CN116003726A - Carbon nano tube modified polyurethane polishing pad material and preparation method thereof - Google Patents

Carbon nano tube modified polyurethane polishing pad material and preparation method thereof Download PDF

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Publication number
CN116003726A
CN116003726A CN202211395992.3A CN202211395992A CN116003726A CN 116003726 A CN116003726 A CN 116003726A CN 202211395992 A CN202211395992 A CN 202211395992A CN 116003726 A CN116003726 A CN 116003726A
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Prior art keywords
polishing pad
component
pad material
preparing
preparation
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CN202211395992.3A
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Chinese (zh)
Inventor
孔维洪
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Hefei Hongguang Abrasive Science And Technology Co ltd
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Hefei Hongguang Abrasive Science And Technology Co ltd
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Priority to CN202211395992.3A priority Critical patent/CN116003726A/en
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Abstract

The invention discloses a carbon nano tube modified polyurethane polishing pad material and a preparation method thereof, wherein the carbon nano tube modified polyurethane polishing pad material comprises the following components: polyurethane synthetic materials, polymers, isocyanates, chain extenders, abrasives, and carbon nanotube powders. According to the carbon nanotube modified polyurethane polishing pad material and the preparation method thereof, the carbon nanotube modified polyurethane polishing pad material and the preparation method thereof are characterized in that the carbon nanotubes are added into the polyurethane polymer material, so that the mechanical properties such as heat resistance and wear resistance of the polymer are improved, the polymer is easy to disperse in the dispersing process, the matrix structure and the property are not easy to damage, the service life of the polishing pad is prolonged, and the polishing pad produced by the method is prepared by selecting carbon nanotube powder to replace part of inorganic abrasive to be added into the polyurethane composite material, so that the mechanical properties of the polyurethane polishing pad are greatly improved, especially the service life is prolonged by more than 50%, and the yield of products is improved by more than 20%.

Description

Carbon nano tube modified polyurethane polishing pad material and preparation method thereof
Technical Field
The invention belongs to the technical field of polishing pads, and particularly relates to a carbon nano tube modified polyurethane polishing pad material and a preparation method thereof.
Background
With the updating of mobile phone glass and precision optical glass materials, the hardness and toughness of the mobile phone glass and precision optical glass materials are higher and higher, and the requirements on heat resistance and wear resistance of the CMP polyurethane polishing pad are higher and higher.
At present, the main body of the polyurethane polishing pad is manufactured by adopting polyurethane synthetic materials as a matrix and adding a certain amount of metal and nonmetal oxide abrasive materials through foaming, and the polishing efficiency and the service life of the main body are not suitable for the surface polishing process of hard glass.
For this purpose, we propose a carbon nanotube modified polyurethane polishing pad material and a method for preparing the same.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a carbon nano tube modified polyurethane polishing pad material and a preparation method thereof.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the carbon nano tube modified polyurethane polishing pad material and the preparation method thereof comprise the following components:
polyurethane synthetic material: can be prepared by a one-step method, a semi-pre-body method and a pre-polymer method;
and (2) polymer: polyether polyols, polyester polyols and polycarbonate polyols may be selected;
isocyanate: TDI, MDI and liquefied MDI can be selected;
chain extender: MOCA, 1, 4-butanediol, ethylene glycol and diethylene glycol can be selected;
and (3) grinding materials: cerium oxide, aluminum oxide, zirconium oxide and other nonmetallic micropowder can be selected;
carbon nanotube powder: single-wall and multi-wall carbon nanotubes are selected.
Preferably, the preparation method of the carbon nano tube modified polyurethane polishing pad material comprises the following specific steps:
(S1) preparation of A component
Polyether polyol and polymer polyol are weighed, mixed and dehydrated to prepare a component A, and cooled for standby;
(S2) preparation of the B component
Mixing, heating and prepolymerizing isocyanate and polyether polyol to prepare a component B, and cooling for later use:
(S3) preparation of C component
Adding the abrasive into the coupling agent, mixing and heating to prepare a component C;
(S4) preparation of polishing pad Material
Mixing the component C and the carbon nano tube powder, then mixing the mixture with the component B, then mixing the mixture with the component A, and preparing the polishing pad material by using a die.
Preferably, the step (S1) is to prepare the component A, weigh polyether polyol and polymer polyol according to the formula proportion, then pour the mixture into a reaction kettle for mixing, heat the mixture to 110 ℃ for decompression and dehydration to 0.1%, prepare the component A, and cool the mixture to room temperature for standby.
Preferably, the step (S2) is to prepare a component B, add isocyanate and polyether polyol into a tank B according to the formula proportion, mix and stir, raise the temperature to 80 ℃, react for 2 hours, prepare the component B after the measured value of Nco reaches the standard, and cool for later use.
Preferably, the component C is prepared in the step (S3), various abrasive materials are weighed according to the formula proportion, added with a coupling agent, uniformly mixed, placed into an oven, heated to 110-120 ℃, and heated for 2 hours for standby.
Preferably, the step (S4) of preparing a polishing pad material includes the steps of:
a. the heated grinding material and the carbon nano tube powder are further mixed uniformly and put into a tank B for uniform mixing;
b. putting the prepared component A, namely polyether polyol, polymer polyol, catalyst and chain extender into a tank B, and stirring at a high speed for 10-20 seconds;
c. injecting the stirred mixture into a mould, rapidly sealing, screwing, and putting into a 110 ℃ oven for baking for 1-2 hours;
d. and after demolding, continuously heating to 110-120 ℃ for solidification, wherein the solidification time is 8-12 hours, cooling and slicing.
Compared with the prior art, the carbon nano tube modified polyurethane polishing pad material and the preparation method thereof have the following beneficial effects:
1. according to the carbon nanotube modified polyurethane polishing pad material and the preparation method thereof, the carbon nanotubes are added into the polyurethane high polymer material, so that the mechanical properties such as heat resistance, wear resistance and the like of the polymer are improved, the polymer is easy to disperse in the dispersing process, the matrix structure and the property are not easy to damage, and the service life of the polishing pad is prolonged.
2. According to the polishing pad produced by the method, the carbon nano tube powder is selected to replace part of inorganic abrasive materials to be added into the polyurethane composite material, so that various mechanical properties of the polyurethane polishing pad are greatly improved, the service life is prolonged by more than 50%, and the yield of products is improved by more than 20%.
Drawings
FIG. 1 is a schematic illustration of the process of the preparation process of the present invention.
Detailed Description
An embodiment of the carbon nanotube-modified polyurethane polishing pad material and the method for preparing the same according to the present invention will be further described below with reference to fig. 1. The carbon nanotube-modified polyurethane polishing pad material and the preparation method thereof of the present invention are not limited to the descriptions of the following examples.
Example 1:
the carbon nano tube modified polyurethane polishing pad material and the preparation method thereof comprise the following components:
polyurethane synthetic material: can be prepared by a one-step method, a semi-pre-body method and a pre-polymer method;
and (2) polymer: polyether polyols, polyester polyols and polycarbonate polyols may be selected;
isocyanate: TDI, MDI and liquefied MDI can be selected;
chain extender: MOCA, 1, 4-butanediol, ethylene glycol and diethylene glycol can be selected;
and (3) grinding materials: cerium oxide, aluminum oxide, zirconium oxide and other nonmetallic micropowder can be selected;
carbon nanotube powder: single-wall and multi-wall carbon nanotubes are selected.
The preparation method of the carbon nano tube modified polyurethane polishing pad material comprises the following specific steps:
(S1) preparation of A component
The polyether polyol and the polymer polyol are weighed according to the formula proportion, poured into a reaction kettle for mixing, heated to 110 ℃ for decompression and dehydration to 0.1%, prepared into a component A, and cooled to room temperature for standby.
(S2) preparation of the B component
Adding isocyanate and polyether polyol into a tank B according to the formula proportion, mixing and stirring, heating to 80 ℃, reacting for 2 hours, preparing a component B after the measured value of Nco reaches the standard, and cooling for later use:
(S3) preparation of C component
Weighing various abrasive materials according to the formula proportion, adding a coupling agent, uniformly mixing, putting into a baking oven, heating to 110-120 ℃, and heating for 2 hours for later use;
(S4) preparation of polishing pad Material
Preparing a polishing pad material comprising the steps of:
a. the heated grinding material and the carbon nano tube powder are further mixed uniformly and put into a tank B for uniform mixing;
b. putting the prepared component A, namely polyether polyol, polymer polyol, catalyst and chain extender into a tank B, and stirring at a high speed for 10-20 seconds;
c. injecting the stirred mixture into a mould, rapidly sealing, screwing, and putting into a 110 ℃ oven for baking for 1-2 hours;
d. and after demolding, continuously heating to 110-120 ℃ for solidification, wherein the solidification time is 8-12 hours, cooling and slicing.
Example 2:
the carbon nano tube modified polyurethane polishing pad material and the preparation method thereof comprise the following components:
polyurethane synthetic material: can be prepared by a one-step method, a semi-pre-body method and a pre-polymer method;
and (2) polymer: polyether polyols, polyester polyols and polycarbonate polyols may be selected;
isocyanate: TDI, MDI and liquefied MDI can be selected;
chain extender: MOCA, 1, 4-butanediol, ethylene glycol and diethylene glycol can be selected;
and (3) grinding materials: cerium oxide, aluminum oxide, zirconium oxide and other nonmetallic micropowder can be selected;
and (3) graphene powder.
The preparation method of the carbon nano tube modified polyurethane polishing pad material comprises the following specific steps:
(S1) preparation of A component
The polyether polyol and the polymer polyol are weighed according to the formula proportion, poured into a reaction kettle for mixing, heated to 110 ℃ for decompression and dehydration to 0.1%, prepared into a component A, and cooled to room temperature for standby.
(S2) preparation of the B component
Adding isocyanate and polyether polyol into a tank B according to the formula proportion, mixing and stirring, heating to 80 ℃, reacting for 2 hours, preparing a component B after the measured value of Nco reaches the standard, and cooling for later use:
(S3) preparation of C component
Weighing various abrasive materials according to the formula proportion, adding a coupling agent, uniformly mixing, putting into a baking oven, heating to 110-120 ℃, and heating for 2 hours for later use;
(S4) preparation of polishing pad Material
Preparing a polishing pad material comprising the steps of:
a. the heated grinding material and the carbon nano tube powder are further mixed uniformly and put into a tank B for uniform mixing;
b. putting the prepared component A, namely polyether polyol, polymer polyol, catalyst and chain extender into a tank B, and stirring at a high speed for 10-20 seconds;
c. injecting the stirred mixture into a mould, rapidly sealing, screwing, and putting into a 110 ℃ oven for baking for 1-2 hours;
d. and after demolding, continuously heating to 110-120 ℃ for solidification, wherein the solidification time is 8-12 hours, cooling and slicing.
When the graphene powder is used, the cost of production is increased due to the high price of the graphene powder.
Example 3:
the carbon nano tube modified polyurethane polishing pad material and the preparation method thereof comprise the following components:
polyurethane synthetic material: can be prepared by a one-step method, a semi-pre-body method and a pre-polymer method;
and (2) polymer: polyether polyols, polyester polyols and polycarbonate polyols may be selected;
isocyanate: TDI, MDI and liquefied MDI can be selected;
chain extender: MOCA, 1, 4-butanediol, ethylene glycol and diethylene glycol can be selected;
and (3) grinding materials: cerium oxide, aluminum oxide, zirconium oxide and other nonmetallic micropowder can be selected;
carbon fiber powder.
The preparation method of the carbon nano tube modified polyurethane polishing pad material comprises the following specific steps:
(S1) preparation of A component
The polyether polyol and the polymer polyol are weighed according to the formula proportion, poured into a reaction kettle for mixing, heated to 110 ℃ for decompression and dehydration to 0.1%, prepared into a component A, and cooled to room temperature for standby.
(S2) preparation of the B component
Adding isocyanate and polyether polyol into a tank B according to the formula proportion, mixing and stirring, heating to 80 ℃, reacting for 2 hours, preparing a component B after the measured value of Nco reaches the standard, and cooling for later use:
(S3) preparation of C component
Weighing various abrasive materials according to the formula proportion, adding a coupling agent, uniformly mixing, putting into a baking oven, heating to 110-120 ℃, and heating for 2 hours for later use;
(S4) preparation of polishing pad Material
Preparing a polishing pad material comprising the steps of:
a. the heated grinding material and the carbon nano tube powder are further mixed uniformly and put into a tank B for uniform mixing;
b. putting the prepared component A, namely polyether polyol, polymer polyol, catalyst and chain extender into a tank B, and stirring at a high speed for 10-20 seconds;
c. injecting the stirred mixture into a mould, rapidly sealing, screwing, and putting into a 110 ℃ oven for baking for 1-2 hours;
d. and after demolding, continuously heating to 110-120 ℃ for solidification, wherein the solidification time is 8-12 hours, cooling and slicing.
When the carbon fiber powder is used, the polishing pad prepared by the carbon fiber powder has a remarkable effect which is not as good as that prepared by the carbon nanotube powder.
According to the carbon nanotube modified polyurethane polishing pad material and the preparation method thereof, the carbon nanotubes are added into the polyurethane high polymer material, so that the mechanical properties such as heat resistance, wear resistance and the like of the polymer are improved, the polymer is easy to disperse in the dispersing process, the matrix structure and the property are not easy to damage, and the service life of the polishing pad is prolonged.
According to the polishing pad produced by the method, the carbon nano tube powder is selected to replace part of inorganic abrasive materials to be added into the polyurethane composite material, so that various mechanical properties of the polyurethane polishing pad are greatly improved, the service life is prolonged by more than 50%, and the yield of products is improved by more than 20%.
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.

Claims (6)

1. The carbon nano tube modified polyurethane polishing pad material is characterized by comprising the following components:
polyurethane synthetic material: can be prepared by a one-step method, a semi-pre-body method and a pre-polymer method;
and (2) polymer: polyether polyols, polyester polyols and polycarbonate polyols may be selected;
isocyanate: TDI, MDI and liquefied MDI can be selected;
chain extender: MOCA, 1, 4-butanediol, ethylene glycol and diethylene glycol can be selected;
and (3) grinding materials: cerium oxide, aluminum oxide, zirconium oxide and other nonmetallic micropowder can be selected;
carbon nanotube powder: single-wall and multi-wall carbon nanotubes are selected.
2. The method for preparing the carbon nanotube-modified polyurethane polishing pad material according to claim 1, wherein: the method comprises the following specific steps:
(S1) preparation of A component
Polyether polyol and polymer polyol are weighed, mixed and dehydrated to prepare a component A, and cooled for standby;
(S2) preparation of the B component
Mixing, heating and prepolymerizing isocyanate and polyether polyol to prepare a component B, and cooling for later use:
(S3) preparation of C component
Adding the abrasive into the coupling agent, mixing and heating to prepare a component C;
(S4) preparation of polishing pad Material
Mixing the component C and the carbon nano tube powder, then mixing the mixture with the component B, then mixing the mixture with the component A, and preparing the polishing pad material by using a die.
3. The method for preparing the carbon nanotube-modified polyurethane polishing pad material according to claim 2, wherein: and (S1) preparing a component A, weighing polyether polyol and polymer polyol according to the formula proportion, pouring the polyether polyol and the polymer polyol into a reaction kettle for mixing, heating to 110 ℃, carrying out reduced pressure dehydration to 0.1%, preparing the component A, and cooling to room temperature for standby.
4. The method for preparing the carbon nanotube-modified polyurethane polishing pad material according to claim 2, wherein: and (S2) preparing a component B, adding isocyanate and polyether polyol into a tank B according to the formula proportion, mixing and stirring, heating to 80 ℃, reacting for 2 hours, and preparing the component B after the measured value of Nco reaches the standard, and cooling for later use.
5. The method for preparing the carbon nanotube-modified polyurethane polishing pad material according to claim 2, wherein: and (3) preparing a component C, weighing various abrasive materials according to the formula proportion, adding a coupling agent, uniformly mixing, putting into a baking oven, heating to 110-120 ℃, and heating and baking for 2 hours for later use.
6. The method for preparing the carbon nanotube-modified polyurethane polishing pad material according to claim 2, wherein: the step (S4) of preparing a polishing pad material includes the steps of:
a. the heated grinding material and the carbon nano tube powder are further mixed uniformly and put into a tank B for uniform mixing;
b. putting the prepared component A, namely polyether polyol, polymer polyol, catalyst and chain extender into a tank B, and stirring at a high speed for 10-20 seconds;
c. injecting the stirred mixture into a mould, rapidly sealing, screwing, and putting into a 110 ℃ oven for baking for 1-2 hours;
d. and after demolding, continuously heating to 110-120 ℃ for solidification, wherein the solidification time is 8-12 hours, cooling and slicing.
CN202211395992.3A 2022-11-09 2022-11-09 Carbon nano tube modified polyurethane polishing pad material and preparation method thereof Pending CN116003726A (en)

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Application Number Priority Date Filing Date Title
CN202211395992.3A CN116003726A (en) 2022-11-09 2022-11-09 Carbon nano tube modified polyurethane polishing pad material and preparation method thereof

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117024701A (en) * 2023-08-14 2023-11-10 旭川化学(苏州)有限公司 Polyurethane foaming polishing material and preparation method and application thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117024701A (en) * 2023-08-14 2023-11-10 旭川化学(苏州)有限公司 Polyurethane foaming polishing material and preparation method and application thereof
CN117024701B (en) * 2023-08-14 2024-04-09 旭川化学(苏州)有限公司 Polyurethane foaming polishing material and preparation method and application thereof

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