CN101600517A - Regenerating unit and renovation process - Google Patents

Regenerating unit and renovation process Download PDF

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Publication number
CN101600517A
CN101600517A CNA2007800483113A CN200780048311A CN101600517A CN 101600517 A CN101600517 A CN 101600517A CN A2007800483113 A CNA2007800483113 A CN A2007800483113A CN 200780048311 A CN200780048311 A CN 200780048311A CN 101600517 A CN101600517 A CN 101600517A
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China
Prior art keywords
cleaning fluid
unit
regeneration
regenerating
treating apparatus
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Chinese (zh)
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高本德男
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Hirata Corp
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Hirata Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/42—Regulation; Control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Water Treatment By Sorption (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)

Abstract

The invention provides a kind of regenerating unit and renovation process.Wait in the processing in cleaning, when using cleaning fluid, can used cleaning fluid be regenerated, reuse as the regeneration cleaning fluid.A kind of liquid regenerating unit is provided, and it possesses: the recovery unit that the used cleaning fluid of the treating apparatus that uses cleaning fluid is reclaimed; The regeneration unit that the used cleaning fluid that reclaims is regenerated; Supply with the feed unit of described regeneration cleaning fluid to described treating apparatus; And the control module of controlling described recovery unit, described regeneration unit and described feed unit.For described treating apparatus and described regeneration unit can be turned round simultaneously, can also possess the linkage unit of between them, supplying with used cleaning fluid and described regeneration cleaning fluid.

Description

Regenerating unit and renovation process
The cross reference of correlation technique
The application is based on the PCT application number PCT/JP2006/326079 that before submitted on December 27th, 2006, and enjoys the benefit of its priority, and its full content is accommodated among the application, for reference.
Technical field
The present invention relates to the cleaning fluid of use in liquid crystal or semiconductor etc. and the liquid regenerating unit and the renovation process of other liquid.
Background technology
At present, cleaning fluid etc. in case be used later go out of use with regard to former state ground, perhaps it can be stored in and carry out other regeneration processing in discarded jar, wait as identical cleaning fluid and use, and perhaps are used for other purposes.For example, in the method for using gap nozzle to apply, in working procedure of coating, do not need the part or the device that apply, still use a large amount of cleaning fluids so far, the cleaning fluid that uses is stored in the predetermined hold-up tank, and implements other processing in order to clean.The result of this processing can be used as the regeneration cleaning fluid and is used for following occasion.
Promptly, need a large amount of cleaning fluid of the priming paint application roll of clean surface (priming roller) use all the time to clean, when only cleaning by untapped cleaning fluid, need to use a large amount of cleaning fluids and discarded a large amount of used cleaning fluid, so be contrary with the saving resource.Therefore, for example in patent documentation 1, the cleaning fluid that is used to clean the priming paint application roll (the above-mentioned cleaning fluid that has carried out after other regeneration is handled) is used for preparation to be cleaned, clean cleaning fluid (original cleaning fluid) is used for fine purifiation, seeks to cut down as much as possible the cleaning fluid of use thus.
But, even to the cleaning fluid that preparation is cleaned and the fine purifiation use is different separately, but still to discard certain cleaning fluid, the result needs a large amount of cleaning fluids.Traditionally, be discarded used cleaning fluid always, but, be equipped with large-scale regenerating unit (patent documentation 2), perhaps also entrust the recycling dealer to carry out regeneration recently in our company for the consideration of environment or in order to cut down the cost of cleaning fluid.When utilizing again, still need the bigger cleaning fluid of storage capacity storing used cleaning fluid even suppose by other device for refining.In addition, put into several liters used cleaning fluid, the cleaning fluid recycling mechanism of the monomer of the cleaning fluid that then after a few hours, can obtain regenerating if also sell.But, because this cleaning fluid recycling mechanism is the mechanism of degree that can a spot of cleaning fluid of batch process, so, be not suitable for the factory of a large amount of cleaning fluids of continuous use etc. though perhaps can be used for coating scene etc.
Patent documentation 1: the spy opens the 2005-329340 communique
Patent documentation 2: the spy opens flat 9-49093 communique
Summary of the invention
When in our company, being equipped with large-scale cleaning fluid regenerating unit, perhaps when regenerating, the cleaning fluid of discharging from all process steps being reclaimed, and regenerate by the recycling dealer.Therefore, except cleaning fluid, also sneaked into the treatment fluid of several classes,, needed to use the structure of the complexity that possesses evaporation part and rectifying portion in order as patent documentation 2, to separate low boiling pollutant component and higher boiling pollutant component.Do not possess in the factory of large-scale cleaning fluid regenerating unit in our company, must store used cleaning fluid, and give the recycling dealer termly, need guarantee the space that is used to store like this, and because of the time that till regeneration, needs to a certain degree, so must prepare the cleaning fluid of a great deal of.
The present invention proposes in view of such situation, its purpose is to provide processings of regenerating of a kind of used cleaning fluid that can automatically discharge treating apparatus immediately, and automatically supplies with the apparatus and method of the cleaning fluid after regenerating once more to treating apparatus.
In order to solve above-mentioned problem, a kind of liquid regenerating unit is provided, it comprises: the recovery unit that reclaims used liquid (comprising cleaning fluid); To this used liquid regenerate make its become regeneration liquid the liquid regenerating unit.As concrete application examples, a kind of liquid regenerating unit is provided, in possessing the treating apparatus of cleaning function, comprise: to the result after being used to clean, comprise the recovery unit that the used cleaning fluid (hereinafter referred to as " use cleaning fluid ") of the compound of other kinds reclaims; To using cleaning fluid to regenerate, generate the regeneration unit of the cleaning fluid (hereinafter referred to as " regeneration cleaning fluid ") after regenerating; And feed unit from this regeneration cleaning fluid to described treating apparatus that supply with.Usually, the cleaning fluid of discharging from a treating apparatus does not comprise too many different composition.Therefore, do not need complicated function, can be used as special-purpose liquid regenerator and be connected use with each treating apparatus.
This liquid regenerating unit possesses: the recovery unit that reclaims described use cleaning fluid; The use cleaning fluid that described recovery unit is reclaimed carries out the regeneration unit that separated generates the regeneration cleaning fluid; And, supply with the feed unit of this regeneration cleaning fluid once more to treating apparatus in order to clean etc.
In addition, can also be the renovation process that comprises following operation as an embodiment, these operations are: reclaim the operation of using cleaning fluid; Generate the operation of regeneration cleaning fluid to using cleaning fluid to regenerate; And the operation of supplying with this regeneration cleaning fluid once more to treating apparatus.
More particularly, can provide following technology.
(1) can provide a kind of liquid regenerating unit, used cleaning fluid (hereinafter referred to as " use cleaning fluid ") after it cleans processed parts from the treating apparatus recovery, and it is regenerated, supply with the regeneration cleaning fluid to treating apparatus once more, first and second mechanism that comprises recovery, regeneration and the regeneration cleaning solution supplying of carrying out described use cleaning fluid, each mechanism comprises: reclaim the unit, conjointly be provided with described treating apparatus, described use cleaning fluid is reclaimed; Regeneration unit conjointly is provided with described recovery unit, receives by the described use cleaning fluid of this recovery unit recovery and to it to regenerate; Storage unit conjointly is provided with described regeneration unit, stores by the cleaning fluid (hereinafter referred to as " regeneration cleaning fluid ") after this regeneration unit regeneration; Feed unit, conjointly be provided with described storage unit and described treating apparatus, supply with described regeneration cleaning fluid to described treating apparatus, when reclaiming described use cleaning fluid in described first mechanism, the use cleaning fluid that can reclaim in advance by the regeneration of described second mechanism.
At this, cleaning fluid is so long as can separation also can utilize the cleaning fluid of (recirculation) to get final product again from use cleaning fluid by regeneration unit as the regeneration cleaning fluid.For example can comprise the decentralized medium of so-called solvent or dispersing solid etc.In addition, can also comprise the polluter (or composition) of sneaking into as the result who cleans.Use the treating apparatus of cleaning fluid can comprise cleaning unit, this cleaning unit can comprise the injection apparatus that cleaning fluid can be ejected on the priming paint application roll.This injection apparatus can comprise the nozzle that is used to spray.In addition, described recovery unit and described regeneration unit can comprise recoverer and the reproducing unit of using in the following description.In addition, this recoverer can comprise pipeline and valve, and described reproducing unit can comprise container (for example, hold-up tank etc.), can also comprise pipeline etc.In addition, can comprise pump as compression or decompressing unit.Described feed unit can comprise supply unit, and this supply unit can comprise the hold-up tank that can store the regeneration cleaning fluid.And, can also comprise and be used for pump and the pipeline that pressure is carried this regeneration cleaning fluid.In addition, described control module can comprise control device, and this control device for example can comprise all existing processors such as microcomputer, personal computer, suitable control device.Can represent about the capacity adjustment: in described recovery unit, in each unit of described regeneration unit and described feed unit, considering respectively can be to becoming the capacity that the cleaning fluid (can comprise and use cleaning fluid and regeneration cleaning fluid) of handling object is stored, the processing speed of this cleaning fluid (the processing capacity of unit interval), and the feed speed that can supply with (quantity delivered of unit interval), adjust described recovery unit, described regeneration unit, and the treatment effeciency of described feed unit, running rates etc. are so that described recovery unit, described regeneration unit, and described feed unit becomes one and carries out ideal cleaning fluid and handle.
Described second mechanism, its structure can be identical with described first mechanism, perhaps basic structure can also be made common, but differences such as the storage capacity of cleaning fluid or processing speed.Even if only by certain mechanism in described first and second mechanism, the use cleaning fluid after also can cleaning processed parts from the treating apparatus recovery is regenerated to it, and is supplied with the regeneration cleaning fluid to treating apparatus once more.In addition, described first and second mechanism can work independently of one another.
In addition, described regeneration unit can comprise the distillation unit of the so-called distillation process that can use cleaning fluid.This distillation unit can the corresponding used liquid that reclaims characteristic, comprise the temperature adjustment of maximum temperature.In addition, this distillation unit can comprise heater and temperature-adjusting device.
Described storage unit can comprise reservoir, and this reservoir can comprise the such container of hold-up tank.In addition, described feed unit can comprise supply unit, and supply unit can be carried AIR (air) or N from air blast or gas bomb equal pressure 2The such gas of gas is supplied with.
(2) can provide a kind of is liquid regenerating unit feature, record in above-mentioned (1) also to possess the control module that described recovery unit, described regeneration unit, described storage unit and described feed unit are controlled in described first and second mechanism.
As above-mentioned, described control module can comprise control part, and this control part can comprise control device.This control device can be controlled exhaust portion described later, test section, waste part and cooling water supply unit.Control part can comprise the method by electromagnetism, the method for oil pressure and the unit that other methods that can't discern by people's consciousness connect treating apparatus and described liquid regenerating unit.Control part can be distinguished and controls described first and second mechanism independently.This control part can be controlled according to the signal of test section described later, so that automatically reclaim → regenerate → and each operation of supplying with.Therefore, can automatically carry out from reclaiming to regeneration, from the switching of regeneration to supply.
(3) can provide a kind of with in described first and second mechanism, described regeneration unit possesses the regenerating tank that the described use cleaning fluid that reclaims is stored and is arranged in this regenerating tank can be liquid regenerating unit feature, that put down in writing in above-mentioned (2) to the described heater that uses cleaning fluid to heat.
Described regenerating tank possesses described heater in himself, can directly or indirectly heat the use cleaning fluid of storing.Described heater can carry out the connection/shutoff and the output adjustment of switch by described control module, in addition, can also possess self-braking function when abnormal signal.
(4) can provide a kind of with in described first and second mechanism, also possess the exhaust unit that is connected with described regenerating tank top, be used for carrying out exhaust decompression and be feature, at the liquid regenerating unit of above-mentioned (3) record.
Exhaust unit can comprise exhaust portion.Exhaust portion can comprise such decompressing unit such as vavuum pump.In order to reduce pressure, described regenerating tank preferably has hermetically-sealed construction.
(5) can provide a kind of with in described first and second mechanism, it is liquid regenerating unit feature, record in a certain of above-mentioned (2) to (4) that described regeneration unit and/or described feed unit possess the detecting unit that can detect the storage liquid measure.
Detecting unit can comprise test section.This test section can comprise the sensor (for example temperature sensor, liquid surface height sensor) that the state to liquid regenerating unit and treating apparatus detects.Test section can provide control part to control needed information.
(6) can provide a kind of can be with described control module according to described first and the detected described use cleaning fluid of described detecting unit of described second mechanism and/or the amount of described regeneration cleaning fluid, controlling described recovery unit, described regeneration unit and described feed unit is liquid regenerating unit feature, record in above-mentioned (5).
Described detecting unit can detect the amount of cleaning fluid and this amount rate of change over time and in time.Thus, the amount of the cleaning fluid that can store can be further grasped, in addition, the increase and decrease of storage capacity can be predicted.
(7) can provide a kind of with described first and described second mechanism in, also possess is connected with described regenerating tank bottom, extract and the discarded described regeneration of using cleaning fluid after the discarded unit of residue be liquid regenerating unit feature, that in above-mentioned (3) or (4), put down in writing.
When described use cleaning fluid is regenerated, under the situation of the regeneration cleaning fluid of from use cleaning fluid, isolating scheduled volume, be extracted in residual regeneration residue in the regenerating tank.Usually, vapour pressure is low comprises more composition of sneaking in the cleaning fluid easily in residue.In addition, in distillation/separation circuit, in this residue, also comprise more macromolecule component.Therefore, for discarded these residues, it is comparatively effective to possess discarded unit in the bottom of described regenerating tank.
(8) can provide a kind of with described first and described second mechanism in, described regeneration unit possesses distillation fraction to described use cleaning fluid and cool off that to make its liquefaction, the cooling unit of making described regeneration cleaning fluid be liquid regenerating unit feature, that put down in writing in above-mentioned (1).
(9) can provide a kind of is liquid regenerating unit feature, that put down in writing in above-mentioned (7) also to possess the cooling water feed unit of supplying with cooling water to the described cooling unit of described first and second mechanism.
At this, described cooling unit can comprise cooling end.This cooling end can comprise the condenser that is called as condenser.This condenser can condense steam by the heat exchange with the cooling medium that imports from the outside and liquefy.Generally have water-cooling pattern and the air cooling mode of cooling water as cooling medium.
Provide a kind of to possess described first and second mechanism so far at least and to comprise the 3rd mechanism that reclaims unit, regeneration unit, storage unit and feed unit equally, described control module is controlled Unit first, second, third described recovery unit, described regeneration unit, described storage unit and described feed unit separately at least, delivery time (lead-time) is minimized, make the supply maximum of described regeneration cleaning fluid turn to liquid regenerating unit feature, record in a certain of above-mentioned (2) to (7).
Described the 3rd mechanism, its structure can be identical with the structure of described first mechanism, perhaps basic structure can also be made common, but differences such as the storage capacity of cleaning fluid or processing speed.Even if only by certain mechanism in described first, second or the 3rd mechanism, also can reclaim use cleaning fluid after cleaning processed parts from treating apparatus, it is regenerated, and supply with the regeneration cleaning fluid to treating apparatus once more.In addition, described first, second and the 3rd mechanism can work independently of one another.Described control module can be controlled each recovery unit, regeneration unit, storage unit and the feed unit of these mechanisms, differently carries out recovery process, step for regeneration, the storage operation in each mechanism mutually and supplies with operation.In each mechanism, can carry out above-mentioned operation according to described recovery process, described step for regeneration, described storage operation and the such order of described supply operation, and, three mechanisms, each operation that can stagger in each mechanism is on one side handled efficiently on one side and is used cleaning fluid or the cleaning fluid of regenerating.At this moment, consider to be preferably in not exclusively side by side to carry out same operation between each mechanism.Its reason is, when need in addition, generating the regeneration cleaning fluid that as a result of obtains simultaneously by the use cleaning fluid of at least two mechanisms' processing simultaneously, therefore, might fully carry out smoothing aspect the treatment fluid revenue and expenditure.Details will be narrated in the back.
In addition, about in this said delivery time, for example in step for regeneration, even connect the switch of heater, but use cleaning fluid can not become predetermined treatment temperature immediately, so the time till becoming predetermined treatment temp can be called the delivery time.That is,, in addition, do not produce enough steam, so in fact can't regenerate because the time of the intensification before becoming predetermined temperature also can't be used the recovery of cleaning fluid yet yet.Because such time is the idle period only, so in order to improve cycle efficieny, it is minimized.In addition, the supply maximization of regeneration cleaning fluid is meant owing to do not possess huge storage unit in the liquid regenerating unit, it is desirable to begin after using the cleaning fluid inflow to this cleaning fluid is regenerated, the time till supplying with as the regeneration cleaning fluid is shorter.So, can also be after the use cleaning fluid that is used to handle import, be called the delivery time to the time that offers as the cleaning fluid of regenerating till the treating apparatus.
(10) can provide a kind of cleaning fluid renovation process, this cleaning fluid renovation process uses liquid regenerating unit, and this liquid regenerating unit possesses: reclaim the unit, the use cleaning fluid of the treating apparatus that uses cleaning fluid is reclaimed; Regeneration unit is regenerated to described use cleaning fluid, stores the regeneration cleaning fluid; Feed unit is supplied with described regeneration cleaning fluid to described treating apparatus; And control module, control described recovery unit, regeneration unit and described feed unit, this cleaning fluid renovation process is characterised in that, comprises: supply with the operation of using cleaning fluid to described regeneration unit by described recovery unit; Described use cleaning fluid is regenerated as the operation of regeneration cleaning fluid by described regeneration unit; And supply with the operation of described regeneration cleaning fluid to described treating apparatus by described feed unit, grasp the treatment situation of the cleaning fluid of each operation and control so that can carry out these operations simultaneously.
At this, so-called to carry out recovery process, step for regeneration, storage operation simultaneously and supply with operation be that each mechanism carries out certain operation simultaneously, not equal to be that differently to carry out these operations mutually more definite.Its reason is, because same operation is handled identical use cleaning fluid etc., produces identical regeneration cleaning fluid, so can be created in mutual contention material in these mechanisms and the situation of pushing product mutually.Therefore, for example, control rightly, if when just carrying out recovery process in first mechanism, second mechanism carries out step for regeneration (storing operation concurrently), just supplying with in the 3rd mechanism under the situation of operation, in next productive temp, first mechanism carries out step for regeneration, and second mechanism supplies with operation, the 3rd mechanism carries out recovery process, then can handle the use cleaning fluid from treating apparatus in fact continuously.So, has the treatment situation of each operation of grasping each mechanism, the feature that each operation is played a role efficiently.Specifically, consider the processing speed of each operation, and consider the interim storage ability, adjust the volumetric balance of cleaning fluid.For example, can in storage facilities such as hold-up tank, store the supervision (measuring the storage capacity of each time, the storage speed of arithmetic unit time etc.) of speed.
(11) can provide a kind of cleaning fluid renovation process, use cleaning fluid after it cleans processed parts from the treating apparatus recovery, regenerate, supply with the regeneration cleaning fluid to treating apparatus once more, it is characterized in that, by recovery and regeneration to carrying out described use cleaning fluid, and the cleaning liquid supplied of described regeneration cleaning fluid regeneration handling process makes up, reclaim described use cleaning fluid continuously, regenerate, supply with described regeneration cleaning fluid to treating apparatus once more.
By with each operation a plurality of flow processs of appropriate combination in the same manner that mutually differently make up in above-mentioned a plurality of mechanism, can handle efficiently as a whole.
(12) providing a kind of comprises at least with described a plurality of cleaning fluids regeneration handling processes: the first pass that is made of the supply operation of recovery process, step for regeneration and the described regeneration cleaning fluid of described use cleaning fluid; Second synchronous with described first pass, as to constitute by the recovery process of the supply operation of the step for regeneration of described use cleaning fluid, described regeneration cleaning fluid and the described use cleaning fluid flow process; And synchronous with described first pass, by the supply operation of described regeneration cleaning fluid, described to use the recovery process of cleaning fluid and the 3rd flow process that step for regeneration constitutes be cleaning fluid renovation process feature, record in above-mentioned (11).
By the combination of flow process as described above, during reclaiming in first pass, cleaning fluid is used in regeneration in second flow process, supplies with the regeneration cleaning fluid to treating apparatus in the 3rd flow process.That is, this treating apparatus can be when discharging the use cleaning fluid, the supply of the regeneration cleaning fluid of acceptance and its balanced degree.Therefore, in this cleaning fluid renovation process, in described treating apparatus, do not need to have the storage of so much untapped cleaning fluid or regeneration cleaning fluid.
(13) provide a kind of, can be controlled to be cleaning fluid renovation process feature, that in above-mentioned (12), put down in writing with the overlapping mode of the operation in another flow process with before and after the corresponding corresponding operation of described object operation by the operation before and after its object operation with each operation to described first, second and the 3rd flow process.
As mentioned above, for example when using cleaning fluid to need spended time, can before finishing recovery process, switch to step for regeneration, use heater to heat simultaneously by the heater heating.Generally, the overlapping operation of carrying out its front and back that might make of each operation becomes difficult, efficient is reduced, so preferably avoid the overlapping of operation.But, be to become enough high if this heater initial stage begins to heat, and produce before the more steam in the temperature of using cleaning fluid, then be difficult to think obstruction step for regeneration or recovery process.So, be preferably in after the stopping cause of having studied each operation, carry out the overlapping of operation again.
(14) provide a kind of liquid regenerative system, it has: the treating apparatus that cleans processed parts by cleaning fluid; And retrieve use cleaning fluid from this treating apparatus, and to its liquid regenerating unit of regenerating, between this treating apparatus and this liquid regenerating unit, make described use cleaning fluid and the circulation of regeneration cleaning fluid continuously, described liquid regenerating unit comprises first and second mechanism of recovery, regeneration and the regeneration cleaning solution supplying of carrying out described use cleaning fluid, each mechanism comprises: reclaim the unit, conjointly be provided with described treating apparatus, described use cleaning fluid is reclaimed; Regeneration unit conjointly is provided with described recovery unit, and described use cleaning fluid is regenerated; Storage unit conjointly is provided with described regeneration unit, stores the regeneration cleaning fluid; Feed unit, conjointly be provided with described storage unit and described treating apparatus, supply with described regeneration cleaning fluid to described treating apparatus, when reclaiming described use cleaning fluid in described first mechanism, the use cleaning fluid that can reclaim in advance by the regeneration of described second mechanism.
(15) can provide a kind of is liquid regenerative system feature, record in above-mentioned (14) with the 3rd and the 4th mechanism that further possesses same formation.
(16) can provide a kind of further to possess the control module that described treating apparatus and described liquid regenerating unit are controlled, this control module reciprocally communicates between described treating apparatus and described liquid regenerating unit, and described recovery process, described step for regeneration, the described supply operation controlled simultaneously in each mechanism of liquid regenerating unit are liquid regenerative system feature, record in above-mentioned (14) or (15).
In such liquid regenerative system, be not only regeneration, also can control simultaneously the use of regeneration cleaning fluid, so as whole device to cleaning fluid, can minimizing be untreated and the storage of the cleaning fluid of regenerating in, improve to clean and wait the efficient of handling.
(17) can provide a kind of liquid regenerating unit, it possesses: reclaim the unit, reclaim the used cleaning fluid (hereinafter referred to as " use cleaning fluid ") of the treating apparatus that uses cleaning fluid; Regeneration unit; The described use cleaning fluid that reclaims is regenerated; Feed unit is supplied with the cleaning fluid of being regenerated by described regeneration unit to described treating apparatus; And control module, control described recovery unit, regeneration unit and described feed unit.
(18) can provide a kind of with the cleaning fluid use prearranged signals of described control module correspondence from described treating apparatus, the capacity that carries out between described recovery unit, described regeneration unit and the described feed unit is adjusted into liquid regenerating unit feature, record in above-mentioned (17).
According to the present invention, because can automatically reclaim, regenerate, utilize again, then and there so do not need the operator to carry out regular switching operation to the used cleaning fluid of discharging from treating apparatus.In addition, except automatically carrying out all relevant operation, for example, in cleaning, the priming paint coating also automatically appends untapped cleaning fluid, so do not need to monitor all the time with regeneration.To not prepare a large amount of cleaning fluids when in addition, not needing as trust recycling dealer.Because the present invention can use as special equipment at a treating apparatus, so can as the regenerating unit of the cleaning fluid that reclaims from multiple treating apparatus, not need complicated separation function.(usually, the used cleaning fluid that produces from a treating apparatus is 2 kinds a mixed liquor.) therefore, when change heating-up temperature, heat time heating time, discarded amount etc. are set, can be used for all treating apparatus.Also need not in factory, to be provided with large-scale cleaning fluid recycling device, can be connected with each treating apparatus as required, so change of the change of corresponding industry size or layout etc. neatly.A kind of regenerating unit can be provided, and it when carrying out priming paint coating cleaning treatment, is automatically regenerated to the cleaning fluid that has mixed coating liquid, so that can utilize once more when being used for priming paint coating cleaning.Thus, the expense of cleaning fluid be can cut down, the supply that tired operator helps just can to carry out the cleaning fluid after the appending, regenerating of new cleaning fluid, the processing of waste liquid need not.Because the price height of the cleaning fluid of priming paint application roll, thus if could utilize once more could effectively be used resource, so desirable effect that curtails expenditure, and also beneficial to environment.
Description of drawings
Fig. 1 is the structure chart of an example of expression priming paint application roll cleaning device.
Fig. 2 is the structure chart of an example of express liquid regenerating unit.
Fig. 3 is the block diagram of liquid regenerating unit.
Fig. 4 is the flow chart of example of the reproducer of expression cleaning fluid.
Fig. 5 is the flow chart of the example of expression jar supervisory programme.
Fig. 6 is the flow chart of the example of expression playback processing program.
Fig. 7 is the flow chart of example of the supply request supervisory programme of expression regeneration cleaning fluid.
Fig. 8 is the structure chart of another example of express liquid regenerating unit.
Fig. 9 is the flow chart of expression use as the example of the reproducer of the cleaning fluid of the liquid regenerating unit of another example.
Figure 10 is the flow chart that routine is set in mechanism's effect of presentation graphs 9.
Figure 11 is the flow chart that the jar of presentation graphs 9 monitors routine.
Figure 12 is the flow chart that the supply request of presentation graphs 9 monitors routine.
Figure 13 is the flow chart that routine is handled in the regeneration of presentation graphs 9.
Figure 14 represents the sequential chart of the liquid handling device of two systems.
Figure 15 represents the sequential chart of the liquid handling device of three systems.
One example of the structure of Figure 16 express liquid regenerative system.
Symbol description
The 10c control part; 11,31,35 pipelines; 12a, 12b, 12c, 12d, 23a, 23b, 23c, 23d, 25a, 25b, 25c, 25d, 28a, 28b, 28c, 28d, 33a, 33c, 33d, 34a, 34b, 34c, 34d, 41a, 41b, 41c, 41d valve; 13a, 13b, 13c, 13d regenerating tank; 21a, 21b, 21c, 21d heater; 22a, 22b, 22c, 22d pipeline; 24 cooling towers (cooler bin); 26a, 26b, 26c, 26d cleaning fluid tank; 27 vavuum pumps; 32,36 filters; 42 waste liquid tanks; 90 priming paint application roll cleaning devices; 91 gap nozzles; 92 priming paint application roll; 93 rinse baths; 94,95,96 nozzles; 97 cleaning fluid discharge pipes; 99 regeneration cleaning fluid ingress pipes; 200 liquid regenerating units; 300 liquid regenerative systems; 311 reclaim line; 317 feeding pipes; 318 mechanisms; 320 control device
The specific embodiment
Below use the resist applying device, preferred implementation of the present invention is described with reference to the accompanying drawings in further detail.This preferred implementation is to be used to illustrate embodiments of the present invention, is not to be that content of the present invention is defined as following embodiment.In addition, use symbol identical or that have relevance for the key element of identical or identical type, and the repetitive description thereof will be omitted.
(embodiment 1)
At first, the priming paint application roll cleaning device that uses Fig. 1 explanation to use in the present invention.Fig. 1 is the structure chart of an example of expression priming paint application roll cleaning device.Priming paint application roll cleaning device 90 shown in Figure 1 possesses: gap nozzle 91, the priming paint application roll 92 as processed parts, rinse bath 93, nozzle 94,95,96 and cleaning discharge pipe 97.From gap nozzle 91 before substrate applies, in priming paint application roll cleaning device 90, from gap nozzle 91 to priming paint application roll 92 ejection coating liquid 98.Priming paint application roll 92 need make the surface become totally during rotating a circle, and comes to prepare for next virtual coating (dummydispense), covers so the following part of the area of application of priming paint application roll 92 is cleaned groove 93.
(matting)
In rinse bath 93, carry out the cleaning and the drying of priming paint application roll 92.At first, spray the cleaning fluid of recycling in advance to the surface of priming paint application roll 92 from nozzle 94.At this moment, can also be in cleaning fluid entrained air, by stronger air spraying cleaning fluid, the nozzle 94 that perhaps shakes cleaning fluid also has effect.And, on the direction of rotation D1 of priming paint application roll 92 (clockwise direction among the figure), do not use cleaning fluid (not having used cleaning fluid) from being configured in locational nozzle 95 sprayings that become the downstream.At this moment, injecting type or rock type be effective.At last, in order to dry up cleaning fluid, from nozzle 96 ejection nitrogen (N 2).By above action, cleaning, the drying of priming paint application roll 92 are finished.The cleaning fluid that uses this moment (mixed liquor of coating liquid and cleaning fluid) by being arranged on the cleaning fluid discharge pipe 97 of rinse bath 93 belows, is fed to liquid regenerating unit (cleaning fluid regeneration sector).
(structure of liquid regenerating unit)
Then, the liquid regenerating unit is described.An example of the structure of Fig. 2 express liquid regenerating unit.Constitute a mechanism by recoverer, reproducing unit, reservoir and supply unit.Liquid regenerating unit shown in Figure 2 has two mechanisms.If first mechanism is narrated, then recoverer is made of the pump P1, pipeline 11, the valve 12a that are equipped with as required.Reproducing unit is made of regenerating tank A (13a), heater 21a, pipeline 22a, cooling tower 24.Reservoir is made of valve 25a, pipeline 29a, cleaning fluid tank A (26a).Supply unit is made of cleaning fluid tank A (26a), pipeline 35,35a, 31a, valve 34a, valve 33a, filter 36.On the other hand, about second mechanism, recoverer is made of the pump P1, pipeline 11, the valve 12b that are equipped with as required.Reproducing unit is made of regenerating tank B (13b), heater 21b, pipeline 22b, cooling tower 24.Reservoir is made of valve 25b, pipeline 29b, cleaning fluid tank B (26b).Supply unit is made of cleaning fluid tank B (26b), pipeline 35,35b, 31b, valve 34b, valve 33b, filter 36.When a side mechanism is used as recovering mechanism, the opposing party mechanism is used as regeneration sector.In addition, liquid regenerating unit shown in Figure 2 also possesses: exhaust portion, test section, control part (not shown), waste part, cooling water supply unit.If first mechanism is narrated, then exhaust portion is made of valve 28a, pipeline 84, pump P2.Test section is made of liquid surface height sensor 61a, 62a, 61b, 62b.Control part possesses controller (not shown), and this controller is for can free communication and can freely control with liquid surface height sensor 61a, 61b, 62a, 62b, 66a, 65a, 66b, 65b, valve 12a and 12b, heater 21a, 21b, valve 25a, 25b and be electrically connected.Waste part is made of valve 41a, pipeline 86a, waste liquid tank 42.The cooling water supply unit by 51, valve 52a, 52b, pipeline 53a, 53b constitute.
The recoverer of liquid regenerating unit has reclaimed from the mixing of priming paint application roll cleaning device discharge the mixed liquor (that is, using cleaning fluid) of coating liquid and cleaning fluid.Reproducing unit is used separation cleaning fluid composition the cleaning fluid from this, is regenerated as the regeneration cleaning fluid.In the operation of separation regeneration cleaning fluid from use cleaning fluid, utilize the difference of the boiling point of each composition (for example, the composition of cleaning fluid and coating liquid) that uses in the cleaning fluid.That is, by separating to using cleaning fluid to add thermal distillation.When the top at regenerating tank A of reproducing unit (13a) and regenerating tank B (13b) has connected pipeline 22a, the 22b of exhaust portion, can reduce pressure in to jar in when heating.Therefore, because can reduce boiling point, so have the effect that promotes evaporation.Reservoir to distillation, isolated cleaning fluid composition cools off, as the regeneration cleaning fluid interim storage of recycling in cleaning fluid tank A (26a) and cleaning fluid tank B (26b).Supply unit pressurizes to each cleaning fluid tank by air blast 70 grades, and the regeneration cleaning fluid of storing among cleaning fluid tank A (26a) and the cleaning fluid tank B (26b) is offered priming paint application roll cleaning device (treating apparatus).Test section detects the liquid measure of using cleaning fluid or regeneration cleaning fluid in reproducing unit and supply unit jar separately.Control part is according to the liquid measure by detected use cleaning fluid of test section or regeneration cleaning fluid, control recoverer, reproducing unit and supply unit.Waste part evaporation from use cleaning fluid and the residual use cleaning fluid after having separated a large amount of volatile ingredients volatile ingredients such as () cleaning fluids of a residual part discard as waste residue.The cooling water supply unit needs the place of cooling to supply with cooling water to recoverer, reproducing unit and waste part etc.Wait by common pipeline between priming paint application roll cleaning device and the liquid regenerating unit to connect, use cleaning fluid and regeneration cleaning fluid reciprocally to move therein.
In addition, Fig. 2 has represented an example of liquid regenerating unit, so long as each function of realization recoverer, reproducing unit, reservoir, supply unit, exhaust portion, test section, control part, waste part and cooling water supply unit, structure can be different.
(regeneration is handled)
Then, the flow process according to the separating part of the use cleaning fluid that has mixed coating liquid (resist liquid) and cleaning fluid (diluent) illustrates each inscape.Regenerating tank A and B (13a, 13b) are connected with cleaning fluid discharge pipe 97 shown in Figure 1 via pipeline 11 and reclaim line (not shown).Use cleaning fluid from the rinse bath 93 of priming paint application roll cleaning device is discharged accumulates in regenerating tank A or B (13a, 13b) by cleaning fluid discharge pipe 97 and pipeline 11.At this, following condition is described as prerequisite, this condition is: according to the ratio of 60 seconds 100cc, will use cleaning fluid to be recovered among regenerating tank A or the B (13a, 13b), and accumulated the use cleaning fluid of scheduled volume in regenerating tank A or B (13a, 13b).
(recovery process)
Recoverer reclaims from priming paint application roll cleaning device and uses cleaning fluid.Specifically, open valve 12a (or valve 13b), use cleaning fluid to flow into regenerating tank A (13a) (or regenerating tank B (13b)) at any time.At this, according to about one minute ratio once, in the relatively short time, among regenerating tank A (13a), store the use cleaning fluid of 100cc, continue to carry out (for example lasting 50 minutes) before becoming scheduled volume (for example 5L).
(step for regeneration)
Specifically, when in regenerating tank A (13a), having accumulated the use cleaning fluid of scheduled volume, switch,, reclaim and flow into the use cleaning fluid to regenerating tank B (13b) so that valve-off 12a opens valve 12b.When valve 12a is closed, in regenerating tank A (13a), begin heating by heater 21a.Heat till 120 degree～140 degree by heater 12a, when detecting when using cleaning fluid to reach near the design temperature, the valve 25a and the 28a that close are so far opened, by gas zones and cooling tower 24 beginning regenerating tank As (13a) the interior decompression of vavuum pump 27 via cleaning fluid tank A (26a).By the action of vavuum pump 27, in regenerating tank A (13a), the pipeline 22a, discharge existing air etc., be full of the steam that uses the volatile ingredient in the cleaning fluid.So, by heating simultaneously and reducing pressure, promote to use the volatilization of cleaning fluid.In using cleaning fluid, because the boiling point of cleaning fluid (diluent) is low, so use the volatile ingredient elder generation start vaporizer of cleaning fluid.
At this moment, whole compositions of coating liquid can have volatility, but also can comprise the non-volatile or high boiling composition of a part.At this moment, such composition does not evaporate, and stays in the regenerating tank A (13a).Generally, whole compositions of cleaning fluid have volatility, at this, evaporate the outside that major part is discharged to regenerating tank A (13a).But the part of cleaning fluid also can comprise non-volatile or high boiling being divided into.As mentioned above, such composition is stayed in the regenerating tank A (13a).
(discarding of residue)
(for example, about 20% o'clock of the liquid measure that becomes initial use cleaning fluid) finished regeneration and handled when the surplus of judging the use cleaning fluid in the regenerating tank A (13a) by liquid surface height sensor etc. is less than scheduled volume.Because this regeneration processing finishes, valve- off 25a and 28a, and open the interior residual pressure of valve 23a release regenerating tank A (13a).In addition, open the valve 41a that is connected with the bottom of regenerating tank A (13a), residual use cleaning fluid in the discarded regenerating tank A (13a).
(storage of regeneration cleaning fluid)
Pipeline 22a, 22b have cooling tower 24 midway, cool off by cooling water.Therefore, make its liquefaction, fall by pipeline 29a, 29b and be stored in the cleaning fluid tank A (26a) (perhaps cleaning fluid tank B (26b)) from cooling tower 24 as the regeneration cleaning fluid to cooling off from the composition that uses the cleaning fluid evaporation.
(cooling water)
By opening valve 51, and adjust the switching of valve 52a and 52b, supply with cooling waters to cooling tower 24 and waste liquid tank 42 by pipeline 53a, 53b.In addition, reclaim used cooling water by pipeline 54a, 54b.Used cooling water (cooling water returns) becomes high temperature by the heat exchange with the regeneration cleaning fluid, so be provided for cooling-water machine (cooling device) that used cooling water is cooled off, and, preferably the cooling water feed unit is made circulator (liquid circulating apparatus) for this cooled cooling water is supplied with as cooling water once more.
(supply operation)
Then, automatically open valve 33a and 34a, by the air of carrying via valve 72 from air blast 70, pass through pipeline 31a from pipeline 31 via filter 32, and the cleaning fluid pressure of recycling is transported to the nozzle 94 of the priming paint application roll cleaning device of Fig. 1 by the supply pipe 35a that valve 34a is opened.In regenerating tank A (13a),, can't supply with the regeneration cleaning fluids to nozzle 94 from cleaning fluid tank A (26a) to using cleaning fluid to regenerate in the process of handling.
(leakage)
In above such device, at the most beneath configuration leakage dish 74, receive the cleaning fluid of accidental release etc., after having carried out collection as required, open leakage valve 78, to the outside discarded leakage of system according to liquid surface height sensor 76.
(summary)
As described above, by switching the body function that uses reclaiming jar A and B (13a, 13b), can use the recovery of cleaning fluid and the regeneration of cleaning fluid continuously, use cleaning fluid tank A and B (26a, 26b) by switching ground, can supply with to priming paint coating cleaning device continuously.At this, for convenience of description, represented the example of two regenerating tank, but also can have three regenerating tank or the regenerating tank more than three.If cleaning fluid tank is minimum is two, then can supply with continuously, same also passable more than three.Preferably respectively at regenerating tank A and B (13a, 13b) with cleaning fluid tank A and B (26a, set the liquid surface height sensor 61a that detects liquid level 26b), 61b, 62a, 62b, 66a, 66b, 65a, 65b, by detecting the higher limit of liquid level, lower limit is controlled, so that automatically carry out valve 12a, 25a, 23a, 41a, 28a, 38a, 34a, 12b, 25b, 23b, 41b, 28b, 33b, the switching of 34b, can make regenerating tank A and B (13a thus, 13b), cleaning fluid tank A and B (26a, operation automations such as switching 26b) can be carried out whole operations concurrently.
For example, when the liquid level that detects regenerating tank A (13a) as sensor 62a reaches higher limit, valve-off 12a, open valve 12b, beginning is reclaimed to regenerating tank B (13b) and is used cleaning fluid, can automatically carry out the switching of regenerating tank A and B (13a, 13b).At this, in regenerating tank A (13a), after heater 21a begins heating, when the liquid level that detects reclaiming jar A (13a) as sensor 61a reaches lower limit, stop heating and valve-off 25a and the 28a of heater 21a, open valve 23a and 41a, carry to waste liquid tank 42 to remain in residual use cleaning fluid among the reclaiming jar A (13a), after the regeneration cleaning fluid separated, can automatically carry out thus from the step of regenerating tank A and the discarded coating of B (13a, 13b) liquid.Set regenerating tank B (13b) same as described abovely.
According to the result of test,, think that the cost of use of cutting down cleaning fluid is had very big contribution even learn that from use cleaning fluid isolated cleaning fluid carries out 50 times regeneration and also can use no problemly.So, by using the liquid regenerating unit of present embodiment, about 8 one-tenths the used cleaning fluid in the cleaning of priming paint application roll of can regenerating.
So, by the mixed liquor (that is, using cleaning fluid) that uses the liquid regenerating unit of above explanation, can be recovered in the coating liquid that produces in the virtual coating and cleaning fluid, and it is distilled, isolated regeneration cleaning fluid is used to clean the priming paint application roll once more.Thus, because can cut down the use amount of cleaning fluid, so can effectively utilize resource and can cutback of spending.
(block diagram of liquid regenerating unit)
Fig. 3 is the block diagram of the structure of expression recovery and piece-rate system.By the above-mentioned operation of control part 10c control.Specifically, in the regenerating tank A 10a of system, receive control part 10c from the signal of liquid surface height sensor 61a, 62a according to the such program of aftermentioned, valve-off 12a.The action of corresponding vavuum pump 27 is according to instruction unpack valve 25a, the 28a from control part 10c.When separation circuit begins, according to from the instruction of control part 10c control heater 21a and valve 41a rightly.In addition, the 10e of emergent control portion when liquid surface height sensor 61a does not react, disconnects the switch of heater 21a as safety device work, can avoid dry combustion method.Similarly, when detecting regenerating tank A (13a) by liquid surface height sensor 62a and expired, valve-off 12a prevents the overflow of regenerating tank.
In the regenerating tank B 10b of system, by- pass valve control 12b, 25b, 28b and heater 21b similarly, in addition, the 10f of emergent control portion comes work as safety device according to liquid surface height sensor 61b, 62b.Show such control content by display part 10d, the operator can observe such control content.
(handling process of liquid regenerating unit)
Fig. 4 to Fig. 6 has represented the example of program of the liquid regenerating unit of control chart 2.When having begun reproducer, at first, in main program shown in Figure 4, carry out the operation that jar is monitored described later (step (below be recited as S) 11).Then, carry out the supervision (S11-1) of the supply request from priming paint application roll cleaning device described later concurrently.Then, check whether produced regenerated signal (S12).And (S12 NO), then determines to use which the A/B signal determining step (S14) among regenerating tank A or the B under the situation that does not produce regenerated signal.On the other hand, (S12 Yes), begins regeneration and handles (S13), handles and returns main flow once more, transfers to A/B signal determining step (S14) under the situation that has produced regenerated signal.
In A/B signal determining step,, open valve 12a (S15) being judged as (S14, a-signal) when having sent a-signal.In addition, when having sent a-signal and B signal both sides, be programmed for and make a-signal preferential.In addition, can also send the commencing signal of regenerating tank A with opening valve 12a.Thus, can notify the beginning of the productive temp time of regenerating tank A, be used for the time management of various operations to control device.According to the signal of liquid surface height sensor 62a, monitor at any time whether regenerating tank A (13a) becomes full (S16).When be judged as less than the time (S16 NO), constitutes the routine that monitors once more with monitor.If completely (S16 Yes), judges then whether regenerating tank B (13b) is not regeneration mode (S17) to be judged as regenerating tank A (13a) change.When regenerating tank B (13b) is regeneration mode, and when promptly the regenerated signal of regenerating tank B (13b) is not OFF (S17, No), because can't use regenerating tank A and B (13a, 13b) both sides, so send abnormality alarm (S18) to be recovered as purpose.At regenerating tank B (13b) when being not regeneration mode, that is, when the regenerated signal of regenerating tank B (13b) is OFF (S17, Yes), valve-off 12a (S19).Then, judge whether to have imported end signal (S20) from manual input device (for example stop button), (S20 Yes), carries out a series of processing (S21) of stop liquid regenerating unit when having imported end signal.(S20 No), does not use the reclaiming circulation of cleaning fluid in order to circulate, make to handle to turn back to a jar supervision (S11) when having the end of input signal.
In the A/B signal determining is handled (S14),, open valve 12b (S35) being judged as (S14, B signal) when having sent signal B.Below same as described above, so simply the narration.Formation monitors at any time according to the signal of liquid surface height sensor 62b etc. whether regenerating tank B (13b) becomes full (S36), when be judged as less than the time (S36 No), constitutes the routine that monitors once more.If completely (S36 Yes), judges then whether regenerating tank B (13a) is not regeneration mode (S37) to be judged as regenerating tank B (13b) change.(S37 No), does not send abnormality alarm (S18) when the regenerated signal of regenerating tank A (13a) is not OFF.When the regenerated signal of regenerating tank A (13a) is OFF (S37, Yes), valve-off 12b (S39).Then, judge whether to have imported end signal (S40) from manual input device (for example stop button), (S40 Yes), carries out a series of processing (S21) of stop liquid regenerating unit when having imported end signal.(S40 No), does not use the reclaiming circulation of cleaning fluid in order to circulate, make to handle to turn back to a jar supervision (S11) when having the end of input signal.
(jar supervision)
The operation that Fig. 5 diagram monitors jar (S11).At first, carry out the initialization (S111) of variable.Then, whether investigation regenerating tank A (13a) can admit and use cleaning fluid (S112).(S112 Yes), sends a-signal (S121) when regenerating tank A (13a) can store the use cleaning fluid.(S112 No), judges by liquid surface height sensor 62a whether regenerating tank A (13a) has been full of use cleaning fluid (S112-1) in the time can't storing the use cleaning fluid.When underfill (S112-1, No), because regenerating tank A (13a) can't store the use cleaning fluid for a certain reason, thus abnormal signal sent, and send stop signal so that shut down procedure (S115).(S112-1 Yes), in order to study the processing of whether can regenerating, judges whether cleaning fluid tank A (26a) can admit regeneration cleaning fluid (S112-2) when being full of.In the time can not admitting (S112-2, No), because can't regenerate to using cleaning fluid, thus abnormal signal sent, and send stop signal so that shut down procedure (S115).(S112-2 Yes), sends a jar A regenerated signal, enables the use cleaning fluid of storing regenerate (S113) in the time can admitting.
Then, the flow process of (S121) is converged when sending signal A, and whether investigation regenerating tank B (13b) can admit is used cleaning fluid (S114).(S114 Yes), sends B signal (S124), returns main program when regenerating tank B (13b) can store the use cleaning fluid.(S114 No), judges by liquid surface height sensor 62b whether regenerating tank B (13b) has been full of use cleaning fluid (S141-1) in the time can't storing the use cleaning fluid.When underfill (S114-1, No), because because certain reason regenerating tank B (13b) can't store the use cleaning fluid, thus abnormal signal sent, and send stop signal so that shut down procedure (S115-2).(S114-1 Yes), in order to study the processing of whether can regenerating, judges whether cleaning fluid tank B (26b) can admit regeneration cleaning fluid (S114-2) when being full of.In the time can not admitting (S114-2, No), because can't regenerate to using cleaning fluid, thus abnormal signal sent, and send stop signal so that shut down procedure (S115-2).(S114-2 Yes), sends a jar B regenerated signal, enables the use cleaning fluid of storing regenerate (S123) in the time can admitting.Then, return main program.
(regeneration is handled)
Fig. 6 is the flow chart of diagram regeneration treatment process (S13).In the regeneration treatment process, at first, judge that the regenerated signal that sends is jar A regenerated signal or jar B regenerated signal (S201) in carrying out jar operation that monitors.If be judged as a jar A regenerated signal (S201, A regenerated signal), valve-off 12a (S202) then, the heater 21a that opens regenerating tank A (13a) begins to heat (S203), and heats till using cleaning fluid to become design temperature (S204).If detect use cleaning fluid to reach design temperature (S204 Yes), then opens valve 25a, 28a (S205).Then, open vavuum pump 27 (S206), discharge regenerating tank A (13a) existing air interior and that pipeline 22a is interior and reduce pressure.Even discharge existing air by decompression, drop to predetermined pressure substantially, also can the be cooled condenser liquefaction of tower 24 of the steam of generation, institute so that this regeneration cleaning fluid drop onto among (perhaps falling) cleaning fluid tank A (26a).Detecting the surplus of using cleaning fluid by liquid surface height sensor 61a has dropped to scheduled volume (S207 Yes), has closed the heater (S208) of regenerating tank A, and valve-off 25a, 28a (S209) open valve 23a (S210) and discharge residual pressure.
From EXH input ambient atmos, make to be roughly atmospheric pressure (S211) in the regenerating tank A (13a), stop the action (S212) of vavuum pump 27, open valve 41a (S213), discharge use cleaning fluid residual in regenerating tank A (13a).Discharge residual use cleaning fluid (S214) by making valve 41a open the scheduled time.The liquid surface height sensor 61a of regenerating tank A (13a) is carried out reaction opening of described valve 41a in the time confirmed (S215, Yes), close the regenerated signal (S216) of regenerating tank A (13a), valve-off 41a makes other setting return the processing of original state (S217).Thus, regenerating tank A (13a) can store the use cleaning fluids such as cleaning fluid of recovery once more.Then, make processing turn back to the wait regenerated signal.
In addition, be in jar A regenerated signal or the step (S201) of jar B regenerated signal in judgement, if be judged as a jar B regenerated signal (S201, B regenerated signal), then valve-off 12b (S222).Then, open the heater 21b (S223) of regenerating tank B (13b), heat till using cleaning fluid to reach design temperature (S224).If detect use cleaning fluid to reach design temperature (S224 Yes), then opens valve 25b, 28b (S225).Then, open vavuum pump 27 (S226), discharge regenerating tank B (13b) existing air interior and that pipeline 22b is interior and reduce pressure.Even discharge existing air, drop to predetermined pressure substantially, also can the be cooled condenser liquefaction of tower 24 of the steam of generation, institute so that this regeneration cleaning fluid drop onto among (perhaps falling) cleaning fluid tank 26b.
(S227 Yes), turn-offs the switch of the heater 21b of regenerating tank B, stops heating (S228) when the surplus of the mixing cleaning fluid of regenerating tank B (13b) reduces to scheduled volume.Then, valve- off 25b, 28b open valve 23b (S230) from EXH input ambient atmos, make to be roughly atmospheric pressure (S231) in the regenerating tank B (13b), stop the action (S232) of vavuum pump 27.Afterwards, open valve 41b (S234), discharge use cleaning fluid residual in regenerating tank B (13b).Discharge residual use cleaning fluid by making valve 41b open the scheduled time, the liquid surface height sensor 65b of cleaning fluid tank B (26b) is carried out reaction opening of described valve 41b in the time confirmed (S235, Yes), close the regenerated signal (S236) of regenerating tank B (13b), make other setting return the processing (S237) of original state.Thus, regenerating tank B (13b) can store the use cleaning fluids such as cleaning fluid of recovery once more.Then, make processing turn back to the wait regenerated signal.
(request of supply monitors)
Represent the flow chart to an example of the supply request supervisory programme of priming paint application roll cleaning device (treating apparatus) supply regeneration cleaning fluid during Fig. 7 by pipeline 35,35a, 35b etc.At first, judged whether from the request of priming paint application roll cleaning device the supply (S502) of regeneration cleaning fluid.When request is not supplied with (S502, No), further whether judgement exists end signal (for example, the operator is to the operation of the stop button of device), (S503 Yes), then carries out the processing (S504) of termination routine if having end signal.On the other hand, (S503, No), then program has judged whether to ask the supply (S502) of regeneration cleaning fluid once more if there is not end signal.If (can S502 Yes), judge then and supply with regeneration cleaning fluid (S505) from cleaning fluid tank A (26a) to have the request of supply.For example, as the testing result of liquid surface height sensor 65a, 66a, be judged to be the regeneration cleaning fluid when inadequate, can't supply with regeneration cleaning fluid (S505 from cleaning fluid tank A (26a), No), transfer to the judgement operation (S515) that to supply with the regeneration cleaning fluid from cleaning fluid tank B (26b).Can be when cleaning fluid tank A (26a) supplies with the regeneration cleaning fluid, (S505, Yes), open valve 72,33a, 34a, gas zones to cleaning fluid tank A (26a) is pressurizeed, extrude the regeneration cleaning fluid from pipeline 35a, and offer priming paint application roll cleaning device (S506) by pipeline 35, filter 36.During this period, monitor that at any time can cleaning fluid tank A (26a) supply with the regeneration cleaning fluid, be judged as can not the time (S507 No), closes each valve 72,33a, 34a (S509).As long as be judged as cleaning fluid tank A (26a) can supply with the regeneration cleaning fluid (S507 Yes), has confirmed whether to have asked the supply of regeneration cleaning fluid, when asking (S508,, Yes), carry out the judgement that can cleaning fluid tank A (26a) supply with the regeneration cleaning fluid.(S508 No), closes each valve 72,33a, 34a (S509) when not asking the supply of regeneration cleaning fluid.Then, judged whether to ask the supply (S502) of regeneration cleaning fluid once more.
Above-mentioned can supplying with the judgement operation (S515) of regeneration cleaning fluid from cleaning fluid tank B (26b), be judged as (S515 to supply with the time, No), because cleaning fluid tank A (26a) and cleaning fluid tank B (26b) both sides can not supply with, so send abnormality alarm (S520).Be judged as (S515 to supply with the time, Yes), open each valve 72,33b, 34b, the gas zones of cleaning fluid tank B (26b) is pressurizeed, extrude the regeneration cleaning fluid from pipeline 35b, and offer priming paint application roll cleaning device (S516) by pipeline 35, filter 36.During this period, monitor that at any time can cleaning fluid tank B (26b) supply with the regeneration cleaning fluid, be judged as can not the time (S517 No), closes each valve 72,33b, 34b (S519).As long as be judged as cleaning fluid tank B (26b) can supply with the regeneration cleaning fluid (S517 Yes), has confirmed whether to have asked the supply of regeneration cleaning fluid, when asking (S518,, Yes), carry out the judgement that can cleaning fluid tank B (26b) supply with the regeneration cleaning fluid.(S518 No), closes each valve 72,33b, 34b (S519) when not asking the supply of regeneration cleaning fluid.Then, judged whether to ask the supply (S502) of regeneration cleaning fluid once more.
(embodiment 2)
Situation with two regenerating tank (13a and 13b) has been described, but regenerating tank can also be switched each regenerating tank and store the use cleaning fluid also for more than three in embodiment 1.Because the wash number in priming paint application roll 92 can produce more use cleaning fluid more for a long time,, be effective for having little time to separate the situation of using cleaning fluid so be three when above making regenerating tank.Below to make regenerating tank be situation more than three in explanation.
(apparatus structure)
Fig. 8 is the schematic diagram of the liquid regenerating unit of expression embodiment 2.Different with liquid regenerating unit (dual system) shown in Figure 2, the parallel mechanism that is provided with four systems of the liquid regenerating unit of embodiment 2.But the annexation of parts is identical in fact, so common parts have been distributed identical numbering.About the 3rd and the 4th mechanism of the liquid regenerating unit 200 of embodiment 2, each unit number additional " c ", " d " are distributed numbering.These mechanisms possess recoverer, reproducing unit, reservoir and supply unit respectively in the same manner.And this liquid regenerating unit 200 has exhaust portion, test section, control part, waste part and cooling water supply unit.By the structure that these various pieces constitute, the structure with shown in Figure 2 is identical in fact, and therefore the repetitive description thereof will be omitted.In addition, on supply unit, be provided with N 2 Gas supply part 71 replaces air blast 70.
Liquid regenerating unit 200 is for cooling tank 24, waste liquid tank 42, the N as common parts 2 Gas supply part 71, cooling water supply unit etc., and reclaim as the pipeline 11 of the use cleaning fluid of mixed liquor and the pipeline 35 of supplying with the regeneration cleaning fluid, each structure that has been connected in parallel respectively waits by each corresponding valve to separate as required.Therefore, though first and second structure of liquid regenerating unit 200 that can be by Fig. 2 is regenerated, also can regenerate by two mechanisms from first to fourth mechanism of this liquid regenerating unit 200, selecting arbitrarily.Each regenerating tank and the cleaning fluid tank of two letters can selecting arbitrarily from A to D by having added of this liquid regenerating unit 200 carry out recovery process, step for regeneration, storage operation in fact continuously, supply with operation.
In addition, for example four mechanisms (hereinafter referred to as the A of mechanism, B, C, D) can be divided into two groups, for example, A of mechanism and B are as first mechanism work of Fig. 2, and C of mechanism and D are as second mechanism work of Fig. 2.If classification so then in the such treating apparatus of priming paint application roll cleaning device, just can easily be tackled less situation of the amount of unit interval of employed cleaning fluid and more situation.That is,, can carry out reclaiming by A of mechanism and C and store supply with circulation, on the other hand,, can carry out identical circulation by the A of mechanism and B, the C of mechanism and D more for a long time more after a little while.In theory, by doing the disposal ability that can become about twice like this.
But, because wish the amount equilibrium of the cleaning fluid of processing in this circulation, thus carry out identical circulation by grouping and the D of mechanism of the A of mechanism, B, C, not ideal.This is that efficient can reduce because in general.In addition, represented to make the identical example that circulates of mechanism of four systems, but also can circulate by three systems or four systems with dual system.For example, in dual system, be that 1/2 circulation of staggering is operated mechanism, but in four systems, can stagger to come by per 1/4 circulation mechanism is operated.At this moment, it is desirable to, must be careful and want to operate common parts, be arranged on the interim storage unit that is used to cushion when switching.
In addition, when the mechanism that uses above four,, then whole mechanisms can be divided into two groups, make the work of liquid regenerating unit during with above-mentioned dual system in the same manner if mechanism's quantity is even number.On the other hand, when being odd number, can replace when fault having taken place with a mechanism as preparation mechanism in certain mechanism.Can be with remaining mechanism identically during with above-mentioned even number be divided into two groups, make the work of liquid regenerating unit during with above-mentioned dual system in the same manner.
(reproducer)
Fig. 9,10,11,12, the 13rd, the flow chart of the example of the reproducer of the cleaning fluid of the liquid regenerating unit of the expression use embodiment of the invention 2.In Fig. 9, represent main program.At this, mainly for the storage of the use cleaning fluid after the recovery of using cleaning fluid and the recovery, programming makes it can tackle the system of a plurality of kinds.When program begins, at first set the effect (S302) of each mechanism of being installed.Then, according to its effect, investigate the situation (S311) of each jar.Simultaneously, check the supply request that whether has from the regeneration cleaning fluid of priming paint application roll cleaning device, when having, supply with regeneration cleaning fluid (S303) to priming paint application roll cleaning device.
(effect setting program)
Figure 10 is a subprogram of setting the effect of each mechanism.Program is carried out the setting (S352) of operation mode at first.Specifically, urge the operator to carry out the selection input of dual system (simple light), dual system (complicated heavy), three systems or four systems.Then, check the situation (S354) of employed each mechanism.Then, if all no problem in each mechanism (S356 Yes), then sets the driving beginning order (S360) of each mechanism, and makes program turn back to main program.In addition, (S356 No), then shows the situation (S358) of each mechanism, waits for the input of operation mode if there is certain problem in each mechanism.
(jar supervisory programme)
One example of the jar supervisory programme when Figure 11 represents to use four mechanisms.If do not use unwanted data, then be not limited to the situation of using four mechanisms especially, can also be used to use the situation of two mechanisms.At first, carry out initial value zero clearing (S411).Then, check whether regenerating tank A (13a) can store the use cleaning fluid (S412a) of recovery.(S412a Yes), produces a-signal (S416a), and notice can be stored in regenerating tank A (13a), transfers to the inspection of the situation of next regenerating tank B (13b) then in the time of can storing when being judged as.In addition, (S412a No), checks whether regenerating tank A (13a) is used cleaning fluid and is full of (S413a) in the time of can not storing in regenerating tank A (13a) when being judged as.(S413a No), is judged as because of can not the storing of improper reason, so send abnormal signal (S417a), shut down procedure safely in supposition when not being filled.If regenerating tank A (13a) is used cleaning fluid and is full of that (S413a Yes), then should will use cleaning fluid to be regenerated as the regeneration cleaning fluid by reproducer, so send the regenerated signal (S415a) of regenerating tank A (13a).Then, program jump is to the inspection of the situation of next regenerating tank B (13b).
At this, check whether regenerating tank B (13b) can store the use cleaning fluid (S412b) of recovery.(S412b Yes), produces B signal (S416b), and notice can be stored in regenerating tank B (13b), transfers to the inspection of the situation of next regenerating tank C (13c) then in the time of can storing when being judged as.In addition, (S412b No), checks whether regenerating tank B (13b) is used cleaning fluid and is full of (S413b) in the time of can not storing in regenerating tank B (13b) when being judged as.(S413b No), is judged as because of can not the storing of improper reason, so send abnormal signal (S417b), shut down procedure safely when not being filled.If regenerating tank B (13b) is used cleaning fluid and is full of that (S413b Yes), then should will use cleaning fluid to be regenerated as the regeneration cleaning fluid by reproducer, so send the regenerated signal (S415b) of regenerating tank B.Then, program jump is to the inspection of the situation of next regenerating tank C (13c).
Then, check whether regenerating tank C (13c) can store the use cleaning fluid (S412c) of recovery.(S412c Yes), produces C signal (S416c), and notice can be stored in regenerating tank C (13c), transfers to the inspection of the situation of next regenerating tank D (13d) then in the time of can storing when being judged as.In addition, (S412c No), checks whether regenerating tank C (13c) is used cleaning fluid and is full of (S413c) in the time of can not storing in regenerating tank C (13c) when being judged as.(S413c No), is judged as because of can not the storing of improper reason, so send abnormal signal (S417c), shut down procedure safely when not being filled.If regenerating tank C (13c) is used cleaning fluid and is full of that (S413c Yes), then should will use cleaning fluid to be regenerated as the regeneration cleaning fluid by reproducer, so send the regenerated signal (S415c) of regenerating tank C.Then, program jump is to the inspection of the situation of next regenerating tank D (13d).
Then, check whether regenerating tank D (13d) can store the use cleaning fluid (S412d) of recovery.(S412d Yes), produces D signal (S416d), and notice can be stored in regenerating tank D (13d), turns back to main program then in the time of can storing when being judged as.In addition, (S412d No), checks whether regenerating tank D (13d) is used cleaning fluid and is full of (S413d) in the time of can not storing in regenerating tank D (13d) when being judged as.(S413d No), is judged as because of can not the storing of improper reason, so send abnormal signal (S417d), shut down procedure safely when not being filled.If regenerating tank D (13d) is used cleaning fluid and is full of that (S413d Yes), then should will use cleaning fluid to be regenerated as the regeneration cleaning fluid by reproducer, so send the regenerated signal (S415d) of regenerating tank D.Then, program turns back to main program.
(regeneration cleaning solution supplying program)
Monitor that with jar (S311) has or not the inspection of regeneration cleaning solution supplying request and the supply (S303) of regeneration cleaning fluid concurrently.As shown in figure 12, whether investigation has the supply request (S552) from the regeneration cleaning fluid of priming paint application roll cleaning device, and (S552, No), then investigation has or not end signal (S553) if do not have.If have end signal (S553, Yes), end process (S554) then.(S553 No), then checks the supply request (S552) that whether has the regeneration cleaning fluid once more if do not have.If have regeneration cleaning fluid the supply request (S552 Yes), checks then whether cleaning fluid tank A can supply with the regeneration cleaning fluid of being stored (S505a), and (S505a No), then transfers to the inspection to cleaning fluid tank B if can not supply with.(S505a Yes), then carries out following step so that supply with the regeneration cleaning fluid from cleaning fluid tank A if can supply with.This step of each mechanism is basic identical with Fig. 7.At first, for from N 2 Gas supply device 71 pressure are carried N 2Gas is opened valve 72,33a, 34a (S506a).Thus, carry the regeneration cleaning fluid by pipeline (35a, 35) to priming paint application roll cleaning device pressure.During this period, monitor whether cleaning fluid tank A can supply with, for example monitor whether the regeneration cleaning fluid of cleaning fluid tank A is sufficient, whether there is not any unusual wait (S507a), in the time can't supplying with (S507a, No), valve- off 72,33a, 34a (S509a).In addition, even (S507a in the time can supplying with, Yes), also continue to monitor the supply request (S508a) of whether having sent the regeneration cleaning fluid, supply with request (S508a if sent, Yes), then continue to supply with the regeneration cleaning fluid, monitor whether cleaning fluid tank A can supply with regeneration cleaning fluid (S507a) simultaneously once more.If do not send (S508a, No), then valve- off 72,33a, 34a (S509a), and make program turn back to the initial step of supplying with the request supervisory programme.
(S505a No), checks whether cleaning fluid tank B can supply with regeneration cleaning fluid (S505b) when cleaning fluid tank A can't supply with the regeneration cleaning fluid.(S505b No), then transfers to the inspection to cleaning fluid tank C if cleaning fluid tank B can not supply with.(S505b Yes), then carries out following step so that supply with the regeneration cleaning fluid from cleaning fluid tank B if can supply with.This step among the B of this mechanism step basic and among the A of mechanism is identical.At first, for from N 2Gas supply device 71 pressure are carried N 2Gas is opened valve 72,33b, 34b (S506b).Thus, carry the regeneration cleaning fluid by pipeline 35b, 35 to priming paint application roll cleaning device pressure.During this period, monitor whether cleaning fluid tank B can supply with, for example monitor whether the regeneration cleaning fluid of cleaning fluid tank B is sufficient, whether there is not any unusual wait (S507b), in the time can't supplying with (S507b, No), valve-off 72,33b, 34b (S509b).In addition, even (S507b in the time can supplying with, Yes), also continue to monitor the supply request (S508b) of whether having sent the regeneration cleaning fluid, supply with request (S508b if sent, Yes), then continue to supply with the regeneration cleaning fluid, monitor whether cleaning fluid tank B can supply with regeneration cleaning fluid (S507b) simultaneously once more.If do not send (S508b, No), then valve-off 72,33b, 34b (S509b), and make program turn back to the initial step of supplying with the request supervisory programme.
(S505b No), checks whether cleaning fluid tank C can supply with regeneration cleaning fluid (S505c) when cleaning fluid tank B can't supply with the regeneration cleaning fluid.(S505c No), then transfers to the inspection for cleaning fluid tank D if cleaning fluid tank C can not supply with.(S505c Yes), then carries out following step so that supply with the regeneration cleaning fluid from cleaning fluid tank C if can supply with.This step among the C of this mechanism step basic and among the A of mechanism is identical.At first, for from N 2Gas supply device 71 pressure are carried N 2Gas is opened valve 72,33c, 34c (S506c).Thus, carry the regeneration cleaning fluid by pipeline 35c, 35 to priming paint application roll cleaning device pressure.During this period, monitor whether cleaning fluid tank C can supply with, for example monitor whether the regeneration cleaning fluid of cleaning fluid tank C is sufficient, whether there is not any unusual wait (S507c), in the time can't supplying with (S507c, No), valve-off 72,33c, 34c (S509c).In addition, even (S507c in the time can supplying with, Yes), also continue to monitor the supply request (S508c) of whether having sent the regeneration cleaning fluid, supply with request (S508c if sent, Yes), then continue to supply with the regeneration cleaning fluid, monitor whether cleaning fluid tank C can supply with regeneration cleaning fluid (S507c) simultaneously once more.If do not send (S508c, No), then valve-off 72,33c, 34c (S509c), and make program turn back to the initial step of supplying with the request supervisory programme.
(S505c No), checks whether cleaning fluid tank D can supply with regeneration cleaning fluid (S505d) when cleaning fluid tank C can't supply with the regeneration cleaning fluid.(S505d, No), then all cleaning fluid tanks all can not be supplied with, so send abnormality alarm (S520), arresting stop safely if cleaning fluid tank D can not supply with.(S505d Yes), then carries out following step so that supply with the regeneration cleaning fluid from cleaning fluid tank D if can supply with.This step among the D of this mechanism step basic and among the A of mechanism is identical.At first, for from N 2Gas supply device (71) pressure is carried N 2Gas is opened valve 72,33d, 34d (S506d).Thus, carry the regeneration cleaning fluid by pipeline 35d, 35 to priming paint application roll cleaning device pressure.During this period, monitor whether cleaning fluid tank D can supply with, for example monitor whether the regeneration cleaning fluid of cleaning fluid tank D is sufficient, whether there is not any unusual wait (S507d), in the time can't supplying with (S507d, No), valve-off 72,33d, 34d (S509d).In addition, even (S507d in the time can supplying with, Yes), also continue to monitor the supply request (S508d) of whether having sent the regeneration cleaning fluid, supply with request (S508d if sent, Yes), then continue to supply with the regeneration cleaning fluid, monitor whether cleaning fluid tank D can supply with regeneration cleaning fluid (S507d) simultaneously once more.If do not send (S508d, No), then valve-off 72,33d, 34d (S509d), and make program turn back to the initial step of supplying with the request supervisory programme.
(using the cleaning fluid reclaimer)
Return Fig. 9 once more jar supervision (S311) operation afterwards is described.By the jar supervisory programme, detected and in some regenerating tank, stored the use cleaning fluid that regenerate, the regenerating tank of pending regeneration such as have.According to this result, check and whether some regenerating tank have been sent the regenerated signal (S312) that expression should be regenerated.If sent, then handle (S313) and carry out regeneration processing described later by regeneration.And, no matter whether having or not regenerated signal, program is come dividing condition (S312-1) according to setting the operation mode of setting in the operation (S302) in the said structure effect.When operation mode is the light-duty pattern of dual system (S312-2), use the regeneration of the dual system of A of mechanism and C to handle.In addition, when operation mode is the heavy pattern of dual system (S312-3), the A of mechanism and B as one group, are organized the C of mechanism and D and to use as another, carry out the regeneration of dual system and handle.In addition, when operation mode is three system models (S312-5), for example use the regeneration of three systems of the A of mechanism, B and C to handle.In addition, when operation mode is the light-duty patterns of four systems (S312-7), use the regeneration of four systems of the A of mechanism, B, C and D to handle.Judge in the operation at this operation mode, carry out setting and management with each pattern matched productive temp time (takt time).Specifically, in the desirable time interval of optimal each operation of the operation mode of setting and setting and a circulation being made up of these operations etc., the line time of going forward side by side management is so that carry out each following operation according to this time interval or clock.
(the light-duty pattern of dual system)
When operation mode being set at the light-duty pattern of dual system (S312-2), whether program jump is the operation (S314) of the some signals of A/C to judging.Later operation is identical in fact with operation shown in Figure 4, so in this description will be omitted.At this, be made as with opening valve 12a or 12c (S315 or S335), send the commencing signal of regenerating tank A or C (13a or 13c).Thus, can notify the productive temp time of regenerating tank A or C, be used for the time management of various operations to control device.
(the heavy pattern of dual system)
When operation mode being set at the heavy pattern of dual system (S312-2), make a group with A of mechanism and B, make another group (S312-4) with C of mechanism and D.A of mechanism and B become one and turn round simultaneously, and C of mechanism and D also become one, so can play the identical effect of A/C with the light-duty pattern of above-mentioned dual system by two groups.Therefore, in this description will be omitted.
(three system models)
When operation mode being set at three system models (S312-5), a mechanism (for example D of mechanism) becomes shutdown (S312-6).Under this pattern, be equivalent to from four following system models, remove a mechanism, so in this description will be omitted.
(four system models)
When operation mode being set at three system models (S312-5), judge in the operation (S312-1) at operation mode, constitute the time set and the management of four operations of a circulation.That is,, perhaps, carry out the time set and the management of the operation of the best by in the process of using with priming paint application roll cleaning device fit ground, monitoring the flow of cleaning fluid according to the data of prior input.The purpose of this setting management is, makes recovery, storage, regeneration, each operation of supplying with and the so a series of operation optimization of cleaning of being undertaken by priming paint application roll cleaning device.Specifically, when having used the A of mechanism, B with regenerating tank A, B, C, D, C, D respectively, send the time management of a-signal, this a-signal to above-mentioned each operation begin trigger.For example,, should begin recovery process at T1, T2, T3, T4 respectively, then, send a-signal to S312-8, start the A of mechanism that triggers by a-signal from S312-1 at moment T1 if in the A of mechanism, B, C, D.And, by send B, C, D signal respectively at moment T2, T3, T4, can be at moment actuating mechanism B, C, D separately.Operation after the startup is identical in fact with the operation of Fig. 4 or the light-duty pattern of dual system, so omit detailed explanation.At this, make it open in some regenerating tank, begin to reclaim/store the valve 12a, the 12b that use cleaning fluid, 12c, 12d substantially in, send the commencing signal of this regenerating tank.Thus, can notify the beginning of the productive temp time of this regenerating tank, be used for the time management of various operations to control device.In addition, as shown in Figure 6, use cleaning fluid regenerated signal by separately (monitor in operation produce at the jar) beginning of regenerating, and automatically stop, so do not need to operate especially.Because easy spended time during general regeneration at the use cleaning fluid is handled is so the reason that becomes the processing speed that determines integral body is easily handled in this regeneration.In addition, can also be according to the flow process of Figure 12, and, automatically supply with the regeneration cleaning fluid to priming paint application roll cleaning device according to supplying with request signal, storing the state of each jar of regeneration cleaning fluid.
(using the cleaning fluid reproducer)
Figure 13 carries out diagram to the program that (S313) handled in regeneration.In regeneration is handled,, detect whether begun storage (S601) from each regenerating tank at first according to the initial opening operation of certain valve among valve 12a, 12b, 12c, the 12d.In addition, in this memory that is stored in control device constantly and is possessed, adjust the timing of later operation.At this, each mechanism that comprises the regenerating tank of having carried out the described opening operation that receives is carried out each operation that branch regenerates and handles.Below, the structure A that comprises regenerating tank A is described, but in comprising the structure of other regenerating tank, also carries out identical operation.
Behind the use cleaning fluid of the recovery that begins to store regenerating tank A, (S602 Yes) connects the switch (S603) of the heater 21a of regenerating tank A when having passed through preset time.Because heating up the use cleaning fluid of storage, the heating by heater needs spended time, so connect the switch of heater from early the time.This constantly can be according to storage capacity, heater capacity and other key element, in the input time decision of operation mode.It is constant to keep connecting heater button 21a, proceeds to store, and waits for input jar A regenerated signal (S604).Then, be full of (S413a) at regenerating tank A, when cleaning fluid tank A (26a) can store use cleaning fluid after the regeneration (S416a), send a jar A regenerated signal (S415a), (S604a Yes), transfers to next operation (S605) to receive this signal.
In subsequent processing,, and check (S605) such as other other items even when having guaranteed to regenerate the hold-up tank of needed, the use cleaning fluid that is reproduced, will check also whether common pipeline such as vavuum pump 27, valve, device etc. can use.Thus, in order to use above-mentioned common equipment etc., adjusting the concrete origin of an incident such as time of need staggering a little, in the time of can carrying out step for regeneration, in the operation afterwards, to the instruction of sending valve door operation etc. individually of the structure that comprises regenerating tank separately smooth-goingly.For example, when the jar of cleaning fluid or interim storage device are used in offhand storage except regenerating tank A (13a), perhaps when vavuum pump 27 is used for the decompression of other mechanisms, can wait for till being ready to store the jar or interim storage device or the end use of other mechanism that uses cleaning fluid, perhaps can stop to discharge the operation (S605) of using cleaning fluid from cleaning device.Be ready to, and can use common equipment the time, transferring to subsequent processing, valve-off 12a (S606a) opens valve 25a, 28a (S607a), opens vavuum pump 27 (S608a).Then, under the state of decompression, proceed distillation, check whether the use cleaning fluid among the regenerating tank A becomes for example (S609a) below 20%.(S609a in the time of Yes), closes heater (S610a), and valve-off 25a, 28a (S611a) below 20% when becoming.Thus, the depressurized system of regenerating tank A system and vavuum pump 27 is isolated, in order to revert to atmospheric pressure, open valve 23a and EXH leak valve, and close vavuum pump 27 (S612a).Then, open the valve 41a of the leak valve that is equivalent to regenerating tank A, discharge from use cleaning fluid residual residue (S613a) behind the regeneration cleaning fluid.When through the scheduled time, (S614a Yes), was made as the regenerated signal of jar A and closes (S615a) when deslagging was finished.Then, the various variablees that temporarily use are reset to initial value (S616a), program jump is to the top of the routine of regeneration processing.
(dual system time diagram)
Figure 14 is conceived to use the recovery and the regeneration of cleaning fluid especially, the time diagram when each mechanism has been represented to make the device running of embodiment 2.The longitudinal axis is the classification of the regenerating tank used in the mechanism of running, and transverse axis is the time.In addition, the combination of mechanism, time only are the examples that is used to illustrate, not delimit the scope of the invention.The used cleaning fluid that reclaims is carried out five equilibrium, be stored among the parallel regenerating tank A and B (13a, 13b) that is provided with.Be labeled as recovery in the drawings, but be the meaning of storing for each regenerating tank.In Figure 14, after beginning recovery, for example after 5 minutes, connect the switch of heater 21a, 21b, begin heating.Then, for example regenerating tank A and B (13a, 13b) become full after 20 minutes, valve-off 12a, 12b.Interim storage device 411 by the equipment as a supplement that possesses in the pipeline 11 continues to store the use cleaning fluid that reclaims.After about 5 minutes, parallel regenerating tank C and the D (13c, 13d) that is provided with also becomes the state that can store, this interim storage device 411 is connected to regenerating tank C and D, if regenerating tank C and D's (13c, 13d) is ready, carry the regeneration cleaning fluid of interim storage immediately to regenerating tank C and D (13c, 13d).
When getting back to regenerating tank A and B (13a, 13b) once more, from beginning to reclaim through after 20 minutes, because the predetermined temperature that the used cleaning fluid of heating of heater 21a, 21b reaches a high temperature is opened valve 25a, 25b and valve 28a, 28b, makes vavuum pump 27 carry out work.The cleaning fluid that evaporates gradually from regenerating tank A and B (13a, 13b) is cooled by cooling tank 24, and the cleaning fluid after the liquefaction is stored among cleaning fluid tank A and the B (26a, 26b).For example, when the use cleaning fluid among regenerating tank A and the B after 20 minutes (13a, 13b) became 20% left and right sides when reduction vaporization begins, valve-off 25a, 25b and valve 28a, 28b stopped vavuum pump 27.Then, open valve 23a, 23b, open also valve EXH, make regenerating tank A and B (13a, 13b) become atmospheric pressure as the leak valve of vavuum pump 27.Then, opened valve 41a, 41b about 10 minutes, discharge residue to waste liquid tank 42.Thus, carry out the heat extraction of regenerating tank A and B (13a, 13b) simultaneously.(from beginning through after 50 minutes) afterwards, valve-off 23a, 23b, 41a, 41b becoming can restart to store the time, open valve 12a, 12b, restart to store.At this moment, receive the use cleaning fluid of interim storage from interim storage device 411.
Carry out and regenerating tank A and the identical operation of B (13a, 13b) beginning secondary recovery/storage after 75 minutes too at the regenerating tank C and the D (13c, 13d) that have begun recovery/storage after begin through 25 minutes.So, sending end signal, before finishing by the end process among Fig. 9 (S321), the liquid regenerating unit turns round continuously.As mentioned above, when the recovery that begins to carry out in each mechanism, carry out step for regeneration according to certain productive temp.And the regenerating tank that comprises in each mechanism is used to next recovery process.On the other hand, the supply operation of regeneration cleaning fluid is automatically carried out in the requirement of the regeneration cleaning fluid of the situation of corresponding liquid regenerating unit and cleaning device one side, so only be careful the capacity of the conflict of common equipment and hold-up tank etc., need not to control especially.
At this, can make the capacity of regenerating tank A and B (13a, 13b) identical, also can make its capacity that the branch of size is arranged.At this moment, the branch that also makes corresponding each regenerating tank C and D (13c, 13d) that size is also arranged.In addition, also make corresponding cleaning fluid tank A, B, C, D become capacity corresponding respectively.So, when being used for small-scale cleaning device, can carry out based on as the B of mechanism of the combination of low capacity mechanism and recovery, storage, regeneration, the supply of the D of mechanism.In addition, when being used for medium scale cleaning device, can carry out based on as the A of mechanism of the combination of big capacity mechanism and recovery, storage, regeneration, the supply of C.In addition, when being used for large-scale cleaning device, can carry out based on whole A of mechanism, B, C, the recovery of D, storage, regeneration, supply.
(three system time figure)
Figure 15 is conceived to use the recovery and the regeneration of cleaning fluid especially, the time diagram when each mechanism has been represented to make the device running of embodiment 2.The longitudinal axis is the classification of the regenerating tank used in the mechanism of running, and transverse axis is the time.In addition, the combination of mechanism, time only are the examples that is used to illustrate, not delimit the scope of the invention.At this, four in-house D of mechanism are shut down, use other mechanism.The used cleaning fluid that reclaims is stored among parallel regenerating tank A, the B and the A of regenerating tank again (13a) in the C (13a, 13b, 13c) that is provided with.Be labeled as recovery in the drawings, but be the meaning of storing for each regenerating tank.
In Figure 15, after beginning recovery, for example after 5 minutes, connect the switch of heater 21a, begin heating.Then, for example regenerating tank A (13a) is filled to scheduled volume after 20 minutes, opens the valve 12b of regenerating tank B (13b), continues to store the use cleaning fluid that reclaims.During this period, also can store by two regenerating tank.And, after 25 minutes, close the valve 12a of regenerating tank A (13a), in regenerating tank A (13a), begin the regeneration of being undertaken by decompression distillation.In addition, after 25 minutes, open the heater 21b of regenerating tank B (13b).
And after 40 minutes, regenerating tank B (13b) is filled to scheduled volume, opens the valve 12c of regenerating tank C (13c), continues to store the use cleaning fluid that reclaims.During this period, also can store by two regenerating tank.And, after 45 minutes, close valve 25a, the 28a of regenerating tank A (13a), open valve 23a, open the EXH leak valve, and close vavuum pump 27, when becoming atmospheric pressure, open valve 41a at regenerating tank A (13a), discharge residue.In addition, after 45 minutes, close the valve 12b of regenerating tank B (13b) equally, in regenerating tank B (13b), begin the regeneration of being undertaken by decompression distillation.And, after 45 minutes, open the heater 21c of regenerating tank C (13c) equally.In regenerating tank B, regenerate by distillation under pressure, and the use cleaning fluid that in regenerating tank C, store to reclaim during, after 55 minutes, the residue of regenerating tank A (13a) is discharged and is finished, valve-off 41a becomes the state of the use cleaning fluid that can store recovery once more.
At this, in regenerating tank C (13c), after 60 minutes, stored the use cleaning fluid of scheduled volume, open the valve 12a of regenerating tank A (13a), continue to store the use cleaning fluid that reclaims.During this period, can also store by two regenerating tank.And, after 65 minutes, close valve 25b, the 28b of regenerating tank B (13b), open valve 23b, open the EXH leak valve, and close vavuum pump 27, when becoming atmospheric pressure, open valve 41b at regenerating tank B (13b), discharge residue.In addition, after 65 minutes, close the valve 12c of regenerating tank C (13c) equally, in regenerating tank C (13c), begin the regeneration of being undertaken by decompression distillation.And, after 65 minutes, open the heater 21b of regenerating tank B (13b) equally.
So, by using the A of mechanism, B, the C that possesses regenerating tank A, B and C (13a, 13b, 13c) respectively in order, before sending end signal, finishing by the end process (S321) among Fig. 9, the liquid regenerating unit turns round continuously.As mentioned above, during recovery in having begun each mechanism, carry out step for regeneration according to certain productive temp.And the regenerating tank that comprises in each mechanism is used to next recovery process when having discharged residue after regeneration.On the other hand, the supply operation of regeneration cleaning fluid is automatically carried out in the requirement of the regeneration cleaning fluid of the situation of corresponding liquid regenerating unit and cleaning device one side, so only be careful the capacity of the conflict of common equipment and hold-up tank etc., need not to control especially.
In addition; though have four mechanisms, can reclaim, store, regenerate, supply with by three mechanisms, so even certain mechanism breaks down; turn round by the mechanism that makes shutdown, also can not stop whole system ground and reclaim continuously, store, regenerate, supply with.In addition, can also form by turns according to the mode that a mechanism among four A of mechanism, B, C, the D is shut down in each circulation.
(the liquid regenerative system that comprises a plurality of mechanisms)
Then, according to Figure 16, the liquid regenerative system that comprises a plurality of mechanisms is described.Liquid regenerative system 300 be possess the priming paint application roll cleaning device 90 that processed parts cleaned by cleaning fluid, reclaim and regeneration from the liquid regenerating unit 310 of the used cleaning fluid of this device 90 and control these and install 90,310 control device 320, to using cleaning fluid to regenerate, can supply with the liquid regenerative system of this regeneration cleaning fluid continuously.
Liquid regenerating unit 310 has a plurality of mechanisms 318, and this mechanism 318 is by constituting with the lower part: recovery is used the reservoir 316 of the cleaning fluid after the recoverer 312 of cleaning fluid, the reproducing unit 314 that comprises the regenerating tank of storing the use cleaning fluid that reclaims, storage are regenerated, is supplied with the supply unit 317 of regeneration cleaning fluids to described priming paint application roll cleaning device 90.
Be connected with pipeline 11 via reclaim line 311 by cleaning fluid discharge pipe 97, priming paint application roll cleaning device 90 is connected with liquid regenerating unit 310.Pipeline 11 is connected with each mechanism 318.In addition, each mechanism 318 is connected with the pipeline 35 that is used to supply with, and is connected with priming paint application roll cleaning device 90 via feeding pipe 317.
Control device 320 is connected to can control priming paint application roll cleaning device 90 and liquid regenerating unit 310, and the recoverer 312 of each mechanism 318, reproducing unit 314, reservoir 316 and supply unit 317 have been connected to via comprising and wirelessly can control at interior communication line 322.
As shown in the figure, can directly use a plurality of mechanisms, so can easily tackle variation by the caused processing cleaning capacity of the combination of each mechanism with controlling.For example, when the capacity with each regenerating tank in each regenerating tank of these a plurality of mechanisms was made as V, the capacity of the mechanism's group that is made of two regenerating tank was 2 * V, and the capacity of the mechanism's group that is made of three regenerating tank is 3 * V.At this moment, the mechanism that is not used is shut down, when the unfavorable conditions such as fault of generation such as works, can be as preparation mechanism.In addition,, use, can also rotate successively the mechanism of standby in turn by cycle period by the mechanism that in next circulation, replaces in a last circulation, using about the mechanism that in a circulation, had not used.
(summary)
As mentioned above, if the technical specification of the such treating apparatus of priming paint application roll cleaning device and the technical specification of liquid regenerating unit are mated well, then can construct the use/regenerative system of best cleaning fluid.For example, the time of predicting the utilization again of the whole use amount of the cleaning fluid of priming paint application roll cleaning device, the time variation of use amount, the utilization again of regeneration cleaning fluid and the cleaning fluid of regenerating in advance changes, and is stored in the database explicitly with this treating apparatus in advance as technical specification.And, as the liquid regenerating unit, if the regeneration cleaning fluid of unit interval usually and regeneration disposal ability such as maximum output, for this reason and switching time of the capacity of the regenerating tank of needs and quantity, regenerating tank etc. technical specification and this liquid regenerating unit be stored in explicitly in the database, then can carry out the desirable selection of such treating apparatus of these priming paint application roll cleaning devices and liquid regenerating unit.
Claims (according to the modification of the 19th of treaty)
1. liquid regenerating unit, use cleaning fluid after it cleans processed parts from the treating apparatus recovery is used cleaning fluid, and it is regenerated, once more the cleaning fluid after treating apparatus supply regeneration cleaning fluid is promptly regenerated, this liquid regenerating unit is characterised in that
First and second mechanism that comprises recovery, regeneration and the regeneration cleaning solution supplying of carrying out described use cleaning fluid,
Each mechanism comprises:
Reclaim the unit, conjointly be provided with, described use cleaning fluid is reclaimed with described treating apparatus;
Regeneration unit conjointly is provided with described recovery unit, receives by the described use cleaning fluid of this recovery unit recovery and to it to regenerate;
Storage unit conjointly is provided with described regeneration unit, stores by the regeneration cleaning fluid after this regeneration unit regeneration; And
Feed unit conjointly is provided with described storage unit and described treating apparatus, supplies with described regeneration cleaning fluid to described treating apparatus,
When described first mechanism is reclaiming described use cleaning fluid, the use cleaning fluid that described second mechanism can regenerate and reclaim in advance.
2. liquid regenerating unit according to claim 1 is characterized in that,
In described first and second mechanism, further possesses the control module that described recovery unit, described regeneration unit, described storage unit and described feed unit are controlled.
3. liquid regenerating unit according to claim 2 is characterized in that,
Described first and described second mechanism in, described regeneration unit possesses the regenerating tank that the described use cleaning fluid that reclaims is stored and is arranged on the heater that can heat described use cleaning fluid in this regenerating tank.
4. liquid regenerating unit according to claim 3 is characterized in that,
Described first and described second mechanism in, further possess exhaust unit that be connected, that be used to carry out exhaust decompression with described regenerating tank top.
5. according to any one described liquid regenerating unit of claim 2 to 4, it is characterized in that,
Described first and described second mechanism in, described regeneration unit and/or described feed unit possess can detect the detecting unit of storing liquid measure.
6. liquid regenerating unit according to claim 5 is characterized in that,
Described control module can be controlled described recovery unit, described regeneration unit and described feed unit according to described first and the detected described use cleaning fluid of described detecting unit of described second mechanism and/or the amount of described regeneration cleaning fluid.
7. according to claim 3 or 4 described liquid regenerating units, it is characterized in that,
Described first and described second mechanism in, further possess the discarded unit of residue after the regeneration that is connected with described regenerating tank bottom, extract and discard described use cleaning fluid.
8. (after revising) liquid regenerating unit according to claim 1 is characterized in that,
Described first and described second mechanism in, the distillation fraction that described regeneration unit possesses described use cleaning fluid carries out cooling liquid, makes the cooling unit of described regeneration cleaning fluid.
9. (after revising) liquid regenerating unit according to claim 8 is characterized in that,
Further possess to described first and the described cooling unit of described second mechanism supply with the cooling water feed unit of cooling water.
10. (deletion)
11. a cleaning fluid renovation process reclaims use cleaning fluid after processed parts are cleaned from treating apparatus, regenerates, and supplies with the regeneration cleaning fluid to treating apparatus once more, this cleaning fluid renovation process is characterised in that,
Make up by a plurality of cleaning fluids regeneration handling processes the supply of the recovery of carrying out described use cleaning fluid and regeneration and described regeneration cleaning fluid, reclaim described use cleaning fluid continuously, regenerate, supply with described regeneration cleaning fluid to treating apparatus once more.
12. cleaning fluid renovation process according to claim 11 is characterized in that,
Described a plurality of cleaning fluid regeneration handling process comprises at least: the first pass that is made of the supply operation of recovery process, step for regeneration and the described regeneration cleaning fluid of described use cleaning fluid;
Second synchronous with described first pass, as to constitute by the recovery process of the supply operation of the step for regeneration of described use cleaning fluid, described regeneration cleaning fluid and the described use cleaning fluid flow process; And
The 3rd synchronous with described first pass, as to constitute by the recovery process and the step for regeneration of the supply operation of described regeneration cleaning fluid, described use cleaning fluid flow process.
13. cleaning fluid renovation process according to claim 12 is characterized in that,
Each operation of described first, second and the 3rd flow process can be controlled with the overlapping mode of the operation with before and after the corresponding corresponding operation of described object operation in another flow process by the operation before and after the object operation of certain flow process.
14. a liquid regenerative system, it has: the treating apparatus that cleans processed parts by cleaning fluid; And retrieve use cleaning fluid from this treating apparatus, and to its liquid regenerating unit of regenerating, make described use cleaning fluid and the circulation of regeneration cleaning fluid between this treating apparatus and this liquid regenerating unit continuously, this liquid regenerative system is characterised in that
Described liquid regenerating unit comprises first and second mechanism of the supply of the recovery, regeneration and the regeneration cleaning fluid that carry out described use cleaning fluid,
Each mechanism comprises:
Reclaim the unit, conjointly be provided with, reclaim described use cleaning fluid with described treating apparatus;
Regeneration unit conjointly is provided with described recovery unit, receives by this and reclaims the described use cleaning fluid that the unit reclaims, and it is regenerated;
Storage unit conjointly is provided with described regeneration unit, stores by the regeneration cleaning fluid after this regeneration unit regeneration;
Feed unit conjointly is provided with described storage unit and described treating apparatus, supplies with described regeneration cleaning fluid to described treating apparatus,
When described first mechanism is reclaiming described use cleaning fluid, the use cleaning fluid that described second mechanism can regenerate and reclaim in advance.
15. liquid regenerative system according to claim 14 is characterized in that,
The the 3rd and the 4th mechanism that further possesses same formation.
16. according to claim 14 or 15 described liquid regenerative systems, it is characterized in that,
Further possesses the control module that described treating apparatus and described liquid regenerating unit are controlled, this control module reciprocally communicates between described treating apparatus and described liquid regenerating unit, controls described recovery process, described step for regeneration, described supply operation in each mechanism of liquid regenerating unit simultaneously.
(17. deletion)
(18. deletion)
Statement when revising according to the 19th of treaty
8 of claims the correct " preceding regeneration unit " for " described regeneration unit ".
9 of claims the revise " claim 7 is described " for " claim 8 is described ", and what clear and definite " described cooling unit " be meant.
10 of claims the, 17 and 18 have been deleted.

Claims (18)

1. liquid regenerating unit, use cleaning fluid after it cleans processed parts from the treating apparatus recovery is used cleaning fluid, and it is regenerated, once more the cleaning fluid after treating apparatus supply regeneration cleaning fluid is promptly regenerated, this liquid regenerating unit is characterised in that
First and second mechanism that comprises recovery, regeneration and the regeneration cleaning solution supplying of carrying out described use cleaning fluid,
Each mechanism comprises:
Reclaim the unit, conjointly be provided with, described use cleaning fluid is reclaimed with described treating apparatus;
Regeneration unit conjointly is provided with described recovery unit, receives by the described use cleaning fluid of this recovery unit recovery and to it to regenerate;
Storage unit conjointly is provided with described regeneration unit, stores by the regeneration cleaning fluid after this regeneration unit regeneration; And
Feed unit conjointly is provided with described storage unit and described treating apparatus, supplies with described regeneration cleaning fluid to described treating apparatus,
When described first mechanism is reclaiming described use cleaning fluid, the use cleaning fluid that described second mechanism can regenerate and reclaim in advance.
2. liquid regenerating unit according to claim 1 is characterized in that,
In described first and second mechanism, further possesses the control module that described recovery unit, described regeneration unit, described storage unit and described feed unit are controlled.
3. liquid regenerating unit according to claim 2 is characterized in that,
Described first and described second mechanism in, described regeneration unit possesses the regenerating tank that the described use cleaning fluid that reclaims is stored and is arranged on the heater that can heat described use cleaning fluid in this regenerating tank.
4. liquid regenerating unit according to claim 3 is characterized in that,
Described first and described second mechanism in, further possess exhaust unit that be connected, that be used to carry out exhaust decompression with described regenerating tank top.
5. according to any one described liquid regenerating unit of claim 2 to 4, it is characterized in that,
Described first and described second mechanism in, described regeneration unit and/or described feed unit possess can detect the detecting unit of storing liquid measure.
6. liquid regenerating unit according to claim 5 is characterized in that,
Described control module can be controlled described recovery unit, described regeneration unit and described feed unit according to described first and the detected described use cleaning fluid of described detecting unit of described second mechanism and/or the amount of described regeneration cleaning fluid.
7. according to claim 3 or 4 described liquid regenerating units, it is characterized in that,
Described first and described second mechanism in, further possess the discarded unit of residue after the regeneration that is connected with described regenerating tank bottom, extract and discard described use cleaning fluid.
8. liquid regenerating unit according to claim 1 is characterized in that,
Described first and described second mechanism in, the distillation fraction that preceding regeneration unit possesses described use cleaning fluid carries out cooling liquid, makes the cooling unit of described regeneration cleaning fluid.
9. liquid regenerating unit according to claim 7 is characterized in that,
Further possess to described first and the described cooling unit of described second mechanism supply with the cooling water feed unit of cooling water.
10. cleaning fluid renovation process, this cleaning fluid renovation process uses liquid regenerating unit,
This liquid regenerating unit possesses: reclaim the unit, the use cleaning fluid of the treating apparatus that uses cleaning fluid is reclaimed; Regeneration unit is regenerated to the described use cleaning fluid that reclaims, and stores the regeneration cleaning fluid; Feed unit is supplied with described regeneration cleaning fluid to described treating apparatus; And control module, control described recovery unit, regeneration unit and described feed unit,
This cleaning fluid renovation process is characterised in that,
Comprise:
Supply with the operation of using cleaning fluid to described regeneration unit by described recovery unit;
Described use cleaning fluid is regenerated as the operation of regeneration cleaning fluid by described regeneration unit; And
Supply with the operation of described regeneration cleaning fluid by described feed unit to described treating apparatus,
Grasping the treatment situation of the cleaning fluid of each operation controls so that can carry out these operations simultaneously.
11. a cleaning fluid renovation process reclaims use cleaning fluid after processed parts are cleaned from treating apparatus, regenerates, and supplies with the regeneration cleaning fluid to treating apparatus once more, this cleaning fluid renovation process is characterised in that,
Make up by a plurality of cleaning fluids regeneration handling processes the supply of the recovery of carrying out described use cleaning fluid and regeneration and described regeneration cleaning fluid, reclaim described use cleaning fluid continuously, regenerate, supply with described regeneration cleaning fluid to treating apparatus once more.
12. cleaning fluid renovation process according to claim 11 is characterized in that,
Described a plurality of cleaning fluid regeneration handling process comprises at least: the first pass that is made of the supply operation of recovery process, step for regeneration and the described regeneration cleaning fluid of described use cleaning fluid;
Second synchronous with described first pass, as to constitute by the recovery process of the supply operation of the step for regeneration of described use cleaning fluid, described regeneration cleaning fluid and the described use cleaning fluid flow process; And
The 3rd synchronous with described first pass, as to constitute by the recovery process and the step for regeneration of the supply operation of described regeneration cleaning fluid, described use cleaning fluid flow process.
13. cleaning fluid renovation process according to claim 12 is characterized in that,
Each operation of described first, second and the 3rd flow process can be controlled with the overlapping mode of the operation with before and after the corresponding corresponding operation of described object operation in another flow process by the operation before and after the object operation of certain flow process.
14. a liquid regenerative system, it has: the treating apparatus that cleans processed parts by cleaning fluid; And retrieve use cleaning fluid from this treating apparatus, and to its liquid regenerating unit of regenerating, make described use cleaning fluid and the circulation of regeneration cleaning fluid between this treating apparatus and this liquid regenerating unit continuously, this liquid regenerative system is characterised in that
Described liquid regenerating unit comprises first and second mechanism of the supply of the recovery, regeneration and the regeneration cleaning fluid that carry out described use cleaning fluid,
Each mechanism comprises:
Reclaim the unit, conjointly be provided with, reclaim described use cleaning fluid with described treating apparatus;
Regeneration unit conjointly is provided with described recovery unit, receives by this and reclaims the described use cleaning fluid that the unit reclaims, and it is regenerated;
Storage unit conjointly is provided with described regeneration unit, stores by the regeneration cleaning fluid after this regeneration unit regeneration;
Feed unit conjointly is provided with described storage unit and described treating apparatus, supplies with described regeneration cleaning fluid to described treating apparatus,
When described first mechanism is reclaiming described use cleaning fluid, the use cleaning fluid that described second mechanism can regenerate and reclaim in advance.
15. liquid regenerative system according to claim 14 is characterized in that,
The the 3rd and the 4th mechanism that further possesses same formation.
16. according to claim 14 or 15 described liquid regenerative systems, it is characterized in that,
Further possesses the control module that described treating apparatus and described liquid regenerating unit are controlled, this control module reciprocally communicates between described treating apparatus and described liquid regenerating unit, controls described recovery process, described step for regeneration, described supply operation in each mechanism of liquid regenerating unit simultaneously.
17. a liquid regenerating unit is characterized in that,
Possess:
Reclaim the unit, reclaim the use cleaning fluid of the treating apparatus that uses cleaning fluid;
Regeneration unit is regenerated to the described use cleaning fluid that reclaims;
Feed unit is supplied with the cleaning fluid of being regenerated by described regeneration unit to described treating apparatus; And
Control module is controlled described recovery unit, regeneration unit and described feed unit.
18. liquid regenerating unit according to claim 17 is characterized in that,
Described control module uses prearranged signals according to the cleaning fluid from described treating apparatus, carries out the capacity adjustment between described recovery unit, described regeneration unit and the described feed unit.
CNA2007800483113A 2006-12-27 2007-12-27 Regenerating unit and renovation process Pending CN101600517A (en)

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TWI373362B (en) 2012-10-01
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WO2008081872A1 (en) 2008-07-10
TW200918147A (en) 2009-05-01

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