CN101664931B - Pressure-adjustable robot arm with force sensor - Google Patents

Pressure-adjustable robot arm with force sensor Download PDF

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Publication number
CN101664931B
CN101664931B CN2009103075278A CN200910307527A CN101664931B CN 101664931 B CN101664931 B CN 101664931B CN 2009103075278 A CN2009103075278 A CN 2009103075278A CN 200910307527 A CN200910307527 A CN 200910307527A CN 101664931 B CN101664931 B CN 101664931B
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CN
China
Prior art keywords
forearm
postbrachium
pressure adjusting
electrode
vacuum slot
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009103075278A
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Chinese (zh)
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CN101664931A (en
Inventor
董占民
肖尧
孙红三
贾侦华
孙梁
伊文君
田建明
徐杰
刘鸿飞
郭金源
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Chn Top Machinery Group Co ltd
Tsinghua University
Original Assignee
BEIJING CHN-TOP MACHINERY Co Ltd
Tsinghua University
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Publication date
Application filed by BEIJING CHN-TOP MACHINERY Co Ltd, Tsinghua University filed Critical BEIJING CHN-TOP MACHINERY Co Ltd
Priority to CN2009103075278A priority Critical patent/CN101664931B/en
Publication of CN101664931A publication Critical patent/CN101664931A/en
Application granted granted Critical
Publication of CN101664931B publication Critical patent/CN101664931B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention relates to a carrying robot arm, in particular to a grain carrying robot arm which is used in a grain sorting machine or a die bonder and can adjust the down force on the grain and conveniently measure when the down force meets the requirements. The robot arm consists of a rear arm 301, a supporting plate 304, an insulating ring 312, a rear arm electrode bolt 302, an electrode bolt nut 311, a flexible sheet 310, a front arm 308, a front arm electrode 315, a pressure adjusting rod 305, a pressure adjusting nut 306, a spring 307, a vacuum suction nozzle 314 and a vacuum suction nozzle joint 313. The robot arm has the advantages of having concise structure, convenient adjustment and smooth movement, meeting economic benefits, and having industrial production valve.

Description

Adjustable pressure also has the mechanical arm of power sensor
Technical field
The present invention relates to a kind of handling machinery arm, especially relate to a kind of use can regulate downforce, and can be convenient for measuring the crystal grain handling machinery arm when downforce meets the demands in crystal grain sorter or solid brilliant machine crystal grain.
Background technology
In the LED crystal particle production process, at first produce the wafer of full wafer, wafer is divided into the independently crystal grain that separates fully mutually through after cutting, and independently adheres on the blue film with viscosity.In subsequent wafer classification technology, the crystal grain sorter need use a vacuum slot device that crystal grain is drawn from blue film, and is placed into the position of regulation; Perhaps in follow-up solid brilliant technology,, and be placed into the position of regulation Gu brilliant machine need use a vacuum slot device that crystal grain is drawn from blue film; This action all needs to use crystal grain handling machinery arm mechanism to finish.Chinese patent literature discloses the utility model patent that a kind of name is called " the crystal grain taking arm structure of crystal grain selector " on September 28th, 2005, and the bulletin number of opening of this patent is CN 2728728Y.Its disclosed technical essential is, on crystal grain selector 10, establish a start taking arm mechanism 20, this start fetching device 20 includes actuating arm 30 and a connecting seat 40 of a start that can drive, wherein the end place is provided with a suction nozzle vacuum adapter device for quickly disassembling before this actuating arm 30, it is the suction nozzle 33 that contains a suction nozzle vacuum adapter 32 and an adsorbable crystal grain, and in the solid spring leaf 34 of place, last aspect spiral shell, and its actuating arm 30 extends a contiguous block 35 in the rear end, and the Connection Block 40 that is connected on the pickout apparatus 10 of contiguous block 35 and is connected to each other with bearing 36 whereby, these contiguous block 35 bottom surfaces also borrow a holder 37 to combine, other is the person, on end face before the Connection Block 40, then axially establish a pressure adjustment group 41 and a horizontal adjusting group 42 respectively, and have the body of rod 43 to hold to stretch in the spring 44 and integral body is fixedly arranged on the pressure adjustment group 41 and has an adjusting knob can regulate contact pressure, 42 of this horizontal adjusting groups have a screw 45 to be screwed into can to regulate the arm level in addition.Described crystal grain taking arm structure has certain practical value and regulating power, but the assembly complexity is regulated inconvenience, the fault rate height.So traditional crystal grain handling machinery arm is carried the crystal grain downforce to it and can't easyly be regulated, also can't easy sense mechanism arm whether the downforce of its operated crystal grain be reached the operation requirement.
Summary of the invention
The present invention seeks in order to overcome above-mentioned the deficiencies in the prior art, propose a kind ofly can conveniently regulate the predetermined downforce of crystal grain and can be convenient for measuring the mechanical arm mechanism when downforce meets the demands.
The object of the invention realizes being finished by following technical scheme:
The present invention is by postbrachium 301, gripper shoe 304, dead ring 312, postbrachium electrode screw 302, electrode screw-nut 311, flexure strip 310, forearm 308, forearm electrode 315, pressure adjusting lever 305, pressure adjusting nut 306, spring 307, vacuum slot 314 and vacuum slot joint 313 are formed, fix a flexure strip 310 at postbrachium 301 front ends, flexure strip 310 front ends and forearm 308 are fixed together, at forearm 308 front ends one vacuum slot quick-disassembly structure is arranged, comprise a vacuum slot 314 and a vacuum slot joint 313, at postbrachium 301 front ends one hollow structure 317 is arranged, the forearm rear portion is extended 316 and is passed from the front end hollow structure 317 of postbrachium and do not contact with postbrachium 301, extend 316 at the forearm rear portion and be fixedly connected with a pressure adjusting lever 305, extend 316 connections in addition at the forearm rear portion and be fastened with a forearm electrode 315, in postbrachium 301 upper fixed one gripper shoe 304, one hole is arranged on the gripper shoe 304, from then on forearm pressure adjusting lever 305 passes and can be free to slide in the hole in the hole, a pressure adjusting nut 306 has been threaded on this pressure adjusting lever 305, simultaneously there is being a spring 307 to be through on the pressure adjusting lever 305 below the pressure adjusting nut 306, this spring 307 can contact with pressure adjusting nut 306 and gripper shoe 304, one hole is arranged on the gripper shoe 304 in addition, a fastening dead ring 312 in the hole, a screwed hole is arranged on this dead ring 312, one postbrachium electrode screw 302 is installed on this screwed hole, a nut 311 has been threaded on this electrode screw 302, after the installation, postbrachium electrode screw 302 contacts with forearm electrode 315, and forearm 308 can conducting with postbrachium electrode screw 302 electric currents.
Advantage of the present invention is simple for structure, and is easy to adjust, and it is smooth and easy to move, and meets economic benefit, has industrial production and is worth.
Description of drawings
Fig. 1 three-dimensional combination schematic appearance of the present invention;
Fig. 2 perspective exploded view of the present invention;
Fig. 3 structure of the present invention is implemented schematic diagram;
Fig. 4 structure of the present invention is implemented schematic diagram;
Fig. 5 structure of the present invention is implemented schematic diagram;
Fig. 6 structure of the present invention is implemented schematic diagram;
Fig. 7 structure of the present invention is implemented schematic diagram.
The specific embodiment
Consult shown in the accompanying drawing 1~7 number in the figure: 301-postbrachium, 302-postbrachium electrode screw, 303-gripper shoe hold-down screw, 304-gripper shoe, 305-pressure adjusting lever, 306-pressure adjusting nut, 307-spring, 308-forearm, 309-flexure strip hold-down screw, 310-flexure strip, 311-electrode screw-nut, 312-dead ring, 313-vacuum slot joint, 314-vacuum slot, 315-forearm electrode, the extension of 316-forearm rear portion, 317-postbrachium front end hollow, 318-frame.
Adjustable pressure of the present invention and the mechanical arm mechanism that has a power sensor are on crystal grain sorter or solid brilliant machine frame 318 mechanical arm to be installed, this mechanical arm is by postbrachium 301, gripper shoe 304, dead ring 312, postbrachium electrode screw 302, electrode screw-nut 311, flexure strip 310, forearm 308, forearm electrode 315, pressure adjusting lever 305, pressure adjusting nut 306, spring 307, vacuum slot 314 and vacuum slot joint 313 are formed, fix a flexure strip 310 at postbrachium 301 front ends, flexure strip 310 front ends and forearm 308 are fixed together, at forearm 308 front ends one vacuum slot quick-disassembly structure is arranged, comprise a vacuum slot 314 and a vacuum slot joint 313, at postbrachium 301 front ends one hollow structure 317 is arranged, the forearm rear portion is extended 316 and is passed from the front end hollow structure 317 of postbrachium and do not contact with postbrachium 301, extend 316 at the forearm rear portion and be fixedly connected with a pressure adjusting lever 305, extend 316 connections in addition at the forearm rear portion and be fastened with a forearm electrode 315, in postbrachium 301 upper fixed one gripper shoe 304, one hole is arranged on the gripper shoe 304, from then on forearm pressure adjusting lever 305 passes and can be free to slide in the hole in the hole, a pressure adjusting nut 306 has been threaded on this pressure adjusting lever 305, simultaneously there is being a spring 307 to be through on the pressure adjusting lever 305 below the pressure adjusting nut 306, this spring 307 can contact with pressure adjusting nut 306 and gripper shoe 304, one hole is arranged on the gripper shoe 304 in addition, a fastening dead ring 312 in the hole, a screwed hole is arranged on this dead ring 312, one postbrachium electrode screw 302 is installed on this screwed hole, a nut 311 has been threaded on this electrode screw 302, after the installation, postbrachium electrode screw 302 contacts with forearm electrode 315, and forearm 308 can conducting with postbrachium electrode screw 302 electric currents.
During use, driving mechanism can drive postbrachium 301 and be rotated swing or rising, descending motion, and the vacuum slot 314 that forearm 308 front ends are installed can be carried operation to crystal grain.When 301 rotations of drive mechanism postbrachium, postbrachium 301 can drive forearm 308 rotary oscillations by flexure strip 310.When drive mechanism postbrachium 301 moved up and down, postbrachium 301 drove forearm 308 and moves up and down by flexure strip 310 and gripper shoe 304, dead ring 312, spring 307, pressure adjusting lever 305.By the pressure adjusting nut 306 that is threaded on the rotational pressure adjusting rod 305, pressure adjusting nut 306 is moved up and down on pressure adjusting lever 305, and then can regulate the degree that compresses of the spring 307 between pressure adjusting nut 306 and the gripper shoe 304.As shown in Figure 4, do downward motion and make vacuum slot 314 that forearm 308 front ends install not during contact workpiece when postbrachium 301 drives forearms 308, the vacuum slot 314 that forearm 308 front ends are installed contacts crystal grain but downforce surpasses when setting value, postbrachium electrode screw 302 contacts with forearm electrode 315, and forearm 308 can conducting with postbrachium electrode screw 302 electric currents.Do downward motion and make vacuum slot 314 contact crystal grain that forearm 308 front ends install and downforce when surpassing setting value when postbrachium 301 drives forearms 308, postbrachium electrode screw 302 disengages with forearm electrode 315, forearm 308 and postbrachium electrode screw 302 electric currents can not conductings, as shown in Figure 5.Whether conducting knows promptly whether the downforce of 314 pairs of crystal grain of vacuum slot that forearm 308 front ends are installed meets the demands with postbrachium electrode screw 302 electric currents by measuring forearm 308.Can regulate the predetermined downforce of the vacuum slot 314 contact crystal grain of forearm 308 front ends installation by the degree that compresses of regulating spring 307.When pressure adjusting nut 306 compression springs 307, spring force increases, and then the predetermined downforce of 314 pairs of crystal grain of vacuum slot of forearm 308 front ends installation also increases; When pressure adjusting nut 306 pull-off springs 307, spring force reduces, and then the predetermined downforce of 314 pairs of crystal grain of vacuum slot of forearm 308 front ends installation also reduces.As shown in Figure 6, mechanical arm of the present invention can be swung 90 °, and as shown in Figure 7, its maximum can be swung 180 °.
Though below design and embodiment according to the object of the invention have been done to elaborate with reference to accompanying drawing; but those of ordinary skills can recognize; under the precondition that does not break away from the claim limited range; still can make various improvement and conversion to the present invention, and this improvement and conversion still should belong to protection scope of the present invention.

Claims (2)

1. adjustable pressure and have the mechanical arm mechanism of power sensor, it is characterized in that, by postbrachium (301), gripper shoe (304), dead ring (312), postbrachium electrode screw (302), electrode screw-nut (311), flexure strip (310), forearm (308), forearm electrode (315), pressure adjusting lever (305), pressure adjusting nut (306), spring (307), vacuum slot (314) and vacuum slot joint (313) are formed, fix a flexure strip (310) at postbrachium (301) front end, flexure strip (310) front end and forearm (308) are fixed together, at forearm (308) front end one vacuum slot quick-disassembly structure is arranged, comprise a vacuum slot (314) and a vacuum slot joint (313), at postbrachium (301) front end one hollow structure (317) is arranged, the forearm rear portion is extended (316) and is passed from the front end hollow structure (317) of postbrachium and do not contact with postbrachium (301), extend (316) at the forearm rear portion and be fixedly connected with a pressure adjusting lever (305), extend (316) connection in addition at the forearm rear portion and be fastened with a forearm electrode (315), in postbrachium (301) upper fixed one gripper shoe (304), gripper shoe has a hole on (304), forearm pressure adjusting lever (305) from then on passes and can be free to slide in the hole in the hole, a pressure adjusting nut (306) has been threaded on this pressure adjusting lever (305), there is a spring (307) to be through on the pressure adjusting lever (305) in pressure adjusting nut (306) below simultaneously, this spring (307) can contact with pressure adjusting nut (306) and gripper shoe (304), gripper shoe has a hole on (304) in addition, a fastening dead ring (312) in the hole, a screwed hole is arranged on this dead ring (312), one postbrachium electrode screw (302) is installed on this screwed hole, and a nut (311) has been threaded on this electrode screw (302).
2. adjustable pressure according to claim 1 also has the mechanical arm mechanism of power sensor, it is characterized in that postbrachium electrode screw (302) contacts with forearm electrode (315), and forearm (308) can conducting with postbrachium electrode screw (302) electric current.
CN2009103075278A 2009-09-23 2009-09-23 Pressure-adjustable robot arm with force sensor Expired - Fee Related CN101664931B (en)

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CN101664931A CN101664931A (en) 2010-03-10
CN101664931B true CN101664931B (en) 2011-06-22

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Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101664932B (en) * 2009-09-23 2011-04-20 清华大学 Robot arm
CN102386286B (en) * 2010-08-31 2014-04-30 隆达电子股份有限公司 Chip transferring method and chip transferring equipment
CN102166755B (en) * 2011-01-26 2012-08-22 东南大学 Method for measuring three-dimensional contact force of tail end of mechanical hand of teleoperation robot
CN102674001A (en) * 2012-04-28 2012-09-19 惠州市得天自动化设备有限公司 Full-automatic 180-degree double-swing-arm double-welding-head material taking system of chip sorting machine
CN103151273B (en) * 2013-03-22 2016-08-10 江苏艾科瑞思封装自动化设备有限公司 Diode encapsulation device
CN105690359A (en) * 2014-11-28 2016-06-22 致茂电子(苏州)有限公司 Mechanical arm
CN105269575B (en) * 2015-11-30 2017-05-10 北京中电科电子装备有限公司 Picking and placing arm mechanism
US10814480B2 (en) * 2017-06-14 2020-10-27 The Boeing Company Stabilization of tool-carrying end of extended-reach arm of automated apparatus
US11090765B2 (en) * 2018-09-25 2021-08-17 Saudi Arabian Oil Company Laser tool for removing scaling
CN111376288B (en) * 2018-12-29 2021-10-29 深圳市优必选科技有限公司 Palm structure and robot
CN110718485A (en) * 2019-10-09 2020-01-21 深圳市盛世智能装备有限公司 Material taking device and die bonder

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5168168A (en) * 1991-05-10 1992-12-01 New Focus, Inc. Device for centering round articles
US6212968B1 (en) * 1998-07-29 2001-04-10 Janome Sewing Machine Co., Ltd, SCARA robot
CN1662348A (en) * 2002-06-04 2005-08-31 株式会社山武 Negative pressure attraction device and attraction confirming sensor
CN2728728Y (en) * 2004-04-09 2005-09-28 卢彦豪 Crystalline grain taking arm structure of crystalline grain selecting machine
CN2754834Y (en) * 2004-11-19 2006-02-01 富港电子(东莞)有限公司 Mechanical arm with weighing function

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5168168A (en) * 1991-05-10 1992-12-01 New Focus, Inc. Device for centering round articles
US6212968B1 (en) * 1998-07-29 2001-04-10 Janome Sewing Machine Co., Ltd, SCARA robot
CN1662348A (en) * 2002-06-04 2005-08-31 株式会社山武 Negative pressure attraction device and attraction confirming sensor
CN2728728Y (en) * 2004-04-09 2005-09-28 卢彦豪 Crystalline grain taking arm structure of crystalline grain selecting machine
CN2754834Y (en) * 2004-11-19 2006-02-01 富港电子(东莞)有限公司 Mechanical arm with weighing function

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Address after: 100084 Beijing City, Haidian District Tsinghua Yuan

Patentee after: TSINGHUA University

Patentee after: BEIJING CHN-TOP MACHINERY GROUP CO.,LTD.

Address before: 100084 Beijing City, Haidian District Tsinghua Yuan

Patentee before: Tsinghua University

Patentee before: BEIJING CHN-TOP MACHINERY Co.,Ltd.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110622