CN101645396B

CN101645396B - Film automatic stripper

Info

Publication number: CN101645396B
Application number: CN2009101951643A
Authority: CN
Inventors: 王正官; 王晨飞
Original assignee: Shanghai Institute of Technical Physics of CAS
Current assignee: Shanghai Institute of Technical Physics of CAS
Priority date: 2009-09-04
Filing date: 2009-09-04
Publication date: 2012-08-01
Anticipated expiration: 2029-09-04
Also published as: CN101645396A

Abstract

The invention discloses a film automatic stripper which comprises a DC motor, a drive plate, a driving board, a piston, a cylinder body, a pump, a liquid storage plate and a sample table. The invention is characterized in that the motor provides power, and the rotating movement of the motor is converted to the reciprocating linear movement of the piston in the cylinder body by a machinery mechanism; one end of the cylinder body is communicated with the pump; being driven by the piston, the pump sucks a reagent from the liquid storage plate and sprays the reagent to the sample table. The table surface is provided with a sample to be processed, and the aim of stripping the surface film is achieved under the function of the repeated spraying of the reagent.

Description

A kind of film automatic stripper

Technical field

The present invention relates to the semiconductor photoelectric device manufacturing process technology, specifically refer to a kind of film automatic stripper, it is applicable to the stripping technology of semiconductor medium film and metallic film.

Background technology

Usually the surface film stripping technology has two kinds; The one, the ultrasonic method of peeling off, promptly sample is placed in the reagent, accomplishes peeling off of film through ultrasonic oscillation.The 2nd, rock method by hand, promptly sample is placed on " gaily decorated basket " lining and places reagent, ceaselessly rocks up to film with hand and peels off.The ultrasonic drawback of peeling off method is that for example mercury cadmium telluride is shatter for the easy sample that quality is fragile.The problem of rocking method by hand is that inefficiency labour intensity is high, and particularly metal film is peeled off, and often has the residue stripping not fall, and can only erase lightly with soft-body matter such as cotton balls, writing brushes, accidentally can damage useful figure.

Summary of the invention

The objective of the invention is to overcome the prior art shortcoming, a kind of high-efficiency reliable film exfoliation tool is provided.

Function of the present invention is achieved in that shown in accompanying drawing 1 a direct current motor is vertically mounted on the vertical plane of a rectangle cube support one end, and machine shaft is upwards adorned a dial, and the edge-perpendicular on dial plane upwards is equipped with driving lever.The ball line slideway is equipped with along the center line level orientation in the last plane of this rectangle cube support, is equipped with drive plate, vertical panel, piston, cylinder body, pump in proper order along the center line of guide rail direction.The underneath of pump the liquid storage dish, and the built-in sample stage of liquid storage dish also contains reagent.The pump housing has pipette and sparge pipe, pipette vertically downward, in the reagent that one is immersed in the liquid storage dish.Sparge pipe tilt alignment sample stage is promptly aimed at sample.Said drive plate places level orientation, and its plane one end is processed with chute, is processed with two inner bolt holes on the vertical plane of the other end, and the chute of one of which end is enclosed within on the driving lever above the dial, and the screw of the other end is connected with vertical panel.The another side of vertical panel connects the slide plate of piston and guide rail.Have a cylinder body to be cylindrical tube, a headgear is on piston, and piston can move in cylinder body, and the cylinder body other end is communicated with pump.Cylinder body is fixed on plane on the support with level orientation.Starter motor, dial rotates, and drives driving lever and makes circular motion; So in chute, slide on the one hand because group thick stick is enclosed in interior this driving lever of the chute of drive plate, drive drive plate on the other hand and move along carriage center line direction, drive plate drives vertical panel; Vertical panel drives piston; Because vertical panel is connected again on the slide plate of guide rail, so the vertical panel motion is steadily reliable, and then the drive piston can steadily move in cylinder body reliably.Motor rotates continuously and makes piston constantly reciprocating motion in cylinder body.Cylinder body is communicated with pump, and pump just constantly sucks reagent again through sparge pipe ejection reagent through pipette under the driving of piston.Reagent is sprayed on the sample impulsive force that sample is had an inclination, and this impulsive force helps film to peel off together with the reagent chemical action.

The present invention has following positive progressive effect:

1, because automation is easy to operate, reduce labour intensity.

2, reagent is injected on the sample impulsive force that sample is had an inclination, and this impulsive force helps deielectric-coating to peel off together with the reagent chemical action.Process efficiency is high, and is effective

3, the pressure frequency adjustable that reagent can change, spray is fit to the polytype film and peels off, and can extensively promote the use of.

4, the mode of spraying with reagent is carried out film and is not peeled off and can damage sample.

Description of drawings

Fig. 1 is a stereoscopic sketch map of the present invention.

Fig. 2 is a structural representation of the present invention.

Fig. 3 is a drive plate front view of the present invention.

Fig. 4 is a pump configuration sketch map of the present invention.

Fig. 5 is Fig. 4 A-A cutaway view of the present invention.

Fig. 6 is a sample clamping sketch map of the present invention.

Embodiment

Illustrate embodiments of the invention according to Fig. 1-Fig. 6 below.And describe in detail.

----is shown in Figure 6 like Fig. 1, and embodiments of the invention comprise; Direct current machine 1 is screwed on the vertical plane center line of a rectangle cube support 21 1 ends through frame 2 vertically upward.Motor 1 is regulated rotating speed through power supply 22.In the rotating shaft of motor upper end metal dial 3 is housed, the edge on dial plane has been installed with driving lever 5, driving lever vertically upward, metal dial 3 all is to be processed by metal material with metal driving lever 5.Described 6 metallic plates of rectangle cube support 21 usefulness such as aluminium sheet are spliced, and plane is equipped with ball line slideway 20 along the center line level orientation on it, is equipped with drive plate 4, vertical panel 6, piston 8, cylinder body 9, pump 11 in proper order along the center line of guide rail direction.The underneath of pump 11 liquid storage dish 18, and the built-in liquid storing barrel 15 of liquid storage dish, the built-in sample of the liquid storing barrel platform 16 that floats, sample 12 are sandwiched in sample and float above the platform 16.Savings has a certain amount of reagent in the liquid storing barrel 15, and the unsteady platform 16 of sample is floated.Pump 11 has pipette 111 and sparge pipe 110, pipette 111 vertically downward, in the reagent that one is immersed in the liquid storage dish 18.The sparge pipe 110 tilt alignment samples platform 16 that floats is promptly aimed at sample 12.The both processes with glass, and discord reagent chemically reacts.The cylinder bent intermediate is at an angle like 45 degree in a tubular form for said sparge pipe 110, and one the other end is the conical reagent jet that is for cylinder and pump 11 join, and such shape makes the reagent ejection concentrated relatively strong.Said drive plate 4 is made of copper; Place level orientation; As shown in Figure 3, its plane one end is processed with chute 401, is processed with two inner bolt holes 402 on the vertical plane of the other end; The chute 401 of one end is enclosed within on the metal driving lever 5 above the metal dial 3, and the screw 402 of the other end is connected with vertical panel 6 planes.The another side of vertical panel 6 connects the slide plate 201 of piston 8 and guide rail respectively with screw.Have a cylinder body 9 to be cylindrical tube shape, wherein the pore of an end is enclosed within on the piston 8, and the pore of the other end is communicated with pump 11 through water nozzle 90, cylinder body 9 and piston 8 are holes with a precision movingly, piston 8 can be done moving axially of precision in the pore of cylinder body 9.Cylinder body 9 is fixed on support 21 on plane with level orientation with screw 19 by cylinder body frame 10.For fear of the chemical action of reagent to cylinder body 9 and piston 8, the both processes with glass, and the useable glass syringe is for using.Starter motor 1; Metal dial 3 rotates; Drive metal driving lever 5 and make circular motion, owing to metal driving lever 5 is enclosed in the chute 401 of drive plate 4, so this metal driving lever 5 slides in chute 401 on the one hand; Drive drive plate 4 on the other hand and move along support 21 centerline directions, the while also drives vertical panel 6, piston 8 moves.Because vertical panel 6 is connected again on the slide plate 201 of guide rail, move steadily reliably so vertical panel 6 drives piston 8, and then piston 8 moves also steadily reliable in cylinder body 9.Motor 1 rotates continuously and makes piston 8 constantly reciprocating motion in cylinder body 9.The other end of cylinder body 9 is communicated with pump 11 through water nozzle 90, and pump just constantly sucks reagent, sprays reagent through sparge pipe 110 through pipette 111 under the driving of piston 8.Reagent is sprayed on the sample 12 impulsive force that sample is had an inclination, and this power is together with the effective peel sample surface film of reagent chemical action.Regulate supply voltage rotating speed of motor is changed in 12-24 rev/min of scope, thereby just change the frequency and the pressure of reagent injected, just be more suitable for technological requirement.Reagent is ejected into the unsteady platform 16 of sample from sparge pipe 110, flows to liquid storing barrel 15, and aperture 17 flows out from the liquid storing barrel side again, gets back to liquid storage dish 18, is sucked, sprays by pump 11 again.So circulate a certain amount of reagent work that remains.Said liquid storage dish 18 is glass disk, and is corrosion-resistant, place pump below, the inside is placed with reagent, 111 mouthfuls of reagent submergence pipette.A liquid storing barrel 15 is also put in liquid storage dish 18 the insides, lets sparge pipe aim at liquid storing barrel 15.Said liquid storing barrel 15 is tubbiness, makes with the polytetrafluoroethylene material; Corrosion-resistant, the inside is equipped with the unsteady platform 16 of sample, can put aside reagent in the bucket; The unsteady platform 16 of sample is floated; When reagent is ejected into sample 12, the unsteady platform 16 of sample is had a thrust, this thrust moves the unsteady platform 16 of sample at random, thereby improves the uniformity that reagent is ejected into sample surfaces.According to arts demand, unsteady platform 16 movings range of sample just can be limited in the gap between unsteady platform 16 external diameters of control liquid storing barrel 15 internal diameters and sample.On liquid storing barrel 15 walls, open an aperture 17, barrel interior reagent is flowed out from aperture 17 apart from 1/4 barrel of eminence of bung, so as liquid level in the control bucket, the height that platform 16 floats thereby the control sample floats.The platform 16 that floats highly is controlled in 1/4 barrel of high position below liquid storing barrel 15 bungs, and purpose has two; 1, when reagent injected, spill and can be lived by liquid storing barrel 15 inwall shelves, be unlikely to extensive outer spattering.2,, in liquid storing barrel 15, be unlikely to be flushed in the liquid storage dish 18 and then be sucked into pump 11 again by the precipitate peelled off.The said sample platform 16 that floats is truncated cone-shaped, makes like polytetrafluoroethylene with corrosion-resistant material.Place in the liquid storing barrel 15.Its boring is convenient in liquid, float.The end, is heavy, and center of gravity is downward, and it is steady to be beneficial to table top.As shown in Figure 6, be equipped with left and right two clamping plates 13 on the table top, be convenient to clamp sample 12 with screw 14 lockings.Clamping plate 13 sheet that is square is processed with a groove 130 on its plane, screw 14 passes groove, can slippage in groove, and two clamping plates just can relatively move, and clamps sample 12.Two clamping plates 13 is more conducive to clamp sample 12 at the breach of on that limit of sample 12, respectively opening " V " font.Clamping plate 13 all are to be made by corrosion-resistant material such as polytetrafluoroethylene with screw 14.Said pump 11 is as shown in Figure 4, is " piece " of " fourth " font, is made like polytetrafluoroethylene by corrosion-resistant material.Along its horizontal, vertical structure, inner is the hole that horizontal direction and vertical direction two intersect vertically; There are two outlets in the horizontal direction hole, communicates with water nozzle 90, sparge pipe 110 respectively.The vertical direction hole has an outlet to communicate with pipette 111.In the hole, with sparge pipe 110 places one unidirectional valve 116,114 is housed respectively, under the pressure of certain orientation, controls feed liquor and fluid respectively near pipette 111.Said unidirectional valve the 114, the 116th is made with the material such as the polytetrafluoroethylene of chemically-resistant effect.With unidirectional valve 114 is example, and like Fig. 4, Fig. 5, unidirectional valve 114 is cylinders; Endoporus close-fitting with pump 11; It axially is processed with through hole 118, and a plate valve film 113 ovalizes are arranged, and covers this through hole 118; 112 be fixed on valve film 113 on valve 114 end faces with pinning in oval major axis upper end, the lower end can start.Valve film 113 is a thin slice, and the flexible again and anti-reagent corrosion of quality softness is like silicon rubber film.So, under the pressure of certain orientation; Liquid is washed valve film 113 open to valve opening 118 diffluences, flows out valve 114.If lose pressure; 113 reinstatements of valve film cover valve opening 118 automatically.If pressure direction is opposite; Valve film 113 is lived for 118 grades by the hole; Do not open, liquid is reached the purpose of liquid one-way flow by choked flow.When piston 8 does to draw in cylinder body 9 direction is moved, receive negative pressure in the pump, unidirectional valve 116 is opened, 114 choked flows, and reagent just sucks in liquid storage dish 18 through pipette 111, gets into cylinder bodies 9 through unidirectional valve 116, water nozzle 90.When piston 8 does to push away in cylinder body 9 direction is moved, receive malleation in the pump, unidirectional valve 114 is opened, 116 choked flows, and reagent extrudes in cylinder body 9, in proper order through water nozzle 90, unidirectional valve 114, sparge pipe 110 ejections.Piston 8 constantly draws in cylinder body and pushes away alternating movement, and reagent just constantly is inhaled into and sprays.Up to accomplishing stripping technology.

Claims

1. automatic stripper that is used for semiconductor medium film and metal film; It comprises direct current machine (1), dial (3), drive plate (4), piston (8), cylinder body (9), pump (11), liquid storage dish (18), liquid storing barrel (15), the unsteady platform (16) of sample, it is characterized in that:

Direct current machine (1) is screwed on the left surface of rectangle cube support (21) through frame (2); In the described direct current machine upper end rotating shaft metal dial (3) is housed; The edge-perpendicular on metal dial (3) plane upwards has been installed with metal driving lever (5); Ball line slideway (20) is installed on described rectangle cube support (21), from left to right is equipped with drive plate (4), vertical panel (6), piston (8), cylinder body (9) and pump (11) successively along the center line of guide rail direction, drive plate (4) left end is through linking together with metal dial (3) in the chute (401) that metal driving lever (5) is enclosed within drive plate; The right-hand member of drive plate (4) and vertical panel (6) and piston (8) connect firmly together; One end of cylinder body (9) is communicated with pump (11), lays liquid storage dish (18) in the below of pump (11), in liquid storage dish (18), lays liquid storing barrel (15); The unsteady platform (16) of the sample of placement is arranged in the liquid storing barrel (15), and pending sample (12) is floated above the platform (16) at sample by clamping; (111) one of the pipette of described pump (11) are immersed in the reagent in the liquid storage dish (18) vertically downward, a pending sample (12) of aiming on the unsteady platform (16) of described sample of the sparge pipe (110) of described pump (11);

Direct current machine (1) provides power; Change rotatablely moving of direct current machine (1) into piston (8) linear reciprocating motion in cylinder body (9) through the metal driving lever (5) on the metal dial (3), driving drive plate (4) and vertical panel (6); Being ejected into sample after pump sucks reagent in the liquid storage dish (18) under the driving of piston floats on the sample (12) of platform (16); Sample (12) is under the effect that reagent sprays repeatedly, and its surperficial film is peeled off automatically.

2. the automatic stripper that is used for semiconductor medium film and metal film according to claim 1 is characterized in that: described direct current machine (1) is regulated rotating speed through power supply (22), and speed adjustable range is 12-24 rev/min.

3. the automatic stripper that is used for semiconductor medium film and metal film according to claim 1; It is characterized in that: described drive plate (4) is made of copper; The one of which end is processed with the chute (401) that can be inserted in the driving lever (5) above the dial (3), is processed with two inner bolt holes (402) that can be connected with vertical panel (6) on the vertical side of its other end.

4. the automatic stripper that is used for semiconductor medium film and metal film according to claim 1; It is characterized in that: described cylinder body (9) is cylindrical tube shape; Wherein the pore of an end is enclosed within on the piston (8), and the pore of the other end is communicated with pump (11) through water nozzle (90).

5. the automatic stripper that is used for semiconductor medium film and metal film according to claim 1 is characterized in that: described cylinder body (9) and piston (8) are all processed with glass, or substitute with glass syringe.

6. the automatic stripper that is used for semiconductor medium film and metal film according to claim 1 is characterized in that: described pump (11) is " piece " of " fourth " font, is done by corrosion resistant polytetrafluoroethylene material and processes; Along its horizontal, vertical structure, inner is the hole that horizontal direction and vertical direction two intersect vertically, and there are two outlets in the horizontal direction hole, communicates with water nozzle (90), sparge pipe (110) respectively; The outlet in vertical direction hole communicates with pipette (111); In the hole, locate respectively to be equipped with a unidirectional valve (114,116), under the pressure of certain orientation, control feed liquor and fluid respectively near pipette (111) and sparge pipe (110).

7. the automatic stripper that is used for semiconductor medium film and metal film according to claim 1; It is characterized in that: described liquid storing barrel (15) is tubbiness shape; Make with the polytetrafluoroethylene material, on liquid storing barrel (15) wall, have an aperture (17) of controlling liquid level in the bucket apart from 1/4 barrel of eminence of bung.

8. the automatic stripper that is used for semiconductor medium film and metal film according to claim 1 is characterized in that: described liquid storage dish (18) is a glass disk.

9. the automatic stripper that is used for semiconductor medium film and metal film according to claim 1 is characterized in that: the described sample platform (16) that floats is truncated cone-shaped, makes with the corrosion-resistant material polytetrafluoroethylene; Its boring is convenient in liquid, float, and is equipped with left and right two clamping plates (13) on the table top; Be convenient to clamp sample 12 with screw (14) locking, described clamping plate (13) sheet that is square is processed with a groove (130) on its plane; Screw (14) passes groove; Can slippage in groove, two clamping plates just can relatively move, and clamps sample 12; Two clamping plates (13) is respectively being opened a breach that is beneficial to " V " font of clamping sample (12) on that limit of sample (12), clamping plate (13) and screw (14) are made by corrosion resistant polytetrafluoroethylene material.

10. the automatic stripper that is used for semiconductor medium film and metal film according to claim 6; It is characterized in that: described sparge pipe (110) is processed by glass tube; The angle of one 45 degree of bent intermediate; Hole for the horizontal direction of cylindrical and pump (11) joins, and the other end is the conical reagent jet that is.

11. the automatic stripper that is used for semiconductor medium film and metal film according to claim 6; It is characterized in that: described pipette (111) is processed with glass tube; Hole with the vertical direction of pump (11) joins, and the other end is immersed in the reagent in the liquid storage dish (18).

12. the automatic stripper that is used for semiconductor medium film and metal film according to claim 6 is characterized in that: described unidirectional valve (114,116) adopts diaphragm type one-way valve, and its valve body adopts the polytetrafluoroethylene material, and diaphragm adopts silastic material.