CN101569833B - Purifying device for washing organic gas in low-concentration and wet-type ways - Google Patents
Purifying device for washing organic gas in low-concentration and wet-type ways Download PDFInfo
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- CN101569833B CN101569833B CN2008100944455A CN200810094445A CN101569833B CN 101569833 B CN101569833 B CN 101569833B CN 2008100944455 A CN2008100944455 A CN 2008100944455A CN 200810094445 A CN200810094445 A CN 200810094445A CN 101569833 B CN101569833 B CN 101569833B
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- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Abstract
The invention relates to a purifying device for washing organic gas in low-temperature and wet-type ways. The purifying device comprises a washing tower, an oxidation treatment unit and a catalyst adsorption unit, wherein the washing tower is used for receiving organic gas and transmitting organic pollutants in the organic gas into washing liquid; the oxidation treatment unit is used for treating the washing liquid of the washing tower and leading oxidizing agent into the washing liquid for oxidation reaction, and the oxidation treatment unit further comprises a circulating water pump for pumping the washing liquid to be purified, an oxidizing agent container used for storing the oxidizing agent to be added, and a mixer used for mixing the oxidizing agent and the washing liquid; and the catalyst adsorption unit provides a porous catalyst adsorption bed so as to accelerate the oxidation of the oxidizing agent. In the purifying device, organic pollutants are transferred into the liquid-phase washing liquid from the gas phase, and then the pollutants in the washing liquid are further effectively purified, treated and controlled according to the concentration of the pollutants in the washing liquid, thereby the consumption of the washing liquid can be reduced, the gas leakage amount of the pollutant in the washing liquid is reduced, and the treatment efficiency of the organic pollutants can be promoted.
Description
Technical field
The present invention relates to a kind of purifier, particularly relate to a kind of purifier of washing organic gas in low-temperature and wet-type ways.
Background technology
Progress along with science and technology, semiconductor processing procedure live width size constantly requires to drop to 40 or 65 how below the rice, and then after how entering the metric system journey epoch, demand focus for high-order manufacture of semiconductor clean room environment pollutant, be transferred to the organic gas molecule in space pollutant of more unmanageable volatility (AMC from the gas molecule in space pollutant of known microparticle pollution and inorganic acid alkali, Airborne Molecular Contamination), on the acceptance rate of the product of the large scale TFT-LCD that causes in high-order processing procedure wafer factory and similar techniques (Thin-Film Transistor Liquid-Crgstal Display) panel factory promoted, the control of the organic gas molecule in space pollutant of this volatility had been one of each big factory key technology.
Except manufacture of semiconductor, all continue to face the problem of similar organic gas molecular contamination in living environment face, operating environment safety and environmental protection etc., also therefore the use of organic gas purification technology is more and more general.Contain a large amount of volatile organic matters (volatile organic compounds in the TFT-LCD panel factory of manufacture of semiconductor wafer factory and similar techniques and the makers' waste gas of solar chip, VOCs), as alcohols: isopropyl alcohol (IPA), n-butanol (NBA), alcohol ether; Ether-ether class: propylene glycol monomethyl ether ethyl ester (PGMEA), propylene glycol monomethyl ether (PGME); Ketone: acetone (acetone), butanone (MEK), cyclohexanone (cyclohexanone); Ester class: ethyl acetate (EAC), n-butyl acetate (NBAC); Benzene class: toluene (TOL), dimethylbenzene (XYL); Organic sulfur compound: DMS, DMDS, acetic acid and part high boiling substance, as monoethanolamine (MEA, monoethanolamine), dimethyl sulfoxide (DMSO) (DMSO, Dimethylsulfoxide), buffered deoxycholate glucose (meat soup), N-methyl pyrrolidone (N-Methyl Pyrrolidone) etc.
The commercialization technology that present processing semiconductor contains VOCs (Volatile Organic Compounds) waste gas mainly is to be that runner concentrates incineration technology, active carbon adsorption technology and wet scrubbing technology.Runner concentrates incineration technology palpus consume fuel; The active carbon adsorption technology then must often be changed activated carbon, and the two running cost all has too high problem.The semiconductor dealer uses runner to concentrate and incinerates scientific discovery at present in addition, this technology is relatively poor to the removal effect of the stench organic compound (as acetic acid) of high boiling substance (as the main component of removing photoresistance agent) and low concentration low odor threshold value, and can destroy the adsorption capacity of the employed sorbing material of concentration runner, and cause to continue to reduce the treatment effeciency of removing pollutant.
The characteristic of organic gas molecule in space pollutant is different from the gas molecule in space pollutant of micronic dust particle and inorganic acid alkali, so the mechanism of handling can be completely different, and difficulty is also higher relatively.Organic gas molecule in space pollutant control technology develops for many years in the air, but is partial to the treatment technology of high concentration mostly, and is still not obvious for its effect of low concentration person.
For water-soluble high VOCs (Volatile Organic Compounds) composition, generally can the mat washing technology it be transferred to the processing that liquid phase is carried out pollutant again from gas phase, still quite big for the water yield of keeping treatment effeciency.Can further utilize the oxidation rinsing mode that the waste gas organic substance is transferred in the water, the fiting chemical oxidation is divided into carbon dioxide, water or harmless salt with water pollutant, make washings can reclaim use again, too slow or have and produce the higher material of harmfulness and residue in doubt in the waste water but general oxidant is subject to reaction rate.
The oxidizing force of ozone is splendid, and is a lot of in the application of running water and wastewater treatment, is commonly used to sterilization or removes partial organic substances.Ozone and organic reaction approximately can be divided into ozone and water pollutant and directly react (direct reaction), produce hydroxyl free radical (OH radical) and carry out indirect reaction (indirect reaction or radical-type reaction) two parts with water pollutant.Utilize ozone and H
2O
2, reactions such as UV, OH-produce OH radical participate in the oxidation reaction technology be commonly referred to as high-level oxidation technology (Advanced Oxidation Processes, AOP).
The oxidation rinsing technology that is the interpolation oxidation traditionally then is with oxidant and scrubbing tower union operation, and oxidant and pollutant reaction are quick-acting when slow, can cause treatment effeciency to reduce, and can cause the waste of oxidant and expend more washings, and the Operation and Maintenance of equipment is not easy.
Therefore, for the treatment technology that makes organic exhaust gas is more attained to perfect, the road of seeking improvement at the problems referred to above is arranged in fact.Therefore how to found a kind of purifier of washing organic gas in low-temperature and wet-type ways, real one of the current important research and development problem that belongs to, also becoming the current industry utmost point needs improved target.
Summary of the invention
The objective of the invention is to, a kind of purifier of washing organic gas in low-temperature and wet-type ways is provided, technical problem to be solved is to make it can reduce the consumption of cleaning solution, and can reduce escape again tolerance (outgassing) and promote the treatment effeciency of organic pollution of pollutant in the cleaning solution, be very suitable for practicality.
Another object of the present invention is to, a kind of purifier of washing organic gas in low-temperature and wet-type ways is provided, technical problem to be solved is to make it that a kind of porous catalyst that is used for the purifier of above-mentioned low concentration washing organic gas is provided, thereby is suitable for practicality more.
An also purpose of the present invention is, a kind of purifier of washing organic gas in low-temperature and wet-type ways is provided, technical problem to be solved be make it further make this water-soluble relatively poor VOCs carry out the filter material suction-operated in advance to carry out oxidation processes again be CO
2And H
2O, or partial oxidation is treated to water-soluble higher composition, and then import the scrubbing tower treatment and purification, thus be suitable for practicality more.
A further object of the present invention is, a kind of purifier of washing organic gas in low-temperature and wet-type ways is provided, technical problem to be solved is to make the organic principle of this gas wherein or waste gas can comprise any and combination arbitrarily thereof as alcohols, ether-ether class, ketone, ester class, benzene class, organic sulfur compound etc., and general time THC concentration range is then between 0.01~500ppm, thereby is suitable for practicality more.
The object of the invention to solve the technical problems realizes by the following technical solutions.The purifier of a kind of washing organic gas in low-temperature and wet-type ways that proposes according to the present invention, it comprises: a scrubbing tower in order to receive organic gas, transfers among the cleaning solution organic pollution in this gas; One oxidation processes unit in order to handling the cleaning solution of scrubbing tower, and carry out oxidation reaction among the oxidant that uses imported this cleaning solution, and this oxidation processes unit comprises further: a water circulating pump, in order to the cleaning solution of treatment and purification that pumping is desired; One oxidant reservoir is in order to the oxidant of seasoning institute desire interpolation; One blender is used to mix this oxidant and cleaning solution; And a catalyst absorbing unit, provide a porous catalyst adsorbent bed, in order to the oxidation of accelerated oxidation agent.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The purifier of aforesaid washing organic gas in low-temperature and wet-type ways, its catalyst adsorption material carrier of the porous catalyst of wherein said porous catalyst adsorbent bed is to be selected from activated carbon, zeolite, aluminium oxide, other porous material or its mixture, its shape is also without particular limitation, can be for cylindric, graininess, the proper sphere shape, honeycomb, forms such as multi-level storehouse shape or foaming shape, wherein the active part of this catalyst is N-orbit metal (the transition metal first kind) simultaneously, and it is to be selected from Mn, Fe, Co, Ni, Cu, any of Pb or Zn and oxide thereof and combination arbitrarily thereof.
The purifier of aforesaid washing organic gas in low-temperature and wet-type ways, the organic principle of wherein said organic gas can comprise as alcohols: isopropyl alcohol (IPA), n-butanol (NBA), alcohol ether and ether-ether class: propane diols first, ether ethyl ester (PGMEA), propylene glycol monomethyl ether (PGME), ketone: acetone (acetone), butanone (MEK), cyclohexanone (cyclohexanone), ester class: ethyl acetate (EAC), n-butyl acetate (NBAC), benzene class: toluene (TOL), dimethylbenzene (XYL), organic sulfur compound: DMS, DMDS, acetic acid and part high boiling substance are (as monoethanolamine (MEA, monoethanolamine), dimethyl sulfoxide (DMSO) (DMSO, Dimethylsulfoxide), buffered deoxycholate glucose (BDG.buffered deoxycholate glucose (broth)], N-methyl pyrrolidone (N-Methyl Pyrrolidone) etc.) any and arbitrarily combination thereof.
The purifier of aforesaid washing organic gas in low-temperature and wet-type ways, (Total Hydrocarbon, THC) concentration range is then between 0.01~500ppm for the general time THC of wherein said organic gas.
The purifier of aforesaid washing organic gas in low-temperature and wet-type ways, general time THC concentration range the best of wherein said organic gas is between 0.01~50ppm.
The object of the invention to solve the technical problems also realizes by the following technical solutions.
The purifier of a kind of washing organic gas in low-temperature and wet-type ways that proposes according to the present invention, it comprises: a scrubbing tower in order to receive organic gas, transfers among the cleaning solution organic pollution in this gas; One oxidation pre-treatment catalyst unit in order to the gas that becomes a mandarin of preliminary treatment scrubbing tower, and with after its pre-oxidation processing, imports and carries out washing, purifying in this wash mill; One water circulating pump is in order to the cleaning solution of treatment and purification that pumping is desired; And an adsorbent bed or an ion exchange resin, provide porous absorption packed bed, use in order to the adsorption cleaning of cleaning solution.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The purifier of aforesaid washing organic gas in low-temperature and wet-type ways, the catalyst adsorption material carrier of wherein said oxidation pre-treatment catalyst unit is to be selected from activated carbon, zeolite, aluminium oxide, other porous material or its mixture, there is no particular restriction for its shape, can be forms such as cylindric, graininess, proper sphere shape, honeycomb, multi-level storehouse shape, fibrous or foaming shape, wherein the active part of this catalyst can be N-orbit metal (the transition metal first kind) and oxide thereof or highly active Nai Mijin or silver-colored catalyst or photocatalyst any and combination arbitrarily thereof simultaneously.
The purifier of aforesaid washing organic gas in low-temperature and wet-type ways, wherein said adsorbent bed or its carrier of ion exchange resin material are to be selected from activated carbon, zeolite, aluminium oxide, other porous material or its mixture, there is no particular restriction for its shape, can be forms such as cylindric, graininess, proper sphere shape, honeycomb, multi-level storehouse shape, fibrous or foaming shape.
The object of the invention to solve the technical problems also realizes in addition by the following technical solutions.The purifier of a kind of washing organic gas in low-temperature and wet-type ways that proposes according to the present invention, it comprises: a scrubbing tower in order to receive organic gas, transfers among the cleaning solution organic pollution in this gas; One water circulating pump is in order to the cleaning solution of treatment and purification that pumping is desired; And an adsorbent bed or an ion exchange resin material, provide porous absorption packed bed, use in order to the adsorption cleaning of cleaning solution.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The purifier of aforesaid washing organic gas in low-temperature and wet-type ways, wherein said adsorbent bed or its carrier of ion exchange resin material are to be selected from activated carbon, zeolite, aluminium oxide, other porous material or its mixture, there is no particular restriction for its shape, can be forms such as cylindric, graininess, proper sphere shape, honeycomb, multi-level storehouse shape, fibrous or foaming shape.
The object of the invention to solve the technical problems also adopts following technical scheme to realize in addition again.The purifier of a kind of washing organic gas in low-temperature and wet-type ways that proposes according to the present invention, it comprises: a scrubbing tower in order to receive organic gas, transfers among the cleaning solution organic pollution in this gas; One oxidation pre-treatment catalyst unit, in order to the gas that becomes a mandarin of preliminary treatment scrubbing tower, and with its adsorb in advance carry out oxidation processes again after, import and carry out washing, purifying in this wash mill; And a water circulating pump, in order to the cleaning solution of treatment and purification that pumping is desired.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The purifier of aforesaid washing organic gas in low-temperature and wet-type ways, the catalyst adsorption material carrier of wherein said oxidation pre-treatment catalyst unit is to be selected from activated carbon, zeolite, aluminium oxide, other porous material or its mixture, its shape is also without particular limitation, can be for cylindric, graininess, the proper sphere shape, honeycomb, multi-level storehouse shape, fibrous or form such as foaming shape etc., wherein the active part of this catalyst can be any and combination arbitrarily thereof of N-orbit metal (the transition metal first kind) and oxide or highly active Nai Mijin or silver-colored catalyst or photocatalyst simultaneously.
The present invention compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, major technique of the present invention thes contents are as follows:
The purifier that the purpose of this invention is to provide a kind of washing organic gas in low-temperature and wet-type ways, when pollutant is transferred to the liquid phase cleaning solution from gas phase, further carry out effective purified treatment control of pollutant in the cleaning solution again, can reduce the consumption of cleaning solution and reduce the treatment effeciency that pollutant escapes tolerance (outgassing) again and promotes organic pollution in the cleaning solution according to the concentration of pollutant in the cleaning solution.
The wherein processing of pollutant in the cleaning solution can be simple process porous adsorbent bed or ion exchange resin and carries out the purification of cleaning solution; Also can be further through oxidants such as porous catalyst adsorbent bed collocation adding ozone or hydrogen peroxide, pollutant carries out the oxidation, purification reaction in acceleration and the cleaning solution.
For achieving the above object, the invention provides a kind of purifier of washing organic gas in low-temperature and wet-type ways, comprising: a scrubbing tower, it is in order to receive organic gas, the organic pollution in this gas is transferred among the cleaning solution; One cleaning solution clean unit provides a porous adsorbent bed or an ion exchange resin or an oxidation processes unit, in order to carry out the catharsis of cleaning solution; And this oxidation processes unit wherein, be in order to handle the cleaning solution of scrubbing tower, and further carry out oxidation reaction among the oxidant that uses imported this cleaning solution, and this oxidation processes unit further comprises: an oxidant reservoir, the oxidant that adds in order to seasoning institute desire; One blender is used to mix this oxidant and cleaning solution; And a catalyst absorbing unit, provide the oxidation of a porous catalyst adsorbent bed in order to the accelerated oxidation agent.
Purifier by above-mentioned a kind of washing organic gas in low-temperature and wet-type ways, in this oxidation processes unit, increase the concentration detecting device of pollutant in the cleaning solution, according to the concentration of pollutant in the cleaning solution just effectively regulate suitable cleaning solution purified treatment amount or and the addition of oxidant, can improve the usefulness and the service life of porous catalyst adsorbent bed, and the consumption that can reduce oxidant.
In addition, for achieving the above object, the present invention provides a kind of porous catalyst that is used for the purifier of above-mentioned low concentration washing organic gas in addition, this catalyst adsorption material carrier is to be selected from activated carbon, zeolite, aluminium oxide, other porous material or its mixture, there is no particular restriction for its shape, can be for cylindric, graininess, the proper sphere shape, honeycomb, multi-level storehouse shape, fibrous or form such as foaming shape etc., wherein the active part of this catalyst is N-orbit metal (the transition metal first kind) simultaneously, and it is to be selected from Mn, Fe, Co, Ni, Cu, any of Pb or Zn and oxide thereof and combination arbitrarily thereof.
In addition, for achieving the above object, the present invention also provides a kind of purifier of washing organic gas in low-temperature and wet-type ways, the present invention is directed to water-soluble relatively poor VOCs composition, can further be provided with preliminary treatment catalyst oxidation filter material by the pretreatment gas entrance side, further making this water-soluble relatively poor VOCs carry out the filter material suction-operated in advance, to carry out oxidation processes again be CO2 and H2O, or partial oxidation is treated to water-soluble higher composition (as: DMS normal temperature catalyst is oxidized to DMSO, DMSO2, SO2), and then imports the scrubbing tower treatment and purification.
Moreover for achieving the above object, the present invention provides a kind of purifier of washing organic gas in low-temperature and wet-type ways again, and wherein the organic principle of this gas or waste gas can comprise: as alcohols: isopropyl alcohol (IPA), n-butanol (NBA), alcohol ether; Ether-ether class: propylene glycol monomethyl ether ethyl ester (PGMEA), propylene glycol monomethyl ether (PGME); Ketone: acetone (acetone), butanone (MEK), cyclohexanone (cyclohexanone); Ester class: ethyl acetate (EAC), n-butyl acetate (NBAC); Benzene class: toluene (TOL), dimethylbenzene (XYL); Organic sulfur compound: DMS, DMDS, acetic acid and part high boiling substance, any and arbitrarily combination thereof as MEA, DMSO, BDG, NMP etc., and general time THC (THC, Total Hydrocarbon) then between 0.01~500ppm, its preferred process concentration is between 0.01~50ppm for concentration range.
By technique scheme, the purifier of a kind of washing organic gas in low-temperature and wet-type ways of the present invention has following advantage and beneficial effect at least:
1, the purifier of washing organic gas in low-temperature and wet-type ways of the present invention, be to make to be transferred to the liquid phase cleaning solution from gas phase when pollutant, further carry out effective purified treatment control of pollutant in the cleaning solution again according to the concentration of pollutant in the cleaning solution, and can reduce the consumption of cleaning solution, and can reduce escape again tolerance (outgassing) and promote the treatment effeciency of organic pollution of pollutant in the cleaning solution, be very suitable for practicality.
2, the purifier of washing organic gas in low-temperature and wet-type ways of the present invention provides a kind of porous catalyst that is used for the purifier of above-mentioned low concentration washing organic gas, thereby is suitable for practicality more.
3, the purifier of a kind of washing organic gas in low-temperature and wet-type ways of the present invention, it is at water-soluble relatively poor VOCs composition, can further preliminary treatment catalyst oxidation filter material be set by the pretreatment gas entrance side, further making this water-soluble relatively poor VOCs carry out the filter material suction-operated in advance, to carry out oxidation processes again be CO2 and H2O, or partial oxidation is treated to water-soluble higher composition, and then importing the scrubbing tower treatment and purification, clean-up effect is better, thereby is suitable for practicality more.
4, the purifier of washing organic gas in low-temperature and wet-type ways of the present invention can comprise the organic principle of this gas wherein or waste gas: as alcohols: isopropyl alcohol (IPA), n-butanol (NBA), alcohol ether; Ether-ether class: propylene glycol monomethyl ether ethyl ester (PGMEA), propylene glycol monomethyl ether (PGME); Ketone: acetone (acetone), butanone (MEK), cyclohexanone (cyclohexanone); Ester class: ethyl acetate (EAC), n-butyl acetate (NBAC); Benzene class: toluene (TOL), dimethylbenzene (XYL); Organic sulfur compound: DMS, DMDS, acetic acid and part high boiling substance, as MEA, DMSO, BDG, NMP etc. any and arbitrarily the combination, and general time THC (Total Hydroca rbon, THC) concentration range then is between 0.01~500ppm, its preferred process concentration is between 0.01~50ppm, thereby have better clean-up effect, be suitable for practicality more.
In sum, the present invention is the purifier of relevant a kind of washing organic gas in low-temperature and wet-type ways, principal character is in the washing technology of organic gas processing, organic pollution is transferred to the liquid phase cleaning solution from gas phase, and further carry out effective purified treatment control of pollutant in this cleaning solution again according to the concentration of pollutant in the cleaning solution, reducing the consumption of cleaning solution, and reduce escape again tolerance (outgassing) and promote the treatment effeciency of organic pollution of pollutant in the cleaning solution.Wherein, the processing of pollutant in this cleaning solution can be simple process porous adsorbent bed or ion exchange resin and carries out the purification of cleaning solution; Also can be further collocation adds oxidants such as ozone or hydrogen peroxide through the porous catalyst adsorbent bed, can quicken with cleaning solution in pollutant carry out the oxidation, purification reaction.In addition, at water-soluble relatively poor VOCs composition, can further preliminary treatment catalyst oxidation filter material be set by the pretreatment gas entrance side, further making this water-soluble relatively poor VOCs carry out suction-operated in advance, to carry out oxidation processes again be CO2 and H2O, or partial oxidation is treated to water-soluble higher composition, and then imports the scrubbing tower treatment and purification.The present invention has above-mentioned plurality of advantages and practical value, no matter it all has bigger improvement on product structure or function, obvious improvement is arranged technically, and produced handy and practical effect, thereby being suitable for practicality more, really is a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, and for above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is the schematic diagram of the purifier of a kind of washing organic gas in low-temperature and wet-type ways of the present invention.
Fig. 2 is the schematic diagram of the purifier of a kind of washing organic gas in low-temperature and wet-type ways of the present invention.
10: gas access 20: gas vent
30: fountain head 40: filler
50: cleaning solution water circulating pump 60: the cleaning solution storagetank
70: flow control valve 80: oxidation pre-treatment catalyst unit
90: adsorbent bed or and ion exchange resin 100: scrubbing tower
200: oxidation processes unit 250: water circulating pump
260: pollutant levels detector 270: blender
280: oxidant reservoir 290: the catalyst absorbing unit
The specific embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, its specific embodiment of purifier, structure, feature and the effect thereof of a kind of washing organic gas in low-temperature and wet-type ways that foundation the present invention is proposed, describe in detail as after.
Relevant aforementioned and other technology contents, characteristics and effect of the present invention can be known to present in the following detailed description that cooperates with reference to graphic preferred embodiment.By the explanation of the specific embodiment, when can being to reach technological means that predetermined purpose takes and effect to get one more deeply and concrete understanding to the present invention, yet appended graphic only provide with reference to the usefulness of explanation, be not to be used for the present invention is limited.
Embodiment one
Seeing also shown in Figure 1ly, is the schematic diagram of the purifier of a kind of washing organic gas in low-temperature and wet-type ways of the present invention.A kind of wet type organic waste gas treatment device of preferred embodiment of the present invention, wherein this treating apparatus has a scrubbing tower 100, be in order to receive organic gas, organic pollution in this gas is transferred among the cleaning solution, wherein organic exhaust gas is to enter this treating apparatus from a gas access 10, and comprise a plurality of fountain heads 30 therein, it is that the washings that provide sprinkling to be provided through a cleaning solution water circulating pump 50 from a cleaning solution storagetank 60 are provided, make this organic exhaust gas in scrubbing tower 100, this pollutant is transferred to the liquid phase cleaning solution from gas phase, in this scrubbing tower 100, has simultaneously a filler 40, can increase the transfer amount of reaction time and pollutant, and the gas of organic exhaust gas after pollutant shifts is discharged from a gas vent 20, washes in the storage tank of bar liquid and enter one through the cleaning solution of exchange pollutant.
Having a cleaning solution clean unit 200 in the wet type organic waste gas treatment device of the present invention, is that it comprises in order to the cleaning solution of processing scrubbing tower:
One oxidant reservoir 280 is in order to the oxidant of seasoning institute desire interpolation;
And, be used to mix this oxidant and cleaning solution via a blender 270;
Control flow via a water circulating pump 250 again, this gasifying agent and cleaning solution are imported a catalyst absorbing unit 290, it provides the oxidation of a porous catalyst adsorbent bed in order to the accelerated oxidation agent, and after this catalyst absorbing unit 290, be provided with a pollutant levels detector, be used to detect the pollutant levels that purify the back washings.
In real factory is to handle operation during with waste gas air quantity 600CMM, and it has or not, and to use the result of adsorption and oxidation catalyst be shown in following table one.The catalyst adsorption material carrier of this porous catalyst absorbing unit 290 in the table one is to be selected from hydrophobicity high silica alumina ratio zeolite (UOP Hisiv3000), and it is shaped as the honeycomb form, and the honeycomb base material is a ceramic fibre; And the catalyst adsorption material carrier of this porous catalyst absorbing unit 290 in the table two, be to be selected from y-type zeolite (Zeolyst CBV100), it is shaped as the honeycomb form, the honeycomb base material is a ceramic fibre, simultaneously can be connected in series the iron oxide catalyst thereafter to strengthen its oxidation again, it is shaped as Granular forms, and adds suitable potassium hydroxide (KOH) or NaOH (NaOH) in washings, and the pH value maintains more than 9.0.
Handle the result of operation when table one, the real waste gas air quantity 600CMM of factory
Whether use the adsorption and oxidation catalyst | Handle front/rear THC concentration of emission ppm | Handle front/rear THC discharge capacity Kg/hr | Ozone generating amount Kg/hr | Ozone-depleting amount g O 3/g?THC | The oxidation trough time of staying | Washing bar liquid eliminates and changes and the circular flow ratio |
Do not have | 21.0/3.4 | 0.5/0.08 | 2.1 | 4.2 | 24min | 2~3% |
Have | 21.0/2.1 | 0.5/0.05 | 0.9 | 1.8 | 0.3min | 1~1.5% |
Annotate 1: the VOCs that becomes a mandarin becomes to be grouped into: isopropyl alcohol (IPA, isopropyl alcohol), acetone (Acetone), propylene glycol monomethyl ether ester (PGMEA, 1-Methoxy-2-Propyl Acetate), monomethyl ether propane diols (PGME, propylene glycol mono-methyl ether), acetic acid (Acetic Acid), cyclohexanone (Cyclohexanone), dimethyl sulfoxide (DMSO) (DMSO, Dimethylsulfoxide), monoethanolamine (MEA, monoethanolamine), and toluene (Toluene) etc.
Handle the result of operation when table two, the real waste gas air quantity 1400CMM of factory
Annotate 2: the VOCs that becomes a mandarin becomes to be grouped into: independent acetic acid (Acetic Acid).
As shown in top table one and table two, wherein the one-tenth of this waste gas is grouped into respectively and comprises: isopropyl alcohol, acetone, the monomethyl ether propane diols, the monomethyl ether propane diols, acetic acid, cyclohexanone, dimethyl sulfoxide (DMSO), monoethanolamine and toluene etc. and independent acetic acid, the THC (THC) that table one is shown in when initial is all 21ppm (0.5Kg/hr), and after handling through emission-control equipment, not having uses the THC of adsorption and oxidation catalyst to be 3.4ppm (0.08Kg/hr), and use the THC behind the adsorption and oxidation catalyst to be 2.1ppm (0.05Kg/hr), that is, use the adsorption and oxidation catalyst can effectively lower THC; On the consumption of foul smell, the value of this use adsorption and oxidation catalyst is 1.8, and not using the adsorption and oxidation catalyst then is 4.2, obviously finds can effectively reduce the consumption of this ozone when using the adsorption and oxidation catalyst; Moreover, in the time of staying of this oxidation trough, do not take 24 minutes if there is the adsorption and oxidation of use catalyst, then only take 0.3 minute with this adsorption and oxidation catalyst, so use this adsorption and oxidation catalyst can effectively shorten the purification rate of these washings.
As shown in top table two, acetate concentration when initial all is to be 3.0ppm (0.63Kg/hf), and after handling through emission-control equipment, not having uses the THC of adsorption and oxidation catalyst to be 0.6ppm (0.13Kg/hr), and use the THC behind the adsorption and oxidation catalyst to be 0.2ppm (0.04Kg/hr), that is, use the adsorption and oxidation catalyst can effectively lower THC; On the consumption of foul smell, the value of this use adsorption and oxidation catalyst is 0.86, and not using the adsorption and oxidation catalyst then is 4.02, obviously finds can effectively reduce the consumption of this ozone when using the adsorption and oxidation catalyst; Moreover, in the time of staying of this oxidation trough, do not take time 26 minutes if there is the adsorption and oxidation of use catalyst, then only took time 1.0 and 1.5 minutes with this adsorption and oxidation catalyst, so use this adsorption and oxidation catalyst can effectively shorten the purification rate of these washings.
Embodiment two
Seeing also shown in Figure 2ly, is the schematic diagram of the purifier of a kind of washing organic gas in low-temperature and wet-type ways of the present invention.Second preferred embodiment of the present invention provides as a kind of wet type organic waste gas treatment device among first embodiment, only as shown in Figure 2, it is before washings enter these fountain heads 30 by this cleaning solution water circulating pump, earlier via a flow control valve 70, again via or not via an adsorbent bed or the ion exchange resin 90 pollutant levels detector 260 of flowing through again, enter these fountain heads 30 again; And these organic gas are the oxidation pre-treatment catalyst unit 80 of flowing through earlier, with the gas that becomes a mandarin in order to the preliminary treatment scrubbing tower, and with its adsorb in advance carry out oxidation processes again after, imports again and carry out washing, purifying in this wash mill, and other handling process is all identical with embodiment one.And handle operation during with waste gas air quantity 1000CMM in real factory, to use adsorption and oxidation catalyst and pre-oxidation result thereof be shown in following table three having or not.Wherein, the catalyst adsorption material carrier of this oxidation pre-treatment catalyst unit 80, be to be selected from hydrophobicity high silica alumina ratio zeolite (Zeolyst CBV5524G) and ferriferous oxide, it is shaped as powder and coats on the PU foaming monomer, thereafter can arrange in pairs or groups is selected from PP fiber adsorption material carrier, and wherein the active part of this catalyst is Nai Miyin.And this adsorbent bed or ion exchange resin 90 are to be selected from an activated carbon fiber (platform carbon science and technology PAN is an activated carbon fiber) and a fibrous acid cation exchange resin and a fibrous alkaline anion exchange resin (foreignizing into very much DIAION).
Result and operating condition when table three, the real air current flow 1000CMM of factory
The circulating cleaning solution adsorption material | Handle front/rear THC concentration ppb (annotating 4) | THC treatment and purification efficient % | Inorganic constituents (SO 2,H 2S, NH 3) treatment and purification efficient % | Washing bar liquid eliminates and changes and the circular flow ratio |
Do not have | 300/195 | 35% | 60% | 5~50% |
Have | 350/87 | 75% | 80% | 1~5% |
(annotating 3) (zeolite) arranged | 350/52 | 85% | 85% | 0.5~3% |
(annotating 3) (zeolite and ferriferous oxide) arranged | 350/42 | 88% | 85% | 0.5~2.5% |
(annotating 3) (zeolite and ferriferous oxide+Nai Miyin PP fiber) arranged | 350/35 | 90% | 85% | 0.5~2% |
Annotate 2: the VOCs that becomes a mandarin becomes to be grouped into: isopropyl alcohol, acetone, monomethyl ether propane diols, monomethyl ether propane diols, monoethanolamine and acetic acid etc. (containing inorganic constituents simultaneously forms: SO2, H2S, NH3 20ppb altogether are following)
Annotate 3: entrance side installing preliminary treatment catalyst oxidation filter material
Annotate 4:1ppb=10-3ppm
As shown in top table three, wherein the one-tenth of this waste gas is grouped into and comprises: isopropyl alcohol, acetone, the monomethyl ether propane diols, the monomethyl ether propane diols, and acetic acid etc. (containing inorganic constituents simultaneously forms: SO2, H2S, NH3 20ppb altogether is following), the THC (THC) of existing conventional devices when operation is initial is 300ppb, and after handling through emission-control equipment, do not use the THC of adsorption and oxidation material to be 195ppb, and when using THC behind the adsorption and oxidation material, THC is initiated with 350ppb, and handle the back is 87ppb, use preliminary treatment catalyst oxidation filter material at the scrubbing tower entrance side in addition, it handles the back is 52ppb, so promptly use adsorption material can effectively lower THC, and go ahead of the rest via preliminary treatment catalyst oxidation filter material at entrance side, can reduce more THC; And on treatment and purification efficient, use the cleaning solution adsorption material, and go ahead of the rest via preliminary treatment catalyst oxidation filter material at entrance side, its THC treatment and purification efficient rises to 75%, 85%, 88% and 90%, inorganic constituents SO from 35% respectively
2, H
2S, NH
3Treatment and purification efficient rises to 80% and 85% from 60% respectively, can effectively promote THC and inorganic constituents SO simultaneously
2, H
2S, NH
3Treatment and purification efficient; And in table three, obviously as seen, wash bar liquid and eliminate and change with the circular flow ratio and can also effectively promote.
The above; it only is preferred embodiment of the present invention; be not that the present invention is done any pro forma restriction; though the present invention discloses as above with preferred embodiment; yet be not in order to limit the present invention; any those skilled in the art; in not breaking away from the technical solution of the present invention scope; when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations; in every case be not break away from the technical solution of the present invention content; according to technical spirit of the present invention to any simple modification that above embodiment did; equivalent variations and modification; all still belong in the technical solution of the present invention scope, so protection scope of the present invention is when being as the criterion with the technical scheme that claim was defined.
Claims (7)
1. the purifier of a washing organic gas in low-temperature and wet-type ways is characterized in that it comprises:
One scrubbing tower in order to receive organic gas, transfers among the cleaning solution organic pollution in this gas;
One oxidation processes unit in order to handling the cleaning solution of scrubbing tower, and carry out oxidation reaction among the oxidant that uses imported this cleaning solution, and this oxidation processes unit comprises further:
One water circulating pump is in order to the cleaning solution of treatment and purification that pumping is desired;
One oxidant reservoir is in order to the oxidant of seasoning institute desire interpolation;
One blender is used to mix this oxidant and cleaning solution; And
One catalyst absorbing unit provides a porous catalyst adsorbent bed, in order to the oxidation of accelerated oxidation agent.
2. the purifier of washing organic gas in low-temperature and wet-type ways according to claim 1, its catalyst adsorption material carrier of porous catalyst that it is characterized in that wherein said porous catalyst adsorbent bed are any or its mixtures of combination arbitrarily that is selected from activated carbon, zeolite and aluminium oxide.
3. the purifier of washing organic gas in low-temperature and wet-type ways according to claim 2 is characterized in that being shaped as of wherein said catalyst adsorption material carrier is cylindric, any or its any combination of graininess, proper sphere shape, honeycomb, multi-level storehouse shape and foaming shape.
4. the purifier of washing organic gas in low-temperature and wet-type ways according to claim 3 is characterized in that the active part of catalyst wherein is any or its any combination that is selected from Mn, Fe, Co, Ni, Cu, Pb, Zn and oxide thereof.
5. the purifier of washing organic gas in low-temperature and wet-type ways according to claim 1 is characterized in that the organic principle of wherein said organic gas comprises: any or its any combination of isopropyl alcohol, n-butanol, alcohol ether, propylene glycol monomethyl ether ethyl ester, propylene glycol monomethyl ether, acetone, butanone, cyclohexanone, ethyl acetate, n-butyl acetate, toluene, dimethylbenzene, dimethyl disulphide, acetic acid, monoethanolamine, dimethyl sulfoxide (DMSO), buffered deoxycholate glucose and N-methyl pyrrolidone.
6. the purifier of washing organic gas in low-temperature and wet-type ways according to claim 1 is characterized in that general time of wherein said organic gas, and the THC concentration range is then between 0.01~500ppm.
7. the purifier of washing organic gas in low-temperature and wet-type ways according to claim 6 is characterized in that general time of wherein said organic gas, and THC concentration range the best is between 0.01~50ppm.
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TW402517B (en) * | 1997-11-18 | 2000-08-21 | Desiccant Technology Corp | Energy-saving volatil organic gas (VOC) purification system |
JP3455815B2 (en) * | 2000-04-25 | 2003-10-14 | 独立行政法人産業技術総合研究所 | Discharge gas treatment method with adsorbent |
TW590789B (en) * | 2001-09-14 | 2004-06-11 | Ind Tech Res Inst | Method of treating an air stream containing VOCs |
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