CN101550056B - A thermal plasma coal cracking - gasification coupling process and reaction unit - Google Patents

A thermal plasma coal cracking - gasification coupling process and reaction unit Download PDF

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CN101550056B
CN101550056B CN 200910083705 CN200910083705A CN101550056B CN 101550056 B CN101550056 B CN 101550056B CN 200910083705 CN200910083705 CN 200910083705 CN 200910083705 A CN200910083705 A CN 200910083705A CN 101550056 B CN101550056 B CN 101550056B
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CN101550056A (en
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程易
吴昌宁
金涌
颜彬航
双玥
章莉
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Tsinghua University
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    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Abstract

The present invention discloses a thermal plasma coal cracking-gasification coupling process and reaction unit, which pertains to the technical field of coal chemical industry. The present invention introduces a fast gas-solid separator and coal gasification reactor behind the plasma coal cracking reaction unit. This unit may realize the coupling of plasma coal cracking and coal gasification, comprehensively utilizes the high-level energy in gas cooling stage, particularly the high level energy of coal powder, forms a large amount of gaseous byproducts and raises the overall conversion rate ofcoal and the comprehensive value of the process. The present invention may make full use of the high-level energy carried by the reaction products during plasma coal cracking, particularly the post-reaction coal powder, increases the reaction time and course of coal powder, may increase the overall conversion rate of coal, and obtain the gaseous byproducts like CO and H2 from the added coal gasification reactor during coal gasification reaction. Comparing with conventional technology, the comprehensive value of the plasma coal cracking process is greatly increased.

Description

A kind of thermal plasma coal cracking is separated-gasification coupling process and reaction unit
Technical field
The invention belongs to technical field of coal chemical industry, particularly a kind of thermal plasma coal cracking is separated-gasification coupling process and reaction unit.
Background technology
Acetylene is important basic Organic Chemicals.The commercial run of producing acetylene mainly contains calcium carbide route, methane portion oxidation method and methane electrocracking method, and wherein calcium carbide route acetylene technical maturity accounts for absolute ratio in the industrial production, but pollution and energy consumption are all higher relatively.
Coal plasma pyrolysis system acetylene is a direct chemical industry path for transformation of new, promising coal; Correlative study starts from the Britain Sheffield university of the sixties in 20th century: in the arc heat plasma jet of high temperature, Gao Han, high reaction activity, the volatile matter of coal even fixed carbon can be converted into acetylene.After this, a large amount of researchs concentrate on countries such as Britain, the U.S., Germany, India, the FSU.Chinese scholar and engineering technical personnel have carried out a large amount of fundamental researchs and engineering research since the nineties in this field.Because China's hydrocarbon resources is deficient relatively, and coal resource is abundant, so coal plasma pyrolysis system acetylene process has important potential industrial prospect as a kind of cleaning and the short coal conversion process of flow process aspect the chemical utilization of coal.
U.S. AVCO company has accomplished the test of 1MW level full scale plant in 1980, the plasma generator power input is 807kW, makes water do quenching medium, and per-unit production energy consumption is a 10.5kWh/kg acetylene before the gas delivery.Germany Huels company and Bergbau Forschung GmbH company (Germany mining research company, existing name DMT) in the cooperation eighties, have built up and have tested the pilot plant of 1.25MW, and the per-unit production energy consumption of being obtained is 14~16kWh/kg acetylene.
Xinjiang of China sky industry group has set up the coal plasma pyrolysis system acetylene unit platform of 2MW and 5MW in the period of 2006~2009, carried out experimental study work.
There is general character in the testing apparatus that domestic and international different research institution adopted aspect system's formation, device mainly comprises 3 common parts, i.e. plasma producing apparatus, reactor drum (comprise and mixing and conversion zone), chilling and tripping device.Still there is significant common limitation in the existing plasma coal cracking process of each research institution's exploitation both at home and abroad aspect energy utilization efficiency; Be embodied as: coal dust contact with thermal plasma generation Millisecond with scission reaction after; Through spraying liquid water, cold coal dust or low-carbon alkanes materials such as (like propane), guarantee the yield of acetylene product to reach the chilling effect of reaction product; The temperature of reaction product is usually within the scope of 1400~2000K before the chilling; The temperature of chilling afterreaction product is reduced to below the 800K; Reaction product is particularly reacted the entrained high-order energy of back coal dust and is consumed with the mode of chilling; Its value has directly restricted the economic benefit that this process can obtain for 30~60% of the input gross electric capacity.
Target of the present invention is to improve existing coal plasma pyrolysis device, fully utilizes the high-order energy of this process reaction product, improves the overall conversion of coal and the comprehensive value of process.
Summary of the invention
The purpose of this invention is to provide a kind of thermal plasma coal cracking and separate-gasification coupling process and reaction unit.
A kind of thermal plasma coal cracking is separated-the gasification coupling reaction unit; It is characterized in that; 4 upper ends, coal scission reaction chamber are provided with plasma generator 2 and coal dust feeding unit 3, and coal scission reaction chamber is provided with coal gasification reactor 14 times, and 4 lower ends, coal scission reaction chamber are provided with coal scission reaction chamber outlet 5; The outlet 5 of coal scission reaction chamber is necking down, exports 5 undergauge outer wall perimeter in coal scission reaction chamber and settles quenched water nozzle 10; Coal scission reaction chamber exports 5 lower ends gas-solid quick disconnector 6 is set; It is jacket structured 8 that coal scission reaction chamber outlet 5 and gas-solid quick disconnector 6 upper ends form, and jacket structured 8 crack is the annular space shape, and jacket structured 8 are under the quenched water nozzle 10; Quenched water receiving tank 12 is set around gas-solid quick disconnector 6; Quenched water receiving tank 12 is divided into two portions with coal gasification reactor 1, and quenched water receiving tank 12 tops are air cooling chamber 9, and quenched water receiving tank 12 bottoms are coal gasification reaction chamber 16; Gas-solid quick disconnector 6 lower ends are gas-solid quick disconnector discharge 7; Outer wall peripheral direction along gas-solid quick disconnector discharge 7 is settled gasification nozzle 17, and 9 outer walls periphery is settled cracking gas product outlet 11 along the air cooling chamber, and 16 outer walls periphery is settled gasification products export 18 along the coal gasification reaction chamber; Coal gasification reactor 1 bottom is provided with coal gasification reactor bottom fluid-tight 19; Fluid-tight 19 bottoms, coal gasification reactor bottom are cinder mouth 20; Cinder mouth 20 links to each other with water purifier 22 through lime-ash settling vessel 21; Coal gasification reactor 1 is provided with leakage fluid dram 23 in fluid-tight 19 supernatant zones, coal gasification reactor bottom, and leakage fluid dram 23 links to each other with water purifier 22; Quenched water receiving tank 12 is connected with steam separator 13; Steam separator 13 1 ends are connected with gasification nozzle 17 through cyclic steam pipe 14; The other end links to each other with water purifier 22 through separator outlet 15, and water purifier 22 links to each other with quenched water nozzle 10 through water circulating pump 24.
Said quenched water nozzle 10 is 6~120.
Said gas-solid sharp separation discharge 7 is column type or taper.
Said gasification nozzle 17 is 6~60.
Said cracking gas product outlet 11 is 2~12.
Said gasification products export 18 is 2~12.
A kind of thermal plasma coal cracking is separated-gasification coupling process, it is characterized in that, this process step is:
(1) plasma body gets into coal scission reaction chamber 4 through plasma generator 2; With the coal dust generation coal scission reaction that gets into coal scission reaction chamber 4 through coal dust feeding unit 3, the temperature of reaction in the coal scission reaction chamber 4 is 2000~4000K, and reaction product is discharged through coal scission reaction section outlet 5; This reaction product is a gas-solid mixture; The temperature of this gas-solid mixture is 1200~2000K, and gas-solid mixture gets into air cooling chamber 9, and the temperature in the air cooling chamber 9 is 350~800K;
(2) above-mentioned reaction product realizes that through gas-solid quick disconnector 6 the gas-solid biphase separates; Solid product and part gas-phase product get into coal gasification reaction chamber 16 through gas-solid quick disconnector discharge 7; All the other gas-phase products are outlet 5 and jacket structured 8 of gas-solid quick disconnector 6 formation through coal scission reaction chamber; Behind the chilling agent chilling of quenched water nozzle 10 ejections, export 11 discharge systems through cracking gas product, steam separator 13 is collected and got into to the chilling agent by quenched water receiving tank 12; The steam that is got by steam separator 13 separation is delivered to gasification nozzle 17 through cyclic steam pipe 14, and the liquid that is got by steam separator 13 separation gets into water purifier 22, delivers to quenched water nozzle 10 through water circulating pump 24 afterwards;
(3) above-mentioned solid product and part gas-phase product through gas-solid quick disconnector discharge 7 entering coal gasification reaction chambeies 16 are with the hot steam generation coal gasification reaction that gets into coal gasification reaction chambeies 16 through gasification nozzle 17; Coal gasification reaction chamber 16 interior reaction temperatures are 800~2000K, and reacted gas-phase product is through gasification products export 18 discharge systems; Reacted solid product is assembled in coal gasification reactor 1 bottom, separates with gas-phase product through the liquid-gas interface of coal gasification reactor bottom fluid-tight 19, and by cinder mouth 20 discharge systems; The temperature of coal gasification reactor bottom fluid-tight 19 is 320~370K; Supernatant in coal gasification reactor bottom fluid-tight 19 zones is delivered to water purifier 22 through leakage fluid dram 23; The water that cinder mouth 20 is discharged is collected through lime-ash settling vessel 21 and is delivered to water purifier 22, and the water in the water purifier 22 is delivered to quenched water nozzle 10 through water circulating pump 24.
Said coal dust is a kind of in the pulverulent mixture of pulverulent mixture or coal and refinery coke of solid coal dust, coal and biomass.
Said plasma generator 2 working gass are at least a in hydrogen, nitrogen, oxygen and the water vapour.
Said plasma body is a kind of in DC arc plasma, high frequency plasma or the microwave plasma.
Beneficial effect of the present invention is: the present invention separates-the novel reaction device of gasification coupling process to form a kind of thermal plasma coal cracking of realizing through after the coal plasma pyrolysis reaction unit, setting up gas-solid quick disconnector and coal gasification reactor; Injection water steam makes coal dust continue to take place coal gasification reaction in the coal gasification reactor of setting up; And then reach the overall conversion that improves the coal cracker and the purpose of process synthesis value; The present invention can make full use of the plasma coal cracking process reaction product and especially react the entrained high-order energy of back coal dust; The reaction times and the course of coal dust have been increased; The overall conversion of coal dust can be improved, the gas by-product of a large amount of coal gasification reaction processes can be obtained from the coal gasification reactor of setting up, like CO and H 2, the comprehensive value of plasma coal cracking process will increase substantially than conventional art.
Description of drawings
Fig. 1 is that thermal plasma coal cracking is separated-gasification coupling device synoptic diagram;
Label among the figure: 1-coal gasification reactor; The 2-plasma generator; 3-coal dust feeding unit; 4-coal scission reaction chamber; The outlet of 5-coal scission reaction chamber; 6-gas-solid quick disconnector; 7-gas-solid quick disconnector discharge; 8-is jacket structured; 9-air cooling chamber; 10-quenched water nozzle; The outlet of 11-cracking gas product; 12-quenched water receiving tank; The 13-steam separator; 14-cyclic steam pipe; The 15-separator outlet; 16-coal gasification reaction chamber; 17-gasification nozzle; 18-gasification products export; The bottom fluid-tight of 19-coal gasification reactor; 20-cinder mouth; 21-lime-ash settling vessel; The 22-water purifier; The 23-leakage fluid dram; The 24-water circulating pump.
Embodiment
Below in conjunction with accompanying drawing the present invention is described further:
Embodiment 1
A kind of thermal plasma coal cracking is separated-the gasification coupling reaction unit; As shown in Figure 1,4 upper ends, coal scission reaction chamber are provided with plasma generator 2 and coal dust feeding unit 3, and coal scission reaction chamber is provided with coal gasification reactor 14 times; The internal diameter of coal gasification reactor 1 is 300mm; 4 lower ends, coal scission reaction chamber are provided with coal scission reaction chamber outlet 5, and the outlet 5 of coal scission reaction chamber is necking down, export 5 undergauge outer wall perimeter in coal scission reaction chamber and settle quenched water nozzle 10; Coal scission reaction chamber exports 5 lower ends gas-solid quick disconnector 6 is set, and it is jacket structured 8 that coal scission reaction chamber outlet 5 and gas-solid quick disconnector 6 upper ends form, and jacket structured 8 crack is the annular space shape; Annular space thickness is 10mm, and the annular space height is 50mm, and jacket structured 8 are under the quenched water nozzle 10; Export 5 undergauge outer wall perimeter and settle three layers of quenched water nozzle 10 in jacket structured 8 outlets 20,40 of distance, the coal scission reaction chamber of 60mm, 12 every layer, the nozzle of adjacent layers staggers 10 °; Each nozzle is settled along the direction perpendicular to the gas-phase product flow velocity; Around gas-solid quick disconnector 6, quenched water receiving tank 12 is set, quenched water receiving tank 12 is divided into two portions with coal gasification reactor 1, and quenched water receiving tank 12 tops are air cooling chamber 9; Quenched water receiving tank 12 bottoms are coal gasification reaction chamber 16; Gas-solid quick disconnector 6 lower ends are gas-solid quick disconnector discharge 7, and gas-solid quick disconnector discharge 7 is taper, and the opening part internal diameter is 120mm; With the distance of coal scission reaction chamber outlet 5 be 250mm; Outer wall peripheral direction along gas-solid quick disconnector discharge 7 is settled gasification nozzle 17, and gasification nozzle 17 is placed in the position of gas-solid quick disconnector discharge 7 top 10mm distances, evenly settles 18 along the outer wall peripheral direction of gas-solid quick disconnector discharge 7; 9 outer walls periphery is settled 4 cracking gas product outlets 11 along the air cooling chamber, and 16 outer walls periphery is settled 4 gasification products exports 18 along the coal gasification reaction chamber; Coal gasification reactor 1 bottom is provided with coal gasification reactor bottom fluid-tight 19; Distance between gas-solid quick disconnector discharge 7 and the coal gasification reactor bottom fluid-tight 19 is 800mm; Fluid-tight 19 bottoms, coal gasification reactor bottom are cinder mouth 20; Cinder mouth 20 links to each other with water purifier 22 through lime-ash settling vessel 21, and coal gasification reactor 1 is provided with leakage fluid dram 23 in fluid-tight 19 supernatant zones, coal gasification reactor bottom, and leakage fluid dram 23 links to each other with water purifier 22; Quenched water receiving tank 12 is connected with steam separator 13; Steam separator 13 1 ends are connected with gasification nozzle 17 through cyclic steam pipe 14; The other end links to each other with water purifier 22 through separator outlet 15, and water purifier 22 links to each other with quenched water nozzle 10 through water circulating pump 24.
A kind of thermal plasma coal cracking is separated-gasification coupling process, adopts said apparatus, and process step is:
(1) the direct current arc hydrogen plasma gets into coal scission reaction chamber 4 through plasma generator 2; With the median size that gets into coal scission reaction chambeies 4 through coal dust feeding unit 3 be the dry coal powder particles generation coal scission reaction of 60 μ m; Temperature of reaction in the coal scission reaction chamber 4 is 2800~3500K; Reaction product is discharged through coal scission reaction section outlet 5, and this reaction product is a gas-solid mixture, and the temperature of this gas-solid mixture is 1600~1800K; Gas-solid mixture gets into air cooling chamber 9, and the temperature in the air cooling chamber 9 is 700~800K;
(2) above-mentioned reaction product realizes that through gas-solid quick disconnector 6 the gas-solid biphase separates; Solid product and part gas-phase product get into coal gasification reaction chamber 16 through gas-solid quick disconnector discharge 7; All the other gas-phase products are outlet 5 and jacket structured 8 of gas-solid quick disconnector 6 formation through coal scission reaction chamber; Behind the chilling agent chilling of quenched water nozzle 10 ejections, export 11 discharge systems through cracking gas product, steam separator 13 is collected and got into to the chilling agent by quenched water receiving tank 12; The steam that is got by steam separator 13 separation is delivered to gasification nozzle 17 through cyclic steam pipe 14, and the liquid that is got by steam separator 13 separation gets into water purifier 22, delivers to quenched water nozzle 10 through water circulating pump 24 afterwards;
(3) above-mentioned solid product and part gas-phase product through gas-solid quick disconnector discharge 7 entering coal gasification reaction chambeies 16 are with the hot steam generation coal gasification reaction that gets into coal gasification reaction chambeies 16 through gasification nozzle 17; Coal gasification reaction chamber 16 interior reaction temperatures are 1000~1300K, and reacted gas-phase product is through gasification products export 18 discharge systems; Reacted solid product is assembled in coal gasification reactor 1 bottom, separates with gas-phase product through the liquid-gas interface of coal gasification reactor bottom fluid-tight 19, and by cinder mouth 20 discharge systems; The temperature of coal gasification reactor bottom fluid-tight 19 is 350~370K; Supernatant in coal gasification reactor bottom fluid-tight 19 zones is delivered to water purifier 22 through leakage fluid dram 23; The water that cinder mouth 20 is discharged is collected through lime-ash settling vessel 21 and is delivered to water purifier 22, and the water in the water purifier 22 is delivered to quenched water nozzle 10 through water circulating pump 24.
The pressure of coal gasification reactor bottom fluid-tight 19, gasification products export 18 and separator outlet 15 is all adjustable.
In the present embodiment, the pressure at plasma generator 2 places is 140~150kPa, and the pressure that cracking gas product exports 11 places is 100~105kPa, and the pressure in the coal gasification reaction chamber 16 is 135~140kPa.
This coal plasma pyrolysis-gasification coupling reaction unit is separated device with the preceding thermal plasma coal cracking of improvement and compared: the overall conversion of coal dust brings up to 73~78% by 38~43%, near the limit transformation efficiency 81% of used coal dust; The product of gas-phase product and coal dust always generate heat account for the input gross electric capacity ratio bring up to 65~70% by 17~25%; Its essence is that the high-order energy that quenched water is taken away is used to provide the coal gasification reaction process needed reaction heat, CO and H in the reaction product of coal gasification reaction process 2Total volume fraction surpass 80%; The specific energy consumption of revolution unit mass coal dust drops to 2.8~3.2kWh/kg by 5.2~5.6kWh/kg.

Claims (10)

1. a thermal plasma coal cracking is separated-the gasification coupling reaction unit; It is characterized in that; Upper end, coal scission reaction chamber (4) is provided with plasma generator (2) and coal dust feeding unit (3), and coal gasification reactor (1) is set under the coal scission reaction chamber (4), and lower end, coal scission reaction chamber (4) is provided with coal scission reaction chamber outlet (5); Coal scission reaction chamber outlet (5) is necking down, and outlet (5) undergauge outer wall perimeter is settled quenched water nozzle (10) in coal scission reaction chamber; Outlet (5) lower end, coal scission reaction chamber is provided with gas-solid quick disconnector (6); Coal scission reaction chamber outlet (5) forms jacket structured (8) with gas-solid quick disconnector (6) upper end; The crack of jacket structured (8) is the annular space shape; Jacket structured (8) are under the quenched water nozzle (10), at gas-solid quick disconnector (6) quenched water receiving tank (12) are set all around, and quenched water receiving tank (12) is divided into two portions with coal gasification reactor (1); Quenched water receiving tank (12) top is air cooling chamber (9); Quenched water receiving tank (12) bottom is coal gasification reaction chamber (16), and gas-solid quick disconnector (6) lower end is a gas-solid quick disconnector discharge (7), settles gasification nozzle (17) along the outer wall peripheral direction of gas-solid quick disconnector discharge (7); The outer wall periphery is settled cracking gas product outlet (11) along air cooling chamber (9), and the outer wall periphery is settled gasification products export (18) along coal gasification reaction chamber (16); Coal gasification reactor (1) bottom is provided with coal gasification reactor bottom fluid-tight (19); Fluid-tight (19) bottom, coal gasification reactor bottom is cinder mouth (20); Cinder mouth (20) links to each other with water purifier (22) through lime-ash settling vessel (21); Coal gasification reactor (1) is provided with leakage fluid dram (23) in fluid-tight (19) supernatant zone, coal gasification reactor bottom, and leakage fluid dram (23) links to each other with water purifier (22); Quenched water receiving tank (12) is connected with steam separator (13); Steam separator (13) one ends are connected with gasification nozzle (17) through cyclic steam pipe (14); The other end links to each other with water purifier (22) through separator outlet (15), and water purifier (22) links to each other with quenched water nozzle (10) through water circulating pump (24).
2. a kind of thermal plasma coal cracking according to claim 1 is separated-the gasification coupling reaction unit, it is characterized in that, said quenched water nozzle (10) is 6~120.
3. a kind of thermal plasma coal cracking according to claim 1 is separated-the gasification coupling reaction unit, it is characterized in that, said gas-solid quick disconnector discharge (7) is cylindricality or taper.
4. a kind of thermal plasma coal cracking according to claim 1 is separated-the gasification coupling reaction unit, it is characterized in that, said gasification nozzle (17) is 6~60.
5. a kind of thermal plasma coal cracking according to claim 1 is separated-the gasification coupling reaction unit, it is characterized in that, said cracking gas product outlet (11) is 2~12.
6. a kind of thermal plasma coal cracking according to claim 1 is separated-the gasification coupling reaction unit, it is characterized in that, said gasification products export (18) is 2~12.
7. a thermal plasma coal cracking is separated-gasification coupling process, it is characterized in that, this process step is:
(1) plasma body gets into coal scission reaction chamber (4) through plasma generator (2); With the coal dust generation coal scission reaction that gets into coal scission reaction chamber (4) through coal dust feeding unit (3), the temperature of reaction in the coal scission reaction chamber (4) is 2000~4000K, and reaction product is discharged through coal scission reaction chamber outlet (5); This reaction product is a gas-solid mixture; The temperature of this gas-solid mixture is 1200~2000K, and gas-solid mixture gets into air cooling chamber (9), and the temperature in air cooling chamber (9) is 350~800K;
(2) above-mentioned reaction product realizes that through gas-solid quick disconnector (6) the gas-solid biphase separates; Solid product and part gas-phase product get into coal gasification reaction chamber (16) through gas-solid quick disconnector discharge (7); All the other gas-phase products are through jacket structured (8) of coal scission reaction chamber outlet (5) with gas-solid quick disconnector (6) formation; Behind the chilling agent chilling of quenched water nozzle (10) ejection; Through cracking gas product outlet (11) discharge system, steam separator (13) is collected and is got in the chilling agent by quenched water receiving tank (12); The steam that is got by steam separator (13) separation is delivered to gasification nozzle (17) through cyclic steam pipe (14), and the liquid that is got by steam separator (13) separation gets into water purifier (22), delivers to quenched water nozzle (10) through water circulating pump (24) afterwards;
(3) above-mentioned solid product and part gas-phase product through gas-solid quick disconnector discharge (7) entering coal gasification reaction chamber (16) are with the hot steam generation coal gasification reaction that gets into coal gasification reaction chamber (16) through gasification nozzle (17); Coal gasification reaction chamber (16) interior reaction temperature is 800~2000K, and reacted gas-phase product is through gasification products export (18) discharge system; Reacted solid product is assembled in coal gasification reactor (1) bottom, separates with gas-phase product through the liquid-gas interface of coal gasification reactor bottom fluid-tight (19), and by cinder mouth (20) discharge system; The temperature of coal gasification reactor bottom fluid-tight (19) is 320~370K; Supernatant in coal gasification reactor bottom fluid-tight (19) zone is delivered to water purifier (22) through leakage fluid dram (23); The water that cinder mouth (20) is discharged is collected through lime-ash settling vessel (21) and is delivered to water purifier (22), and the water in the water purifier (22) is delivered to quenched water nozzle (10) through water circulating pump (24).
8. a kind of thermal plasma coal cracking according to claim 7 is separated-gasification coupling process, it is characterized in that, said coal dust is a kind of in the pulverulent mixture of pulverulent mixture or coal and refinery coke of solid coal dust, coal and biomass.
9. a kind of thermal plasma coal cracking according to claim 7 is separated-gasification coupling process, it is characterized in that, said plasma generator (2) working gas is any one in hydrogen, nitrogen, oxygen and the water vapour; Any two kinds of combinations in hydrogen, nitrogen and the water vapour; Any two kinds of combinations in oxygen, nitrogen and the water vapour; The combination of hydrogen, nitrogen and three kinds of gases of water vapour; The combination of oxygen, nitrogen and three kinds of gases of water vapour.
10. a kind of thermal plasma coal cracking according to claim 7 is separated-gasification coupling process, it is characterized in that, said plasma body is a kind of in DC arc plasma, high frequency plasma or the microwave plasma.
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