CN101544871B - Efficient scratch-free glass polishing solution and manufacturing method thereof - Google Patents
Efficient scratch-free glass polishing solution and manufacturing method thereof Download PDFInfo
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- CN101544871B CN101544871B CN 200910031539 CN200910031539A CN101544871B CN 101544871 B CN101544871 B CN 101544871B CN 200910031539 CN200910031539 CN 200910031539 CN 200910031539 A CN200910031539 A CN 200910031539A CN 101544871 B CN101544871 B CN 101544871B
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- rare earth
- earth oxide
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- free glass
- suspension
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- 238000005498 polishing Methods 0.000 title claims abstract description 102
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 239000011521 glass Substances 0.000 title claims abstract description 19
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims abstract description 35
- 239000000725 suspension Substances 0.000 claims abstract description 31
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000012530 fluid Substances 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 12
- 238000003756 stirring Methods 0.000 claims description 11
- 238000002156 mixing Methods 0.000 claims description 9
- 239000002270 dispersing agent Substances 0.000 claims description 8
- 229920002521 macromolecule Polymers 0.000 claims description 8
- 239000002994 raw material Substances 0.000 claims description 8
- 238000000227 grinding Methods 0.000 claims description 7
- 239000004094 surface-active agent Substances 0.000 claims description 7
- 230000002776 aggregation Effects 0.000 claims description 4
- 238000004220 aggregation Methods 0.000 claims description 3
- 239000008365 aqueous carrier Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 abstract description 4
- 239000002131 composite material Substances 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 230000003993 interaction Effects 0.000 abstract description 2
- 230000007812 deficiency Effects 0.000 abstract 1
- 238000010129 solution processing Methods 0.000 abstract 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 6
- 239000002202 Polyethylene glycol Substances 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- 229920000233 poly(alkylene oxides) Polymers 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 4
- 239000004576 sand Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 239000011324 bead Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- -1 polyacid Chemical class 0.000 description 3
- 230000006641 stabilisation Effects 0.000 description 3
- 238000011105 stabilization Methods 0.000 description 3
- 101000598921 Homo sapiens Orexin Proteins 0.000 description 2
- 101001123245 Homo sapiens Protoporphyrinogen oxidase Proteins 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 102100029028 Protoporphyrinogen oxidase Human genes 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920000151 polyglycol Polymers 0.000 description 2
- 239000010695 polyglycol Substances 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- JBGVCAMENODHEH-UHFFFAOYSA-N [Cl-].[NH4+].CC(CCCCCCCCCCC)(C)C Chemical compound [Cl-].[NH4+].CC(CCCCCCCCCCC)(C)C JBGVCAMENODHEH-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000008052 alkyl sulfonates Chemical class 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000004033 diameter control Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- BTCSSZJGUNDROE-UHFFFAOYSA-N gamma-aminobutyric acid Chemical compound NCCCC(O)=O BTCSSZJGUNDROE-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Abstract
Description
The ball milling time | Polishing speed (nm/min) | Surface tear |
5 | 803 | Few |
10 | 739 | Do not have |
30 | 581 | Do not have |
60 | 368 | Do not have |
Rare earth oxide (%) | Amorphous silicate (%) | Polishing speed (nm/min) | |
A | 10 | 0 | 359 |
B | 10 | 1 | 432 |
C | 10 | 3 | 776 |
D | 10 | 5 | 513 |
E | 10 | 7 | 551 |
Pyridine (gram) | Polishing speed (nm/min) |
0 | 356 |
2 | 520 |
8 | 779 |
20 | 617 |
Grinding bead and suspension solid ratio | Polishing speed (nm/min) |
1∶5 | 529 |
1∶3 | 729 |
1∶1 | 613 |
1∶0.5 | 617 |
Rare earth oxide (%) | Silicate polymer (%) | Macromolecule dispersing agent (as, polyamide, or dodecyl PEO alcohol, or polymethylacrylic acid polyalkylene oxide ester, etc.) (%) | The polyfunctional group accelerator (as, oxalic acid, pyridine, acetate, succinic acid, reanal, etc.) (10%) | Surfactant (as, the trimethyldodecane ammonium chloride, or mix PEO PPOX ether, or alkylphosphonic, etc.) | Polishing speed (nm/min) |
0.1 | 30 | ?1 | 0.5 | 0.1 | 159 |
50 | 2 | ?5 | 0.8 | 0.008 | 1037 |
30 | 0.5 | ?3 | 1.5 | 0.05 | 892 |
0.5 | 30 | ?6 | 3 | 0.02 | 273 |
1 | 10 | ?0.5 | 3 | 0.1 | 333 |
0.1 | 0.5 | ?10 | 0.5 | 0.05 | 131 |
5 | 0 | ?0.5 | 0.1 | 1 | 269 |
10 | 5 | ?2 | 10 | 0.00 | 674 |
40 | 0.5 | ?3 | 1.5 | 0.005 | 983 |
5 | 1 | ?0.5 | 0.1 | 10 | 585 |
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 200910031539 CN101544871B (en) | 2009-04-22 | 2009-04-22 | Efficient scratch-free glass polishing solution and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 200910031539 CN101544871B (en) | 2009-04-22 | 2009-04-22 | Efficient scratch-free glass polishing solution and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
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CN101544871A CN101544871A (en) | 2009-09-30 |
CN101544871B true CN101544871B (en) | 2012-12-26 |
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CN 200910031539 Active CN101544871B (en) | 2009-04-22 | 2009-04-22 | Efficient scratch-free glass polishing solution and manufacturing method thereof |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102358825B (en) * | 2011-08-05 | 2013-08-21 | 清华大学 | Polishing composition for sapphire wafer |
CN102627917A (en) * | 2012-03-23 | 2012-08-08 | 江苏中晶科技有限公司 | Polishing accelerating agent for glass and silicon-containing compound and production method and application thereof |
CN102627916B (en) * | 2012-03-23 | 2014-09-03 | 江苏中晶科技有限公司 | Glass polishing solution with reinforcement function |
CN102634284A (en) * | 2012-03-27 | 2012-08-15 | 蓝思旺科技(深圳)有限公司 | Polishing solution and preparation method thereof |
CN106883768A (en) * | 2017-04-20 | 2017-06-23 | 宁波日晟新材料有限公司 | Alkali glass polishing fluid and application under slightly acidic condition |
CN107365560A (en) * | 2017-08-04 | 2017-11-21 | 安徽宽居电器有限公司 | A kind of efficient polishing fluid of glass processing |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1919950A (en) * | 2006-08-23 | 2007-02-28 | 孙韬 | High precision polishing liquid, preparation method and use thereof |
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- 2009-04-22 CN CN 200910031539 patent/CN101544871B/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1919950A (en) * | 2006-08-23 | 2007-02-28 | 孙韬 | High precision polishing liquid, preparation method and use thereof |
Non-Patent Citations (1)
Title |
---|
刘光华.稀土玻璃陶瓷材料.《稀土材料与应用技术》.化学工业出版社,2005,第166-167页. * |
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CN101544871A (en) | 2009-09-30 |
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Denomination of invention: Efficient scratch free glass polishing solution and its production method Effective date of registration: 20231229 Granted publication date: 20121226 Pledgee: Industrial and Commercial Bank of China Changzhou Wujin Branch Pledgor: Jiangsu Wujin High tech Investment Holding Co.,Ltd. Registration number: Y2023980075099 |
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