CN101608299A - High hard, the low friction Cr/CrCN gradient coating technology in abnormity reed surface - Google Patents
High hard, the low friction Cr/CrCN gradient coating technology in abnormity reed surface Download PDFInfo
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Abstract
The invention discloses a kind of in the technology of high speed loom with high hard, the low friction coefficient Cr/CrCN gradient cladding of special-shaped reed surface deposition.This technology comprises that plating pre-treatment, bias voltage backwash clean and adopts that arc ion intensified response magnetic control sputtering device is big at complex contour, tip edge arc angle, the steps such as special-shaped reed surface deposition Cr/CrCN wear-resistant gradient coating of thin thickness.The sedimentary Cr/CrCN gradient cladding of the present invention hardness can reach 2400HV, frictional coefficient can be low to moderate 0.11, therefore not only has high hard, low-friction coefficient, but also has the coating good uniformity, good toughness can realize the coordinating and unifying of special-shaped reed top coat body structure and function, thereby effectively improves the performance and the work-ing life of coating and special-shaped reed matrix integral unit.
Description
Technical field
The present invention relates to a kind of top coat modification technology, particularly a kind of high-speed air-jet looms belongs to mechanical engineering field with high hard, the low friction coefficient Cr/CrCN gradient coating technology in special-shaped reed surface.
Background technology
According to statistics, China in 2008 fiber consumption per capita rises to 15.5kg by the 7kg of calendar year 2001, the fabric clothing total import and export volume surpasses 1,960 hundred million dollars, and wherein export amount surpasses 1,700 hundred million dollars, as document [Zhang Yiming, Yang Bing, Wang Zhiqiang, Huang Jiahui. research and the discussion of special-shaped reed dent vapour deposition high-purity C r, textile equipment, 2008,35 (5): 418-420.].Though China is textile exports big country, be subject to the development and the production level of domestic textile manufacturing machine, throughput high-end, high-quality textiles is but very limited.At present, shuttleless weaving machine can satisfy the development trend of weaving process, also is the developing direction of the high-end loom in the world simultaneously.Shuttleless weaving machine comprises air-jet loom, rapier loom, water jet loom and gripper shuttle loom etc., and is wherein with fastest developing speed with air-jet loom and rapier loom especially.In recent years, along with continuing to bring out of various new fibers, novel material, novel process and new technology, demand to high-grade new loom is increasing, and the developmental level of China's shuttleless weaving machine does not have quick raising always, and the high-grade loom market of China nearly all concentrates in foreign trader's hand.Since the mid-80 in last century, about 2～30,000 of China's all kinds of shuttleless weaving machines of import every year on average, the present at home popularity rate of shuttleless weaving machine reaches 40% substantially, as document [Chen Yingen. the reason and the counter-measure of the wearing and tearing of special-shaped reed, cotton textile technology, 2006,34 (2): 88-90.].Obviously, the production domesticization of high-speed air-jet looms must become one of focus of concern, wherein as high-speed air-jet looms is requisitely weaved equipment accessory such as special-shaped reed, design, manufacturing and the use properties combined etc. also become China's textile machinery accessories production domesticization bottleneck problem.
Used in jet loom abnormity reed is to weave wefting insertion and one of crucial equipment that beats up, and its usage life-span is directly connected to weaves cost and weave quality.The high-speed air-jet looms speed of a motor vehicle generally about 600r/min, just means that also yarn is about 600 times the friction and the impact number of times of reed per minute.Reciprocating friction that every day is about 900,000 times and impact.Secondly, fell place weft yarn is along with upper and lower layer warp thread interweaves, and the degree of crook of weft yarn increases, the additional tension stress of warp thread distortion makes the reactive force maximum of parallel opposite side portion dent, has aggravated the wearing and tearing to dent, as document [Chen Yingen. the reason and the counter-measure of special-shaped reed wearing and tearing, cotton textile technology, 2006,34 (2): 88-90.] and document [Yan Qunshe, Zhang Liping, Li Suiwang, Li Shuanzheng. prolong air-jet loom abnormity reed and know from experience cotton textile technology work-ing life, 2007,35 (10): 605-607.].Moreover yarn is necessary first starching before weaving, and in order to Dan Qiang and the minimizing filoplume that increases yarn, improves the friction tolerance of yarn and metallic magnetism, and phenomenons such as minimizing broken end take place.But usually need add water glass, sodium hydroxide etc. in the slurry as alkaline decomposition agent.Therefore, not only the silicon metal particle of high rigidity is easy to stick to the yarn surface, and aggravation is to the wearing and tearing of reed, and the slurry of alkalescence also can directly produce corrosion damage to reed, as document [Chen Yingen. the reason and the counter-measure of the wearing and tearing of special-shaped reed, cotton textile technology, 2006,34 (2): 88-90.].In sum, the reed actual condition is multiple damage mode complex interaction effects such as frictional wear, repeated stock fatigue, stress corrosion.
How to improve the usage life-span of special-shaped reed, will be to improving loom efficiency and weave quality, saving is weaved cost and is played conclusive effect.The reed usage life-span of present domestic independent research is well below external like product.Major cause has two: the selection of first reed and top coat technology.And special-shaped reed external as that companies such as Belgian Bi Jiale, Italian Si Mite, Japanese Tianjin field coltfoal and strain formula society of Toyota select the high rigidity austenitic chromium nickel stainless steel for use and make through the martensite chromium stainless steel of quenching, temper, has good mechanical property, the dimensional precision consistence, wear-resisting characteristic such as level and smooth; If the surface is again through quasi-diamond (DLC), glass fibre wear-resistant coating intensive treatment such as (SiC), special-shaped reed surface hardness can be up to more than the 2500HV, and skin friction coefficient can be reduced to below 0.1, shows superior wear-resisting erosion resistance performance.Though the accurate special-shaped reed slice fundamental property index of making of domestic part reed factory's employing import special stainless steel band is near world level, reed surface wearable coating technology is a traditional electrical hard chrome plating technology.Because of the metal chromium ions of the contained strong oxidizing property of electrodeposited chromium, environmental pollution is serious, and exports restricted; It two is electrodeposited chromium layers hardness not high (being about 900-1000HV), and wear resisting property is also unsatisfactory, and its frictional coefficient is about 0.4-0.5, differs greatly with external wear-resistant coating preparation technology and performance.Domestic all the other 30 tame reed factories face this technical bottleneck problem equally.Add the reed industry and produced dispersion, how and not strong originally, scientific research insufficient investment 1%, the product technology research and development lag behind, and the product with independent intellectual property right is few.At present, domestic employing gas phase deposition technology also is in the starting stage in the research of special-shaped reed surface deposition wear-resistant coating, the Zhang Yiming of Wuhan University Of Science and Engineering has tentatively inquired into and has utilized gas phase deposition technology at the pure Cr abrasion-resistant metal of reed surface deposition layer, though coating hardness can be increased to 2000HV, but the coating frictional coefficient is bigger, as document [Zhang Yiming, Yang Bing, Wang Zhiqiang, Huang Jiahui. research and the discussion of special-shaped reed dent vapour deposition high-purity C r, textile equipment, 2008,35 (5): 418-420.], coating performance is compared with external reed top coat with the usage life-span and is also had big gap.
Big because of special-shaped reed complex contour and dent transition arc angle again, big in the difficulty of the even hard coat of its surface deposition, and improve the stainless steel reed body and the coating bonding properties also is a difficult point problem; In addition, because of the thin thickness of reed body own less than 2mm, the stress in deposition parameter such as depositing temperature, bias voltage and the hard coat all may cause the reed body deformability or change the tough elasticity of reed body self.Special-shaped in addition reed actual condition complexity, damage mode comprises wearing and tearing, impact fatigue, corrosion and stress corrosion etc., and because of the force-bearing situation difference, the damage location and the failure mode that reflect differ widely again, and therefore high hard, the wear-resistant coating in its surperficial obtained performance excellence is thorny difficult point problem.Therefore, not enough even blank at the research of the special-shaped reed surface wearable coating of top described homemade top grade, and at high hard, the high-ductility of special-shaped reed surface obtained performance excellence, the gradient wear-resistant coating of low-friction coefficient, this task of the present invention just place.
Summary of the invention
Purpose of the present invention is just at existing problem in the described prior art, provides a kind of high-speed air-jet looms with high hard, the low friction coefficient Cr/CrCN gradient cladding novel process in special-shaped reed surface.Physical gas phase deposition technologies such as this process using magnetron sputtering technique and multi-arc ion coating are realized the wear-resistant gradient coating to high hard, the high-ductility of complex contour, tip edge arc angle special-shaped reed surface uniform deposition big, thin thickness, low-friction coefficient.
Basic thought of the present invention is: at existing technical problem and difficult point, the solution that proposes is as follows: adopt physical gas phase deposition technologies such as magnetron sputtering technique and multi-arc ion coating, the one, the brilliant Cr layer of depositing nano in advance on special-shaped reed surface, its purpose also is expected to discharge the part stress in the hard coat simultaneously in order to improve the bonding properties of stainless steel base and the totally different storeroom of hard coat composition.The 2nd, CrCN gradient hard wear-resistant coating mentality of designing is proposed, promptly by changing Cr target, the sputtering power of C target, substrate bias and regulation and control N
2Dividing potential drop, realize the CrCN coating structure by the lining outwardly the concentration gradients of Cr, C and N change.As change the sputtering power of Cr target and regulate and control N
2Dividing potential drop realizes that the CrCN coating structure is by the lining content of Cr and the N variation of successively decreasing gradually outwardly; Realize in the gradient CrCN coating structure by lining C content incremental variations progressively outwardly by changing C target sputtering power.Its purpose has two: realize on the one hand the transition that is connected of gradient CrCN coating and Cr layer, further reduce coating stress, the toughness of enhancing gradient cladding; Obtain the adulterated diamond-like of a little Cr, N as much as possible at gradient CrCN coating outside surface on the other hand, in the hope of obtaining lower frictional coefficient and superior wear resisting property.Further, reach the coordinating and unifying of special-shaped reed top coat body structure and function, improve the performance and the usage life-span of coating and special-shaped reed matrix integral unit by to the design of Cr/CrCN gradient cladding.
For realizing purpose of the present invention, the present invention realizes by the following technical solutions.
High hard, the low friction coefficient Cr/CrCN gradient coating technology in the present invention's abnormity reed surface, adopt physical gas phase deposition technologies such as magnetron sputtering technique and multi-arc ion coating that gradient cladding is carried out on complex contour, tip edge arc angle special-shaped reed surface big, thin thickness and handle, comprise following processing step:
(1) plating pre-treatment
Special-shaped reed is put behind grinding and polishing to degreaser, cleaned 30-40 minute, remove the reed surface and oil contaminant after rinsed with deionized water 20 minutes with ultrasonic stirring, pickling bright dipping subsequently, with deionized water that the acid solution rinsing is clean again, take out back drying in vacuum drier, vacuum tightness＜10
-2Pa, 100 ℃ of temperature;
(2) the bias voltage backwash cleans
Reed after the above-mentioned processing is placed in the vacuum furnace chamber of arc ion intensified response magnetic control sputtering device, cleaned 10 minutes with the bias voltage backwash, its backwash bias voltage operating voltage is-500V, and work atmosphere is Ar, and the working vacuum degree is 0.3Pa;
(3) the brilliant Cr transition layer of deposition hard nanometer
Adopt arc ion intensified response magnetic control sputtering device, with the reed surface after the above-mentioned processing in advance deposit thickness be the nanocrystalline Cr transition layer of 2-2.5 μ m; Used target is 2 magnetic control Cr targets, 1 post arc Cr target, reaction chamber substrate vacuum tightness 5 * 10
-3Pa, work atmosphere Ar, working vacuum degree 0.3-0.4Pa; Deposition bias voltage-50 is to-200V, Cr target sputtering power 2.5-3.5KW; Cr post target arc current 60-70A, 200 ℃ of depositing temperatures, depositing time 10 minutes;
(4) deposition CrCN gradient hard wear-resistant coating
Adopt arc ion intensified response magnetic control sputtering device, deposit the CrCN coating again on the brilliant Cr transition layer of above-mentioned depositing nano reed surface, used target is 2 magnetic control Cr targets, 2 magnetic control C targets, 1 post arc Cr target, under uninterrupted vacuum plating state, turn down gradually to 1KW and Cr post target arc current by 3.6kW by Cr target sputtering power and to turn down gradually to 10A by 50A, with regulation and control Cr in the CrCN coating content by the lining variation of progressively successively decreasing outwardly; Also increase to 5KW gradually by 0KW by C target sputtering power, with realize C in the CrCN coating content by lining incremental variations progressively outwardly; Reactant gases N in its vacuum chamber
2Flow increases to 60sccm after opening earlier gradually, is reduced to 0sccm at last more gradually, and reaction chamber substrate vacuum is 5 * 10
-3Pa, work atmosphere are Ar and N
2, deposition pressure is 0.35-0.45Pa, 200 ℃ of depositing temperatures, depositing time 2 hours; Deposition is biased in-and adjustable between the 50--200V, promptly finish Cr/CrCN wear-resistant gradient coating this moment at high hard, the high-ductility of reed matrix surface deposition, low-friction coefficient;
(5) destressing, rectification deformation process
Described reed substrate surface is after Cr/CrCN gradient cladding deposition is finished, and under uninterrupted vacuum condition, temperature is 200-300 ℃ of insulation 30 minutes, gets final product with taking out behind the stove naturally cooling.
In the technique scheme, the composition of described degreaser is the mixing degreaser of yellow soda ash 200-250g/L, Trisodium Citrate 40-50g/L, promoting agent 2-4g/L, sodium phosphate 50-60g/L.
In the technique scheme, described deposition Cr transition layer used target Cr target and post arc Cr target, its purity is 99.99%.
In the technique scheme, the used target Cr of described deposition CrCN gradient cladding target, C target and post arc Cr target, its purity is 99.99%.
In the technique scheme, deposition pressure maintains 0.35Pa in the described deposition CrCN gradient cladding coating process.
In the technique scheme, depositing temperature maintains 200 ℃ in the described deposition CrCN gradient cladding coating process.
In the technique scheme, the deposition bias voltage further is chosen to be-100V its coating result the best in the described deposition CrCN gradient cladding coating process.
In the technique scheme, the initial sputtering power of described Cr target is 3.6KW, and per ten minutes reduce 0.5KW, up to being reduced to 1KW.
In the technique scheme, the initial sputtering power of described C target is 0KW, and previous hour per ten minutes rising 0.5KW were adjusted to the sputter of 5KW firm power in back one hour.
In the technique scheme, described N
2Flow increases to 60sccm by 0sccm at plated film in preceding 1 hour, is reduced to 0sccm subsequently in 10 minutes.
The present invention compares with existing electrodeposited chromium technology has following advantage and useful technique effect:
1, the magnetron sputtering of the present invention's employing and multi-arc ion coating deposition technique are at special-shaped reed surface deposition Cr/CrCN gradient cladding, not only excellent than the performance of traditional electrical hard chrome plating coating, but also overcome the severe contamination that traditional electrical hard chrome plating technology causes environment because of the metal chromium ions of contained strong oxidizing property.
2, the Cr/CrCN gradient cladding hardness height of coating process of the present invention institute coating reach 2400HV, and frictional coefficient is less, is 0.11.
3, coating process of the present invention is by changing the Cr target, the sputtering power of C target, substrate bias and regulation and control N
2Dividing potential drop realizes the variation that Cr and N content successively decrease from inside to outside gradually at the CrCN coating structure; And realize the variation that C content is progressively increased progressively by the lining at the CrCN coating structure outwardly by changing C target sputtering power; Can realize the transition that is connected of gradient CrCN coating and Cr layer so on the one hand, further reduce coating stress, the toughness of enhancing gradient cladding; Can obtain the adulterated diamond-like of a little Cr, N as much as possible at gradient CrCN coating outside surface on the other hand, in the hope of obtaining higher hardness, lower frictional coefficient, good toughness and superior wear resisting property.
4, coating process of the present invention is by to Cr/CrCN gradient cladding design, reaching the coordinating and unifying of special-shaped reed top coat body structure and function, thereby improves the performance and the usage life-span of coating and special-shaped reed matrix integral unit.
Embodiment
The present invention is described in further detail with specific embodiment below, but and do not mean that any qualification of the present invention being protected content.
Embodiment 1
The present invention adopts the JW-500 type arc ion intensified response magnetic control sputtering device of independent development;
The used target of described deposition Cr layer is 2 magnetic control Cr targets, 1 post arc Cr target, and its purity is 99.99%;
The used target of described deposition CrCN gradient cladding is 2 magnetic control Cr targets, 2 magnetic control C targets, and 1 post arc Cr target, its purity is 99.99%;
Deposition pressure maintains 0.35Pa in the described deposition CrCN gradient cladding coating process.
Depositing temperature maintains 200 ℃ in the described deposition CrCN gradient cladding coating process.
The deposition bias voltage further is selected in-100V its coating result the best in the described deposition CrCN gradient cladding coating process.
The initial sputtering power of described Cr target is 3.6KW, and per ten minutes reduce 0.5KW, up to being reduced to 1KW.
The initial sputtering power of described C target is 0KW, and previous hour per ten minutes rising 0.5KW were adjusted to the sputter of 5KW firm power in back one hour.
Reactant gases N in vacuum chamber
2Flow is opened earlier the back and is increased to 60sccm by 0sccm at plated film in preceding 1 hour, is reduced to 0sccm subsequently in 10 minutes.
Under these conditions, to special-shaped reed matrix surface deposition Cr/CrCN gradient cladding, its operation steps is as follows:
(1) at first special-shaped reed matrix surface is plated pre-treatment
Special-shaped reed matrix is put behind grinding and polishing to the degreaser that is mixed with by yellow soda ash 200g/L, Trisodium Citrate 40g/L, promoting agent 2g/L, sodium phosphate 50g/L, cleaned 30 minutes with ultrasonic stirring, degrease after rinsed with deionized water 20 minutes, pickling bright dipping subsequently, with deionized water that the acid solution rinsing is clean again, take out and be placed on vacuum tightness＜10
-2Dry in the vacuum drier of Pa, its drying temperature is 100 ℃;
(2) the bias voltage backwash cleans
To place through the reed matrix after the above-mentioned processing in the vacuum furnace chamber of arc ion intensified response magnetic control sputtering device, and clean 10 minutes with the bias voltage backwash, its backwash bias voltage operating voltage is-500V, and work atmosphere is Ar, and deposition pressure is 0.3Pa;
(3) the brilliant Cr transition layer of deposition hard nanometer
Adopt arc ion intensified response magnetic control sputtering device, the reed matrix surface after above-mentioned processing in advance deposit thickness be the nanocrystalline Cr transition layer of 2 μ m; The deposited coatings processing parameter is: reaction chamber substrate vacuum tightness 5 * 10
-3Pa, work atmosphere are Ar, and deposition pressure is 0.3Pa; Deposition bias voltage-50V, the sputtering power 2.5KW of Cr target; Cr post target arc current 60A, 200 ℃ of depositing temperatures, depositing time 10 minutes; The used target of deposition Cr transition layer is 2 magnetic control Cr targets, 1 post arc Cr target, and its purity is 99.99%;
(4) deposition CrCN gradient hard wear-resistant coating
The same arc ion intensified response magnetic control sputtering device that adopts, deposit the CrCN coating again on the brilliant Cr transition layer of above-mentioned depositing nano reed surface, used target is 2 magnetic control Cr targets, 2 magnetic control C targets, 1 post arc Cr target, under uninterrupted vacuum plating state, turn down gradually to 1KW and Cr post target arc current by 3.6kW by Cr target sputtering power and to turn down gradually to 10A by 50A, with regulation and control Cr in the CrCN coating content by the lining variation of progressively successively decreasing outwardly; Also increase to 5KW gradually by 0KW by C target sputtering power, with realize C in the CrCN coating content by lining incremental variations progressively outwardly; Reactant gases N in its vacuum chamber
2Flow increases to 60sccm after opening earlier gradually, is reduced to 0sccm at last more gradually, and reaction chamber substrate vacuum is 5 * 10
-3Pa, work atmosphere are Ar and N
2, deposition pressure is 0.35Pa, 200 ℃ of depositing temperatures, depositing time 2 hours; Deposition bias voltage-100V promptly finishes the Cr/CrCN wear-resistant gradient coating at high hard, the high-ductility of reed matrix surface deposition, low-friction coefficient this moment;
(5) destressing, rectification deformation process
Described reed sheet matrix surface is after Cr/CrCN gradient cladding deposition is finished, and under uninterrupted vacuum condition, temperature is 200 ℃ of insulations 30 minutes, gets final product with taking out behind the stove naturally cooling, can discharge the part stress in the hard coat like this.
Cr/CrCN gradient cladding effect to the special-shaped reed matrix surface of the foregoing description 1 detects, and adopts MH-5 type microhardness tester to measure its Cr/CrCN gradient cladding hardness.Used loaded load is elected 50mN as, 5 seconds hold time, the positive rectangular pyramid diamond penetrator of Vicker, test 6 points, each point reads numerical value 6 times, averages and calculates its hardness value, its as a result Cr/CrCN gradient cladding hardness be 2400HV, as seen the hardness than prior art coating improves more; Have good toughness and excellent abrasive energy simultaneously.
And adopt THT07-135 type ball dish frictional testing machines to test its Cr/CrCN gradient cladding frictional behaviour.Experiment condition is: unlubricated, and humidity 45～50%, room temperature condition is test down; The steel ball friction pair is GCr15, diameter Ф 3mm, roughness Ra≤0.05 μ m, hardness HRC61, load 5N, orbit radius 5mm, friction linear velocity 20cm/s.Test result is that Cr/CrCN gradient cladding frictional coefficient is 0.11, and same frictional coefficient than prior art reduces more, performance and the usage life-span that can improve coating and special-shaped reed matrix integral unit.
Embodiment 2
Because in deposition CrCN gradient cladding process, sputtering bias-voltage is all bigger to coated component, uniformity coefficient and structure influence.This example abnormity reed Cr/CrCN gradient cladding plating pre-treatment is identical with embodiment 1 step (1), and just changing the degreaser composition is yellow soda ash 250g/L, Trisodium Citrate 50g/L, promoting agent 4g/L, sodium phosphate 60g/L, cleans 40 minutes with ultrasonic stirring; The bias voltage backwash cleans identical with embodiment 1 step (2), when other condition of not mentioning and parameter and embodiment 1 are identical, when sedimentation gradient CrCN layer, change the deposition bias voltage, as be chosen to be-50V ,-150V and-200V then can be to the regulation and control of CrCN gradient cladding composition, tissue and microstructure, and then realize that the performances such as hardness, toughness, frictional wear to the Cr/CrCN gradient cladding regulate and control in certain limit, to satisfy the user demand of variant production purposes.
Claims (10)
1. high hard, low friction coefficient Cr/CrCN gradient coating technology in special-shaped reed surface is characterized in that comprising following processing step:
(1) plating pre-treatment
Special-shaped reed is put behind grinding and polishing to degreaser, cleaned 30-40 minute, remove the reed surface and oil contaminant after rinsed with deionized water 20 minutes with ultrasonic stirring, pickling bright dipping subsequently, with deionized water that the acid solution rinsing is clean again, take out back drying in vacuum drier, vacuum tightness＜10
-2Pa, 100 ℃ of temperature;
(2) the bias voltage backwash cleans
Reed after the above-mentioned processing is placed in the vacuum furnace chamber of arc ion intensified response magnetic control sputtering device, cleaned 10 minutes with the bias voltage backwash, its backwash bias voltage operating voltage is-500V, and work atmosphere is Ar, and the working vacuum degree is 0.3Pa;
(3) the brilliant Cr transition layer of deposition hard nanometer
Adopt arc ion intensified response magnetic control sputtering device, with the reed surface after the above-mentioned processing in advance deposit thickness be the nanocrystalline Cr transition layer of 2-2.5 μ m; Used target is 2 magnetic control Cr targets, 1 post arc Cr target, reaction chamber substrate vacuum tightness 5 * 10
-3Pa, work atmosphere Ar, working vacuum degree 0.3-0.4Pa; Deposition bias voltage-50 is to-200V, Cr target sputtering power 2.5-3.5KW; Cr post target arc current 60-70A, 200 ℃ of depositing temperatures, depositing time 10 minutes;
(4) deposition CrCN gradient hard wear-resistant coating
Adopt arc ion intensified response magnetic control sputtering device, deposit the CrCN coating again on the brilliant Cr transition layer of above-mentioned depositing nano reed surface, used target is 2 magnetic control Cr targets, 2 magnetic control C targets, 1 post arc Cr target, under uninterrupted vacuum plating state, turn down gradually to 1KW and Cr post target arc current by 3.6kW by Cr target sputtering power and to turn down gradually to 10A by 50A, with regulation and control Cr in the CrCN coating content by the lining variation of progressively successively decreasing outwardly; Also increase to 5KW gradually by 0KW by C target sputtering power, with realize C in the CrCN coating content by lining incremental variations progressively outwardly; Reactant gases N in its vacuum chamber
2Flow increases to 60sccm after opening earlier gradually, is reduced to 0sccm at last more gradually, and reaction chamber substrate vacuum is 5 * 10
-3Pa, work atmosphere are Ar and N
2, deposition pressure is 0.35-0.45Pa, 200 ℃ of depositing temperatures, depositing time 2 hours; Deposition is biased in-and adjustable between the 50--200V, promptly finish Cr/CrCN wear-resistant gradient coating this moment at high hard, the high-ductility of reed matrix surface deposition, low-friction coefficient;
(5) destressing, rectification deformation process
Described reed substrate surface is after Cr/CrCN gradient cladding deposition is finished, and under uninterrupted vacuum condition, temperature is 200-300 ℃ of insulation 30 minutes, gets final product with taking out behind the stove naturally cooling.
2. gradient coating technology according to claim 1, the composition that it is characterized in that described degreaser are the mixing degreaser of yellow soda ash 200-250g/L, Trisodium Citrate 40-50g/L, promoting agent 2-4g/L, sodium phosphate 50-60g/L.
3. gradient coating technology according to claim 1 is characterized in that described deposition Cr transition layer used target Cr target and post arc Cr target, and its purity is 99.99%.
4. gradient coating technology according to claim 1 is characterized in that the used target Cr of described deposition CrCN gradient cladding target, C target and post arc Cr target, and its purity is 99.99%.
5. according to claim 1 or 2 or 4 described gradient coating technologies, it is characterized in that deposition pressure maintains 0.35Pa in the described deposition CrCN gradient cladding coating process.
6. according to claim 1 or 2 or 4 described gradient coating technologies, it is characterized in that depositing temperature maintains 200 ℃ in the described deposition CrCN gradient cladding coating process.
7. according to claim 1 or 2 or 4 described gradient coating technologies, it is characterized in that the deposition bias voltage further is chosen to be-100V in the described deposition CrCN gradient cladding coating process.
8. according to claim 1 or 2 or 3 described gradient coating technologies, the initial sputtering power that it is characterized in that described Cr target is 3.6KW, and per ten minutes reduce 0.5KW then, up to being reduced to 1KW.
9. gradient coating technology according to claim 1, when the initial sputtering power that it is characterized in that described C target was 0KW, previous hour per ten minutes rising 0.5KW were adjusted to the sputter of 5KW firm power in back one hour.
10. gradient coating technology according to claim 1 is characterized in that described N
2Flow increases to 60sccm by 0sccm at plated film in preceding 1 hour, is reduced to 0sccm subsequently in 10 minutes.
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| JP2002115045A (en) * | 2000-10-11 | 2002-04-19 | Token Thermotec:Kk | Film deposition method, and vane for movable vane compressor |
| CN100387754C (en) * | 2005-10-12 | 2008-05-14 | 中国地质大学（北京） | Diamond film containing chronium and its preparing method |
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