CN101670579A - industrial robot - Google Patents
industrial robot Download PDFInfo
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- CN101670579A CN101670579A CN200910171053A CN200910171053A CN101670579A CN 101670579 A CN101670579 A CN 101670579A CN 200910171053 A CN200910171053 A CN 200910171053A CN 200910171053 A CN200910171053 A CN 200910171053A CN 101670579 A CN101670579 A CN 101670579A
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- control part
- driving mechanism
- arrestment
- industrial robot
- horizontal drive
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- 230000007246 mechanism Effects 0.000 claims abstract description 390
- 239000000758 substrate Substances 0.000 description 16
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 230000005611 electricity Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000027455 binding Effects 0.000 description 2
- 238000009739 binding Methods 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008034 disappearance Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0004—Braking devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
- B25J9/126—Rotary actuators
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
An industrial robot is suitable for conveying larger conveying objects and expensive conveying objects. The industrial robot comprises the following components: a hand for loading conveying objects, an arm connected with the hand, a supporting component for supporting the arm, a vertical driving mechanism which causes the vertical motion of the supporting component, and a control part (80) which controls the vertical driving mechanism. The vertical driving mechanism comprises two braking mechanisms (24) for stopping the vertical driving mechanism. The control part (80) comprises a brake control part (84) of two braking mechanisms (24). The brake control part (84) causes the two braking mechanisms (24) to operate periodically.
Description
Technical field
The present invention relates to a kind of industrial robot of carrying regulation carrying object.
Background technology
All the time, the industrial robot of carrying regulation carrying object has obtained being extensive use of.As this industrial robot, known have an industrial robot (for example with reference to patent documentation 1) that a kind ofly comprises the hand, the arm that keeps hand that load the carrying object, makes the ball-screw that arm moves up and down.In the industrial machine people of this patent documentation 1 record, on ball-screw, link a motor, ball-screw is driven by a motor.
Patent documentation 1: the Japan Patent spy opens the 2006-102886 communique
In the carrying object of being carried by industrial robot as liquid crystal display glass substrate etc., what have is maximizing year by year.In addition, in the carrying object of being carried by industrial robot the mask that uses as exposure device, what have is becoming expensive year by year.
Summary of the invention
Therefore, the object of the present invention is to provide the industrial robot of the carrying object of bigger carrying object of a kind of suitable carrying and costliness.
In order to address the above problem, the feature of industrial robot of the present invention is, comprise: the hand that loads the carrying object, arm with the hand binding, the support component of support arm, and comprise: make the driving mechanism up and down that support component moves up and down and/or be used to make the horizontal drive mechanism that the support component along continuous straight runs moves and/or be used to make support component being the rotary drive mechanism that the center is rotated as axial regulation central shaft above-below direction, the control part of driving mechanism and/or horizontal drive mechanism and/or rotary drive mechanism about the control, driving mechanism and/or horizontal drive mechanism and/or rotary drive mechanism comprise a plurality of arrestment mechanisms that are used to make driving mechanism up and down and/or horizontal drive mechanism and/or rotary drive mechanism to stop up and down, control part comprises the brake control part of controlling a plurality of arrestment mechanisms, and the brake control part moves a plurality of arrestment mechanisms by stages.
In industrial machine people of the present invention, driving mechanism and/or horizontal drive mechanism and/or rotary drive mechanism comprise a plurality of arrestment mechanisms up and down.Therefore, even for example arrestment mechanism breakage also can utilize other arrestment mechanism that driving mechanism and/or horizontal drive mechanism and/or rotary drive mechanism are stopped.Therefore, in the present invention, even bigger carrying object and expensive carrying object also can be carried safely.In addition, in the present invention, the brake control part moves a plurality of arrestment mechanisms by stages.Therefore, even driving mechanism and/or horizontal drive mechanism and/or rotary drive mechanism have a plurality of arrestment mechanisms up and down, also can increase the brake force that driving mechanism up and down and/or horizontal drive mechanism and/or rotary drive mechanism produce by stages.Therefore, the unexpected braking of driving mechanism and/or horizontal drive mechanism and/or rotary drive mechanism consequently, can prevent that carrying object drops about preventing from hand.
In the present invention, preferably the brake control part staggers the zero hour of respectively moving of a plurality of arrestment mechanisms.When constituting like this, the brake force that driving mechanism and/or horizontal drive mechanism and/or rotary drive mechanism produce about slowly increasing.Therefore, the unexpected braking of driving mechanism and/or horizontal drive mechanism and/or rotary drive mechanism prevents that reliably carrying object drops about preventing reliably from hand.
In the present invention, preferably industrial robot comprises driving mechanism up and down, driving mechanism has a plurality of arrestment mechanisms up and down as a plurality of arrestment mechanisms up and down, control part comprises that as a plurality of control parts of brake up and down of arrestment mechanism up and down of the control of brake control part, the brake control part moves a plurality of arrestment mechanisms up and down by stages up and down.
When constituting like this, though for example arrestment mechanism breakage up and down, also can utilize other up and down arrestment mechanism make up and down that driving mechanism stops.That is, support component is stopped, preventing dropping of hand and arm.Therefore, even bigger carrying object and expensive carrying object also can be carried safely.In addition, when safeguarding,, also can support component be stopped on the assigned position with arrestment mechanism about other even for example tear next arrestment mechanism up and down open.Therefore, the maintenance of driving mechanism becomes easy up and down.And, even driving mechanism has a plurality of arrestment mechanisms up and down, also can prevent the unexpected braking of driving mechanism up and down, therefore, can prevent that carrying object drops from hand.
In the present invention, driving mechanism for example comprises the same number of drive motor up and down of number and arrestment mechanism up and down up and down, and a plurality of arrestment mechanisms up and down link with a plurality of drive motors up and down respectively.In this case, utilize arrestment mechanism up and down, can separate and make reliably a plurality of drive motors up and down to stop.
In the present invention, preferably industrial robot comprises and is used for a plurality of speed testing agency that a plurality of each rotary speed of drive motor are up and down detected.When constituting like this, utilize speed testing agency, can detect the unusual of a plurality of drive motors up and down dividually.That is,, can detect the unusual of a plurality of drive motors up and down dividually by detecting whether produce bigger difference with the detected rotary speed of a plurality of speed testing agencies.In addition, detect even one up and down drive motor have when unusual, utilize arrestment mechanism up and down, making up and down, driving mechanism stops.Therefore, even drive motor produces unusually up and down, support component is stopped safely.
In the present invention, driving mechanism for example comprises the drive motor about in the of that links with a plurality of arrestment mechanisms up and down up and down.In this case, can make with the bigger brake force of a plurality of up and down arrestment mechanisms one up and down drive motor stop reliably.
In the present invention, preferably up and down driving mechanism comprise: link and make ball-screw that support component moves up and down with drive motor up and down, be used for leading screw side speed testing agency that the rotary speed to ball-screw detects, be used for motor side speed testing agency that the rotary speed of drive motor is up and down detected.When constituting like this, utilize leading screw side speed testing agency and motor side speed testing agency, driving mechanism is unusual about detecting reliably.That is, the rotary speed of the ball-screw that calculates based on the testing result according to motor side speed testing agency poor with the rotary speed of the detected ball-screw of leading screw side speed testing agency can detect the unusual of driving mechanism up and down reliably.In addition, when detecting driving mechanism up and down unusual, utilize arrestment mechanism up and down, making up and down, driving mechanism stops.Therefore, even driving mechanism produces unusually up and down, support component is stopped safely.
In the present invention, preferably industrial robot comprises horizontal drive mechanism, this horizontal drive mechanism has a plurality of level braking mechanism as a plurality of arrestment mechanisms, control part comprises the level braking device control part as a plurality of level braking of the control of brake control part mechanism, and level braking device control part moves a plurality of level braking mechanism by stages.When constituting like this, even for example level braking mechanism breakage also can utilize other level braking mechanism that horizontal drive mechanism is stopped.Therefore, even bigger carrying object and expensive carrying object also can be carried safely.In addition,, also can prevent the unexpected braking of horizontal drive mechanism, therefore, can prevent that carrying object drops from hand even horizontal drive mechanism has a plurality of arrestment mechanisms.
In the present invention, horizontal drive mechanism for example comprises the same number of horizontal drive motor of number and level braking mechanism, and a plurality of level braking mechanism links with motor with a plurality of horizontal drive respectively.In this case, utilize level braking mechanism, can separate and make reliably a plurality of horizontal drive to stop with motor.
As mentioned above, industrial robot involved in the present invention can suitably be carried bigger carrying object and expensive carrying object.
Description of drawings
Fig. 1 is the vertical view of the related industrial robot of embodiments of the present invention 1.
Fig. 2 is the figure from the E-E direction indication industrial robot of Fig. 1.
Fig. 3 is the figure from the F-F direction indication industrial robot of Fig. 1.
Fig. 4 is from the F-F direction indication support component of Fig. 1 and the figure of driving mechanism up and down.
Fig. 5 is G-G direction indication support component, columnar part and the figure of driving mechanism up and down from Fig. 4.
Fig. 6 is from the H-H direction indication of Fig. 4 figure of driving mechanism up and down.
Fig. 7 is the figure of internal structure that is used for the J portion of key diagram 2.
Fig. 8 is the figure that uses from the structures such as K-K direction explanation horizontal drive mechanism of Fig. 3.
Fig. 9 is the figure that uses from the structure of the L-L direction explanation horizontal drive mechanism of Fig. 8.
Figure 10 is the vertical view of the parts that rotate shown in Figure 1.
Figure 11 is the cutaway view in the M-M cross section of Figure 10.
Figure 12 is the control part of industrial robot shown in Figure 1 and the block diagram of relevant portion thereof.
Figure 13 is the vertical view of the related industrial robot of embodiments of the present invention 2.
Figure 14 is the figure from the N-N direction indication industrial robot of Figure 13.
Figure 15 is the figure from the P-P direction indication industrial robot of Figure 13.
Figure 16 is explanation columnar part shown in Figure 13 and the figure that uses of the structure of driving mechanism up and down.
Figure 17 is the enlarged drawing of the Q portion of Figure 16.
Figure 18 is from the R-R direction indication of Figure 16 figure of driving mechanism up and down.
(symbol description)
1,101 robots (industrial robot)
2 substrates (carrying object)
3,103 hands
4,104 arms
7,107 support components
16, driving mechanism about in the of 116
17 horizontal drive mechanisms
18 rotary drive mechanisms
20, drive motor about in the of 120
24, arrestment mechanism (arrestment mechanism) about in the of 124
40 horizontal drive motor
80 control parts
Brake control part about in the of 84 (brake control part)
85 level braking device control parts (brake control part)
102 masks (carrying object)
121 ball-screws
131 speed testing agencies (leading screw side speed testing agency)
The CL central shaft
The specific embodiment
Below, embodiments of the present invention are described with reference to the accompanying drawings.
[embodiment 1]
(schematic configuration of industrial robot)
Fig. 1 is the vertical view of the related industrial robot 1 of embodiments of the present invention 1.Fig. 2 is the figure from the E-E direction indication industrial robot 1 of Fig. 1.Fig. 3 is the figure from the F-F direction indication industrial robot 1 of Fig. 1.
As Fig. 1～shown in Figure 3, this robot 1 comprises: two hands 3 of mounting substrate 2, front link respectively two hands 3 two arms 4, support the main part 5 of two arms 4, main part 5 supported to the base member 6 that can along continuous straight runs moves.Main part 5 comprises: support the base end side of two arms 4 and the support component 7 that can move up and down, be used for support component 7 is supported to the columnar part 8 that can move along the vertical direction, the end portion that constitutes main part 5 and the base station 9 that can move horizontally with respect to base member 6, the fixing lower end of columnar part 8 parts 10 that rotate that also can rotate with respect to base station 9.
As mentioned above, the robot 1 of present embodiment is large-scale robot.For example, the about 7m of the height of robot 1, the about 5m of the stroke of the above-below direction of support component 7 (moving).In addition, for example, the about 5.5m of the stroke of the horizontal direction of hand 3.
In the present embodiment, two hands 3 and two arms 4 are configured on above-below direction overlapping.That is, the robot 1 of present embodiment is a double arm robot.In addition, robot 1 also can be the single armed humanoid robot that comprises a hand 3 and one arm 4.
In addition, robot 1 comprises: make driving mechanism up and down 16 (with reference to Fig. 4) that support component 7 moves up and down, make the horizontal drive mechanism 17 (with reference to Fig. 7) that main part 5 along continuous straight runs move, the rotary drive mechanism 18 (with reference to Fig. 7) that the parts 10 that rotate are rotated with respect to base station 9.Below, driving mechanism 16, horizontal drive mechanism 17 and the structure of rotary drive mechanism 18 and the structure of peripheral part thereof up and down are described.
(structure of driving mechanism and periphery thereof up and down)
Fig. 4 is from the F-F direction indication support component 7 of Fig. 1 and the figure of driving mechanism 16 up and down.Fig. 5 is G-G direction indication support component 7, columnar part 8 and the figure of driving mechanism 16 up and down from Fig. 4.Fig. 6 is from the H-H direction indication of Fig. 4 figure of driving mechanism 16 up and down.
As shown in Figure 5, driving mechanism 16 is configured in the side (below of the columnar part 8 of Fig. 5) of columnar part 8 up and down.Up and down driving mechanism 16 comprises: two up and down drive motor 20, with two two reductors 21 linking respectively of drive motor 20 up and down.As shown in Figure 4, one up and down drive motor 20, two reductors 21 and one up and down drive motor 20 be fixed on successively on the moving-member 7 from the top.
In addition, driving mechanism 16 comprises up and down: be fixed on conduct on each output shafts of two reductors 21 and drive two pinions (pinion) 22 with pinion up and down, drive tooth bar 23 with tooth bar up and down with the conduct of two pinions, 22 engagements.Utilize this two pinions 22 and tooth bar 23, support component 7 is moved along the vertical direction.In addition, driving mechanism 16 comprises and is used to make (promptly being used to make support component 7 to stop) that driving mechanism 16 up and down stops two arrestment mechanism 24 up and down up and down.
In addition, as shown in Figure 5, robot 1 comprises and is used for the guide part 25 of guide support parts 7 along the vertical direction.Guide part 25 is made of guide rail 26, the guide pad 27 that engages with guide rail 26.In addition, columnar part 8 forms with upper and lower to the elongated roughly corner post shape that is long side direction, and support component 7 forms bulk.
Drive motor 20 comprises and is used for speed testing agency (not shown) that the rotary speed of drive motor 20 is up and down detected up and down.This speed testing agency is for example by forming discoideus slit plate, constituting with relative luminous element disposed of state and the light receiving element that slit plate is clipped in the middle.
As shown in Figure 6, on the output shaft of drive motor 20 up and down, be fixed with belt wheel 28.In addition, on the power shaft of reductor 21, be fixed with the diameter belt wheel 29 bigger than belt wheel 28.Open on belt wheel 28,29 and be provided with belt 30, the drive motor up and down 20 of disposed adjacent and reductor 21 are linked by this belt 30 on above-below direction.
Shown in Fig. 6 waited, arrestment mechanism 24 was installed on the power shaft of reductor 21 with the form adjacent with belt wheel 29 up and down.That is, arrestment mechanism 24 links with drive motor about in the of two 20 respectively by belt wheel 28,29 and belt 30 respectively about in the of two.
Up and down arrestment mechanism 24 is brakes of so-called non-excitation actuating type, comprising: take in coil housing, be fixed on side plate on the housing, the armature that is configured to move vertically with respect to housing, be configured between side plate and the armature and be fixed on brake disc on the power shaft of reductor 21, with the compression helical spring of armature towards the brake disc application of force.In the arrestment mechanism 24, when coil became "on" position, armature was attracted by housing up and down, and brake disc is released.In addition, when stopping coil electricity, the active force of compression helical spring is clipped between armature and the side plate brake disc, and reductor 21 is carried out brake hard.In addition, one up and down arrestment mechanism 24 have the brake force that the part that moves along the vertical direction that comprises substrate 2, hand 3, arm 4 and support component 7 etc. is stopped.
In addition, in the present embodiment, as shown in Figure 5, on columnar part 8, be fixed with cover 31.This cover 31 is configured to the guide rail of covering up and down 26 from Fig. 5.
(structure of horizontal drive mechanism and periphery thereof)
Fig. 7 is the figure of internal structure that is used for the J portion of key diagram 2.Fig. 8 is the figure that uses from the structure of K-K direction explanation horizontal drive mechanism 17 grades of Fig. 3.Fig. 9 is the figure that uses from the structure of the L-L direction explanation horizontal drive mechanism 17 of Fig. 8.
As shown in Figure 7, horizontal drive mechanism 17 is configured in the left end side of base station 9 among Fig. 7.This horizontal drive mechanism 17 comprises two horizontal drive motor 40.As shown in Figure 8, two horizontal drive are configured on the left and right directions of Fig. 8 adjacent with motor 40.In addition, two horizontal drive are individually fixed in two supports 52 with motor 40, and these two supports 52 are fixed on the base station 9.Go up separately at two supports 52, as Fig. 8, shown in Figure 9, rotating shaft 53 is maintained revolvably by bearing 54.Two rotating shafts 53 are configured on the left and right directions of Fig. 8 adjacent.
In addition, horizontal drive mechanism 17 comprises: be fixed on two rotating shaft 53 lower ends separately as horizontal drive with two pinions 42 of pinion, with 42 engagements of two pinions as the tooth bars 43 of horizontal drive with tooth bar.Utilize this two pinions 42 and tooth bar 43, base station 9 along continuous straight runs are moved.In addition, horizontal drive mechanism 17 comprises and is used to (promptly being used to make base station 9 to stop) two level braking mechanisms 44 that horizontal drive mechanism 17 is stopped.
In addition, robot 1 comprises the guide part 45 of along continuous straight runs guiding base station 9 usefulness.Guide part 45 is made of guide rail 46, the guide pad 47 that engages with guide rail 46.In addition, as Fig. 7, shown in Figure 8, base member 6 comprises two elongated rail-like parts 51.These rail-like parts 51 dispose abreast with the state of opening predetermined distance in the left and right directions sky of Fig. 7.
Horizontal drive comprises with motor 40 and is used for speed testing agency (not shown) that horizontal drive is detected with the rotary speed of motor 40.This speed testing agency is for example by forming discoideus slit plate, constituting with relative luminous element disposed of state and the light receiving element that slit plate is clipped in the middle.
As shown in Figure 9, on the output shaft of horizontal drive, be fixed with belt wheel 48 with motor 40.In addition, be fixed with the diameter belt wheel 49 bigger in the upper end side of rotating shaft 53 than belt wheel 48.Open on belt wheel 48,49 and be provided with belt 50, the horizontal drive of disposed adjacent is linked by this belt 50 with motor 40 and rotating shaft 53 on the above-below direction of Fig. 8.
As shown in Figure 8, tooth bar 43 is fixed on the upper surface of rail-like parts 51.In the present embodiment, the amount of movement of base station 9 is bigger, and therefore, the length of tooth bar 43 is longer.Therefore, tooth bar 43 forms by engaging a plurality of tooth bar sheets.
As shown in Figure 9, level braking mechanism 44 is installed in horizontal drive with on the output shaft of motor 40 with the form adjacent with belt wheel 48.This level braking mechanism 44 is the brake of so-called non-excitation actuating type with arrestment mechanism 24 up and down equally, similarly constitutes with arrestment mechanism 24 up and down.That is, in the level braking mechanism 44, when coil became "on" position, armature was attracted by housing, and brake disc is released.In addition, when stopping coil electricity, the active force of compression helical spring is clipped between armature and the side plate brake disc, and horizontal drive is carried out brake hard with motor 40.
As shown in Figure 8, guide rail 46 is fixed on the upper surface of rail-like parts 51.In the present embodiment, guide rail 46 is fixed on each upper surface of two rail-like parts 51.In addition, the guide rail 46 that is configured in the upside of Fig. 8 is fixed into adjacent with tooth bar 43.As shown in Figure 7, guide pad 47 is fixed on the both ends of base station 9 of the left and right directions of Fig. 7.This guide pad 47 engages with guide rail 46 from upside.
(structure of rotary drive mechanism and peripheral part thereof)
Figure 10 is the vertical view of the parts 10 that rotate shown in Figure 1.Figure 11 is the cutaway view in the M-M cross section of Figure 10.
As Figure 10, shown in Figure 11, rotary drive mechanism 18 is configured in as around the central shaft CL at the center that rotates of the parts 10 that rotate.This rotary drive mechanism 18 comprises two rotation drive motors 60.As shown in figure 10, two rotation drive motors 60 are the point symmetry configuration with respect to central shaft CL, are fixed on the central part of the parts 10 that rotate.In addition, rotary drive mechanism 18 comprises the reductor 61 of the central part that is fixed on the parts 10 that rotate.In addition, rotary drive mechanism 18 comprises and is used to make (promptly be used to make rotate parts 10 stop) rotation brake mechanism 64 that rotary drive mechanism 18 stops.In addition, the parts 10 that rotate are elongated block parts, and at one end side (left end side of Figure 10) is fixed with the lower end of columnar part 8.
As shown in figure 11, on the output shaft of rotation drive motor 60, be fixed with input gear 69 engagements of 68, two output gears of output gear 68 and reductor 61.Utilize these two output gears 68 and comprise the reductor 61 of importing gear 69, the parts 10 that rotate are rotated with respect to base station 9.That is, be fixed with the outlet side of reductor 61 at the central part of the parts 10 that rotate, under the effect of the power of the rotation drive motor 60 that transmits by reductor 61, the parts 10 that rotate are with respect to base station 9 rotations.
As shown in figure 11, rotation brake mechanism 64 is fixed on the upper end of rotating shaft 73, and rotating shaft 73 remains on the central part of the parts 10 that rotate revolvably by bearing 74.Be fixed with input gear 69 meshed gears 70 with reductor 61 in the lower end of rotating shaft 73.In addition, as shown in figure 10, it is that the center rotates drive motor 60 relatively and turns on 90 ° the position that rotation brake mechanism 64 is configured in central shaft CL.
This rotation brake mechanism 64 is the brake of so-called non-excitation actuating type with arrestment mechanism 24 up and down equally, similarly constitutes with arrestment mechanism 24 up and down.That is, in the rotation brake mechanism 64, when coil became "on" position, armature was attracted by housing, and brake disc is released.In addition, when stopping coil electricity, the active force of compression helical spring is clipped between armature and the side plate brake disc, and input gear 69 is carried out brake hard.
(structure of control part)
Figure 12 is the control part 80 of industrial robot 1 shown in Figure 1 and the block diagram of relevant portion thereof.In addition, in Figure 12, illustrate the structure of the control part 80 relevant with the control of driving mechanism 16, horizontal drive mechanism 17 and rotary drive mechanism 18 up and down.
As shown in figure 12, as with driving mechanism 16 up and down, the structure that horizontal drive mechanism 17 is relevant with the control of rotary drive mechanism 18, control part 80 comprises: control two motor control part up and down 81 of drive motor 20 up and down, control the level motor control part 82 of two horizontal drive with motor 40, control the turning motor control part 83 of two rotation drive motors 60, control two control parts of brake up and down 84 of arrestment mechanism 24 up and down, the level braking device control part 85 of two level braking mechanisms 44 of control, the swing brake control part 86 of a rotation brake mechanism 64 of control.In addition, connecting control instruction portion 87 at control part 80.
Level motor control part 82 is controlled two horizontal drive motor 40 in the horizontal drive usefulness motor 40 by speed control and torque.In addition, in another horizontal drive with before the stopping of motor 40, the same with a horizontal drive with motor 40, level motor control part 82 is controlled another horizontal drive motor 40 by speed control and torque, but be not another horizontal drive with the stopping when preceding of motor 40, level motor control part 82 is controlled another horizontal drive with motor 40 by torque.
Promptly, the stopping when preceding that be not another horizontal drive with motor 40, level motor control part 82 with motor 40, is not carrying out carrying out torque control at another horizontal drive under from the situation of this horizontal drive with the FEEDBACK CONTROL of the output of the speed testing agency of motor 40.In addition, in another horizontal drive with before the stopping of motor 40, level motor control part 82 carries out based on from this horizontal drive FEEDBACK CONTROL with the output of the speed testing agency of motor 40 with motor 40 at another horizontal drive, another horizontal drive is controlled with the rotary speed of motor 40, so that the backlash between two pinions 42 and the tooth bar 43 disappears.
Similarly, turning motor control part 83 is controlled two rotation drive motors 60 that rotate in the drive motors 60 by speed control and torque.In addition, before another rotates stopping of drive motor 60, the same with a rotation drive motor 60, turning motor control part 83 is controlled another rotation drive motor 60 by speed control and torque, but be not the stopping when preceding of another rotation drive motor 60, turning motor control part 83 is controlled another rotation drive motor 60 by torque.
Promptly, be not the stopping when preceding of another rotation drive motor 60, turning motor control part 83 is at another rotation drive motor 60, carries out torque and control under not carrying out based on the situation from the FEEDBACK CONTROL of the output of the speed testing agency of this rotation drive motor 60.In addition, before another rotates stopping of drive motor 60, turning motor control part 83 carries out based on the FEEDBACK CONTROL from the output of the speed testing agency of this rotation drive motor 60 at another rotation drive motor 60, rotary speed to another rotation drive motor 60 is controlled, so that the backlash disappearance between two output gears 68 and the input gear 69.
At brake control part 84 up and down when control instruction portion 87 is supported the input of stop signal of parts 7, make two up and down arrestment mechanism 24 move by stages.Promptly, when the input of the stop signal of the parts 7 that are supported from control instruction portion 87, brake control part 84 makes two up and down arrestment mechanism 24 actions up and down so that one up and down arrestment mechanism 24 action zero hour with another about the action zero hour different (staggering) of arrestment mechanism 24.
Particularly, brake control part 84 makes two up and down arrestment mechanism 24 actions up and down so that another up and down the action of arrestment mechanism 24 be later than action zero hour of arrestment mechanism 24 up and down the zero hour.That is, at first one up and down arrestment mechanism 24 begin action, this up and down arrestment mechanism 24 be under the state of action, up and down brake control part 84 make another up and down arrestment mechanism 24 begin action, make two arrestment mechanism 24 actions up and down thus.More specifically, up and down brake control part 84 according to another up and down the stopping of energising (or to actual moment that stops of the energising of coil) constantly of the coil of arrestment mechanism 24 be later than to one up and down the coil of arrestment mechanism 24 energising stop constantly that the mode in (or to actual moment that stops of the energising of coil) stops two energisings of the coil of arrestment mechanism 24 up and down.
Similarly, when control instruction portion 87 obtains the input of stop signal of base station 9, two level braking mechanisms 44 are moved at level braking device control part 85 by stages.Promptly, when the input of the stop signal that obtains base station 9 from control instruction portion 87, level braking device control part 85 makes two level braking mechanisms 44 action, so that the action zero hour different (staggering) of action zero hour of a level braking mechanism 44 and another level braking mechanism 44.
Particularly, level braking device control part 85 makes 44 actions of two level braking mechanisms, so that the action of another level braking mechanism 44 is later than the action zero hour of a level braking mechanism 44 zero hour.That is, at first a level braking mechanism 44 begins action, is under the state of action in this level braking mechanism 44, and level braking device control part 85 makes another level braking mechanism 44 begin action, makes 44 actions of two level braking mechanisms thus.More specifically, level braking device control part 85 stops energising to the coil of two level braking mechanisms 44 according to the mode in (or to actual moment that stops of the energising of coil) constantly of stopping to the energising of the coil of a level braking mechanism 44 that the stopping of the energising of the coil of another level braking mechanism 44 (or to actual moment that stops of the energising of coil) constantly is later than.In addition, when control instruction portion 87 obtains the input of stop signal of base station 9, two level braking mechanisms 44 are moved at level braking device control part 85 simultaneously.
(the main effect of present embodiment)
As described above, in the present embodiment, driving mechanism 16 comprises two arrestment mechanisms 24 up and down up and down.Therefore, though for example up and down arrestment mechanism 24 breakages, also can utilize another up and down arrestment mechanism 24 make up and down that driving mechanism 16 stops.That is, support component 7 is stopped, preventing dropping of hand 3 and arm 4.Therefore, in the present embodiment, even bigger substrate 2 also can be carried safely.In addition, even when safeguarding, tear next arrestment mechanism 24 up and down open, also can support component 7 be stopped on the assigned position with arrestment mechanism 24 about another.Therefore, the maintenance of driving mechanism 16 becomes easy up and down.
In addition, in the present embodiment, make two up and down arrestment mechanism 24 move by stages, increase the brake force of driving mechanism 16 generations up and down by stages.Therefore, can prevent the unexpected braking of driving mechanism 16 up and down.Therefore, even driving mechanism 16 comprises two up and down arrestment mechanisms 24 up and down, also can prevent to drop from hand 3 because of anxious that stop to cause, the substrate 2 of support component 7.
In the present embodiment, two up and down arrestment mechanism 24 link respectively with drive motor 20 about in the of two by belt wheel 28,29 and belt 30 respectively.Therefore, utilize arrestment mechanism 20 up and down, can separate and make reliably two about drive motor 20 stop.
In the present embodiment, drive motor 20 comprises speed testing agency respectively about in the of two.Whether therefore, become more than the setting by the difference that detects the rotary speed that detects with two speed testing agencies, drive motor 20 is unusual about detecting.In addition, when detecting drive motor 20 up and down unusual, driving mechanism 16 stopped about arrestment mechanism 24 made about utilizing.Therefore, even drive motor 20 produces unusually up and down, support component 7 is stopped safely.
In the present embodiment, horizontal drive mechanism 17 comprises two level braking mechanisms 44.Therefore, even for example level braking mechanism 44 breakages also can utilize another level braking mechanism 44 that horizontal drive mechanism 17 is stopped.That is, main part 5 is stopped.Therefore, even bigger substrate 2 also can be carried safely.In addition, in the present embodiment, two level braking mechanisms 44 are moved by stages, increase the brake force that horizontal drive mechanism 17 produces by stages.Therefore, can prevent the unexpected braking of horizontal drive mechanism 17.Therefore, even horizontal drive mechanism 17 comprises two level braking mechanisms 44, also can prevent to drop from hand 3 because of anxious that stop to cause, the substrate 2 of main part 5.
In the present embodiment, two level braking mechanisms 44 link with two horizontal drive each output shaft with motor 40 respectively.Therefore, utilize level braking mechanism 40, can separate and make reliably two two horizontal drive to stop with motor 40.
[embodiment 2]
Figure 13 is the vertical view of the related industrial robot 101 of embodiments of the present invention 2.Figure 14 is the figure from the N-N direction indication industrial robot 101 of Figure 13.Figure 15 is the figure from the P-P direction indication industrial robot 101 of Figure 13.Figure 16 is explanation columnar part 108 shown in Figure 13 and the figure that uses of the structure of driving mechanism 116 up and down.Figure 17 is the enlarged drawing of the Q portion of Figure 16.Figure 18 is from the R-R direction indication of Figure 16 figure of driving mechanism 116 up and down.
The related industrial robot 101 of embodiment 2 (below be called " robot 101 ") is the robot that is used for carrying the mask 102 of the costliness of using at exposure device.That is, the carrying object of being carried by the robot 1 of embodiment 1 is large-scale substrate 2, and is relative therewith, and the carrying object of being carried by the robot 101 of embodiment 2 is expensive mask 102.
As Figure 13～shown in Figure 15, this robot 101 comprises: the arm 104 that loads the hand 103 of mask 102, links with hand 103, the main part 105 of support arm 104, main part 105 supported to the base member 106 that can along continuous straight runs moves.Main part 105 comprises: support arm 104 and the support component 107 that can move up and down, be used for support component 107 is supported to the columnar part 108 that can move along the vertical direction, the end portion that constitutes main part 105 and the base station 109 that can move horizontally with respect to base member 106, the fixing lower end of columnar part 108 parts 110 that rotate that also can rotate with respect to base station 109.In addition, robot 101 comprises: the gradient guiding mechanism 111 that the gradient of adjustment arm 104 is used, the driving mechanism up and down 116 (with reference to Figure 16) that support component 107 is moved up and down.
Driving mechanism 116 comprises up and down: up and down drive motor 120, a ball-screw 121 linking with drive motor 120 up and down.As shown in figure 16, drive motor 120 is fixed on the upper end side of columnar part 108 up and down.In addition, ball-screw 121 with upper and lower to being that long side direction is installed on the columnar part 108.Particularly, ball-screw 121 two bearings 122 being fixed on the both end sides up and down of columnar part 108 support to rotatable.
In addition, driving mechanism 116 comprises the nut part 123 that screws togather with ball-screw 121 and move up and down up and down.Nut part 123 is fixing with support component 107.In the present embodiment, utilize ball-screw 121 and nut part 123 that support component 107 is moved along the vertical direction.And driving mechanism 116 comprises and is used to make (promptly being used to make support component 107 to stop) that driving mechanism 116 up and down stops two arrestment mechanism 124 up and down up and down.Driving mechanism 116 comprises and is used to prevent that nut part 123 from being that the corotation that the center is rotated prevents portion (not shown) with ball-screw 121 up and down.
In the present embodiment, the speed testing agency that has of drive motor 120 is used for motor side speed testing agency that the rotary speed of drive motor 120 is up and down detected up and down.In addition, the speed testing agency 131 that is installed in the lower end side of ball-screw 121 is used for the leading screw side speed testing agency that the rotary speed to ball-screw 121 detects.
As shown in figure 17, on the output shaft of drive motor 120 up and down, be fixed with belt wheel 128.In addition, be fixed with the diameter belt wheel 129 bigger in the upper end of ball-screw 121 than belt wheel 128.Open on belt wheel 128,129 and be provided with belt 130, drive motor 120 and ball-screw 121 are linked by belt 130 up and down.
As shown in figure 17, two up and down arrestment mechanism 124 be installed in the upper end side of ball-screw 121 with the form adjacent with belt wheel 129.That is, arrestment mechanism 124 passes through belt wheel 128,129 and belt 130 and drive motor 120 bindings up and down about in the of two.
The same with the robot 1 of embodiment 1, the robot 101 of present embodiment comprises control part (not shown).As with the relevant structure of control of driving mechanism 116 up and down, above-mentioned control part comprises: control is two of motor control part up and down, the controls control parts of brake up and down of arrestment mechanism 124 up and down of drive motor 120 up and down.
The control part of brake up and down of present embodiment is the same with the control part 84 of brake up and down of embodiment 1, when the input of the stop signal of the parts 107 that are supported from control instruction portion, make two up and down arrestment mechanism 124 move by stages.Promptly, when the input of the stop signal of the parts 107 that are supported from control instruction portion, up and down the brake control part according to one up and down arrestment mechanism 124 action zero hour with another up and down the mode of the action zero hour different (staggering) of arrestment mechanism 124 make two up and down arrestment mechanism 124 move.
Particularly, up and down the brake control part according to another up and down the action of arrestment mechanism 124 be later than the zero hour one up and down the mode of action zero hour of arrestment mechanism 124 make two arrestment mechanism 124 actions up and down.That is, at first one up and down arrestment mechanism 124 begin action, this up and down arrestment mechanism 124 be under the state of action, up and down the brake control part make another up and down arrestment mechanism 124 begin action, make two arrestment mechanism 124 actions up and down thus.More specifically, up and down the brake control part according to another up and down the stopping of energising (or to actual moment that stops of the energising of coil) constantly of the coil of arrestment mechanism 124 be later than to one up and down the coil of arrestment mechanism 124 energising stop constantly that the mode in (or to actual moment that stops of the energising of coil) stops two energisings of the coil of arrestment mechanism 124 up and down.
As described above, in the present embodiment, driving mechanism 116 comprises two arrestment mechanisms 124 up and down up and down.Therefore, though up and down arrestment mechanism 124 breakages, also can utilize another up and down arrestment mechanism 124 make up and down that driving mechanism 116 stops, support component 107 is stopped, preventing dropping of hand 103 and arm 104.Therefore, in the present embodiment, even expensive mask 102 also can be carried safely.In addition, even tear next arrestment mechanism 124 up and down open when safeguarding, also can support component 107 be stopped on the assigned position with arrestment mechanism 124 about another, therefore, the maintenance of driving mechanism 116 becomes easy up and down.
In addition, in the present embodiment, make two up and down arrestment mechanism 124 move by stages, increase the brake force of driving mechanism 116 generations up and down by stages.Therefore, can prevent the unexpected braking of driving mechanism 116 up and down.Therefore, even driving mechanism 116 comprises two up and down arrestment mechanisms 124 up and down, also can prevent to drop from hand 103 because of anxious that stop to cause, the mask 102 of support component 107.
In the present embodiment, driving mechanism 116 comprises the drive motor 120 about in the of that links with arrestment mechanism about in the of two 124 up and down.Therefore, can with two up and down the bigger brake force of arrestment mechanism 124 make one up and down drive motor 120 stop reliably.
In the present embodiment, driving mechanism 116 comprises up and down: the speed testing agency that is used for the rotary speed of drive motor 120 is up and down detected, be used for the speed testing agency 131 that the rotary speed to ball-screw 121 detects.Therefore, whether become more than the setting by detecting according to the rotary speed of the ball-screw 121 that calculates from the output of the speed testing agency of drive motor 120 up and down and difference with the rotary speed of speed testing agency 131 detected ball-screws 121, can detect reliably driving mechanism 116 up and down unusually.In addition, when detecting driving mechanism 116 up and down unusual, driving mechanism 116 stopped about arrestment mechanism 124 made about utilizing.Therefore, even driving mechanism 116 produces unusually up and down, support component 107 is stopped safely.
[other embodiment]
Above-mentioned embodiment is an example of comparatively desirable embodiment of the present invention, but is not limited thereto, and can carry out various distortion and implement in the scope that does not change purport of the present invention.
In the embodiment 1, arrestment mechanism 24 is installed on the power shaft of reductor 21 up and down.In addition, for example, arrestment mechanism 24 also can be installed on the output shaft of the output shaft of drive motor 20 up and down or reductor 21 up and down.In addition, also can be by will being fixed on the columnar part 8 to the elongated tabular keep plate that is long side direction with upper and lower, and the side plate that will move up and down with support component 7 and armature constitute arrestment mechanism up and down to clip the state configuration of this keep plate.That is, arrestment mechanism can be not link with drive motor 20 up and down yet up and down.
Similarly, in the embodiment 1, level braking mechanism 44 is installed in horizontal drive with on the output shaft of motor 40, but level braking mechanism 44 also can be installed in the rotating shaft 53.In addition, also can be by will being that the elongated tabular keep plate of long side direction is fixed on the rail-like parts 51 with the horizontal direction, and the side plate that will move horizontally with base station 9 and armature constitute level braking mechanism to clip the state configuration of this keep plate.That is, level braking mechanism can not link with motor 40 with horizontal drive yet.
In addition, in embodiment 2, arrestment mechanism 124 is installed in the upper end side of ball-screw 121 up and down, but arrestment mechanism 124 also can be installed on the output shaft of drive motor 120 up and down up and down.In addition, also can will be fixed on the columnar part 108 to the elongated tabular keep plate that is long side direction, and the side plate that will move up and down with support component 107 and armature constitute arrestment mechanism up and down with the state configuration of this keep plate of clamping with upper and lower.
In the above-mentioned embodiment, driving mechanism 16,116 comprises two arrestment mechanisms 24,124 up and down up and down.In addition, for example up and down driving mechanism 16,116 also can comprise arrestment mechanism up and down 24,124 more than three.In this case, also can be that up and down the mode that staggers the zero hour according to respectively moving of the arrestment mechanism up and down more than three 24,124 of brake control part 84 makes arrestment mechanism 24,124 actions up and down.That is can be that brake control part 84 begins the action of the arrestment mechanism up and down 24,124 more than three successively up and down.In addition, in this case, also can be that the arrestment mechanism up and down more than three 24,124 is divided into several groups, and brake control part 84 make arrestment mechanism 24,124 actions up and down according to stagger the zero hour mode of (make every group and begin action successively) of every group action up and down.
When the mode that staggers the zero hour according to respectively moving of the arrestment mechanism up and down more than three 24,124 at brake control part 84 up and down makes arrestment mechanism 24,124 actions up and down, can slowly increase the brake force that driving mechanism 16,116 up and down produces.Therefore, can prevent the unexpected braking of driving mechanism 16,116 up and down reliably, prevent to carry object reliably and drop from hand 3,103.
Similarly, horizontal drive mechanism 17 also can comprise the level braking mechanism 44 more than three.In this case, also can be that the mode that level braking device control part 85 staggers according to respectively moving of the level braking mechanism 44 more than three zero hour makes 44 actions of level braking mechanism.In addition, in this case, also can be that the level braking mechanism 44 more than three is divided into several groups, and the mode that level braking device control part 85 staggers according to every group action the zero hour make 44 actions of level braking mechanism.
In addition, in embodiment 1, if up and down in driving mechanism 16 and the horizontal drive mechanism 17 comprises two arrestment mechanisms 24,44, then the arrestment mechanism 24,44 that comprises of another driving mechanism also can be one.
In embodiment 1, rotary drive mechanism 18 comprises a rotation brake mechanism 64, but rotary drive mechanism 18 also can comprise a plurality of rotation brake mechanism 64.In this case, also can be swing brake control part 86 makes 64 actions of rotation brake mechanism according to the mode that staggers the zero hour of respectively moving of a plurality of rotation brake mechanism 64.In addition, in this case, also can be that a plurality of rotation brake mechanism 64 is divided into several groups, and the mode that swing brake control part 86 staggers according to every group action the zero hour make 64 actions of rotation brake mechanism.
In the above-mentioned embodiment, arrestment mechanism 24,124, level braking mechanism 44 and rotation brake mechanism 64 are brakes of so-called non-excitation actuating type up and down.In addition, for example arrestment mechanism 24,124, level braking mechanism 44 and/or rotation brake mechanism 64 utilize side plate and armature to make the brake of brake disc release by the active force of compression helical spring with the brake disc clamping, when stopping coil electricity to coil electricity the time up and down.In addition, arrestment mechanism 24,124, level braking mechanism 44 and/or rotation brake mechanism 64 utilize compressed air to make the aor brake of armature action up and down.
In embodiment 1, driving mechanism 16, horizontal drive mechanism 17 and rotary drive mechanism 18 comprise two drive motors 20,40,60 up and down.In addition, for example up and down driving mechanism 16, horizontal drive mechanism 17 and/or rotary drive mechanism 18 also can comprise drive motor 20,40,60 more than three.In addition, the number of the included drive motor 20,40,60 of driving mechanism 16, horizontal drive mechanism 17 and rotary drive mechanism 18 also can be one up and down.
In embodiment 1, robot 1 comprises: driving mechanism 16, horizontal drive mechanism 17 and rotary drive mechanism 18 up and down.In addition, for example, robot 1 also can only comprise two or driving mechanism selecting arbitrarily from up and down driving mechanism 16, horizontal drive mechanism 17 and rotary drive mechanism 18.
Claims (10)
1. an industrial robot is characterized in that,
Comprise: the arm that loads the hand of carrying object, links with described hand, the support component that supports described arm,
And comprise: make the driving mechanism up and down that described support component moves up and down and/or be used to make the horizontal drive mechanism that described support component along continuous straight runs moves and/or be used to make described support component being the described driving mechanism up and down of rotary drive mechanism, control that is rotated of center and/or the control part of described horizontal drive mechanism and/or described rotary drive mechanism as axial regulation central shaft above-below direction
Described up and down driving mechanism and/or described horizontal drive mechanism and/or described rotary drive mechanism comprise and be used to a plurality of arrestment mechanisms that described driving mechanism up and down and/or described horizontal drive mechanism and/or described rotary drive mechanism are stopped,
Described control part comprises the brake control part of controlling a plurality of described arrestment mechanisms,
Described brake control part moves a plurality of described arrestment mechanisms by stages.
2. industrial robot as claimed in claim 1 is characterized in that, described brake control part staggers the zero hour of respectively moving of a plurality of described arrestment mechanisms.
3. industrial robot as claimed in claim 2 is characterized in that, comprises described driving mechanism up and down, and driving mechanism has a plurality of arrestment mechanisms up and down as a plurality of described arrestment mechanisms up and down,
Described control part comprises the control parts of brake up and down as a plurality of described up and down arrestment mechanisms of the control of described brake control part,
Described brake control part up and down moves a plurality of described arrestment mechanisms up and down by stages.
4. industrial robot as claimed in claim 3 is characterized in that,
Described driving mechanism up and down comprises number and the same number of drive motor up and down of described arrestment mechanism up and down,
A plurality of described arrestment mechanisms up and down link with a plurality of described drive motors up and down respectively.
5. industrial robot as claimed in claim 4 is characterized in that, a plurality of speed testing agency that comprises that each rotary speed of being used for a plurality of described up and down drive motors detect.
6. industrial robot as claimed in claim 3 is characterized in that, described driving mechanism up and down comprises the drive motor about in the of that links with a plurality of described arrestment mechanisms up and down.
7. industrial robot as claimed in claim 6, it is characterized in that described up and down driving mechanism comprises: link and make ball-screw that described support component moves up and down with described drive motor up and down, be used for leading screw side speed testing agency that the rotary speed to described ball-screw detects, be used for motor side speed testing agency that the described rotary speed of drive motor is up and down detected.
8. as each described industrial robot in the claim 1 to 7, it is characterized in that, comprise described horizontal drive mechanism, this horizontal drive mechanism has a plurality of level braking mechanism as a plurality of described arrestment mechanisms,
Described control part comprises the level braking device control part as a plurality of described level braking of the control of described brake control part mechanism,
Described level braking device control part moves a plurality of described level braking mechanism by stages.
9. industrial robot as claimed in claim 8 is characterized in that,
Described horizontal drive mechanism comprises the same number of horizontal drive motor of number and described level braking mechanism,
A plurality of described level braking mechanism links with motor with a plurality of described horizontal drive respectively.
10. industrial robot as claimed in claim 1 is characterized in that, comprises described driving mechanism up and down, and driving mechanism has a plurality of arrestment mechanisms up and down as a plurality of described arrestment mechanisms up and down,
Described control part comprises the control parts of brake up and down as a plurality of described up and down arrestment mechanisms of the control of described brake control part,
Described brake control part up and down moves a plurality of described arrestment mechanisms up and down by stages.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-216543 | 2008-08-26 | ||
| JP2008216543 | 2008-08-26 | ||
| JP2008216543A JP5280132B2 (en) | 2008-08-26 | 2008-08-26 | Industrial robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101670579A true CN101670579A (en) | 2010-03-17 |
| CN101670579B CN101670579B (en) | 2014-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910171053.9A Expired - Fee Related CN101670579B (en) | 2008-08-26 | 2009-08-25 | Industrial robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5280132B2 (en) |
| KR (1) | KR101585684B1 (en) |
| CN (1) | CN101670579B (en) |
| TW (1) | TWI480140B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102211332A (en) * | 2011-05-09 | 2011-10-12 | 南京工业大学 | Industrial robot |
| CN104136174A (en) * | 2012-08-09 | 2014-11-05 | 日本电产三协株式会社 | Industrial robot |
| TWI572467B (en) * | 2010-07-14 | 2017-03-01 | Nidec Sankyo Corp | Industrial robots, control methods for industrial robots, and teaching methods for industrial robots |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5447451B2 (en) * | 2011-08-08 | 2014-03-19 | 株式会社安川電機 | robot |
| WO2014024690A1 (en) * | 2012-08-09 | 2014-02-13 | 日本電産サンキョー株式会社 | Industrial robot |
| JP6295037B2 (en) * | 2013-08-08 | 2018-03-14 | 日本電産サンキョー株式会社 | Industrial robot |
| JP7304226B2 (en) * | 2019-07-10 | 2023-07-06 | ニデックインスツルメンツ株式会社 | INDUSTRIAL ROBOT AND CONTROL METHOD FOR INDUSTRIAL ROBOT |
| JP2022104003A (en) * | 2020-12-28 | 2022-07-08 | 日本電産サンキョー株式会社 | Robot and control method of robot |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06262565A (en) * | 1993-03-11 | 1994-09-20 | Hitachi Ltd | Braking device and manipulator unit |
| CN1214004A (en) * | 1997-01-17 | 1999-04-14 | 普里马克Fec公司 | Slicer with staged dynamic braking system |
| JP2001274218A (en) * | 2000-03-23 | 2001-10-05 | Sankyo Seiki Mfg Co Ltd | Double-arm robot |
| CN1663750A (en) * | 2004-03-04 | 2005-09-07 | 株式会社莱茵瓦库斯 | Transport apparatus |
| WO2005102599A1 (en) * | 2004-03-30 | 2005-11-03 | Mitsubishi Denki Kabushiki Kaisha | Robot controller |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6334086A (en) * | 1986-07-28 | 1988-02-13 | 松下電器産業株式会社 | Industrial robot |
| JPH04286587A (en) * | 1991-03-14 | 1992-10-12 | Mitsubishi Electric Corp | Linear motor type elevator control device |
| JPH0688200U (en) * | 1992-12-25 | 1994-12-22 | 石川島播磨重工業株式会社 | Brake combined speed reducer |
| JP3217604B2 (en) * | 1993-08-20 | 2001-10-09 | 三菱電機株式会社 | Positioning device |
| JP2003025271A (en) * | 2001-07-16 | 2003-01-29 | Sankyo Seiki Mfg Co Ltd | Robot control device |
| JP3537416B2 (en) * | 2001-12-19 | 2004-06-14 | ファナック株式会社 | Servo control device |
| KR200290991Y1 (en) * | 2002-05-30 | 2002-10-04 | 주식회사 피에스티 | Single axis robot whose linear motion and rotation motion are possible |
| JP2006263894A (en) * | 2005-03-25 | 2006-10-05 | Seiko Epson Corp | Device for releasing motor brake of articulated robot |
| JP4581892B2 (en) * | 2005-07-27 | 2010-11-17 | 株式会社デンソーウェーブ | Robot controller |
| JP5016302B2 (en) * | 2006-12-01 | 2012-09-05 | 日本電産サンキョー株式会社 | Arm drive device and industrial robot |
-
2008
- 2008-08-26 JP JP2008216543A patent/JP5280132B2/en active Active
-
2009
- 2009-08-25 TW TW098128552A patent/TWI480140B/en active
- 2009-08-25 CN CN200910171053.9A patent/CN101670579B/en not_active Expired - Fee Related
- 2009-08-26 KR KR1020090079128A patent/KR101585684B1/en active IP Right Grant
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06262565A (en) * | 1993-03-11 | 1994-09-20 | Hitachi Ltd | Braking device and manipulator unit |
| CN1214004A (en) * | 1997-01-17 | 1999-04-14 | 普里马克Fec公司 | Slicer with staged dynamic braking system |
| JP2001274218A (en) * | 2000-03-23 | 2001-10-05 | Sankyo Seiki Mfg Co Ltd | Double-arm robot |
| CN1663750A (en) * | 2004-03-04 | 2005-09-07 | 株式会社莱茵瓦库斯 | Transport apparatus |
| WO2005102599A1 (en) * | 2004-03-30 | 2005-11-03 | Mitsubishi Denki Kabushiki Kaisha | Robot controller |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI572467B (en) * | 2010-07-14 | 2017-03-01 | Nidec Sankyo Corp | Industrial robots, control methods for industrial robots, and teaching methods for industrial robots |
| CN102211332A (en) * | 2011-05-09 | 2011-10-12 | 南京工业大学 | Industrial robot |
| CN102211332B (en) * | 2011-05-09 | 2013-04-17 | 南京工业大学 | Industrial robot |
| CN104136174A (en) * | 2012-08-09 | 2014-11-05 | 日本电产三协株式会社 | Industrial robot |
| CN104136174B (en) * | 2012-08-09 | 2016-08-24 | 日本电产三协株式会社 | Industrial robot |
| CN105127984B (en) * | 2012-08-09 | 2018-11-09 | 日本电产三协株式会社 | Industrial robot and its control method |
| TWI669200B (en) * | 2012-08-09 | 2019-08-21 | 日商日本電產三協股份有限公司 | Industrial robot and control method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101670579B (en) | 2014-11-12 |
| KR101585684B1 (en) | 2016-01-14 |
| TWI480140B (en) | 2015-04-11 |
| TW201026460A (en) | 2010-07-16 |
| JP2010052055A (en) | 2010-03-11 |
| JP5280132B2 (en) | 2013-09-04 |
| KR20100024908A (en) | 2010-03-08 |
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