement the 1st to cut off operation with what tungsten filament 1 cut off.The 1st cuts off operation is normally cut off tungsten filament 1 in the position of the terminal point that becomes operating winding operation; But it is as shown in Figure 3; Also can coil component 3 be wrapped under the state on the plug 2; Stationary fixture 4 is installed in the off-position of coil component 3 from the outside, cuts off through coming and going the tools 5 of cutting that move 4 of stationary fixtures.When coil component 3 is goods, determine above-mentioned off-position according to desired length L.
The length (coiling length) of the coil component 3 that forms through 1 operating winding is decided by the length of plug 2, but is preferably more than the 300mm, more preferably more than the 400mm.That is to say, as shown in Figure 4, preferably through at the periphery coiling tungsten filament of the plug 2a of long size to form the coil component 3a of long size.So long as the length of the coiling that obtains through 1 operating winding is long, just can improve productivity pro rata with this length.
Moreover the coiling length in the embodiment shown in Figure 2 is represented the example that forms by as 2 times of the desired coil component length L of goods length 2L.
After having implemented above-mentioned the 1st cut-out operation, the state that then directly is wound on the plug 2 with coil component 3 carries out annealing operation.That is to say, be implemented in the annealing operation of heat-treating in the reducing atmosphere with the state that coil is wound on the plug.
Concrete operation is: the tungsten filament of around the plug 2a of long size shown in Figure 4, reeling; Form the coil component 3a of long size; So form a plurality of coil component 3a, then as shown in Figure 5, range upon range of via backing plate 6 at the both ends of plug 2a; The duplexer that obtains is put in the heat-treatment furnace of the reducing atmosphere that is adjusted into regulation, under defined terms, heat-treated.
The reducing atmosphere of preferred above-mentioned annealing operation is a hydrogen atmosphere.In addition, the heat treatment temperature of preferred annealing operation is 1000~1500 ℃, and heat treatment time is 5~30 minutes.
As stated, tungsten filament is having returning of shape through the coiling operation by force because of rigidity after plug unloads.That is to say, be wound on plug on the time compare, the external diameter of end article increases.In addition, through winding work, effect has residual stress to silk.Thereby, need relax residual stress through implementing above-mentioned annealing operation, eliminate distortion simultaneously.
Directly with the coil component magnetron of packing into, the distortion that the heat of the soldering when then assemble by magnetron etc. causes increases if do not implement the heat treatment of above-mentioned elimination distortion, makes the yield rate deterioration of magnetron.In addition, also might the heat when using magnetron produce distortion.
In this embodiment,, in reducing atmosphere, implement heat treatment (annealing in process) with the state of the coil of reeling on the plug in order to reduce by unload returning and the dimensional discrepancy that causes and eliminate distortion behind the coil component from plug.
As shown in Figure 5; Owing to directly heat-treat simultaneously with the state of the coil component 3a that reeling on the plug 2a; Therefore can return and be out of shape under the little state and heat-treat in the shape of coil, thereby can reduce the deviation of the size of coil component, and can improve dimensional accuracy.In addition, through the reducing atmosphere effect that effect and the reduction of distortion remove impurity that can also be eliminated.The surface discolouration that can also suppress in addition, silk through under reducing atmosphere, annealing.
Reducing atmosphere as in the above-mentioned annealing operation is preferably hydrogen.So long as hydrogen just will remove attached to the reduction of impurity such as the lip-deep carbon of silk easily, the embrittlement of the tungsten wire rod that can prevent to cause by impurity.In addition, preferred heat treatment temperature is 1000~1500 ℃.The effect of when heat treatment temperature is lower than 1000 ℃, eliminating distortion is low, even surpass 1500 ℃ of effects that also can not get better eliminating distortion, tungsten is recrystallized, and makes deterioration in characteristics.
In addition, heat treatment time is preferably 5~30 minutes.If heat treatment time is lower than 5 minutes, the effect of then eliminating distortion is insufficient, if heat treatment time is higher than 30 minutes, also can not get better effect.Preferably be 10~20 minutes under 1050~1350 ℃ temperature.
In addition, preferably supplying in the quantity delivered of the hydrogen of the atmosphere of annealing operation is 700 standard liters (NL)/hour more than (H).Reducibility gas such as hydrogen also can be brought into play the effect of removing impurity as previously mentioned.Therefore, hydrogen is circulated in heat-treatment furnace, keep the surperficial state of contact of hydrogen and coil component.The upper limit for the quantity delivered of hydrogen does not have special qualification, but considers the load to feedway, be preferably 1700 standard liters/hour below.More preferably 900~1300 standard liters/hour.
In addition, the state owing to the coil component of reeling with plug in this embodiment carries out annealing in process, so the good operability of goods.If unload plug before the annealing operation, a plurality of coil components are packed into carry out annealing in process in the container, then coil component tangles to each other, and the coil component that needs numerous and diverse operation to be tangled in the annealing back takes out.
In contrast, as shown in Figure 5 in this embodiment, owing to carry out annealing in process with the state of the coil component 3a that on plug 2a, reeling, so coil component can not tangle to each other.So, can the plug 2a that be wound with coil component 3a be arranged in take-in box (heat-treatment furnace) in length and breadth and then on short transverse, the treating capacity that once can anneal increases, thereby improves the property produced in batches greatly.
Then, after the annealing heat treatment step is ended, implement the operation of extracting plug.
The front view of the state that Fig. 6 is expression after state shown in Figure 2 cuts off operation and annealing operation and then from coil component 3, takes out plug 2 via the 1st.Coiling length in this embodiment shown in Figure 6 is represented the example that forms by as 2 times of the desired coil component length L of goods length 2L.
In addition, also can after extracting operation, carry out as required the 2nd cutting off operation with what the coil component that obtains 3 cut off again.In the time can coil component after extracting operation shown in Figure 6 directly being used with direct-heated cathode as magnetron, that is to say as coiling length 2L during directly for goods length, do not need the 2nd to cut off operation.
On the other hand, like Fig. 2 and shown in Figure 6,,, just can improve batch process property as long as the length that is wound on the coil component on the plug 2 is reached more than 2 times (2L) using direct-heated cathode and the length legislations of necessary coil component 3 during as magnetron as L.
In addition, above-mentioned the 2nd cut-out operation can be undertaken by rupturing operation shown in Figure 7.That is to say preferably possess following operation: the stationary fixture 4a that will be used for fixing the cut-out portion of coil component 3 is inserted into the hollow bulb of coil component 3, cuts tool 5 and moves to orthogonal direction with respect to stationary fixture 4a and cut off coil component 3 through making.After stationary fixture 4a being inserted into the hollow bulb of coil component 3 and having fixed coil component 3, cut tool 5 and push to orthogonal direction through making with respect to stationary fixture 4a, can cut off coil component 3 by the goods length L of regulation.As long as making the cutting direction of cutting tool 5 is certain orientation, just can make the otch of coil component 3 identical.If otch is identical, then just can be when packing magnetron into regardless of directionality, thereby can improve the assembly property of magnetron.
According to the manufacturing approach of the coil component of this above embodiment, can be with the Deviation Control of the mean outside diameter D1 of coil component at D1 ± 0.1mm, further be controlled at D1 ± 0.05mm.For example, when the mean outside diameter D1 with coil component was set in 4mm, the D outer diameter 1 of resulting coil component was in the scope of 4 ± 0.1mm.In addition, can also reduce the broken string accident.Therefore, be defined as at 100 o'clock in the initial stage input amount with tungsten filament, can make becomes coil component more than 90, can reach more than 90% and then the fabrication yield more than 95%.
In addition, also can be as required implement operation that coil component is cleaned after cutting off operation the 2nd.Moreover, about the mean outside diameter D1 of coil component shown in Figure 6, can obtain its mean value through the diameter of measuring coil component 3 at axial 5 places arbitrarily.In addition, about the deviation of the external diameter of coil component 3, can be through the maximum outside diameter and the minimum outer diameter of selection wire coil component 3, D1 compares with mean outside diameter.
Such coil component is suitable as magnetron and uses the direct-heated cathode parts.Magnetron does not have special qualification with the size of the coil component that uses in the direct-heated cathode, but when being used for magnetron for microwave oven, preferred external diameter is that 2~6mm, length are 10~20mm.In other words, the present invention possesses the excellent manufacturing approach of the batch process property of the coil component of size like this.
According to above-mentioned manufacturing approach; Even adopt line directly for below the 1mm and then make loop length (L) for the thin tungsten filament below the 0.7mm and be the above coil component of 10mm, also can provide outside diameter tolerance with respect to mean outside diameter D1 be controlled at ± scope of 0.1mm in so that the little coil component of outside diameter tolerance in the scope of ± 0.05mm.Moreover, do not have special qualification as the upper limit of the length (L) of the coil component of end article, but preferred loop length on be limited to below the 50mm, more preferably below the 20mm.
Then, carry out bright specifically with reference to following embodiment to concrete embodiment of the present invention.
(embodiment 1~4, comparative example 1~3)
Prepared to contain the tungsten filament (line directly is 0.5mm) of the thorium of 1.0 quality % by the oxide conversion.Adopt this tungsten filament, through make up respectively following operation make external diameter be 4mm, length be 13mm be used for the coil component of magnetron with direct-heated cathode.
Then, the deviation (dimensional accuracy) and the goods yield rate of the outside dimension of the aspect ratio of the crystal grain of the surface element of the average grain diameter of the crystal grain of the tungsten filament that constitutes each coil component that obtains through each manufacturing approach manufacturing and tungsten filament and central part, coil component are measured.
Have again, the aspect ratio of the crystal grain of the surface element of the average grain diameter of the crystal grain of each tungsten filament and tungsten filament and central part is measured by the main points of Fig. 8.In addition; Obtaining the coil component external diameter is the deviation (dimensional accuracy) of the maximum that departs from of the external diameter of the plug of 4mm as the outside dimension of coil component from external diameter, and the ratio (gross weight of the tungsten filament of the gross weight/input of resulting coil component) of total weight with the weight of the tungsten filament of input of obtaining resulting coil component is as the goods yield rate.
The operation that is used to form coil component is following.
Operation A1: supply with tungsten filament while apply the back tension of 4.5kg/cm near from the wire rod spool to plug.
Operation A2: while when the back tension that nearby applies 4.5kg/cm from the wire rod spool to plug is supplied with tungsten filament, have the operation that tungsten filament is heated through the combustion of mixed gas flame that has adopted hydrogen to mix with atmosphere.
Operation A3: nearby do not apply back tension ground from the wire rod spool to plug and supply with tungsten filament.
Process B 1: the rotary speed with 800rpm goes up the coiling tungsten filament at plug (external diameter 2.9mm * length 200mm).
Process B 2: the rotary speed with 1300rpm goes up the coiling tungsten filament at plug (external diameter 2.9mm * length 200mm).
Operation C1: the length that coiling is proceeded to coil component reaches 130mm, then, cuts off operation.In addition, coiling is adjusted to and makes spacing P reach 1.1~1.2mm.
Step D 1: the plug under 40 states that are wound with coil is packed in the take-in box, with the quantity delivered of hydrogen be defined as 1000 standard liters/hour, heat-treat temperature and be 1300 ℃ * 15 minutes annealing in process.
Step D 2: do not carry out annealing in process.
Step D 3: the plug under 40 states that are wound with coil is packed in the take-in box (heat-treatment furnace), in atmosphere, carry out 1300 ℃ * 15 minutes annealing in process.
Operation E1: extract plug.
Operation F1: stationary fixture is inserted the hollow bulb of coil component, cut tool and move to orthogonal direction, cut off coil component thus, obtain the coil component that length is 13mm with respect to stationary fixture through making.
Embodiment 1: operation A1 → process B 1 → operation C1 → step D 1 → operation E1 → operation F1
Embodiment 2: operation A2 → process B 1 → operation C1 → step D 1 → operation E1 → operation F1
Embodiment 3: operation A3 → process B 1 → operation C1 → step D 1 → operation E1 → operation F1
Embodiment 4: operation A1 → process B 2 → operation C1 → step D 1 → operation E1 → operation F1
Comparative example 1: operation A1 → process B 1 → operation C1 → step D 2 → operation E1 → operation F1
Comparative example 2: operation A3 → process B 1 → operation C1 → step D 2 → operation E1 → operation F1
Comparative example 3: operation A1 → process B 1 → operation C1 → step D 3 → operation E1 → operation F1
Characteristic to the coil component of each embodiment that obtains through the combination manufacturing of above-mentioned operation and comparative example is measured, the result shown in below obtaining.
Table 1
Results highlight shown in above-mentioned table 1, the dimensional accuracy of the coil component that obtains with the manufacturing approach of present embodiment all in ± 0.1 scope, has obtained high dimensional accuracy.In addition, through relatively with embodiment 1 and embodiment 3, learn under the situation that applies the back tension undrawn yarn on one side break less, the yield rate raising.In addition, from relatively learning of embodiment 1 and embodiment 2, with the broken string of the embodiment 2 of combustion flame heater strip less, the yield rate raising.In addition, as embodiment 4, if rotary speed (winding speed) surpasses 1000rpm, then broken string increase, decrease in yield.
In addition, relatively distinguishing from embodiment 1 and comparative example 1:, can increase substantially the dimensional accuracy of coil component through reducing atmosphere, annealing.
In addition; About the yield rate in the comparative example 1~3; Can be used as all calculating of coil component use as non-defective unit; But the permissible range with dimensional accuracy is defined as ± during 0.1mm, yield rate descends significantly, and the yield rate of comparative example 1 is 0.70, the yield rate of comparative example 2 is 0.54, the yield rate of comparative example 3 is 0.55.
(embodiment 5~7)
Make the coil component of embodiment 5~7 through making up following each operation.
Process B 3: with the rotary speed of the 500rpm tungsten filament of around plug (external diameter 2.9mm * length 200mm), reeling.
Process B 4: with the rotary speed of the 800rpm tungsten filament of around plug (external diameter 2.2mm * length 200mm), reeling.
Step D 4: make 40 plugs under the state that is wound with coil, in the take-in box of packing into, with the quantity delivered of hydrogen be defined as 1000 standard liters/hour, heat-treat temperature and be 1200 ℃, time and be 20 minutes annealing in process.
Embodiment 5: operation A2 → process B 3 → operation C1 → step D 1 → operation E1 → operation F1
Embodiment 6: operation A2 → process B 4 → operation C1 → step D 1 → operation E1 → operation F1
Embodiment 7: operation A2 → process B 1 → operation C1 → step D 4 → operation E1 → operation F1
Characteristic to through the coil component of each embodiment of the combination manufacturing of above-mentioned operation is measured, the result shown in below obtaining.
Table 2
Results highlight shown in above-mentioned table 2, the embodiment 5 and the embodiment 7 that adopt the coil component external diameter and the manufacturing approach of ratio in preferable range of the present invention of plug external diameter to make obtain good result in dimensional accuracy and yield rate both sides.
On the other hand, as embodiment 6, than (coil component external diameter/plug external diameter) when exceeding preferable range, dimensional accuracy descends above-mentioned.
(embodiment 8~9)
Except the D outer diameter 1 with coil component is defined as 5.0mm, the D outer diameter 2 of plug is defined as the 3.8mm, adopt with embodiment 2 same manufacturing processes and handle, make the coil component of embodiment 8.On the other hand,, adopt with embodiment 2 same manufacturing processes and handle, make the coil component of embodiment 9 except the D outer diameter 1 with coil component is defined as 3.5mm, the D outer diameter 2 of plug is defined as the 2.7mm.Resulting each coil component is carried out identical characteristic measurement, obtain the result shown in the following table 3.
Table 3
Figure G200880023684XD00162
Results highlight shown in above-mentioned table 3 is even distinguished that the coil component of each embodiment also can obtain good dimensional accuracy and yield rate when changing the external diameter of coil component.
(embodiment 10~11)
Then, contain the silk (line directly is 0.7mm) of the thorium of 0.5 quality %, adopt with embodiment 2 same operations and handle, the coil component of making embodiment 10 except tungsten filament being transformed to by the oxide conversion.In addition, contain the silk (line directly is 0.3mm) of the thorium of 2.0 quality %, adopt with embodiment 2 same manufacturing processes and handle, the coil component of making embodiment 11 except tungsten filament being transformed to by the oxide conversion.Resulting each coil component is carried out identical characteristic measurement, obtain the result shown in the following table 4.
Table 4
Figure G200880023684XD00171
Results highlight shown in above-mentioned table 4 is even distinguished that the coil component of each embodiment also can obtain good dimensional accuracy and yield rate when line footpath that changes tungsten filament or thorium content.
(embodiment 12~16)
Adopt the manufacturing process of embodiment 1 or embodiment 2, press the length (L) that changes coil component shown in the table 5 in addition, make the coil component of each embodiment 12~16.Moreover, the mist that embodiment 15 and embodiment 16 adopt town gas (is main flammability gas with the methane gas) to use as the combustion flame that in operation A2, uses.Resulting each coil component is carried out identical characteristic measurement, obtain the result shown in the following table 5.
Table 5
Figure G200880023684XD00172
Results highlight shown in above-mentioned table 5 even distinguished the length that changes coil component, also can obtain dimensional accuracy height (deviation of external diameter is little), coil component that yield rate is high.
(embodiment 17,18)
Except step D 1 being changed to following step D 5, the step D 6,, carrying out same mensuration by making coil component with embodiment 1 same operation.
Step D 5: the plug under 40 states that are wound with coil is packed in the take-in box, with the quantity delivered of hydrogen be defined as 1000 standard liters/hour, under 1700 ℃ heat treatment temperature, carry out 30 minutes annealing in process.
Step D 6: the plug under 40 states that are wound with coil is packed in the take-in box, with the quantity delivered of hydrogen be defined as 1000 standard liters/hour, under 1500 ℃ heat treatment temperature, carry out 100 minutes annealing in process.
Embodiment 17: operation A1 → process B 1 → operation C1 → step D 5 → operation E1 → operation F1
Embodiment 18: operation A1 → process B 1 → operation C1 → step D 6 → operation E1 → operation F1
Table 6
Figure G200880023684XD00181
Results highlight shown in above-mentioned table 6, distinguished like embodiment 17, do not have 18 to satisfy under the situation about preferably creating conditions, the growth of tungsten grain is big, the deviation of profile is big.
According to the present invention, can reduce the outside diameter tolerance and the tungsten filament broken string of the coil component that forms by tungsten filament significantly.Therefore, can increase substantially the fabrication yield of the high coil component of dimensional accuracy.In addition, the outside diameter tolerance that reduced coil component and the high-quality coil component of stability of characteristics can be provided.

Claims (22)

1. the manufacturing approach of a coil component that is formed by tungsten filament is characterized in that possessing following operation:
Tungsten filament is wound on plug coiling operation on every side;
After the coiling operation, cut off the 1st of tungsten filament and cut off operation;
Be wound on the annealing operation that the state on the plug is heat-treated with coil in reducing atmosphere;
From coil, extract the operation of plug after the heat treatment,
Said coiling operation possesses the back tension that on one side tungsten filament is applied more than the 3kg/cm and supplies with the operation of tungsten filament on one side, and possesses with the rotary speed of 300~1000rpm tungsten filament is wound on the operation around the plug,
The D outer diameter 1 of said coil component is that D1/D2 is in 1.2~1.5 scope with the ratio of the D outer diameter 2 of said plug.
2. the manufacturing approach of coil component according to claim 1 is characterized in that: cut off the 2nd of coil component after extracting operation and cut off operation said.
3. the manufacturing approach of coil component according to claim 1 and 2 is characterized in that: the standard wire of said tungsten filament is decided to be below the 1mm.
4. the manufacturing approach of coil component according to claim 1 and 2 is characterized in that: convert by oxide in the said tungsten filament and contain the thorium of 0.4~3 quality %.
5. the manufacturing approach of coil component according to claim 1 and 2 is characterized in that: before said coiling operation, possess the operation that said tungsten filament is heated.
6. the manufacturing approach of coil component according to claim 5 is characterized in that: carry out operation that said tungsten filament is heated with combustion flame.
7. the manufacturing approach of coil component according to claim 6 is characterized in that: said combustion flame is to make the flammability gas combustion and the flame that forms.
8. the manufacturing approach of coil component according to claim 7, it is characterized in that: said flammability gas is the mist that mixes with atmosphere.
9. the manufacturing approach of coil component according to claim 1 and 2, it is characterized in that: the reducing atmosphere of implementing said annealing operation is a hydrogen atmosphere.
10. the manufacturing approach of coil component according to claim 9 is characterized in that: the quantity delivered of said hydrogen in atmosphere be 700 standard liters/hour more than.
11. the manufacturing approach of coil component according to claim 1 and 2 is characterized in that: the heat treatment temperature in the said annealing operation is 1000~1500 ℃.
12. the manufacturing approach of coil component according to claim 1 and 2 is characterized in that: the heat treatment time in the said annealing operation is 5~30 minutes.
13. the manufacturing approach of coil component according to claim 2 is characterized in that: the said the 2nd to cut off operation be that stationary fixture is inserted into the hollow bulb of coil component and cuts tool and move the operation of cutting off coil component to orthogonal direction with respect to stationary fixture through making.
14. the manufacturing approach of coil component according to claim 1 and 2 is characterized in that: said coil component is that magnetron is used the direct-heated cathode parts.
15. one kind directly is the coil component that the tungsten filament below the 1mm forms by line; It is characterized in that: said coil component obtains through the manufacturing approach of the coil component of claim 1; When mean outside diameter was defined as D1, the deviation of external diameter was in the scope of D1 ± 0.1mm, and wherein the unit of D1 is mm.
16. coil component according to claim 15 is characterized in that: the line footpath of said tungsten filament is below 0.7mm.
17. according to claim 15 or 16 described coil components, it is characterized in that: the deviation of said external diameter is in the scope of D1 ± 0.05mm.
18. according to claim 15 or 16 described coil components, it is characterized in that: said tungsten filament converts by oxide and contains the thorium of 0.4~3 quality %.
19. according to claim 15 or 16 described coil components, it is characterized in that: the length of said coil component is more than 10mm.
20. according to claim 15 or 16 described coil components, it is characterized in that: said coil component is that magnetron is used the direct-heated cathode parts.
21. according to claim 15 or 16 described coil components, it is characterized in that: the average aspect ratio of the crystal grain of the surface element of said tungsten filament is lower than 3, and the average aspect ratio of the crystal grain of central part is more than 3.
22. coil component according to claim 21 is characterized in that: the average crystal grain particle diameter of tungsten that constitutes said tungsten filament is below 6 μ m.
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