CN101671812A - Heat treatment method of Ti-Al-N coating on hard alloy substrate - Google Patents
Heat treatment method of Ti-Al-N coating on hard alloy substrate Download PDFInfo
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- CN101671812A CN101671812A CN200910044473A CN200910044473A CN101671812A CN 101671812 A CN101671812 A CN 101671812A CN 200910044473 A CN200910044473 A CN 200910044473A CN 200910044473 A CN200910044473 A CN 200910044473A CN 101671812 A CN101671812 A CN 101671812A
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Abstract
The invention discloses a heat treatment method of a Ti-Al-N coating on a hard alloy substrate, comprising a step of high-temperature time effect treatment and a step of cooling after the high-temperature time effect treatment. The method is characterized in that the treatment temperature in the step of high-temperature time effect treatment ranges from 600 DEG C to 1,000 DEG C, and the Ti-Al-N coating treated by the method consists of TixAl1-xN, wherein the value of the x is no less than 0.3 and no more than 0.6. In the invention, after the treatment of the method, the toughness of the hard alloy substrate can be guaranteed, the binding force of the Ti-Al-N coating and the hard alloy substrate can be guaranteed, the hardness and abrasion resistance of the Ti-Al-N coating can be improved,and the service life of a hard alloy cutting tool can be prolonged.
Description
Technical field
The present invention relates to a kind of processing and treating method of inserted tool, relate in particular to a kind of heat treating method of Ti-Al-N coated cutting tool.
Background technology
Adopt the sedimentary Ti-Al-N coating of physical gas phase deposition technology (PVD), because its high rigidity and high-temperature oxidation resistance thereof are widely used in the cutting tool field.Ti-Al-N is solidly soluted into substitutional solid solution among the face-centered cubic TiN (c-TiN) for the Al atom, the mechanical property of Ti-Al-N coating is to a great extent by its Al content decision, higher Al content can improve the hardness and the antioxidant property of Ti-Al-N coating, but too high Al content then can cause the crystalline structure of Ti-Al-N coating to be changed to close-packed hexagonal structure (h) by face-centred cubic structure (c), thereby the mechanical property of Ti-Al-N coating is sharply descended, lose using value.How under the situation that keeps face-centred cubic structure, to improve the research focus that Al content becomes the Ti-Al-N coating.In fact, the solid solubility of AlN in TiN is very low, when 2700K, its solid solubility only is 5mol%, becomes possibility but the exclusive characteristic (kinetic limitation and ion bombardment) of PVD deposition technique makes it to form the metastable phase face-centered cubic TiAlN (c-TiAlN) with higher Al content; In general, the Ti-Al-N coating in the practical application is the supersaturated solid solution that is in metastable state with TiN cubic structure, and this supersaturated solid solution that is in metastable state makes age hardening in recent years be treated as possibility.
In recent years, the another characteristic of Ti-Al-N coating---age hardening character, begin to be subjected to increasing concern, can play the age hardening effect by The high temperature anneal, improve the hardness of coating, but anneal is one " double-edged sword " to the influence of Ti-Al-N coated cutting tool, when improving coating hardness, brings disadvantageous effect also might for other performance of cutter.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, provides a kind of and can guarantee hard alloy substrate toughness, guarantees Ti-Al-N coating and hard alloy substrate bonding force, also can improve Ti-Al-N coating hardness and wear resistance, the heat treating method to Ti-Al-N coating on hard alloy substrate of prolongation inserted tool working durability.
For solving the problems of the technologies described above, the technical scheme that the present invention proposes is a kind of heat treating method to Ti-Al-N coating on hard alloy substrate, described heat treating method comprises the cooling step after high-temperature aging treatment step and high-temperature aging are handled, and the treatment temp in the described high-temperature aging treatment step is 600 ℃～1000 ℃; The Ti-Al-N coating that described heat treating method is handled is by Ti
xAl
1-xN forms, and wherein the value of x is that 0.3≤x≤0.6 (is that the atomic percent of Al in the Ti-Al-N coating is controlled at 40at%～70at%).Described Ti-Al-N coating is generally the c-TiAlN coating with higher Al content that the PVD deposition technique forms.According to Quantum mechanical calculation, we find spinodal decomposition can not take place in the thermal decomposition process of Ti-Al-N coating when the atomic percent of Al is lower than 40%, therefore are difficult to cause age hardening; And when the atomic percent of Al was higher than 70%, the hexagonal structure that the structure of coating can change AlN into caused the rapid decline of its mechanical property and loses using value.The control of Al content can be controlled by the moiety of target and the technology of coating preparation in the coating.
Above-mentioned technical scheme provides a kind of method that metastable state c-TiAlN coating under the specific components is heat-treated, this heat treating method includes a high-temperature aging treatment step, c-TiAlN after high-temperature aging is handled will change to stable c-TiN and h-AlN, but because c-TiAlN belongs to lattice misfit big between the different crystal structure to h-AlN, this causes this transformation that the bigger forming core merit of needs takes place, and needs the c-AlN of metastable phase to be used as the intermediate phase transition and finishes.More particularly, in the process of the c-TiAlN coating being carried out the high-temperature aging processing, the c-TiAlN coating is at first separated out the c-TiN and the c-AlN of nano-scale through spinodal decomposition, and c-AlN changes stable h-AlN again into then.Nano-scale c-TiN that separates out and c-AlN stop the motion of dislocation in the coating, play the age hardening effect, have improved the hardness of coating.Through our experiment repeatedly, in the high-temperature aging treatment step of above-mentioned heat treating method, treatment temp should be controlled at 600 ℃～1000 ℃, so that the metastable state c-TiAlN coating under this specific components can be finished the conversion of microtexture better.Certainly, the selection of optimum treatmenting temperature generally can be determined according to the atom percentage content of Al in the c-TiAlN coating in this scope.According to our experiment, along with Al content increases, the treatment temp interval of coating age hardening can suitably reduce; If aging temperature is too high, the c-AlN grain growth of separating out, then age hardening effect may be not good.In addition, in above-mentioned heat treating method, described high-temperature aging treatment step is to carry out under vacuum or protection of inert gas atmosphere, and this is that those skilled in the art are known, because under the aerobic situation, oxidation takes place product easily.
In the above-mentioned heat treating method, the treatment time of described high-temperature aging treatment step can require according to final performance requriements, the cost control to the Ti-Al-N coating to coordinate and select, treatment time is too short, then the performance of coating and treatment effect may be not ideal enough, and the treatment time is long, then can reduce working (machining) efficiency, increase the processing treatment cost, through our experiment repeatedly and test, the preferred treatment time is 20min～180min, and the most preferred treatment time is 60min～120min.
In the above-mentioned heat treating method, also include a described cooling step behind the described high-temperature aging treatment step, and in the process of cooling that is covered with the Ti-Al-N coated carbides, its bonding phase Co can be changed towards close-packed hexagonal Co (h-Co) by face-centered cubic Co (c-Co), and then reduces the toughness of described Ti-Al-N coating; Its transition temperature changes with the difference of Co content, the transition temperature of pure Co is 417 ℃, and when Co content is lower than 20mass% (the Co content of cemented carbide cutting tool is positioned at this scope substantially), its Co phase transition temperature interval is positioned at 700 ℃～800 ℃, in order to reduce the above-mentioned transformation of Co in process of cooling as much as possible, take non-equilibrium process of cooling to suppress the transformation of Co phase in our cooling step after to above-mentioned high-temperature aging treatment step, promptly in the heat treating method of the invention described above, we are preferably according to the difference of treatment temp in the described high-temperature aging treatment step, and adopt the different types of cooling to cool off in cooling step thereafter.Preferably, the different type of cooling of described employing is cooled off specifically and can is:
When described treatment temp below 700 ℃ the time, adopt under the vacuum condition naturally cooling mode to cool off;
When described treatment temp greater than 700 ℃ and below 800 ℃ the time, earlier logical rare gas element cools off (preferred Ar gas cools off fast) fast to 700 ℃, after this adopts under the vacuum condition naturally cooling mode to cool off;
When described treatment temp greater than 800 ℃ and below 1000 ℃ the time, under vacuum condition, naturally cool to 800 ℃ earlier, logical then rare gas element cools off (preferred Ar gas cools off fast) fast to 700 ℃, after this adopts under the vacuum condition naturally cooling mode to cool off.
Because different physical property between Ti-Al-N coating and the hard alloy substrate, particularly different thermal expansivity, the bonding force that causes high-temperature aging to handle back Ti-Al-N coating and hard alloy substrate descends, and then has influence on the cutting ability of inserted tool.Therefore, the process of cooling in the above-mentioned heat treating method will play very important effect to inserted tool optimization in Properties and reinforcement.Fast cooling can suppress Co and changes mutually, guarantees the toughness of hard alloy substrate, but can have a strong impact on combining between Ti-Al-N coating and the hard alloy substrate; And naturally cooling can guarantee combining between Ti-Al-N coating and the matrix, but can influence the toughness of matrix; Therefore, the preferred cooling step of the invention described above has been realized effective combination of quick cooling and naturally cooling well, is guaranteeing to have improved the bonding force between Ti-Al-N coating and the hard alloy substrate greatly under the hard alloy substrate flexible prerequisite.Based on above-mentioned purpose and wes' experimental result, described quick refrigerative speed of cooling is preferably 30 ℃/min～100 ℃/min, most preferably is 40 ℃/min～60 ℃/min.
Compared with prior art, the invention has the advantages that: the method for age hardening is incorporated in the Ti-Al-N cutting tool coated with hard alloy, by rationally, design high-temperature aging treatment step and cooling step in the heat treating method dexterously, effectively guaranteeing hard alloy substrate toughness, guaranteeing under the prerequisite of Ti-Al-N coating and hard alloy substrate bonding force, improved the hardness of Ti-Al-N coating greatly, improved the Ti-Al-N abrasion property, and then significantly improved the working durability of inserted tool.
Description of drawings
Fig. 1 is the process flow sheet of the embodiment of the invention 1.
Embodiment
Embodiment 1:
Preferably to the heat treating method of Ti-Al-N coating on hard alloy substrate, this heat treating method specifically may further comprise the steps in a kind of the present invention as shown in Figure 1:
(1) high-temperature aging treatment step: the Ti that will adopt the physical gas-phase deposite method preparation
xAl
1-xN (0.3≤x≤0.6) be coated be placed in the vacuum or protection of inert gas atmosphere in, carry out ageing treatment being heated under 600 ℃～1000 ℃ the treatment temp, optimized treatment temp changes slightly according to the difference of Al atomic percentage conc in the coating in this temperature range, and the treatment time is controlled at 20min～180min;
(2) cooling step: according to the difference of treatment temp T in the above high-temperature aging treatment step (1), in this cooling step, adopt the different types of cooling to cool off, specifically be meant:
When treatment temp below 700 ℃ the time, adopt under the vacuum condition naturally cooling mode to cool off;
When treatment temp greater than 700 ℃ and below 800 ℃ the time, earlier logical rare gas element is quickly cooled to 700 ℃, after this adopts under the vacuum condition naturally cooling mode to cool off;
When treatment temp greater than 800 ℃ and below 1000 ℃ the time, under vacuum condition, naturally cool to 800 ℃ earlier, logical then rare gas element is quickly cooled to 700 ℃, after this adopts under the vacuum condition naturally cooling mode to cool off.
Controlled chilling speed is 30 ℃/min～100 ℃/min when quick cooling.
The cut off value of above-mentioned treatment temp is not a severity, can select any one type of cooling that is connected mutually for use up and down slightly in the scope (for example ± 5 ℃) of cut off value, can obtain technique effect of the present invention yet; To this unsubstantiality adjustment of doing all in protection scope of the present invention.
Below in conjunction with the embodiment under the concrete processing condition the present invention is further described.
Embodiment 2:
A kind of heat treating method to Ti-Al-N coating on hard alloy substrate of the present invention, the Ti-Al-N coating that this heat treating method is handled are to adopt cathodic arc evaporation technology sedimentary Ti on hard alloy substrate
0.34Al
0.66The N coating, its concrete operations are meant: under vacuum condition, the treatment temp that adopts 900 ℃ is to this Ti
0.34Al
0.66The N coating is carried out ageing treatment 120min, under vacuum condition, naturally cool to 800 ℃ then, logical again Ar gas cool off fast (speed of cooling be 50 ℃/min) to 700 ℃, after this under vacuum condition, adopt the naturally cooling mode to cool off again, finish thermal treatment of the present invention.
Use without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating stainless steel (1Cr18Ni9Ti) is carried out continuous turning, the stainless processing parameter of turning is: cutting linear velocity Vc=200m/min, amount of feed f=0.2mm/r and depth of cut ap=1.0mm.Use in addition without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating steel (42CrMo) are carried out milling, the processing parameter of milling steel is: cutting linear velocity Vc=320m/min, amount of feed f=0.15mm/r and depth of cut ap=2.0mm.As shown in table 1 below through the experimental result behind the contrast cutting experiment:
The cutting contrast and experiment of table 1: embodiment 2 floating coat blades
By last table 1 as can be known, the coating after heat treating method of the present invention is handled, the untreated common deposition attitude coating of its hardness ratio have improved 12% (adopting general detection means---the nano impress of coating hardness); And through the band coating blade after the present invention's processing, its turning life-span has improved 62.5% than common coated chip, and the milling life-span has improved 40% than common coated chip.As seen, the technique effect of heat treating method of the present invention is very obvious.
Embodiment 3:
A kind of heat treating method to Ti-Al-N coating on hard alloy substrate of the present invention, the Ti-Al-N coating that this heat treating method is handled are to adopt cathodic arc evaporation technology sedimentary Ti on hard alloy substrate
0.34Al
0.66The N coating, its concrete operations are meant: under vacuum condition, the treatment temp that adopts 750 ℃ is to this Ti
0.34Al
0.66The N coating is carried out ageing treatment 120min, logical then Ar gas cool off fast (speed of cooling be 50 ℃/min) to 700 ℃, after this under vacuum condition, adopt the naturally cooling mode to cool off again, finish thermal treatment of the present invention.
Use without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating stainless steel (1Cr18Ni9Ti) is carried out continuous turning, the stainless processing parameter of turning is: cutting linear velocity Vc=200m/min, amount of feed f=0.2mm/r and depth of cut ap=1.0mm.Use in addition without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating steel (42CrMo) are carried out milling, the processing parameter of milling steel is: cutting linear velocity Vc=320m/min, amount of feed f=0.15mm/r and depth of cut ap=2.0mm.As shown in table 2 below through the experimental result behind the contrast cutting experiment:
The cutting contrast and experiment of table 2: embodiment 3 floating coat blades
By last table 2 as can be known, the coating after heat treating method of the present invention is handled, the untreated common deposition attitude coating of its hardness ratio has improved 3%; And through the band coating blade after the present invention's processing, its turning life-span has improved 37.5% than common coated chip, and the milling life-span has improved 10% than common coated chip.As seen, be all Ti
0.34Al
0.66The N coating, under timeliness treatment temp situation on the low side, its technique effect descends to some extent.
Embodiment 4:
A kind of heat treating method to Ti-Al-N coating on hard alloy substrate of the present invention, the Ti-Al-N coating that this heat treating method is handled are to adopt magnetron sputtering technique sedimentary Ti on hard alloy substrate
0.34Al
0.66The N coating, its concrete operations are meant: under vacuum condition, the treatment temp that adopts 950 ℃ is to this Ti
0.34Al
0.66The N coating is carried out ageing treatment 100min, under vacuum condition, naturally cool to 800 ℃ then, logical again Ar gas cool off fast (speed of cooling be 40 ℃/min) to 700 ℃, after this under vacuum condition, adopt the naturally cooling mode to cool off again, finish thermal treatment of the present invention.
Use without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating stainless steel (1Cr18Ni9Ti) is carried out continuous turning, the stainless processing parameter of turning is: cutting linear velocity Vc=180m/min, amount of feed f=0.2mm/r and depth of cut ap=1.0mm.Use in addition without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating steel (42CrMo) are carried out milling, the processing parameter of milling steel is: cutting linear velocity Vc=320m/min, amount of feed f=0.15mm/r and depth of cut ap=2.0mm.As shown in table 3 below through the experimental result behind the contrast cutting experiment:
The cutting contrast and experiment of table 3: embodiment 4 floating coat blades
By last table 3 as can be known, the coating after heat treating method of the present invention is handled, the untreated common deposition attitude coating of its hardness ratio has improved nearly 12%; And through the band coating blade after the present invention's processing, its turning life-span has improved 50% than common coated chip, and the milling life-span has improved 31% than common coated chip.As seen, the technique effect of heat treating method of the present invention is very obvious.
Embodiment 5:
A kind of heat treating method to Ti-Al-N coating on hard alloy substrate of the present invention, the Ti-Al-N coating that this heat treating method is handled are to adopt cathode arc technology sedimentary Ti on hard alloy substrate
0.4Al
0.6The N coating, its concrete operations are meant: under vacuum condition, the treatment temp that adopts 950 ℃ is to this Ti
0.4Al
0.6The N coating is carried out ageing treatment 180min, under vacuum condition, naturally cool to 800 ℃ then, logical again Ar gas cool off fast (speed of cooling be 50 ℃/min) to 700 ℃, after this under vacuum condition, adopt the naturally cooling mode to cool off again, finish thermal treatment of the present invention.
Use without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating stainless steel (1Cr18Ni9Ti) is carried out continuous turning, the stainless processing parameter of turning is: cutting linear velocity Vc=180m/min, amount of feed f=0.2mm/r and depth of cut ap=1.0mm.Use in addition without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating steel (42CrMo) are carried out milling, the processing parameter of milling steel is: cutting linear velocity Vc=320m/min, amount of feed f=0.15mm/r and depth of cut ap=2.0mm.As shown in table 4 below through the experimental result behind the contrast cutting experiment:
The cutting contrast and experiment of table 4: embodiment 5 floating coat blades
By last table 4 as can be known, the coating after heat treating method of the present invention is handled, the untreated common deposition attitude coating of its hardness ratio has improved nearly 8% behind the processing 180min; And the blade turning life-span after handling has improved 20% than common coated chip, and the milling life-span has improved 14% than common coated chip.
Embodiment 6:
A kind of heat treating method to Ti-Al-N coating on hard alloy substrate of the present invention, the Ti-Al-N coating that this heat treating method is handled are to adopt cathode arc technology sedimentary Ti on hard alloy substrate
0.5Al
0.5The N coating, its concrete operations are meant: under vacuum condition, the treatment temp that adopts 850 ℃, 950 ℃ respectively is to this Ti
0.5Al
0.5The N coating is carried out ageing treatment 120min, under vacuum condition, naturally cool to 800 ℃ then, logical again Ar gas cool off fast (speed of cooling be 60 ℃/min) to 700 ℃, after this under vacuum condition, adopt the naturally cooling mode to cool off again, finish thermal treatment of the present invention.
Use without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating stainless steel (1Cr18Ni9Ti) is carried out continuous turning, the stainless processing parameter of turning is: cutting linear velocity Vc=180m/min, amount of feed f=0.2mm/r and depth of cut ap=1.0mm.Use in addition without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating steel (42CrMo) are carried out milling, the processing parameter of milling steel is: cutting linear velocity Vc=320m/min, amount of feed f=0.15mm/r and depth of cut ap=2.0mm.As shown in table 5 below through the experimental result behind the contrast cutting experiment:
The cutting contrast and experiment of table 5: embodiment 6 floating coat blades
By last table 1 as can be known, the coating after heat treating method of the present invention is handled, 850 ℃ carry out ageing treatment after, it is about 7% that the hardness of coating increases, the turning life-span of coated chip increases about 14%, the milling life-span increases about 18%; And 950 ℃ carry out timeliness after, it is about 10% that the hardness of coating increases, the turning life-span of coated chip increases about 36%, the milling life-span increases about 35%.As seen, the technique effect of heat treating method of the present invention is very obvious, and the treatment temp handled of high-temperature aging has certain influence to the effect of the age hardening of coating.
Embodiment 7:
A kind of heat treating method to Ti-Al-N coating on hard alloy substrate of the present invention, the Ti-Al-N coating that this heat treating method is handled are to adopt cathode arc technology sedimentary Ti on hard alloy substrate
0.5Al
0.5The N coating, its concrete operations are meant: under vacuum condition, the treatment temp that adopts 950 ℃ is to this Ti
0.5Al
0.5The N coating is carried out ageing treatment 120min, under vacuum condition, naturally cool to 800 ℃ then, logical again Ar gas cools off fast that (speed of cooling is controlled to be 40 ℃/min and 80 ℃/min) to 700 ℃ respectively, after this under vacuum condition, adopt the naturally cooling mode to cool off again, finish thermal treatment of the present invention.
Use without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating stainless steel (1Cr18Ni9Ti) is carried out continuous turning, the stainless processing parameter of turning is: cutting linear velocity Vc=180m/min, amount of feed f=0.2mm/r and depth of cut ap=1.0mm.Use in addition without the ordinary rigid alloy blade of Overheating Treatment with through the carbide chip after the thermal treatment of present embodiment coating steel (42CrMo) are carried out milling, the processing parameter of milling steel is: cutting linear velocity Vc=320m/min, amount of feed f=0.15mm/r and depth of cut ap=2.0mm.As shown in table 3 below through the experimental result behind the contrast cutting experiment:
The cutting contrast and experiment of table 6: embodiment 7 floating coat blades
By last table 6 as can be known, the coating after heat treating method of the present invention is handled, its hardness and turning life-span improve than untreated common deposition attitude coating, but different speed of cooling does not have influence substantially to it; But the milling life-span to coated chip is influential, and the blade milling life-span of adopting 40 ℃/min speed of cooling to handle increases about 36%, and the blade milling life-span of adopting 80 ℃/min speed of cooling to handle increases about 47%.As seen, the technique effect of heat treating method of the present invention is very obvious, and speed of cooling has certain influence to the milling life-span of handling the back blade in the present embodiment.
Claims (7)
1, a kind of heat treating method of Ti-Al-N coating on hard alloy substrate, it is characterized in that: described heat treating method comprises the cooling step after high-temperature aging treatment step and high-temperature aging are handled, and the treatment temp in the described high-temperature aging treatment step is 600 ℃～1000 ℃; The Ti-Al-N coating that described heat treating method is handled is by Ti
xAl
1-xN forms, and wherein the value of x is 0.3≤x≤0.6.
2, heat treating method according to claim 1 is characterized in that: the treatment time of described high-temperature aging treatment step is 20min～180min.
3, heat treating method according to claim 2 is characterized in that: the treatment time of described high-temperature aging treatment step is 60min～120min.
4, according to each described heat treating method in the claim 1～3, it is characterized in that: described heat treating method is the difference according to treatment temp in the described high-temperature aging treatment step, and adopts the different types of cooling to cool off in cooling step thereafter.
5, heat treating method according to claim 4 is characterized in that, the different type of cooling of described employing is cooled off specifically and is meant:
When described treatment temp below 700 ℃ the time, adopt under the vacuum condition naturally cooling mode to cool off;
When described treatment temp greater than 700 ℃ and below 800 ℃ the time, earlier logical rare gas element is quickly cooled to 700 ℃, after this adopts under the vacuum condition naturally cooling mode to cool off;
When described treatment temp greater than 800 ℃ and below 1000 ℃ the time, under vacuum condition, naturally cool to 800 ℃ earlier, logical then rare gas element is quickly cooled to 700 ℃, after this adopts under the vacuum condition naturally cooling mode to cool off.
6, heat treating method according to claim 5 is characterized in that: described quick refrigerative speed of cooling is 30 ℃/min～100 ℃/min.
7, heat treating method according to claim 6 is characterized in that: described quick refrigerative speed of cooling is 40 ℃/min～80 ℃/min.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102517560A (en) * | 2011-12-22 | 2012-06-27 | 长沙伟徽高科技新材料股份有限公司 | Heat treatment method of TiAlN coating |
| CN102605367A (en) * | 2011-01-24 | 2012-07-25 | 鸿富锦精密工业（深圳）有限公司 | Hard film, coated piece with hard film and manufacturing method of coated piece |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1277949C (en) * | 2004-08-05 | 2006-10-04 | 上海工具厂有限公司 | Ti-Al-O-N hard composite coatingand its preparing method |
| CN101333647A (en) * | 2008-07-18 | 2008-12-31 | 中南大学 | Age hardening processing method of Ti-Al-N coatings |
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2009
- 2009-09-30 CN CN2009100444730A patent/CN101671812B/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102605367A (en) * | 2011-01-24 | 2012-07-25 | 鸿富锦精密工业（深圳）有限公司 | Hard film, coated piece with hard film and manufacturing method of coated piece |
| CN102517560A (en) * | 2011-12-22 | 2012-06-27 | 长沙伟徽高科技新材料股份有限公司 | Heat treatment method of TiAlN coating |
| CN102517560B (en) * | 2011-12-22 | 2014-06-04 | 长沙伟徽高科技新材料股份有限公司 | Heat treatment method of TiAlN coating |
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