CN101491891A - Carbon nano-tube soft abrasive grinding wheel preparation method - Google Patents
Carbon nano-tube soft abrasive grinding wheel preparation method Download PDFInfo
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- CN101491891A CN101491891A CNA2009100104620A CN200910010462A CN101491891A CN 101491891 A CN101491891 A CN 101491891A CN A2009100104620 A CNA2009100104620 A CN A2009100104620A CN 200910010462 A CN200910010462 A CN 200910010462A CN 101491891 A CN101491891 A CN 101491891A
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- 238000000227 grinding Methods 0.000 title claims abstract description 55
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 31
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 31
- 238000002360 preparation method Methods 0.000 title claims description 9
- 238000000034 method Methods 0.000 claims abstract description 29
- 239000013078 crystal Substances 0.000 claims abstract description 21
- 239000000835 fiber Substances 0.000 claims abstract description 5
- 229920000642 polymer Polymers 0.000 claims abstract description 4
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical class OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 20
- 239000011159 matrix material Substances 0.000 claims description 13
- 239000004604 Blowing Agent Substances 0.000 claims description 5
- 229920002635 polyurethane Polymers 0.000 claims description 5
- 239000004814 polyurethane Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 2
- 239000010985 leather Substances 0.000 claims description 2
- 239000002649 leather substitute Substances 0.000 claims description 2
- 229920002521 macromolecule Polymers 0.000 claims description 2
- 239000002048 multi walled nanotube Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 abstract description 12
- 230000007797 corrosion Effects 0.000 abstract description 9
- 238000005260 corrosion Methods 0.000 abstract description 9
- 230000008901 benefit Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 238000007731 hot pressing Methods 0.000 abstract 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 abstract 1
- 239000004088 foaming agent Substances 0.000 abstract 1
- 238000004372 laser cladding Methods 0.000 abstract 1
- 239000011148 porous material Substances 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 6
- 230000002950 deficient Effects 0.000 description 5
- 239000003292 glue Substances 0.000 description 5
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 229910004611 CdZnTe Inorganic materials 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910001651 emery Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- -1 argon ion Chemical class 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000007514 turning Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000617 Mangalloy Inorganic materials 0.000 description 1
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention relates to a method for preparing a carbon nanotube soft abundant grinding wheel, which belongs to the technical field of soft and brittle functional crystal processing, in particular to a method for the superprecision grinding of II-VI group compound soft and brittle functional crystals and soft and brittle photoelectric funtional crystals. The method is characterized in that: carbon nanotubes are used as a soft abundant, high polymer and chemical fiber are used as a soft abundant grinding wheel substrate, the controllable digital arrangement of carbon nanotubes in the soft abundant substrate is realized, and hot pressing, laser rapid forming and laser cladding are adopted to prepare the soft abundant grinding wheel. The internal pores adopt carbonates and bicarbonates as foaming agents, and the surface microstructure is formed by mechanical galling, laser and hot pressing. The carbon nanotube soft abundant grinding wheel has the advantages of high flexibility, corrosion resistance, heat conductivity, wear resistance and the like. The method adopting consolidated carbon nanotube soft abundant realizes high-efficiency unstressed grinding and achieves a high-efficiency unstressed superprecision grinding effect.
Description
Technical field
The invention belongs to the soft crisp functional crystal processing technique field, particularly the grinding processing method of II-VI compound soft crisp functional crystal and soft crisp photoelectric crystal.
Background technology
Along with the extensive use in military affairs, national defence, Aeronautics and Astronautics, national economy field of the soft crisp crystal of II-VI chemicals and soft crisp photoelectric crystal, the accurate ultra process technology of this class II-VI chemicals soft crisp functional crystal and soft crisp photoelectric crystal becomes the core key manufacture.Yet this emerging soft crisp functional crystal, as HgCdTe, CdZnTe, HgMnTe, HgInTe, CdMnTe requires the surface to have inferior nano-precision, high flatness, great surface quality and integrality, becomes a kind of difficult-to-machine material.This soft crisp functional crystal is different from the hard and crisp crystal of present extensive use, as Si sheet, diamond wafer, MgO crystal, sapphire crystal, also is different from traditional soft-plastic material, as copper, iron, aluminium.Adopt traditional machining tool to obtain the finished surface of inferior nano-precision, and the crudy of high flatness and integrality is extremely difficult.Traditional diamond-making technique, as turning, milling, grinding etc., the slight vibration of turning cutting tool is with regard to the as easy as rolling off a log defectives such as the breaking of soft crisp crystal, little cut, sub-surface damage that cause.And still adopting the method for traditional processing method mechanical lapping-machine glazed finish-chemical attack to process to the soft crisp crystal of CdZnTe at present, this method adopts MgO, Al
2O
3As free abrasive, and this free abrasive embeds in the soft crisp crystal extremely easily, in case embed, is difficult to eliminate, and promptly enables to eliminate being partially submerged into, and also can stay bigger pit, micro-crack, defectives such as plastic deformation; And the last chemical corrosion method that adopts though can remove the part sub-surface damage layer, can not be removed defectives such as free abrasive embedding, little cut fully, and through the finished surface after the chemical attack, can stay the corrosion ditch in a lot of similar brooks.
Summary of the invention
The purpose of this invention is to provide a kind of carbon nano-tube soft abrasive grinding wheel preparation method, adopt the method for consolidated carbon nanotubes and buffing material matrix, and utilize the CNT controllable digital arrangement to have the characteristics of high heat conductance, high corrosion resistance, high-wearing feature, highly-flexible degree, embedding, the production efficiency that solves free abrasive when adopting traditional diamond-making technique processing soft crisp functional crystal at present is low, scuffing, frangible, shortcoming that percent defective is high.
Technical scheme of the present invention is that to adopt diameter be that the single wall, double-walled, multi-walled carbon nano-tubes of 1-20nm is as the buffing material, select polyurethane, macromolecular compound, Buffed leather, synthetic leather, pleuche, fine hair, the fibers material matrix material as carbon nano-tube soft abrasive grinding wheel for use, the volume content content of CNT in buffing material matrix is 1-30% (V/V).
Adopt accurate mesh screen, mechanically operated method to realize the controllable digital arrangement of CNT in buffing material matrix, CNT is carried out controllable digital arrangement according to method vertical with grinding skin, parallel, that tilt, the angle of inclination is typically 15 °, 30 °, 45 °, 60 °, 75 °, adopt laser to melt then to cover, laser fast forming, hot press forming method realize the setting of CNT in buffing material matrix, then through coating, foam, scabble, the brushing process method prepares carbon nano-tube soft abrasive grinding wheel.Perhaps adopt the bonding or direct wire drawing triangularity of carbon nano-tube bundle, rectangle, semicircle, be pasted on the surface of soft abrasive grinding wheel, use as grinding skin with the resin glue of waterproof, acid-proof or alkali prevention, high molecular polymer glue, organic and inorganic glue.Because CNT has advantages such as high heat conductance, high rigidity, high-flexibility, high corrosion resistance, high adsorption, adopt the soft abrasive grinding wheel of CNT controllable digital arrangement technology preparation, aspects such as the thermal conductivity of emery wheel, wearability, pliability, absorption grinding fluid and abrasive dust performance, corrosion resistance all can be strengthened.
For appearance fluidity, appearance bits property and the thermal conductivity that increases carbon nano-tube soft abrasive grinding wheel, adopt carbonate, bicarbonate as blowing agent, the volume content of blowing agent is 1-5%, adopts the porosity of the method increase carbon nano-tube soft abrasive grinding wheel of mechanical fine stylus printer hole, laser boring simultaneously.
Performances such as the grinding fluid when increasing high-speed grinding and the reaction speed of workpiece, thermal conductivity, appearance bits property, adopt machinery, laser, grinding tool hot press forming method in carbon nano-tube soft abrasive grinding wheel surface preparation rectangle, triangle, circle, ellipse, the little configuration of streamlined, increase the appearance liquid measure of carbon nano-tube soft abrasive grinding wheel and hold the bits amount.
Preparation carbon nano-tube soft abrasive grinding wheel hot forming temperature is 150-250 ℃, and the hot forming time is 2-3h.Adopt laser to melt and cover, select for use when the laser fast forming method formalizes CNT CO
2Gas laser, Nd:YAG solid pulse laser, argon ion laser get final product.
Adopt and above-mentioned make the method that little configuration, inside foamed, increased porosity at grinding skin, realize the methods such as controllable digital arrangement of CNT simultaneously, carbon nano-tube soft abrasive grinding wheel has pliable and tough carbon nano tube network, high-termal conductivity, high appearance liquid measure and holds advantages such as bits amount, high-wearing feature, high corrosion resistance.
Effect of the present invention is to compare with the traditional mechanical lapping-machine glazed finish-chemical corrosion method of present employing with benefit, adopt consolidated carbon nanotubes and high molecular polymer, fibers material is as the buffing material, do not produce free abrasive, avoided the imbedding problem of free abrasive on the soft crisp functional crystal surface, simultaneously because this emery wheel has high-termal conductivity, high-flexibility, high-wearing feature, high porosity, advantages such as high corrosion resistance, can use with no abrasive material chemical mechanical grinding fluid simultaneously, the main chemolysis effect removal material that adopts chemical mechanical grinding fluid, can produce unstressed, there is not little cut, no free abrasive embeds, there is not little cut, collapse the ultra-smooth not damaged surface of defectives such as limit, realize efficient unstressed superfine grinding, obtain ultra-smooth not damaged surface, enhance productivity greatly and crudy.
Description of drawings
Accompanying drawing is the carbon nano-tube soft abrasive grinding wheel schematic diagram of preparation.
Among the figure: 1 aluminium substrate, 2 resin glues, 3 carbon nano-tube soft abrasive grinding wheels.
The specific embodiment
Be described in detail the specific embodiment of the present invention below in conjunction with technical scheme and accompanying drawing.
Adopting diameter is the SWCN of 10nm, adopt accurate mesh screen to carry out the controllable digital arrangement of CNT, according to the parallel plane mode of the grinding CNT of arranging, adopt the method for the laser setting of tiling layer by layer that CNT tentatively is fixed in the flexible polyurethane abrasive matrix then.Adopt NaHCO
3As blowing agent, the volume content in polyurethane is 2%, adopts agitator to mix.The mode that the setting of CNT in buffing material matrix adopts manual tiling to combine with the fusion of Nd:YAG solid pulse laser is carried out, and adopts hot press forming method to prepare carbon nano-tube soft abrasive grinding wheel.Adopt monodentate manganese steel grinding tool, the hot forming temperature is 200 ℃, and the hot forming time is 2h.Suppressed 36 teeth altogether, each tooth depth is 2mm, wide 4mm, long 25mm, then through scabbling, brushing process, be prepared into the emery wheel monodentate.Be pasted on the aluminium substrate that diameter is φ 360mm with waterproof acid-proof resin glue, through dynamic balance running stable after, can be installed on and carry out chemical mechanical poslishing on the VG 401MKII precision horizontal surface grinding machine and cut test.The carbon nano-tube soft abrasive grinding wheel schematic diagram as shown in drawings.
At first will be of a size of 10mm * 10mm * 2mm
3Cd
0.96Zn
0.04Te (111) single-chip, its infrared light transmitance＞60% is fixed on the workbench with vacuum cup, because vacuum cup is bigger, adopts sealed polyethylene plastic to dig out 8 * 8mm
2The hole, can finish the work of vacuum cup automatic card-loading wafer.Adopt #5000 micro mist skive to carry out preliminary Precision Machining, speed of mainshaft 2000r/min, rotating speed of table 400r/min, axis feeding speed is 15 μ m/min, the time is 10min.Axis feeding speed is 5 μ m/min then, and the grinding time is 5min, and last axis feeding speed is 1 μ m/min, and the grinding time is 1min.The cooling fluid of micro mist skive accurate grinding is a deionized water, and flow is 300ml/min.
Carbon nano-tube soft abrasive grinding wheel is installed then, and chemical mechanical grinding fluid adopts the mixed solution of no abrasive material nitric acid, hydrochloric acid, acetic acid, and the pH value is 2.1-3.3, and flow is 200ml/min.The speed of mainshaft is 1500r/min, and rotating speed of table is 200r/min, and the chemical mechanical grinding fluid grinding time is 15min.
Adopt the CdZnTe single-chip surface roughness after the test of U.S. ZYGO noncontact surface topographic apparatus fo is processed, measuring area is 71 * 53 μ m
2, surface roughness Ra is 0.753nm, PV is 8nm, has obtained the undamaged efficient ultraprecise processing effect of ultra-smooth.
Claims (1)
1. carbon nano-tube soft abrasive grinding wheel preparation method, adopt polyurethane high molecule polymer and fibers material as buffing material matrix, CNT is realized that controllable digital arrangement in buffing material matrix, realizes the purpose of efficient unstressed grinding soft crisp functional crystal, it is characterized in that:
(1) adopt diameter be the single wall, double-walled, multi-walled carbon nano-tubes of 1-20nm as the buffing material, the content of CNT in buffing material matrix is 1-30% (V/V);
(2) select polyurethane, macromolecular compound, Buffed leather, synthetic leather, pleuche, fine hair, fibers material matrix material for use as carbon nano-tube soft abrasive grinding wheel;
(3) CNT is realized controllable digital arrangement in buffing material matrix, CNT is carried out controllable digital arrangement according to mode vertical with grinding skin, parallel, that tilt, perhaps carbon nano-tube bundle is prepared into triangle, rectangle, semicircle and is pasted on buffing material matrix surface, use as grinding face;
(4) adopt carbonate, bicarbonate as blowing agent, the volume content of blowing agent is 1-5%, adopts the porosity of the method increase carbon nano-tube soft abrasive grinding wheel of mechanical fine stylus printer hole, laser boring simultaneously;
(5) adopt machinery, laser, grinding tool hot press forming method in carbon nano-tube soft abrasive grinding wheel surface preparation rectangle, triangle, circle, ellipse, the little configuration of streamlined, increase the appearance liquid measure of carbon nano-tube soft abrasive grinding wheel and hold the bits amount.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100104620A CN101491891B (en) | 2009-02-23 | 2009-02-23 | Carbon nano-tube soft abrasive grinding wheel preparation method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100104620A CN101491891B (en) | 2009-02-23 | 2009-02-23 | Carbon nano-tube soft abrasive grinding wheel preparation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101491891A true CN101491891A (en) | 2009-07-29 |
| CN101491891B CN101491891B (en) | 2010-09-29 |
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ID=40922770
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100104620A Expired - Fee Related CN101491891B (en) | 2009-02-23 | 2009-02-23 | Carbon nano-tube soft abrasive grinding wheel preparation method |
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| Country | Link |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104589203A (en) * | 2014-12-17 | 2015-05-06 | 衢州学院 | Grinding sheet with fluff structure and preparing method thereof |
| CN116003726A (en) * | 2022-11-09 | 2023-04-25 | 合肥宏光研磨科技有限公司 | Carbon nano tube modified polyurethane polishing pad material and preparation method thereof |
-
2009
- 2009-02-23 CN CN2009100104620A patent/CN101491891B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104589203A (en) * | 2014-12-17 | 2015-05-06 | 衢州学院 | Grinding sheet with fluff structure and preparing method thereof |
| CN116003726A (en) * | 2022-11-09 | 2023-04-25 | 合肥宏光研磨科技有限公司 | Carbon nano tube modified polyurethane polishing pad material and preparation method thereof |
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| Publication number | Publication date |
|---|---|
| CN101491891B (en) | 2010-09-29 |
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Granted publication date: 20100929 Termination date: 20130223 |