CN101498805A - Multi-beam laser device used for micro-bit phase difference film thermal treatment - Google Patents
Multi-beam laser device used for micro-bit phase difference film thermal treatment Download PDFInfo
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- CN101498805A CN101498805A CNA2008100090318A CN200810009031A CN101498805A CN 101498805 A CN101498805 A CN 101498805A CN A2008100090318 A CNA2008100090318 A CN A2008100090318A CN 200810009031 A CN200810009031 A CN 200810009031A CN 101498805 A CN101498805 A CN 101498805A
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Abstract
The invention provides a multiple-beam laser aid used for heat processing micro-retardation film. The multiple-beam laser aid produces two interlacing micro-retardation films in different alpha regions in a laser heating style and comprises an infrared laser light source, a multiple-beam module and a first drive device. The multiple-beam module is used for dividing the infrared laser beams into a plurality of parallel beams with a same intensity. The first drive device provides a scanning direction for the multiple-beam module; wherein, the multiple-beam module scans out a plurality of parallel scanning lines in a group on a surface of the micro-retardation film along the scanning direction.
Description
Technical field
The present invention particularly about the contactless system of processing of a kind of optical profile type, is about a kind of heat treated multi-beam laser device of micro-bit phase difference film that is used for about a kind of heat treatment process system specifically.
Background technology
The developing direction of generation display had been the general common recognition of industry under the 3D display became, and the big factory of display actively drops into ample resources invariably in relevant research.Though market is more and more higher to the interest of bore hole formula 3D display technique,, therefore still can't releases at present ripe product and meet the need of market because 3D display technique itself is still waited to have breakthrough.Among these technology that remain to be broken through, the key component of one of them relates to the making of 3D display element.
United States Patent (USP) the 5th, 327, No. 285 and its continuity case disclose the method for making a little polar biased device the 5th, 844, No. 717, and this method is to utilize little shadow and etching method to make little polar biased device.
United States Patent (USP) the 6th related to the present invention, 498, disclose the structure of a micro-bit phase difference device No. 679, this micro-bit phase difference device is to use the phasic difference membrane material of laser heating device irradiation printing opacity to heat-treat, make the interlaced micro-bit phase difference film (micro-retarder plate) of formation on this material, as shown in Figure 1.This patent is mentioned with laser or circuit board type of heating and is carried out the manufacturing of micro-bit phase difference device, but this patent does not propose relevant manufacturing installation or manufacture method in detail.
Use little shadow and etching can obtain meticulous little polar biased device structure, and produce little polar biased device of high precision, only can be more higher on its price.Industrial community is not seen the technology of making the micro-bit phase difference device with the light type of heating in a large number at present, and therefore the solution with high manufacturing speed and lower cost is the urgent demand of present industrial community.
Summary of the invention
An embodiment who is used for the heat treated multi-beam laser device of micro-bit phase difference film of the present invention comprises an infrared laser light source, a multiple beam module and one first drive unit.This multiple beam module is divided into this infrared laser light beam of light source the suitable parallel beam of complex trace intensity and does focusing; This first drive unit provides this multiple beam module one scan direction, and wherein this multiple beam module can scan one group of a plurality of parallel scan lines according to this direction of scanning on a surface.
Another embodiment that is used for the heat treated multi-beam laser device of micro-bit phase difference film of the present invention comprises an infrared laser light source, a multiple beam module and a platform.This multiple beam module is divided into this infrared laser light beam of light source the suitable parallel beam of complex trace intensity and does focusing; This platform provides this multiple beam module to scan one group of a plurality of parallel scan lines according to this direction of scanning on a surface.
The another embodiment that is used for the heat treated multi-beam laser device of micro-bit phase difference film of the present invention comprises an infrared laser light source, a spectral module, a focus module and one first drive unit.This spectral module is divided into the suitable parallel beam of complex trace intensity with the light beam of this infrared laser light source; This focus module is with this parallel beam guiding and focus to a surface respectively; This first drive unit provides this multiple beam module one scan direction, and wherein this multiple beam module can scan one group of a plurality of parallel scan lines according to this direction of scanning on a surface.
Description of drawings
Fig. 1 shows the micro-bit phase difference film synoptic diagram of prior art;
Fig. 2 A, Fig. 2 B show the heat treated multi-beam laser device synoptic diagram of micro-bit phase difference film of the present invention's one specific embodiment;
Fig. 3 A, Fig. 3 B show the heat treated multi-beam laser device synoptic diagram of micro-bit phase difference film of another specific embodiment of the present invention; And
Fig. 4 shows the heat treated multi-beam laser device synoptic diagram of the micro-bit phase difference film of the another specific embodiment of the present invention.
Drawing reference numeral:
101 phasic difference films
201 phasic difference films, 202 X-axis motors
203 y-axis motors, 204 platforms
205 infrared lasers, 206 spectroscopes
207 catoptrons, 208 amasthenic lens
209 laser power detecting devices, 210 feedback control circuits
211 visible light laser, 212 spectroscopes
301 infrared lasers, 302 spectroscopes
303 catoptrons, 304 catoptrons
305 amasthenic lens, 306 phasic difference films
307 scan modules, 308 y-axis motors
309 sweep traces, 310 platforms
311 X-axis motors, 312 catoptrons
313 scan modules
401 infrared lasers, 402 optical fiber
403 beam splitters, 404 phasic difference films
Embodiment
Fig. 2 A, Fig. 2 B show an a kind of specific embodiment that is used for the heat treated multi-beam laser device of micro-bit phase difference film of the present invention.If will produce the pattern of the phasic difference film 101 that shows as Fig. 1 in the mode of light heating apace, one of best method just is to use inswept this phasic difference film of several source of parallel light, even large-area processing also only needs just can finish several times back and forth.The present invention is based on such notion, propose a heating technique with multiple tracks light beam and come contraposition phase difference film 101 to process.In Fig. 2 A embodiment, a phasic difference film 201 is placed on the platform 204 that is driven by an X-axis motor 202 and a y-axis motor 203.Y-axis motor 203 drives these platforms 204, makes inswept this phasic difference film 201 of laser and forms several sweep traces simultaneously.202 in X-axis motor is to make this platform 204 can do the action of Y scanning at the X axis diverse location.Platform 204 can be produced as the interlaced patterns in two zones as Fig. 1 under the common driving of X-axis motor 202 and y-axis motor 203.X-axis motor 202 and y-axis motor 203 that driving platform 204 uses can be servomotor or stepper motor.A plurality of light beams of this processing usefulness are that this light beam is divided into light beam and catoptron 207 beam reflected that complex trace is parallel and intensity is suitable together becomes the processing light beam that equidistantly distributes by a series of spectroscope 206 of light beam process of an infrared laser 205.At last, those processing focus on this phasic difference film 201 with light beam through amasthenic lens 208.This infrared laser 205 can be selected using gases laser, or uses Solid State Laser.In the design of the embodiment of Fig. 2 B, consider the needs of laser, so install a laser power detecting device 209 and its feedback control circuit 210 additional at the rear of spectroscope 206 at the stability that adds man-hour and optical element adjustment and timing.Laser power detecting device 209 produces a signal after receiving laser, and adjusts the output of laser after the comparison process of this signal process feedback control circuit 210.With such control method, reach output with allowing laser stabilization, and guarantee the stability of process for machining and manufacturing.In addition, because employed light source is an infrared laser 205, this light source is difficult to do optical correction, therefore can import the light beam of a visible light laser 211 on the light path of this infrared laser 205 with a spectroscope 212.Because what send is visible light, therefore be easy to reach optics adjustment as the devices such as distance between laser optical path or light beam by it.
Fig. 3 A, Fig. 3 B show a kind of another specific embodiment that is used for the heat treated multi-beam laser device of micro-bit phase difference film of the present invention.The complex trace light beam that the light beam of Fig. 3 A middle infrared (Mid-IR) laser 301 forms after via a series of spectroscope 302 and catoptron 303 beam split, this complex trace light beam focuses on a phasic difference film 306 by a catoptron 304 reflections through amasthenic lens 305.This catoptron 304 and this amasthenic lens 305 can be designed to one scan module 307, and are driven by a y-axis motor 308, allow laser beam scanned Y-axis to a plurality of sweep traces 309.Platform 310 drives on X-direction with an X-axis motor 311 and moves, moving like this can allow Y-axis can repeatedly carry out on the X axis diverse location to the action of sweep trace scanning, forms the some cycles rectangular pattern of sweep trace at interval up to full wafer phasic difference film 306.Fig. 3 B installs a catoptron 312 additional in the embodiment of Fig. 3 A, the light beam that makes infrared laser 301 and Y-axis are to parallel.Under such design, spectroscope 302 and catoptron 303 can together be done scanning with the scan module 307 in Fig. 3 A and move, and making whole opticator to be integrated becomes a single scanning module 313, will more help making and adjustment.Under the requirement of satisfying machining precision, also all opticators can be comprised that laser etc. is integrated into the one scan module.
Fig. 4 shows a kind of another specific embodiment that is used for the heat treated multi-beam laser device of micro-bit phase difference film of the present invention.One light beam to be divided into the complex trace light beam except utilizing a plurality of spectroscopical methods, also the beam splitter that can utilize other technology to make is reached, for example optical fiber optically-coupled optical splitter, planar optical waveguide spectral module, grating beam splitting module or with micro electronmechanical miniature optical splitter of making etc.One infrared laser 401 sees through an optical fiber 402 laser beam is imported in the beam splitter 403, and this beam splitter 403 is divided into the complex trace laser beam with this laser beam, heat-treats manufacturing process through being incident upon on the phasic difference film 404 after focusing on.
Technology contents of the present invention and technical characterstic disclose as above, yet the personage who is familiar with this technology still may be based on teaching of the present invention and announcement and done all replacement and modifications that does not deviate from spirit of the present invention.Therefore, protection scope of the present invention should be not limited to those disclosed embodiments, and should comprise various do not deviate from replacement of the present invention and modifications, and is contained by the claim scope.
Claims (21)
1. one kind is used for the heat treated multi-beam laser device of micro-bit phase difference film, it is characterized in that described device comprises:
One infrared laser light source;
One multiple beam module is divided into the light beam of described infrared laser light source the suitable parallel beam of complex trace intensity and does focusing; And
One first drive unit provides described multiple beam module one scan direction, and wherein said multiple beam module can scan one group of a plurality of parallel scan lines according to described direction of scanning on a surface of described phasic difference film.
2. multi-beam laser device as claimed in claim 1 is characterized in that, described device more comprises:
One platform; And
One second drive unit is to drive described platform perpendicular to the direction of described direction of scanning.
3. multi-beam laser device as claimed in claim 1 is characterized in that, described first drive unit is a servomotor or a stepper motor.
4. multi-beam laser device as claimed in claim 1 is characterized in that, described infrared laser light source is a gas laser or a solid-state laser.
5. multi-beam laser device as claimed in claim 1, it is characterized in that described multiple beam module is in a beam split optical module, an optical fiber optically-coupled optical splitter, a planar optical waveguide spectral module, a grating beam splitting module or the miniature optical splitter of a plurality of spectroscopes and a plurality of arrangements of mirrors.
6. multi-beam laser device as claimed in claim 1 is characterized in that, described device more comprises a laser power detecting device.
7. multi-beam laser device as claimed in claim 1 is characterized in that, described device more comprises a visible light LASER Light Source, and the light path of the light beam of wherein said visible light LASER Light Source by described infrared laser light source is to carry out the optics adjustment.
8. one kind is used for the heat treated multi-beam laser device of micro-bit phase difference film, it is characterized in that described device comprises:
One infrared laser light source;
One multiple beam module is divided into the light beam of described infrared laser light source the suitable parallel beam of complex trace intensity and does focusing; And
One platform provides described multiple beam module to scan one group of a plurality of parallel scan lines according to the one scan direction on a surface of described phasic difference film.
9. multi-beam laser device as claimed in claim 8 is characterized in that, described platform more comprises:
One drive unit is used to drive described platform and makes described multiple beam module can scan the parallel scan lines of plural groups on described surface.
10. multi-beam laser device as claimed in claim 8 is characterized in that, described platform is a servomotor or a stepper motor.
11. multi-beam laser device as claimed in claim 8 is characterized in that, described infrared laser light source is a gas laser or a solid-state laser.
12. multi-beam laser device as claimed in claim 8, it is characterized in that described multiple beam module is a beam split optical module, an optical fiber optically-coupled optical splitter, a planar optical waveguide spectral module, grating beam splitting module or the miniature optical splitter of a plurality of spectroscopes and a plurality of arrangements of mirrors.
13. multi-beam laser device as claimed in claim 8 is characterized in that, described device more comprises a laser power detecting device.
14. multi-beam laser device as claimed in claim 8 is characterized in that, described device more comprises a visible light LASER Light Source, and the light path of the light beam of wherein said visible light LASER Light Source by described infrared laser light source is to carry out the optics adjustment.
15. one kind is used for the heat treated multi-beam laser device of micro-bit phase difference film, it is characterized in that described device comprises:
One infrared laser light source;
One spectral module is divided into the suitable parallel beam of complex trace intensity with the light beam of described infrared laser light source;
One focus module is with the guiding of described parallel beam and focus to a surface of described phasic difference film respectively; And
One first drive unit provides described focus module one scan direction, and wherein said multiple beam module scans one group of a plurality of parallel scan lines according to described direction of scanning on a surface of described phasic difference film.
16. multi-beam laser device as claimed in claim 15 is characterized in that, described device more comprises:
One platform; And
One second drive unit is to drive described platform perpendicular to the direction of described direction of scanning.
17. multi-beam laser device as claimed in claim 15 is characterized in that, described first drive unit is a servomotor or a stepper motor.
18. multi-beam laser device as claimed in claim 15 is characterized in that, described infrared laser light source is a gas laser or a solid-state laser.
19. multi-beam laser device as claimed in claim 15, it is characterized in that described spectral module is a beam split optical module, an optical fiber optically-coupled optical splitter, a planar optical waveguide spectral module, grating beam splitting module or the miniature optical splitter of a plurality of spectroscopes and a plurality of arrangements of mirrors.
20. multi-beam laser device as claimed in claim 15 is characterized in that, described device more comprises a laser power detecting device.
21. multi-beam laser device as claimed in claim 15 is characterized in that, described device more comprises a visible light LASER Light Source, and the light path of the light beam of wherein said visible light LASER Light Source by described infrared laser light source is to carry out the optics adjustment.
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| CN2008100090318A CN101498805B (en) | 2008-01-30 | 2008-01-30 | Multi-beam laser device used for micro-bit phase difference film thermal treatment |
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| CN2008100090318A CN101498805B (en) | 2008-01-30 | 2008-01-30 | Multi-beam laser device used for micro-bit phase difference film thermal treatment |
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| CN101498805B CN101498805B (en) | 2011-12-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103091765A (en) * | 2012-12-25 | 2013-05-08 | 王奉瑾 | Luminous energy distribution device used for light heating and assembly thereof |
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| US5156461A (en) * | 1991-05-17 | 1992-10-20 | Texas Instruments Incorporated | Multi-point pyrometry with real-time surface emissivity compensation |
| EP1146379A1 (en) * | 1998-11-27 | 2001-10-17 | Matsushita Electric Industrial Co., Ltd. | Polarized light illuminator, image display, portable information terminal, head-up display, method for producing diffraction optical device, method for producing polarized light illuminator, and method for producing image display |
| JP4590663B2 (en) * | 1999-10-29 | 2010-12-01 | セイコーエプソン株式会社 | Manufacturing method of color filter |
| CN1424594A (en) * | 2001-12-11 | 2003-06-18 | 中国科学院光电技术研究所 | Method for forming gratings by laser direct writing device |
| DE102004014277A1 (en) * | 2004-03-22 | 2005-10-20 | Fraunhofer Ges Forschung | Process for the laser-thermal separation of flat glass |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103091765A (en) * | 2012-12-25 | 2013-05-08 | 王奉瑾 | Luminous energy distribution device used for light heating and assembly thereof |
| CN103091765B (en) * | 2012-12-25 | 2016-06-01 | 王奉瑾 | For luminous energy distribution device and the assembly thereof of light heating |
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