CN101586967A - Fiberguide grating sensor and manufacturing method thereof - Google Patents
Fiberguide grating sensor and manufacturing method thereof Download PDFInfo
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- CN101586967A CN101586967A CNA2009103041197A CN200910304119A CN101586967A CN 101586967 A CN101586967 A CN 101586967A CN A2009103041197 A CNA2009103041197 A CN A2009103041197A CN 200910304119 A CN200910304119 A CN 200910304119A CN 101586967 A CN101586967 A CN 101586967A
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Abstract
The present invention provides a fiberguide grating sensor, having advantages of easier demodulation, high measurement precision and stronger multiplexing capability. The fiberguide grating sensor includes an optical fiber and an optical fiber to be joined, the end face of the optical fiber is provided with a groove, the optical fiber is connected with the optical fiber to be joined through buttjunction, the groove is formed to a cavity, the optical fiber to be joined is formed to a waveguide diaphragm, and the waveguide diaphragm is processed with a plurality of periodicity microflutes. By preparing a periodic waveguide grating structure on the waveguide diaphragm, it is capable of forming a waveguide grating for reflecting a specific wavelength, the bandwidth of the reflected wavelength is narrow, and it is capable of obtaining the better measurement precision and the multiplexing capability; comparing with the common optical fiber grating, the waveguide grating with a cavity structure has a high sensitivity, and is capable of sensing the outside temperature, pressure and refractive index variation directly; by employing a whole optical fiber structure, the invention has a strong high temperature resistance capability, and it is capable of changing the range of the sensor by changing the dimension of the optical fiber and the diameter of the cavity.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, particularly relate to a kind of Fiberguide grating sensor and manufacture method thereof that can be used for measuring temperature, refractive index and pressure.
Technical background
In the extended familys of sensor, Fibre Optical Sensor has essential safety, be not subjected to electromagnetic interference (EMI), be convenient to networking and remote remote measurement, be suitable for series of advantages such as rugged surroundings, becomes one of mainstream development direction of new generation sensor technology gradually.
In Fibre Optical Sensor, as temperature, strain and tonometric sensor mainly are bragg grating (FBG) and enamel amber chamber interferometer, FBG because its temperature and other measured cross-sensitivity and under strain greatly spectrum distortion make its application be subjected to bigger restriction, but the characteristics that its cross-sensitivity is little are well suited for temperature, strain and pressure survey, but optical fiber Fabry-Perot sensor is to adopt conduit that two sections optical fiber are linked together at present, mechanical stability is bad, non-refractory, it is made mainly to depend on and makes by hand and encapsulate, and its yield rate and product repetition rate can not get guaranteeing.
JP2001280922 and WO2005121697 disclose a kind of Fabry-Perot sensor, owing to adopted etching process, have only multimode optical fiber just is suitable for, and the sensor cavity must be a multimode optical fiber, and production efficiency is lower, is difficult to realize extensive manufacturing; Etching process can't be finished the cutting to optical fiber, is difficult to make pressure transducer; An optical reflection face of Fabry-Perot sensor is the arc-shaped concave that forms through corrosion, and its reflecting properties is bad, causes the optical property of Fabry-Perot sensor relatively poor, sensor reflection strip contrast little (＜10dB), make measuring accuracy limited; Sensor one end is a multimode optical fiber, and sensor inserts that loss is very big, and optical property is relatively poor, with existing general single mode fiber to dock loss big.The interference fringe in enamel amber chamber is wide, and multiplexing capacity is not strong, the signal demodulated complex.
Summary of the invention
Technical matters to be solved by this invention provides a kind of better demodulation, measuring accuracy height, Fiberguide grating sensor that multiplexing capacity is stronger.
The present invention also will provide a kind of manufacture method of the sensor.
The technical scheme that technical solution problem of the present invention is adopted is: Fiberguide grating sensor, comprise optical fiber and connect optical fiber, end face at optical fiber has groove, optical fiber and quilt are connect optical fiber and are linked together by butt joint, described groove forms cavity, the described optical fiber that connect forms waveguide iris, a plurality of periodicity microflutes of processing on described waveguide iris.
The invention has the beneficial effects as follows: by fabrication cycle wave-guide grating structure on waveguide iris, can form the waveguide optical grating of reflection specific wavelength, the reflection wavelength bandwidth is narrower, thereby can have measuring accuracy and multiplexing capacity preferably; The waveguide optical grating that comprises cavity structure of the present invention is compared with the ordinary optic fibre grating, and is very high to the sensitivity of pressure, directly experiences ambient temperature, pressure and variations in refractive index; The present invention adopts all optical fibre structure, and high-temperature resistance is strong, and the size that can be by changing optical fiber and the diameter of cavity change the range of sensor.
Description of drawings
Fig. 1 is the formed optical fiber cut-open view of the step 1 of embodiment 1;
Fig. 2 is the formed optical fiber cut-open view of the step 2 of embodiment 1;
Fig. 3 is the cut-open view of the Fibre Optical Sensor of embodiment 1;
Fig. 4 is the cut-open view of the Fibre Optical Sensor of embodiment 2;
Fig. 5 is the formed optical fiber cut-open view of the step 1 of embodiment 3.
Embodiment
Embodiment 1:
The manufacture method of Fiberguide grating sensor may further comprise the steps:
Step 1, on optical fiber 1 end face with Laser Processing groove 2, as shown in Figure 1;
One section quilt of welding connects optical fiber outside the groove 2 of step 2, processing in step 1, and groove 2 forms chamber 5, as shown in Figure 2;
Step 3, the cutting of 5 outer face is connect optical fiber in the chamber, form waveguide iris 6, and then on waveguide iris 6 processing a plurality of periodicity microflutes 7, formation cycle wave-guide grating structure, just made Fiberguide grating sensor of the present invention, as shown in Figure 3, this Fibre Optical Sensor can be used for measuring temperature, refractive index and pressure and other parameters.
Embodiment 2:
On the basis of the step 3 of embodiment 1, also in steps 4, the protection optical fiber 8 of microflute is arranged, waveguide iris 6 is protected in waveguide iris 6 outer end welding end surface, just made Fiberguide grating sensor of the present invention, as shown in Figure 4.With respect to embodiment 1, the anti-external interference of this structure is stronger, does not have refractive index and pressure cross sensitivity.
Embodiment 3:
The manufacture method of Fiberguide grating sensor may further comprise the steps:
Step 1, on optical fiber 1 end face one section hollow optic fibre of welding, cut hollow optic fibre then, fibre core forms groove 2, as shown in Figure 5;
Claims (6)
1. Fiberguide grating sensor, comprise optical fiber (1) and connect optical fiber, end face at optical fiber (1) has groove (2), optical fiber (1) and quilt are connect optical fiber and are linked together by butt joint, it is characterized in that: described groove (2) forms cavity, the described optical fiber that connect forms waveguide iris (6), goes up processing a plurality of periodicity microflutes (7) at described waveguide iris (6).
2. Fiberguide grating sensor as claimed in claim 1 is characterized in that: be connected with the protection optical fiber (8) that end face has microflute in described waveguide iris (6) outer end.
3. Fiberguide grating sensor as claimed in claim 1 is characterized in that: described groove (2) is the fibre core of one section hollow optic fibre.
4. the method for making of Fiberguide grating sensor is characterized in that: may further comprise the steps: step 1, a processing groove (2) on optical fiber (1) end face;
One section quilt of welding connects optical fiber outside the groove (2) of step 2, processing in step 1, and groove (2) forms chamber (5);
Step 3, the outer face cutting of (5) is connect optical fiber in the chamber, forms waveguide iris (6), and then goes up processing a plurality of periodicity microflutes (7) at waveguide iris (6), forms the cycle wave-guide grating structure, has just made Fiberguide grating sensor.
5. the method for making of Fiberguide grating sensor as claimed in claim 4; it is characterized in that: on the basis of described step 3; also in steps 4, the protection optical fiber (8) of microflute is arranged, waveguide iris (6) is protected in waveguide iris (6) outer end welding end surface.
6. the method for making of Fiberguide grating sensor as claimed in claim 4, it is characterized in that: described groove (2) is the fibre core of one section hollow optic fibre.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2009103041197A CN101586967B (en) | 2009-07-08 | 2009-07-08 | Fiberguide grating sensor and manufacturing method thereof |
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| CN2009103041197A CN101586967B (en) | 2009-07-08 | 2009-07-08 | Fiberguide grating sensor and manufacturing method thereof |
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| CN101586967A true CN101586967A (en) | 2009-11-25 |
| CN101586967B CN101586967B (en) | 2011-05-25 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102279007A (en) * | 2011-06-29 | 2011-12-14 | 北京工业大学 | Optical fiber coupled wave guide raster sensor and preparation method thereof |
| CN102539057A (en) * | 2011-12-19 | 2012-07-04 | 深圳市盛喜路科技有限公司 | Manufacture method of optical fiber sensor |
| CN104880267A (en) * | 2015-05-28 | 2015-09-02 | 北京理工大学 | Fiber micro-nano Fabry-Perot interference type pressure sensor and manufacturing method thereof |
| CN108461206A (en) * | 2017-02-13 | 2018-08-28 | 保时捷股份公司 | Electric power transport element and system for insulating monitoring |
| CN109406043A (en) * | 2018-10-31 | 2019-03-01 | 上海理工大学 | A kind of tubular waveguide grating sensor and preparation method thereof |
| CN111229340A (en) * | 2020-01-17 | 2020-06-05 | 上海新微技术研发中心有限公司 | Method for manufacturing grating waveguide microfluid chip |
| CN111457950A (en) * | 2020-03-11 | 2020-07-28 | 复旦大学 | Fabry-Perot resonant cavity optical microbubble sensor and preparation method thereof |
| CN112747848A (en) * | 2018-07-02 | 2021-05-04 | 上海交通大学 | Pressure sensor based on flexible polymer waveguide |
| CN115355945A (en) * | 2022-08-22 | 2022-11-18 | 中国空气动力研究与发展中心超高速空气动力研究所 | Functional optical fiber grid preparation process method |
Family Cites Families (4)
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| CN101063623A (en) * | 2006-04-25 | 2007-10-31 | 湖南大学 | Optical fibre thin film grating temperature sensor |
| CN101034007A (en) * | 2007-01-24 | 2007-09-12 | 冉曾令 | Optical fiber Fabry-Perot sensor and manufacture method therefore |
| CN101424547B (en) * | 2008-10-27 | 2011-11-02 | 电子科技大学 | Resonance type optical fiber F-P sensor and method of producing same |
| CN101464408A (en) * | 2009-01-15 | 2009-06-24 | 电子科技大学 | Optical fiber Fabry-Perot refractive index sensor and method of producing the same |
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2009
- 2009-07-08 CN CN2009103041197A patent/CN101586967B/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102279007A (en) * | 2011-06-29 | 2011-12-14 | 北京工业大学 | Optical fiber coupled wave guide raster sensor and preparation method thereof |
| CN102539057A (en) * | 2011-12-19 | 2012-07-04 | 深圳市盛喜路科技有限公司 | Manufacture method of optical fiber sensor |
| CN102539057B (en) * | 2011-12-19 | 2014-11-12 | 深圳市盛喜路科技有限公司 | Manufacture method of optical fiber sensor |
| CN104880267A (en) * | 2015-05-28 | 2015-09-02 | 北京理工大学 | Fiber micro-nano Fabry-Perot interference type pressure sensor and manufacturing method thereof |
| CN108461206A (en) * | 2017-02-13 | 2018-08-28 | 保时捷股份公司 | Electric power transport element and system for insulating monitoring |
| CN112747848A (en) * | 2018-07-02 | 2021-05-04 | 上海交通大学 | Pressure sensor based on flexible polymer waveguide |
| CN109406043B (en) * | 2018-10-31 | 2020-11-24 | 上海理工大学 | Tubular waveguide grating sensor and preparation method thereof |
| CN109406043A (en) * | 2018-10-31 | 2019-03-01 | 上海理工大学 | A kind of tubular waveguide grating sensor and preparation method thereof |
| CN111229340A (en) * | 2020-01-17 | 2020-06-05 | 上海新微技术研发中心有限公司 | Method for manufacturing grating waveguide microfluid chip |
| CN111229340B (en) * | 2020-01-17 | 2021-11-23 | 上海新微技术研发中心有限公司 | Method for manufacturing grating waveguide microfluid chip |
| CN111457950A (en) * | 2020-03-11 | 2020-07-28 | 复旦大学 | Fabry-Perot resonant cavity optical microbubble sensor and preparation method thereof |
| CN111457950B (en) * | 2020-03-11 | 2021-08-20 | 复旦大学 | Fabry-Perot resonant cavity optical microbubble sensor and preparation method thereof |
| CN115355945A (en) * | 2022-08-22 | 2022-11-18 | 中国空气动力研究与发展中心超高速空气动力研究所 | Functional optical fiber grid preparation process method |
| CN115355945B (en) * | 2022-08-22 | 2024-03-29 | 中国空气动力研究与发展中心超高速空气动力研究所 | Functional optical fiber grid preparation process method |
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| CN101586967B (en) | 2011-05-25 |
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