CN101518831B - Floating chuck apparatus and floating chuck unit - Google Patents
Floating chuck apparatus and floating chuck unit Download PDFInfo
- Publication number
- CN101518831B CN101518831B CN 200910117961 CN200910117961A CN101518831B CN 101518831 B CN101518831 B CN 101518831B CN 200910117961 CN200910117961 CN 200910117961 CN 200910117961 A CN200910117961 A CN 200910117961A CN 101518831 B CN101518831 B CN 101518831B
- Authority
- CN
- China
- Prior art keywords
- chuck
- aforementioned
- floating
- workpiece
- guide pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The invention provides a floating chuck apparatus and a floating chuck unit with compaction implemented by simple composition. The floating chuck apparatus(10) has a shaft(2) extending in an up-and-down direction so that the absorption part at the front end of the shaft can absorb workpieces for retaining the chuck(20) of the workpiece(W) which can be floating relatively to the movable substrate(3); the floating chuck unit has a plurality of parallel-arranged floating chuck apparatus; in the floating chuck apparatus or the floating chuck unit, the chuck(20) has a flange part(22) and a chuck through hole(11c) with an plug-in shaft(21), and a first guide block(11) for supporting the flange part(22) and a second guide block(12), cooperated with the first guide block, for clamping the flange part(22) from upside; gaps(n1,n2) are formed between the first guide block(11) and the flange part(22), and between the chuck through hole(11c) and the shaft(21).
Description
Technical field
The present invention relates to a kind of will be that the floating chuck (floating chuck) that can float installs and be set up in parallel the floating chuck unit that a plurality of these floating chuck apparatus constitute by adsorbing the chuck relative moving mechanism supporting that keep workpiece.
Background technology
For example in order to assemble micro-element making under the situation such as precision equipment, and need to keep the small-sized chuck of these micro-elements.As such chuck, for example patent documentation 1 is disclosed like that in the past, and known have a structure that adsorbs workpiece (micro-element) based on vacuum.This chuck is in the adsorption section that the chuck leading section disposes porous matter, by making the front end face butt of workpiece and this adsorption section, and carries out air from the cardinal extremity face side group of adsorption section in vacuum and attracts, and workpiece is adsorbed onto the front end face of adsorption section.
In such chuck, when for example ultraprecise parts such as optical element being handled as workpiece, require to improve this chuck and the positioning accuracy that the pallet of workpiece can be set, according to circumstances, can be required the above location of precision of the travel mechanism of chuck.
Under this situation, in the horizontal direction position of the side directed chuck of pallet, the practice that makes both center unanimities is effectively by final, therefore, need possess the relocation mechanism of chuck relative moving mechanism supporting for floating.
As relocation mechanism, general known have: linear guide is overlapped in X-axis, Y-axis, makes its method of sliding on the XY plane (for example with reference to patent documentation 2); The method (for example with reference to patent documentation 3) that power by spring supports in motionless mode; Make its method of sliding at magnet etc.
Patent documentation 1: the spy opens the 2001-88075 communique
Patent documentation 2: the spy opens flat 8-85089 communique
Patent documentation 3: real fair 6-44588 communique
But, in the assembling procedure that has used chuck, in order to boost productivity, preferably to be set up in parallel a plurality of these chucks and to keep carrying a plurality of workpiece simultaneously.But, adopting under the situation of the linear guide of overlapping use as the method for above-mentioned relocation mechanism, owing to can't avoid the maximization of mechanism self, so, can't be set up in parallel chuck, exist the problem that productivity ratio reduces.And, owing to for the action that makes linear guide is smooth and easy it has been used lubricated wet goods, so lubricated wet goods might pollute workpiece.
In addition, under the situation of using spring, can produce vibration etc. because of its elasticity, cause the axle of chuck to tilt, thereby be difficult to guarantee high positioning accuracy.And, when adopting the method for magnet, owing to workpiece might be magnetized, so be not suitable for handling precise part.
Summary of the invention
The present invention makes in view of above-mentioned problem, and its purpose is, a kind of densification of the relocation mechanism that can realize chuck and the raising of positioning accuracy are provided, and can keep, carry floating chuck apparatus and the floating chuck unit of workpiece under suitable environment.
In order to solve aforementioned problems, the present invention proposes following scheme.
Namely, the floating chuck apparatus that the present invention relates to has the axial region that extends along the vertical direction, make the adsorption section of its front end adsorb the chuck that workpiece keeps this workpiece, be supported to and float relative to the travel mechanism that this chuck is moved, it is characterized in that, aforementioned chuck has the flange part outstanding from aforementioned axial region to radial outside, is provided with to possess the inserting hole of inserting logical aforementioned axial region along the vertical direction, and supports first guide pad of said flange portion from the below; With paired with this first guide pad, second guide pad that said flange portion is sandwiched from the top; Between aforementioned second guide pad and the said flange, and aforementioned inserting hole and aforementioned axial region between be formed with the gap.
According to the floating chuck apparatus of such feature, can constitute easily by by first and second guide pad the flange part of chuck being sandwiched this, obtain relocation mechanism.Namely, since the flange part of chuck can and first guide pad between mobile in the scope in the gap that forms, and, the axial region of chuck can and insert in the interstice coverage that forms between the inserting hole of logical this axial region mobile, so chuck integral body is supported by first and second guide pad and can float at horizontal plane.
And, in floating chuck apparatus of the present invention, it is characterized in that aforementioned chuck is provided with the pallet that said workpiece is set and carries out Centered centering machine structure.
As mentioned above because chuck is supported to and can floats, so, finally can and pallet between carry out center-aligned, thus, can be effectively the align position of horizontal direction of chuck of pallet relatively, make both axis unanimity.
And, in floating chuck apparatus of the present invention, it is characterized in that aforementioned centering machine structure can be slided by aforementioned relatively axial region along the vertical direction by outer embedding one-tenth, be formed with can be with being formed on tapered portion on the aforementioned pallet chimeric tapered recess at its front end.
If when chuck is taken out of workpiece with workpiece to the pallet mounting or from pallet, this chuck descends towards pallet, then is fitted to the tapered portion of pallet by the tapered recess of centering machine structure, can carry out both center-aligned, therefore, can reliably the relative pallet of chuck be navigated to certain position.
And, because the relative chuck of this centering machine structure can slide at above-below direction, so, can not hinder chuck to the mounting of workpiece or take out of, can guarantee the smooth operation of chuck.
In addition, in floating chuck apparatus of the present invention, it is characterized in that, be provided with the chuck fixed mechanism that aforementioned relatively second guide pad of aforementioned chuck is positioned.
When as mentioned above the workpiece mounting being taken out of to pallet or from pallet, owing to carry out center-aligned between needs and the pallet, so, require chuck to float, but when taking out of with for example tabular surface of workpiece mounting beyond the pallet etc. or from tabular surface etc., by utilizing this chuck fixed mechanism that relative second guide pad of chuck is positioned, can carry out stable mounting or take out of.
Floating unit of the present invention is characterized in that, forms by being set up in parallel a plurality of above-mentioned any one floating chuck apparatus.
Owing to can realize floating of chuck based on above-mentioned easy formation, so, densification that can implement device self, thus can be set up in parallel a plurality of.Thus, therefore a plurality of workpiece of conveyance simultaneously, can realize the raising of productivity ratio.
According to floating chuck apparatus of the present invention and floating chuck unit, can constitute easily by by first and second guide pad the flange part of chuck being sandwiched this, realize floating of chuck, not only can realize the raising of positioning accuracy thus, and densification that can implement device self.
And, owing to workpiece is not bestowed lubricating oil or magnetic force, so, for workpiece, can under clean environment, take out of.
And, owing to be accompanied by being set up in parallel that this densification can implement device, so, the productivity ratio of assembling procedure can be improved.
Description of drawings
Fig. 1 is the side view of the floating chuck unit of expression present embodiment.
Fig. 2 is the sectional view of the floating chuck unit of expression present embodiment.
Fig. 3 is the sectional view that constitutes the floating chuck apparatus of floating chuck unit.
Fig. 4 is the partial enlarged drawing of Fig. 3.
Description of reference numerals
1 floating chuck unit
3 moving substrates (travel mechanism)
10 floating chuck apparatus
11 first guide pads
11c chuck inserting hole (inserting hole)
12 second guide pads
20 chucks
21 axial regions
The 21a base end part
22 flange parts
23 adsorption sections
26 centering machine structures
28 tapered recess
30 chuck fixed mechanisms
40 pallets
32 tapered portion
The n1 gap
The n2 gap
The W workpiece
The specific embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.Wherein, the embodiment of floating chuck apparatus of the present invention and the floating chuck unit of the present invention of having assembled this floating chuck apparatus are together described.
Fig. 1 is the side view of the floating chuck unit of expression present embodiment, and Fig. 2 is the sectional view of the floating chuck unit of expression present embodiment, and Fig. 3 is the sectional view that constitutes the floating chuck apparatus of floating chuck unit, and Fig. 4 is the partial enlarged drawing of Fig. 3.
As shown in Figures 1 and 2, the floating chuck unit 1 of present embodiment a plurality of by being set up in parallel (in the present embodiment being 5) floating chuck apparatus 10 constitutes, and this each floating chuck apparatus 10 is installed on the moving substrate 3 by angle bar (angle) 2.And, directly over floating chuck unit 1, dispose connection, be fixed on the pressure cylinder 4 on the moving substrate 3.
In addition, as the workpiece W that is carried by the floating chuck unit 1 of present embodiment, be object with accurate spare parts such as optical element or wrist-watch parts.And the pallet 40 of the workpiece W that mounting is such is as Fig. 1～shown in Figure 3, and it is cylindric to what extend to be upper and lower, and end face is formed with the recess 41 (with reference to Fig. 3) of mounting workpiece W thereon, and the upper end side of circumferential lateral surface becomes the tapered portion 42 towards the top undergauge.
Moving substrate 3 is used for making floating chuck unit 1 three-dimensional mobile to directions X, Y-direction and Z direction, is approximate tabular along the vertical guide configuration, and its rear side (left side of Fig. 1) is connected with not shown driving mechanism.As driving mechanism, as long as can move to three-dimensional, except the main shaft of automatics, can adopt the parts of stacked three linear guides on all directions of XYZ direction etc., can adopt various parts according to the situation of using.
For this bracket part 5, its towards above or below face become respectively first and second guide pad 11 described later, 12 the face that is mounted 6,7 can be installed, with these two faces towards front side that are mounted face 6,7 orthogonal configuration, become the carriage front 8 that is flat condition.
Below, utilize Fig. 3 and Fig. 4, each floating chuck apparatus 10 that constitutes floating chuck unit 1 is described.This floating chuck apparatus 10 is made of first guide pad 11, second guide pad 12, chuck 20, chuck fixed mechanism 30 summarys.
First guide pad 11 is to be fixed on the angle bar 2, supports the parts of the flange part 22 of chuck 20 from the below, and being with fore-and-aft direction (left and right directions of Fig. 3) is the tetragonal prism shape of length direction.
And, this first guide pad 11 in the face of top, be positioned at the face of rear side, become and the face that is mounted 6 butts of angle bar 2 and the stationary plane 11a that is fixed by bolt 13.Thus, the front side of first guide pad 11 becomes than the carriage front 8 of angle bar 2 side-prominent state forwards.
In addition, first guide pad 11 in the face of top, be positioned at the face of the front side of stationary plane 11a, become the flange bearing surface 11b with flange part 22 butts of chuck 20 described later, in this flange bearing surface 11b, be equipped with the chuck patchhole 11c that connects with sub-circular along vertical.Can in this chuck inserting hole 11c, insert the axial region of logical chuck 20 described later.
And, this second bootstrap block 12 in the face of below, be positioned at the face of rear side, become and the face that is mounted 7 butts of angle bar 2 and the stationary plane 12a that is fixed by bolt 14.Thus, the front side of second guide pad becomes than the carriage front 8 of angle bar 2 side-prominent state forwards, and first guide pad 11 and second bootstrap block 12 become the formation across bracket part arranged opposite about in the of 5 of angle bar 2.
In addition, second guide pad 12 in the face of below, be positioned at the face of the front side of stationary plane 12a, become the flange part 22 opposed flange opposed faces 12b with chuck 20 described later.And, in this flange opposed faces 12b, be equipped with the bar patchhole 12c that connects with sub-circular along vertical.Can plug in the bar 31 of logical chuck fixed mechanism 30 described later.
And, chuck 20 is used for keeping workpiece W by absorption, possess: along the axes O of extending along vertical above-below direction extend the approximate circle column axial region 21 that arranges and on the top of this axial region 21 towards the axes O radial outside to overlook the outstanding flange part 22 of approximate quadrangle shape, side is analysed and observe and is T word shape as a whole.
The bottom of axial region 21 is than the little one-level of other section diameters, and its end face is provided with the adsorption section 23 for absorption workpiece W.And, in chuck 20, being formed with the air flue 24 for the 23 attraction air from the adsorption section, this air flue 24 is by the vertical road 24a that extends upward along axes O in axial region 23 from adsorption section 23; Extend and constitute at the cross road 24b of the flange front of flange part 22 22a opening to the horizontal direction warpage with vertical road 24a till the flange part 22 on the top that arrives axial region 21.Like this, vertical road 24a and cross road 24b are in connected state, and the connecting portion 25 of the peristome by being arranged at cross road 24b is connected, attracts with not shown air hose, and workpiece W can be adsorbed in the adsorption section 23 of the lower surface of axial region.
In addition, specifically as shown in Figure 4, become base end part 21a axial region 21 and boundary flange part 22, compare with other parts and form big footpath, its diameter only is set to slightly littler than the diameter of the chuck patchhole 11c of aforementioned first guide pad 11.
In addition, be formed with embedded hole 22e at lug upper surface 22c, be used for the fitting portion 32 of the bar 31 of embedding aftermentioned chuck fixed mechanism 30.
The chuck 20 that possesses such axial region 21 and flange part 22, its axial region 22 are configured to insert towards the below from the top chuck patchhole 22c of logical first guide pad, thus, and the flange bearing surface 11b butt of the flange surface 22b of flange part 22 and first guide pad.And, second bootstrap block 12 be positioned at flange part 22 directly over, thus, flange part 22 is configured to from it to be sandwiched by first and second guide pad 11,12 down.
And as mentioned above, owing to compare with the thickness d 2 of bracket part 5, the thickness d 1 of flange part 22 is set slightly for a short time, so as shown in Figure 4, is formed with gap n1 between the flange opposed faces 12b of the lug upper surface 22c of flange part 22 and second bootstrap block 12.
In addition because the diameter of base end part 21a of the axial region 21 in the chuck 20, be configured to slightly littler than the diameter of the chuck inserting hole 11c of first guide pad 11, so, between this base end part 21a and chuck inserting hole 11c, also be formed with gap n2.In addition, present embodiment also is provided with gap n3 between flange back face 22d and carriage front 8.
Therefore, axial region 21 and flange 22 can be mobile a little in the scope of these gaps n1, n2, n3.
On the axial region 21 of the chuck 20 of said structure, as Fig. 1～shown in Figure 3, be provided with the centering machine structure 26 that the pallet 40 to chuck 20 and mounting workpiece W carries out the center contraposition.This centering machine structure 26 is tubular, with the coaxial mode of the axial region 22 outer outer peripheral face that is embedded in axial region slidably.
And, in this centering machine structure 26, as shown in Figure 3, the keyway 21b that forms along the vertical direction towards the outer peripheral face at axial region 21, inserted key member 28 from outer circumferential side, thus, can prevent that not only centering machine structure 26 around the rotation of axes O, can also be limited in the movement of above-below direction in the top/bottom latitude of keyway 21b.In addition, the head 27a of this key member 27 is outstanding to radial outside from the outer peripheral face of centering machine structure 26.
And, dispose the spring members 29 of the upper end from base end part 21a to centering machine structure 26 in the periphery of this axial region 21 with compressive state, thus, by by towards the below application of force, centering machine structure 26 is usually located at the below in the scope of keyway 21b.
In addition, the peristome in the lower surface of centering machine structure 26 is provided with centered by axes O and caves in into the taper shrinkage pool 28 of taper.It is identical with the tapered portion 42 of above-mentioned pallet 40 that the diameter of this tapered recess 28 and angle of inclination form.
Therefore, chimeric with tapered portion 42 tapers of pallet 40 by the tapered recess 28 of centering machine structure 26 when chuck 20 is taken out of workpiece W or during to pallet 40 mounting workpiece W from pallet 40, can make both axis unanimities, thereby carry out core.
Then, chuck fixed mechanism 30 is described.Chuck fixed mechanism 30 has: bar 31, be arranged on this bar 31 the lower end fitting portion 32 and to bar 31 spring members 33 of the application of force upward.
As shown in Figure 3, bar 31 is inserted among the bar inserting hole 12c of second bootstrap block 12, and at this moment, the fitting portion 32 of lower surface is incorporated in the embedded hole 22e of flange part 22.And, have on the top of bar 31 to the outstanding 31a of edge portion of radial outside, dispose spring members 33 from the 31a of this edge portion to second bootstrap block 12 in the periphery of bar 31 with compressive state, thus, bar 31 is by the upward direction application of force.And this moment is owing to form diameter than the fitting portion 32 of bar 31 big one-levels and the flange opposed faces 12b butt of second bootstrap block 12, so, limited the motion of the upward direction of bar 31.
In addition, fitting portion 35 is the multi-level cone shape towards the below undergauge, the embedded hole 22e of flange 22 also presents the concavity with multistage barrel surface corresponding with it, but because fitting portion 35 forms slightly for a short time, so, bar 31 by the state of the spring members 33 upward direction application of forces under, as shown in Figure 4, between fitting portion 35 and embedded hole 22e, be formed with gap n4.
And, directly over the bar 31 of chuck fixed mechanism 30, dispose pressure cylinder 4, when the piston rod 4a of this pressure cylinder 4 downwards outstanding, during with the upper end butt of bar 31, this bar 31 is pressed downwards, fitting portion 35 is close to chimeric with embedded hole 22e according to the consistent mode in summit separately.Thus, flange 22 relative second bootstrap blocks 12 are positioned in certain position.
Below, the function of the floating chuck unit 1 of present embodiment is described.When utilizing floating chuck unit 1 that workpiece W mounting is taken out of workpiece W to pallet 40 or from pallet 40, floating chuck unit 1 moves to axes O and the pallet 40 approximately axial positions of Fig. 1～axial region 21 shown in Figure 3, chuck 20 by the movement of the XYZ direction of moving substrate 3.At this moment, though locate by moving substrate 3, can't carry out the above location of precision of the XYZ coordinate of moving substrate 3.
Here, in each floating chuck apparatus 10 of each floating chuck unit 1 of present embodiment, in its relation of first guide pad 11, second bootstrap block 12 and bracket part 5 of chuck 20 and supporting, except the flange bearing surface 11b butt of the flange lower surface 22b of flange part 22 and first guide pad 11 and being supported, as shown in Figure 4, owing to be formed with gap n1, n2, n3, so do not join.Therefore, chuck 20 can move freely in the scope of these gaps n1, n2, n3, thereby can be smooth and easy unsteady on the XY plane.
And, if so supported under the state that can float at chuck 20, by moving substrate 3 this chuck 20 is descended towards pallet 40, then the tapered recess 28 of centering machine structure 26 is fitted in the tapered portion of pallet 40.At this moment, owing to chuck 20 can float on the XY plane, so, can be according to the axes O of pallet 40 sides alignment axial region 21.Thus, owing to can make chuck 20 follow guiding based on pallet 40, so, can easily carry out the center-aligned of chuck 20 and pallet 40.
And, since centering machine structure 26 relatively axial region 21 slide at above-below direction, so when chuck 20 during towards pallet 40 declines, this centering machine structure 26 can not hinder the mounting of 20 couples of workpiece W of chuck or take out of.
In sum, in the floating chuck apparatus 10 of present embodiment, can obtain the relocation mechanism of chuck 20 by sandwiching this and constitute easily by first and second guide pad 11,12 flange parts 22 with chuck 20.Thus, can make device self compactness, therefore, as shown in Figure 2, can be set up in parallel a plurality of floating chuck apparatus 10, constitute floating chuck unit 1, thereby can carry out the conveyance of a plurality of workpiece W simultaneously, so can improve the productivity ratio in the assembling procedure.
In addition, owing to can not bestow lubricating oil or magnetic force to workpiece W as relocation mechanism in the past, so, for workpiece W, can under clean environment, carry out conveyance.
In addition, in the floating chuck unit 1 of present embodiment, can float by making chuck 20 as mentioned above, finally be directed to pallet 40 sides, carry out center-aligned thus, but be not limited to this, can also be with the workpiece mounting or take out of the tabular surface that does not have the such tapered portion 42 of pallet 40.
At this moment, by making the piston rod 4a action of pressure cylinder 4, the bar 31 of chuck fixed mechanism 30 is pressed downwards, made fitting portion 32 chimeric with the embedded hole 22e of flange part 20.Thus, owing to chuck 20 relative second bootstrap blocks 12 can be navigated to certain position, so chuck 20 not floating ground and moving substrate 3 one moves.
If make like this, though then the positioning accuracy of chuck depends on the precision of the XYZ coordinate of moving substrate 3, chuck 20 can not have swing preparatively, can stably carry out the mounting of workpiece W and takes out of.
In addition, when so and pallet 40 beyond parts between carry out the mounting of workpiece and when taking out of, become obstruction for fear of centering machine structure 26, preferably when chuck 20 descends, make the head 27a of key member 27 of this centering machine structure 26 and miscellaneous part butt etc., the axial region 21 of centering machine structure 26 relative chucks 20 is slided upward.
More than, the embodiment of floating chuck apparatus of the present invention and floating chuck unit being had been described in detail, but only otherwise break away from technological thought of the present invention, be not limited to these modes, what can implement design alteration etc.
Claims (4)
1. a floating chuck apparatus has the axial region that extends along the vertical direction, and chuck is supported to and can floats relative to the travel mechanism that this chuck is moved, and this chuck makes the adsorption section absorption workpiece of its front end keep this workpiece, it is characterized in that,
Aforementioned chuck has the flange part outstanding from aforementioned axial region to radial outside,
Be provided with to possess and insert the inserting hole that leads to aforementioned axial region along the vertical direction, and support first guide pad of said flange portion from the below; With
Second paired with this first guide pad, as from the top said flange portion the to be sandwiched guide pad;
Between aforementioned second guide pad and the said flange, and aforementioned inserting hole and aforementioned axial region between be formed with the gap,
Be provided with the chuck fixed mechanism that aforementioned relatively second guide pad of aforementioned chuck is positioned.
2. floating chuck apparatus according to claim 1 is characterized in that,
Aforementioned chuck is provided with the pallet that said workpiece is set and carries out Centered centering machine structure.
3. floating chuck apparatus according to claim 2 is characterized in that,
Aforementioned centering machine structure can be slided by aforementioned relatively axial region along the vertical direction by outer embedding one-tenth, is formed with can be with being formed on tapered portion on the aforementioned pallet chimeric tapered recess at its front end.
4. a floating chuck unit is characterized in that, forms by the floating chuck apparatus that is set up in parallel a plurality of claims 1～3.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008047928 | 2008-02-28 | ||
| JP2008-047928 | 2008-02-28 | ||
| JP2008047928A JP5058022B2 (en) | 2008-02-28 | 2008-02-28 | Floating chuck device and floating chuck unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101518831A CN101518831A (en) | 2009-09-02 |
| CN101518831B true CN101518831B (en) | 2013-07-17 |
Family
ID=41079742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910117961 Expired - Fee Related CN101518831B (en) | 2008-02-28 | 2009-02-27 | Floating chuck apparatus and floating chuck unit |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5058022B2 (en) |
| CN (1) | CN101518831B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6810584B2 (en) * | 2016-11-30 | 2021-01-06 | タツモ株式会社 | Laminating device |
| CN110515163B (en) * | 2019-07-12 | 2021-10-22 | 中航光电科技股份有限公司 | Adjustable core optical fiber contact |
| CN113386162B (en) * | 2021-06-11 | 2022-08-12 | 山东润平塑业有限公司 | Grabbing device for transferring plastic plates and plastic plate grabbing method |
| CN114800412B (en) * | 2022-03-18 | 2023-02-10 | 广东东博智能装备股份有限公司 | Floating type rotary table mechanism |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4412766A (en) * | 1979-12-21 | 1983-11-01 | Werkzeugmaschinenfabrik Adolf Waldrich Coburg Gmbh & Co. | Apparatus for chucking and releasing of a conical shank of a tool or an additional aggregate on tool machines, in particular drilling and milling machines |
| CN2616324Y (en) * | 2003-04-29 | 2004-05-19 | 财团法人工业技术研究院 | Cutter-removing mechanism for direct-type main spindle of toolroom machine |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2750999B2 (en) * | 1994-01-21 | 1998-05-18 | 旭精機工業株式会社 | Thin body adsorption device |
| JP4161797B2 (en) * | 2003-05-20 | 2008-10-08 | 株式会社村田製作所 | Component mounting device |
-
2008
- 2008-02-28 JP JP2008047928A patent/JP5058022B2/en not_active Expired - Fee Related
-
2009
- 2009-02-27 CN CN 200910117961 patent/CN101518831B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4412766A (en) * | 1979-12-21 | 1983-11-01 | Werkzeugmaschinenfabrik Adolf Waldrich Coburg Gmbh & Co. | Apparatus for chucking and releasing of a conical shank of a tool or an additional aggregate on tool machines, in particular drilling and milling machines |
| CN2616324Y (en) * | 2003-04-29 | 2004-05-19 | 财团法人工业技术研究院 | Cutter-removing mechanism for direct-type main spindle of toolroom machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009202294A (en) | 2009-09-10 |
| CN101518831A (en) | 2009-09-02 |
| JP5058022B2 (en) | 2012-10-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100832168B1 (en) | Substrate holding device | |
| CN101518831B (en) | Floating chuck apparatus and floating chuck unit | |
| WO2009148070A1 (en) | Stage with alignment function, treatment device equipped with stage with the alignment function, and substrate alignment method | |
| CN104364893B (en) | A kind of plane positioning system and the method using this plane positioning system | |
| JP5322822B2 (en) | Wafer prober for semiconductor inspection and inspection method | |
| JP5353085B2 (en) | Holder joint, holder unit, scribe head, and scribe device | |
| TWI457193B (en) | Stage device | |
| CN101144920B (en) | Substrate detecting device | |
| CN102357803B (en) | Processing machine tool for valve body connection hole | |
| JP2007266585A (en) | Stage apparatus | |
| KR102358070B1 (en) | Coating apparatus and coating method | |
| CN103988291A (en) | Glass substrate conveyance device and conveyance method | |
| JP5287945B2 (en) | Holder unit, scribing head and scribing device | |
| CN107877536A (en) | Transfer unit, shifting apparatus and holding unit | |
| JPWO2007055339A1 (en) | 3D positioning table | |
| CN202565667U (en) | Clamp for nozzle replacing | |
| JP2010153644A (en) | Elevating table | |
| CN201732777U (en) | Compound air flotation device and silicon wafer stage moving device with same | |
| CN117233086B (en) | Magnet bonding strength detection device and voice coil motor magnet detection system | |
| CN108029237A (en) | Mounting head and surface mounting apparatus | |
| CN104002114B (en) | For the vertical pose_adjuster of the vertical assembling of large-diameter thin-wall piece cylindrical shell | |
| KR102583680B1 (en) | Cutter holder mounting structure, cutter holder and holder joint | |
| JP6551576B2 (en) | Automatic centering device and automatic centering method of work, inspection or measuring device and inspection or measuring method | |
| JP2009108896A (en) | Planetary pinion attachment device | |
| CN205852716U (en) | A kind of 3 axial planes are to bit platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130717 Termination date: 20210227 |