CN101562127B - Marking device and multi-shaft marking device - Google Patents
Marking device and multi-shaft marking device Download PDFInfo
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- CN101562127B CN101562127B CN2009101327109A CN200910132710A CN101562127B CN 101562127 B CN101562127 B CN 101562127B CN 2009101327109 A CN2009101327109 A CN 2009101327109A CN 200910132710 A CN200910132710 A CN 200910132710A CN 101562127 B CN101562127 B CN 101562127B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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Abstract
The present invention relates to a marking device and a multi-shaft marking device. the present invention provides the marking device capable of stabilizing a load endued on a workpiece from a markingtool. The marking device of the invention includes a shaft member (1) having a magnet (5); an armature (2), having a plurality of coils (8) around the shaft member (1); a marking tool (4), arranged on a front end of the shaft member (1) for marking on a laminated workpiece (W); and a travel mechanism (21), driving the marking tool (4) to move along the surface of he workpiece (W). The coils of the armature (2) are flowed with current, thereby the marking tool advances and retreats towards the surface of the workpiece (W). when the marking tool contacts the surface of the workpiece (W), further the coils of the armature (2) are flowed with current, such that the load is endued from the marking tool (4) to the workpiece (W) under a condition that the shaft member (1) rotates around its axial cord along a travel direction of the marking tool (4) in the surface of the workpiece (W).
Description
Technical field
The present invention relates to for the chalker that engraves line at laminal workpiece such as glass substrate, semiconductor wafers.
Background technology
When the laminal workpiece such as breaking glass substrate, semiconductor wafer, engrave line on the surface of workpiece in advance.With scoring tool with suitable load pressure on the surface of workpiece, scoring tool is moved along the surface of workpiece, can engrave line on the surface of workpiece thus.After forming line, if along line that workpiece is crooked, then the vertical fracture of line arrives the inside of workpiece, and with cutting workpiece.If can form dark vertical fracture at workpiece, just can be only by crossed process with cutting workpiece.
FPD in recent years (flat-panel monitor) develops towards slimming with substrate, and for example thickness of slab is that the following bonding glass substrate of 0.1mm also begins to occur.If workpiece attenuation and fragility further uprise, when forming line, workpiece must make then that to give load on the workpiece from scoring tool little and maintain stable state.If the generation load variations then produces the destruction of burst etc., be difficult to guarantee to cut off quality.
As shown in figure 11, in existing chalker, use to be used for giving the cylinder 62 of load to scoring tool 61, and by adjuster to adjust (for example referring to Patent Document 1) from scoring tool 61 to the load that workpiece W gives.In addition, follow the convex-concave on the surface of workpiece W in order to make scoring tool 61, by having used the relocation mechanism supporting line head 64 of line slideway 63.That is, for the convex-concave of height that makes scoring tool 61 follow the surface of workpiece W moves up and down, the line head 64 of scoring tools 61 is installed by line slideway 63 supportings.And, use the rotation of swivel bearing 66 guiding vertical axises 65, thereby the direct of travel of instrument 61 can rotate around its axis vertical axis 65 to the layout line.
[patent documentation 1] TOHKEMY 2005-82413 communique
Yet in existing chalker, the reason of when giving load from scoring tool to workpiece because following (1)～(3) probably can cause the change of load, produces fragment or slight crack in the part of workpiece.Hour cause easily especially the change of load in load.
(1) when the convex-concave according to the surface of workpiece moves up and down the line head, the pressure oscillation in the cylinder, thus give load variations on the workpiece.
(2) structurally because the deadweight of line head becomes heavy easily, therefore because the inertia of line head, slow according to moving up and down of the line head of the convex-concave on the surface of workpiece.In addition, owing to be used for reducing the resistance to sliding of line slideway or giving the extension spring of the deadweight of the line head on the workpiece, and make moving up and down of line head slow.
(3) load that is delivered to scoring tool from the line head is absorbed by rotor bearing or amplifies, and gives load variations on the workpiece from scoring tool.
Summary of the invention
The object of the present invention is to provide a kind of chalker and multi-shaft marking device, it can make from scoring tool and give the stabilisation of the load on the workpiece.
In order to solve described problem, the first invention is a kind of chalker, and it possesses: spindle unit, and it has magnet and can rotate around axis; Armature, it has the coil on every side around described spindle unit; Scoring tool, it is arranged at the front end of described spindle unit, is used for engraving line at laminal workpiece; Travel mechanism, it makes described scoring tool relatively move along the surface of described workpiece, described coil midstream overcurrent at described armature, the magnetic field that produces by the magnet at described spindle unit thus and at the moving electric current of described coil midstream, obtain to be used for the straight-line thrust of described spindle unit, thereby described scoring tool is to the surface advance and retreat of described workpiece, when the Surface Contact of described scoring tool and described workpiece, further in the described coil midstream overcurrent of described armature, make described spindle unit under the state of its axis rotation, give load from described scoring tool to described workpiece at the direct of travel according to the described scoring tool in the surface of described workpiece thus.
The second invention is according to the described chalker of the first invention, it is characterized in that, described chalker also possesses control device, and described control device is controlled to the Position Control of the position of the described spindle unit of the surface of described workpiece advance and retreat and control from the described scoring tool that contacts with described workpiece the load of the load of giving to described workpiece and controlled.
The 3rd invention is according to the described chalker of the second invention, it is characterized in that described chalker also possesses: current sensor, and it detects the electric current of crossing at described coil midstream; Position transducer, it detects the position of the axis direction of described spindle unit, described control device carries out described Position Control according to instruction and from the information of described position transducer, and carries out described load control according to instruction and from the information of described current sensor.
The 4th invention is according to the described chalker of any one in the first to the 3rd invention, it is characterized in that, described chalker also possesses pressure-feed air bearing, described pressure-feed air bearing floats described spindle unit under the effect of the power of the air of supplying with from the outside of bearing main body bearing main body, simultaneously to the rectilinear motion of described spindle unit on its axis direction, guide around the rotation of axis.
The 5th invention is a kind of multi-shaft marking device, and it comprises that by a plurality of line head according to described spindle unit, described armature and the described scoring tool of the described chalker of any one in first to fourth invention consists of so that the parallel mode of mutual described spindle unit is stacked.
According to the present invention since originally from heavy and light and can scoring tool be set around the spindle unit that axis rotate, so can realize keeping the lightweight of deadweight of the part of scoring tool.And therefore the resistance to sliding when moving along axis direction with respect to armature owing to spindle unit can improve scoring tool with respect to the concavo-convex tracing ability on the surface of workpiece close to zero.Thereby, can make the load stabilisation of giving from scoring tool to workpiece.
Description of drawings
Referring to accompanying drawing described purpose of the present invention and feature are elaborated, and one of them example is illustrated, wherein,
Fig. 1 is the vertical cross section of the chalker of the first execution mode of the present invention.
Fig. 2 is the stereogram of the line head of chalker.
Fig. 3 is the profile of pressure-feed air bearing.
Fig. 4 is the stereogram (comprising part sectioned view) of rod linear motor.
Fig. 5 is the stereogram of coil and coil holder.
Fig. 6 is the details drawing (front view of (A) expression coil holder among the figure, (B) expression is along the profile of the axis direction of coil and coil holder among the figure) of coil and coil holder.
Fig. 7 is the figure of the position relationship of expression magnet and coil.
Fig. 8 is the structure chart of driver.
Fig. 9 is the vertical cross section of the multi-shaft marking device of the second execution mode of the present invention.
Figure 10 is the vertical cross section of the chalker of the 3rd execution mode of the present invention.
Figure 11 is the side view of the existing chalker of expression.
Symbol description: 1-bar (spindle unit), the 2-armature, 4-cut off wheel (scoring tool), 5-magnet, the 8-coil, the 11-head of ruling, 21-travel mechanism, 22-pressure-feed air bearing, the 22a-bearing main body, 30-driver (control device), 32-current sensor, 33-position and speed transducer.
Embodiment
Be described in detail with reference to the execution mode of accompanying drawing to chalker of the present invention.Fig. 1 and Fig. 2 represent the chalker of the first execution mode of the present invention.Fig. 1 represents the vertical cross section of chalker, Fig. 2 represent to rule profile of head.
Chalker possesses: the workbench 6 of place work piece W; Be provided as the line head 11 of the cut off wheel 4 of scoring tool; The travel mechanism 21 that line head 11 is relatively moved along the surface of workpiece W with respect to workpiece W.Workbench 6 extends at horizontal plane.The a plurality of air that have for absorption workpiece W at workbench 6 attract the hole.Travel mechanism 21 moves any one party of line head 11 or workbench 6.Under the state of the Surface Contact that makes cut off wheel 4 and workpiece W, travel mechanism 21 makes cut off wheel 4 relatively move in X-direction along the surface of workpiece W, and cut off wheel 4 rolls along X-direction on the surface of workpiece W thus, thereby engraves line on the surface of workpiece W.When Ke Duogen rules on the surface of workpiece W, engrave that travel mechanism 21 makes any one party of line head 11 or workbench 6 mobile in Y direction after the line, travel mechanism 21 makes with the cut off wheel 4 of the Surface Contact of workpiece W mobile in X-direction along the surface of workpiece W thereafter.
Be divided into two strands axletree maintaining part 3a in the formation of the bottom of retainer 3 by slit.The cut off wheel 4 of clamping abacus pearl rotatably on axletree maintaining part 3a.The axletree of cut off wheel 4 extends in the horizontal direction.The in the horizontal direction axletree of the cut off wheel 4 of extension and in vertical direction the axis quadrature of the bar 1 of extension.Because cut off wheel 4 rotates in horizontal plane according to its direct of travel easily, therefore also can as the castor of chair, make the stagger axis of bar 1 of the axletree of cut off wheel 4.
Pressure-feed air bearing 22 is installed in lower end at the armature 2 of rod linear motor.As shown in Figure 3, air fed air supply path 22b between bearing main body 22a cylindraceous is formed for bar 1 and bearing main body 22a.Compressed air is supplied with in outside from bearing main body 22a in the 22b of air supply path, consists of air film 23 between bar 1 and bearing main body 22a.Pressure-feed air bearing 22 makes bar 1 float under the effect of the power of air in bearing main body 22a, simultaneously to the rectilinear motion of bar 1 on axis direction, guide around the rotation of axis.Because bar 1 does not contact with bearing main body 22a, therefore can make the resistance to sliding of bar 1 close to zero.In addition, bar 1 is remained in the rod linear motor of the state that floats in armature 2, the bar 1 in the armature 2 might depart from.By being arranged on the pressure-feed air bearing that accompanies air film 23 between bar 1 and the bearing main body 22a, can making the rectilinear motion of bar 1 and rotatablely move stable.
Fig. 4 represents the details drawing of rod linear motor.The rod linear motor is made of bar 1 and the armature 2 as spindle unit, and described bar 1 has a plurality of magnet, and the alternately formation on axis direction of the magnetic pole of the N utmost point and the S utmost point, and described armature 2 has a plurality of coils 8 on every side around bar 1.Between bar 1 and coil 8, there is the magnetic gap.The shell 17 that a plurality of coils 8 are formed by formed body covers.These a plurality of coils 8 and shell 17 consist of armature 2.The rod linear motor passes through to obtain to be used for bar 1 straight-line thrust at the magnetic field of magnet 5 generations of bar 1 and the electric current that flows in coil 8.
The rectangular-shaped insulated substrate 10 of the flat shape identical with the 9a of frame body section is installed at the upper surface of coil holder 9.Form the conductive pattern that is electrically connected with the wire 8a of coil 8 at insulated substrate 10.Conductive pattern connect U mutually each other coil, V mutually each other coil, W mutually each other coil and form.
As shown in Figure 4, the outer shape with the shell 17 in the cross section of the axis quadrature of bar 1 forms in fact quadrangle (being in the present embodiment rectangle).A face processing in the side of shell 17 is for the internal thread 12 on the platform that shell 17 is installed in travel mechanism 21.Internal thread 12 is when injection molded shell 17, imbeds in the mould and forms as one with shell 17 by inserting nut 13.In addition, be formed on devices spaced apart on the axis direction of bar 1 and insert two location holes 14 of alignment pin at the upper surface of shell 17.Two location holes 14 are arranged at the axis of bar 1, and it is parallel with the axis of bar 1 to connect the line of two location holes 14.By at shell 17 processing location holes 14, in the time of thus on the platform that shell 17 is installed in travel mechanism 21, can prevent that stopping bar 1 tilts to install.
Be formed for improving the fin 17a of heat dissipation characteristics at shell 17.Form the end pieces 19 by shell 17 location at the both ends of the axis direction of shell 17.Similarly in advance end pieces 19 is inserted in the mould with coil 8 and coil holder 9.Cross the fixed mechanisms such as screw at a square tube of this end pieces 19 described pressure-feed air bearing 22 (with reference to Fig. 2) is installed.In addition, the opposing party of end pieces 19 the encoder as position transducer for detection of the position of the axis direction of bar 1 is installed.Encoder is housed in the case 20 of end of the axis direction that is installed on shell 17.
Owing to be installed on the platform of travel mechanism 21, therefore require the mechanical strength of shell 17 high.In addition, owing to need and coil 8 maintenance insulation, therefore require the insulating properties of shell 17 high.And then, in order to improve cooling power, require the heat transmitting of shell 17 good.In order to satisfy these requirements, the material of shell 17 adopts the thermoplastic resins such as glass epoxide, the moulding material that perhaps metal oxide particle of insulating properties is mixed as packing material and with thermoplastic resin.
Fig. 7 represents the magnet 5 of linear motor and the position relationship of coil 8.In the hollow space in bar 1, as exciting magnet, discoid a plurality of magnet 5 (section magnet) with homopolarity mutually opposed, be that the N utmost point and the extremely opposed mode of the N utmost point, the S utmost point and S are stacked.Need to prove, although Fig. 7 does not represent clamping pole shoe 7 (with reference to Fig. 4) between magnet 5 in fact.A plurality of coils 8 at the peripheral layer stacked package railing 1 of bar 1.Coil 8 will be by consisting of by the three-phase coil combination that UVW consists of is a plurality of.If in three-phase coil, flow through per 120 ° of three-phase currents that phase place is different, then be created in the shifting magnetic field of moving on the axis direction of coil 8.Under the effect of shifting magnetic field thrust is applied on the magnet 5 in the bar 1, bar 1 carries out rectilinear motion synchronously with the speed of shifting magnetic field.As shown in Figure 1, be accompanied by the rectilinear motion of bar 1, be installed in the also moving linearly on Z-direction of cut off wheel 4 of the front end of bar 1, to the surface advance and retreat of workpiece W.Owing to bar 1 is the state that floats via the magnetic gap in coil 8, the resistance to sliding in the time of therefore can making bar 1 moving linearly is close to zero.
Fig. 8 represents the structure chart as the driver of the control device of control rod linear motor.Driver 30 is made of following: power converter 31, and it is with the mode supply of electrical energy of the rod linear motor that is suitable for controlling voltage shape pwm converter (pulse-width modulation) etc.; Current sensor 32, it detects at the moving electric current of the coil midstream of rod linear motor; Position and speed transducer 33, the position of the axis direction of its test rod 1 and speed; Controller 34～36, it controls the rod linear motor by control power converter 31.Position and speed transducer 33 shares an encoder.
Control system by the position control loop 37 that is used for carrying out Position Control, current control loop 39 these three loops of being used for carrying out the speed control loop 38 of speed control and being used for carrying out Current Control consist of.Position control loop 37 is major loops, with the order formation subsidiary loop of speed control loop 38, current control loop 39.Current control loop 39 has with alternating current and consists of the situation of control loop and three-phase alternating current is transformed to the vector on rotating orthogonal two axles and consists of these two kinds of the situations of control loop.
Sometimes the also 36 direct input current instructions from load instruction device 41 to current controller.Switch from the current-order of speed control 35 with from the current-order of load instruction device 41 by switch 44.Can control thus the electric current supplied with to rod linear motor 42, be the thrust that the rod linear motor produces, can control from cut off wheel 4 and give load on the workpiece W.
As long as adopt such can switching position control and the driver 30 controlled of load, then adopt a rod linear motor, just can jointly carry out the control of position of cut off wheel 4 and the control of giving the load on the workpiece W from cut off wheel 4.Owing to do not need to use in the lump the linear motor of control position and the cylinder of control load, therefore realize the simplification of the structure of line head 11.In addition, owing to the load of giving from cut off wheel 4 on the workpiece W can be remained necessarily, therefore in the time of can preventing that picture from having used cylinder, cut off wheel 4 follow workpiece W the surface convex-concave and when moving up and down, give load on the workpiece W from cut off wheel 4 and produce and change.
Fig. 9 represents the multi-shaft marking device of the second execution mode of the present invention.In the chalker of this execution mode, that the line head 11 of the chalker of a plurality of described the first execution modes is stacked in the parallel mode of mutual bar 1.The structure of bar 1, armature 2, pressure-feed air bearing 22, retainer 3 and cut off wheel 4 that consists of line head 11 is identical with described the first execution mode, so marks same-sign and description thereof is omitted.
A plurality of line heads 11 are installed concentratedly on the platform of travel mechanism 21.If travel mechanism 21 makes a plurality of line heads 11 move along the surface of workpiece W, then on the surface of workpiece W, form simultaneously many line.The structure of each head 11 of ruling is the simple structure of front end that retainer 3 is installed in the bar 1 of rod linear motor, therefore can shorten the spacing between a plurality of line heads 11.Thus, also can shorten the spacing of many line that on workpiece W, form simultaneously.
Figure 10 represents the chalker of the 3rd execution mode of the present invention.Assembling is used for making the height of cut off wheel 4 to follow on one's own initiative the height measurement section 51 of convex-concave on the surface of workpiece W in the chalker of this execution mode.Height measurement section 51 is made of laser range finder etc., and the height of the measurement point W1 of the workpiece W in the place ahead of the direct of travel of cut off wheel 4 is measured.The driver 30 of control rod linear motor when the measurement point W1 of cut off wheel 4 by workpiece W, the height of the measurement point W1 of the workpiece W that measures according to height measurement section 51, the position of the Z-direction of control lever 1 is so that the degree of depth of cut off wheel 4 incision workpiece W is certain.Thus, avoided cut off wheel 4 exceedingly is pressed on the workpiece W, can be suppressed at the generation of the fine line fragment that the convex-concave of cut off wheel 4 by workpiece W occur often.Also have, in this embodiment, the Position Control that driver carries out and load control are used in the lump.
When height measurement section 51 is configured in the position identical with cut off wheel 4, even make driver 30 high-speed responses, also because cut off wheel 4 needs the regular hour before moving up and down, therefore can not make cut off wheel 4 follow exactly the convex-concave on the surface of workpiece W.For the not delay of generation time when the moving up and down of cut off wheel 4, height measurement section 51 is configured on the measurement point W1 in the place ahead of direct of travel of cut off wheel 4.Driver 30 when the measurement point W1 of cut off wheel 4 by workpiece W, moves up and down cut off wheel 4 so that the penetraction depth of cut off wheel 4 keeps certain after the response time addition of time of the measurement point W1 of the workpiece W that cut off wheel 4 is arrived the place aheads and bar 1.
Need to prove that the present invention is not limited to above-mentioned execution mode, in the scope that does not change main points of the present invention, can be embodied as various execution modes.For example scoring tool can the instrument of adamantine front end point substitutes cut off wheel with being known as a little.In addition, also can be between bar and frame the oscillator such as clamping piezoelectric element so that the scoring tool vibration.Here, should be noted that the mass conservation that makes the bar that comprises oscillator is heavy.And then, also can make bar self vibration of rod linear motor.At this moment, also can be as voice coil motor at the single magnet of bar configuration, perhaps also can make a plurality of magnet with the N utmost point each other or S mode extremely opposite each other dispose.And then, the driving mechanism that bar is rotated around its axis also can be set, and the anglec of rotation in the horizontal plane of control cut off wheel.
The present invention is based on the Japanese patent application 2008-107148 communique of submitting on April 16th, 2008 and the Japanese patent application 2009-045718 communique of submitting on February 27th, 2009.
Claims (5)
1. chalker, it possesses:
Spindle unit, it has magnet and can rotate around axis;
Armature, it has the coil on every side around described spindle unit;
Scoring tool, it is arranged at the front end of described spindle unit, is used for engraving line at laminal workpiece;
Travel mechanism, it makes described scoring tool relatively move along the surface of described workpiece,
Described coil midstream overcurrent at described armature, the magnetic field that produces by the magnet at described spindle unit thus and at the moving electric current of described coil midstream, obtain to be used for the straight-line thrust of described spindle unit, thereby described scoring tool is to the surface advance and retreat of described workpiece
When the Surface Contact of described scoring tool and described workpiece, further in the described coil midstream overcurrent of described armature, make described spindle unit under the state of its axis rotation, give load from described scoring tool to described workpiece at the direct of travel according to the described scoring tool in the surface of described workpiece thus.
2. chalker according to claim 1 is characterized in that,
Described chalker also possesses control device, and described control device is controlled to the Position Control of the position of the described spindle unit of the surface of described workpiece advance and retreat and control from the described scoring tool that contacts with described workpiece the load of the load of giving to described workpiece and controlled.
3. chalker according to claim 2 is characterized in that,
Described chalker also possesses:
Current sensor, it detects the electric current of crossing at described coil midstream;
Position transducer, it detects the position of the axis direction of described spindle unit,
Described control device carries out described Position Control according to instruction and from the information of described position transducer, and carries out described load control according to instruction and from the information of described current sensor.
4. the described chalker of any one is characterized in that according to claim 1～3,
Described chalker also possesses pressure-feed air bearing, described pressure-feed air bearing floats described spindle unit under the effect of the power of the air of supplying with from the outside of bearing main body bearing main body, simultaneously to the rectilinear motion of described spindle unit on its axis direction, guide around the rotation of axis.
5. multi-shaft marking device, its line head by described spindle unit, described armature and the described scoring tool of the described chalker of any one in a plurality of comprising according to claim 1～3 consists of so that the parallel mode of mutual described spindle unit is stacked.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-107148 | 2008-04-16 | ||
| JP2008107148 | 2008-04-16 | ||
| JP2008107148 | 2008-04-16 | ||
| JP2009045718A JP2009274434A (en) | 2008-04-16 | 2009-02-27 | Scribing apparatus and multi-shaft scribing apparatus |
| JP2009-045718 | 2009-02-27 | ||
| JP2009045718 | 2009-02-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101562127A CN101562127A (en) | 2009-10-21 |
| CN101562127B true CN101562127B (en) | 2013-03-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101327109A Active CN101562127B (en) | 2008-04-16 | 2009-04-14 | Marking device and multi-shaft marking device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2009274434A (en) |
| KR (1) | KR101634803B1 (en) |
| CN (1) | CN101562127B (en) |
| TW (1) | TWI488819B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011110681A (en) * | 2009-11-30 | 2011-06-09 | Lintec Corp | Sheet cutting device and cutting method |
| JP5538090B2 (en) * | 2010-06-23 | 2014-07-02 | 株式会社ジャパンディスプレイ | Glass cutter |
| CN103765741B (en) | 2011-09-07 | 2017-03-01 | Thk株式会社 | Linear electronic device and control method |
| JP5912395B2 (en) * | 2011-10-14 | 2016-04-27 | 三星ダイヤモンド工業株式会社 | Substrate upper surface detection method and scribing apparatus |
| JP2013144635A (en) * | 2011-12-15 | 2013-07-25 | Amagasaki Kosakusho:Kk | Apparatus and method having profiling control and for forming scribed line on hard brittle plate |
| JP5948077B2 (en) * | 2012-02-16 | 2016-07-06 | Thk株式会社 | Plunger unit, positioning device |
| CN104766821A (en) * | 2014-01-02 | 2015-07-08 | 大族激光科技产业集团股份有限公司 | Cell splitting device and cell splitting method |
| JP6405717B2 (en) * | 2014-06-03 | 2018-10-17 | 三星ダイヤモンド工業株式会社 | Holder, holder unit and scribing device |
| DE102015120566B4 (en) * | 2014-12-01 | 2021-12-16 | Schott Ag | Method and device for scratching thin glass as well as scratched thin glass |
| JP6424652B2 (en) * | 2015-02-02 | 2018-11-21 | 三星ダイヤモンド工業株式会社 | Holder, holder unit and scribing device |
| KR101721125B1 (en) * | 2015-12-30 | 2017-04-10 | 주식회사 에스에프에이 | Glass cutting device |
| TWI654148B (en) | 2018-02-14 | 2019-03-21 | 旭東機械工業股份有限公司 | Plate cutting apparatus |
| CN109623763A (en) * | 2018-12-25 | 2019-04-16 | 亚杰科技（江苏）有限公司 | A kind of center line planning device equipped with elastic roller |
| JP7360263B2 (en) * | 2019-07-18 | 2023-10-12 | Thk株式会社 | actuator |
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|---|---|---|---|---|
| CN1517186A (en) * | 2003-01-15 | 2004-08-04 | Thk株式会社 | Marking machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08225333A (en) * | 1995-02-21 | 1996-09-03 | Asahi Glass Co Ltd | Method for cutting plate glass and system therefor |
| JPH09295822A (en) * | 1996-05-07 | 1997-11-18 | Hitachi Ltd | Glass cutter |
| JP2005175084A (en) * | 2003-12-09 | 2005-06-30 | Active Inc | Grooving process and equipment for cleaving/separating semiconductor material |
| KR100660794B1 (en) * | 2005-12-05 | 2006-12-22 | 주식회사 탑 엔지니어링 | Apparatus and method for measuring wear of the wheel using vcm |
| KR20070103188A (en) * | 2006-04-18 | 2007-10-23 | 주식회사 탑 엔지니어링 | Apparatus for scribing substrate |
| KR100863438B1 (en) * | 2006-05-08 | 2008-10-16 | 주식회사 탑 엔지니어링 | Apparatus And Method for Scribing Substrate Using Synchronized Multi-axis |
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2009
- 2009-02-27 JP JP2009045718A patent/JP2009274434A/en active Pending
- 2009-03-24 TW TW098109474A patent/TWI488819B/en active
- 2009-04-14 CN CN2009101327109A patent/CN101562127B/en active Active
- 2009-04-15 KR KR1020090032546A patent/KR101634803B1/en active IP Right Grant
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1517186A (en) * | 2003-01-15 | 2004-08-04 | Thk株式会社 | Marking machine |
Non-Patent Citations (1)
| Title |
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| JP特开2003-2675A 2003.01.08 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI488819B (en) | 2015-06-21 |
| JP2009274434A (en) | 2009-11-26 |
| TW200948728A (en) | 2009-12-01 |
| CN101562127A (en) | 2009-10-21 |
| KR20090110238A (en) | 2009-10-21 |
| KR101634803B1 (en) | 2016-06-29 |
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