CN101581860A - Thin film transistor liquid crystal display pixel structure and thin film transistor liquid crystal display array base plate - Google Patents

Thin film transistor liquid crystal display pixel structure and thin film transistor liquid crystal display array base plate Download PDF

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CN101581860A
CN101581860A CNA2008101063407A CN200810106340A CN101581860A CN 101581860 A CN101581860 A CN 101581860A CN A2008101063407 A CNA2008101063407 A CN A2008101063407A CN 200810106340 A CN200810106340 A CN 200810106340A CN 101581860 A CN101581860 A CN 101581860A
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metal layer
static elimination
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彭志龙
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BOE Technology Group Co Ltd
K Tronics Suzhou Technology Co Ltd
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Beijing BOE Optoelectronics Technology Co Ltd
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Abstract

本发明提供了一种薄膜晶体管液晶显示器像素结构,包括数据线、栅极扫描线、以及像素区域,数据线与栅极扫描线交叠形成交叠区域,其特征在于,该像素结构还包括静电消除区域,该静电消除区域依次由与栅极扫描线连接的栅极扫描线金属层、用于使所述栅极扫描线金属层与数据线金属层互不连接的隔绝层、以及与数据线连接的数据线金属层构成。本发明同时提供了一种薄膜晶体管液晶显示器阵列基板,该像素结构和阵列基板能够保护栅极扫描线和数据线的交叠区域,降低所述交叠区域发生击穿的概率。

Figure 200810106340

The present invention provides a pixel structure of a thin film transistor liquid crystal display, including data lines, gate scanning lines, and pixel areas, where the data lines overlap the gate scanning lines to form an overlapping area, and the pixel structure also includes electrostatic The elimination area, the static elimination area is sequentially composed of the gate scanning line metal layer connected to the gate scanning line, the isolation layer used to make the gate scanning line metal layer and the data line metal layer are not connected to each other, and the data line The connected data line metal layer is formed. The present invention also provides an array substrate of a thin film transistor liquid crystal display, the pixel structure and the array substrate can protect the overlapping area of the gate scanning line and the data line, and reduce the probability of breakdown in the overlapping area.

Figure 200810106340

Description

薄膜晶体管液晶显示器像素结构及阵列基板 Thin film transistor liquid crystal display pixel structure and array substrate

技术领域 technical field

本发明涉及薄膜晶体管(TFT)液晶显示器(LCD)阵列基板,尤其涉及薄膜晶体管液晶显示器像素结构及阵列基板。The invention relates to a thin film transistor (TFT) liquid crystal display (LCD) array substrate, in particular to a thin film transistor liquid crystal display pixel structure and an array substrate.

背景技术 Background technique

目前,世界已进入信息革命时代,显示技术及显示器件在信息技术的发展过程中占据了十分重要的地位。而由于平板显示具有重量轻、厚度薄、体积小、无辐射、不闪烁等优点,已成为显示技术发展的方向。At present, the world has entered the era of information revolution, and display technology and display devices occupy a very important position in the development of information technology. Since the flat panel display has the advantages of light weight, thin thickness, small size, no radiation, no flicker, etc., it has become the development direction of display technology.

在平板显示技术中,TFT LCD具有功耗低、无辐射等特点,因此,在平板显示器市场中占据了主导地位。In flat panel display technology, TFT LCD has the characteristics of low power consumption and no radiation, so it occupies a dominant position in the flat panel display market.

图1为传统TFT LCD阵列基板像素结构示意图,如图1所示,数据线2和栅极扫描线1存在交叠区域7。众所周知,在像素区外围的短路环(图中未示出),分别与图示的栅极扫描线1和数据线2相连,以防止栅极扫描线1和数据线2中的电荷不平衡,发生击穿。但是,该短路环(图中未示出)是在TFT LCD阵列基板的最后工艺中形成,在之前的工艺中并不能对栅极扫描线1和数据线2起保护作用,因此,在前工艺的基板搬送、清洗等工艺环节所造成的数据线2、以及栅极扫描线1上的静电累积,将无法得到释放平衡,在实际的生产中,常发生栅极扫描线1和数据线2的交叠区域7发生击穿的现象,甚至在沟道部分(图中未示出)发生击穿。FIG. 1 is a schematic diagram of a pixel structure of a traditional TFT LCD array substrate. As shown in FIG. 1 , there is an overlapping area 7 between the data line 2 and the gate scanning line 1 . As we all know, the short-circuit ring (not shown in the figure) on the periphery of the pixel area is respectively connected to the gate scanning line 1 and the data line 2 shown in the figure, so as to prevent the charge imbalance in the gate scanning line 1 and the data line 2, Breakdown occurs. However, the short circuit ring (not shown) is formed in the final process of the TFT LCD array substrate, and cannot protect the gate scanning line 1 and the data line 2 in the previous process. Therefore, the previous process The accumulation of static electricity on the data line 2 and the gate scanning line 1 caused by the substrate handling, cleaning and other process links will not be able to be released and balanced. In actual production, the grid scanning line 1 and the data line 2 often occur Breakdown occurs in the overlapping region 7, even in the channel portion (not shown in the figure).

一旦交叠区域7发生击穿,通常的维修方法是先用激光(Laser)断掉部分数据线2,后通过化学气相沉积(CVD)修复桥接,以使阵列基板能够正常使用,维修过程比较复杂。Once a breakdown occurs in the overlapping area 7, the usual maintenance method is to use a laser (Laser) to cut off part of the data line 2, and then repair the bridge by chemical vapor deposition (CVD), so that the array substrate can be used normally, and the maintenance process is relatively complicated. .

发明内容 Contents of the invention

有鉴于此,本发明的主要目的在于提供一种薄膜晶体管液晶显示器像素结构及阵列基板,能够保护栅极扫描线和数据线的交叠区域,降低所述交叠区域发生击穿的概率。In view of this, the main purpose of the present invention is to provide a thin film transistor liquid crystal display pixel structure and an array substrate, which can protect the overlapping area of the gate scanning line and the data line, and reduce the probability of breakdown in the overlapping area.

为达到上述目的,本发明的技术方案是这样实现的:In order to achieve the above object, technical solution of the present invention is achieved in that way:

本发明提供了一种薄膜晶体管液晶显示器像素结构,包括数据线、栅极扫描线、以及像素区域,数据线与栅极扫描线交叠形成交叠区域,该像素结构还包括静电消除区域,该静电消除区域依次由与栅极扫描线连接的栅极扫描线金属层、用于使所述栅极扫描线金属层与数据线金属层互不连接的隔绝层、以及与数据线连接的数据线金属层构成。The present invention provides a pixel structure of a thin film transistor liquid crystal display, including a data line, a gate scanning line, and a pixel area. The data line overlaps with the gate scanning line to form an overlapping area. The pixel structure also includes a static elimination area. The static elimination area is sequentially composed of the gate scan line metal layer connected to the gate scan line, the isolation layer for making the gate scan line metal layer and the data line metal layer not connected to each other, and the data line connected to the data line metal layers.

其中,所述静电消除区域中栅极扫描线金属层与数据线金属层之间的距离,不大于交叠区域中数据线与栅极扫描线之间的距离。Wherein, the distance between the metal layer of the gate scan line and the metal layer of the data line in the static elimination area is not greater than the distance between the data line and the gate scan line in the overlapping area.

所述隔绝层为:位于栅极扫描线金属层与数据线金属层之间的栅极绝缘层;或者,The isolation layer is: a gate insulating layer located between the metal layer of the gate scan line and the metal layer of the data line; or,

所述隔绝层为:位于所述栅极扫描线金属层之上的栅极绝缘层、以及位于栅极绝缘层与数据线金属层之间的有源层组合成的复合层。The insulating layer is a composite layer composed of a gate insulating layer located on the gate scanning line metal layer and an active layer located between the gate insulating layer and the data line metal layer.

所述静电消除区域位于数据线与栅极扫描线的交叠区域附近。The static elimination area is located near the overlapping area of the data line and the gate scanning line.

像素结构中包括至少一个所述静电消除区域。The pixel structure includes at least one static elimination area.

本发明同时提供了一种薄膜晶体管液晶显示器阵列基板,包括栅极扫描线、数据线、以及像素区域,数据线与栅极扫描线交叠形成交叠区域,该阵列基板还包括静电消除区域,所述静电消除区域由与栅极扫描线连接的栅极扫描线金属层、用于使所述栅极扫描线金属层与数据线金属层互不连接的隔绝层、以及与数据线连接的数据线金属层构成。The present invention also provides an array substrate of a thin film transistor liquid crystal display, including a gate scanning line, a data line, and a pixel area, the data line and the gate scanning line overlap to form an overlapping area, and the array substrate also includes a static elimination area, The static elimination area is composed of a gate scan line metal layer connected to the gate scan line, an isolation layer for making the gate scan line metal layer and the data line metal layer not connected to each other, and a data line connected to the data line. Line metal layer composition.

其中,每个栅极扫描线与数据线的交叠区域附近包括至少一个所述静电消除区域。Wherein, at least one static elimination area is included near the overlapping area of each gate scanning line and data line.

每条数据线连接至少一个所述静电消除区域、且每条栅极扫描线连接至少一个所述静电消除区域。Each data line is connected to at least one static elimination area, and each gate scan line is connected to at least one static elimination area.

所述静电消除区域中栅极扫描线金属层与数据线金属层之间的距离,不大于所述交叠区域中数据线与栅极扫描线之间的距离。The distance between the metal layer of the gate scan line and the metal layer of the data line in the static elimination area is not greater than the distance between the data line and the gate scan line in the overlapping area.

本发明所提供的像素结构及阵列基板,在数据线和栅极扫描线交叠区域附近,增加静电消除区域,该静电消除区域的结构与所述交叠区域的结构可以相同,也可以不同,静电消除区域中的栅极扫描线金属层与数据线金属层互不连接,其中,当栅极扫描线金属层与数据线金属层之间的距离与交叠区域中数据线与栅极扫描线之间的距离相同时,在发生静电累积造成栅极扫描线和数据线上的电荷不平衡时,通过所述静电消除区域,可以降低所述交叠区域发生击穿的概率;或者,当栅极扫描线金属层与数据线金属层之间的距离比交叠区域中数据线与栅极扫描线之间的距离小时,静电消除区域较所述交叠区域更容易发生击穿,这时,在发生静电累积造成栅极扫描线和数据线上的电荷不平衡时,首先由增加的静电消除区域发生击穿,更好的降低了所述交叠区域发生击穿的概率。In the pixel structure and array substrate provided by the present invention, a static elimination area is added near the overlapping area of the data line and the gate scanning line. The structure of the static elimination area may be the same as or different from that of the overlapping area. The gate scanning line metal layer and the data line metal layer in the static elimination area are not connected to each other, wherein, when the distance between the gate scanning line metal layer and the data line metal layer is the same as the data line and the gate scanning line in the overlapping area When the distance between them is the same, when the charge imbalance between the gate scanning line and the data line is caused by static electricity accumulation, the probability of breakdown in the overlapping area can be reduced through the static elimination area; or, when the gate The distance between the electrode scan line metal layer and the data line metal layer is smaller than the distance between the data line and the gate scan line in the overlapping area, and the static electricity elimination area is more prone to breakdown than the overlapping area. At this time, When the charge imbalance between the gate scanning line and the data line is caused by the accumulation of static electricity, the increased static elimination area first causes breakdown, which better reduces the probability of breakdown in the overlapping area.

而且,一旦所述静电消除区域发生击穿,由于静电消除区域在像素结构中并不起任何作用,只需在后续检测维修工艺中,使用Laser,断开该静电消除区域与数据线、以及栅极扫描线的连接即可,维修简单。Moreover, once the static elimination area breaks down, since the static elimination area does not play any role in the pixel structure, it is only necessary to use a Laser to disconnect the static elimination area from the data lines and gates in the subsequent inspection and maintenance process. The connection of the pole scanning line is enough, and the maintenance is simple.

附图说明 Description of drawings

图1为现有技术中传统TFT LCD阵列基板像素结构示意图;Fig. 1 is a schematic diagram of the pixel structure of a traditional TFT LCD array substrate in the prior art;

图2为本发明TFT LCD阵列基板像素结构示意图;Fig. 2 is the schematic diagram of pixel structure of TFT LCD array substrate of the present invention;

图3为A-A截面示意图;Fig. 3 is A-A sectional schematic diagram;

图4为B-B截面示意图;Fig. 4 is B-B section schematic diagram;

图5为图2所示TFT LCD阵列基板像素结构的制造方法流程示意图。5 is a schematic flow chart of a manufacturing method for the pixel structure of the TFT LCD array substrate shown in FIG. 2 .

附图标记:1、栅极扫描线;2、数据线;3、有源层;4、静电消除区域;5、栅极绝缘层;6、钝化层;7、交叠区域。Reference signs: 1. Gate scanning line; 2. Data line; 3. Active layer; 4. Static elimination area; 5. Gate insulating layer; 6. Passivation layer; 7. Overlapping area.

具体实施方式 Detailed ways

本发明的基本思想是:在数据线和栅极扫描线交叠区域附近,增加一个静电消除区域,该静电消除区域中栅极扫描线金属层与数据线金属层通过隔绝层互不连接。The basic idea of the present invention is to add a static elimination area near the overlapping area of the data line and the gate scanning line, and in the static elimination area, the metal layer of the gate scanning line and the metal layer of the data line are not connected to each other through the isolation layer.

以下,通过具体实施例结合附图详细说明本发明TFT LCD像素结构及阵列基板的实现。Hereinafter, the implementation of the TFT LCD pixel structure and array substrate of the present invention will be described in detail through specific embodiments in conjunction with the accompanying drawings.

图2为本发明TFT LCD阵列基板像素结构示意图,如图2所示,相邻的两条数据线2和相邻的两条栅极扫描线1相互交叠,定义出一个像素区域,每个像素结构均包括数据线2、栅极扫描线1以及所述像素区域,具体像素区域中包括何种结构属于公知技术,这里不再赘述。在本发明中,在数据线2和栅极扫描线1的交叠区域7附近,增加另外一个静电消除区域4。静电消除区域4的A-A截面图如图3所示,由栅极扫描线金属层(与栅极扫描线1相连)、栅极绝缘层5、以及数据线金属层(与数据线2相连)构成。对比如图4所示的现有技术以及本发明所提供的像素结构中数据线2和栅极扫描线1的交叠区域7的B-B截面图,交叠区域7在数据线2和栅极扫描线1之间形成有有源层3和栅极绝缘层5,而静电消除区域4在栅极扫描线金属层和数据线金属层之间,只有栅极绝缘层5(厚度一般为2000~8000埃),而没有有源层3(厚度一般为500~5000埃),栅极扫描线金属层和数据线金属层之间的距离更短,因此,与数据线2和栅极扫描线1的交叠区域7相比,增加的静电消除区域4为更易发生击穿的区域。因此,当发生静电累积,造成栅极扫描线1和数据线2电荷不平衡时,首先是根据本发明方案提供的静电消除区域4发生击穿。一旦静电消除区域4发生击穿后,在后续检测维修工艺中,使用Laser,断开该静电消除区域4与栅极扫描线1、以及数据线2的连接即可,维修简单。Figure 2 is a schematic diagram of the pixel structure of the TFT LCD array substrate of the present invention, as shown in Figure 2, two adjacent data lines 2 and two adjacent gate scanning lines 1 overlap each other to define a pixel area, each Each pixel structure includes a data line 2 , a gate scanning line 1 and the pixel area. What kind of structure is included in the specific pixel area belongs to the known technology and will not be repeated here. In the present invention, another static elimination region 4 is added near the overlapping region 7 of the data line 2 and the gate scanning line 1 . The A-A cross-sectional view of the static elimination area 4 is shown in Figure 3, which is composed of a gate scan line metal layer (connected to the gate scan line 1), a gate insulating layer 5, and a data line metal layer (connected to the data line 2) . Comparing the prior art shown in FIG. 4 and the B-B sectional view of the overlapping area 7 of the data line 2 and the gate scanning line 1 in the pixel structure provided by the present invention, the overlapping area 7 is between the data line 2 and the gate scanning line An active layer 3 and a gate insulating layer 5 are formed between the lines 1, while the static elimination region 4 is between the metal layer of the gate scanning line and the metal layer of the data line, and only the gate insulating layer 5 (thickness is generally 2000-8000 Angstroms), without active layer 3 (thickness is generally 500 ~ 5000 Angstroms), the distance between the metal layer of the gate scanning line and the metal layer of the data line is shorter, therefore, the distance between the data line 2 and the gate scanning line 1 Compared with the overlapping area 7, the increased static elimination area 4 is an area more prone to breakdown. Therefore, when the accumulation of static electricity occurs, resulting in charge imbalance between the gate scanning line 1 and the data line 2, the static electricity eliminating region 4 provided according to the solution of the present invention first breaks down. Once the static elimination area 4 breaks down, in the subsequent detection and maintenance process, use a Laser to disconnect the static elimination area 4 from the gate scanning line 1 and the data line 2, and the maintenance is simple.

其中,图2所示的静电消除区域4的结构也可以与交叠区域7的结构相同,即:栅极扫描线金属层与数据线金属层之间包括栅极绝缘层5以及有源层3,这时,只要保证栅极扫描线金属层与数据线金属层之间的距离不大于交叠区域7中栅极扫描线1与数据线2之间的距离,同样可以完成本发明的发明目的。但是,当栅极扫描线金属层与数据线金属层之间的距离小于交叠区域7中栅极扫描线1与数据线2之间的距离时,本发明所述的静电消除区域4将较交叠区域7更容易发生击穿,能够取得更好的发明效果。Wherein, the structure of the static elimination region 4 shown in FIG. 2 may also be the same as that of the overlapping region 7, that is, the gate insulating layer 5 and the active layer 3 are included between the metal layer of the gate scan line and the metal layer of the data line. , at this time, as long as the distance between the metal layer of the gate scanning line and the metal layer of the data line is not greater than the distance between the gate scanning line 1 and the data line 2 in the overlapping area 7, the invention object of the present invention can also be achieved . However, when the distance between the gate scanning line metal layer and the data line metal layer is smaller than the distance between the gate scanning line 1 and the data line 2 in the overlapping area 7, the static electricity elimination area 4 described in the present invention will be relatively small. The overlapping region 7 is more prone to breakdown and can achieve better inventive effects.

同样的,在现有技术中,数据线2与栅极扫描线1的交叠区域7中,栅极扫描线1与数据线2之间也可以不包括有源层3,此时交叠区域7的结构与图3所示的静电消除区域4的结构相同,这时,本发明中的静电消除区域4仍然可以使用图3所示的结构,只要保证静电消除区域4中的栅极绝缘层的厚度不大于交叠区域中栅极绝缘层的厚度即可,而且,静电消除区域4中的栅极绝缘层的厚度小于交叠区域中栅极绝缘层的厚度时,能够取得更好的发明效果。Similarly, in the prior art, in the overlapping region 7 of the data line 2 and the gate scanning line 1, the active layer 3 may not be included between the gate scanning line 1 and the data line 2, and at this time the overlapping region The structure of 7 is the same as that of the static elimination region 4 shown in FIG. 3. At this time, the static elimination region 4 in the present invention can still use the structure shown in FIG. The thickness of the gate insulating layer in the overlapping region can be no greater than the thickness of the gate insulating layer in the overlapping region, and when the thickness of the gate insulating layer in the static elimination region 4 is smaller than the thickness of the gate insulating layer in the overlapping region, a better invention can be achieved. Effect.

另外,在每个交叠区域7附近最好均增加所述静电消除区域4,以保护每一个交叠区域7,增加的静电消除区域4的个数不限,但是为了保证像素开口率,最好为1个。或者,当图2所示的像素结构应用于阵列基板时,并非一定每个像素结构均包括至少1个静电消除区域4,也可以每个栅极扫描线1连接至少一个静电消除区域4、且每个数据线2连接至少一个静电消除区域4,这样,也可以较好的完成保护交叠区域7的目的。而且,所述静电消除区域4虽然在图2中给出了具体形状。但是,在实际应用中,并不只限于图2中所示的形状,只要静电消除区域4的栅极扫描线金属层与对应的栅极扫描线1相连,数据线金属层与对应的数据线2相连即可。In addition, it is preferable to increase the static elimination area 4 near each overlapping area 7 to protect each overlapping area 7. The number of the increased static elimination area 4 is not limited, but in order to ensure the pixel aperture ratio, the best Good for 1. Alternatively, when the pixel structure shown in FIG. 2 is applied to an array substrate, it is not necessary that each pixel structure includes at least one static elimination region 4, and each gate scanning line 1 may be connected to at least one static elimination region 4, and Each data line 2 is connected to at least one static elimination area 4, so that the purpose of protecting the overlapping area 7 can also be better achieved. Moreover, although the static electricity elimination region 4 has given a specific shape in FIG. 2 . However, in practical application, it is not limited to the shape shown in FIG. Just connect.

从图3和图4可知在本发明方案所提供的静电消除区域4的数据线金属层之上、以及现有技术中的数据线2之上还覆盖有钝化层6。It can be seen from FIG. 3 and FIG. 4 that a passivation layer 6 is also covered on the metal layer of the data line in the static elimination area 4 provided by the solution of the present invention, and on the data line 2 in the prior art.

以下,将结合图2和图3,详细描述图2所示的本发明TFT LCD阵列基板像素结构的具体制造方法,如图5所示,该方法包括:Below, with reference to Fig. 2 and Fig. 3, describe in detail the specific manufacturing method of the TFT LCD array substrate pixel structure of the present invention shown in Fig. 2, as shown in Fig. 5, this method comprises:

步骤501:在玻璃基板上沉积金属薄膜,通过光刻工艺和蚀刻工艺等构图工艺形成栅极扫描线1、TFT的栅电极(图2中未示出)、公共电极信号线(图2中未示出)、以及静电消除区域4的栅极扫描线金属层,静电消除区域4的栅极扫描线金属层和静电消除区域4对应的栅极扫描线连接,如图2所示。Step 501: Deposit a metal thin film on a glass substrate, and form a gate scanning line 1, a gate electrode of a TFT (not shown in FIG. 2 ), and a common electrode signal line (not shown in FIG. ), and the metal layer of the gate scanning line in the static elimination area 4, the metal layer of the gate scanning line in the static elimination area 4 is connected to the corresponding gate scanning line of the static elimination area 4, as shown in FIG. 2 .

其中,具体如何沉积金属薄膜、如何进行光刻和蚀刻在现有技术中已非常公知,这里不再赘述。Wherein, how to deposit a metal thin film, how to perform photolithography and etching are well known in the prior art, and will not be repeated here.

其中,本步骤中的金属薄膜具体由何种材料沉积而成也属于公知技术,这里不再赘述。Wherein, what kind of material the metal thin film is deposited in this step also belongs to the known technology, and will not be repeated here.

步骤502:在完成步骤501的基板上沉积栅极绝缘层5。Step 502: depositing a gate insulating layer 5 on the substrate after step 501 is completed.

步骤503:在完成步骤502的基板上连续沉积非晶硅薄膜和n+非晶硅薄膜,通过光刻工艺和蚀刻工艺等构图工艺在TFT栅电极上方、数据线2与栅极扫描线1的交叠区域7,形成非晶硅层和n+非晶硅层,即有源层3。其中,蚀刻掉静电消除区域4上的非晶硅薄膜和n+非晶硅薄膜,以保证静电消除区域4的栅极扫描线金属层和数据线金属层距离,小于交叠区域7中栅极扫描线1与数据线2的距离,更易于击穿。Step 503: Continuously deposit an amorphous silicon thin film and an n+ amorphous silicon thin film on the substrate completed in step 502, and through patterning processes such as photolithography and etching, etc. The overlapping region 7 forms an amorphous silicon layer and an n+ amorphous silicon layer, that is, the active layer 3 . Wherein, the amorphous silicon film and the n+ amorphous silicon film on the static elimination area 4 are etched away, so as to ensure that the distance between the metal layer of the gate scan line and the metal layer of the data line in the static elimination area 4 is smaller than that of the gate scan line in the overlapping area 7 The distance between line 1 and data line 2 is easier to break down.

其中,具体如何沉积非晶硅薄膜和n+非晶硅薄膜在现有技术中已非常公知,这里不再赘述。Wherein, how to deposit the amorphous silicon thin film and the n+ amorphous silicon thin film is very well known in the prior art, and will not be repeated here.

步骤504:在完成步骤503的基板上沉积金属薄膜,通过光刻工艺和蚀刻工艺等构图工艺形成数据线2、TFT的源电极和漏电极(图2中未示出)、以及静电消除区域4的数据线金属层,静电消除区域4的数据线金属层与静电消除区域4对应的数据线2连接,如图2所示。Step 504: Deposit a metal thin film on the substrate that completed step 503, and form the data line 2, the source electrode and the drain electrode of the TFT (not shown in FIG. 2 ), and the static elimination region 4 through patterning processes such as photolithography process and etching process The data line metal layer of the static elimination area 4 is connected to the data line 2 corresponding to the static elimination area 4, as shown in FIG. 2 .

其中,本步骤中的金属薄膜具体由何种材料沉积而成在现有技术中已非常公知,这里不再赘述。Wherein, the specific material from which the metal thin film is deposited in this step is well known in the prior art, and will not be repeated here.

步骤505:在完成步骤504的基板上沉积钝化层6,通过光刻工艺和蚀刻工艺等构图工艺形成钝化层过孔,用以连接像素电极与TFT的漏电极。Step 505 : Deposit a passivation layer 6 on the substrate after step 504 , and form a passivation layer via hole through patterning processes such as photolithography and etching to connect the pixel electrode and the drain electrode of the TFT.

其中,具体使用何种材料、以及如何沉积钝化层在现有技术中已非常公知,这里不再赘述。Wherein, which material to use and how to deposit the passivation layer are well known in the prior art, and will not be repeated here.

步骤506:在完成步骤505的基板上沉积像素电极层,通过光刻工艺和蚀刻工艺等构图工艺形成像素电极。Step 506: Deposit a pixel electrode layer on the substrate after step 505, and form the pixel electrode through patterning processes such as photolithography process and etching process.

其中,具体使用何种材料、以及如何沉积所述像素电极层在现有技术中已非常公知,这里不再赘述。Wherein, which material to use and how to deposit the pixel electrode layer are well known in the prior art, and will not be repeated here.

以上所述,仅为本发明的较佳实施例而已,并非用于限定本发明的保护范围。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention.

Claims (9)

1. The pixel structure of the thin film transistor liquid crystal display comprises a data line, a grid scanning line and a pixel area, wherein the data line and the grid scanning line are overlapped to form an overlapped area.
2. The pixel structure according to claim 1, wherein a distance between the gate scan line metal layer and the data line metal layer in the static elimination region is not greater than a distance between the data line and the gate scan line in the overlap region.
3. The pixel structure of claim 2, wherein the insulating layer is: the grid insulation layer is positioned between the grid scanning line metal layer and the data line metal layer; or,
the isolation layer is: the composite layer is composed of a grid insulation layer positioned on the grid scanning line metal layer and an active layer positioned between the grid insulation layer and the data line metal layer.
4. The pixel structure according to any one of claims 1 to 3, wherein the static elimination region is located near an overlapping region of the data line and the gate scan line.
5. A pixel structure according to any one of claims 1 to 3, wherein at least one of said static charge eliminating regions is included in the pixel structure.
6. The array substrate of the thin film transistor liquid crystal display comprises grid scanning lines, data lines and a pixel area, wherein the data lines and the grid scanning lines are overlapped to form an overlapped area.
7. The array substrate of claim 6, wherein the vicinity of the overlapping region of each gate scan line and data line comprises at least one static elimination region.
8. The array substrate of claim 7, wherein each data line is connected to at least one of the static elimination regions, and each gate scan line is connected to at least one of the static elimination regions.
9. The array substrate of any one of claims 5 to 7, wherein the distance between the gate scan line metal layer and the data line metal layer in the static elimination region is not greater than the distance between the data line and the gate scan line in the overlap region.
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