CN101482937A - 一种薄型非接触模块的制造方法 - Google Patents

一种薄型非接触模块的制造方法 Download PDF

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CN101482937A
CN101482937A CNA2008102032336A CN200810203233A CN101482937A CN 101482937 A CN101482937 A CN 101482937A CN A2008102032336 A CNA2008102032336 A CN A2008102032336A CN 200810203233 A CN200810203233 A CN 200810203233A CN 101482937 A CN101482937 A CN 101482937A
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陆美华
叶佩华
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Lianxin Shanghai Microelectronics Technology Co ltd
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SHANGHAI ETERNAL INFORMATION TECHNOLOGY Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48095Kinked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/4847Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
    • H01L2224/48471Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area being a ball bond, i.e. wedge-to-ball, reverse stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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Abstract

本发明涉及一种薄型非接触模块的制造方法,其特征在于,其方法为:采用将硅圆片均匀减薄到150μm厚度以下的晶圆减薄IC卡,采用厚度60um超薄型带材和精密冲压模具制作高性能超薄载带,铜镍合金载带用环氧胶粘接IC卡,IC卡通过金线连接铜镍合金载带,应用超薄硅圆片的划片技术来进行芯片的切割,用模塑料注塑封装而成。本发明的优点是微型化、薄型化、高频化、片式化和低功耗。

Description

一种薄型非接触模块的制造方法
技术领域
本发明涉及一种薄型非接触模块的制造方法,薄型非接触模块用于射频卡、异型卡、标签、筹码等。属于薄型非接触模块制造方法技术领域。
背景技术
各类智能标签,或称射频卡、应答器等,提供超薄型的模块封装,用户可以根据不同应用环境和需求用该模块制成卡片、标签或其他的异型标签等各类智能标签,为非接触银行卡、电子护照、会展门票、地铁单程票等身份识别及其他运输、物流等管理应用提供高稳定性、高可靠性的核心制作。到目前为止,模块应用最多的是电信行业,如电话卡、SIM卡。几年前就开始生产的社保卡、交通卡都是政府支持项目。非接触二代证模块也是沿用近年的交通卡MOA2形式的模块。
可以预见,未来的市场需要智能卡向薄型化、射频式、高可靠、低成本方向发展,智能标签符合上述的发展方向。近几年它已触及到交通、防伪、物流、身份识别等领域,具体的应用产品已渐露头脚,如新一代的薄型电话卡、薄型地铁单程票、航空包裹识别、汽车防盗、无线支付、移动商务、珠宝饰品防伪及文凭、证件防伪等。尤其与上海交通一卡通的非接触卡相配套的薄型单程票,其未来5-10年内的市场增长率超过了100%。
通常的IC卡是把含有非挥发存储单元NVM或集成有微控制器MCU等的IC卡模块嵌装于塑料基片而成,IC卡模块的制造工序为:首先要对硅晶圆片进行减薄,经划片分离后,将芯片粘接载带上进行引线键合,最后进行包封工序以形成模块产品,产品厚度为400微米,在集成电路封装行业,IC模塑封装厚度极限为500微米,要生产到290~300μm的厚度,目前国内还无法生产。
发明内容
本发明的目的是提供一种能将非接触IC智能卡超薄型模块的厚度控制在290~300μm的薄型非接触模块的制造方法。
为实现以上目的,本发明的技术方案是提供一种薄型非接触模块的制造方法,其特征在于,其方法为:
第一步,采用东京精密的减薄设备将700微米—800微米标准硅圆片均匀减薄到150微米厚度以下的晶圆减薄集成电路芯片;
第二步,将应晶圆减薄集成电路芯片在迪斯科设备上机械切割,用厚度约100微米的塑料薄膜贴上晶圆减薄集成电路芯片,高速、精准地划开每个芯片,换穿深度170微米—190微米,薄膜划入1/3的深度,以便芯片取下;
第三步,采用厚度60微米超薄型带材使用德国贺利斯公司的精密冲压模具制作高性能超薄载带;用伊塞克3010芯片焊接设备,铜镍合金载带上用非导电环氧胶粘接已经划开的集成电路芯片;其中胶体厚度小于10微米,通过170℃—190℃,4分钟—6分钟的烘烤固化,使芯片牢固地焊接在铜镍合金载带上;
第四步,在伊塞克3088设备,用加热、超声加压烧制一个金球在铜镍合金载带上,通过金线连接芯片上的焊点,完成金线球焊,金线的弧高不超过45微米,拉力大于6克;
第五步,在菲科设备上,用日东模塑料,在注塑温度170℃—190℃,固化时间40秒—60秒,合模压力240千牛,注塑压力7兆帕,完成厚度为230微米外形为4.80毫米×5.10毫米的封装体。
本发明通过对模块两端的金属片上焊接规定直径、规定长度的金属线作为天线,并根据卡的外形将天线绕制成一定的形状,将模块、天线一起埋入卡片的材料中,最后封合而成一个具有射频感应的非接触卡。
本发明是在普通非接触卡模块制作的基础上通过技术研发制造出来,本产品厚度达到300微米以下,本发明具有以下重点解决的问题:
1.采用“金丝超低弧倒焊技术”、将金丝弧高控制在30—45微米,并保证超薄模塑成品率和可靠性。
2.采用“超薄层模塑技术”,使超薄型模块的总体厚度小于300微米,其中塑模凸起厚度达到230微米,目前为填补国内空白、达到世界先进水平。
本发明的优点是微型化、薄型化、高频化、片式化和低功耗。
附图说明
图1为一种薄型非接触模块的制造方法示意图。
具体实施方式
以下结合实施例对本发明作进一步说明。
实施例
如图1所示,为一种薄型非接触模块的制造方法示意图,一种薄型非接触模块的制造方法,其特征在于,其方法为:
第一步,采用东京精密的减薄设备将700微米—800微米标准硅圆片均匀减薄到150微米厚度以下的晶圆减薄集成电路芯片3;
第二步,将应晶圆减薄集成电路芯片3在迪斯科设备上机械切割,用厚度约100微米的塑料薄膜贴上晶圆减薄集成电路芯片3,高速、精准地划开每个芯片,换穿深度180微米,薄膜划入1/3的深度,以便芯片取下;
第三步,采用厚度60微米超薄型带材使用德国贺利斯公司的精密冲压模具制作高性能超薄载带1;用伊塞克3010芯片焊接设备,铜镍合金载带1上用非导电环氧胶2粘接已经划开的集成电路芯片3;其中胶体厚度小于10微米,通过180℃,5分钟的烘烤固化,使芯片牢固地焊接在铜镍合金载带1上;
第四步,在伊塞克3088设备,用加热、超声加压烧制一个金球在铜镍合金载带1上,通过金线4连接芯片3上的焊点,完成金线球焊,金线的弧高不超过45微米,拉力大于6克;
第五步,在菲科设备上,用日东模塑料5,在注塑温度180℃,固化时间50秒,合模压力240千牛,注塑压力7兆帕,完成厚度为230微米外形为4.80毫米×5.10毫米的封装体。
本发明的薄型非接触模块,其总厚度低于300微米(含引线框架),集成电路芯片设计减薄到150微米,条带引线框架的厚度设计为60微米,利用倒焊工艺控制金丝弧高在45微米以下,加上芯片的粘接胶厚度不超过10微米,通过计算很容易可以得出最后的模块总厚度可达300微米以下,设计模塑层厚度为80微米。
本发明的技术性能及指标如下:
技术标准:符合ISO14443  ISO10536  ISO15693;;
外形尺寸:4.8*5.1(mm2),厚0.30±0.01mm;
工作温度:-10℃-+50℃;
存贮温度:-40℃-+80℃;
湿度:(5-95)%;
模块输出端电容在中心值范围内误差小于10%;
处理时间(典型):<100ms;
写入次数:>100,000次;
数据保存:10年。

Claims (1)

1.一种薄型非接触模块的制造方法,其特征在于,其方法为:
第一步,采用东京精密的减薄设备将700微米—800微米标准硅圆片均匀减薄到150微米厚度以下的晶圆减薄集成电路芯片(3);
第二步,将应晶圆减薄集成电路芯片(3)在迪斯科设备上机械切割,用厚度约100微米的塑料薄膜贴上晶圆减薄集成电路芯片(3),高速、精准地划开每个芯片,换穿深度170微米—190微米,薄膜划入1/3的深度,以便芯片取下;
第三步,采用厚度60微米超薄型带材使用德国贺利斯公司的精密冲压模具制作高性能超薄载带(1);用伊塞克3010芯片焊接设备,铜镍合金载带(1)上用非导电环氧胶(2)粘接已经划开的集成电路芯片(3);其中胶体厚度小于10微米,通过170℃—190℃,4分钟—6分钟的烘烤固化,使芯片牢固地焊接在铜镍合金载带(1)上;
第四步,在伊塞克3088设备,用加热、超声加压烧制一个金球在铜镍合金载带(1)上,通过金线(4)连接芯片(3)上的焊点,完成金线球焊,金线的弧高不超过45微米,拉力大于6克;
第五步,在菲科设备上,用日东模塑料(5),在注塑温度170℃—190℃,固化时间40秒—60秒,合模压力240千牛,注塑压力7兆帕,完成厚度为230微米外形为4.80毫米×5.10毫米的封装体。
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102074534B (zh) * 2009-11-24 2013-05-29 上海长丰智能卡有限公司 一种微型pcb射频模块及其封装方法
CN108172552A (zh) * 2018-01-09 2018-06-15 木林森股份有限公司 一种支架式电子标签的封装结构及其封装方法
CN110620047A (zh) * 2019-09-18 2019-12-27 纽威仕微电子(无锡)有限公司 一种基于陶瓷基板的小尺寸集成电路封装工艺
CN111863634A (zh) * 2019-04-28 2020-10-30 无锡华润安盛科技有限公司 超薄封装结构的制作方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1203447C (zh) * 2002-05-30 2005-05-25 上海长丰智能卡有限公司 一种非接触智能标签、筹码的制造方法
US7727854B2 (en) * 2003-12-19 2010-06-01 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102074534B (zh) * 2009-11-24 2013-05-29 上海长丰智能卡有限公司 一种微型pcb射频模块及其封装方法
CN108172552A (zh) * 2018-01-09 2018-06-15 木林森股份有限公司 一种支架式电子标签的封装结构及其封装方法
CN111863634A (zh) * 2019-04-28 2020-10-30 无锡华润安盛科技有限公司 超薄封装结构的制作方法
CN111863634B (zh) * 2019-04-28 2023-10-27 无锡华润安盛科技有限公司 超薄封装结构的制作方法
CN110620047A (zh) * 2019-09-18 2019-12-27 纽威仕微电子(无锡)有限公司 一种基于陶瓷基板的小尺寸集成电路封装工艺

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Address after: Room 301, Room 3, Building 2, No. 3576 Zhaolou Road, Minhang District, Shanghai, 201112

Patentee after: Lianxin (Shanghai) Microelectronics Technology Co.,Ltd.

Country or region after: China

Address before: Room 301, Room 3, Building 2, No. 3576 Zhaolou Road, Minhang District, Shanghai, 201112

Patentee before: Shanghai Inore Information Electronics Co.,Ltd.

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