KR200290991Y1 - Single axis robot whose linear motion and rotation motion are possible - Google Patents

Abstract

The present invention relates to a single axis robot capable of linear and rotational movement, the base having a motor for transmitting a rotational force to move the wafer; A body installed at an upper portion of the base to rotate a handle for moving the wafer by a rotational force of the motor; A first rotating member installed on an upper portion of the body to rotate in association with the rotational force of the motor; A second rotating body installed at one side of the first rotating member and provided with a handle for moving the wafer so that the handle rotates linearly by the rotational force of the first rotating body; A first brake unit installed between the base and the body to rotate only the body by a driving force of the motor; And a second brake unit installed between the body and the second rotating body to transfer the rotational force so that the handle can be linearly moved by the rotational force transmitted to the body when the first brake unit is braked by the first brake unit. It is convenient to manufacture a robot using a single shaft by using a single motor, and the production cost is lowered, resulting in price competitiveness, and the effect of being controlled by one motion drive.

Description

Single axis robot whose linear motion and rotation motion are possible}

The present invention relates to a single-axis robot capable of linear and rotational motion. More specifically, the brake is configured to distinguish between rotational motion and linear motion by using one motor as one axis. The present invention relates to a single-axis robot capable of linear and rotational motions to control the motion of the robot.

Generally, micro-level processing such as semiconductor materials or deep seas, diving work in deep sea, and work in space, such as work that is impossible with human labor ability, Instead, the machines that work in the industrial front are industrial robots.

Therefore, the industrial robot replaces human dislikes and extreme labor that transcends human labor ability in a bad working environment and prevents mistakes that are likely to occur due to human carelessness. Ancillary equipment is the nature of industrial robots. Therefore, industrial robots are working in the workplace to reduce labor, improve labor quality, improve labor quality and solve labor proficiency.

Industrial robot technology has two simple operations: mechanical and electronic. Mechanical industrial robots perform one or two movements (1 to 2 degrees of freedom), which is advantageous for simple repetitive tasks. However, if the working operation is 3 or more (more than 3 degrees of freedom), there are many problems to be solved by the mechanical method such as mechanical structure. Therefore, solving the problem by electronic method (electronic control) increases the flexibility of the machine Is advantageous. This is the fundamental technology of industrial robots called mechatronics. This mechatronics technology enables machines to communicate with humans.

Industrial robots can be classified into several types by the way they accept human work instructions. Manual manipulators that work according to human instructions by means of remote instructions, such as work in deep seas and in space. There are sequential robots that are planted inside and repeat only their work. There are two types of robots, fixed and variable.

There is also a repetitive robot that remembers the teachings and allows them to repeat work whenever necessary according to human instructions. This repetitive robot can be used in a short time by changing the program of skilled workers, so it can be used for work requiring specialized functions such as machining, painting and welding.

And in the semiconductor manufacturing industry, robots handling articles can be used for a myriad of purposes. The most important of these is the handling of silicon wafers. The procedure, of course, is done in a room with a clean environment, and the robot must be able to move very precisely. The most common apparatus currently used for this purpose is a general robot with a rotatable means for rotating and a lifting means for lifting a cylinder. Furthermore, a means for extending and contracting in the distal direction the arm on which the hand holding the object is installed is provided.

However, in the conventional cylindrical coordinate robots having two arms, the reducer and the motor are directly connected to each axis of rotation, and the motor and the reducer are directly added to each arm driving shaft to move the two arms located at the upper part of the robot in the radial direction thereof. Therefore, expensive reducers are used, which increases manufacturing costs and increases the size of the robot. In addition, there is a problem that the power and control signal cables of the motor should be wired to the upper layer of the robot.

As shown in FIG. 1, in the related art, a base panel 1 that is linearly moved by a liner motor (not shown) and a motor 3 for rotation inside the base panel 1 are installed vertically on an upper portion of the base panel 1. The robot is configured with a body 2 installed and a handle on which a wafer is placed on one side of the body 2 to move.

The conventional robot configured as described above is provided with a liner motor for linear motion and a motor 3 for rotational motion so that two axes are used for rotational motion and linear motion.

In order to use these two axes, it is very difficult to control each of the two axes because it is configured by a motion driver for each motion and driven by one controller, which complicates the manufacturing process. There is a disadvantage in that the price competitiveness of a product is lowered due to an increase in production cost.

FIG. 2 is a schematic view of the configuration of another embodiment of FIG. 1, and as shown in FIG. 2, a vertical motion of the second motor 22 and the vertical movement of the second motor 22 is shown in FIG. 2. A base panel 10 having a first motor 20 to be provided, and the body 30 is rotatably installed on the base panel 10 to be rotated by the drive of the second motor 22. do. One side of the first motor 20 installed inside the body 30 is provided with a rotating body 21 to transfer power (rotational power) to the rotating body to be described later.

The first rotatable body 40 rotatably installed on the upper portion of the body 30 and rotated by the driving force of the first motor 20 and the handle 50 for moving the wafer on one side thereof are installed. The robot is made of a turning member 50 for changing the direction in which the handle 60 is moved so that the handle 60 can be linearly moved by the rotational force of the first rotating body 40.

Conventionally configured as described above, the robot used to move the wafer or cassette used two axes for linear motion and rotational motion, one motor for rotational motion and another motor for linear motion.

In order to use these two axes, the motion driver for each motion is configured separately and driven by one controller.

Two-axis control of the robot in the above manner has a problem that the control is complicated due to the relationship between the axis is separated and the production cost is high.

In addition, in the cylindrical coordinate system robot having two arms, there is a problem that it is difficult to configure the rotating shaft, the operating shaft, and the arm driving shaft on the same axis.

In addition, there is a problem in that the manufacturing cost of the robot moved in two axes by two motors consumes a considerable cost in the mechanical part, and a large manufacturing cost is consumed in terms of control.

In order to solve the above problems, the present invention is to configure the brake to distinguish between the rotary motion and the linear motion by using one motor as one axis, two brakes one on the other to maintain the off state, respectively It is possible to control the rotational movement and linear movement of the single axis robot, and it is possible to control the existing robot consisting of two axes in the same function with one axis, so that the linear motion and the rotational motion that can reduce the production cost of the robot are possible. The purpose is to provide.

The present invention for achieving the above object is a robot for moving the wafer by the handle by controlling the direction of rotational movement and the direction of linear movement using two motors, respectively,

A base having a motor for transmitting rotational force to move the wafer; A body installed at an upper portion of the base to rotate a handle for moving the wafer by a rotational force of the motor; A first rotating member installed on an upper portion of the body to rotate in association with the rotational force of the motor; A second rotating body installed at one side of the first rotating member and provided with a handle for moving the wafer so that the handle rotates linearly by the rotational force of the first rotating body; A first brake unit installed between the base and the body to rotate only the body by a driving force of the motor; And a second brake unit installed between the body and the second rotating body to transfer the rotational force so that the handle can be linearly moved by the rotational force transmitted to the body when the first brake unit is braked by the first brake unit. It provides a single axis robot capable of linear and rotational movements.

In addition, the robot is characterized in that the movement of the wafer while rotating and linear movement in a single axis through a single motor.

1 is a configuration diagram schematically showing a configuration of a robot moved in two axes by two conventional motors.

2 is a schematic view showing the configuration of another embodiment of FIG.

Figure 3 is a schematic view showing the configuration of a single-axis robot capable of linear motion and rotational motion according to the present invention.

* Description of the symbols for the main parts of the drawings *

100: robot 110: base

120: motor 130: first brake portion

140: body 150: first rotating body

160: second brake unit 170: second rotating body

180: handle

Hereinafter, a single axis robot capable of linear motion and rotational motion according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a schematic view showing the configuration of a single-axis robot capable of linear and rotational motion according to the present invention, as shown in Figure 3 robot 100 according to the present invention is a motor for transmitting a rotational force to the inside The base 110 having the 120 and the body 140 is rotatably installed on the base 110 so as to be rotated by the rotational force of the motor 120.

A first brake unit 130 is disposed between the body 140 and the base 110 to control the rotational force of the body 140.

The upper part of the body 140 is provided with a first rotating body 160 that rotates in response to the rotational force of the motor 120 installed inside the base 110, the handle 180 for moving the wafer on one side is The second rotating body 170 is provided with a rotational force of the first rotating body 160 to change the direction of the movement force to linearly move the handle 180, the upper portion of the first rotating body 160 Is installed on.

The second brake unit 150 is installed between the body 140 and the second rotating body 160, and the second brake 150 has a rotational force of the motor 140. Control the delivery to 160).

One side of the second rotating body 160 is provided with a second rotating body 170 in which the handle 180 is installed so that the handle 180 can be moved in a straight direction.

Looking at the action of a single axis robot capable of linear motion and rotational motion according to the present invention configured as described above are as follows.

Looking at the rotation of the single axis robot 100 capable of linear motion and rotational motion of the present invention, when the motor 120 installed inside the base 110 is driven, the base 110 by the driving force of the motor 120 Body 140 is installed on the top of the rotation by the driving force.

When the body 140 rotates under the driving force of the motor 120, the second brake unit 150 installed between the body 140 and the first rotating body 160 is turned off ( Rotation force is maintained in a disconnected state so that only the body 140 rotates.

Keeping the second brake unit 150 in an off state is a state for preventing the rotational force of the motor 120 from being transmitted to the first rotating body 160, that is, the first brake body 150 is transmitted to the first rotating body 160. The rotating force is to keep the blocked state.

In addition, when the first rotating body 160 rotates while the handle 180 moving the wafer is linearly moved by the rotational force of the motor 120, it is installed between the base 110 and the body 140. The rotational force of the motor 120 is transmitted to the first rotating body 160 while maintaining the state in which the first brake unit 150 is turned off.

At this time, the second brake unit 150 installed between the body 140 and the first rotating body 170 maintains an on state, but if the second brake unit 150 is on, It means a state in which power is transmitted so that the rotational force of the motor 120 can be transmitted to the first rotating body 160.

As described above, by controlling the rotational force of the motor 120 to control the first brake unit 130 and the second brake unit 150, the wafer or the tray may be transferred through one axis using one motor 120. There is this.

Looking at the effects of a single-axis robot capable of linear and rotational motion according to the present invention, the production of a robot using a single axis using a single motor is convenient, and the cost of production is lowered, there is a price competitiveness, It has the effect of being controlled by the motion drive.

Claims (2)

In the robot to move the wafer by the handle by controlling the direction of rotational movement and the direction of linear movement using two motors, A base 110 having a motor 120 for transmitting a rotational force to move the wafer; A body 140 installed at an upper portion of the base 110 to rotate a handle 180 for moving the wafer by a rotational force of the motor 120; A first rotating body 160 installed at an upper portion of the body 140 to rotate in association with the rotational force of the motor 120; The handle 180 is installed on one side of the first rotating body 160 to move the wafer, and the rotating direction of the handle 160 can be linearly moved by the rotational force of the first rotating body 160. A second rotating body 160 to switch; The first rotating body 160 and the second rotating body 170 are installed between the base 110 and the body 140 such that the body 120 is rotated by the driving force of the motor 120. And a first brake unit 150 for allowing the handle 180 to rotate together. And Is installed between the body 140 and the second rotating body 160 when the braking (power is disconnected state) by the first brake unit 130, the transmission of the rotational force to the body 140 is cut off, Linear motion, characterized in that it comprises a second brake unit 150 for transmitting a rotational force so that the handle 180 is a linear movement through the first rotating body 160 and the second rotating body 170 and Single axis robot with rotational motion. The method of claim 1 The robot 100 is a single-axis robot capable of linear motion and rotational movement, characterized in that for moving the wafer while rotating and linear movement in a single axis through a single motor (120).